Micromechanical gyroscope sensitive structure with isolation frame

Abstract

The invention discloses a micromechanical gyroscope sensitive structure with an isolation frame, and relates to the technical field of gyroscopes, the micromechanical gyroscope sensitive structure comprises an isolation frame, a driving assembly, a composite mass assembly and a detection assembly; the isolation frame comprises two first frames and a plurality of second frames, the driving assembly comprises a driving frame, a driving mechanism and a first detection mechanism, the driving mechanism drives the driving frame to do simple harmonic motion in the first direction, and the first detection mechanism detects the motion state of the driving frame; the composite mass assembly performs simple harmonic motion in a first direction along with the driving frame and performs simple harmonic motion in a second direction under the action of rotation around a central shaft; the detection assembly comprises a detection frame and a second detection mechanism, the detection frame performs simple harmonic motion along with the composite mass assembly in the second direction, and displacement signals are detected by the second detection mechanism so that the rotation angular speed around the center shaft can be obtained. The micromechanical gyroscope sensitive structure with the isolation frame provided by the invention can inhibit external stress and improve measurement precision and stability.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and in particular to a micromechanical gyroscope sensing structure with an isolation frame. Background Technology

[0002] Gyroscopes are core sensing devices in inertial navigation systems, platform stabilization systems, and other applications, and are widely used in military weapons, space exploration, and other fields, showing extremely broad application prospects. However, existing MEMS gyroscopes still have some limitations in performance, especially in high-precision applications. The sensitive structure of the gyroscope is easily affected by external vibrations, temperature changes, and packaging stress, which reduces the measurement accuracy and stability of the gyroscope and causes interference. Summary of the Invention

[0003] The purpose of this invention is to provide a micromechanical gyroscope sensing structure with an isolation frame to solve the problems existing in the prior art and improve measurement accuracy and stability.

[0004] To achieve the above objectives, the present invention provides the following solution: This invention provides a micromechanical gyroscope sensing structure with an isolation frame, comprising a body, an isolation frame, a driving component, a composite mass component, and a detection component. The isolation frame includes two first frames and multiple second frames. The length direction of the first frames is parallel to a first direction, and the length direction of the second frames is parallel to a second direction. The first and second directions are perpendicular to each other and both perpendicular to the central axis of the body. The multiple second frames are arranged side-by-side along the first direction and positioned between two first frames. Each second frame is connected to two first frames and is anchored to a substrate. The first frames have degrees of freedom in the first direction. The driving component is positioned between the first and second frames and includes a driving frame, a driving mechanism, and a first detection mechanism. The driving mechanism and the first detection mechanism are both disposed on the driving frame and anchored to the substrate. The driving frame is connected to both first frames and has degrees of freedom in the first direction. Degrees of freedom; both the driving mechanism and the first detection mechanism are used to connect to external electrical signals. The driving mechanism can drive the driving frame to move harmonically in the first direction, and the first detection mechanism can detect the motion state of the driving frame. A composite mass assembly is connected to the driving frame and has degrees of freedom in the first and second directions. The composite mass assembly can move harmonically with the driving frame in the first direction and can generate a Coriolis force in the second direction under the rotational action around the central axis, causing the composite mass assembly to move harmonically in the second direction. The detection assembly includes a detection frame and a second detection mechanism. The detection frame is connected to the composite mass assembly and a detection anchor point on the base. The second detection mechanism is connected to the detection frame and the base. The detection frame has degrees of freedom in the second direction and can move harmonically with the composite mass assembly in the second direction. The displacement signal can be detected by the second detection mechanism to obtain the rotational angular velocity around the central axis.

[0005] Preferably, there are three second frames and two driving frames. A driving frame is provided between each adjacent second frame. Each driving frame is provided with a driving mechanism and a first detection mechanism. The driving mechanism can drive the two driving frames to perform simple harmonic motion with opposite phases and the same amplitude in the first direction. The first detection mechanism can detect the motion state of the corresponding driving frame.

[0006] Preferably, the composite mass assembly includes two composite mass blocks, which are respectively connected to the two drive frames; both composite mass blocks have degrees of freedom in the first direction and the second direction, and the two composite mass blocks can perform simple harmonic motion with opposite phase and the same amplitude in the first direction with the two drive frames, and can perform simple harmonic motion with the same amplitude and opposite phase in the second direction under the action of the Coriolis force generated by the rotation about the central axis.

[0007] Preferably, each of the composite mass blocks is provided with a detection frame, and the two detection frames are respectively connected to the two detection anchor points on the substrate. Each detection frame is provided with the second detection mechanism. The two detection frames can respectively perform simple harmonic motion with the same amplitude and opposite phase in the second direction with the two composite mass blocks.

[0008] Preferably, the driving mechanism includes multiple sets of driving comb teeth, the first detection mechanism includes multiple sets of first detection comb teeth, each of the four corners of the driving frame is provided with a driving comb tooth, and each of the composite mass blocks is provided with a first detection comb tooth at the center of the driving frame on both sides along the first direction; the frame anchor point of each first detection comb tooth and the substrate, the frame anchor point of the second frame and the substrate, and the detection anchor point are located at the middle position of the body and distributed along the first direction.

[0009] Preferably, the second detection mechanism includes multiple sets of second detection combs, and each detection frame has a second detection comb on both sides of the detection anchor point along the second direction.

[0010] Preferably, each of the second frames is connected to the first frame at both ends along the second direction via a first elastic member; the driving frame is connected to the first frame at both ends along the second direction via a second elastic member; the composite mass block is connected to the driving frame at both ends along the second direction via a third elastic member; the detection frame is connected to the composite mass block at both ends along the first direction via a fourth elastic member; and a fifth elastic member is provided on both sides of the detection frame along the first direction connecting to the detection anchor point, the fifth elastic member being connected to the detection frame and the detection anchor point; the first elastic member, the second elastic member, and the fourth elastic member all have a degree of freedom in the first direction, and the third elastic member and the fifth elastic member all have a degree of freedom in the second direction.

[0011] Preferably, the first elastic element, the second elastic element, the third elastic element, the fourth elastic element, and the fifth elastic element are all configured as elastic beams.

[0012] Preferably, the body is symmetrical about both the central cross-section passing through the central axis and parallel to the first direction and the central cross-section parallel to the second direction.

[0013] Preferably, the isolation frame is configured as a rigid frame.

[0014] The present invention achieves the following technical effects compared to the prior art: The micromechanical gyroscope sensing structure with an isolation frame provided by this invention connects the first frame of the isolation frame to the driving frame of the driving component, giving the driving frame a degree of freedom in the first direction, i.e., the x-axis, and connecting the second frame to the substrate. This effectively suppresses the influence of residual stress on key parts of the micromechanical gyroscope sensing structure, including thermal stress and installation stress. The isolation frame design increases the resonant frequency and corresponding equivalent stiffness of the non-working mode of the sensing structure. According to Hooke's law, this reduces displacement in the non-working direction, thus effectively mitigating the effects of external vibrations and impacts. It eliminates the need for a coupling beam design between the two driving frames and effectively separates the in-phase and out-of-phase vibration modes of the driving frame along the first direction, i.e., the x-axis, effectively suppressing common-mode interference factors from the outside world, thereby improving measurement accuracy and stability. Specifically, by applying an alternating voltage to the drive mechanism, the drive frame can drive the composite mass component to move harmonically along the x-direction. The motion state of the drive frame is detected by the first detection mechanism so that the parameters of the alternating voltage can be adjusted in a timely manner. In addition, when the main body inputs an angular velocity, the composite mass component generates a Coriolis force under the rotation around the central axis. The composite mass component can drive the detection frame to move harmonicly in the second direction, i.e., the y-direction. The displacement signal is detected by the second detection mechanism to achieve the purpose of detecting the z-axis angular velocity. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram illustrating the isolation frame of the micromechanical gyroscope sensing structure with an isolation frame provided in Embodiment 1 of the present invention. Figure 2 This is a schematic diagram illustrating the drive assembly of the micromechanical gyroscope sensing structure with an isolation frame provided in Embodiment 1 of the present invention. Figure 3 This is a schematic diagram illustrating the composite mass component with an isolation frame and a micromechanical gyroscope sensing structure provided in Embodiment 1 of the present invention. Figure 4 This is a schematic diagram illustrating the detection component of the micromechanical gyroscope sensing structure with an isolation frame provided in Embodiment 1 of the present invention.

[0017] In the diagram: 111-First frame; 112-Second frame; 113-First elastic element; 211-Drive frame; 212-Drive comb teeth; 213-First detection comb teeth; 214-Second elastic element; 311-Composite mass block; 312-Third elastic element; 313-Fourth elastic element; 411-Detection frame; 412-Second detection comb teeth; 413-Fifth elastic element; 414-Detection anchor point; 511-Frame anchor point. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] The purpose of this invention is to provide a micromechanical gyroscope sensing structure with an isolation frame to solve the problems existing in the prior art and improve measurement accuracy and stability.

[0020] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Example 1 This embodiment provides a micromechanical gyroscope sensing structure with an isolation frame. Please refer to [link to relevant documentation]. Figures 1-4The system includes a main body, which comprises an isolation frame, a drive assembly, a composite mass assembly, and a detection assembly. The isolation frame includes two first frames 111 and multiple second frames 112. The length direction of the first frames 111 is parallel to a first direction, and the length direction of the second frames 112 is parallel to a second direction. The first and second directions are perpendicular to each other and both perpendicular to the central axis of the main body. The multiple second frames 112 are arranged side by side along the first direction and placed between the two first frames 111. Each second frame 112 is connected to the two first frames 111 and is used to anchor to the base. The first frames 111 have a degree of freedom in the first direction. The drive assembly is placed between the first frames 111 and the second frames 112 and includes a drive frame 211, a drive mechanism, and a first detection mechanism. The first detection mechanism is disposed on the drive frame 211 and is used to anchor to the base. The drive frame 211 is connected to both first frames 111 and has a degree of freedom in the first direction. Both the driving mechanism and the first detection mechanism are used to connect to external electrical signals. The driving mechanism can drive the driving frame 211 to move in a simple harmonic motion in the first direction, and the first detection mechanism can detect the motion state of the driving frame 211. The composite mass assembly is connected to the driving frame 211 and has degrees of freedom in the first and second directions. The composite mass assembly can move in a simple harmonic motion in the first direction with the driving frame 211 and can generate a Coriolis force in the second direction under the rotational action around the central axis, so that the composite mass assembly moves in a simple harmonic motion in the second direction. The detection assembly includes a detection frame 411 and a second detection mechanism. The detection frame 411 is connected to the detection anchor point 414 on the base and the composite mass assembly. The second detection mechanism is connected to the detection frame 411 and the base. The detection frame 411 has degrees of freedom in the second direction and can move in a simple harmonic motion in the second direction with the composite mass assembly. The displacement signal can be detected by the second detection mechanism to obtain the rotational angular velocity around the central axis.

[0022] By setting up an isolation frame, the first frame 111 of the isolation frame is connected to the drive frame 211 of the drive assembly, and the drive frame 211 has a degree of freedom in the first direction, i.e., the x-axis. The second frame 112 is connected to the silicon substrate or glass substrate. This eliminates the need for a coupling beam design in the drive frame 211 and effectively suppresses the influence of residual stress on key parts of the sensitive structure of the micromechanical gyroscope, including thermal stress and installation stress. The isolation frame design increases the resonant frequency and corresponding equivalent stiffness of the non-working mode of the sensitive structure. According to Hooke's law, this reduces the displacement in the non-working direction, thus effectively mitigating the influence of external vibration and impact. It eliminates the need for a coupling beam design in the two drive frames and effectively separates the in-phase and out-of-phase vibration modes of the drive frame 211 along the first direction, i.e., the x-axis. This effectively suppresses common-mode interference factors from the outside world on the drive frame 211, thereby improving measurement accuracy and stability. Specifically, by applying an alternating voltage to the drive mechanism, the drive frame 211 can drive the composite mass component to move harmonically along the x-direction. The motion state of the drive frame 211 is detected by the first detection mechanism so as to provide timely feedback and adjust the parameters of the alternating voltage. In addition, when the main body inputs an angular velocity, the composite mass component generates a Coriolis force in the second direction, i.e., the y-direction, under the rotation of the central axis. The composite mass component can drive the detection frame 411 to move harmonicly in the y-direction. The displacement signal is detected by the second detection mechanism to achieve the purpose of detecting the z-axis angular velocity.

[0023] In the optional scheme of this embodiment, more preferably, three second frames 112 are set and two driving frames 211 are set. A driving frame 211 is respectively set between adjacent second frames 112. Each driving frame 211 is provided with a driving mechanism and a first detection mechanism. The driving mechanism can drive the two driving frames 211 to perform simple harmonic motion with opposite phases and the same amplitude in the first direction. The first detection mechanism can detect the motion state of the corresponding driving frame 211.

[0024] Specifically, by setting two driving frames 211 to perform simple harmonic motion in opposite directions (opposite phase), momentum conservation is achieved, resulting in a higher mechanical quality factor. This makes the frame "insensitive" to external linear vibrations (common-mode interference), improves the signal-to-noise ratio, and achieves high stability and high anti-interference capability. Furthermore, in order to reduce the bending of the first frame 111 in the first direction due to the span, three second frames 112 are set to support the first frame 111.

[0025] In an optional embodiment, more preferably, the composite mass component includes two composite mass blocks 311, which are respectively connected to two drive frames 211. Both composite mass blocks 311 have degrees of freedom in the first direction and the second direction. The two composite mass blocks 311 can perform simple harmonic motion with opposite phase and the same amplitude in the first direction with the two drive frames 211, and can perform simple harmonic motion with the same amplitude and opposite phase in the second direction under the action of the Coriolis force generated by the rotation around the central axis.

[0026] By setting two composite mass blocks 311 in conjunction with the drive frame 211 and the detection frame 411, the Coriolis force generated by the speed of the drive frame 211 can be sensed and transmitted to the two detection frames 411, causing the two detection frames 411 to move in opposite phases. At the same time, the two composite mass blocks 311, along with their corresponding elastic elements, decouple the movement of the drive frame 211 from the movement of the detection frame 411, forming a double decoupling structure. That is, the movement state of the drive frame 211 does not interfere with the movement state of the detection frame 411, and the movement state of the detection frame 411 does not interfere with the movement state of the drive frame 211, thereby minimizing harmful mechanical crosstalk, reducing error signals, and improving the signal-to-noise ratio.

[0027] In the optional scheme of this embodiment, more preferably, each composite mass block 311 is provided with a detection frame 411, the two detection frames 411 are respectively connected to two detection anchor points 414 on the base, and each detection frame 411 is provided with a second detection mechanism; the two detection frames 411 can respectively follow the two composite mass blocks 311 to perform simple harmonic motion with the same amplitude and opposite phase in the second direction.

[0028] By setting up two detection frames 411, which are used in conjunction with two driving frames 211 and two composite mass blocks 311, differential detection is achieved, which greatly suppresses common-mode interference, enhances useful signals, improves sensitivity, suppresses the effects of acceleration and vibration, and ensures high precision, high stability and strong anti-interference capability.

[0029] In the optional scheme of this embodiment, more preferably, the driving mechanism includes multiple sets of driving comb teeth 212, the first detection mechanism includes multiple sets of first detection comb teeth 213, each of the four corners of each driving frame 211 is provided with a driving comb tooth 212, and each composite mass block 311 is provided with a first detection comb tooth 213 at the center of the two driving frames 211 on both sides in the first direction; each first detection comb tooth 213 and the frame anchor point 511 of the base, the frame anchor point 511 of the second frame 112 and the base, and the detection anchor point 414 are located in the middle of the body and distributed along the first direction.

[0030] The multiple drive comb teeth 212 are configured to stably drive the drive frame 211. The AC voltages of the drive comb teeth 212 on the left drive frame 211 and the drive comb teeth 212 on the right drive frame 211 are equal in magnitude but opposite in phase, so that the left and right drive frames 211 perform simple harmonic motion with opposite phases and the same amplitude. The four sets of first detection comb teeth 213 are arranged in the middle position of the drive frame 211 and fixed to the silicon substrate or glass substrate through the frame anchor point 511. They can convert the displacement signal of the drive frame 211 into a capacitance signal for detecting the motion state of the drive frame 211.

[0031] In the optional scheme of this embodiment, more preferably, the second detection mechanism includes multiple sets of second detection combs 412, and each detection frame 411 is provided with a second detection comb 412 on both sides of the detection anchor point 414 along the second direction.

[0032] By setting multiple sets of second detection combs 412, the detection sensitivity can be improved, and the displacement signal of the detection frame 411 can be converted into a capacitance signal to achieve the purpose of detecting the z-axis angular velocity.

[0033] Each group of driving comb teeth 212, each group of first detection comb teeth 213, and each group of second detection comb teeth 412 includes fixed comb teeth and moving comb teeth arranged with staggered intervals. The moving comb teeth are rigidly connected to the driving frame 211 or the detection frame 411. Each group of fixed comb teeth has its own anchor point. The fixed comb teeth are rigidly connected to the base through the anchor point. By changing the capacitance value between the moving comb teeth and the fixed comb teeth through movement, driving or detection can be achieved.

[0034] In an optional embodiment, more preferably, both ends of each second frame 112 along the second direction are connected to the first frame 111 via a first elastic member 113; both ends of the drive frame 211 along the second direction are connected to the first frame 111 via a second elastic member 214; both ends of the composite mass block 311 along the second direction are connected to the drive frame 211 via a third elastic member 312; both ends of the detection frame 411 along the first direction are connected to the composite mass block 311 via a fourth elastic member 313; and both sides of the detection frame 411 along the first direction connected to the detection anchor point 414 are provided with a fifth elastic member 413, which is connected to the detection frame 411 and the detection anchor point 414. The first elastic member 113, the second elastic member 214, and the fourth elastic member 313 all have a degree of freedom in the first direction, and the third elastic member 312 and the fifth elastic member 413 all have a degree of freedom in the second direction.

[0035] Specifically, regarding the isolation frame: the first frame 111 in the x-direction and the second frame 112 in the y-direction are connected by six first elastic elements 113, each first elastic element 113 ideally possessing only a degree of freedom in the x-direction; regarding the drive assembly: the two drive frames 211 are connected to the two first frames 111 by eight second elastic elements 214, each second elastic element 214 ideally possessing only a degree of freedom in the x-direction, and the drive frames 211 also possess only a degree of freedom in the x-direction; regarding the composite mass assembly: the two left and right composite mass blocks 311 are connected to the two drive frames 211 by eight third elastic elements 312, this... The eight third elastic elements 312 have only the y-direction degree of freedom; at the same time, the two composite mass blocks 311 on the left and right are connected to the two detection frames 411 through eight fourth elastic elements 313, and these eight third elastic elements 312 have only the x-direction degree of freedom; for the detection assembly: the two detection frames 411 on the left and right are respectively connected to the two composite mass blocks 311 through eight fourth elastic elements 313, and are also connected to the two detection anchor points 414 through four fifth elastic elements 413. The detection anchor points 414 are located on the silicon substrate or glass substrate and are used to fix the detection frame 411. The detection frame 411 has only the y-direction degree of freedom.

[0036] In the optional scheme of this embodiment, more preferably, the first elastic element 113, the second elastic element 214, the third elastic element 312, the fourth elastic element 313, and the fifth elastic element 413 are all set as elastic beams to meet the required degree of freedom. The first elastic element 113, together with the first frame 111 and the second frame 112, can effectively suppress the influence of residual stress on the key parts of the sensitive structure of the micromechanical gyroscope, including thermal stress and installation stress. The second elastic element 214, the third elastic element 312, the fourth elastic element 313, and the fifth elastic element 413, together with the drive frame 211, the composite mass 311, and the detection frame 411, form a double decoupling structure to suppress mechanical crosstalk between the drive component and the detection component, reduce errors, and improve the signal-to-noise ratio.

[0037] In the optional embodiments of this example, it is more preferably that the body is symmetrical about both the central cross-section passing through the central axis and parallel to the first direction and the central cross-section parallel to the second direction.

[0038] Among them, it is symmetrical about the x-axis and y-axis, and symmetrical about the origin center, which can effectively suppress the influence of processing errors and effectively suppress the interference of external common mode factors.

[0039] In the optional schemes of this embodiment, it is more preferably that the isolation frame is set as a rigid frame; specifically, it can be made of monocrystalline silicon or polycrystalline silicon.

[0040] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A micromechanical gyroscope sensing structure with an isolation frame, characterized in that: Includes an entity, the entity comprising: An isolation frame includes two first frames and multiple second frames. The length direction of the first frames is parallel to a first direction, and the length direction of the second frames is parallel to a second direction. The first direction and the second direction are perpendicular to each other and both are perpendicular to the central axis direction of the body. The multiple second frames are arranged side by side along the first direction and placed between the two first frames. Each second frame is connected to the two first frames and each second frame is used to anchor to the base. The first frames have degrees of freedom in the first direction. A driving component, positioned between the first frame and the second frame, includes a driving frame, a driving mechanism, and a first detection mechanism. Both the driving mechanism and the first detection mechanism are mounted on the driving frame and anchored to the base. The driving frame is connected to both first frames and has a degree of freedom in the first direction. Both the driving mechanism and the first detection mechanism are connected to external electrical signals. The driving mechanism can drive the driving frame to perform simple harmonic motion in the first direction, and the first detection mechanism can detect the motion state of the driving frame. A composite mass assembly, connected to the drive frame, has degrees of freedom in a first direction and a second direction; the composite mass assembly is capable of simple harmonic motion with the drive frame in the first direction, and can generate a Coriolis force in the second direction under rotation about the central axis, causing the composite mass assembly to perform simple harmonic motion in the second direction; and The detection component includes a detection frame and a second detection mechanism. The detection frame is connected to a detection anchor point on the composite mass component and the substrate. The second detection mechanism is connected to the detection frame and the substrate. The detection frame has a degree of freedom in the second direction and can move harmonically with the composite mass component in the second direction. The displacement signal can be detected by the second detection mechanism to obtain the rotational angular velocity about the central axis.

2. The micromechanical gyroscope sensing structure with an isolation frame according to claim 1, characterized in that: The second frame is configured as three, and the driving frame is configured as two. A driving frame is respectively arranged between adjacent second frames. Each driving frame is provided with a driving mechanism and a first detection mechanism. The driving mechanism can drive the two driving frames to perform simple harmonic motion with opposite phases and the same amplitude in the first direction. The first detection mechanism can detect the motion state of the corresponding driving frame.

3. The micromechanical gyroscope sensing structure with an isolation frame according to claim 2, characterized in that: The composite mass assembly includes two composite mass blocks, which are respectively connected to the two drive frames. The two composite mass blocks have degrees of freedom in the first direction and the second direction. The two composite mass blocks can perform simple harmonic motion with opposite phase and the same amplitude in the first direction with the two drive frames, and can perform simple harmonic motion with the same amplitude and opposite phase in the second direction under the action of the Coriolis force generated by the rotation about the central axis.

4. The micromechanical gyroscope sensing structure with an isolation frame according to claim 3, characterized in that: Each of the composite mass blocks is provided with a detection frame, and the two detection frames are respectively connected to the two detection anchor points on the substrate. Each detection frame is provided with the second detection mechanism. The two detection frames can respectively perform simple harmonic motion with the same amplitude and opposite phase in the second direction with the two composite mass blocks.

5. The micromechanical gyroscope sensing structure with an isolation frame according to claim 4, characterized in that: The driving mechanism includes multiple sets of driving comb teeth, and the first detection mechanism includes multiple sets of first detection comb teeth. Each of the four corners of each driving frame is provided with a driving comb tooth, and each of the composite mass blocks is provided with a first detection comb tooth at the center of the driving frame on both sides along the first direction. The frame anchor points of each first detection comb tooth and the substrate, the frame anchor points of the second frame and the substrate, and the detection anchor points are located at the middle position of the body and distributed along the first direction.

6. The micromechanical gyroscope sensing structure with an isolation frame according to claim 4, characterized in that: The second detection mechanism includes multiple sets of second detection combs, and each detection frame has a second detection comb on both sides of the detection anchor point along the second direction.

7. The micromechanical gyroscope sensing structure with an isolation frame according to claim 4, characterized in that: Each of the second frames is connected to the first frame at both ends along the second direction via a first elastic member. The driving frame is connected to the first frame at both ends along the second direction via a second elastic member. The composite mass block is connected to the driving frame at both ends along the second direction via a third elastic member. The detection frame is connected to the composite mass block at both ends along the first direction via a fourth elastic member. A fifth elastic member is provided on both sides of the detection frame along the first direction that connect to the detection anchor point. The fifth elastic member is connected to the detection frame and the detection anchor point. The first elastic element, the second elastic element, and the fourth elastic element all have a degree of freedom in the first direction, and the third elastic element and the fifth elastic element all have a degree of freedom in the second direction.

8. The micromechanical gyroscope sensing structure with an isolation frame according to claim 7, characterized in that: The first elastic element, the second elastic element, the third elastic element, the fourth elastic element and the fifth elastic element are all configured as elastic beams.

9. The micromechanical gyroscope sensing structure with an isolation frame according to claim 1, characterized in that: The body is symmetrical about both the central cross section passing through the central axis and parallel to the first direction and the central cross section parallel to the second direction.

10. The micromechanical gyroscope sensing structure with an isolation frame according to claim 1, characterized in that: The isolation frame is configured as a rigid frame.

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