Coating device

Abstract

When a coating liquid (p) is discharged from a slit-shaped discharge port (33) of a coating nozzle (30) to a coated body (W) and the coating nozzle and the coated body are relatively moved in a coating direction (Y) to coat the surface of the coated body with the coating liquid, a width adjusting unit (50) for adjusting the width of the coating liquid discharged from the slit-shaped discharge port is provided. On the basis of a storage means (60) that stores arithmetic expressions in various coating condition data, a calculation means (62) calculates the difference in width between the width of the coating liquid discharged from the slit-shaped discharge port and the width of the coating liquid actually applied to the object to be coated, and on the basis of the calculated difference in width, the coating condition data of the object to be coated is calculated. The width adjustment means and the like are controlled by a control device (63).

Description

Technical Field

[0001] This invention relates to a coating apparatus in which coating liquid in a coating liquid reservoir supplied to a coating nozzle is discharged through a slit-shaped outlet at the front end of the nozzle to a workpiece, and the coating nozzle and the workpiece are moved relative to each other in a coating direction in which the coating liquid is applied to the workpiece, thereby applying the coating liquid to the surface of the workpiece. In particular, the coating apparatus is characterized by the ability to apply the coating liquid to the workpiece with an accurate coating width and at an accurate coating position, even when the coating width and position of the coating liquid on the workpiece vary. Background Technology

[0002] In the past, when manufacturing semiconductor equipment, LCD panels, etc., coating liquids such as chemicals and coatings were applied to the glass, thin film and other objects using coating equipment.

[0003] Furthermore, in recent years, as a computational formula for automating the complex actions of such devices, a "neural network" using "weighting," "activation function," etc., as shown in Patent Document 1, has sometimes been employed.

[0004] Furthermore, when applying liquid medicine, coating, etc. to the object as described above, in the past, it was generally coated into a fixed shape such as a quadrilateral or a circle. However, in recent years, products have become more diversified, and the coating liquid is coated into various shapes for various objects.

[0005] Here, conventionally, as shown in Patent Document 2, a coating apparatus is used in which a coating nozzle including a slit-shaped outlet is used to discharge coating liquid contained in a coating liquid containment section of the coating nozzle from the slit-shaped outlet at the front end of the coating nozzle to the object to be coated, and the coating nozzle and the object to be coated are moved relative to each other in the coating direction of coating the object to be coated, so as to coat the surface of the object to be coated.

[0006] However, the coating apparatus shown in Patent Document 2 can coat the coating liquid into a quadrilateral shape on the surface of the object to be coated, but it cannot coat the surface of the object to be coated in various shapes while simultaneously changing the coating width and coating position of the coating liquid.

[0007] Furthermore, Patent Document 3 discloses a structure in which a cylindrical coating liquid supply body with a guide recess forming a predetermined pattern shape on its outer peripheral surface, which guides the coating liquid in the coating liquid receiving section to the slit-shaped outlet, is arranged to be rotatable above the slit-shaped outlet. The coating liquid supply body is rotated above the slit-shaped outlet to guide the coating liquid in the coating liquid receiving recess through the guide recess to the slit-shaped outlet and to coat the surface of the coating liquid. The width of the coating liquid coated on the surface of the coating body varies according to the shape of the guide recess arranged in the coating liquid supply body.

[0008] Furthermore, Patent Document 4 shows a structure in which a long discharge slit is provided along the axial direction in a cylindrical nozzle body, and a cylindrical adjusting inner cylinder with trapezoidal cutouts is rotatably inserted into the nozzle body. The position of the cutouts in the adjusting inner cylinder relative to the discharge slit in the nozzle body is adjusted, thereby changing the width of the coating liquid applied to the surface of the coated object.

[0009] Furthermore, Patent Document 5 illustrates a structure in which the coating liquid in the coating liquid reservoir supplied to the coating nozzle is discharged to the coated body through a slit-shaped outlet at the front end of the coating nozzle, and the coating nozzle and the coated body are moved relative to each other in the coating direction in which the coating liquid is applied to the coated body, so as to apply the coating liquid to the surface of the coated body. A width adjustment unit is provided to adjust the width of the coating liquid in the coating liquid reservoir applied to the coated body through the slit-shaped outlet, and a cross-direction movement unit is provided to move the coating nozzle and the coated body relative to each other in a direction intersecting the coating direction. The width adjustment unit changes the width of the coating liquid applied to the surface of the coated body, and the cross-direction movement unit changes the position of the coated body in the width direction.

[0010] However, in cases where, as shown in Patent Documents 3 and 4, the coating nozzle and the object to be coated are moved relative to each other in the coating direction in which the coating liquid is applied to the object to be coated, and the width of the coating liquid applied to the surface of the object to be coated is varied, as shown in Patent Document 4, the width of the coating liquid applied to the surface of the object to be coated is varied, or the position of the object to be coated with the coating liquid is changed in the width direction, during the aforementioned changes, the coating liquid supplied from the slit-shaped outlet of the coating nozzle to the surface of the object to be coated is pulled by the coating liquid already applied to the surface of the object to be coated, resulting in the problem that the coating liquid cannot be accurately applied to the desired predetermined coating position.

[0011] Furthermore, the above situation varies depending on the distance between the slit-shaped outlet of the coating nozzle and the surface of the object being coated, the viscosity of the coating liquid, their changes, and the rate of change, which is also a problem.

[0012] Existing technical documents

[0013] Patent documents

[0014] Patent Document 1: Japanese Patent Publication No. 2021-532432

[0015] Patent Document 2: Japanese Patent No. 6326315

[0016] Patent Document 3: Japanese Patent No. 6847560

[0017] Patent Document 4: Japanese Patent Application Publication No. 10-192762

[0018] Patent Document 5: Japanese Patent No. 7266957 Summary of the Invention

[0019] The technical problem to be solved by the present invention

[0020] The object of the present invention is to solve the aforementioned problem in the following coating apparatus: the coating liquid in the coating liquid receiving part supplied to the coating nozzle is discharged to the coated body through the slit-shaped outlet at the front end of the coating nozzle, and the coating nozzle and the coated body are moved relative to each other in the coating direction of coating the coating liquid onto the coated body, so as to coat the coating liquid onto the surface of the coated body.

[0021] That is, in this invention, the objective is that, when applying a coating liquid to the surface of a body using a coating apparatus as described above, even if the coating width and position of the coating liquid on the body are varied, the coating liquid can be applied to the body with an accurate coating width and to the desired coating position.

[0022] Technical solutions for solving technical problems

[0023] To solve the aforementioned technical problems, in the first coating apparatus of the present invention, coating liquid in the coating liquid receiving section supplied to the coating nozzle is discharged to the coated body through a slit-shaped outlet at the front end of the coating nozzle, and the coating nozzle and the coated body are moved relative to each other in the coating direction of coating the coated body to coat the coating liquid onto the surface of the coated body. A width adjustment unit is provided to adjust the width of the coating liquid discharged from the coating liquid receiving section through the slit-shaped outlet. When the width of the coating liquid coated on the coated body is changed by the width adjustment unit, a calculation unit calculates the width difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped outlet and the actual width of the coating liquid coated on the coated body, based on a storage unit storing calculation formulas in various coating condition data. Based on the width difference calculated by the calculation unit, a control device controls the width adjustment unit to adjust the width of the coating liquid discharged through the slit-shaped outlet.

[0024] Furthermore, to solve the aforementioned technical problems, in the second coating apparatus of the present invention, the coating liquid in the coating liquid receiving section supplied to the coating nozzle is discharged to the coated body through a slit-shaped outlet at the front end of the coating nozzle, and the coating nozzle and the coated body are moved relative to each other in the coating direction in which the coating liquid is applied to the coated body, so as to coat the coating liquid onto the surface of the coated body. A cross-direction moving unit is provided, which moves the coating nozzle and the coated body relative to each other in a direction intersecting the coating direction. The cross-direction moving unit further moves the coating nozzle and the coated body in a direction intersecting the coating direction. When the coating liquid moves relative to the object in the direction of the cross direction, causing the position of the coating liquid on the object to move in the direction intersecting the coating direction, the storage unit, which stores formulas based on various coating condition data, calculates the position difference between the position where the coating nozzle and the object are moved relative to each other in the direction intersecting the coating direction by the cross direction moving unit and the actual position of the coating liquid applied to the object. Based on the position difference calculated by the calculation unit, the control device controls the cross direction moving unit to adjust the position where the coating nozzle and the object are moved relative to each other in the direction intersecting the coating direction.

[0025] Furthermore, to solve the aforementioned technical problems, in the third coating apparatus of the present invention, the coating liquid in the coating liquid receiving section supplied to the coating nozzle is discharged to the coated body through a slit-shaped outlet at the front end of the coating nozzle, and the coating nozzle and the coated body are moved relative to each other in the coating direction in which the coating liquid is applied to the coated body, so as to coat the coating liquid onto the surface of the coated body. A width adjustment unit and a cross-direction movement unit are provided. The width adjustment unit adjusts the width of the coating liquid discharged from the coating liquid receiving section through the slit-shaped outlet. The cross-direction movement unit moves the coating nozzle and the coated body relative to each other in a direction intersecting the coating direction. By changing the width of the coating liquid applied to the coated body through the width adjustment unit and by moving the coating nozzle and the coated body relative to each other in a direction intersecting the coating direction through the cross-direction movement unit, the position of the coating liquid applied to the coated body is adjusted. When the device moves in a direction intersecting the coating direction, the storage unit, which stores calculation formulas based on various coating condition data, calculates the width difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped outlet and the actual width of the coating liquid applied to the coated body. The calculation unit also calculates the position difference between the position where the coating nozzle and the coated body move relative to each other in a direction intersecting the coating direction via the intersecting direction movement unit and the actual position of the coating liquid applied to the coated body. Based on the width difference calculated by the calculation unit, the control device controls the width adjustment unit to adjust the width of the coating liquid discharged through the slit-shaped outlet. Furthermore, based on the position difference calculated by the calculation unit, the control device controls the intersecting direction movement unit to adjust the position where the coating nozzle and the coated body move relative to each other in a direction intersecting the coating direction.

[0026] Furthermore, in the first to third coating apparatuses of the present invention, when the width of the coating liquid applied to the coated body is changed by the width adjustment unit, or when the coating nozzle and the coated body are moved relative to each other in a direction intersecting the coating direction by the cross-direction moving unit, so that the position of the coating liquid applied to the coated body moves in a direction intersecting the coating direction, the storage unit, which stores the calculation formulas in various coating condition data, calculates the width difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped outlet and the actual width of the coating liquid applied to the coated body, and calculates the difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped outlet and the actual width of the coating liquid applied to the coated body. The calculation unit calculates the positional difference between the position where the coating nozzle and the coated object move relative to each other in the direction intersecting the coating direction via the cross-direction moving unit and the actual position of the coating liquid applied to the coated object. Based on the calculated width difference, the control device controls the width adjustment unit to adjust the width of the coating liquid discharged through the slit-shaped outlet, i.e., the width of the slit of the slit-shaped outlet. Based on the calculated positional difference, the control device controls the cross-direction moving unit to adjust the position where the coating nozzle and the coated object move relative to each other in the direction intersecting the coating direction.

[0027] Invention Effects

[0028] In the first to third coating apparatuses of the present invention, when the width of the coating liquid applied to the surface of the coated body changes, or when the position of the coating liquid applied to the surface of the coated body moves in a direction intersecting the coating direction, as described above, the storage unit storing formulas based on various coating condition data calculates the width difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped outlet and the actual width of the coating liquid applied to the coated body. The calculation unit calculates the position difference between the position where the coating nozzle moves relative to the coated body in a direction intersecting the coating direction via the cross-direction moving unit and the actual position of the coating liquid applied to the coated body. Based on the calculated width difference, the control device controls the width adjustment unit to adjust the width of the coating liquid discharged through the slit-shaped outlet. Based on the calculated position difference, the control device controls the cross-direction moving unit to adjust the position where the coating nozzle moves relative to the coated body in a direction intersecting the coating direction.

[0029] As a result, in the first to third coating apparatuses of the present invention, even when the width of the coating liquid applied to the surface of the coated body changes, or when the position of the coating liquid applied to the surface of the coated body changes in a direction intersecting the coating direction, the coating liquid can be applied to the coated body with an accurate coating width, and the coating liquid can be applied to the coated body at an accurate coating position. Attached Figure Description

[0030] Figure 1 This is a schematic top view illustrating an example of a coating apparatus using an embodiment of the present invention.

[0031] Figure 2 This is a schematic front view illustration showing an example of a coating apparatus using an embodiment of the present invention.

[0032] Figure 3 The diagram illustrates that in the coating apparatus of the aforementioned embodiment, the coating liquid supply body is configured to rotate above a slit-shaped outlet within the coating liquid receiving section of the coating nozzle supplying the coating liquid. Figure 3 (A) is a schematic cross-sectional view of the coating nozzle along its length. Figure 3 (B) is a schematic cross-sectional view illustrating the direction intersecting the length direction of the coating nozzle.

[0033] Figure 4 The illustration shows a coating apparatus according to the aforementioned embodiment, in which a guide recess, approximately triangular in shape when viewed from above, is provided on the outer peripheral surface of a coating liquid supply body located within a coating liquid receiving portion of a coating nozzle that is rotatably disposed for supplying coating liquid. Figure 4 (A) is a schematic front view of a coating liquid supply body with a guide recess. Figure 4 (B) is an unfolded view of the outer peripheral surface of the coating liquid supply body with the guide recess.

[0034] Figure 5 (A) to (C) are schematic cross-sectional diagrams illustrating the state of the coating liquid supplied from the slit-shaped outlet to the surface of the object to be coated in the coating apparatus of the aforementioned embodiment, when the width of the guide recess in the coating liquid supply body located above the slit-shaped outlet is changed. Figure 5 (A) shows the state immediately after coating. Figure 5 (B) shows the state in which the coating liquid is drawn when the width of the guide recess widens. Figure 5 (C) shows the state in which the coating liquid is drawn when the width of the guide recess narrows.

[0035] Figure 6This is a top view illustrating a general description of the coating apparatus in the aforementioned embodiment, where, when the width of the coating liquid discharged from the slit-shaped outlet is changed by the width adjustment unit, the width of the slit is changed by the control device while the coating liquid nozzle is moved in the Y direction, thereby controlling the width of the coating liquid discharged from the slit-shaped outlet and coating the surface of the object to be coated with the coating liquid to the desired width. In this diagram, the solid line shows the edge position of the desired coating liquid, the dashed line shows the edge position of the width of the slit-shaped outlet, and the shaded area shows the coating liquid actually applied.

[0036] Figure 7 Figures (A) to (C) are schematic cross-sectional views illustrating the state of the coating liquid supplied from the slit-shaped outlet to the surface of the coated body in the coating apparatus of the aforementioned embodiment, when the coating nozzle is moved in the width direction of the coated body intersecting the coating direction, thereby moving the position of the coating liquid applied to the coated body. Figure 7 (A) shows the state immediately after coating. Figure 7 (B) shows the state in which the coating liquid is drawn as the coating nozzle moves in the X1 direction. Figure 7 (C) shows the state in which the coating liquid is drawn as the coating nozzle moves in the X2 direction.

[0037] Figure 8 This is a schematic plan view illustrating the state of the coating apparatus in the aforementioned embodiment, where, when the coating nozzle is moved in the width direction of the coated body intersecting the coating direction by the cross-direction moving unit, and the position of the coating liquid applied to the coated body is moved, while the coating nozzle is moved in the Y direction, the movement position of the coating liquid discharged from the slit-shaped outlet to the width direction of the coated body is controlled by the control device while the width of the slit-shaped outlet remains constant, so as to coat the coating liquid onto the desired position on the surface of the coated body. In this view, the solid line shows the desired edge position of the coating liquid, the dashed line shows the edge position of the width of the slit-shaped outlet, and the shaded area shows the coating liquid actually applied.

[0038] Figure 9This is a schematic plan view illustrating the following state in the coating apparatus of the aforementioned embodiment: when the width of the coating liquid applied to the surface of the object to be coated is changed, and the position of the coating liquid applied to the object to be coated is changed in the width direction, thereby applying the coating liquid to the surface of the object to be coated W, while moving the coating nozzle in the Y direction, the width of the coating liquid discharged from the slit-shaped outlet is controlled by a control device to coat the surface of the object to be coated with the coating liquid to the desired width, and the movement position of the coating liquid discharged from the slit-shaped outlet in the width direction of the object to be coated is controlled by the control device to coat the surface of the object to the desired position. In this view, the solid line shows the desired edge position of the coating liquid, the dashed line shows the edge position of the width of the slit-shaped outlet, and the shaded area shows the coating liquid actually applied. Detailed Implementation

[0039] Hereinafter, based on the accompanying drawings, a coating apparatus according to an embodiment of the present invention will be specifically described. Furthermore, the coating apparatus of the present invention is not limited to the apparatus shown in the following embodiments, and can be implemented with appropriate modifications without changing the spirit of the invention.

[0040] In the coating apparatus of this embodiment, such as Figure 1 and Figure 2 As shown, the object to be coated, W, is placed on a fixed platform 10. Traveling tracks 11 are laid on both sides of the object to be coated, along the coating direction Y of the object to be coated, i.e., the length direction of the object to be coated, where the coating liquid p is applied. A traveling trolley 20, which is a door-shaped structure, is placed between a pair of support pillars 21 on the traveling tracks 11 on both sides and is supported by a beam 22. A coating nozzle 30 is installed on the traveling trolley 20. The traveling trolley 20 travels along the traveling tracks 11 and along the coating direction Y of the length direction of the object to be coated, so that the coating nozzle 30 moves in the coating direction Y of the length direction of the object to be coated.

[0041] Furthermore, in the coating apparatus of this embodiment, when the coating nozzle 30 is moved in the width direction X of the workpiece W intersecting the coating direction Y by the cross-direction moving unit (cross-direction moving control device) 40, and the position of the coating liquid p applied to the workpiece W is moved in the width direction X intersecting the coating direction Y, as... Figure 1 and Figure 2As shown, the coating nozzle 30 is movably held in the traveling trolley 20 by the retaining member 43 on the guide rail 23 located below the beam 22. The traveling trolley 20 is equipped with a motor 41 and a long male threaded member 42. The male threaded member 42 is inserted into the threaded block 43a in the retaining member 43. The motor 41 rotates the male threaded member 42 and moves the coating nozzle 30 in the width direction X of the coated body W, which intersects the coating direction Y, via the threaded block 43a.

[0042] Furthermore, in the coating apparatus of this embodiment, the beam 22 can be raised and lowered in the vertical direction by means of a lifting mechanism (not shown) provided on the support column 21.

[0043] Furthermore, in the coating apparatus of this embodiment, such as Figure 3 As shown in (A) and (B), a coating liquid supply pipe 34 for supplying coating liquid p is provided in the coating nozzle 30, and the on / off valve 35 provided in the coating liquid supply pipe 34 is opened to supply the coating liquid p into the coating liquid receiving part 32 of the coating nozzle 30, and the coating liquid p supplied to the coating liquid receiving part 32 is coated onto the object W through the slit-shaped outlet 33 at the front end of the coating nozzle 30.

[0044] Furthermore, in the coating apparatus of this embodiment, when the width of the coating liquid p supplied to the coating liquid receiving section 32 in the coating nozzle 30 is adjusted by the width adjustment unit (width adjustment control device) 50 to discharge the coating liquid p from the slit-shaped outlet 33 to the surface of the coated body W and coat it onto the surface of the coated body W, as follows: Figure 4 As shown in (A) and (B), a cylindrical coating liquid supply body 51 is used, which has a guide recess 51a with a top view shape of approximately triangular on its outer peripheral surface.

[0045] Moreover, such as Figure 3As shown in (A) and (B), the coating liquid supply body 51 is rotatably disposed within the coating liquid receiving portion 32 such that the coating liquid supply body 51 is positioned above the slit-shaped outlet 33. The rotating shaft 51b of the coating liquid supply body 51 extends laterally toward the coating nozzle 30. The coating liquid supply body 51 is rotated via the rotating shaft 51b by the rotating device 52, thereby changing the width of the guide recess 51a, which is guided above the slit-shaped outlet 33 and is provided on the outer peripheral surface of the coating liquid supply body 51. This changes the width of the coating liquid p supplied to the coating liquid receiving portion 32 and guided to the slit-shaped outlet 33 through the guide recess 51a. Furthermore, in this embodiment, a guide recess 51a with a generally triangular shape in plan view is provided on the outer peripheral surface of the cylindrical coating liquid supply body 51. However, the shape of the guide recess 51a is not particularly limited; for example, it can be elliptical, trapezoidal, or various other shapes.

[0046] Here, in the coating apparatus of this embodiment, when various coating conditions are changed, such as the viscosity of the coating liquid p, the distance d between the slit-shaped outlet 33 of the coating nozzle 30 and the surface of the coated body W, the speed at which the coating nozzle 30 moves in the width direction X of the coated body W (which intersects the coating direction Y) via the cross-direction moving unit 40, and the speed at which the width of the coating liquid p discharged from the slit-shaped outlet 33 of the coating nozzle 30 to the coated body W changes via the width adjusting unit 50, the formula for how the state of the coating liquid p actually coated on the surface of the coated body W (the edge position of the coating liquid in the width direction) changes is stored in the data storage. Figure 1 and Figure 2 The storage unit 60 shown.

[0047] Furthermore, in the coating apparatus of this embodiment, when the coating liquid p is discharged from the slit-shaped outlet 33 of the coating nozzle 30 to the workpiece W and coated thereon, as... Figure 1 and Figure 2As shown, the viscosity and other coating condition data of the coating liquid p are input to the calculation unit 62 through the input unit 61. Based on the input coating condition data, the calculation unit 62 calculates the difference between the state of the coating liquid p discharged from the slit-shaped outlet 33 of the coating nozzle 30 (the edge position of the width of the slit-shaped outlet) and the state of the coating liquid p actually coated on the surface of the coated body W (the desired edge position of the coating liquid) according to the data of the calculation formula stored in the storage unit 60. Based on the difference (subtracting the difference) calculated by the calculation unit 62 as described above, the control device 63 controls the width adjustment unit 50 and controls the width of the coating liquid p discharged through the slit-shaped outlet 33, controls the cross-direction movement unit 40, and controls the speed at which the coating nozzle 30 moves in the width direction of the coated body W that intersects the coating direction Y.

[0048] Here, in the coating apparatus of this embodiment, when the width of the guide recess 51a located above the slit-shaped outlet 33 and on the outer peripheral surface of the coating liquid supply body 51 is changed by rotating the coating liquid supply body 51 via the width adjustment unit 50, thereby changing the width of the coating liquid p applied to the surface of the coated object W, as follows: Figure 5 As shown in (A), the coating liquid supply body 51 is rotated from a state where the width of the guide recess 51a located above the slit-shaped outlet 33 is set to a predetermined width, as... Figure 5 As shown in (B), when the width of the guide recess 51a located above the slit-shaped outlet 33 is increased, thereby increasing the width of the coating liquid p applied to the surface of the coated body W, the coating liquid p discharged from the slit-shaped outlet 33 is pulled (drawn) by the coating liquid p already applied to the surface of the coated body W. This causes the increase in the width of the coating liquid p applied to the surface of the coated body W to be delayed relative to the increase in the width of the guide recess 51a located above the slit-shaped outlet 33. Figure 5 As shown in (C), when the width of the guide recess 51a located above the slit-shaped outlet 33 is reduced, thereby reducing the width of the coating liquid p applied to the surface of the coated body W, the coating liquid p discharged from the slit-shaped outlet 33 is also drawn by the coating liquid p already applied to the surface of the coated body W, thus delaying the reduction in the width of the coating liquid p applied to the surface of the coated body W relative to the reduction in the width of the guide recess 51a located above the slit-shaped outlet 33.

[0049] Therefore, in the coating apparatus of this embodiment, the width of the coating liquid p coated on the surface of the object to be coated W is changed, and the coating liquid p is... Figure 6When the desired pattern shown by the solid line is applied to the surface of the object to be coated, the input unit 61 inputs various coating conditions when the coating liquid p is actually applied to the surface of the object to be coated, such as the viscosity of the coating liquid p, the distance d between the slit outlet 33 of the coating liquid nozzle 30 and the surface of the object to be coated, the speed at which the width of the coating liquid p discharged from the slit outlet 33 of the coating nozzle 30 to the object to be coated is changed by the width adjustment unit 50, and the speed at which the coating nozzle 30 moves in the coating direction Y, etc., to the calculation unit 62. Based on the input coating conditions, the calculation unit 62 calculates the width difference between the width of the coating liquid p adjusted by the width adjustment unit 50 and discharged from the slit outlet 33 and the width of the coating liquid p actually applied to the surface of the object to be coated, according to the calculation formula data stored in the storage unit 60.

[0050] Next, based on the width difference calculated by the calculation unit 62 as described above, the width adjustment unit 50 is controlled by the control device 63, and... Figure 6 The width of the coating liquid p discharged through the slit-shaped outlet 33 is adjusted as shown by the dashed line to coat the surface of the object W with the desired width of the coating liquid p. As a result, the actual coated liquid... Figure 6 The shaded area indicates that the desired position can be aligned with the solid line.

[0051] Furthermore, in the coating apparatus of this embodiment, when the male threaded member 42 is rotated by the motor 41 via the cross-direction moving unit 40 and the coating nozzle 30 is moved in the width direction X of the coated body W intersecting the coating direction Y via the thread block 43a, and the position of the coating liquid p applied to the coated body W is moved in the width direction X intersecting the coating direction Y, as follows: Figure 7 As shown in (A), starting from the state where the coating nozzle 30 is located at the center of the width direction X of the object to be coated W, as... Figure 7 As shown in (B), the coating liquid p moves in one direction X1 of the width direction X of the coated body W, and when the position of the coating liquid p applied to the surface of the coated body W moves in one direction X1 of the width direction X of the coated body W, the coating liquid p discharged from the slit-shaped outlet 33 is pulled (drawn) by the coating liquid p already applied to the surface of the coated body W. The position of the coating liquid p applied to the surface of the coated body W in one direction X1 of the width direction X is delayed compared to the moving position of the coating nozzle 30 in one direction X1 of the width direction X. On the other hand, as Figure 7As shown in (C), when the coating nozzle 30, which has been moving in one direction X1 of the width direction X of the coated body W, returns to the center of the width direction X of the coated body W, and the coating nozzle 30 is moved in the opposite direction X2 of the width direction X of the coated body W, when the position of the coating liquid p applied to the surface of the coated body W is moved in the opposite direction X2 of the width direction X of the coated body W, the coating liquid p discharged from the slit-shaped outlet 33 is also similarly drawn by the coating liquid p already applied to the surface of the coated body W. The position of the coating liquid p applied to the surface of the coated body W in the opposite direction X2 of the width direction X is delayed compared with the moving position of the coating nozzle 30 in the opposite direction X2 of the width direction X.

[0052] Therefore, in the coating apparatus of this embodiment, while moving the position of the coating liquid p applied to the workpiece W in the width direction X intersecting the coating direction Y, the coating nozzle is moved in the Y direction, and the width of the slit-shaped discharge port is kept constant. Figure 8 When the desired pattern shown by the solid line is applied to the surface of the object to be coated, the input unit 61 inputs various coating conditions when the coating liquid p is actually applied to the surface of the object to be coated, such as the viscosity of the coating liquid p, the distance d between the slit-shaped outlet 33 of the coating nozzle 30 and the surface of the object to be coated, the speed at which the coating nozzle 30 moves in the width direction X of the object to be coated via the cross-direction movement unit 40, and the speed at which the coating nozzle 30 moves in the coating direction Y, etc., to the calculation unit 62. Based on the input coating conditions, the calculation unit 62 calculates the position difference between the position of the coating nozzle 30 moved in the width direction X of the object to be coated via the cross-direction movement unit 40 and the actual position of the coating liquid p applied to the surface of the object to be coated, according to the data of the formulas stored in the storage unit 60 for various coating conditions.

[0053] Next, based on the position difference calculated by the calculation unit 62 as described above, the control device 63 controls the intersecting direction movement unit 40, and... Figure 8 The dashed line indicates that the position of the slit-shaped outlet 33 in the coating nozzle 30 is adjusted to apply the coating liquid p to the surface of the object W at a desired position in the width direction X. As a result, the actual applied coating liquid... Figure 8 The shaded area indicates that the desired position can be aligned with the solid line.

[0054] Furthermore, in the coating apparatus of this embodiment, as described above, the width of the guide recess 51a provided above the slit-shaped outlet 33 and on the outer peripheral surface of the coating liquid supply body 51 is changed by the width adjustment unit 50, thereby changing the width of the coating liquid p applied to the surface of the coated body W. Additionally, the coating nozzle 30 is moved in the width direction X of the coated body W, which intersects the coating direction Y, by the cross-direction moving unit 40. While the coating nozzle moves in the Y direction, the position of the coating liquid p applied to the coated body W moves in the width direction X, which intersects the coating direction Y. Therefore, the width of the coating liquid p discharged from the slit-shaped outlet 33 of the coating nozzle 30 is different from the width of the coating liquid p actually applied to the surface of the coated body W. Furthermore, the position of the slit-shaped outlet 33 of the coating nozzle 30, which moves in the width direction X of the coated body W, is different from the position of the coating liquid p applied to the surface of the coated body W.

[0055] Therefore, in the coating apparatus of this embodiment, the width of the coating liquid p coated on the surface of the object to be coated W is changed as described above, and the position of the coating liquid p coated on the object to be coated W in the width direction X is changed, and so on... Figure 9 When the desired pattern shown by the solid line is applied to the surface of the object to be coated, the input unit 61 inputs various coating conditions when the coating liquid p is actually applied to the surface of the object to be coated, such as the viscosity of the coating liquid p, the distance d between the slit-shaped outlet 33 of the coating nozzle 30 and the surface of the object to be coated, the speed at which the width of the coating liquid p discharged from the slit-shaped outlet 33 of the coating nozzle 30 to the object to be coated is changed by the width adjustment unit 50, the speed at which the coating nozzle 30 moves in the width direction X of the object to be coated by the cross-direction movement unit 40, and the speed at which the coating nozzle 30 moves in the coating direction Y. The coating conditions, such as the moving speed, are input to the calculation unit 62. Based on the input coating conditions, the calculation unit 62 calculates the width difference between the width of the coating liquid p adjusted by the width adjustment unit 50 and discharged from the slit-shaped outlet 33 and the width of the coating liquid p actually coated on the surface of the coated body W, according to the data of the calculation formulas stored in the various coating conditions in the storage unit 60. It also calculates the position difference between the position of the coating nozzle 30 moved in the width direction X of the coated body W by the cross direction moving unit 40 and the position of the coating liquid p actually coated on the surface of the coated body W.

[0056] Next, based on the width difference calculated by the calculation unit 62 as described above, the width adjustment unit 50 is controlled by the control device 63, and based on the calculated position difference, the cross-direction movement unit 40 is controlled by the control device 63. Figure 9The width and movement position of the slit-shaped outlet 33 in the coating nozzle 30 are adjusted as shown by the dashed line to apply the coating liquid p to the surface of the object W with a desired width and at a desired position in the width direction X. As a result, the actual applied coating liquid... Figure 9 The shaded area indicates that the desired position can be aligned with the solid line.

[0057] In addition, the neural network using "weighting" and "activation function" described in Patent Document 1 can also be used in the formula used here.

[0058] Furthermore, here, the width difference and position difference are calculated by calculation unit 62 using arithmetic expressions. However, in cases where the same coating liquid p is repeatedly coated onto multiple identical objects W in the same pattern on a production line or similar facility, it can also be done in the following manner.

[0059] Virtual coating is applied to the initial object without considering width and position differences. The dimensions of the width and position differences are read by image recognition of the differences between the edge positions of the coated portion in the image of the pattern and the edge positions of the coated portion in the image of the desired pattern. In this way, complex formulas and large amounts of data for calculating the width and position differences are not required.

[0060] Symbol Explanation

[0061] 10. Fixed platform;

[0062] 11. Tracks for travel;

[0063] 20. Moving cart;

[0064] 21 pillars;

[0065] 22 beams;

[0066] 23. Guiding track;

[0067] 30. Coating nozzle;

[0068] 32. Coating liquid containment section;

[0069] 33. Slit-shaped discharge outlet;

[0070] 34. Coating liquid supply pipe;

[0071] 35. On / off valve;

[0072] 40 Cross-direction movement unit (cross-direction movement control device);

[0073] 41. Motor;

[0074] 42 Male threaded parts;

[0075] 43. Holding components;

[0076] 43a Threaded block;

[0077] 50 Width adjustment unit (width direction control device);

[0078] 51. Coating liquid supply body;

[0079] 51a Guide recess;

[0080] 51b pivot;

[0081] 52. Rotating device;

[0082] 60 storage units (storage units for arithmetic expressions);

[0083] 61 Input unit (coating condition input unit);

[0084] 62 computing units;

[0085] 63. Control device;

[0086] W is the coated body;

[0087] X represents the width direction;

[0088] X1 indicates one direction;

[0089] X2 is in the opposite direction;

[0090] Y represents the coating direction;

[0091] d. The distance between the slit-shaped outlet and the surface of the coated object;

[0092] p Coating liquid.

Claims

1. A coating apparatus, an application liquid in an application liquid accommodating section supplied to an application nozzle is discharged to a coated body through a slit-like discharge port at a tip portion of the application nozzle, and the application nozzle and the coated body are relatively moved in a coating direction in which the application liquid is applied to the coated body to apply the application liquid to a surface of the coated body, characterized in that a width adjusting unit that adjusts a width of the application liquid discharged through the slit-like discharge port in the application liquid accommodating section is provided, when the width of the application liquid applied to the coated body is changed by the width adjusting unit, a width difference between the width of the application liquid adjusted by the width adjusting unit and discharged through the slit-like discharge port and the width of the application liquid actually applied to the coated body is calculated by a calculation unit based on a calculation formula stored in a storage unit in various application condition data, and the width adjusting unit is controlled by a control device based on the width difference calculated by the calculation unit to adjust the width of the application liquid discharged through the slit-like discharge port.

2. A coating apparatus, an application liquid in an application liquid accommodating section supplied to an application nozzle is discharged to a coated body through a slit-like discharge port at a tip portion of the application nozzle, and the application nozzle and the coated body are relatively moved in a coating direction in which the application liquid is applied to the coated body to apply the application liquid to a surface of the coated body, characterized in that a cross direction moving unit that relatively moves the application nozzle and the coated body in a direction intersecting the coating direction is provided, when a position of the application liquid applied to the coated body is moved in the direction intersecting the coating direction by the application nozzle and the coated body being relatively moved in the direction intersecting the coating direction by the cross direction moving unit, a position difference between the position of the application liquid relatively moved in the direction intersecting the coating direction by the cross direction moving unit and a moving position of the application liquid actually applied to the coated body is calculated by a calculation unit based on a calculation formula stored in a storage unit in various application condition data, and the cross direction moving unit is controlled by a control device based on the position difference calculated by the calculation unit to adjust the position of the application nozzle and the coated body relatively moved in the direction intersecting the coating direction.

3. A coating apparatus, an application liquid in an application liquid accommodating section supplied to an application nozzle is discharged to a coated body through a slit-like discharge port at a tip portion of the application nozzle, and the application nozzle and the coated body are relatively moved in a coating direction in which the application liquid is applied to the coated body to apply the application liquid to a surface of the coated body, characterized in that A width adjustment unit that adjusts a width of the coating liquid passing through the slit-shaped discharge port in the coating liquid containing portion, and a cross direction movement unit that relatively moves the coating nozzle and the coated body in a direction intersecting the coating direction, are provided. When the width of the coating liquid coated on the coated body is changed by the width adjustment unit, and the position of the coating nozzle and the coated body relatively moved in the direction intersecting the coating direction by the cross direction movement unit, a width difference between the width of the coating liquid adjusted by the width adjustment unit and discharged from the slit-shaped discharge port and the width of the coating liquid actually coated on the coated body is calculated by a calculation unit based on a storage unit that stores an operation formula in various coating condition data, and a position difference between the position of the coating nozzle and the coated body relatively moved in the direction intersecting the coating direction by the cross direction movement unit and the moving position of the coating liquid actually coated on the coated body is calculated by the calculation unit. The width adjustment unit is controlled by a control device based on the width difference calculated by the calculation unit to adjust the width of the coating liquid discharged from the slit-shaped discharge port, and the cross direction movement unit is controlled by the control device based on the position difference calculated by the calculation unit to adjust the position of the coating nozzle and the coated body relatively moved in the direction intersecting the coating direction.

Images