Single-probe non-contact dielectric material testing and processing integrated system and method

Abstract

The invention belongs to a testing and processing method, and provides a single-probe non-contact dielectric material testing and processing integrated system and a single-probe non-contact dielectric material testing and processing integrated method in order to solve the technical problems of poor real-time performance and controllability and low production efficiency of the existing dielectric material testing and processing technology. Comprising a controllable objective table, a resonant cavity single probe assembly, a programmable multi-way switch and a control unit, a single epitaxial microwave resonant cavity probe is adopted as a core component, and rapid switching and regulation of the resonant cavity single probe assembly, a vector network analyzer and a program control microwave signal generation and regulation device are realized through the programmable multi-way switch. By means of the testing and processing integrated system, non-contact type dielectric constant dynamic measurement and microwave processing can be alternately completed.

Description

Technical Field

[0001] This application pertains to a testing and processing method, specifically relating to a single-probe non-contact dielectric material testing and processing integrated system and method. Background Technology

[0002] Dielectric materials face numerous limitations in both testing and fabrication. In testing, the dielectric material must first be prepared into standard samples of specific shapes and sizes. These standard samples are then placed within microwave waveguides or resonant cavities, and their dielectric constant is obtained through T / R port testing. In fabrication, processes such as mechanical cutting and laser ablation are typically employed to create dielectric elements with specific shapes, sizes, and textures.

[0003] In traditional testing and processing technologies, testing and processing are two independent processes, resulting in poor real-time performance. Furthermore, the processing relies on traditional methods, and the controllability of processing parameters for different dielectric materials is poor, significantly limiting the production efficiency of dielectric materials. Summary of the Invention

[0004] This application addresses the technical problems of poor real-time performance and controllability, as well as low production efficiency in current dielectric material testing and processing technologies by providing a single-probe non-contact integrated system and method for dielectric material testing and processing.

[0005] To achieve the above objectives, this application adopts the following technical solution: In a first aspect, this application proposes a single-probe non-contact dielectric material testing and processing integrated system, comprising: A controllable stage is used to place dielectric material samples to be tested / processed. A resonant cavity single probe assembly is positioned above the controllable stage, and the movement range of the controllable stage ensures that the dielectric material sample to be tested / processed is within the working range of the resonant cavity single probe assembly. A programmable multiplexer includes an input microwave port, a programmable dual-channel switch, and two output microwave ports, as well as a test mode selection module and a processing mode selection module connected to the programmable dual-channel switch respectively. The input microwave port is connected to a vector network analyzer and a directional coupler respectively. The test mode selection module and the processing mode selection module are connected to the two output microwave ports respectively. The two output microwave ports are connected to the first input connector and the second input connector of a resonant cavity single-probe assembly respectively. The directional coupler is connected to a programmable microwave signal generator and modulator. The test mode selection module is connected to the vector network analyzer, and the processing mode selection module is connected to the directional coupler. The control unit is electrically connected to the controllable stage, the directional coupler, the vector network analyzer, the programmable multiplexer, and the programmable microwave signal generator and modulator, respectively. It is used to control the operation of the controllable stage, the programmable multiplexer, and the programmable microwave signal generator and modulator, and to receive data from the directional coupler and the vector network analyzer.

[0006] Furthermore, the programmable microwave signal generating and regulating device includes a programmable microwave signal source, a programmable variable gain attenuator, and a fixed gain power amplifier connected in sequence. The programmable microwave signal source is electrically connected to the control unit.

[0007] Furthermore, the programmable multiplexer also includes a microwave attenuator heat sink, a circulator, and two isolators; The circulator and microwave attenuator heat sink are connected sequentially between the input microwave port and the programmable dual-channel switch. The two isolators are respectively connected between one output microwave port and the first input connector of the resonant cavity single probe assembly, and between the other output microwave port and the second input connector of the resonant cavity single probe assembly.

[0008] Furthermore, the resonant cavity single probe assembly includes an outer cavity and a central probe; Both the first input connector and the second input connector are mounted on one end of the outer cavity; The central probe is located inside the outer cavity and adopts an extended design, with its output end extending out of the other end of the outer cavity.

[0009] Furthermore, the bottom of the other end of the outer cavity is provided with an opening, and a bottom cover is provided at the opening; The outer shell has a hollow structure, with a gap between the central probe and the bottom cover.

[0010] Furthermore, the control unit is electrically connected to the controllable stage, directional coupler, vector network analyzer, programmable multiplexer, and programmable microwave signal generator and modulator via a control / data bus.

[0011] Furthermore, it also includes a programmable power meter electrically connected between the control unit and the directional coupler.

[0012] Secondly, this application proposes a single-probe non-contact dielectric material testing and processing integrated method, based on the aforementioned single-probe non-contact dielectric material testing and processing integrated system, comprising: When executing the test: The controllable stage is adjusted by the control unit to ensure that the distance between the dielectric material sample to be tested / processed on the controllable stage and the single probe assembly of the resonant cavity meets the preset requirements. The control unit switches the programmable dual-channel switch to the test mode selection module. The control unit enables the vector network analyzer to emit electromagnetic waves of a specific frequency. These waves are coupled with the dielectric material sample to be tested / processed via a resonant cavity single probe assembly to generate a reflected signal. The vector network analyzer then acquires the reflected signal and transmits it to the control unit. Based on the reflected signal, the complex permittivity of the dielectric material sample to be tested / processed is obtained. During processing: The controllable stage is adjusted by the control unit to ensure that the distance between the dielectric material sample to be tested / processed on the controllable stage and the single probe assembly of the resonant cavity meets the preset requirements. The control unit switches the programmable dual-channel switch to the processing mode selection module. The control unit generates a power signal that matches the operating frequency of the resonant cavity single probe assembly by a programmable microwave signal generator and adjustment device. The resonant cavity single probe assembly then focuses high-power electromagnetic waves onto the dielectric material sample to be tested / processed, causing changes in the sample's shape and physical properties, thus completing the processing.

[0013] Furthermore, the method for obtaining the complex permittivity of the dielectric material sample to be tested / processed based on the reflected signal includes: The S-parameters are obtained from the reflected signal; the S-parameters include amplitude and phase. By using the calibration parameters of multiple sets of reference materials with known complex permittivity, combined with the obtained S-parameters, the complex permittivity of the dielectric material sample to be tested / processed is calculated through a fitting algorithm.

[0014] Furthermore, during processing, tests are performed intermittently, and based on the test results, the parameters of the programmable microwave signal generator and the controllable stage are adjusted by the control unit.

[0015] Compared with the prior art, this application has the following beneficial effects: This application proposes a single-probe non-contact dielectric material testing and processing integrated system, including a controllable stage, a resonant cavity single-probe assembly, a programmable multiplexer, and a control unit. It employs a single microwave resonant cavity probe as the core component. Through the programmable multiplexer, it achieves rapid switching and control with a vector network analyzer and a programmable microwave signal generator and modulator, enabling real-time microwave dielectric constant measurement and processing. This integrated testing and processing system can alternately perform non-contact dynamic dielectric constant measurement and microwave processing. It solves the problems of independent testing and processing processes and insufficient real-time performance in existing technologies, realizing integrated operation of dielectric constant measurement and microwave processing without the need for sample relocation or equipment replacement, significantly improving the production efficiency of dielectric elements.

[0016] This application also proposes a single-probe non-contact dielectric material testing and processing integrated method, which has all the advantages of the above-mentioned single-probe non-contact dielectric material testing and processing integrated system and can efficiently complete testing and processing. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a single-probe non-contact dielectric material testing and processing integrated system of this application; Figure 2 This is a schematic diagram of a connection for a programmable multiplexer according to this application; Figure 3 This is a schematic diagram of a single probe assembly for a resonant cavity in this application.

[0019] The components are as follows: 1-Control unit, 2-Vector network analyzer, 3-Control / data bus, 4-Controllable stage, 5-Resonant cavity single probe assembly, 51-Coaxial connector, 52-Outer cavity, 53-Center probe, 54-Bottom cover, 6-Probe fixture, 7-Dielectric material sample to be tested / processed, 8-Programmable multiplexer, 81-Programmable dual-channel switch, 82-Input microwave port, 83-Microwave attenuator heat sink, 84-Processing mode selection module, 85-Measurement mode selection module, 86-Output microwave port, 9-Programmable microwave signal source, 10-Programmable variable gain attenuator, 11-Fixed gain power amplifier, 12-Directional coupler, 13-Programmable power meter. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of the embodiments of this application, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of the embodiments of this application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0026] Dielectric materials, such as Teflon, glass fiber, polyester, and plexiglass, play a crucial role in many fields, including chips, electronic circuits, and electrical control. Their shape, material, geometry, and processing technology have a significant impact on the characteristics and performance of electronic devices and chips, and are key factors determining the performance level of next-generation electronic equipment.

[0027] However, traditional methods have several problems in practical applications of dielectric material testing and processing. In terms of testing, traditional off-site, contact-based operations are inconvenient. Off-site testing means that real-time detection cannot be performed during material processing; the material must be prepared into a standard sample that meets the requirements before it can be placed inside a microwave waveguide or resonant cavity to obtain the dielectric constant through the T / R port (Transmit / Receive port). This not only increases the steps and time required for sample preparation but may also affect the accuracy of the test results due to errors in the sample preparation process. In terms of processing, traditional processes such as mechanical cutting and laser ablation have poor controllability of processing parameters for different dielectric materials. Different dielectric materials have significantly different physicochemical properties, and using fixed processing parameters often fails to guarantee processing quality. For example, it may lead to insufficient shape and dimensional accuracy of the dielectric element, or surface damage, thus affecting the subsequent use of the dielectric element.

[0028] To address these issues, existing technologies have attempted to provide solutions. In testing, to improve efficiency, some studies have focused on optimizing sample preparation processes, simplifying standard sample fabrication, and reducing the time and cost required. Simultaneously, some improved testing equipment aims to enhance accuracy and speed. In processing, addressing the poor adjustability of traditional processing parameters, some research has experimentally explored optimal processing parameters for different media materials, creating parameter databases for reference during processing. Furthermore, some technologies attempt to improve equipment for mechanical cutting and laser ablation, enabling adjustments to processing parameters within a certain range to adapt to the processing needs of different media materials.

[0029] However, these solutions still have significant shortcomings. Regarding the integration of testing and processing, measurement and processing remain independent processes, unable to achieve real-time linkage. Even with improved testing efficiency and adjustments to processing parameters referencing parameter databases, it's still impossible to provide real-time feedback and adjust processing parameters based on the dielectric material properties obtained during testing, resulting in a severe lack of real-time performance. Furthermore, the control of processing parameters is mostly based on experience or limited experimental data, lacking dynamic response to changes in material properties during processing, and resulting in insufficient precision and flexibility. This significantly restricts the production efficiency and quality of dielectric components and fails to meet the demands of some high-end fields for rapid and precise processing and testing of dielectric materials. Currently, there is no technology that integrates non-contact dielectric constant measurement with real-time feedback processing functions using a single microwave near-field resonant cavity as the core component, thus failing to fundamentally solve the above problems.

[0030] Based on the above, this application proposes a single-probe non-contact dielectric material testing and processing integrated system and method. The following detailed description, in conjunction with embodiments and accompanying drawings, further illustrates this application: As a basic embodiment of the single-probe non-contact dielectric material testing and processing integrated system of this application, it may include: The controllable stage 4 is used to place the dielectric material sample 7 to be tested / processed. The main function of the controllable stage 4 is to place the dielectric material sample 7. The controllable stage 4 can move the dielectric material sample 7 along the X, Y, and Z axes of a Cartesian coordinate system, ensuring that the dielectric material sample 7 is always within the working range of the resonant cavity single-probe assembly 5. This eliminates the need for frequent adjustments to the placement of the dielectric material sample 7 during testing and processing. The movement of the controllable stage 4 allows different areas of the dielectric material sample 7 to align with the probe assembly, meeting the requirements of testing and processing.

[0031] A resonant cavity single-probe assembly 5 is positioned above the controllable stage 4, and the movement range of the controllable stage 4 ensures that the dielectric material sample 7 to be tested / processed is within the working range of the resonant cavity single-probe assembly 5. Positioned above the controllable stage 4, the resonant cavity single-probe assembly 5 serves as a core component for the entire system's testing and processing functions, operating through non-contact interaction with the sample. During testing, the resonant cavity single-probe assembly 5 senses information related to the sample's dielectric properties. During processing, the resonant cavity single-probe assembly 5 can output corresponding energy to process the sample.

[0032] A programmable multiplexer 8 includes an input microwave port 82, a programmable dual-channel switch 81, and two output microwave ports 86, as well as a test mode selection module and a processing mode selection module 84 respectively connected to the programmable dual-channel switch 81; the input microwave port 82 is connected to a vector network analyzer 2 and a directional coupler 12 respectively; the test mode selection module and the processing mode selection module 84 are respectively connected to the two output microwave ports 86; the two output microwave ports 86 are respectively connected to the first input connector and the second input connector of the resonant cavity single probe assembly 5; the directional coupler 12 is connected to a programmable microwave signal generator and modulator; the test mode selection module is connected to the vector network analyzer 2, and the processing mode selection module 84 is connected to the directional coupler 12.

[0033] It should be noted that the programmable multiplexer 8 is a key component in the system responsible for signal path switching and transmission. The input microwave port 82 connects to both the vector network analyzer 2 and the directional coupler 12. The vector network analyzer 2 analyzes the microwave signal to obtain information such as the dielectric parameters of the sample, while the directional coupler 12 couples and distributes the microwave signal. The test mode selection module and the processing mode selection module 84 are connected to two output microwave ports 86, which are in turn connected to the first and second input connectors of the resonant cavity single probe assembly 5. This connection method allows signals to be transmitted to the resonant cavity single probe assembly 5 through corresponding paths in different modes. Furthermore, the directional coupler 12 is also connected to a programmable microwave signal generator and modulator, which generates and modulates microwave signals to provide the necessary signal source for the system. Meanwhile, the test mode selection module is connected to the vector network analyzer 2, and the processing mode selection module 84 is connected to the directional coupler 12. Through the control of the programmable dual-channel switch 81, the test mode and processing mode can be switched. When switched to the test mode, the signal path is transmitted through the test mode selection module to meet the transmission requirements of the test signal; when switched to the processing mode, the signal is transmitted through the processing mode selection module 84 to ensure the transmission of the signal required for processing. Control unit 1 is electrically connected to the controllable stage 4, directional coupler 12, vector network analyzer 2, programmable multiplexer 8, and programmable microwave signal generator and adjuster, respectively. It controls the operation of the controllable stage 4, programmable multiplexer 8, and programmable microwave signal generator and adjuster, and receives data from directional coupler 12 and vector network analyzer 2. Control unit 1 plays a crucial role in overall control and data processing within the system. Specifically, control unit 1 can issue commands to control the movement of the controllable stage 4 to adjust the sample position; control the programmable multiplexer 8 to switch modes to ensure correct signal paths; and control the programmable microwave signal generator and adjuster to generate microwave signals that meet requirements. Simultaneously, it can receive data from directional coupler 12 and vector network analyzer 2, process and analyze this data, and further adjust the operating status of each component based on the analysis results, thereby achieving automated testing and processing of the system.

[0034] The present application will be further described in detail below through some more detailed embodiments.

[0035] like Figure 1 The diagram shown is a schematic representation of one embodiment of the single-probe non-contact dielectric material testing and processing integrated system of this application. Specifically: In some embodiments of this application, the programmable microwave signal generating and regulating device includes a programmable microwave signal source 9, a programmable variable gain attenuator 10, and a fixed gain power amplifier 11 connected in sequence. The programmable microwave signal source 9 is also electrically connected to the control unit 1. The programmable microwave signal source 9 acts as a signal source, generating microwave signals with specific frequency, phase, and amplitude. It can receive commands from the control unit 1 and adjust the parameters of the output signal. The main function of the programmable variable gain attenuator 10 is to adjust the gain or attenuate the input microwave signal, achieving flexible control of the signal strength and meeting the signal amplitude requirements in different scenarios. The fixed gain power amplifier 11 is mainly used to amplify the signal after attenuation or gain adjustment by a fixed factor, effectively increasing the signal power.

[0036] like Figure 3 The diagram shows a schematic of a resonant cavity single-probe assembly 5. It may include an outer cavity 52 and a central probe 53. A first input connector and a second input connector are both mounted at one end of the outer cavity 52. ​​The central probe 53 is located inside the outer cavity 52 and adopts an extended design, with its output end extending beyond the other end of the outer cavity 52. ​​The bottom of the other end of the outer cavity 52 may have an open structure, with a bottom cover 54 at the opening. The outer shell is a hollow structure, with a gap between the central probe 53 and the bottom cover 54. In this embodiment, the resonant cavity single-probe assembly 5 adopts a dual-port λ / 4 coaxial structure with magnetic coupling. In practical applications, the geometric dimensions of the central probe 53 are much smaller than the microwave wavelength at the operating frequency, and it extends from a hole in the bottom cover 54. The first input connector and the second input connector form a coaxial connector 51 for connection to external devices. The outer cavity 52 serves as shielding and resonance, and the overall structural design ensures that the resonant cavity single-probe assembly 5 can complete measurement and processing in a non-contact manner.

[0037] In addition, the resonant cavity single probe assembly 5 can be fixed above the Z-axis direction of the controllable stage 4 by the probe clamp 6. The dielectric material sample 7 to be tested / processed is placed on the controllable stage 4, which can be a high-temperature resistant stage.

[0038] like Figure 2The diagram shows a connection schematic of the programmable multiplexer 8 of this application. Based on the aforementioned basic embodiment, the programmable multiplexer 8 may further include a microwave attenuator heat sink 83, a circulator, and two isolators. The circulator and microwave attenuator heat sink 83 are sequentially connected between the input microwave port 82 and the programmable dual-channel switch 81. The two isolators are respectively connected between one output microwave port 86 and the first input connector of the resonant cavity single-probe assembly 5, and between the other output microwave port 86 and the second input connector of the resonant cavity single-probe assembly 5. Specifically, the microwave attenuator heat sink 83 integrates both attenuation and heat dissipation functions. During mode switching, it can adjust the signal amplitude to maintain stability according to the signal strength requirements of different modes. Furthermore, since microwave devices are prone to heat generation at high power, especially during mode switching which may be accompanied by instantaneous power fluctuations, the heat dissipation function can dissipate heat in a timely manner, preventing performance degradation or damage to the device due to high temperature. The circulator, through its unidirectional transmission characteristics, can prevent signals from reflecting back to the input side, avoiding interference with the stability of the signal source. The isolators can further isolate reflected signals at the output end, preventing reflected signals from affecting the normal operation of the system and ensuring the purity of signal transmission.

[0039] The control unit 1 and other components are connected via the control / data bus 3 to achieve signal transmission and control, forming a complete automated control link.

[0040] This application features a compact structure that integrates measurement and processing functions through a single probe. It boasts a high degree of automation, eliminates the need for sample transfer, and significantly improves the production efficiency and processing accuracy of dielectric elements. It is suitable for precision processing scenarios involving various dielectric materials.

[0041] Based on the above system, this application also proposes a single-probe non-contact method for integrated testing and processing of dielectric materials, which may include: (1) When performing the test: (1.1) Adjust the controllable stage 4 through the control unit 1 so that the distance between the dielectric material sample 7 to be tested / processed on the controllable stage 4 and the resonant cavity single probe assembly 5 meets the preset requirements; (1.2) The programmable dual-channel switch 81 is switched to the test mode selection module via the control unit 1; (1.3) The vector network analyzer 2 emits electromagnetic waves of a specific frequency through the control unit 1. The reflected signal is generated by the single probe component 5 of the resonant cavity coupled with the dielectric material sample 7 to be tested / processed. The reflected signal is obtained by the vector network analyzer 2 and transmitted to the control unit 1. The complex permittivity of the dielectric material sample 7 to be tested / processed is obtained based on the reflected signal.

[0042] (2) During processing: (2.1) Adjust the controllable stage 4 through the control unit 1 so that the distance between the dielectric material sample 7 to be tested / processed on the controllable stage 4 and the resonant cavity single probe assembly 5 meets the preset requirements; (2.2) The programmable dual-channel switch 81 is switched to the processing mode selection module 84 by the control unit 1; (2.3) The control unit 1 generates a power signal that matches the working frequency of the resonant cavity single probe assembly 5 by the programmable microwave signal generator and adjustment device. Then, the resonant cavity single probe assembly 5 focuses high-power electromagnetic waves onto the dielectric material sample 7 to be tested / processed, so that the shape and physical properties of the sample change, and the processing is completed.

[0043] Specifically, the method for non-contact dielectric constant measurement using the above system is as follows: The dielectric material sample 7 to be tested / processed is placed on the controllable stage 4. The control unit 1 controls the Z-axis of the controllable stage 4, adjusting the distance between the dielectric material sample 7 and the center probe 53 of the resonant cavity single probe assembly 5 to approximately 10 μm. Then, the control unit 1 controls the programmable dual-channel switch 81 of the programmable multiplexer 8 to switch to the measurement mode selection module 85, so that the resonant cavity single probe assembly 5 is connected to the vector network analyzer 2 through a dual-port connection. The vector network analyzer 2 emits electromagnetic waves of a specific frequency, which are transmitted to the outer cavity 52 via the coaxial connector 51. The center probe 53 and the dielectric material sample 7 are near-field coupled to generate a reflected signal. The reflected signal is fed back to the vector network analyzer 2 after resonance in the outer cavity 52, obtaining the amplitude and phase of the S-parameters (S11, S12). These data are then transmitted to the control unit 1 via the control / data bus 3. The control unit 1 uses the calibration parameters of multiple sets of known complex dielectric constant reference materials to calculate the complex dielectric constant of the dielectric material sample 7 through a fitting algorithm. It should be noted that the calibration parameters of a reference material with a known complex permittivity can be measured under the same conditions using the same resonant cavity single probe assembly 5.

[0044] The method for non-contact processing using the above system is as follows: According to the processing requirements, the control unit 1 adjusts the processing point position of the dielectric material sample 7 to be tested / processed via the X and Y axes of the controllable stage 4, and finely adjusts the distance between the center probe 53 and the dielectric material sample 7 to be tested / processed via the Z axis to match the resonant frequency. Then, the control unit 1 controls the programmable multiplexer 8 to switch to the processing mode selection module 84, disconnects the resonant cavity single probe assembly 5 from the vector network analyzer 2, and connects it to the output of the directional coupler 12. The programmable microwave signal source 9 generates a single-frequency signal that matches the operating frequency of the resonant cavity single probe assembly 5. After being adjusted by the controllable variable gain attenuator (the attenuation is adjusted according to the measured complex dielectric constant loss angle), it is input to the fixed gain power amplifier 11 for power amplification. After the amplified signal is input to the directional coupler 12, more than 99% of the power signal is transmitted to the resonant cavity single probe assembly 5 via the programmable multiplexer 8. The center probe 53 focuses high-power electromagnetic waves to excite plasma on the surface of the dielectric material sample 7 to be tested / processed, thus completing the processing. Meanwhile, the directional coupler 12 inputs 1% of the coupling signal to the programmable power meter 13 to monitor the power in real time and feed it back to the control unit 1.

[0045] When performing non-contact dielectric constant testing and sample processing in a coordinated manner, the following method can be adopted: Control unit 1 first controls the system to enter measurement mode, acquires the S-parameters of the dielectric material sample 7 to be tested / processed using vector network analyzer 2, calculates the complex dielectric constant, and determines the required microwave power. Then, it quickly switches to processing mode, controlling the micro-programmable microwave signal source 9 and the programmable variable gain attenuator 10 according to the determined power parameters, and completes the processing through the resonant cavity single probe assembly 5. After processing, it switches back to measurement mode, monitors the change in dielectric constant in the processing area in real time, dynamically adjusts the processing parameters, and repeats this process. Combined with the X-axis and Y-axis movement of the controllable stage 4, continuous feedback processing of the dielectric material sample 7 to be tested / processed is achieved.

[0046] In practical applications, the integrity and accuracy of the connections of each component can be checked before use. Multiple reference materials with known complex permittivity are placed sequentially on the stage. The control unit 1 controls the system to enter measurement mode, acquiring and storing calibration parameters. Then, the dielectric material sample 7 to be tested / processed is placed on the controllable stage 4, and measurement mode is entered again. The control unit 1 calculates its complex permittivity and determines the processing parameters. The system then switches to processing mode and processes according to the set parameters. Simultaneously, the power is monitored in real-time by the programmable power meter 13 to ensure stable processing. The processing point is adjusted via the controllable stage 4, and the measurement and processing process is repeated until all processing is completed. After processing, the power to all equipment is turned off, and the controllable stage 4 and the resonant cavity single-probe assembly 5 are cleaned.

[0047] In the prior art, contact measurement is prone to probe wear, and by-products generated during processing can easily contaminate the equipment. However, in this application, the resonant cavity single probe assembly 5 maintains a near-field non-contact state with the dielectric material sample 7 to be tested / processed, and completes the measurement and processing through electromagnetic coupling. This avoids direct friction and wear between the probe and the sample, and at the same time reduces the contamination of the probe by by-products generated during processing, effectively extending the service life of the probe.

[0048] Furthermore, existing technologies suffer from insufficient adjustability of processing parameters and reliance on empirical values. This application addresses these shortcomings by measuring the S-parameters of the processing area in real time, calculating the complex dielectric constant using a fitting algorithm in control unit 1, and feeding this value back to control unit 1 to dynamically adjust the microwave output power (e.g., 17dBm~57dBm). This ensures precise matching between processing power and material dielectric properties, such as loss angle, preventing over-processing or under-processing due to inappropriate power, thereby significantly improving processing accuracy and stability. Moreover, existing technologies separate measurement and processing equipment, leading to system complexity and poor compatibility. This application addresses this by using control unit 1 to coordinate the controllable stage 4, programmable multiplexer 8, and programmable microwave signal source 9, forming a complete automated control chain. This reduces connections and interference between devices, improving system compactness and reliability. Simultaneously, automated operation reduces errors caused by human intervention, further enhancing overall processing efficiency.

[0049] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A single-probe non-contact dielectric material testing and processing integrated system, characterized in that, include: A controllable stage (4) is used to place the dielectric material sample (7) to be tested / processed; The resonant cavity single probe assembly (5) is positioned above the controllable stage (4), and the movement range of the controllable stage (4) allows the dielectric material sample (7) to be tested / processed to be located within the working range of the resonant cavity single probe assembly (5). A programmable multiplexer (8) includes an input microwave port (82), a programmable dual-channel switch (81), and two output microwave ports (86), as well as a test mode selection module and a processing mode selection module (84) respectively connected to the programmable dual-channel switch (81); the input microwave port (82) is connected to a vector network analyzer (2) and a directional coupler (12) respectively; the test mode selection module and the processing mode selection module (84) are respectively connected to the two output microwave ports (86); the two output microwave ports (86) are respectively connected to the first input connector and the second input connector of the resonant cavity single probe assembly (5); the directional coupler (12) is connected to a programmable microwave signal generator and modulator; the test mode selection module is connected to the vector network analyzer (2), and the processing mode selection module (84) is connected to the directional coupler (12); The control unit (1) is electrically connected to the controllable stage (4), the directional coupler (12), the vector network analyzer (2), the programmable multiplexer (8), and the programmable microwave signal generator and regulator, respectively, and is used to control the operation of the controllable stage (4), the programmable multiplexer (8), and the programmable microwave signal generator and regulator, and to receive data from the directional coupler (12) and the vector network analyzer (2).

2. The single-probe non-contact dielectric material testing and processing integrated system according to claim 1, characterized in that, The programmable microwave signal generating and regulating device includes a programmable microwave signal source (9), a programmable variable gain attenuator (10), and a fixed gain power amplifier (11) connected in sequence. The programmable microwave signal source (9) is electrically connected to the control unit (1).

3. The single-probe non-contact dielectric material testing and processing integrated system according to claim 1, characterized in that, The programmable multiplexer (8) also includes a microwave attenuator heat sink (83), a circulator, and two isolators; The circulator and microwave attenuator heat sink (83) are connected in sequence between the input microwave port (82) and the programmable dual-channel switch (81); The two isolators are respectively connected between one output microwave port (86) and the first input connector of the resonant cavity single probe assembly (5), and between the other output microwave port (86) and the second input connector of the resonant cavity single probe assembly (5).

4. The single-probe non-contact dielectric material testing and processing integrated system according to claim 1, characterized in that, The resonant cavity single probe assembly (5) includes an outer cavity (52) and a central probe (53); Both the first input connector and the second input connector are mounted on one end of the outer cavity (52); The central probe (53) is located inside the outer cavity (52). The central probe (53) adopts an extensional design, and its output end extends out of the other end of the outer cavity (52).

5. The single-probe non-contact dielectric material testing and processing integrated system according to claim 4, characterized in that, The other end of the outer cavity (52) is open, and a bottom cover (54) is provided at the opening; The outer shell is a hollow structure, with a gap between the central probe (53) and the bottom cover (54).

6. The single-probe non-contact dielectric material testing and processing integrated system according to claim 1, characterized in that, The control unit (1) is electrically connected to the controllable stage (4), directional coupler (12), vector network analyzer (2), programmable multiplexer (8) and programmable microwave signal generator and regulator via the control / data bus (3).

7. The single-probe non-contact dielectric material testing and processing integrated system according to claim 1, characterized in that, It also includes a programmable power meter (13) electrically connected between the control unit (1) and the directional coupler (12).

8. A single-probe non-contact dielectric material testing and processing integrated method, based on the single-probe non-contact dielectric material testing and processing integrated system according to any one of claims 1 to 7, characterized in that, include: When executing the test: The controllable stage (4) is adjusted by the control unit (1) so that the distance between the dielectric material sample (7) to be tested / processed on the controllable stage (4) and the resonant cavity single probe assembly (5) meets the preset requirements. The programmable dual-channel switch (81) is switched to the test mode selection module by the control unit (1); The vector network analyzer (2) is made to emit electromagnetic waves of a specific frequency by the control unit (1). The reflected signal is generated by coupling the single probe component (5) of the resonant cavity with the dielectric material sample (7) to be tested / processed. The reflected signal is obtained by the vector network analyzer (2) and transmitted to the control unit (1). The complex permittivity of the dielectric material sample (7) to be tested / processed is obtained based on the reflected signal. During processing: The controllable stage (4) is adjusted by the control unit (1) so that the distance between the dielectric material sample (7) to be tested / processed on the controllable stage (4) and the resonant cavity single probe assembly (5) meets the preset requirements. The control unit (1) switches the programmable dual-channel switch (81) to the processing mode selection module (84); The control unit (1) generates a power signal that matches the working frequency of the resonant cavity single probe assembly (5) through the programmable microwave signal generator and adjustment device. Then, the resonant cavity single probe assembly (5) focuses high-power electromagnetic waves onto the dielectric material sample (7) to be tested / processed, causing changes in the shape and physical properties of the sample, thus completing the processing.

9. The single-probe non-contact dielectric material testing and processing integrated method according to claim 8, characterized in that, The method for obtaining the complex permittivity of the dielectric material sample (7) to be tested / processed based on the reflected signal includes: The S-parameters are obtained from the reflected signal; the S-parameters include amplitude and phase. Using the calibration parameters of multiple sets of reference materials with known complex permittivity, combined with the obtained S-parameters, the complex permittivity of the dielectric material sample (7) to be tested / processed is calculated by a fitting algorithm.

10. The single-probe non-contact dielectric material testing and processing integrated method according to claim 8, characterized in that, During processing, tests are performed intermittently, and based on the test results, the parameters of the programmable microwave signal generator and regulator and the controllable stage (4) are adjusted by the control unit (1).

Images