Image sensor with integrated visible and infrared pixels

Abstract

The invention relates to an image sensor with integrated visible and infrared pixels. The invention provides an image sensor, an imaging system and a method for constructing the image sensor. The image sensor includes an array of pixels. The pixel array includes a first photosensitive region, a second photosensitive region, a spectral router, and a spectral filter. The first photosensitive region is configured to detect visible light in a color wavelength range. The second photosensitive region includes a plurality of light scattering structures. The second photosensitive region is configured to detect infrared light. A spectral router is positioned over at least a first photosensitive area. The spectral router is configured to route visible light within the color wavelength range to the first photosensitive region. The spectral router is further configured to route the infrared light to the second photosensitive area. A spectral filter is positioned over the spectral router. The spectral filter is configured to block visible light outside the color wavelength range.

Description

BACKGROUND

[0001] Image sensors are used in electronic devices such as cellular telephones, cameras, and computers to capture images. Specifically, the electronic devices are provided with an array of image sensor pixels arranged in a grid pattern. Each image sensor pixel receives incoming photons such as light and converts the photons to an electrical signal. Column circuitry is coupled to each column for reading out the sensor signal from each image sensor pixel.

[0002] Indirect time-of-flight (iToF) sensing is used in many industrial applications such as logistics, factory automation, medical, health, and agriculture. iToF sensing is also used in many consumer applications such as augmented reality, virtual reality, gaming, and object scanning. iToF sensing is also used in many automotive applications, for example, indoor monitoring and light detection and ranging (LIDAR). iToF sensing measures distance by collecting reflected infrared light and discerning the phase shift between emitted and reflected infrared light. SUMMARY

[0003] It is desirable to integrate visible and infrared sensing into a single sensor for both imaging and depth sensing. However, different separate pixel layouts with visible and infrared photodetectors provide different photon collection efficiencies. For example, consider two different red-green-green-blue-infrared (RGGBiR) color patterns. A first RGGBiR color pattern can provide good red and blue detection, but provide poor green and infrared detection. A second RGGBiR color pattern can provide good infrared detection, but provide poor red, green, and blue detection. The present disclosure provides image sensors, imaging systems, and methods that increase overall photon collection efficiency by directing visible and infrared light according to wavelength, among other things, using a spectral router.

[0004] The present disclosure provides an image sensor including a pixel array. In one implementation, the pixel array includes a first photosensitive region, a second photosensitive region, a spectral router, and a spectral filter. The first photosensitive region is configured to detect visible light in a color wavelength range. The second photosensitive region includes a plurality of light scattering structures. The second photosensitive region is configured to detect infrared light. The spectral router is positioned over at least the first photosensitive region. The spectral router is configured to route visible light in the color wavelength range to the first photosensitive region. The spectral router is further configured to route infrared light to the second photosensitive region. The spectral filter is positioned over the spectral router. The spectral filter is configured to block visible light outside of the color wavelength range.

[0005] The present disclosure also provides a method for constructing an image sensor. The method includes forming a first photodetector configured to detect visible light within a color wavelength range. The method also includes forming a second photodetector configured to detect infrared light. The method further includes forming a spectral router over at least the first photodetector. The spectral router is configured to route visible light within the color wavelength range to the first photodetector. The spectral router is also configured to route infrared light to the second photodetector. The method further includes forming a spectral filter over at least the spectral router. The spectral filter is configured to block visible light outside the color wavelength range.

[0006] The present disclosure also provides an imaging system that in one implementation includes a lens system, an imaging controller, and an image sensor. The image sensor is in operable relationship with the lens system. The image sensor is electrically coupled to the imaging controller. The image sensor includes a first photosensitive region, a first spectral filter, a second photosensitive region, a second spectral filter, a third photosensitive region, and a third spectral filter. The first photosensitive region includes one of a plurality of first pyramidal trenches. The first photosensitive region is configured to detect visible light within a first color wavelength range. The first photosensitive region is also configured to detect infrared light. The first spectral filter is positioned over the first photosensitive region. The first spectral filter is configured to block visible light outside the first color wavelength range. The second photosensitive region includes one of a plurality of second pyramidal trenches. The second photosensitive region is configured to detect visible light within a second color wavelength range. The second photosensitive region is also configured to detect infrared light. The second spectral filter is positioned over the second photosensitive region. The second spectral filter is configured to block visible light outside the second color wavelength range. The third photosensitive region includes one or more third pyramidal trenches. The third photosensitive region is positioned between the first photosensitive region and the second photosensitive region. The third photosensitive region is configured to detect infrared light. The third spectral filter is positioned over the third photosensitive region. The third spectral filter is configured to block visible light. BRIEF DESCRIPTION OF DRAWINGS

[0007] For a detailed description of example implementations, reference will now be made to the accompanying drawings which are described above.

[0008] Figure 1A is a block diagram of an example of an imaging system according to some implementations;

[0009] Figure 1B is a diagram of an example of an imaging system incorporated into a vehicle according to some implementations;

[0010] Figure 2 is a partial schematic and partial block diagram of an example of an image sensor according to some implementations;

[0011] Figure 3 It is a schematic diagram of an example of a circuit in a pixel configured to detect visible light, based on some specific implementations;

[0012] Figure 4 This is a schematic diagram of an example of a circuit in a pixel configured to detect infrared light, based on some specific implementations;

[0013] Figure 5 This is a view of an example of a first color pattern of separated pixels based on some specific implementations;

[0014] Figure 6A It is based on some specific implementations for Figure 5 A cross-sectional view of the first spectral configuration of the first color pattern;

[0015] Figure 6B It is based on some specific implementations. Figure 6A A top view of the first spectral configuration;

[0016] Figure 7A It is based on some specific implementations for Figure 5 A cross-sectional view of the second spectral configuration of the first color pattern;

[0017] Figure 7B It is based on some specific implementations. Figure 7A A top view of the second spectral configuration;

[0018] Figure 8 This is a view of an example of a second color pattern in which red, green, and blue pixels also detect infrared light, based on some specific implementations;

[0019] Figure 9A It is based on some specific implementations for Figure 8 A cross-sectional view of the third spectral configuration of the second color pattern;

[0020] Figure 9B It is based on some specific implementations. Figure 9A A top view of the third spectral configuration;

[0021] Figure 10A It is based on some specific implementations for Figure 8 A cross-sectional view of the fourth spectral configuration of the second color pattern;

[0022] Figure 10B It is based on some specific implementations. Figure 10A A top view of the fourth spectral configuration;

[0023] Figure 11 It is based on some specific implementations and only has the function of being used for Figure 8a cross-sectional view of a fifth spectral configuration of a spectral filter of the second color pattern;

[0024] Figure 12 a view of an example of a third color pattern of split-pixels according to some implementations in which infrared pixels are positioned on rows and columns of green split-pixels;

[0025] Figure 13 a cross-sectional view of a sixth spectral configuration of a third color pattern according to some implementations; Figure 12 a cross-sectional view of a sixth spectral configuration of a third color pattern according to some implementations;

[0026] Figure 14 a flowchart of an example of a method for constructing an image sensor according to some implementations.

[0027] Definitions

[0028] Various terminology is used to refer to particular system components. Different companies may refer to a component by different names - this document does not intend to distinguish between components that differ in name but not in function. In the following discussion and in the claims, the terms "including" and "comprising" are used in an open-ended fashion, and thus should be interpreted to mean "including, but not limited to... Also, the term "couple" or "coupled" is intended to mean either an indirect or direct connection. Thus, if a first device couples to a second device, that connection can be through a direct connection, or through an indirect connection via other devices and connections.

[0029] As used herein, "a," "an," and "the" mean both singular and plural referents unless the context clearly dictates otherwise. For example, a "processor" programmed to perform various functions refers to one processor programmed to perform each function, or more than one processor collectively programmed to perform each of the various functions. For clarity, initially recited "[referent]" and then "the [referent]" should not exclude the possibility that the recited referent can be plural.

[0030] Height-defining terms such as "above," "below," "upper," and "lower" should be position terms with respect to the direction of light incident on the pixel array and / or image pixels. Light entry should be considered to interact with or pass through objects and / or structures "above" and "upper" before interacting with or passing through objects and / or structures "below" and "lower." Thus, the position terms can not have any relationship to the direction of gravity.

[0031] "About" with respect to a recited parameter should mean the recited parameter plus or minus ten percent (+ / - 10%) of the recited parameter.

[0032] “Asserted” shall mean creating or maintaining a first predetermined state of a Boolean signal. The Boolean signal can be asserted to be a high voltage or have a higher voltage, and the Boolean signal can be asserted to be a low voltage or have a lower voltage, according to the judgment of the circuit designer. Similarly, “De-asserted” shall mean creating or maintaining a second predetermined state of the Boolean opposite the asserted state.

[0033] With respect to electrical devices, whether standalone or as part of an integrated circuit, the terms “input” and “output” refer to electrical connections to the electrical device and should not be considered as verbs requiring action. For example, a differential amplifier such as an operational amplifier can have a first differential input and a second differential input, and these “inputs” define electrical connections to the operational amplifier and should not be understood as requiring signal inputs to the operational amplifier.

[0034] “Controller” shall mean, individually or in combination, a separate circuit component, an application specific integrated circuit (ASIC), a microcontroller with control software, a reduced instruction set computer (RISC) with control software, a digital signal processor (DSP) with control software, a processor with control software, a programmable logic device (PLD), a field programmable gate array (FPGA), or a programmable system on a chip (PSOC), configured to read inputs and drive outputs in response to those inputs.

[0035] “Visible light” refers to light in the range of about 400 nanometers to 750 nanometers. “Infrared light” refers to light in the range of about 750 nanometers to 1 millimeter. “Infrared light” also refers to near infrared light. DETAILED DESCRIPTION

[0036] The following discussion relates to various implementations of the present application. While one or more of these implementations can be preferred, the disclosed implementations should not be construed as limiting the scope of the present disclosure including the claims. Further, those skilled in the art will appreciate that the description herein has broad application and the discussion of any particular implementations is meant only to exemplify that particular implementation and is not intended to suggest that the scope of the present disclosure including the claims is limited to that particular implementation.

[0037] Various examples relate to image sensors, imaging systems, and related methods. More specifically, at least some examples relate to image sensors designed and built to detect both visible light and infrared light. More specifically, various examples relate to image sensor pixels having spectral routers that direct visible light and infrared light according to wavelength. More specifically, various examples relate to image sensor pixels having spectral filters that filter visible light according to color. The specification now turns to exemplary systems to guide the reader.

[0038] Figure 1AAn example of an imaging system 100 is shown. In particular, the imaging system 100 can be a portable electronic device with imaging capabilities, such as a camera, a cellular telephone, a tablet computer, a webcam, a camcorder, a video surveillance system, or a video game system. In other cases, the imaging system 100 can be an automotive imaging system. Figure 1A The imaging system 100 shown in FIG. 1 includes a camera module 102 that can be used to convert incoming light into digital image data. The camera module 102 can include one or more lenses 104 and one or more corresponding image sensors 106. The lenses 104 can include fixed and / or adjustable lenses. During an image capture operation, light from a scene can be focused by the lenses 104 onto the image sensors 106. The image sensors 106 can include circuitry for converting analog pixel data to corresponding digital image data, which will be provided to an imaging controller 108. If desired, the camera module 102 can be provided with an array of lenses 104 and a corresponding array of image sensors 106.

[0039] The imaging controller 108 can include one or more integrated circuits. The imaging circuitry can include image processing circuitry, a microprocessor, and storage devices such as random access memory and non-volatile memory. The imaging controller 108 can be implemented using components separate from the camera module 102 and / or components forming part of the camera module 102 (e.g., circuitry forming part of the image sensors 106). The imaging controller 108 can be used to process and store digital image data captured by the camera module 102. Processed image data can be provided to external equipment such as a computer, an external display, or other devices using wired and / or wireless communication paths coupled to the imaging controller 108 as desired. The imaging controller 108 can perform light detection and ranging (LIDAR) operations. For example, the digital image data captured by the camera module 102 can include one or more histograms, and the imaging controller 108 can perform analysis of the one or more histograms to determine a combined time of flight of outgoing interrogating infrared light and returning reflected infrared light.

[0040] Figure 1B Another example of an imaging system 100 is shown. Figure 1B The imaging system 100 shown in FIG. 1 includes an automobile or vehicle 110. The vehicle 110 is illustratively shown as a passenger vehicle, but the imaging system 100 can be other types of vehicles, including commercial vehicles, on-road vehicles, and off-road vehicles. Commercial vehicles can include buses and tractor-trailer vehicles. Off-road vehicles can include tractors and crop harvesting equipment. In Figure 1BIn the example of a vehicle 110, the vehicle 110 includes a forward-facing camera module 102 arranged to capture images of a scene in front of the vehicle 110. Such a forward-facing camera module 102 can be used for any suitable purpose, such as lane-keeping assist, collision warning systems, cruise control systems, autonomous driving systems, and proximity detection. The example vehicle 110 also includes a rear-facing camera module 102 arranged to capture images of a scene behind the vehicle 110. Such a rear-facing camera module 102 can be used for any suitable purpose, such as collision warning systems, reverse video, autonomous driving systems, proximity detection, monitoring the position of overtaking vehicles, and backing up. The vehicle 110 also includes a side-facing camera module 102 arranged to capture images of a scene alongside the vehicle 110. Such a side-facing camera module can be used for any suitable purpose, such as blind spot monitoring, collision warning systems, autonomous driving systems monitoring the position of overtaking vehicles, lane change detection, and proximity detection. In the case of the imaging system 100 being for a vehicle, the imaging controller 108 can be a controller of the vehicle 110. Next, turn to a more detailed discussion of the image sensor 106 of the camera module 102.

[0041] Figure 2 An example of an image sensor 106 is shown. In particular, Figure 2 The image sensor 106 is shown as including a substrate 200 of a semiconductor material (such as silicon) encapsulated within a package to produce a packaged semiconductor device or a packaged semiconductor product. Bond pads or other connection points of the substrate 200 are coupled to terminals of the image sensor 106. These connections can include a serial communication channel 202 coupled to a first terminal 204, a capture input 206 coupled to a second terminal 208, and a phase lock input 210 coupled to a third terminal 212. There will be additional terminals, such as ground terminals, common terminals, or power terminals, but these additional terminals are omitted to not overly complicate the drawing. While a single instance of the substrate 200 is shown, in other implementations multiple substrates can be combined to form the image sensor 106 in a multi-chip module created before or after singulation.

[0042] Figure 2The illustrated image sensor 106 includes a pixel array 214 comprising a plurality of pixels, such as pixels 216, arranged in rows and columns. The pixel array 214 may include, for example, hundreds or thousands of rows and hundreds or thousands of columns of pixels 216. In some specific embodiments, some pixels of pixel 216 are configured to detect visible light, and some pixels of pixel 216 are configured to detect infrared light. Alternatively or additionally, some pixels of pixel 216 are configured to detect both visible and infrared light. Control and readout of the pixel array 214 may be implemented by an image sensor controller 218 coupled to a row controller 220 and a column controller 222. The row controller 220 may receive row addresses from the image sensor controller 218 and provide corresponding row control signals to the pixels 216, such as reset, row selection, charge transfer, and readout control signals. The row control signals may be transmitted via one or more conductors, such as row control path 224.

[0043] Column controller 222 may be coupled to pixel array 214 via one or more conductors (such as column lines 226). Column controller may sometimes be referred to as column control circuitry, readout circuitry, or column decoder. Column lines 226 may be used to read image signals or histograms from pixels 216 and to provide bias current and / or bias voltage to pixels 216. If desired, during readout operation, row controller 220 may be used to select a pixel row in pixel array 214, and the image signal and / or histogram generated by pixels 216 in that pixel row may be read along column lines 226. Column controller 222 may include sample-and-hold circuitry for sampling and temporarily storing signals read from pixel array 214, amplifier circuitry, analog-to-digital converter (ADC) circuitry, bias circuitry, column memory, latching circuitry for selectively enabling or disabling column circuitry, or other circuitry coupled to columns of one or more pixels 216 in pixel array 214 for operating pixels 216 and for reading image signals and histograms from pixel array 214. The ADC circuitry in column controller 222 converts analog pixel values ​​received from pixel array 214 into corresponding digital data. Column controller 222 can provide image data to image sensor controller 218 and / or imaging controller 108 via, for example, serial communication channel 202. Figure 1A The column controller 222 can also provide histogram data to the image sensor controller 218. The image sensor controller 218 can determine the distance to the reflecting object from the histogram data, or the image sensor controller 218 can provide the histogram data to... Figure 1A An imaging controller 108 is used for this type of determination.

[0044] Still refer to Figure 2 The image sensor 106 may include a gating controller 228. The gating controller 228 in... Figure 2The column controller 222 is shown as being separate and distinct from the gate controller 228; however, in other cases, the functionality of the gate controller 228 can be incorporated within the column controller 222. Figure 2 The illustrated gate controller 228 is coupled to the pixel array 214 and is designed and constructed to gate each of the pixels 216 configured to detect infrared light. The gate controller 228 gates the pixels 216 such that each of the pixels 216 is sensitive to reflected infrared light during a respective activation period. In particular, the gate controller 228 defines the phase-locked input 210, and the gate controller 228 is coupled to the pixel array 214 by a gate path 230. The gate controller 228 receives a sampling signal or timing signal defining a sampling period through the phase-locked input 210. The timing signal can take any suitable form, such as a square wave defining the sampling period as a square wave period, or a sine wave defining the sampling period as a sine wave period. Through selective arrangement of the gate signals, and in response to the timing signal, the gate controller 228 activates the pixels 216 of the pixel array 214 such that each pixel is sensitive to reflected infrared light during a respective activation period. Further, outside of the respective activation period for each pixel, the gate controller 228 is designed and constructed to deactivate each pixel such that each pixel is not sensitive to reflected infrared light.

[0045] Figure 3 is an electrical schematic of an example of a pixel 300 configured to detect visible light. Figure 3 The illustrated pixel 300 includes a photodetector 302 in the example form of a photodiode, a transfer transistor 304, a floating diffusion 306, a reset transistor 308, a source follower transistor 310, and a row select transistor 312. In some implementations, some or all of the pixels 216 in the pixel array 214 can be in the same configuration as the pixel 300, with the same components. Figure 3 The illustrated pixel 300 includes a photodetector 302 in the example form of a photodiode, a transfer transistor 304, a floating diffusion 306, a reset transistor 308, a source follower transistor 310, and a row select transistor 312. In some implementations, some or all of the pixels 216 in the pixel array 214 can be in the same configuration as the pixel 300, with the same components. Figure 3 The illustrated pixel 300 includes a photodetector 302 in the example form of a photodiode, a transfer transistor 304, a floating diffusion 306, a reset transistor 308, a source follower transistor 310, and a row select transistor 312. In some implementations, some or all of the pixels 216 in the pixel array 214 can be in the same configuration as the pixel 300, with the same components.

[0046] The photodetector 302 defines an anode coupled to ground or a common, and a cathode coupled to the transfer transistor 304. Incident light is collected by the photodetector 302. The photodetector 302 converts this light into charge. Prior to acquiring an image, a reset control signal RST can be asserted. As Figure 3As shown, a reset control signal RST is applied to the gate terminal of the reset transistor 308. Thus, when the reset control signal RST is asserted, the reset transistor 308 is rendered conductive. A positive pixel supply voltage, such as the supply voltage Vdd, is coupled to the drain of the reset transistor 308. Thus, when the gate of the reset transistor 308 is asserted and the reset transistor 308 is rendered conductive, the voltage Vdd is applied to the floating diffusion 306 and the floating diffusion 306 is reset to a voltage equal to or near the supply voltage Vdd. The reset control signal RST can then be de-asserted, rendering the reset transistor 308 non-conductive.

[0047] After the reset process is complete, the transfer control signal TX can be asserted. As shown, the transfer control signal TX is applied to the gate terminal of the transfer transistor 304. When the transfer control signal TX is asserted, the transfer transistor 304 is rendered conductive, and, in response to incident light, the charge generated by the photodetector 302 is transferred to the floating diffusion 306. The floating diffusion 306 exhibits a capacitance that can be used to store the charge that has been transferred from the photodetector 302. A signal associated with the charge stored in the floating diffusion 306 is buffered by the source follower transistor 310. Figure 3

[0048] The row select transistor 312 connects the source follower transistor 310 to one of the column lines 226. When the row select control signal RS is asserted, the row select transistor 312 is rendered conductive and outputs a signal Vout representing the magnitude of the charge stored in the floating diffusion 306. The output signal Vout is an example of a “pixel signal.” When the row select control signal RS is asserted, one of the column lines 226 can be used to route the output signal Vout to a readout circuit, such as the column controller 222 in Figure 2 .

[0049] Figure 4 is an electrical schematic diagram of an example of a pixel 400 configured to detect infrared light. Figure 4 The example pixel 400 includes a photodetector 402 in the example form of a photodiode, a shutter transistor 404, a transfer transistor 406, a floating diffusion 408, a reset transistor 410, a first source follower transistor 412, a memory select transistor 414, a memory node 416, a pre-charge transistor 418, a first memory capacitor 420, a second memory capacitor 422, a first select transistor 424, a second select transistor 426, a second source follower transistor 428, and a row select transistor 430. In some implementations, some or all of the pixels 216 in the pixel array 214 can have the same components in the same configuration as the example pixel 400. In other implementations, some or all of the pixels 216 in the pixel array 214 can have different components than the example pixel 400. Figure 4 In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216, each of which is configured to detect infrared light and / or visible light. In some implementations, the pixel array 214 can include a plurality of pixels 216​Figure 4 The illustrated pixel 400 has fewer components, more components, or different components in different configurations.

[0050] The photodetector 402 defines an anode coupled to a ground or common, and a cathode coupled to a source of the shutter transistor 404. A positive pixel supply voltage, such as a supply voltage Vdd, is coupled to a drain of the shutter transistor 404. When a gate of the shutter transistor 404 is asserted and the shutter transistor 404 is turned on, a voltage Vdd is applied to the cathode of the photodetector 402, thereby reverse biasing the photodetector 402. During the time period that the shutter transistor 404 is turned on, the photodetector 402 is effectively insensitive to the arrival of reflected light. More specifically, during the time period that the shutter transistor 404 is turned on, any reflected infrared light incident on the photodetector 402 generates electrons within the photodetector 402, but these electrons are immediately drawn away into the positive pixel supply voltage.

[0051] The transfer transistor 406 defines a drain coupled to the floating diffusion 408, a source coupled to the cathode of the photodetector 402, and a gate. During the time period that the pixel 400 is active, the shutter transistor 404 is not turned on and the transfer transistor 406 is turned on, thereby coupling the photodetector 402 to the floating diffusion 408.

[0052] The reset transistor 410 defines a drain coupled to the positive pixel supply voltage, a source coupled to the floating diffusion 408, and a gate. During the time period that the reset transistor 410 is turned on, the voltage on the floating diffusion 408 is reset to a voltage equal to or close to the supply voltage Vdd.

[0053] To transfer the voltage signal held on the floating diffusion 408, the floating diffusion 408 is coupled to a source follower amplifier in the form of a first source follower transistor 412. Specifically, a gate of the first source follower transistor 412 is coupled to the floating diffusion 408, a drain is coupled to a positive supply voltage, and a source is selectively coupled to downstream components through a memory select transistor 414. A drain of the memory select transistor 414 is coupled to the source of the first source follower transistor 412, and a source of the memory select transistor 414 defines a memory node 416. Thus, the signal generated by the photodetector 402 and stored in the floating diffusion 408 can be transferred to the memory node 416 through the first source follower transistor 412, the memory select transistor 414, and a pre-charge transistor 418, which provides a load for the first source follower transistor 412. The memory node 416 enables a first memory capacitor 420 and a second memory capacitor 422 to sample and hold the voltage driven to the memory node 416.

[0054] The first memory capacitor 420 is connected to the first selection transistor 424 ( Figure 4 The second memory capacitor 422 is selectively coupled to memory node 416 via the second selection transistor 426. Figure 4 The precharge transistor 418 is selectively coupled to memory node 416. A drain coupled to memory node 416, a source coupled to ground or a common terminal, and a gate are defined. To reset or prepare the first memory capacitor 420 and the second memory capacitor 422 for sampling operation, the precharge transistor 418 is turned on together with the first selection transistor 424 and the second selection transistor 426. Therefore, the first memory capacitor 420 and the second memory capacitor 422 can be reset to zero volts or any tunable voltage.

[0055] Still refer to Figure 4 The second source follower transistor 428 defines a gate coupled to the memory node 416, a drain coupled to the positive pixel power supply voltage, and a source. The source of the second source follower transistor 428 is coupled to the row select transistor 430. Figure 4 (MS in the text). When the row selection transistor 430 is turned on, the column controller 222 can read the voltage stored in the first storage capacitor 420 and the second storage capacitor 422, respectively. That is, the column controller 222 can read the voltage stored in the first memory capacitor 420 by turning on the first selection transistor 424, turning off the second selection transistor 426, and turning on the row selection transistor 430. Similarly, the column controller 222 can read the voltage stored in the second memory capacitor 422 by turning off the first selection transistor 424, turning on the second selection transistor 426, and turning on the row selection transistor 430.

[0056] Figure 5 A view showing an example of a first color pattern 500 of separated pixels is provided. Specifically, the first color pattern 500 includes a first green separated pixel 502, a red separated pixel 504, a blue separated pixel 506, a second green separated pixel 508, and an infrared pixel 510. Figure 5 The first green separation pixel 502 shown includes a first green photodetector 512, a second green photodetector 514, and a third green photodetector 516. In one example, the third green photodetector 516 is a "first photosensitive region". Figure 5The illustrated red separating pixel 504 includes a first red photodetector 518, a second red photodetector 520, and a third red photodetector 522. In one example, the third red photodetector 522 is a "third photosensitive area". Similar discussion regarding the blue separating pixel 506 and the second green separating pixel 508 (each of which may be configured in the same or similar manner) is omitted to avoid unduly lengthening the specification. Figure 5 The illustrated infrared pixel 510 includes an infrared photodetector 524. In one example, the infrared photodetector 524 is a "second photosensitive region". In the illustrated example, the three photodetectors of the first green split pixel 502 are adjacent to each other and adjacent to the infrared photodetector 524, but in other cases, one or more additional layers (such as oxide layers or deep trench isolation (DTI) structures) may reside between these photodetectors. Similarly, in the illustrated example, the three photodetectors of the red split pixel 504 are adjacent to each other and adjacent to the infrared photodetector 524, but in other cases, one or more additional layers (such as oxide layers or DTI structures) may reside between these photodetectors. In some specific implementations, according to 65nm process design rules, each of the photodetectors in the first green split pixel 502, red split pixel 504, blue split pixel 506, and second green split pixel 508 has a 1.4-micron pitch and the infrared photodetector 524 has a 2.8-micron pitch.

[0057] Figure 6A In reality, based on some specific implementations, it was positioned in Figure 5 A cross-sectional view of the first spectral configuration 600 above the first color pattern 500. Figure 6A The cross-sectional view in the middle is along Figure 5 The line 5-5 was taken. Before discussing the first spectral configuration 600, it should be noted that... Figure 6A An infrared photodetector 524 is shown, comprising a plurality of tapered trenches 526 configured to uniformly disperse infrared light across the infrared photodetector 524. The plurality of tapered trenches 526 is one example of a light scattering structure that can be included in the infrared photodetector 524. In some specific embodiments, the infrared photodetector 524 may include other light scattering structures, such as vertical trenches.

[0058] Figure 6A The green spectral router 602 is shown positioned above the third green photodetector 516 and a portion of the infrared photodetector 524. Although in Figure 6Abut the green spectral router 602 is also positioned above the first green photodetector 512 and the second green photodetector 514. A spectral router (or nanophotonic light guide) is an optical structure that accepts photons incident on an upper surface. The spectral router then diverts the photons from the upper surface to a photosensitive region underneath the photodiode. The green spectral router 602 is configured to direct incident light in the green wavelength range, such as wavelengths between about 500 nanometers and 590 nanometers, to the first green split pixel 502. The green wavelength range is one example of a“color wavelength range.”

[0059] For example, the portion of the green spectral router 602 positioned above the third green photodetector 516 is configured to pass incident light in the green wavelength range to the third green photodetector 516. For purposes of discussion, consider green light of the green spectral router 602 entering above the third green photodetector 516. An example of such green light is illustrated by arrow 604 in Figure 6A For example, the portion of the green spectral router 602 positioned above the third green photodetector 516 is configured to pass incident light in the green wavelength range to the third green photodetector 516. For purposes of discussion, consider green light of the green spectral router 602 entering above the third green photodetector 516. An example of such green light is illustrated by arrow 604 in Figure 6A For example, the portion of the green spectral router 602 positioned above the third green photodetector 516 is configured to pass incident light in the green wavelength range to the third green photodetector 516. For purposes of discussion, consider green light of the green spectral router 602 entering above the third green photodetector 516. An example of such green light is illustrated by arrow 604 in

[0060] The green spectral router 602 is also configured to direct infrared light to the infrared pixel 510. For example, the portion of the green spectral router 602 positioned above the third green photodetector 516 is configured to direct infrared light to the infrared photodetector 524. For purposes of discussion, consider infrared light of the green spectral router 602 entering above the third green photodetector 516. An example of such infrared light is illustrated by arrow 608 in Figure 6A For example, the portion of the green spectral router 602 positioned above the third green photodetector 516 is configured to pass incident light in the green wavelength range to the third green photodetector 516. For purposes of discussion, consider green light of the green spectral router 602 entering above the third green photodetector 516. An example of such green light is illustrated by arrow 604 in Figure 6AThe infrared light initially encounters a portion of the red spectral router 612 positioned above the third red photodetector 522, which directs the infrared light to the infrared photodetector 524.

[0061] Figure 6A The red spectral router 612 is shown positioned above the third red photodetector 522 and a portion of the infrared photodetector 524. Although not visible in the cross-sectional view, the red spectral router 612 is also positioned above the first red photodetector 518 and the second red photodetector 520. The red spectral router 612 is configured to direct incident light in the red wavelength range, such as wavelengths between about 590 nanometers and 690 nanometers, to the red separation pixel 504. Figure 6A

[0062] For example, the portion of the red spectral router 612 positioned above the third red photodetector 522 is configured to pass incident light in the red wavelength range to the third red photodetector 522. For purposes of discussion, consider red light entering the red spectral router 612 above the third red photodetector 522. An example of such red light is illustrated by arrow 614 in Figure 6A The red light initially encounters a portion of the red spectral router 612 positioned above the third red photodetector 522, which passes the red light to the third red photodetector 522. In addition, the portion of the red spectral router 612 positioned above the infrared photodetector 524 is configured to direct incident light in the red wavelength range to the third red photodetector 522. For purposes of discussion, consider red light entering the red spectral router 612 above the infrared photodetector 524. An example of such red light is illustrated by arrow 616 in Figure 6A The red light initially encounters a portion of the red spectral router 612 positioned above the third red photodetector 522, which passes the red light to the third red photodetector 522. In addition, the portion of the red spectral router 612 positioned above the infrared photodetector 524 is configured to direct incident light in the red wavelength range to the third red photodetector 522. For purposes of discussion, consider red light entering the red spectral router 612 above the infrared photodetector 524. An example of such red light is illustrated by arrow 616 in

[0063] The red spectral router 612 is also configured to direct infrared light to the infrared photodetector 524. For example, the portion of the red spectral router 612 positioned above the third red photodetector 522 is configured to direct infrared light to the infrared photodetector 524. For purposes of discussion, consider infrared light entering the red spectral router 612 above the third red photodetector 522. An example of such infrared light is illustrated by arrow 618 in Figure 6A ​Illustrated by arrow 618. Infrared light initially encounters a portion of the red spectrum router 612 positioned above the third red photodetector 522, which directs the infrared light to the infrared photodetector 524. Furthermore, the portion of the red spectrum router 612 positioned above the infrared photodetector 524 is configured to transmit infrared light to the infrared photodetector 524. For the purposes of discussion, consider infrared light entering the red spectrum router 612 above the infrared photodetector 524. Examples of such infrared light are shown in... Figure 6A The infrared light is illustrated by arrow 620. The infrared light initially encounters a portion of the red spectral router 612 positioned above the infrared photodetector 524, which transmits the infrared light to the infrared photodetector 524.

[0064] Figure 6A A first green spectral filter 622 is also shown positioned above the green spectral router 602. The first green spectral filter 622 is configured to allow visible light in the green wavelength range to pass through and to block (or absorb) visible light outside the green wavelength range. The first green spectral filter 622 is also configured to allow infrared light to pass through. The first green spectral filter 622 is one example of a "first spectral filter". In some specific implementations, the green spectral router 602 and the first green spectral filter 622 are two separate layers, such as... Figure 6A As shown. In other specific embodiments, the green spectral router 602 and the first green spectral filter 622 can be a single layer. For example, the green spectral router 602 and the first green spectral filter 622 can be a single layer formed of inorganic SiO2 / Si3N4 or SiO2 / TiO2 materials.

[0065] Figure 6A A red spectral filter 624 is also shown positioned above the red spectral router 612. The red spectral filter 624 is configured to allow visible light in the red wavelength range to pass through and to block (or absorb) visible light outside the red wavelength range. The red spectral filter 624 is also configured to allow infrared light to pass through. The red spectral filter 624 is an example of a "second spectral filter." The red spectral router 612 and the red spectral filter 624 can be two separate layers (e.g., Figure 6A (as shown) or a single layer. In some embodiments, multiple microlenses (not shown) are positioned above the first green spectral filter 622 and the red spectral filter 624.

[0066] Figure 6B A top view of the first spectral configuration 600 is shown. (As shown) Figure 6BAs shown, the first green spectral filter 622 is also positioned above the green separation pixel 502, which includes the first green photodetector 512, the second green photodetector 514, the third green photodetector 516, and a portion of the infrared pixel 510. Furthermore, as... Figure 6B As shown, the red spectral filter 624 is also positioned above the red separation pixel 504, which includes the first red photodetector 518, the second red photodetector 520, the third red photodetector 522, and a portion of the infrared pixel 510. Figure 6B It is also indicated that a blue spectral filter 626 is positioned above a portion of the blue separation pixel 506 and the infrared pixel 510. The blue spectral filter 626 is configured to allow visible light in the blue wavelength range (such as wavelengths between approximately 400 nm and 500 nm) to pass through and to block (or absorb) visible light outside the blue wavelength range. The blue spectral filter 626 is also configured to allow infrared light to pass through. Figure 6B It is also indicated that a second green spectral filter 628 is positioned above a portion of the second green separating pixel 508 and the infrared pixel 510. The second green spectral filter 628 is configured to allow visible light in the green wavelength range to pass through and to block (or absorb) visible light outside the green wavelength range. The second green spectral filter 628 is also configured to allow infrared light to pass through.

[0067] Figure 7A It shows the location of some specific implementations. Figure 5 A cross-sectional view of the second spectral configuration 700 above the first color pattern 500. Figure 7A The cross-sectional view in the middle is along Figure 5 The line was cut from 5-5. Figure 7A It is shown that the green spectral router 602 and the red spectral router 612 are not positioned above any part of the infrared photodetector 524. Figure 7A It is also shown that the first green filter 622 and the red spectral filter 624 are not positioned above any part of the infrared photodetector 524. Instead, Figure 7A An infrared spectral filter 702 is shown positioned above an infrared photodetector 524. The infrared spectral filter 702 is configured to allow infrared light to pass through and block (or absorb) visible light. The infrared spectral filter 702 is an example of a "second spectral filter." In some specific embodiments, multiple microlenses 704 are positioned above a first green spectral filter 622, a red spectral filter 624, and an infrared spectral filter 702, as shown. Figure 7A As shown.

[0068] Figure 7B A top view of the second spectral configuration 700 is shown. (As shown) Figure 7BAs shown, the first green spectral filter 622 is positioned above the green separation pixel 502, which includes the first green photodetector 512, the second green photodetector 514, and the third green photodetector 516. Furthermore, as... Figure 7B As shown, the red spectral filter 624 is positioned above the red separation pixel 504, which includes the first red photodetector 518, the second red photodetector 520, and the third red photodetector 522. Furthermore, as... Figure 7B As shown, the blue spectral filter 626 is positioned above the blue separating pixel 506. Furthermore, as... Figure 7B As shown, the second green spectral filter 628 is positioned above the second green separation pixel 508.

[0069] In some implementations, one or more pixels can be configured to detect visible and infrared light of a specific color. Figure 8 A view showing an example of a second color pattern 800 of separated pixels is provided. Specifically, the second color pattern 800 includes a first green separated pixel 802, a red separated pixel 804, a blue separated pixel 806, a second green separated pixel 808, and an infrared pixel 810. Figure 8 The first green separation pixel 802 shown includes a first photodetector 812, a second photodetector 814, and a third photodetector 816, respectively configured to detect visible light and infrared light in the green wavelength range. In one example, the third photodetector 816 is a "third photosensitive region". In another example, the third photodetector 816 is a "first photosensitive region". Figure 8 The red separation pixel 804 shown includes a fourth photodetector 818, a fifth photodetector 820, and a sixth photodetector 822, which are respectively configured to detect visible light and infrared light in the red wavelength range. Figure 8 The blue separation pixel 806 shown includes three photodetectors, each configured to detect visible and infrared light in the blue wavelength range. Figure 8 The second green separating pixel 808 shown includes three photodetectors, each configured to detect visible and infrared light in the green wavelength range. The infrared pixel 810 includes a seventh photodetector 824 configured to detect infrared light. In one example, the seventh photodetector 824 is a "second photosensitive region".

[0070] Figure 9A It shows the location of some specific implementations. Figure 8 A cross-sectional view of the third spectral configuration 900 above the second color pattern 800. Figure 9A The cross-sectional view in the middle is along Figure 8 The line 8-8 was taken. Before discussing the third spectral configuration 900, it should be noted that... Figure 9AThe third photodetector 816, the sixth photodetector 822, and the seventh photodetector 824 are each shown to include one or more conical trenches 826 configured to disperse infrared light uniformly across each of the photodetectors.

[0071] Figure 9A The green spectral router 902 is shown to be positioned over the third photodetector 816 and over a portion of the seventh photodetector 824. Although not visible in the cross-sectional view of FIG. 8A, the green spectral router 902 is also positioned over the first photodetector 812 and the second photodetector 814. The green spectral router 902 is configured to direct incident light in the green wavelength range to the first green split pixel 802 in the same or similar manner as described above in Figure 9A Figure 7A The green spectral router 902 is shown to be positioned over the third photodetector 816 and over a portion of the seventh photodetector 824. Although not visible in the cross-sectional view of FIG. 8A, the green spectral router 902 is also positioned over the first photodetector 812 and the second photodetector 814. The green spectral router 902 is configured to direct incident light in the green wavelength range to the first green split pixel 802 in the same or similar manner as described above in

[0072] Figure 9A The red spectral router 904 is shown to be positioned over the sixth photodetector 822 and over a portion of the seventh photodetector 824. Although not visible in the cross-sectional view of FIG. 8A, the red spectral router 904 is also positioned over the first photodetector 812, the second photodetector 814, and the third photodetector 816. The red spectral router 904 is configured to direct incident light in the red wavelength range to the first red split pixel 804 in the same or similar manner as described above in Figure 9A ​not visible in the cross-sectional view, but a red spectral router 904 is also positioned above the fourth photodetector 818 and the fifth photodetector 820. The red spectral router 904 is configured to direct incident light in the red wavelength range to the red separation pixel 804. For example, the portion of the red spectral router 904 positioned above the sixth photodetector 822 is configured to pass visible light in the red wavelength range to the sixth photodetector 822. Further, the portion of the red spectral router 904 positioned above the seventh photodetector 824 is configured to direct visible light in the red wavelength range to the sixth photodetector 822. The red spectral router 904 is also configured to direct infrared light to the infrared pixel 810 or the red separation pixel 804. For example, the portion of the red spectral router 904 positioned above the sixth photodetector 822 is configured to direct infrared light to the sixth photodetector 822 or the seventh photodetector 824. Further, the portion of the red spectral router 904 positioned above the seventh photodetector 824 is configured to direct infrared light to the sixth photodetector 822 or the seventh photodetector 824.

[0073] Figure 9A A first green spectral filter 906 is also shown positioned above the green spectral router 902. The first green spectral filter 906 is configured to pass visible light in the green wavelength range and block (or absorb) visible light outside the green wavelength range. The first green spectral filter 906 is also configured to pass infrared light. In some implementations, the green spectral router 902 and the first green spectral filter 906 are two separate layers, as shown in FIG. 6A. In other implementations, the green spectral router 902 and the first green spectral filter 906 can be a single layer. For example, the green spectral router 902 and the first green spectral filter 906 can be a single layer formed of inorganic Si02 / Si3N4or Si02 / Ti02material. Figure 9A Figure 9A A red spectral filter 908 is also shown positioned above the red spectral router 904. The red spectral filter 908 is configured to pass visible light in the red wavelength range and block (or absorb) visible light outside the red wavelength range. The red spectral filter 908 is also configured to pass infrared light. The red spectral router 612 and the red spectral filter 624 can be two separate layers (as shown in FIG. 6A) or a single layer. In some implementations, a plurality of microlenses 909 is positioned above the first green spectral filter 906 and the red spectral filter 908, as shown in FIG. 6B. Figure 9A Figure 9A A top view of the third spectral configuration 900 is shown. As shown in FIG. 6C, the third spectral configuration 900 includes a fourth spectral configuration 902, a fifth spectral configuration 904, and a sixth spectral configuration 906. The fourth spectral configuration 902 includes a green spectral router 902 and a first green spectral filter 906. The fifth spectral configuration 904 includes a red spectral router 904 and a red spectral filter 908. The sixth spectral configuration 906 includes a plurality of microlenses 909.

[0074] Figure 9B Figure 9B ​​​As shown, a first green spectral filter 906 is positioned over the first green split pixel 802. Further, as shown Figure 9B As shown, a red spectral filter 908 is positioned over the red split pixel 804. Figure 9B A blue spectral filter 910 is also indicated as being positioned over the blue split pixel 806. The blue spectral filter 910 is configured to pass visible light in the blue wavelength range and block (or absorb) visible light outside the blue wavelength range. The blue spectral filter 910 is also configured to pass infrared light. Figure 9B A second green spectral filter 912 is also indicated as being positioned over the second green split pixel 808. The second green spectral filter 912 is configured to pass visible light in the green wavelength range and block (or absorb) visible light outside the green wavelength range. The second green spectral filter 912 is also configured to pass infrared light.

[0075] Figure 10A A cross-sectional view of a fourth spectral configuration 1000 positioned over the second color pattern 800 of Figure 8 is shown in accordance with some implementations. Figure 10A The cross-sectional view in FIG. 8B is taken along line 8-8 of Figure 8 FIG. 8A. Figure 10A It is shown that the green spectral router 902 and the red spectral router 904 are not positioned over any portion of the seventh photodetector 824. Figure 10A It is also shown that the first green filter router 906 and the red spectral filter 908 are not positioned over any portion of the seventh photodetector 824. Rather, Figure 10A It is shown that an infrared spectral filter 1002 is positioned over the seventh photodetector 824. The infrared spectral filter 1002 is configured to pass infrared light and block (or absorb) visible light. In some implementations, a plurality of microlenses 1004 are positioned over the first green spectral filter 906, the red spectral filter 908, and the infrared spectral filter 1002, as shown in Figure 10A FIG. 10B.

[0076] Figure 10B A top view of the fourth spectral configuration 1000 is shown. As shown in Figure 10B FIG. 10A, the first green spectral filter 906 is positioned over the first photodetector 812, the second photodetector 814, and the third photodetector 816. Further, as shown in Figure 10B FIG. 10A, the red spectral filter 908 is positioned over the fourth photodetector 818, the fifth photodetector 820, and the sixth photodetector 822. Further, as shown in Figure 10B FIG. 10A, the blue spectral filter 910 is positioned over the blue split pixel 806. Further, as shown in Figure 10BAs shown, the second green spectral filter 912 is positioned above the second green separation pixel 808.

[0077] In some implementations, the spectral configuration includes only spectral filters and not spectral routers. Figure 11 It shows the location of some specific implementations. Figure 8 The cross-sectional view of the fifth spectral configuration 1100 above the second color pattern 800. Figure 11 The cross-sectional view in the middle is along Figure 8 The line 8-8 was cut off. Figure 11 The first green spectral filter 906 is positioned directly above the third photodetector 816, without any spectral router in between. In one example... Figure 11 The third photodetector 816 in the middle is the "first photosensitive region". Figure 11 The first green spectral filter 906 in the text is an example of a "first spectral filter". Furthermore, Figure 11 The red spectral filter 908 is positioned directly above the sixth photodetector 822, without any spectral router in between. In one example... Figure 11 The sixth photodetector 822 in the image is the "second photosensitive region". Figure 11 The red spectral filter 908 in the example is an example of a "second spectral filter". Furthermore... Figure 11 The infrared spectral filter 1002 is positioned directly above the seventh photodetector 824, without any spectral router in between. In one example... Figure 11 The seventh photodetector 824 in the image is the "third photosensitive region". Figure 11 The infrared spectral filter 1002 is an example of a "third spectral filter". In some specific implementations, multiple microlenses 1102 are positioned above the first green spectral filter 906, the red spectral filter 908, and the infrared spectral filter 1002, as shown below. Figure 11 As shown.

[0078] Figure 12 A view showing an example of a third color pattern 1200 in which infrared pixels are positioned on the row and column positions of green separating pixels. Figure 13 A cross-sectional view of a portion of a third color pattern 1200 according to some specific implementation is shown. Figure 13 The cross-sectional view in the middle is along Figure 12 The line was cut from 12-12. Figure 13The portion of the third color pattern 1200 shown includes a first green photodetector 1202, a second green photodetector 1204, and an infrared photodetector 1206. The infrared photodetector 1206 is positioned between the first green photodetector 1202 and the second green photodetector 1204. The infrared photodetector 1206 includes a plurality of conical grooves 1208 configured to disperse infrared light uniformly across the infrared photodetector 1206.

[0079] Figure 13 A cross-sectional view of a sixth spectral configuration 1300 positioned above the third color pattern 1200 of FIGS. 12A-12B is also shown, in accordance with some implementations. Specifically, Figure 12 A cross-sectional view of a sixth spectral configuration 1300 positioned above the third color pattern 1200 of FIGS. 12A-12B is also shown, in accordance with some implementations. Specifically, Figure 13 The green spectral router 1302 is configured to direct incident light in the green wavelength range to the first green photodetector 1202 or the second green photodetector 1204. For example, a portion of the green spectral router 1302 positioned above the first green photodetector 1202 is configured to pass visible light in the green wavelength range to the first green photodetector 1202. Further, a portion of the green spectral router 1302 positioned above the second green photodetector 1204 is configured to pass visible light in the green wavelength range to the second green photodetector 1204. Further, a portion of the green spectral router 1302 positioned above the infrared photodetector 1206 is configured to direct visible light in the green wavelength range to the first green photodetector 1202 or the second green photodetector 1204. The green spectral router 1302 is also configured to direct infrared light to the infrared photodetector 1206. For example, a portion of the green spectral router 1302 positioned above the infrared photodetector 1206 is configured to pass infrared light to the infrared photodetector 1206. Further, a portion of the green spectral router 1302 positioned above the first green photodetector 1202 is configured to direct infrared light to the infrared photodetector 1206. Further, a portion of the green spectral router 1302 positioned above the second green photodetector 1204 is configured to direct infrared light to the infrared photodetector 1206. Figure 13 A green spectral filter 1304 is also shown positioned above the green spectral router 1302. The green spectral filter 1304 is configured to pass visible light in the green wavelength range and block (or absorb) visible light outside of the green wavelength range. The green spectral filter 1304 is also configured to pass infrared light. In some implementations, a plurality of micro lenses 1306 is positioned above the green spectral filter 1304.

[0080] Figure 14 is an example of a method 1400 for constructing an image sensor according to some implementations. For simplicity of explanation, the method 1400 is depicted and described as a series of acts. However, acts in accordance with this method 1400 can occur in various orders and / or concurrently, and with other Figure 14 acts not presented and described herein. In block 1402, a first photodetector is formed. The first photodetector is configured to detect visible light in a color wavelength range. In block 1404, a second photodetector is formed. The second photodetector is configured to detect infrared light. In block 1406, a spectral router is formed over at least the first photodetector. In block 1408, a spectral filter is formed over at least the spectral router. The spectral filter is configured to block visible light outside the color wavelength range.

[0081] Many of the electrical connections in the drawings are shown as direct connections, but in actual implementations, the connections can be made through intervening devices, such as busses, buffers, drivers, etc. As used herein, the term "coupled" refers to any connection, direct or indirect, between two elements, and can be implemented by or using any of a variety of elements known in the art, such as an electrical bus, wireless link, optical waveguide, etc., and where appropriate, can be implemented by or using a variety of connections known in the art, such as an electrical bus, wireless link, optical waveguide, etc.

[0082] The above discussion is meant to be illustrative of the principles and various implementations of the present application. Many variations and modifications will become apparent to those skilled in the art once they read and understand the above disclosure. The following claims are intended to cover all such variations and modifications.

Claims

1. An image sensor, comprising: Pixel array, the pixel array comprising: A first photosensitive region is configured to detect visible light within a color wavelength range; A second photosensitive region, the second photosensitive region comprising a plurality of light scattering structures and configured to detect infrared light; A spectral router, wherein the spectral router is positioned above at least the first photosensitive region and is configured to: The visible light within the specified color wavelength range is routed to the first photosensitive region, and The infrared light is routed to the second photosensitive region; and A spectral filter is positioned above the spectral router and configured to block visible light outside the color wavelength range.

2. The image sensor of claim 1, wherein the spectral router and the spectral filter are further positioned above a portion of the second photosensitive region.

3. The image sensor of claim 2, wherein the first photosensitive region is further configured to detect the infrared light, and wherein the first photosensitive region includes one or more of the plurality of light scattering structures.

4. The image sensor according to claim 1, wherein the spectral filter is a first spectral filter, and wherein the pixel array further comprises a second spectral filter, the second... The spectral filter is positioned above the second photosensitive region and configured to block visible light.

5. The image sensor of claim 4, wherein the first photosensitive region is further configured to detect the infrared light, and wherein the first photosensitive region includes one or more of the plurality of light scattering structures.

6. The image sensor of claim 1, wherein the spectral router is a first spectral router, the spectral filter is a first spectral filter, the color wavelength range is a first color wavelength range, and the pixel array further comprises: A third photosensitive region, configured to detect visible light within a second color wavelength range. A second spectral router, positioned above at least the third photosensitive region and configured to: The visible light within the second color wavelength range is routed to the third photosensitive region, and The infrared light is routed to the second photosensitive region; and A second spectral filter is positioned above at least the second spectral router and configured to block visible light outside the second color wavelength range.

7. The image sensor of claim 1, wherein the pixel array further comprises a third photosensitive region configured to detect visible light within the color wavelength range, wherein the second photosensitive region is positioned between the first photosensitive region and the third photosensitive region, and wherein the spectral router and the spectral filter are further positioned above the second photosensitive region and the third photosensitive region.

8. The image sensor according to claim 1, wherein the image sensor further comprises a plurality of microlenses positioned above the spectral filter.

9. An imaging system, comprising: Lens system; Imaging controller; and The image sensor of claim 1, wherein the image sensor is operatively coupled to the lens system and electrically coupled to the imaging controller.

10. The imaging system of claim 9, wherein the imaging system is at least one selected from the group consisting of: automobiles, vehicles, cameras, cellular phones, tablet computers, webcams, video cameras, video surveillance systems, and video game systems.

11. A method for constructing an image sensor, the method comprising: A first photodetector is formed, the first photodetector being configured to detect visible light within a color wavelength range; A second photodetector is formed, which is configured to detect infrared light; A spectral router is formed above at least the first photodetector, wherein the spectral router is configured to: The visible light within the specified color wavelength range is routed to the first photodetector, and The infrared light is routed to the second photodetector; as well as A spectral filter is formed above at least the spectral router, wherein the spectral filter is configured to block visible light outside the color wavelength range.

12. The method of claim 11, further comprising forming a plurality of light scattering structures in the second photodetector.

13. The method of claim 12, further comprising forming one or more light scattering structures in the first photodetector.

14. The method of claim 11, wherein the spectral filter is a first spectral filter, wherein the method further comprises forming a second spectral filter above the second photodetector, and wherein the second spectral filter is configured to block visible light.

15. The method of claim 11, wherein the spectral router is a first spectral router, the spectral filter is a first spectral filter, the color wavelength range is a first color wavelength range, and the method further comprises: A third photodetector is formed, the third photodetector being configured to detect visible light within a second color wavelength range; A second spectral router is formed above at least the third photodetector, wherein the second spectral router is configured to: The visible light within the second color wavelength range is routed to the third photodetector, and The infrared light is routed to the second photodetector; as well as A second spectral filter is formed above the second spectral router, wherein the second spectral filter is configured to block visible light outside the second color wavelength range.

16. The method of claim 11, further comprising forming a third photodetector configured to detect visible light within the color wavelength range, wherein a second photodetector is positioned between the first photodetector and the third photodetector, and wherein the spectral router and the spectral filter are further positioned above the second photodetector and the third photodetector.

17. The method of claim 11, further comprising forming a plurality of microlenses above the spectral filter.

18. An imaging system, comprising: Lens system; Imaging controller; and An image sensor, operatively coupled to the lens system and electrically coupled to the imaging controller, wherein the image sensor comprises: A first photosensitive region, the first photosensitive region including one or more first conical grooves and configured as follows: Detect visible light within the first color wavelength range, and Detecting infrared light, A first spectral filter is positioned above the first photosensitive region and configured to block visible light outside the first color wavelength range. A second photosensitive region, the second photosensitive region including one or more second conical grooves and configured as follows: Detect visible light within the second color wavelength range, and Detect the infrared light, and A second spectral filter, positioned above the second photosensitive region and configured to block visible light outside the second color wavelength range, A third photosensitive region, comprising one or more third conical grooves and positioned between the first and second photosensitive regions, wherein the third photosensitive region is configured to detect the infrared light, and A third spectral filter is positioned above the third photosensitive region and configured to block visible light.

19. The imaging system of claim 18, wherein the image sensor further comprises a plurality of microlenses positioned above the first spectral filter, the second spectral filter and the third spectral filter.

20. The imaging system of claim 18, wherein the imaging system is at least one selected from the group consisting of: automobiles, vehicles, cameras, cellular phones, tablet computers, webcams, video cameras, video surveillance systems, and video game systems.

Images