Large-size perovskite thin-film solar cell laser scribing motion platform

Abstract

The invention relates to a laser scribing motion platform for a large-size perovskite thin-film solar cell. The first X-axis module drives a plurality of second X-axis modules which are uniformly distributed in the left-right direction to move in the left-right direction, and each second X-axis module drives one Z-axis laser lens group to move in the left-right direction; a Y-axis module is installed on the granite base and drives a jig assembly above the Y-axis module to move in the front-back direction. A lower X-axis module is installed at the bottom of at least one of the left side and the right side of the granite cross beam and drives the visual inspection assembly to move in the left-right direction. Multi-head laser parallel machining is adopted, the machining efficiency is greatly improved, the single plate machining time is greatly shortened, and the strict requirement of large-scale industrial production for productivity is greatly met.

Description

Technical Field

[0001] This invention relates to the technical field of perovskite thin-film solar cell processing, and in particular to a laser scribing motion platform for large-size perovskite thin-film solar cells. Background Technology

[0002] Perovskite thin-film solar cells, as an emerging photovoltaic technology, offer advantages such as high photoelectric conversion efficiency, low cost, and flexible fabrication. During their manufacturing process, to divide a large-area panel into multiple series-connected sub-cells, isolation trenches, known as the P1, P2, and P3 scribing process, need to be created using laser scribing technology. The quality of these scribings directly determines the series resistance, fill factor, and final photoelectric conversion efficiency of the cells.

[0003] Currently, the laser marking equipment for perovskite solar cells on the market generally suffers from the following technical problems:

[0004] 1. Low scribing efficiency: Existing equipment typically uses a single laser head or a few laser heads (e.g., 2-4 heads) for scribing. When processing large-sized perovskite substrates, the laser head needs to scan back and forth multiple times or the platform needs to run at low speed, resulting in excessively long single-board processing time and production efficiency that cannot meet the needs of large-scale mass production.

[0005] 2. Poor scribing accuracy and consistency: Due to the limited number of laser heads, a large-scale splicing motion platform is often required to cover the entire width of the substrate. Under high-speed motion, platform vibration, thermal deformation, and multi-axis motion errors accumulate, leading to reduced scribing position accuracy. Inconsistent scribing depth and width in different areas introduce additional series resistance, resulting in battery efficiency loss.

[0006] 3. Limited Battery Performance: The aforementioned efficiency and accuracy issues ultimately affect battery performance. Inaccurate or inconsistent markings can lead to poor connections between sub-cells, reduced effective area, and increased leakage current, severely limiting the final photoelectric conversion efficiency and yield of perovskite solar cell modules.

[0007] In view of the above-mentioned shortcomings, the designer has actively researched and innovated to create a large-size perovskite thin-film solar cell laser marking motion platform, making it more valuable for industrial applications. Summary of the Invention

[0008] To address the aforementioned technical problems, the purpose of this invention is to provide a laser scribing motion platform for large-size perovskite thin-film solar cells.

[0009] To achieve the above objectives, the present invention adopts the following technical solution:

[0010] A large-size perovskite thin-film solar cell laser scribing motion platform includes a granite base, a granite beam, a Z-axis laser mirror assembly, and a fixture assembly. The left and right sides of the bottom of the granite beam are respectively mounted on the granite base near the middle position via granite columns.

[0011] A first X-axis module is installed on a granite crossbeam. The first X-axis module drives several second X-axis modules that are evenly distributed along the left and right directions to move along the left and right directions. Each second X-axis module drives a Z-axis laser mirror group to move along the left and right directions.

[0012] A Y-axis module is installed on the granite base, and the Y-axis module drives the fixture assembly above to move in the front-back direction;

[0013] A lower X-axis module is installed at the bottom of at least one of the left and right sides of the granite beam, and the lower X-axis module drives the vision inspection component to move in the left and right direction.

[0014] As a further improvement of the present invention, the Y-axis module includes a Y-axis guide rail, a Y-axis slider connecting plate, a Y-axis slider, a Y-axis linear motor, and a Y-axis motor adapter plate; the Y-axis linear motor mounted on the granite base drives the fixture assembly above to move in the front-back direction through the Y-axis motor adapter plate; and the bottom of the fixture assembly is connected to the Y-axis guide rail mounted on the granite base through at least one Y-axis slider connecting plate and the Y-axis slider.

[0015] As a further improvement of the present invention, the Y-axis module also includes a Y-axis reading head, a Y-axis reading head fixing block, a Y-axis cable chain adapter plate, a Y-axis cable chain, a Y-axis cable chain fixing plate, a Y-axis grating ruler, a dust cover mounting plate, and a Y-axis dust cover. The Y-axis reading head is mounted on the fixture assembly via the Y-axis reading head fixing block and is adapted to the Y-axis grating ruler mounted on the granite base along the front-rear direction. The first side of the Y-axis cable chain is connected to the fixture assembly via the Y-axis cable chain adapter plate, and the second side of the Y-axis cable chain is mounted on the granite base via the Y-axis cable chain fixing plate. A Y-axis dust cover is also provided above the Y-axis linear motor, and the Y-axis dust cover is mounted on the granite base via the dust cover mounting plate.

[0016] As a further improvement of the present invention, the first X-axis module includes a first X-axis slide plate, a first X-axis linear motor, a first X-axis motor adapter plate, and a first X-axis guide rail. The first X-axis linear motor, mounted on the granite crossbeam, drives the first X-axis slide plate to move in the left-right direction through the first X-axis motor adapter plate. Several second X-axis modules are evenly mounted on the first X-axis slide plate in the left-right direction. The first X-axis slide plate is connected to the first X-axis guide rail mounted on the granite crossbeam through at least one first X-axis slider.

[0017] As a further improvement of the present invention, the first X-axis module further includes a first X-axis reading head fixing block, a first X-axis reading head, a first X-axis grating ruler, a first X-axis cable chain, and a first X-axis cable chain mounting plate; the first X-axis reading head is mounted on the first X-axis slide plate via the first X-axis reading head fixing block and is adapted to the first X-axis grating ruler mounted on the granite crossbeam along the left-right direction; the first side of the first X-axis cable chain is connected to the first X-axis slide plate via the first X-axis cable chain adapter plate, and the second side of the first X-axis cable chain is mounted on the granite crossbeam via the first X-axis cable chain mounting plate.

[0018] As a further improvement of the present invention, the second X-axis module includes a second X-axis slide plate, a second X-axis guide rail, a second X-axis line cover plate, and a second X-axis linear motor. The second X-axis linear motor, mounted on the first X-axis slide plate, drives the second X-axis slide plate to move in the left and right direction. The second X-axis slide plate is connected to the second X-axis guide rail mounted on the first X-axis module through at least one second X-axis slider. A second X-axis line cover plate is installed on the outside of the second X-axis slide plate.

[0019] As a further improvement of the present invention, the second X-axis module further includes a second X-axis reading head fixing block, a second X-axis reading head, a second X-axis grating ruler, a second X-axis cable chain mounting plate, a second X-axis cable chain, and a second X-axis cable chain adapter plate; the second X-axis reading head is mounted on the second X-axis slide plate via the second X-axis reading head fixing block and is adapted to the second X-axis grating ruler mounted on the first X-axis module along the left-right direction; the first side of the second X-axis cable chain is connected to the second X-axis slide plate via the second X-axis cable chain adapter plate, and the second side of the second X-axis cable chain is mounted on the first X-axis module via the second X-axis cable chain mounting plate.

[0020] As a further improvement of the present invention, the lower X-axis module includes a lower X-axis slide plate, a lower X-axis linear motor, a lower X-axis motor adapter plate, and a lower X-axis guide rail; the lower X-axis linear motor installed at the bottom of the granite crossbeam drives the lower X-axis slide plate to move in the left and right direction through the lower X-axis motor adapter plate, and the lower X-axis slide plate is connected to the lower X-axis guide rail installed on the granite crossbeam through at least one lower X-axis slider, and a vision inspection component is installed at the bottom of the lower X-axis slide plate.

[0021] As a further improvement of the present invention, the lower X-axis module also includes a lower X-axis reading head fixing block, a lower X-axis reading head, a lower X-axis grating ruler, a lower X-axis cable chain adapter plate, a lower X-axis cable chain, and a lower X-axis cable chain fixing plate; the lower X-axis reading head is mounted on the lower X-axis slide plate via the X-axis reading head fixing block and is adapted to the lower X-axis grating ruler mounted on the granite crossbeam along the left-right direction; the first side of the lower X-axis cable chain is connected to the lower X-axis slide plate via the lower X-axis cable chain adapter plate, and the second side of the lower X-axis cable chain is mounted on the granite crossbeam via the lower X-axis cable chain fixing plate.

[0022] As a further improvement of the present invention, the fixture assembly is a negative pressure adsorption working platform; the visual inspection assembly is an image recognition device.

[0023] By means of the above-described solution, the present invention has at least the following advantages:

[0024] This invention employs multi-head laser parallel processing, which greatly improves processing efficiency and significantly shortens the processing time of a single board, thus greatly meeting the stringent capacity requirements of large-scale industrial production.

[0025] This invention provides extremely high mechanical stability and vibration damping characteristics: the dual positioning mode of first X-axis precision positioning combined with second X-axis spacing positioning, combined with full closed-loop grating ruler feedback, controls the scribing position accuracy in the entire processing area to the micrometer level; the Z-axis integrated dynamic focusing unit ensures real-time tracking of the substrate surface undulations, ensuring high consistency of scribing depth and width.

[0026] This invention improves the photoelectric conversion efficiency and yield of perovskite solar cell modules.

[0027] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the following are preferred embodiments of the present invention described in detail with reference to the accompanying drawings. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of a laser scribing motion platform for a large-size perovskite thin-film solar cell according to the present invention;

[0030] Figure 2 yes Figure 1 Right view of the Y-axis module;

[0031] Figure 3 yes Figure 1 Axonometric view of the Y-axis module;

[0032] Figure 4 yes Figure 3 Top view of the Y-axis module after removing the Y-axis dust cover;

[0033] Figure 5 yes Figure 1 Schematic diagram of the structure of the first X-axis module and the second X-axis module;

[0034] Figure 6 yes Figure 5 A schematic diagram of the structure after the granite columns have been removed.

[0035] The meanings of the labels in the figures are as follows.

[0036] Granite base 100, Y-axis module 200, granite column 300, granite beam 400, first X-axis module 500, second X-axis module 600, Z-axis laser mirror assembly 700, jig assembly 800, lower X-axis module 900.

[0037] Y-axis guide rail 201, Y-axis slider connecting plate 202, Y-axis slider 203, Y-axis linear motor 204, Y-axis motor adapter plate 205, Y-axis reading head 206, Y-axis reading head fixing block 207, Y-axis cable chain adapter plate 208, Y-axis cable chain 209, Y-axis cable chain fixing plate 210, Y-axis grating ruler 211, dust cover mounting plate 212, Y-axis dust cover 213;

[0038] First X-axis slide plate 501, first X-axis linear motor 502, first X-axis motor adapter plate 503, first X-axis guide rail 504, first X-axis reading head fixing block 505, first X-axis reading head 506, first X-axis grating ruler 507, first X-axis cable chain 508, first X-axis cable chain mounting plate 509;

[0039] Second X-axis slide plate 601, second X-axis guide rail 602, second X-axis axis cover plate 603, second X-axis linear motor 604, second X-axis reading head fixing block 605, second X-axis reading head 606, second X-axis grating ruler 607, second X-axis cable chain mounting plate 608, second X-axis cable chain 609, second X-axis cable chain adapter plate 610;

[0040] Lower X-axis slide plate 901, vision inspection component 902, lower X-axis linear motor 903, lower X-axis motor adapter plate 904, lower X-axis guide rail 905, lower X-axis reading head fixing block 906, lower X-axis reading head 907, lower X-axis grating ruler 908, lower X-axis cable chain adapter plate 909, lower X-axis cable chain 910, lower X-axis cable chain fixing plate 911. Detailed Implementation

[0041] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0042] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0043] First embodiment of the present invention:

[0044] like Figures 1-6 As shown, this embodiment of a large-size perovskite thin-film solar cell laser scribing motion platform includes a granite base 100, a granite beam 400, a Z-axis laser mirror assembly 700, and a fixture assembly 800. The left and right sides of the bottom of the granite beam 400 are respectively mounted on the granite base 100 near the center via granite columns 300. The granite beam 400 is firmly supported above the granite base 100 by the granite columns 300 on both sides, together forming an integrated basic frame with high rigidity, high stability, and low thermal deformation.

[0045] A first X-axis module 500 is installed on a granite beam 400. The first X-axis module 500 drives several second X-axis modules 600, which are evenly distributed along the left and right direction, to move in the left and right direction. Each second X-axis module 600 drives a Z-axis laser mirror group 700 to move in the left and right direction. The first X-axis module 500 is installed on the granite beam 400, and 24 sets of second X-axis modules 600 are installed side by side on it. The first X-axis module 500 is responsible for driving these 24 sets of second X-axis modules 600 to perform large-range coordinated coarse positioning movements.

[0046] Each of the second X-axis modules 600 independently drives one of the Z-axis laser mirror groups 700. The Z-axis laser mirror group 700 is used to mount the laser focusing lens and achieve fine-tuning of its vertical direction. The second X-axis module 600 is responsible for driving the laser head to perform small-range precise positioning movements to compensate for errors and achieve accurate alignment.

[0047] A Y-axis module 200 is mounted on the granite base 100, and the Y-axis module 200 drives the fixture assembly 800 above it to move in the front-back direction. The Y-axis module 200 is located on the granite base 100 and is used to drive the fixture assembly 800, which carries the perovskite solar cell substrate, to move in the front-back direction, thereby realizing the feeding of the substrate relative to the laser head array.

[0048] A lower X-axis module 900 is installed at the bottom of at least one of the left and right sides of the granite beam 400. The lower X-axis module 900 drives the vision inspection component 902 to move in the left and right direction. The lower X-axis module 900 is independently installed below the granite beam 400 and is used to drive a vision inspection component 902, which integrates a high-resolution camera and a light source, to move in the left and right direction for reference point positioning before scribing and online quality inspection after scribing.

[0049] Specifically:

[0050] The Y-axis module 200 includes a Y-axis guide rail 201, a Y-axis slider connecting plate 202, a Y-axis slider 203, a Y-axis linear motor 204, and a Y-axis motor adapter plate 205. The Y-axis linear motor 204, mounted on the granite base 100, drives the fixture assembly 800 above it to move in the front-back direction via the Y-axis motor adapter plate 205. The bottom of the fixture assembly 800 is connected to the Y-axis guide rail 201 mounted on the granite base 100 via at least one Y-axis slider connecting plate 202 and the Y-axis slider 203.

[0051] The Y-axis module 200 also includes a Y-axis reading head 206, a Y-axis reading head fixing block 207, a Y-axis cable chain adapter plate 208, a Y-axis cable chain 209, a Y-axis cable chain fixing plate 210, a Y-axis grating ruler 211, a dust cover mounting plate 212, and a Y-axis dust cover 213. The Y-axis reading head 206 is mounted on the fixture assembly 800 via the Y-axis reading head fixing block 207 and is adapted to the Y-axis grating ruler 211, which is mounted on the granite base 100 along the front-to-back direction. The first side of the Y-axis cable chain 209 is connected to the fixture assembly 800 via the Y-axis cable chain adapter plate 208, and the second side of the Y-axis cable chain 209 is mounted on the granite base 100 via the Y-axis cable chain fixing plate 210. A Y-axis dust cover 213 is also provided above the Y-axis linear motor 204 and is mounted on the granite base 100 via the dust cover mounting plate 212.

[0052] The first X-axis module 500 includes a first X-axis slide plate 501, a first X-axis linear motor 502, a first X-axis motor adapter plate 503, and a first X-axis guide rail 504. The first X-axis linear motor 502, mounted on the granite beam 400, drives the first X-axis slide plate 501 to move in the left-right direction through the first X-axis motor adapter plate 503. Several second X-axis modules 600 are evenly mounted on the first X-axis slide plate 501 in the left-right direction. The first X-axis slide plate 501 is connected to the first X-axis guide rail 504 mounted on the granite beam 400 through at least one first X-axis slider.

[0053] The first X-axis module 500 also includes a first X-axis reading head fixing block 505, a first X-axis reading head 506, a first X-axis grating ruler 507, a first X-axis cable chain 508, and a first X-axis cable chain mounting plate 509. The first X-axis reading head 506 is mounted on the first X-axis slide plate 501 via the first X-axis reading head fixing block 505 and is adapted to the first X-axis grating ruler 507, which is mounted on the granite beam 400 along the left-right direction. The first side of the first X-axis cable chain 508 is connected to the first X-axis slide plate 501 via the first X-axis cable chain adapter plate, and the second side of the first X-axis cable chain 508 is mounted on the granite beam 400 via the first X-axis cable chain mounting plate 509.

[0054] The second X-axis module 600 includes a second X-axis slide plate 601, a second X-axis guide rail 602, a second X-axis line cover plate 603, and a second X-axis linear motor 604. The second X-axis linear motor 604, mounted on the first X-axis slide plate 501, drives the second X-axis slide plate 601 to move in the left and right direction. The second X-axis slide plate 601 is connected to the second X-axis guide rail 602 mounted on the first X-axis module 500 through at least one second X-axis slider. The second X-axis line cover plate 603 is mounted on the outer side of the second X-axis slide plate 601.

[0055] The second X-axis module 600 also includes a second X-axis reading head fixing block 605, a second X-axis reading head 606, a second X-axis grating ruler 607, a second X-axis cable chain mounting plate 608, a second X-axis cable chain 609, and a second X-axis cable chain adapter plate 610. The second X-axis reading head 606 is mounted on the second X-axis slide plate 601 via the second X-axis reading head fixing block 605 and is adapted to the second X-axis grating ruler 607, which is mounted on the first X-axis module 500 along the left-right direction. The first side of the second X-axis cable chain 609 is connected to the second X-axis slide plate 601 via the second X-axis cable chain adapter plate 610, and the second side of the second X-axis cable chain 609 is mounted on the first X-axis module 500 via the second X-axis cable chain mounting plate 608.

[0056] The lower X-axis module 900 includes a lower X-axis slide plate 901, a lower X-axis linear motor 903, a lower X-axis motor adapter plate 904, and a lower X-axis guide rail 905. The lower X-axis linear motor 903, which is installed at the bottom of the granite beam 400, drives the lower X-axis slide plate 901 to move in the left and right directions through the lower X-axis motor adapter plate 904. The lower X-axis slide plate 901 is connected to the lower X-axis guide rail 905 installed on the granite beam 400 through at least one lower X-axis slider. A vision inspection component 902 is installed at the bottom of the lower X-axis slide plate 901.

[0057] The lower X-axis module 900 also includes a lower X-axis reading head fixing block 906, a lower X-axis reading head 907, a lower X-axis grating ruler 908, a lower X-axis cable chain adapter plate 909, a lower X-axis cable chain 910, and a lower X-axis cable chain fixing plate 911. The lower X-axis reading head 907 is mounted on the lower X-axis slide plate 901 via the X-axis reading head fixing block 906 and is adapted to the lower X-axis grating ruler 908, which is mounted on the granite beam 400 along the left-right direction. The first side of the lower X-axis cable chain 910 is connected to the lower X-axis slide plate 901 via the lower X-axis cable chain adapter plate 909, and the second side of the lower X-axis cable chain 910 is mounted on the granite beam 400 via the lower X-axis cable chain fixing plate 911.

[0058] The fixture component 800 is a negative pressure adsorption working platform; the vision inspection component 902 is an image recognition device.

[0059] The laser scribing motion platform in this embodiment supports large-size substrates for large-area, seamless processing. Existing technologies mostly consist of a two-layer structure of a mounting base, a first connecting plate, and a second connecting plate, which can only cover a small area through serial beam splitting by a beam splitting module, and cannot meet the parallel processing requirements of large-size substrates.

[0060] The laser scribing motion platform in this embodiment is designed with a dual X-axis structure, consisting of a first X-axis precision positioning (overall synchronous movement) and a second X-axis spacing positioning (independent adjustment of each laser mirror group). Combined with a fully closed-loop grating ruler, the scribing position accuracy is controlled at the micrometer level, solving the problem of cumulative error in splicing large-size substrates.

[0061] The Z-axis dynamic focusing unit tracks the surface undulations of large-size substrates in real time (perovskite substrates are prone to slight undulations due to the manufacturing process), ensuring consistent scribing depth / width and avoiding the problem of increased series resistance caused by uneven depth in existing technologies.

[0062] Existing technologies rely on adjusting the spacing of multiple second connecting plates to improve efficiency, but this is essentially a split-series processing method without a quality inspection step, which cannot meet the needs of large-scale mass production of large-size perovskites. This solution uses multiple second X-axis laser mirror groups with independent Z-axis lasers to achieve multi-head parallel processing, which can greatly shorten the processing time per board and solve the problem of low efficiency in existing single-head / few-head processes.

[0063] The vision inspection component (image recognition device) driven by the lower X-axis can locate the substrate position and detect the scribing quality in real time, avoiding poor sub-cell connection caused by scribing deviation and improving the yield.

[0064] This embodiment is deeply integrated with the motion platform (the lower X-axis and the first X-axis are synchronously linked), forming a closed loop of integrated processing and inspection, which brings about a double improvement in efficiency and yield.

[0065] The second embodiment of the present invention:

[0066] like Figures 1-6 As shown, the purpose of this embodiment is to provide a laser scribing motion platform for large-size perovskite thin-film solar cells.

[0067] like Figure 1 The core foundation of the platform is an integrated granite base frame, consisting of a granite base 100, two granite columns 300, and a granite beam 400, all precision-machined and connected. This frame provides a stable and unchanging reference for all moving parts.

[0068] A Y-axis module 200 is mounted on the granite base 100. (See also...) Figures 2-4 The Y-axis module 200 includes a Y-axis guide rail 201, a Y-axis slider connecting plate 202, a Y-axis slider 203, a Y-axis linear motor 204, a Y-axis motor adapter plate 205, a Y-axis reading head 206, a Y-axis reading head fixing block 207, a Y-axis cable chain adapter plate 208, a Y-axis cable chain 209, a Y-axis cable chain fixing plate 210, a Y-axis grating ruler 211, a dust cover mounting plate 212, and a Y-axis dust cover 213. The Y-axis linear motor 204 directly drives the fixture assembly 800 above it through the Y-axis motor adapter plate 205. The fixture assembly 800 slides with multiple Y-axis guide rails 201 through the Y-axis slider connecting plate 202 and the Y-axis slider 203 to ensure smooth movement. The Y-axis reading head 206 reads the signal from the Y-axis grating ruler 211 to achieve closed-loop control. Y-axis cable chain 209 is connected to fixture assembly 800 via Y-axis cable chain adapter plate 208 to protect cables and air passages. Y-axis dust cover 213 is mounted via dust cover mounting plate 212.

[0069] In addition, the fixture assembly 800 has a hollow internal structure, which can be equipped with a negative pressure adsorption chamber and a cooling circulation pipe. Through the connection of an external vacuum generator and a coolant circulation unit, it can achieve firm adsorption and active heat dissipation of the substrate.

[0070] The first X-axis module 500 is installed on the granite crossbeam 400. (See also...) Figure 5 The first X-axis module 500 includes a first X-axis slide plate 501, a first X-axis linear motor 502, a first X-axis motor adapter plate 503, a first X-axis guide rail 504, a first X-axis reading head fixing block 505, a first X-axis reading head 506, a first X-axis grating ruler 507, a first X-axis cable chain 508, and a first X-axis cable chain mounting plate 509. The first X-axis linear motor 502 drives the first X-axis slide plate 501 to move along the first X-axis guide rail 504 via the first X-axis motor adapter plate 503. The first X-axis reading head 506 is mounted via the first X-axis reading head fixing block 505 and provides position feedback with the first X-axis grating ruler 507. One end of the first X-axis cable chain 508 is connected to the first X-axis slide plate 501, and the other end is fixed via the first X-axis cable chain mounting plate 509.

[0071] like Figure 5 On the first X-axis slide plate 501, 24 sets of second X-axis modules 600 are installed at equal intervals along the left and right directions. Each set of second X-axis modules 600 includes a second X-axis slide plate 601, a second X-axis guide rail 602, a second X-axis axis cover plate 603, a second X-axis linear motor 604, a second X-axis reading head fixing block 605, a second X-axis reading head 606, a second X-axis grating ruler 607, a second X-axis cable chain mounting plate 608, a second X-axis cable chain 609, and a second X-axis cable chain adapter plate 610. The second X-axis linear motor 604 drives the second X-axis slide plate 601 to perform precise small-stroke movements. The second X-axis slide plate 601 is connected to the second X-axis guide rail 602 and is equipped with the second X-axis axis cover plate 603. Each second X-axis slide plate 601 is equipped with a Z-axis laser mirror assembly 700. The Z-axis laser mirror assembly 700 is driven by a high-response servo motor, and its lower end integrates a laser focusing lens and a dynamic focusing unit. The second X-axis reading head 606 is installed via the second X-axis reading head fixing block 605 and is adapted to the second X-axis grating ruler 607 to form a closed-loop control. The second X-axis cable chain 609 is connected to the second X-axis slide plate 601 via the second X-axis cable chain adapter plate 610 and is fixed by the second X-axis cable chain mounting plate 608.

[0072] Below the granite crossbeam 400, a separate lower X-axis module 900 is installed. See also Figure 6 The lower X-axis module 900 includes a lower X-axis slide plate 901, a vision inspection component 902, a lower X-axis linear motor 903, a lower X-axis motor adapter plate 904, a lower X-axis guide rail 905, a lower X-axis reading head fixing block 906, a lower X-axis reading head 907, a lower X-axis grating ruler 908, a lower X-axis cable chain adapter plate 909, a lower X-axis cable chain 910, and a lower X-axis cable chain fixing plate 911. The lower X-axis linear motor 903 is mounted via the lower X-axis motor adapter plate 904 and drives the lower X-axis slide plate 901 to move along the lower X-axis guide rail 905. The vision inspection component 902, which integrates a high-resolution camera and a ring light source, is mounted on the lower X-axis slide plate 901. The lower X-axis reading head 907 is mounted via the lower X-axis reading head fixing block 906 and provides position feedback with the lower X-axis grating ruler 908. The lower X-axis cable chain 910 is connected to the lower X-axis slide plate 901 via the lower X-axis cable chain adapter plate 909 and is fixed by the lower X-axis cable chain fixing plate 911.

[0073] The working process of this invention is as follows:

[0074] Loading and Positioning: The large-size perovskite solar cell substrate is placed on the fixture assembly 800, and negative pressure adsorption is activated for fixation. The Y-axis module 200 drives the fixture assembly 800 to move to the vision positioning station. Simultaneously, the lower X-axis module 900 drives the vision inspection assembly 902 to scan the reference marks on the substrate. The control system calculates the precise position and angular deviation of the substrate based on visual feedback.

[0075] Error Compensation and Focusing: The control system assigns commands to the 24 second X-axis modules 600, based on the positional deviations calculated in the above steps, to perform micro-adjustments. This compensates for system mechanical errors and substrate placement errors, ensuring that the focal points of the 24 laser heads are perfectly aligned with the theoretical scribing position. Simultaneously, the dynamic focusing units on all Z-axis laser mirror groups 700 activate, measuring and adjusting the distance between each laser head and the substrate surface, uniformly setting it to the optimal focal length.

[0076] Parallel laser scribing: The first X-axis module 500, according to program instructions, moves 24 laser heads to the target scribing starting position and locks them in place. The Y-axis module 200 then drives the fixture assembly 800 and the substrate to move uniformly along the Y direction once. The 24 laser heads simultaneously emit lasers, scribing 24 equally spaced parallel lines on the substrate, completing, for example, the scribing process P1. For scribing P2 and P3, a similar process is repeated, with the first X-axis module 500 making stepwise movements to scribing lines at different positions. Throughout the process, each of the second X-axis modules 600 and the Z-axis laser mirror group 700 can be fine-tuned according to a preset program or real-time feedback.

[0077] Online quality inspection: After one or more scribing processes are completed, the lower X-axis module 900 can be activated again to drive the vision inspection component 902 to take pictures of the scribing lines, identify whether there are defects such as broken lines, burrs, and positional misalignment, and record the location of defective products.

[0078] Unloading and Cycle: The jig assembly 800 returns to the loading station, releases the vacuum, and removes the processed substrate. To achieve continuous production, another jig assembly can be set up at the other end of the platform, driven by the Y-axis module 200, to alternate between the two stations for unloading, loading, and processing.

[0079] This embodiment systematically solves the problems of efficiency, accuracy, and consistency in existing technologies through a series of innovative designs, including parallel use of multiple laser heads, a granite base frame, multi-level precision motion control, dynamic real-time focusing, integrated visual inspection, and active thermal management.

[0080] Employing multi-head laser parallel processing significantly improves processing efficiency and drastically reduces single-panel processing time, greatly meeting the stringent capacity requirements of large-scale industrial production. It provides extremely high mechanical stability and vibration damping characteristics: a dual positioning mode combining precise positioning on the first X-axis with spacing positioning on the second X-axis, along with feedback from a fully closed-loop grating ruler, controls the scribing position accuracy within the entire processing area to the micrometer level; the integrated dynamic focusing unit on the Z-axis ensures real-time tracking of substrate surface undulations, guaranteeing high consistency in scribing depth and width. This improves the photoelectric conversion efficiency and yield of perovskite solar cell modules.

[0081] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0082] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0083] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A large-size perovskite thin-film solar cell laser marking motion platform, comprising a granite base (100), a granite beam (400), a Z-axis laser mirror assembly (700), and a fixture assembly (800), wherein the left and right sides of the bottom of the granite beam (400) are respectively mounted on the granite base (100) near the middle position via granite columns (300); Its features are: A first X-axis module (500) is installed on the granite beam (400). The first X-axis module (500) drives several second X-axis modules (600) that are evenly distributed along the left and right directions to move along the left and right directions. Each second X-axis module (600) drives a Z-axis laser mirror group (700) to move along the left and right directions. A Y-axis module (200) is installed on the granite base (100), and the Y-axis module (200) drives the fixture assembly (800) above to move in the front-back direction; A lower X-axis module (900) is installed at the bottom of at least one of the left and right sides of the granite beam (400), and the lower X-axis module (900) drives the vision inspection component (902) to move in the left and right direction.

2. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 1, characterized in that, The Y-axis module (200) includes a Y-axis guide rail (201), a Y-axis slider connecting plate (202), a Y-axis slider (203), a Y-axis linear motor (204), and a Y-axis motor adapter plate (205). The Y-axis linear motor (204) mounted on the granite base (100) drives the fixture assembly (800) above to move in the front-back direction through the Y-axis motor adapter plate (205). The bottom of the fixture assembly (800) is connected to the Y-axis guide rail (201) mounted on the granite base (100) through at least one Y-axis slider connecting plate (202) and the Y-axis slider (203).

3. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 2, characterized in that, The Y-axis module (200) further includes a Y-axis reading head (206), a Y-axis reading head fixing block (207), a Y-axis cable chain adapter plate (208), a Y-axis cable chain (209), a Y-axis cable chain fixing plate (210), a Y-axis grating ruler (211), a dust cover mounting plate (212), and a Y-axis dust cover (213); the Y-axis reading head (206) is mounted on the fixture assembly (800) via the Y-axis reading head fixing block (207) and is mounted on the granite base (100) along the front-back direction. The Y-axis linear encoder (211) is adapted to the Y-axis linear encoder; the first side of the Y-axis drag chain (209) is connected to the fixture assembly (800) through the Y-axis drag chain adapter plate (208), and the second side of the Y-axis drag chain (209) is installed on the granite base (100) through the Y-axis drag chain fixing plate (210); a Y-axis dust cover plate (213) is also provided above the Y-axis linear motor (204), and the Y-axis dust cover plate (213) is installed on the granite base (100) through the dust cover plate mounting plate (212).

4. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 1, characterized in that, The first X-axis module (500) includes a first X-axis slide plate (501), a first X-axis linear motor (502), a first X-axis motor adapter plate (503), and a first X-axis guide rail (504). The first X-axis linear motor (502) mounted on the granite beam (400) drives the first X-axis slide plate (501) to move in the left and right direction through the first X-axis motor adapter plate (503). A plurality of second X-axis modules (600) are evenly mounted on the first X-axis slide plate (501) in the left and right direction. The first X-axis slide plate (501) is connected to the first X-axis guide rail (504) mounted on the granite beam (400) through at least one first X-axis slider.

5. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 4, characterized in that, The first X-axis module (500) further includes a first X-axis reading head fixing block (505), a first X-axis reading head (506), a first X-axis grating ruler (507), a first X-axis cable chain (508), and a first X-axis cable chain mounting plate (509); the first X-axis reading head (506) is mounted on the first X-axis slide plate (501) through the first X-axis reading head fixing block (505) and is adapted to the first X-axis grating ruler (507) which is mounted on the granite beam (400) along the left and right direction; the first side of the first X-axis cable chain (508) is connected to the first X-axis slide plate (501) through the first X-axis cable chain adapter plate, and the second side of the first X-axis cable chain (508) is mounted on the granite beam (400) through the first X-axis cable chain mounting plate (509).

6. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 1, characterized in that, The second X-axis module (600) includes a second X-axis slide plate (601), a second X-axis guide rail (602), a second X-axis line cover plate (603), and a second X-axis linear motor (604). The second X-axis linear motor (604), mounted on the first X-axis slide plate (501), drives the second X-axis slide plate (601) to move in the left and right direction. The second X-axis slide plate (601) is connected to the second X-axis guide rail (602) mounted on the first X-axis module (500) through at least one second X-axis slider. The second X-axis line cover plate (603) is mounted on the outside of the second X-axis slide plate (601).

7. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 6, characterized in that, The second X-axis module (600) further includes a second X-axis reading head fixing block (605), a second X-axis reading head (606), a second X-axis grating ruler (607), a second X-axis cable chain mounting plate (608), a second X-axis cable chain (609), and a second X-axis cable chain adapter plate (610); the second X-axis reading head (606) is mounted on the second X-axis slide plate (601) via the second X-axis reading head fixing block (605) and is adapted to the second X-axis grating ruler (607) mounted on the first X-axis module (500) along the left-right direction; the first side of the second X-axis cable chain (609) is connected to the second X-axis slide plate (601) via the second X-axis cable chain adapter plate (610), and the second side of the second X-axis cable chain (609) is mounted on the first X-axis module (500) via the second X-axis cable chain mounting plate (608).

8. The laser marking motion platform for large-size perovskite thin-film solar cells as described in claim 1, characterized in that, The lower X-axis module (900) includes a lower X-axis slide plate (901), a lower X-axis linear motor (903), a lower X-axis motor adapter plate (904), and a lower X-axis guide rail (905). The lower X-axis linear motor (903), which is installed at the bottom of the granite beam (400), drives the lower X-axis slide plate (901) to move in the left and right directions through the lower X-axis motor adapter plate (904). The lower X-axis slide plate (901) is connected to the lower X-axis guide rail (905) installed on the granite beam (400) through at least one lower X-axis slider. A vision inspection component (902) is installed at the bottom of the lower X-axis slide plate (901).

9. The laser scribing motion platform for large-size perovskite thin-film solar cells as described in claim 8, characterized in that, The lower X-axis module (900) also includes a lower X-axis reading head fixing block (906), a lower X-axis reading head (907), a lower X-axis grating ruler (908), a lower X-axis cable chain adapter plate (909), a lower X-axis cable chain (910), and a lower X-axis cable chain fixing plate (911). The lower X-axis reading head (907) is mounted on the lower X-axis slide plate (901) via the X-axis reading head fixing block (906) and is adapted to the lower X-axis grating ruler (908) mounted on the granite beam (400) along the left-right direction. The first side of the lower X-axis cable chain (910) is connected to the lower X-axis slide plate (901) via the lower X-axis cable chain adapter plate (909), and the second side of the lower X-axis cable chain (910) is mounted on the granite beam (400) via the lower X-axis cable chain fixing plate (911).

10. The laser scribing motion platform for large-size perovskite thin-film solar cells as described in claim 1, characterized in that, The fixture assembly (800) is a negative pressure adsorption working platform; the visual inspection assembly (902) is an image recognition device.

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