Oxygen-hydrogen bath system
By inserting a Y-shaped connector and a pressure reducer into the oxygen-hydrogen bath system, the problem of limited hydrogen generator capacity in the prior art is solved, enabling more efficient hydrogen and oxygen intake and reducing risks and costs.
Patent Information
- Application Number
- CN202480039449.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-07-19
- Filing Date
- 2024-06-19
- Publication Date
- 2026-01-16
AI Technical Summary
In existing oxygen-hydrogen bath systems, the limited capacity of the hydrogen generator prevents sufficient hydrogen from entering the body in a shorter time, and increasing the capacity would increase the risk of explosion and manufacturing costs.
A Y-shaped connector and a pressure reducer are inserted into the air supply pipe of the oxygen-hydrogen bath system. The hydrogen and air flow are divided equally through the Y-shaped connector, and the gas exhaust section is connected by a T-shaped connector to maintain the hydrogen concentration in the chamber at 1.0~2.0% by volume. At the same time, a safety valve is used to control the chamber pressure at 1.1~1.35 atmospheres.
Without altering the hydrogen generator, the efficiency of hydrogen entering the human body and the amount of dissolved oxygen are improved, enabling efficient hydrogen and oxygen entry in a shorter time, reducing the risk of hydrogen explosion and controlling manufacturing costs.
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Figure CN121358448A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to an oxygen-hydrogen bath system. BACKGROUND
[0002] (Position of the present application)
[0003] The present applicant holds a patent (Japanese Patent No. 6133526 (hereinafter, Patent Document 1)) entitled "Oxygen-hydrogen bath system", and the present application is an application for a modified application of the invention described in the patent.
[0004] The invention addressed by Japanese Patent No. 6133526 is an oxygen-hydrogen bath system that enables more hydrogen to enter the body and easily obtain the effect of reducing active oxygen compared to the case of taking hydrogen water orally, but in recent years, more active oxygen needs to be removed from the body than ever before in order to maintain health. Among people with such needs are also busy businesspeople who are in a hurry, and such businesspeople expect that if they can perform an oxygen-hydrogen bath in a short time during work, they can enjoy greater benefits.
[0005] The technical idea of the invention described in the patent is based on supplying air that has become a certain hydrogen concentration outside the cabin to the cabin at a certain speed and amount for an oxygen-hydrogen bath, and maintaining the hydrogen volume concentration of the air in the cabin at a dynamic equilibrium.
[0006] Prior Art Documents
[0007] Patent Documents
[0008] Patent Document 1: Japanese Patent No. 6133526 SUMMARY
[0009] Problems to be Solved by the Invention
[0010] However, in the oxygen-hydrogen bath system that implements the invention described in Patent Document 1, from the viewpoint of the danger associated with the use of a hydrogen gas generator, the hydrogen gas generation capacity is limited to the capacity of generating 500 cc of 100% hydrogen gas per 1 minute, and the hydrogen concentration in the cabin can only be maintained at 1.0 vol% when reaching a dynamic equilibrium. Therefore, there is a side that cannot sufficiently cope with the market demand to make a sufficient amount of hydrogen enter the body in a shorter time than that, or to make a larger amount of hydrogen enter the body in the same time.
[0011] In such a case, a solution that is generally conceived is to increase the capacity of the hydrogen generator alone without changing the system as a whole, but in this solution, the amount of hydrogen generated exceeds the range in which safety is confirmed, and the danger of a hydrogen explosion is feared, so it is not ideal. In addition, a new hydrogen generator that greatly affects manufacturing costs needs to be introduced, manufacturing costs increase, so from a commercial point of view, it is not ideal.
[0012] Therefore, the present inventors conducted intensive research on a solution that achieves the object while avoiding a large increase in manufacturing costs using a hydrogen generator in which safety is confirmed through long-term use, that is, the amount of hydrogen generated is within a safe range, in the oxygen-hydrogen bath system of Patent Document 1 (prior art), and as a result, found that, without changing the hydrogen generator used in the oxygen-hydrogen bath system described in Patent Document 1, by inserting a simple low-cost Y-shaped joint halfway through the air supply pipe of the system, configuring one leg in the same way as in Patent Document 1, and inserting a pressure reducer into the other leg, connecting the front end thereof to the gas discharge portion of Patent Document 1 via a T-shaped joint, it is possible to increase and maintain the hydrogen concentration in the cabin of the oxygen-hydrogen bath system at a hydrogen concentration that cannot be obtained by the invention described in this document, based on this insight, the present invention was completed.
[0013] Solution for solving the problem
[0014] That is, the first technical solution provides an oxygen-hydrogen bath system having a cabin having a gas supply port for introducing a gas, the cabin being capable of accommodating an entire human body; a gas supply portion having a gas supply pipe connected to the gas supply port, the gas supply portion supplying an oxygen-containing gas into the cabin and making the pressure inside the cabin higher than atmospheric pressure via the gas supply pipe; a hydrogen supply portion having a hydrogen generator and a hydrogen supply pipe connected to the gas supply pipe via a Y-shaped joint A, the hydrogen supply portion supplying hydrogen gas from the hydrogen generator into the cabin via the hydrogen supply pipe; and a gas discharge portion communicating with the cabin, the gas discharge portion having a safety valve or a valve that maintains the cabin at a predetermined pressure range by opening and closing operation, the gas and the hydrogen being discharged from the cabin via the valve, the oxygen-hydrogen bath system being characterized in that the gas supply pipe of the gas supply portion has a Y-shaped joint B that bisects the flow path of the gas from the gas supply portion at a position closer to the gas supply portion than the position of the Y-shaped joint A, one leg A of the Y-shaped joint B is connected to the gas supply port after merging with the hydrogen supply pipe at the Y-shaped joint A, and the other leg B is connected to the gas discharge portion via a T-shaped joint after extending via a pressure reducer.
[0015] According to the first technical solution, the second technical solution is characterized in that the valve is used to maintain the pressure in the cabin at 1.1-1.35 atmospheres and the volume concentration of the hydrogen in the cabin at 1.0-2.0 vol%.
[0016] According to the first or second technical solution, the third technical solution is characterized in that the hydrogen supply unit supplies the hydrogen into the cabin during the period in which the gas supply unit supplies the gas into the cabin.
[0017] Further, the technical solution recited in claim 1 of the present application is obtained by adding the following underlined configuration elements to the configuration of the invention recited in claim 1 of the granted Japanese Patent No. 6133526, and therefore it is considered that the added configuration elements have sufficient patentability.
[0018] An oxygen-hydrogen bath system includes a cabin having a gas supply port through which a gas is introduced, the cabin being capable of accommodating an entire human body; a gas supply unit having a gas supply tube connected to the gas supply port, the gas supply unit supplying an oxygen-containing gas into the cabin through the gas supply tube and making the pressure inside the cabin higher than atmospheric pressure; a hydrogen supply unit having a hydrogen gas generator and a hydrogen supply tube connected to the gas supply tube, the hydrogen supply unit supplying hydrogen gas from the hydrogen gas generator into the cabin through the hydrogen supply tube; and a gas discharge unit communicating with the cabin, the gas discharge unit having a safety valve or a valve that maintains the cabin at a prescribed pressure range by opening and closing operations, the gas and the hydrogen being discharged from the cabin through the valve, the oxygen-hydrogen bath system being characterized in that via a Y-shaped A-junction the gas supply pipe of the gas supply section has a Y-shaped B-junction that bisects the flow path of the gas from the gas supply section at a position closer to the gas supply section than the position of the Y-shaped A-junction, and a branch pipe A extending from the Y-shaped B-junction is connected to the gas supply port after merging with the hydrogen supply pipe at the Y-shaped A-junction, a further branch pipe B is connected to a gas discharge section via a T-junction after extending via a pressure reducer Fig. 1 Fig. 2 .
[0019] Effects of the Invention
[0020] According to the present application, not only can the reduction effect of active oxygen be easily obtained in a shorter time with more hydrogen entering the body from the skin and mucous membranes of the human body in a high efficiency compared to the case of the prior art in the case of the oxygen-hydrogen bath system using the invention (prior art) recited in Patent Document 1 in which the amount of hydrogen gas generated confirmed by long-term use is within a safe range, but it is also possible to make more oxygen and hydrogen enter the human body in a dissolved state, and increase the dissolved oxygen and hydrogen in the blood or body fluid. BRIEF DESCRIPTION OF DRAWINGS
[0021] Fig. 3 This is a system concept diagram of the prior art. Furthermore, the reference numerals in the diagram are the same as those in the diagram of Japanese Patent No. 6133526, which are used to illustrate embodiments of the present invention. Fig. 2 , Fig. 1 The same element is represented in the middle.
[0022] Fig. 1 This is a system concept diagram of the present invention (based on...) Fig. 1 (A conceptual diagram of the recording method). In this diagram, with Fig. 3 The same reference numerals in the figures mean that they are the same as those in the figures. Fig. 1 The constituent elements are the same.
[0023] Fig. 1 This is a system concept diagram showing close-up views of the branching section, connecting section, and pressure reducing device section of the piping system according to the present invention. In this diagram, [the following text appears to be incomplete and requires further context: "and..."] Fig. 4 The same reference numerals in the figures mean that they are the same as those in the figures. Fig. 2 The constituent elements are the same.
[0024] Fig. 3 This is a conceptual diagram of the cabin (a conceptual diagram identical to those in the prior art). Furthermore, the reference numerals in the diagram are identical to those in the drawings of Japanese Patent No. 6133526, which are used to illustrate embodiments of the present invention. Fig. 5 , Fig. 6 The same element is represented in the middle.
[0025] Fig. 1 It is a graph showing the change in hydrogen concentration (volume %) in the cabin of existing technology over time.
[0026] Fig. 2 This is a graph showing the change in hydrogen concentration (volume %) within the chamber of this invention over time. The graph shows two broken lines: the upper line represents high-speed operation, and the lower line represents normal operation. Furthermore, these two broken lines coincide over a 25-minute period from the start. Detailed Implementation
[0027] (Implementation Method)
[0028] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[0029] This invention is an improvement upon the prior art (the invention described in Patent Document 1), and is constituted by adding new constituent elements to the system configuration of the prior art. Therefore, firstly, in order to easily understand which constituent elements have been added compared to the system configuration of the prior art, a conceptual diagram representing the system configuration of the prior art has been prepared. Fig. 2 and a conceptual diagram representing the system configuration of the present invention. Fig. 3.in addition, Fig. 2 The system configuration concept diagram uses the same markings as the system configuration diagram in Patent Document 1, which is prior art. Fig. 3 Yes Fig. 1 The diagram shows close-ups and labels of branches and connections in the system structure diagram.
[0030] The oxygen-hydrogen bath system 10 of this embodiment includes: a chamber 11 that accommodates a whole human body (not shown); a gas supply unit 12 that supplies air into the chamber 11 and makes the internal pressure higher than atmospheric pressure; a hydrogen supply unit 13 that supplies hydrogen into the chamber 11; a gas exhaust unit 15 that exhausts air and hydrogen from the chamber 11; a Y-type A connector 42 and a Y-type B connector 44 located midway in the pipeline connecting the gas supply unit 12 and the chamber 11; a pressure reducer 40 located midway in the pipeline connecting the gas supply unit 12 and the gas exhaust unit 15; a T-connector 46 located at the point where the pipe extending from the pressure reducer 40 connects to the gas exhaust unit 15; a measuring unit 16 that measures the environment inside the chamber; and a control unit 17 that controls the environment inside the chamber.
[0031] The system concept diagram representing the present invention will be shown. Fig. 3 Compared with system concept diagrams representing existing technologies Fig. 3 A comparison reveals that, in the system of the present invention, the Y-type A connector 42, the Y-type B connector 44, the pressure reducer 40, and the T-type connector 46 are respectively disposed in... Fig. 5 The parts shown, they are through Fig. 6 The straight lines in the diagram connect the pipes, which are made of the same material as the pipes used in the prior art (the outer diameter and wall thickness of each pipe are described below).
[0032] The compartment 11 is constructed of cylindrical metal components such as aluminum or stainless steel, and is non-ventilated, non-moisture-permeable, and strong enough to withstand air pressure of at least 1.4 atmospheres. An opening 11a for personnel to enter and exit is provided on the side of the compartment 11, and a closing part 18 for sealing the opening 11a is also provided. Furthermore, a gas supply port 20 connected to a gas supply unit 12 is provided on the side of the compartment 11.
[0033] The gas supply unit 12 includes a compressor 22 and an air supply pipe (gas supply pipe) 23. The compressor 22 is used to pressurize air (oxygen-containing air) to a pressure higher than atmospheric pressure and deliver it into the compartment 11. The gas supply unit 12 may also include an air pressure regulating valve for adjusting the air supply pressure. Alternatively, instead of the compressor 22, a pressure vessel (not shown) may be provided to pressurize air at a pressure higher than atmospheric pressure.
[0034] Here, the compressed air (oxygen-containing air) from compressor 22 flows toward chamber 11 within air supply pipe 23. However, a Y-shaped A connector 44 and a Y-shaped B connector 42 are inserted midway through this flow path. The Y-shaped A connector 44 allows the flow from one flow path to flow out through two equally divided flow paths. The Y-shaped B connector 42 allows the flow of hydrogen from hydrogen generation unit 13 to merge with the flow of compressed air from compressor 22. The Y-shaped A connector 44 is a typical Y-shaped connector structure, with the outer diameter and wall thickness of the inlet pipe being the same as the outer diameter and wall thickness of the two outlet pipes. The Y-shaped A connector 44 is inserted into the path of the air supply pipe 23 through which the compressed air from compressor 22 passes, dividing the compressed air into equal halves, which then flow out of the branch pipes respectively. Furthermore, the Y-shaped B connector 42 is a typical Y-shaped connector structure, but here it is configured to merge two flow paths with different outer diameters and wall thicknesses into one flow path. Specifically, it is configured to allow air from a branch pipe branching off from the Y-shaped A connector 44 to merge with hydrogen from the hydrogen supply unit 13. The air and hydrogen mixture merges here and flows into the compartment 11 through the gas supply port 20.
[0035] The hydrogen supply unit 13 includes a hydrogen generator 25 that electrolyzes water to produce high-concentration hydrogen gas, a hydrogen supply valve 26 disposed between the hydrogen generator 25 and the compartment 11, and a hydrogen supply pipe 27 connecting them. This hydrogen supply pipe 27 merges with a branch pipe from a Y-shaped A-shaped connector at a Y-shaped B-joint. The hydrogen supply unit 13 may also include a hydrogen pressure regulating valve (not shown) for adjusting the hydrogen supply pressure. The front end of the hydrogen supply pipe 27 is outside the compartment 11, and it merges with a branch pipe from a Y-shaped A-shaped connector of the air supply pipe at a Y-shaped B-joint located midway through the air supply pipe 23. Alternatively, instead of the hydrogen generator 25, a pressure vessel (not shown) may be provided to pressurize hydrogen gas at a pressure higher than atmospheric pressure.
[0036] The gas exhaust unit 15 includes an exhaust valve 28 that discharges air and hydrogen introduced into the compartment 11 to the outside of the compartment 11. The control unit 17 operates the gas exhaust unit 15 to maintain the pressure inside the compartment 11 within a specified pressure range (i.e., above atmospheric pressure and below the usable pressure of the exhaust valve 28). The gas exhaust unit 15 may also include a safety valve (not shown) that automatically discharges internal gas when the pressure inside the compartment 11 reaches or exceeds the specified pressure.
[0037] The measuring unit 16 is connected to the control unit 17. The compartment 11 is connected to the control unit 17, and the measuring unit 16 is equipped with a pressure sensor 30 that measures the pressure inside the compartment 11.
[0038] The control unit 17 consists of a computer equipped with a CPU (not shown), memory, and display. Based on data from the pressure sensor 30, it controls the environment within the compartment 11. For example, it operates the compressor 22, the hydrogen generator 25, and the first solenoid valve 26 for hydrogen supply. Additionally, it operates the exhaust valve 28 to adjust the pressure within the compartment 11.
[0039] The entire system is controlled to ensure that the environment inside compartment 11 is such that, when the pressure inside compartment 11 and the hydrogen volume concentration inside compartment 11 reach a dynamic equilibrium, the pressure inside the compartment is preferably 1.10 atm or more and 1.35 atm or less, or 1.10 atm or more and less than the usable pressure of exhaust valve 28; the oxygen volume concentration inside compartment 11 is 20% or more and 30% or less; and the hydrogen volume concentration is less than the minimum value of the hydrogen explosion limit and is 1.0% to 2.0%.
[0040] Here, the hydrogen supply unit 13 supplies hydrogen to the compartment 11 only during the period when the gas supply unit 12 supplies air. Alternatively, the opening and closing operations of the compressor 22, hydrogen generator 25, and hydrogen supply valve 26 can be set to be manually operated, or the user can manually adjust various pressure controls while observing the various pressures displayed on the monitor.
[0041] Next, the function of the oxygen-hydrogen bath system 10 in this embodiment will be explained.
[0042] First, open the opening and closing part 18 of the compartment 11, and the user (not shown) enters the compartment 11 through the opening 11a.
[0043] After the opening and closing section 18 is closed, the entire system starts to operate according to the instructions of the control section 17. According to the instructions of the control section 17, the gas supply section 12 supplies air to the compartment 11, and the hydrogen supply section 13 supplies hydrogen to the compartment 11.
[0044] At this time, the control unit 17 appropriately controls the flow of air or hydrogen by operating the compressor 22 and the hydrogen generator 25 and hydrogen supply 26 on and off, based on data from the measurement unit 16, and controls the internal pressure by operating the exhaust valve, thereby bringing the environment inside the compartment 11 (especially the pressure and hydrogen volume concentration) into a dynamic equilibrium state within a desired time. Then, in this dynamic equilibrium state, the internal pressure of the compartment 11 is maintained at 1.10 atmospheres or more and 1.35 atmospheres or less, the oxygen volume concentration is maintained at 20% or more and 30% or less, and the hydrogen volume concentration is preferably maintained at 1.0% or more and 2.0% or less.
[0045] In this invention, maintaining the environment within the compartment 11 in a dynamic equilibrium state is a key aspect. The user (not shown) remains in this dynamic equilibrium environment within the compartment 11 for a predetermined duration. After this predetermined time, the hydrogen supply unit 13 stops supplying hydrogen to the compartment 11, and then the gas supply unit 12 stops supplying air to the compartment 11.
[0046] According to the oxygen-hydrogen bath system 10, such as Fig. 6 (The current state of the technology) and As shown in the present invention, the hydrogen volume concentration in chamber 11 can reach a higher value than that achievable by the prior art in a shorter time than in the prior art. Furthermore, according to the piping structure within the system, although the same hydrogen generator as that used in the prior art is used, the final value reached can be nearly twice that of the prior art, and it is expected to be able to efficiently enter the human body in a short time.
[0047] In addition, by increasing the oxygen concentration in oxygen-containing gas, it is possible to expose the human body to a high-pressure and high-concentration oxygen atmosphere where the oxygen concentration is higher than that in the atmosphere (about 21%), thus raising the oxygen concentration above atmospheric pressure. It is expected that more oxygen will enter the human body as dissolved oxygen.
[0048] In particular, since the hydrogen supply unit 13 supplies hydrogen to the compartment 11 during the period when the gas supply unit 12 supplies air to the compartment 11, it is able to better suppress the state of excessive hydrogen in the compartment 11.
[0049] In addition, the gas supply unit 12, hydrogen supply unit 13 and gas exhaust unit 15 can be used to control the volume concentration of hydrogen in the compartment 11 to be less than the minimum value of the hydrogen explosion limit, so as to better suppress the dangerous environment in the compartment 11 such as a hydrogen explosion.
[0050] (Example)
[0051] The graph showing the time variation of hydrogen concentration in the cabin was obtained under the following conditions. Furthermore, the wall thickness of the following pipes with an outer diameter of φ10mm is 1.75mm, the wall thickness of the pipes with an outer diameter of φ6mm is 1mm, and the wall thickness of the pipes with an outer diameter of φ12mm is 2mm.
[0052] 1) The Y-shaped A connector is configured for branching.
[0053] 2) The outer diameter of the pipe connected to the inlet side of the Y-type A connector is φ10mm, and the outer diameters of the two pipes connected to the outlet side of the Y-type A connector are φ10mm respectively.
[0054] 3) The Y-type B connector is configured for merging. Of the two pipes connected to the inlet side of the Y-type B connector, the outer diameter of the pipe for air (oxygen-containing air) is φ10mm and the outer diameter of the pipe for hydrogen is φ6mm. The outer diameter of the pipe connected to the outlet side of the Y-type B connector is φ10mm.
[0055] 4) A pressure reducer is a device that expands the outer diameter of a φ10mm pipe on the inflow side to an outer diameter of φ12mm.
[0056] 5) The T-joint is configured to change the flow direction and connects the outer diameter φ12mm pipe extending from the above-mentioned pressure reducer to the middle of the outer diameter φ12mm exhaust line from the compartment.
[0057] 6) The compressor operates at a discharge capacity of 200 liters per minute, and the hydrogen generator operates at a capacity of 500 cc of 100% pure hydrogen per minute at room temperature.
[0058] 7) When operating under the above conditions, the hydrogen volume concentration at the outlet of the Y-type B connector is approximately 3%.
[0059] 8) In addition, in the case of existing types of systems that have the same Y-type B connector but not the Y-type A connector, pressure reducer and T connector, the hydrogen volume concentration at the outlet of the Y-type B connector is about 1% when using the same compressor and the same hydrogen generator.
[0060] Furthermore, the scope of protection of this invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of this invention. For example, the gas supply unit 12 is configured to supply air into the compartment 11, but it is not limited to air; any gas containing oxygen at a prescribed concentration and safe for human use is acceptable, and other gases may also be used. Additionally, there are no restrictions on the spatial arrangement of the constituent elements; for example, a structure in which the hydrogen supply port is located below the compartment is also included within the scope of this invention.
[0061] Alternatively, the measuring unit 16 may also be equipped with an oxygen concentration sensor and a hydrogen concentration sensor. In this case, the oxygen concentration and hydrogen concentration inside the compartment 11 can be measured in real time.
[0062] Furthermore, the hydrogen supply pipe 27 of the hydrogen supply unit 13 is configured to connect to the air supply pipe 23, but it is not limited to this; alternatively, a separate hydrogen supply port could be provided in the cabin, supplying hydrogen separately from the air. Additionally, the hydrogen supply pipe could extend from the hydrogen supply port to near the user's face after the user enters the cabin. This allows for more efficient hydrogen intake.
[0063] Alternatively, the opening and closing part can also be a sliding type. Moreover, since the pressure inside the compartment 11 becomes above atmospheric pressure during use, a structure that slides on the inner surface of the compartment is more preferable.
[0064] Explanation of reference numerals in the attached figures
[0065] 10. Oxygen-hydrogen bath system; 11. Compartment; 12. Gas supply unit; 13. Hydrogen supply unit; 15. Gas exhaust unit; 20. Gas supply port; 23. Air supply pipe; 27. Hydrogen supply pipe; 28. Exhaust valve; 40. Pressure reducer; 42. Y-type B connector; 44. Y-type A connector; 46. T-type connector.
Claims
1. An oxygen-hydrogen bath system, comprising: a chamber having a gas supply port through which a gas is introduced, the chamber being capable of accommodating an entire human body; a gas supply unit having a gas supply tube connected to the gas supply port, the gas supply unit supplying an oxygen-containing gas into the chamber through the gas supply tube and making the pressure inside the chamber higher than the atmospheric pressure; a hydrogen supply unit having a hydrogen gas generator and a hydrogen supply tube connected to the gas supply tube via a Y-shaped A joint, the hydrogen supply unit supplying hydrogen gas from the hydrogen gas generator into the chamber through the hydrogen supply tube; and a gas discharge unit communicating with the chamber, the gas discharge unit having a safety valve or a valve that maintains the chamber at a prescribed pressure range by opening and closing operation, the gas and the hydrogen being discharged from the chamber through the valve, wherein the gas supply tube of the gas supply unit has a Y-shaped B joint that bisects the flow path of the gas from the gas supply unit at a position closer to the gas supply unit than the position of the Y-shaped A joint, one branch tube A extending from the Y-shaped B joint is connected to the gas supply port after merging with the hydrogen supply tube at the Y-shaped A joint, and the other branch tube B is connected to the gas discharge unit via a T-shaped joint after extending via a pressure reducer.
2. The oxygen-hydrogen bath system according to claim 1, wherein the pressure inside the chamber is maintained at 1.1 to 1.35 atm by the valve, and the volume concentration of the hydrogen gas inside the chamber is maintained at 1.0 to 2.0 vol%.
3. The oxygen-hydrogen bath system according to claim 1 or 2, wherein the hydrogen supply unit supplies the hydrogen gas into the chamber during the period in which the gas supply unit supplies the gas into the chamber.
Citation Information
Patent Citations
Discriminating method of drawing mode
JP1986033526A