Thermostatic and humidistatic equipment for lithography machine processing

Abstract

The present application relates to constant temperature and humidity equipment field, especially to constant temperature and humidity equipment for photoetching machine processing, the body is internally configured with cold water coil pipe, hot water coil pipe, equipment box, electric heating plate and humidifier are sequentially configured above the cold water coil pipe. In the present application, only needs to concentrate in the heating cabin after heating, the boiling clean water circulating in the cabin circulates among the equipment box, hot water coil pipe and preheating coil pipe under the action of water pump assembly, so as to improve the overall water temperature in the body and improve the heating effect. At the same time, through the driving turbine mechanism of boiling gas, the preheating coil pipe heat is delivered to the air inlet air bellow to realize preheating, effectively cooperates with the equipment waste heat to form multiple heating mechanism, effectively reduces the overall heating power consumption of the equipment under low temperature working condition, and ensures the stable preheating effect.

Description

Technical Field

[0001] This invention relates to the field of temperature and humidity control equipment, and more particularly to temperature and humidity control equipment for lithography processing. Background Technology

[0002] A constant temperature and humidity machine is a type of specialized equipment that has the ability to precisely control the temperature and humidity of the environment. Its core working principle is through the integration of multiple functions such as cooling, heating, humidification, and dehumidification.

[0003] In the semiconductor manufacturing field, lithography machines are core production equipment, and their processing precision is closely related to temperature and humidity control equipment. Temperature and humidity control equipment is used to create a constant working environment that meets the needs of high-precision production.

[0004] However, in practical applications, some traditional temperature and humidity control equipment still needs improvement:

[0005] In winter, the outside air temperature drops significantly compared to normal conditions, requiring equipment to continuously operate high-power heating components (such as electric heaters and heat pumps). This process leads to a significant surge in equipment energy consumption, which is detrimental to energy conservation and consumption reduction in the production process. At the same time, the fixed heating source of traditional equipment results in relatively low heating efficiency, affecting equipment operating efficiency and failing to guarantee effective air treatment. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of existing technologies by proposing a constant temperature and humidity equipment for lithography processing.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A constant temperature and humidity equipment for lithography processing includes a machine body, inside which a cold water coil is installed, and above the cold water coil are a hot water coil, an equipment box, an electric heating plate, and a humidifier arranged in sequence.

[0009] A heating chamber is provided on one side of the equipment box. An opening and closing plate is rotatably installed between the heating chamber and the equipment box. An electric flap abuts against the inner side of the opening and closing plate to restrict the opening and closing plate from opening. A floating plate is provided below the opening and closing plate. The opening and closing plate closes after the floating plate floats up.

[0010] A drive chamber is installed on one side inside the heating chamber. The drive chamber introduces high-pressure gas from the heating chamber. A turbine assembly is installed inside the drive chamber. The turbine assembly is driven and connected to the input end of the sprocket transmission box. The output end of the sprocket transmission box is driven and connected to the crossflow fan at the air inlet box at the bottom of the machine body.

[0011] A preheating coil is provided on the outside of the heating chamber. The preheating coil is located at the air inlet of the crossflow fan. The inlet of the preheating coil is connected to the inside of the heating chamber, and the outlet is connected to the water pump. The input end of the water pump is connected to the inside of the equipment box and the outlet, and the output end is connected to the inlet of the hot water coil. The outlet of the hot water coil is connected to the inside of the equipment box to form a circulation path.

[0012] Preferably, the upper part of the unit is equipped with an exhaust pipe and the bottom is equipped with an air inlet box. An outdoor air duct is connected to one side of the air inlet box to introduce indoor circulating air and outdoor fresh air. A multi-stage filter is installed inside the air inlet box, and a preheating coil is installed downstream of the multi-stage filter.

[0013] Preferably, a preheating chamber is installed in the middle of the side of the machine body facing the air inlet box. A preheating coil is installed inside the preheating chamber. The bottom of the preheating coil extends into the air inlet box. One side of the preheating chamber is connected to the air inlet of the crossflow fan. The exhaust port of the crossflow fan is vertically downward and connected to the inside of the air inlet box.

[0014] Preferably, a cold water coil is installed on the bottom side of the inner cavity of the machine body, and a water tank is provided below the cold water coil. The water tank stores the condensate generated by the cold water coil through a drain pipe. A pump body is configured inside the water tank. The input end of the pump body is connected to the inside of the water tank, and the output end of the pump body is connected to the equipment box inside the machine body through a water pipe. A filter is provided in the middle of the water pipe.

[0015] The equipment box is equipped with multiple electric heating rods.

[0016] Preferably, the inlet of the preheating coil is connected to the interior of the heating chamber, and the other end extends horizontally to the bottom of the equipment box and is connected to the input end of the water pump installed inside the equipment box through the outlet. The preheating coil is installed in the preheating chamber set on one side of the machine body.

[0017] Preferably, a slot is provided on one side of the heating chamber to connect to the inner cavity of the equipment box, and a door opening and closing plate is rotatably installed at the slot via a pin. A torsion spring is installed at the rotatable connection between the door opening and the slot. When the door opening and closing plate rotates, the torsion spring deforms to generate a torsional force to drive the door opening and closing plate to reset.

[0018] Preferably, the upper inner side of the opening and closing plate is pressed against an electric flap, which includes a motor and a flap. The flap is rotatably mounted on the upper side of the heating chamber via a shaft, and one end of the shaft is driven to connect to the motor. The motor is mounted on one side of the equipment box. In its natural state, the flap and the opening and closing plate remain in contact.

[0019] Preferably, a floating plate is horizontally arranged inside the heating chamber. The floating plate has sliders on both sides and is slidably installed in slots opened on both sides of the inner wall of the heating chamber to achieve smooth vertical movement. A contact block is installed on the upper side of the floating plate. The upper part of the contact block is provided with an arc-shaped groove. When the floating plate moves up to the position of the opening and closing plate, the contact block abuts against the extension rod provided on the inner side of the opening and closing plate, thereby driving the opening and closing plate to the closed state.

[0020] Preferably, the drive chamber and the heating chamber are connected by a compressed air passage, and a turbine assembly is rotatably mounted on a rotating shaft at the center of the drive chamber. The middle part of the turbine assembly is connected to the input end of the sprocket drive box via a rotating shaft. The sprocket drive box is installed on the outer side of the machine body, and the bottom output end of the sprocket drive box is connected to the impeller drive inside the crossflow fan.

[0021] Preferably, a pressure relief valve is provided on the upper side of the drive compartment.

[0022] The beneficial effects of this invention are as follows:

[0023] In this invention, after the heating chamber is heated in a concentrated manner, the boiling water circulating in the chamber is circulated between the equipment box, hot water coil, and preheating coil under the action of the water pump assembly to increase the overall water temperature inside the machine and improve the heating effect. At the same time, the boiling gas drives the turbine mechanism, which is linked to the cross-flow fan to transport the heat of the preheating coil to the air inlet box to achieve preheating. This effectively works with the waste heat of the equipment to form a multiple heating mechanism, effectively reducing the overall heating power consumption of the equipment under low temperature conditions and ensuring stable preheating effect. Attached Figure Description

[0024] Figure 1 This is a cross-sectional view of the internal structure of the constant temperature and humidity equipment for lithography processing proposed in this invention;

[0025] Figure 2 This is a schematic diagram of the external structure of the constant temperature and humidity equipment for lithography processing proposed in this invention. Figure 1 ;

[0026] Figure 3 This is a schematic diagram of the external structure of the constant temperature and humidity equipment for lithography processing proposed in this invention. Figure 2 ;

[0027] Figure 4 This is a schematic diagram of the structure at point A proposed in this invention;

[0028] Figure 5 This is a schematic diagram showing the positional relationship between the preheating coil and the air inlet box proposed in this invention;

[0029] Figure 6 This is a schematic diagram of the external structure of the heat exchanger proposed in this invention;

[0030] Figure 7This is an exploded view of the heat pipe connection structure proposed in this invention;

[0031] Figure 8 Cross-sectional view of the internal structure of the equipment box proposed in this invention. Figure 1 ;

[0032] Figure 9 Cross-sectional view of the internal structure of the equipment box proposed in this invention. Figure 2 ;

[0033] Figure 10 This is a schematic diagram of the water pump connection structure proposed in this invention;

[0034] Figure 11 Cross-sectional view of the internal structure of the equipment box proposed in this invention. Figure 3 ;

[0035] Figure 12 This is a schematic diagram of the opening and closing plate installation structure proposed in this invention;

[0036] Figure 13 This is a schematic diagram of the extension rod structure proposed in this invention;

[0037] Figure 14 This is a schematic diagram of the internal structure of the drive cabin proposed in this invention;

[0038] Figure 15 This is a schematic diagram of the impeller connection structure proposed in this invention;

[0039] Figure 16 This is a schematic diagram of the crossflow fan installation structure proposed in this invention.

[0040] In the diagram: 1. Main unit; 2. Exhaust duct; 3. Inlet air box; 31. Outdoor duct; 4. Water tank; 41. Water pipe; 42. Filter; 5. Equipment box; 6. Crossflow fan; 61. Impeller; 7. Sprocket drive box; 8. Multi-stage filter; 9. Chilled water coil; 91. Grille frame; 92. Connecting pipe; 10. Water pump one; 11. Electric heating rod one; 12. Preheating chamber; 13. Humidifier; 14. Preheating coil; 141. 142. Inlet 1; 15. Hot water coil; 151. Inlet 2; 152. Outlet 2; 16. Heating chamber; 18. Opening and closing plate; 181. Extension rod; 182. Torsion spring; 19. Electric flap; 20. Floating plate; 201. Contact block; 202. Slider; 21. Drive chamber; 22. Pressure relief valve; 23. Electric heating rod 2; 24. Turbine assembly; 25. Compressed air passage; 26. Air inlet; 27. Exhaust port. Detailed Implementation

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0042] Reference Figure 1-5 A constant temperature and humidity equipment for lithography processing includes a body 1. The upper part of the body 1 is connected to an exhaust pipe 2 for discharging the processed gas into the room, and an air inlet box 3 is installed at the bottom. An outdoor air duct 31 is connected to one side of the air inlet box 3 for introducing external air.

[0043] The exhaust duct 2 is connected to the indoor air outlet duct, which can deliver the regulated gas to the lithography machine working area. The air inlet box 3 is connected to the indoor return air duct, and together with the outdoor air duct 31, it introduces outdoor fresh air and indoor return air, which are then mixed inside the air inlet box 3.

[0044] In addition, the air inlet box 3 is equipped with a multi-stage filter 8, which includes a pre-filter, a medium-efficiency filter and a high-efficiency filter, to purify the air. The multi-stage filter 8 is a conventional filtration configuration in the art, and its specific structure and working principle are well known to those skilled in the art, and will not be described in detail here.

[0045] Furthermore, a preheating chamber 12 is installed in the middle of the side of the body 1 facing the air inlet box 3. The preheating chamber 12 has a cavity inside, and a preheating coil 14 is installed in the center of the cavity.

[0046] In addition, a crossflow fan 6 is installed on one side of the bottom of the cavity. The air inlet 26 of the crossflow fan 6 is connected to the inner cavity of the preheating chamber 12, and the exhaust port 27 of the crossflow fan 6 is vertically downward and penetrates the upper wall of the air inlet box 3.

[0047] The crossflow fan 6 is located downstream of the multi-stage filter 8, meaning that the airflow passes through the crossflow fan 6 after being filtered by the multi-stage filter 8.

[0048] In addition, the bottom part of the preheating coil 14 extends into the air inlet box 3.

[0049] Furthermore, a cold water coil 9 is installed at the air inlet of the air inlet box 3 on the bottom side of the inner cavity of the body 1. A hot water coil 15 is installed on the upper part of the cold water coil 9 through the grille 91. An equipment box 5 is installed on the upper part of the hot water coil 15. Gaps are left between the two sides of the equipment box 5 and the inner wall of the body 1 to allow air circulation. An electric heating plate is installed on the upper part of the equipment box 5. A humidifier 13 is installed on the upper part of the electric heating plate. An exhaust pipe 2 is provided on the upper part of the humidifier 13.

[0050] The electric heating plate and humidifier 13 are standard configurations in this field, and their internal structure and operating principle will not be explained here.

[0051] In addition, a water tank 4 is provided at the bottom of the body 1. The water tank 4 is used to store the condensate generated by the cold water coil 9. The cold water coil 9 is connected to the water tank 4 through a drain pipe to introduce the condensate into the water tank 4.

[0052] The water tank 4 is equipped with a pump body. The input end of the pump body is connected to the inside of the water tank 4 for drawing liquid from the tank. The output end of the pump body is connected to a water pipe 41. The water pipe 41 extends vertically upward through the water tank 4 and connects to the equipment box 5 inside the machine body 1 to transport the medium in the water tank 4 to the equipment box 5.

[0053] Meanwhile, the bottom extraction port of the water pipe 41 is kept 8-12cm away from the bottom of the water tank 4 to extract the upper liquid, and the bottom wall of the water tank 4 has an inclined structure.

[0054] A filter 42 is installed in the middle of the water pipe 41. The filter 42 is used to perform preliminary filtration on the transported liquid. The filter material inside the filter 42 can be a stainless steel filter screen, a PP cotton filter screen, an activated carbon filter screen, or any combination of the above three to ensure the filtration effect. The specific filtration principle is existing technology and will not be explained further.

[0055] One side of the chilled water coil 9 is connected to an external chiller unit via a connecting pipe 92 to realize the circulation and transportation of the refrigerant inside the chilled water coil 9. The connecting pipe 92 includes an input pipe and an output pipe, which is easy to understand and will not be explained further.

[0056] Reference Figure 6-10 An equipment box 5 is installed above the cold water coil 9. A hot water coil 15 is installed between the equipment box 5 and the cold water coil 9 through a grid frame 91. The hot water coil 15 is connected to the inside of the equipment box 5. A chamber is provided on one side of the inside of the equipment box 5 to be filled with clean water.

[0057] A heating chamber 16 is provided on one side of the inside of the equipment box 5. A preheating coil 14 is installed on the outside of the heating chamber 16. The inlet 141 of the preheating coil 14 is connected to the inside of the heating chamber 16, and the other end extends horizontally to the bottom of the equipment box 5 and is connected to the water pump 10 inside the equipment box 5 through the outlet 142.

[0058] A water pump 10 is installed on one side of the inside of the equipment box 5. The inlet of the water pump 10 is connected to the inside of the equipment box 5 and the outlet 142 of the preheating coil 14 through a three-way pipe. The outlet of the water pump 10 is connected to the inlet 151 of the hot water coil 15. The outlet 152 of the hot water coil 15 is connected to the inside of the equipment box 5 to form a medium circulation path.

[0059] Furthermore, a hot water coil 15 is installed at the bottom of the equipment box 5, which is used to heat the circulating air.

[0060] The side of the equipment box 5 is equipped with a preheating coil 14, which is used to preheat the air inlet box 3.

[0061] Furthermore, multiple electric heating rods 11 are installed in the middle of the equipment box 5 to heat the clean water inside the equipment box 5 under normal operating conditions, so as to generate heat in the hot water coil 15.

[0062] Reference Figure 11-16 A slot is provided on one side of the heating chamber 16 to connect to the inner cavity of the equipment box 5, and an opening and closing plate 18 is installed at the slot by means of a pin to realize the opening and closing operation of the slot. A rubber pad is provided on the side of the opening and closing plate 18 to achieve a sealing effect.

[0063] A torsion spring 182 is installed at the rotatable connection between the opening and closing plate 18 and the slot. When the opening and closing plate 18 rotates, the torsion spring 182 deforms to generate a torsional force to drive the opening and closing plate 18 to reset.

[0064] In addition, an electric flap 19 is pressed against the upper inner side of the opening and closing plate 18. The electric flap 19 includes a motor and a flap. The flap is rotatably mounted on the upper side of the heating chamber 16 via a shaft, and one end of the shaft is driven to the motor. The motor is mounted on one side of the equipment box 5 and drives the flap to perform a rotation operation, thereby changing the contact state between the flap and the opening and closing plate 18, thus achieving the operation of releasing and unlocking the opening and closing plate 18.

[0065] Furthermore, a floating plate 20 is horizontally arranged inside the heating chamber 16. The floating plate 20 has the characteristic of being able to float on the surface of clean water. In its natural state, the floating plate 20 is located on the bottom side of the heating chamber 16.

[0066] Multiple electric heating rods 23 are vertically installed inside the heating chamber 16.

[0067] The floating plate 20 has sliders 202 on both sides and is slidably installed in the slots opened on both sides of the inner wall of the heating chamber 16 to achieve smooth vertical movement. A contact block 201 is installed on the upper side of the floating plate 20, and an arc-shaped groove is provided on the upper part of the contact block 201.

[0068] When the floating plate 20 moves up to the position of the corresponding opening and closing plate 18, the contact block 201 on the floating plate 20 will abut against the extension rod 181 provided on the inner side of the opening and closing plate 18, thereby driving the opening and closing plate 18 to the closed state.

[0069] The middle part of the extension rod 181 is cylindrical to fit the arc-shaped groove on the upper part of the contact block 201.

[0070] Furthermore, the center height of the opening and closing plate 18 is higher than the center height of the inlet 141 of the preheating coil 14.

[0071] Furthermore, a drive chamber 21 is installed on one side of the top of the inner cavity of the heating chamber 16. The drive chamber 21 is connected to the heating chamber 16 through a compressed air passage 25. A turbine assembly 24 is mounted on the center of the drive chamber 21 via a rotating shaft. The middle part of the turbine assembly 24 extends to the outside through a rotating shaft and is connected to the input end of the sprocket drive box 7. The sprocket drive box 7 is installed on the outside of the body 1. The sprocket drive box 7 is installed at an angle and the output end at the bottom is connected to the crossflow fan 6.

[0072] The sprocket drive box 7 includes multiple sets of interconnected sprockets and chains to form a transmission mechanism. This is a common drive component in the art, such as a gearbox. The specific internal structure, transmission ratio, and operating principle are common knowledge to those skilled in the art and will not be explained further.

[0073] The crossflow fan 6 is equipped with an impeller 61, and the central shaft of the impeller 61 is driven to the output end of the sprocket transmission box 7.

[0074] Furthermore, a pressure relief valve 22 is installed on the upper side of the drive compartment 21 to discharge overpressure gas.

[0075] In addition, a water inlet pipe is installed on one side of the inside of equipment box 5 to facilitate subsequent water addition. This is easy to understand and will not be explained further.

[0076] In this embodiment, indoor circulating air and outside air are drawn in through the air inlet box 3 at the bottom of the unit 1 and the outdoor air duct 31. After being mixed in the air inlet box 3, the air is transported. The mixed air is filtered by a multi-stage filter 8 and then blown through the cold water coil 9 inside the unit 1 for cooling. The condensate generated during the cooling process drips from the bottom of the cold water coil 9 and is introduced into the water tank 4 for collection. The condensate is then treated for sedimentation in the water tank 4.

[0077] After processing, the air temperature decreases and the moisture is removed. It is then transported upwards and comes into contact with the hot water coil 15. After being appropriately heated, it continues to be transported upwards. The temperature is precisely adjusted by the electric heating plate. Then, pure steam is sprayed by the humidifier 13 to achieve humidification. Finally, it is sent back into the room through the exhaust pipe 2.

[0078] When the outside air temperature drops, the temperature of the gas introduced into the machine body 1 drops significantly. At this time, the pump in the water tank 4 controls the machine body 1 to deliver the condensate to the equipment box 5. Since the water tank 4 is inclined and the water pipe 41 is installed inside, the upper liquid will enter the equipment box 5 after being pre-filtered by the filter 42, and will be mixed with the clean water in the equipment box 5.

[0079] At this time, the electric flap 19 installed in the equipment box 5 runs and rotates until the flap disengages from the opening and closing plate 18 installed in the middle of the heating chamber 16. At this time, the opening and closing plate 18 is no longer supported by the electric flap 19, and it is forced to open by the water pressure in the equipment box 5, thereby introducing the corresponding amount of water until the water level exceeds the inlet 141 installed on one side of the heating chamber 16. At this time, clean water will enter the preheating coil 14 until the tube is gradually filled.

[0080] Simultaneously, the water pump 10 located in the equipment box 5 draws clean water from inside the equipment box 5 and the heating chamber 16, and delivers both streams of clean water to the hot water coil 15. The hot water coil 15 then returns the pumped clean water to the equipment box 5, replenishing the total amount of clean water in the equipment box 5. At the same time, the water volume in the heating chamber 16 decreases due to the extraction of clean water. However, since the equipment box 5 has been replenished with clean water, it will flow back into the heating chamber 16 under water pressure, thus forming a continuous clean water circulation system.

[0081] During the water circulation process, the electric heating rod 23 installed inside the heating chamber 16 will concentrate the heating of a small amount of clean water inside the heating chamber 16, rather than heating the entire equipment box 5, so that the clean water inside the heating chamber 16 will heat up quickly until the clean water reaches the boiling state.

[0082] The floating plate 20 placed in the heating chamber 16 will float up after the clean water in the equipment box 5 enters the heating chamber 16, and press against the extension rod 181 on the side of the opening and closing plate 18 through the contact block 201 on one side, restricting its opening to achieve the channel closure. At this time, the clean water will no longer flow until the clean water in the heating chamber 16 is gradually pumped away by the water pump 10, and the floating plate 20 will descend to unlock the opening and closing plate 18.

[0083] Next, as the electric heating rod 23 continuously boils the water in the heating chamber 16, the high-temperature and high-pressure gas generated by the boiling water will enter the drive chamber 21 through the compressed air passage 25. The high-temperature and high-pressure gas entering the drive chamber 21 will generate thrust on the turbine assembly 24 inside the chamber, causing the turbine assembly 24 to generate rotational force. This rotational force will be transmitted to the sprocket transmission box 7, which will complete the power transmission and output, and then transmit the driving force to the impeller 61 inside the crossflow fan 6 connected at the bottom.

[0084] The impeller 61 starts to rotate under the driving force. During the rotation, it draws gas from the preheating chamber 12 through the air inlet 26. The preheating chamber 12 is the installation position of the preheating coil 14, where the heat generated will accumulate. The drawn gas is then transported to the air inlet box 3.

[0085] Meanwhile, since the preheating chamber 12 is close to the air inlet box 3, the heat carried by the gas in the preheating chamber 12 will simultaneously preheat the pipe body of the air inlet box 3. Through this preheating process, the cold air introduced into the air inlet box 3 from the outside can be preheated, thereby reducing the overall heating power consumption of the electric heating rod 11 and the electric heating plate.

[0086] Compared to traditional devices (under low-temperature conditions), which require continuous operation of high-power heating components and a single heating point, leading to a significant increase in equipment energy consumption and ineffective utilization of equipment heat, this device utilizes a centralized heating process in the heating chamber 16. The boiling water flowing through the heating chamber 16 not only increases the overall water temperature in the equipment box 5 during circulation and raises the temperature of the hot water coil 15 to achieve a heating effect, but also activates the preheating coil 14, realizing multiple heating mechanisms. This effectively reduces the overall heating power consumption of the equipment and ensures stable preheating.

[0087] In practical applications, the electric heating rod 11 heats the water at the normal operating temperature of the machine body 1 to meet the heating requirements under normal working conditions.

[0088] In addition, it should be noted that the body 1, namely the body of the constant temperature and humidity machine, is equipped with a temperature and humidity sensing module to monitor the air. This is a standard configuration in constant temperature and humidity machines, and its specific operating principle, circuit connection and parameter evaluation are common knowledge in the art and will not be explained further.

[0089] It should be noted that the internal control components and operating principles of the constant temperature and humidity machine that have not been explained in detail above are all common knowledge to those skilled in the art, and therefore will not be explained further.

[0090] Meanwhile, the series of property changes that occur after the gas enters the constant temperature and humidity chamber are common knowledge to those skilled in the art, and will not be elaborated further.

[0091] Meanwhile, both the equipment box 5 and the drive compartment 21 are equipped with high-temperature resistant treatment to meet the requirements of high-temperature working environments. This is a routine operation and configuration in this field and will not be explained further.

[0092] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A constant temperature and humidity equipment for photolithography, comprising a body (1), characterized in that, The machine body (1) is equipped with a cold water coil (9), and above the cold water coil (9) are arranged a hot water coil (15), an equipment box (5), an electric heating plate, and a humidifier (13). A heating chamber (16) is provided on one side inside the equipment box (5). An opening and closing plate (18) is rotatably installed between the heating chamber (16) and the equipment box (5). An electric flip plate (19) abuts against the inner side of the opening and closing plate (18) to restrict the opening and closing plate (18) from opening. A floating plate (20) is provided below the opening and closing plate (18). The floating plate (20) closes the opening and closing plate (18) after floating. A drive chamber (21) is installed on one side inside the heating chamber (16). The drive chamber (21) introduces high-pressure gas into the heating chamber (16). A turbine assembly (24) is configured inside the drive chamber (21). The turbine assembly (24) is driven to the input end of the sprocket transmission box (7). The output end of the sprocket transmission box (7) is driven to the crossflow fan (6) at the air inlet box (3) at the bottom of the machine body (1). The heating chamber (16) is provided with a preheating coil (14) on the outside. The preheating coil (14) is located at the air inlet (26) of the crossflow fan (6). The inlet (141) of the preheating coil (14) is connected to the interior of the heating chamber (16), and the outlet (142) is connected to the water pump (10). The input end of the water pump (10) is connected to the interior of the equipment box (5) and the outlet (142), and the output end is connected to the inlet (151) of the hot water coil (15). The outlet (152) of the hot water coil (15) is connected to the interior of the equipment box (5) to form a circulation path.

2. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The upper part of the body (1) is equipped with an exhaust pipe (2) and the bottom is equipped with an air inlet box (3). An outdoor air duct (31) is connected to one side of the air inlet box (3) to introduce indoor circulating gas and outdoor fresh air. A multi-stage filter (8) is installed inside the air inlet box (3), and a preheating coil (14) is installed downstream of the multi-stage filter (8).

3. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, A preheating chamber (12) is installed in the middle of the side of the body (1) facing the air inlet box (3). A preheating coil (14) is installed inside the preheating chamber (12). The bottom of the preheating coil (14) extends into the air inlet box (3). One side of the preheating chamber (12) is connected to the air inlet (26) of the crossflow fan (6). The exhaust port (27) of the crossflow fan (6) is vertically downward and connected to the inside of the air inlet box (3).

4. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, A cold water coil (9) is installed on the bottom side of the inner cavity of the machine body (1). A water tank (4) is set below the cold water coil (9). The water tank (4) stores the condensate generated by the cold water coil (9) through a drain pipe. A pump body is installed inside the water tank (4). The input end of the pump body is connected to the inside of the water tank (4). The output end of the pump body is connected to the equipment box (5) inside the machine body (1) through a water pipe (41). A filter (42) is set in the middle of the water pipe (41). The equipment box (5) is equipped with multiple electric heating rods (11).

5. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The inlet (141) of the preheating coil (14) is connected to the interior of the heating chamber (16), and the other end extends horizontally to the bottom of the equipment box (5), and is connected to the input end of the water pump (10) installed inside the equipment box (5) through the outlet (142). The preheating coil (14) is installed in the preheating chamber (12) set on one side of the machine body (1).

6. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The heating chamber (16) has a slot on one side to connect to the inner cavity of the equipment box (5), and a door opening plate (18) is rotatably installed at the slot via a pin. A torsion spring (182) is installed at the rotatable connection between the door opening plate (18) and the slot. When the door opening plate (18) rotates, the torsion spring (182) deforms to generate a torsional force to drive the door opening plate (18) to reset.

7. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The upper inner side of the opening and closing plate (18) is pressed against an electric flap (19). The electric flap (19) includes a motor and a flap. The flap is rotatably mounted on the upper side of the heating chamber (16) via a shaft, and one end of the shaft is driven to connect to the motor. The motor is mounted on one side of the equipment box (5). In its natural state, the flap and the opening and closing plate (18) remain in contact.

8. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The heating chamber (16) is horizontally provided with a floating plate (20). The floating plate (20) has sliders (202) on both sides and is slidably installed in the slots opened on both sides of the inner wall of the heating chamber (16) to achieve smooth vertical movement. A contact block (201) is installed on the upper side of the floating plate (20). The upper part of the contact block (201) is provided with an arc-shaped groove. When the floating plate (20) moves up to the position of the opening and closing plate (18), the contact block (201) abuts against the extension rod (181) provided on the inner side of the opening and closing plate (18), thereby driving the opening and closing plate (18) to the closed state.

9. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, The drive chamber (21) and the heating chamber (16) are connected by a compressed air passage (25). A turbine assembly (24) is mounted on the center of the drive chamber (21) via a rotating shaft. The middle part of the turbine assembly (24) is connected to the input end of the sprocket drive box (7) via a rotating shaft. The sprocket drive box (7) is installed on the outside side of the machine body (1). The bottom output end of the sprocket drive box (7) is connected to the impeller (61) inside the crossflow fan (6).

10. The constant temperature and humidity equipment for photolithography processing according to claim 1, characterized in that, A pressure relief valve (22) is provided on the upper side of the drive compartment (21).

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