Reel-to-reel based double-sided LDI exposure system and exposure method

Abstract

The invention discloses a roll-to-roll based double-sided LDI exposure system and exposure method, relates to the technical field of flexible electronic manufacturing, and can solve the problem that the alignment precision is reduced due to the fact that existing double-sided laser imaging equipment cannot compensate dynamic deformation of a base material in the transmission process. The system is sequentially provided with a marking station and an exposure station in the conveying direction of a base material, and the marking station is provided with a marking device used for making marking points on the base material; the exposure station is provided with a pose adjusting mechanism and two laser projection head arrays which are driven by the pose adjusting mechanism and oppositely arranged on the upper side and the lower side of a base material, the alignment camera collects marking point images on the base material, and the control device controls the pose adjusting mechanism to adjust the poses of the laser projection head arrays according to image information, so that an exposure pattern is aligned with a target area of the base material. Therefore, the dynamic error can be adaptively compensated, the alignment precision is improved, the exposure method can realize parallel processing of marking and exposure, and the production efficiency is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of flexible electronic manufacturing, in particular to a double-sided exposure device for a flexible circuit board, and more particularly to a double-sided LDI exposure system and method based on roll-to-roll. BACKGROUND

[0002] Laser imaging technology is widely used in the patterning process of flexible boards such as flexible circuit boards (FPC) and flexible display panels due to its high precision and good flexibility. In the prior art, in order to improve production efficiency, the use of roll-to-roll transmission mode combined with double-sided laser simultaneous exposure equipment has become an important development direction.

[0003] For example, the double-sided laser imaging equipment for flexible boards disclosed in Chinese utility model patent CN219349351U includes a first laser array and a second laser array located on the opposite side of a roll-to-roll take-up and pay-off device, a controller, and an upper computer. During operation, the flexible board is driven in the horizontal direction by the roll-to-roll device, the controller detects the real-time position of the laser spot on the board, and the laser is turned on when the position coincides with the preset pixel point, thereby achieving simultaneous exposure of the upper and lower surfaces of the flexible board. This scheme effectively avoids the step of turning over the substrate and significantly improves the imaging efficiency of standard rectangular flexible boards.

[0004] However, the above-mentioned prior art solution cannot meet the production requirements in terms of precision and adaptability when dealing with dynamic errors in actual production. Specifically, during continuous transmission of roll-to-roll, due to factors such as tension fluctuation, roller installation deviation, and the inherent anisotropy of the flexible board material, the flexible board inevitably produces slight longitudinal distortion (skew) or transverse warping. This causes the actual coordinate system on the board surface to rotate and shift slightly relative to the absolute coordinate system of the equipment. The scheme described in CN219349351U relies heavily on the static premise that the real-time position of the laser spot coincides with the preset absolute coordinate. When the substrate is deflected, the preset exposure point position no longer coincides with the actual target position on the substrate, resulting in systematic alignment errors. The laser array of this scheme only has the freedom to move in the horizontal and vertical directions, so even if the system detects the deviation, it cannot perform real-time angle compensation and path tracking, ultimately leading to a decrease in product yield.

[0005] Therefore, the prior art cannot compensate for the dynamic deformation of the flexible board during transmission, resulting in a decrease in alignment accuracy, and thus it is necessary to propose a new technical solution to solve the problems in the prior art. SUMMARY

[0006] The application provides a double-sided LDI exposure system and method based on roll-to-roll, to solve the problem that the existing double-sided laser imaging equipment cannot compensate for the dynamic deformation of the flexible plate during transmission, resulting in a decrease in alignment accuracy.

[0007] To achieve the above object, the application provides the following technical solutions:

[0008] In one aspect, the application provides a double-sided LDI exposure system based on roll-to-roll, comprising a control device and a roll-to-roll take-up device, a marking device, an alignment camera, and a laser exposure module connected to the control device.

[0009] The roll-to-roll take-up device is used to continuously transmit a flexible substrate, and a marking station and an exposure station are sequentially formed along the transmission direction of the flexible substrate.

[0010] The marking device is arranged at the marking station, and is used to make laser marking points on the flexible substrate transmitted to the marking station.

[0011] The laser exposure module is arranged at the exposure station, and comprises a pose adjustment mechanism, and a first laser projection head array and a second laser projection head array driven by the pose adjustment mechanism and arranged oppositely, the first laser projection head array and the second laser projection head array being distributed on the upper and lower sides of the flexible substrate transmitted to the exposure station.

[0012] The alignment camera is used to collect image information of the laser marking points on the flexible substrate transmitted to the exposure station.

[0013] The control device can control the pose adjustment mechanism to act based on the image information collected by the alignment camera, so as to adjust the poses of the first laser projection head array and the second laser projection head array, thereby aligning the exposure patterns of the two laser projection head arrays with the target region on the flexible substrate.

[0014] In the above technical solution, the marking device comprises four laser marking heads, which are arranged above the four corner points of the flexible substrate transmitted to the marking station.

[0015] Optionally, the pose adjustment mechanism comprises a rotating assembly for driving the two laser projection head arrays to rotate along a vertical axis, a first linear motion assembly mounted at the output end of the rotating assembly and used to drive the two laser projection head arrays to move reciprocally along an X-axis, and a second linear motion assembly mounted at the output end of the first linear motion assembly and used to drive the two laser projection head arrays to move reciprocally along a Y-axis; wherein the transmission direction of the flexible substrate is denoted as the Y-axis, and the direction perpendicular to the transmission direction of the flexible substrate in the horizontal plane is denoted as the X-axis.

[0016] Optionally, the rotating assembly comprises a driving motor and a rotating table connected with an output shaft of the driving motor.

[0017] Optionally, the first linear motion assembly comprises a first linear motor, a first linear guide rail connected with the first linear motor, and a first sliding block arranged on the first linear guide rail, and the first linear guide rail is fixed on the rotating table.

[0018] Optionally, the second linear motion assembly comprises a second linear motor, a second linear guide rail connected with the second linear motor, and a second sliding block arranged on the second linear guide rail, and the second linear guide rail is fixed on the first sliding block.

[0019] Optionally, a vertical connecting plate is fixed on the second sliding block, an upper end of the vertical connecting plate is connected with the first laser projection head array, and a lower end of the vertical connecting plate is connected with the second laser projection head array.

[0020] Optionally, the first laser projection head array comprises a first projection head mounting plate and a plurality of laser projection heads arranged in sequence on the first projection head mounting plate; the second laser projection head array comprises a second projection head mounting plate and a plurality of laser projection heads arranged in sequence on the second projection head mounting plate; the first projection head mounting plate and the second projection head mounting plate are arranged horizontally opposite to each other, and the same side of the first projection head mounting plate and the second projection head mounting plate is connected through a vertical connecting plate, and the vertical connecting plate is fixedly connected with the output end of the pose adjustment mechanism.

[0021] Optionally, the roll-to-roll take-up and pay-off device comprises a pay-off roller and a take-up roller arranged opposite to each other, and the marking station and the exposure station are arranged in sequence between the pay-off roller and the take-up roller; the control device can send a feeding signal to the roll-to-roll take-up and pay-off device, and the roll-to-roll take-up and pay-off device is used to drive the pay-off roller and the take-up roller to rotate according to the feeding signal, so as to realize the transmission of the flexible substrate from the marking station to the exposure station.

[0022] Further optionally, the roll-to-roll take-up and pay-off device further comprises a displacement encoder used to detect the feeding length of the pay-off roller, and the displacement encoder is connected with the control device; the control device is used to confirm that the pre-exposure substrate has entered the exposure station and the pre-marking substrate has entered the marking station according to the feedback signal of the displacement encoder; the control device can send a stop signal to the roll-to-roll take-up and pay-off device, send a marking signal to the marking device, and send an image acquisition instruction to the alignment camera according to the feedback signal of the displacement encoder; the control device can collect the projection signals of the two laser projection head arrays, and send a feeding signal to the roll-to-roll take-up and pay-off device according to the projection signals.

[0023] In another aspect, the application also provides an exposure method implemented by the roll-to-roll double-sided LDI exposure system described above, characterized in that it comprises the following steps:

[0024] S1: conveying the flexible substrate to a marking station through the roll-to-roll conveying and releasing device;

[0025] S2: making laser marking points on the flexible substrate through the marking device;

[0026] S3: conveying the marked flexible substrate to an exposure station;

[0027] S4: acquiring image information of the laser marking points on the flexible substrate conveyed to the exposure station through the alignment camera;

[0028] S5: the control device calculates the deviation between the current position of the flexible substrate and the preset position according to the image information;

[0029] S6: the control device drives the pose adjustment mechanism to adjust the pose state of the first laser projection head array and the second laser projection head array according to the deviation, so that the exposure patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate;

[0030] S7: starting the first laser projection head array and the second laser projection head array to perform synchronous exposure on the upper and lower surfaces of the flexible substrate;

[0031] Wherein, when the alignment camera acquires the image information of the laser marking points on the flexible substrate conveyed to the exposure station, the marking device marks the flexible substrate conveyed to the marking station.

[0032] Optionally, in the above technical solution, when the two laser projection head arrays expose the flexible substrate in the exposure station, the marking device marks the flexible substrate conveyed to the marking station.

[0033] Compared with the prior art, the application has at least the following beneficial effects:

[0034] 1. This application sequentially sets up a marking station and an exposure station along the transport direction of the flexible substrate. The marking station is equipped with a marking device for laser marking the substrate. The exposure station is equipped with a pose adjustment mechanism, two laser projection head arrays (upper and lower), and an alignment camera. The alignment camera acquires image information of the marking points, which then drives the pose adjustment mechanism to adjust the pose of the two laser projection head arrays. This ensures that the exposed patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate, guaranteeing alignment accuracy. Therefore, this application provides a unified physical reference for the upper and lower patterns based on the substrate itself through the marking points, fundamentally solving the problem of misalignment of upper and lower patterns caused by substrate deflection, stretching, etc. It can cope with various dynamic errors in actual production, significantly improving exposure accuracy and increasing product yield. Furthermore, this application sets up an independent marking station, allowing marking of the next pattern while exposing the current area, improving product processing efficiency.

[0035] 2. This application uses four laser marking heads to mark the four corner points of the substrate surface transmitted to the marking station. The four corner points can uniquely determine a planar coordinate system. Through these four marking points, the system can not only detect the translation and rotation of the substrate, but also detect the deformation of the substrate, providing data support for high-precision compensation.

[0036] 3. This application connects a vertical connecting plate to the output end of the pose adjustment mechanism, and sets a laser projection head array at the upper and lower ends of the vertical connecting plate. The vertical connecting plate can ensure that the two laser projection head arrays move as a whole when adjusting the pose, maintaining the standard correspondence between the upper and lower exposure images after compensation, and achieving high-precision double-sided alignment.

[0037] 4. This application integrates multiple laser heads onto a mounting plate to form a functional module, which simplifies the assembly process and facilitates daily maintenance and component replacement.

[0038] 5. This application achieves continuous transfer of substrate through roll-to-roll unwinding device, integrating marking and exposure stations between unwinding and take-up rollers, which not only conforms to the processing flow but also reduces space occupation. The entire system is automated and continuously produced without manual intervention.

[0039] 6. This application achieves the tracking of the substrate position through a displacement encoder, ensuring that the system triggers marking, image acquisition and exposure actions at the correct time. Furthermore, the displacement encoder links marking, alignment and exposure actions into a tight automated closed loop, realizing the synchronization and overlap of actions at each station (such as the subsequent marking and the previous exposure are performed simultaneously), which greatly improves the production efficiency of the equipment.

[0040] 7. The exposure method provided by the application can adapt and align a laser pattern to a base material through a closed loop of "visual inspection, deviation calculation, and pose adjustment", realize automatic error compensation, improve alignment exposure precision, and improve product processing yield. In addition, the application can expose the previous image while marking the next image, realize motion synchronization and overlap, and greatly improve the production efficiency of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiments will be briefly introduced. Obviously, the drawings in the following description only some embodiments of the application, and for those skilled in the art, other drawings can be obtained without creative labor on the basis of these drawings. It should be understood that the specific shape, structure shown in the drawings should not be regarded as a limitation of the application; for example, those skilled in the art can make routine adjustments or further optimization of the increase / decrease / attribute division, specific shape, positional relationship, connection mode, size ratio relationship, etc. of some units (components) based on the technical concepts and exemplary drawings disclosed in the application.

[0042] Figure 1 FIG. 1 is a structural schematic diagram of a double-sided LDI exposure system provided by the application in an embodiment;

[0043] Figure 2 FIG. 2 is a front view of FIG. 1, in which the arrow indicates the base material transmission direction; Figure 1

[0044] Figure 3 FIG. 3 is a top view of FIG. 1, in which the arrow indicates the base material transmission direction. Figure 1

[0045] FIG. 4 is a schematic diagram of the reference signs in the drawings.

[0046] 1, feed roller; 2, take-up roller; 3, flexible base material; 4, laser marking head; 5, first laser projection head array; 6, second laser projection head array; 7, pose adjustment mechanism;

[0047] A, marking station; B, exposure station. DETAILED DESCRIPTION

[0048] The application will be further described in detail below by specific embodiments in combination with the drawings.

[0049] ​​In the description of the present application: unless otherwise specified, the meaning of "a plurality of" is two or more. The terms "first", "second", etc. in the present application are intended to distinguish the objects referred to, and do not have a special meaning in the technical aspect (for example, it should not be understood as emphasizing importance or order, etc.). The expressions "include", "contain", "have" and the like also mean "not limited to" (some units, components, materials, steps, etc.).

[0050] The terms such as "upper", "lower", "left", "right", "intermediate" and the like referred to in the present application are generally used for the purpose of intuitive understanding with reference to the drawings, and are not an absolute limitation on the positional relationship in the actual product. Changes in these relative positional relationships, without departing from the technical concept disclosed in the present application, are also considered within the scope of the present application.

[0051] After studying the existing roll-to-roll double-sided LDI equipment, the inventors found that it at least has the following shortcomings: firstly, it lacks a detection and compensation mechanism for the positional deviation of the substrate itself. When the substrate is stretched, twisted or deflected during transmission, it will cause the upper and lower pattern alignment to be inaccurate, which seriously affects the product yield; secondly, the entire system is an open-loop or semi-closed-loop control, and its accuracy completely depends on the absolute accuracy of mechanical transmission, which cannot meet the compensation demand for dynamic errors in high-speed continuous production. Therefore, it is necessary to propose a roll-to-roll LDI exposure system capable of real-time detection and compensation of substrate positional deviation and high-precision double-sided alignment.

[0052] The specific structure and exposure method of the roll-to-roll double-sided LDI exposure system provided by the present application will be described in detail below in conjunction with specific embodiments.

[0053] Embodiment one

[0054] Referring to Figure 1 The roll-to-roll double-sided LDI exposure system provided by the present embodiment mainly includes a control device (not shown), a roll-to-roll take-up and pay-off device, a marking device, an alignment camera (not shown) and a laser exposure module.

[0055] The roll-to-roll take-up and pay-off device is used to continuously transport a belt-shaped flexible substrate 3 (such as a PI film, a dry film, etc.). Along the transmission direction of the substrate (the Y-axis direction in the figure), a marking station A and an exposure station B are formed in sequence. The roll-to-roll take-up and pay-off device includes a pay-off roll 1 and a take-up roll 2 arranged opposite to each other, such as Figure 2 Of course, a plurality of guide rolls can also be arranged between the pay-off roll 1 and the take-up roll 2 to support and tension the substrate, so that it passes through each station smoothly. Since the roll-to-roll take-up and pay-off device belongs to the prior art, the structural principle of the roll-to-roll take-up and pay-off device will not be described herein.

[0056] The marking device is arranged at the marking station A. In the embodiment, the marking device comprises four laser marking heads 4, which are respectively arranged above four corner points of the substrate web transported to the marking station A, as shown in Figure 3 . They are used to make four positioning marks (i.e. laser marking points) on the substrate. These marks will be used as position references in the subsequent process.

[0057] It should be noted that the four laser marking points made by the marking device can be retained on the substrate. When the substrate is exposed at the exposure station, the system can identify these mark points by the alignment camera, and adjust the poses of the two laser projection head arrays according to them, so as to realize accurate alignment of the laser pattern and the substrate.

[0058] The laser exposure module is arranged at the exposure station B. Its core comprises a pose adjustment mechanism 7 and two laser projection head arrays, i.e. the first laser projection head array 5 and the second laser projection head array 6, driven by the mechanism, which are arranged in opposite parallel and distributed on the upper and lower sides of the substrate transported to the exposure station B. The pose adjustment mechanism 7 is used to drive the entire laser projection head array to adjust the pose in the horizontal plane.

[0059] The alignment camera is a CCD camera, which is installed at the exposure station B and has a field of view range covering the four mark points on the substrate. In the embodiment, four alignment cameras can be arranged to simultaneously collect the four laser marking points.

[0060] The control device is an industrial computer (IPC) or a programmable logic controller (PLC), which is signal connected with the motors of the roll-to-roll take-up and pay-off device, the marking device, the alignment camera and the pose adjustment mechanism 7, and coordinates the work flow of the entire system.

[0061] In a preferred embodiment, the pose adjustment mechanism 7 of the present application can drive the two laser projection head arrays to have at least two translational degrees of freedom and one rotational degree of freedom in the horizontal plane.

[0062] Preferably, the pose adjustment mechanism 7 comprises a rotating assembly, a first linear motion assembly and a second linear motion assembly. Wherein:

[0063] The rotating assembly is used to provide a rotational degree of freedom about a vertical axis. Specifically, it comprises a driving motor and a rotary table connected with the output shaft of the driving motor, and the rotation axis (denoted as Z axis) of the rotary table is vertically arranged.

[0064] The first linear motion assembly is installed at the output end of the rotary table, and is used to provide a linear motion degree of freedom along the Y axis (substrate transportation direction). Specifically, it comprises a first linear motor, a first linear guide rail driven by the first linear motor, and a first slider assembled on the first linear guide rail.

[0065] The second linear motion assembly is installed on the first slider to provide a linear motion degree of freedom along the X axis (a horizontal direction perpendicular to the substrate transport direction). Specifically, it includes a second linear motor, a second linear guide rail driven by the second linear motor, and a second slider assembled on the second linear guide rail.

[0066] In a preferred embodiment, a vertical connecting plate is arranged at the output end of the pose adjustment mechanism 7 to connect the two laser projection head arrays. Specifically, the vertical connecting plate is fixed on the second slider. The upper end of the vertical connecting plate is fixedly connected with the mounting plate of the first laser projection head array 5, and the lower end is fixedly connected with the mounting plate of the second laser projection head array 6. In this way, when any part of the pose adjustment mechanism 7 moves, the upper and lower laser projection head arrays can be driven to move synchronously as a rigid whole, ensuring that the upper and lower exposure patterns still maintain the standard correspondence relationship after adjustment.

[0067] Of course, the first linear motion assembly and the second linear motion assembly in the present application can also be roller screw structures or other structures capable of achieving high-precision linear motion.

[0068] The roll-to-roll take-up device in the present application also includes a displacement encoder for detecting the feeding length of the feed roller 1, and the displacement encoder is connected with the control device signal. The control device is used to confirm that the pre-exposed substrate web has entered the exposure station and the pre-marked substrate web has entered the marking station according to the feedback signal of the displacement encoder. The control device can send a stop signal to the roll-to-roll take-up device, send a marking signal to the marking device, and send an image acquisition instruction to the alignment camera according to the feedback signal of the displacement encoder. The control device can collect the projection signals of the two laser projection head arrays and send a feeding signal to the roll-to-roll take-up device according to the projection signals.

[0069] Therefore, the present application sequentially sets the marking station and the exposure station along the conveying direction of the flexible substrate 3, sets the marking device at the marking station to perform laser marking on the substrate, sets the pose adjustment mechanism 7, the upper and lower laser projection head arrays and the alignment camera at the exposure station, acquires the marking point image information through the alignment camera, and then drives the pose adjustment mechanism 7 to adjust the pose state of the two laser projection head arrays according to the image information, so that the exposure patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate 3, and the alignment accuracy is ensured. Therefore, the present application provides a unified physical reference based on the substrate itself for the upper and lower pattern, and fundamentally solves the misalignment problem of the upper and lower patterns caused by the deflection and stretching of the substrate, can cope with various dynamic errors in actual production, significantly improves the exposure accuracy, and improves the product processing yield. In addition, the present application realizes tracking of the substrate position through the displacement encoder, ensures that the marking, image acquisition and exposure actions are triggered at the correct time, and through the displacement encoder, the marking, alignment and exposure actions are connected in series to form a close automatic closed loop, realizing the synchronization and overlap of the actions of each station (such as the marking of the next image and the exposure of the previous image at the same time), which greatly improves the production efficiency of the equipment.

[0070] Embodiment two

[0071] Based on the double-sided LDI exposure system provided in embodiment one, the present application further provides a double-sided LDI exposure method using the double-sided LDI exposure system.

[0072] The process of the double-sided LDI exposure method provided by the present application is specifically as follows:

[0073] 1. Initialization and feeding: install the coiled flexible substrate 3 on the feeding roller 1, pass the leading tape of the substrate through the guide rollers and each station, and finally fix it on the take-up roller 2.

[0074] 2. Marking process: the control device determines that an unexposed substrate has entered the marking station A according to the feedback signal of the displacement encoder installed on the main drive roller of the roll-to-roll take-up and pay-off device; the control device sends a stop signal to the roll-to-roll take-up and pay-off device to temporarily stop the substrate. Subsequently, the control device sends a marking signal to the marking device, and the four laser marking heads 4 act synchronously to make laser marking points at the four corner points of the substrate. After marking is completed, the control device controls the roll-to-roll take-up and pay-off device to start again to convey the marked substrate to the exposure station B.

[0075] 3. The exposure process: the displacement encoder continuously monitors the feeding length. When the control device determines that the marked substrate web has completely entered the exposure station B according to the encoder feedback signal, the control device sends a stop signal again to stop the substrate accurately at the exposure position. Then the visual alignment and pose adjustment are performed. Specifically, the control device sends an image acquisition signal to the alignment camera, the alignment camera acquires images of the four laser marking points, the image processing unit in the control device processes and analyzes the acquired images and obtains the actual coordinates of the four laser marking points, then compares the actual coordinates with the pre-stored theoretical coordinates to obtain the deviation (such as the translation amount in the X direction, the translation amount in the Y direction, and the rotation amount in the XY plane) between the current pose of the substrate and the ideal pose, and then generates a control instruction according to the obtained deviation to drive the pose adjustment mechanism 7 to act, so that the exposure patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate 3, and then the two laser projection head arrays are started to perform synchronous scanning exposure on the upper and lower surfaces of the substrate.

[0076] Since the marking station and the exposure station are arranged before and after the present application, the double-sided LDI exposure method provided by the present application can realize synchronous marking and exposure. Specifically:

[0077] While the current web (i.e. the substrate web transported to the exposure station) is being exposed, the system has controlled the roll-to-roll feeding and winding device to transport the next substrate web to be exposed to the marking station A and simultaneously perform the marking process. This parallel pipeline operation mode of exposure and marking eliminates the waiting time between stations and improves the overall production efficiency of the equipment.

[0078] After the exposure of the current web is completed, the winding roller 2 is wound and the feeding roller 1 is fed, and the system repeatedly performs the above marking and exposure process to realize continuous and efficient automatic production.

[0079] In specific application examples, the timing of marking and exposure can be selected according to the production rhythm. For example, the flexible substrate 3 transported to the marking station can be marked by the marking device when the alignment camera acquires image information of the laser marking points on the flexible substrate 3 transported to the exposure station; or the flexible substrate 3 transported to the marking station can be marked by the marking device when the two laser projection head arrays expose the flexible substrate 3 in the exposure station. As long as the waiting time between stations can be eliminated and the production efficiency can be maximized, it is acceptable.

[0080] In summary, the application provides a double-sided LDI exposure system and an exposure method based on roll-to-roll. The double-sided LDI exposure system is provided with a marking station and an exposure station. The marking station is provided with a marking device to perform laser marking on the substrate. The exposure station is provided with a pose adjustment mechanism, two laser projection head arrays and an alignment camera. The alignment camera collects marking point image information, and the pose adjustment mechanism is driven by the image information to adjust the pose state of the two laser projection head arrays, so that the exposure patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate, ensuring the alignment accuracy. Therefore, the application provides a unified physical reference based on the substrate itself for the upper and lower pattern marking points, fundamentally solves the misalignment problem of the upper and lower patterns caused by substrate deflection, stretching and the like, can cope with various dynamic errors in actual production, significantly improves the exposure accuracy and improves the product processing yield. The exposure method based on the double-sided LDI exposure system provided by the application not only has the function of self-adaptive dynamic error adjustment, but also can mark the next width while exposing the current width, eliminating the waiting time between stations and improving the processing efficiency of the product.

[0081] The technical features of the above embodiments can be combined in any manner (as long as the combination of the technical features does not contradict), and to make the description concise, not all possible combinations of the technical features in the above embodiments are described. The embodiments not explicitly described should also be considered as falling within the scope of the present application.

[0082] The application is described in detail above by general description and specific embodiments. It should be understood that, based on the technical concept of the application, some conventional adjustments or further innovations can be made to these specific embodiments; as long as they do not deviate from the technical concept of the application, the technical solutions obtained by these conventional adjustments or further innovations also fall within the protection scope of the claims of the present application.

Claims

1. A roll-to-roll based double-sided LDI exposure system, characterized in that, The control device is connected with a roll-to-roll take-up and pay-off device, a marking device, an alignment camera and a laser exposure module respectively; The roll-to-roll take-up and pay-off device is used for continuously conveying a flexible substrate, and a marking station and an exposure station are sequentially arranged along the conveying direction of the flexible substrate; The marking device is arranged at the marking station, and is used for making laser marking points on the flexible substrate conveyed to the marking station; The laser exposure module is arranged at the exposure station, and comprises a pose adjustment mechanism, and a first laser projection head array and a second laser projection head array driven by the pose adjustment mechanism and arranged oppositely, the first laser projection head array and the second laser projection head array are distributed on the upper and lower sides of the flexible substrate conveyed to the exposure station; The alignment camera is used for collecting image information of the laser marking points on the flexible substrate conveyed to the exposure station; The control device can control the pose adjustment mechanism to act based on the image information collected by the alignment camera, so as to adjust the poses of the first laser projection head array and the second laser projection head array, and make the exposure patterns of the two laser projection head arrays align with the target region on the flexible substrate.

2. The roll-to-roll based double-sided LDI exposure system according to claim 1, wherein, The marking device comprises four laser marking heads, and the four laser marking heads are arranged above four corner points of the flexible substrate conveyed to the marking station.

3. The roll-to-roll based double-sided LDI exposure system according to claim 1, wherein, The pose adjustment mechanism comprises a rotating assembly used for driving the two laser projection head arrays to rotate along a vertical axis, a first linear motion assembly mounted at the output end of the rotating assembly and used for driving the two laser projection head arrays to reciprocate along an X axis, and a second linear motion assembly mounted at the output end of the first linear motion assembly and used for driving the two laser projection head arrays to reciprocate along a Y axis; Wherein, the conveying direction of the flexible substrate is denoted as the Y axis, and a direction perpendicular to the conveying direction of the flexible substrate in a horizontal plane is denoted as the X axis.

4. The roll-to-roll based double-sided LDI exposure system according to claim 3, wherein, The rotating assembly comprises a driving motor and a rotating table connected with the output shaft of the driving motor; The first linear motion assembly comprises a first linear motor, a first linear guide rail connected with the first linear motor, and a first sliding block arranged on the first linear guide rail, and the first linear guide rail is fixed on the rotating table; The second linear motion assembly comprises a second linear motor, a second linear guide rail connected with the second linear motor, and a second sliding block arranged on the second linear guide rail, and the second linear guide rail is fixed on the first sliding block; The second sliding block is fixed with a vertical connecting plate, the upper end of the vertical connecting plate is connected with the first laser projection head array, and the lower end of the vertical connecting plate is connected with the second laser projection head array.

5. The roll-to-roll based double-sided LDI exposure system according to claim 1, wherein, The first laser projection head array comprises a first projection head mounting plate and a plurality of laser projection heads arranged sequentially on the first projection head mounting plate; The second laser projection head array comprises a second projection head mounting plate and a plurality of laser projection heads arranged sequentially on the second projection head mounting plate; The first projection head mounting plate and the second projection head mounting plate are horizontally opposite, and the same side of the first projection head mounting plate and the second projection head mounting plate is connected through a vertical connecting plate, and the vertical connecting plate is fixedly connected with the output end of the pose adjustment mechanism.

6. The roll-to-roll based double-sided LDI exposure system according to claim 1, wherein, The roll-to-roll take-up device comprises a material feeding roller and a material collecting roller which are arranged opposite to each other, and the marking station and the exposure station are sequentially arranged between the material feeding roller and the material collecting roller. The control device can send a material feeding signal to the roll-to-roll take-up device, and the roll-to-roll take-up device drives the material feeding roller and the material collecting roller to rotate according to the material feeding signal, so as to realize the transmission of the flexible substrate from the marking station to the exposure station.

7. The roll-to-roll based double-sided LDI exposure system according to claim 6, wherein, The roll-to-roll take-up device further comprises a displacement encoder for detecting the feeding length of the material feeding roller, and the displacement encoder is connected with the control device; the control device confirms that the pre-exposure substrate has entered the exposure station and the pre-marking substrate has entered the marking station according to the feedback signal of the displacement encoder; the control device can send a stop signal to the roll-to-roll take-up device, send a marking signal to the marking device, and send an image acquisition instruction to the alignment camera according to the feedback signal of the displacement encoder. The control device can collect the projection signals of the two laser projection head arrays, and send a material feeding signal to the roll-to-roll take-up device according to the projection signals.

8. An exposure method using the roll-to-roll based double-sided LDI exposure system according to any one of claims 1 to 7, characterized by, The method comprises the following steps: S1: transmitting the flexible substrate to the marking station through the roll-to-roll take-up device; S2: making laser marking points on the flexible substrate through the marking device; S3: transmitting the marked flexible substrate to the exposure station; S4: collecting the image information of the laser marking points on the flexible substrate transmitted to the exposure station through the alignment camera; S5: the control device calculates the deviation between the current position and the preset position of the flexible substrate according to the image information; S6: the control device drives the pose adjustment mechanism to adjust the pose state of the first laser projection head array and the second laser projection head array according to the deviation, so that the exposure patterns of the two laser projection head arrays are aligned with the target area on the flexible substrate; S7: starting the first laser projection head array and the second laser projection head array to synchronously expose the upper and lower surfaces of the flexible substrate; When the alignment camera collects the image information of the laser marking points on the flexible substrate transmitted to the exposure station, the marking device marks the flexible substrate transmitted to the marking station.

9. The exposure method according to claim 8, wherein When the two laser projection head arrays expose the flexible substrate in the exposure station, the marking device marks the flexible substrate transmitted to the marking station.

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