Laser imaging exposure machine

Abstract

The invention discloses a laser imaging exposure machine, and belongs to the technical field of laser imaging exposure machines, the laser imaging exposure machine comprises a laser imaging exposure machine body, a first fixing plate and a second fixing plate, the first fixing plate and the second fixing plate are respectively arranged at two ends of the laser imaging exposure machine body, the first fixing plate is provided with a loosening assembly, and the second fixing plate is provided with a clamping assembly. A winding assembly is mounted on the second fixing plate, and the flexible base material is loosened by the loosening assembly, exposed by the laser imaging exposure machine body and stored by the winding assembly; through the design of the arc-shaped plate and the adjusting plate, the tensioning wheel is matched, the curved surface of the flexible base material can be attached in a self-adaptive mode, the curved surface of the flexible base material is cleaned, when the tensioning wheel adjusts the tightness degree of the flexible base material, the adjusting plate can adjust the position so as to be matched with the adjusted curved surface of the flexible base material, and the cleaning effect is better provided.

Description

Technical Field

[0001] This invention belongs to the field of laser imaging exposure machine technology, and particularly relates to a laser imaging exposure machine. Background Technology

[0002] Laser imaging exposure machines utilize direct laser imaging technology. The desired lithographic pattern is input into a digital micromirror device (DMD) chip via a computer. The rotation angle of the micromirrors in the DMD chip is adjusted based on the distribution of black and white pixels in the image. A collimated light source then illuminates the DMD chip, forming a light image consistent with the desired pattern, which is projected onto the substrate surface. Large-area microstructure fabrication is achieved by controlling the movement of the sample stage. Laser imaging exposure machines can expose rolled COF substrates, but require a suitable roll-to-roll transport and positioning structure. Existing laser imaging exposure machines have the following drawbacks when processing rolled flexible substrates: the flexible substrate is soft and prone to wrinkles and warping during unwinding and transport, leading to pattern deviation and uneven linewidth; traditional unwinding and rewinding components have low tension adjustment accuracy, and the substrate is easily stretched or loosened due to excessive tension, affecting exposure positioning accuracy; moreover, the surface of flexible substrates easily attracts dust and debris, and direct exposure can lead to circuit defects, but existing equipment lacks integrated online cleaning functions. Summary of the Invention

[0003] In view of the above situation and to overcome the defects of the prior art, the present invention provides a laser imaging exposure machine, which at least partially solves the problems mentioned in the background art.

[0004] The technical solution adopted in this invention is as follows: A laser imaging exposure machine includes a laser imaging exposure machine body, a first fixing plate and a second fixing plate. The first fixing plate and the second fixing plate are respectively disposed at both ends of the laser imaging exposure machine body. A relaxation component is installed on the first fixing plate and a winding component is installed on the second fixing plate. After the flexible substrate is relaxed by the relaxation component, it is exposed by the laser imaging exposure machine body and then collected by the winding component.

[0005] Preferably, the relaxation assembly and the winding assembly have the same structure. Only one set will be described here. The relaxation assembly includes a sliding plate, which is movably engaged with a first fixed plate. The sliding plate has a second sliding groove and a fixed groove. There are two sets of fixed grooves, which are respectively located at both ends of the second sliding groove. A connecting plate is movably engaged in the second sliding groove. An arc-shaped plate is installed on the upper wall of the connecting plate. Adjusting plates are movably installed at both ends of the arc-shaped plate. A tensioning wheel is also movably installed on the upper wall of the sliding plate.

[0006] The upper and lower walls of the arc-shaped plate are symmetrically equipped with insert rods. The adjusting plate is movably installed on both ends of the arc-shaped plate via the insert rods. Both the arc-shaped plate and the adjusting plate have hollow chamber designs inside. Ventilation holes for gas flow are opened on the side walls of both the arc-shaped plate and the adjusting plate. The ventilation holes are connected to the hollow chambers. A vent pipe is installed between the upper walls of the arc-shaped plate and the upper walls of the adjusting plate, so that the gas in the arc-shaped plate can enter the adjusting plate through the vent pipe.

[0007] Furthermore, the connecting plate is provided with fixing holes, which are respectively located at the upper end of the fixing groove. A fixing clip is movably installed in the fixing groove, and a threaded rod is installed at the upper end of the fixing clip. The threaded rod movably passes through the fixing hole. The bottom wall of the middle part of the connecting plate is movably engaged in the second sliding groove. The connecting plate can be adjusted in position along the second sliding groove and the fixing groove. After the position is adjusted, the nut is screwed onto the threaded rod to fix the connecting plate and the arc plate.

[0008] The first fixing plate and the second fixing plate have the same structure. The first fixing plate is provided with a first sliding groove, and the sliding plate is movably engaged in the first sliding groove.

[0009] Preferably, the first fixed plate is further equipped with a first hydraulic rod and an air pump. The movable end of the first hydraulic rod is connected to the side wall of the sliding plate. The operation of the first hydraulic rod can push the sliding plate to move along the first sliding groove. The first fixed plate is also movably equipped with an unwinding wheel and an intermediate wheel. A roll of flexible substrate to be exposed is placed on the unwinding wheel. The flexible substrate is movably placed on the tensioning wheel and the intermediate wheel in sequence and then enters the laser imaging exposure machine for exposure processing. The air pump is equipped with a connecting pipe, which is connected to the inner cavity of the arc plate. The operation of the air pump can deliver gas to the inner cavity of the arc plate through the connecting pipe. The gas in the arc plate enters the inner cavity of the adjustment plate through the vent pipe and is discharged through the vent hole to clean the surface of the flexible substrate.

[0010] The laser imaging exposure machine includes a housing, inside which an exposure device, a fixed platform, and a fixing component are installed. The fixed platform has an adsorption hole, which, when connected to a vacuum machine, allows gas from the fixed platform to be extracted through the adsorption hole for adsorption-type fixing of the flexible substrate.

[0011] Preferably, the fixing assembly is provided in two sets, respectively located on both sides of the exposure device. The fixing assembly includes a second hydraulic rod, a mounting plate, a lower pressure plate, and a flat plate. The flat plate and the mounting plate are mounted on the side wall of the housing. The fixed end of the second hydraulic rod is located on the mounting plate. The lower pressure plate is connected to the movable end of the second hydraulic rod and is located at the upper end of the flat plate. The flexible substrate is located between the lower pressure plate and the flat plate and moves against the upper wall of the flat plate. When the flexible substrate needs to be exposed, the second hydraulic rod works to push the lower pressure plate downward, and the lower pressure plate initially fixes the flexible substrate at the upper end of the flat plate.

[0012] The beneficial effects of the present invention after adopting the above structure are as follows: Through the design of the arc plate and adjustment plate, together with the tensioning wheel, it can adaptively fit the curved surface of the flexible substrate and clean the curved surface of the flexible substrate. When the tensioning wheel adjusts the tightness of the flexible substrate, the adjustment plate can adjust its position to adapt to the curved surface of the adjusted flexible substrate, thus providing a better cleaning effect.

[0013] The first hydraulic rod drives the sliding plate to move along the first slide groove, which can precisely adjust the tension of the substrate. In conjunction with the synchronous linkage of the unwinding assembly and the winding assembly, it can achieve constant tension continuous conveying of the rolled substrate, avoiding stretching or loosening.

[0014] The air pump supplies air to the hollow chambers of the arc plate and adjustment plate through the connecting pipe, and then discharges it through the vent. This can simultaneously clean the surface dust and debris during the substrate transportation process, reducing line defects caused by impurities. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof.

[0016] Figure 1 This is a schematic diagram of the structure of a laser imaging exposure machine proposed in this invention; Figure 2 This is a schematic diagram of the structure of the first fixing plate and the unwinding assembly proposed in this invention; Figure 3 for Figure 2 A magnified view of a portion at point A; Figure 4 This is a diagram showing the connection relationship between the arc-shaped plate and the adjustment plate proposed in this invention.

[0017] In the attached drawings: 1. Laser imaging exposure machine body; 2. First fixed plate; 3. Second fixed plate; 4. Relaxation assembly; 5. Rewinding assembly; 6. Sliding plate; 7. Second slide groove; 8. Fixed groove; 9. Connecting plate; 10. Arc plate; 11. Adjusting plate; 12. Tensioning wheel; 13. Insert rod; 14. Air pipe; 15. Fixing hole; 16. Fixing clip; 17. Threaded rod; 18. First slide groove; 19. First hydraulic rod; 20. Air pump; 21. Unwinding wheel; 22. Intermediate wheel; 23. Flexible substrate; 24. Connecting pipe; 25. Housing; 26. Exposure device; 27. Fixed table; 28. Second hydraulic rod; 29. ​​Mounting plate; 30. Lower pressure plate; 31. Flat plate. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0019] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0020] like Figures 1-4 As shown, a laser imaging exposure machine includes a laser imaging exposure machine body 1, a first fixing plate 2, and a second fixing plate 3. The first fixing plate 2 and the second fixing plate 3 are respectively disposed at both ends of the laser imaging exposure machine body 1. A relaxation component 4 is installed on the first fixing plate 2, and a winding component 5 is installed on the second fixing plate 3. After the flexible substrate 23 is relaxed by the relaxation component 4 and exposed by the laser imaging exposure machine body 1, it is collected by the winding component 5.

[0021] The relaxation assembly 4 and the winding assembly 5 have the same structure, and only one of them will be described here. The relaxation assembly 4 includes a sliding plate 6, which is movably engaged with the first fixed plate 2. The sliding plate 6 has a second sliding groove 7 and a fixed groove 8. There are two sets of fixed grooves 8, which are respectively located at both ends of the second sliding groove 7. A connecting plate 9 is movably engaged in the second sliding groove 7. An arc-shaped plate 10 is installed on the upper wall of the connecting plate 9. Adjusting plates 11 are movably installed at both ends of the arc-shaped plate 10. A tensioning wheel 12 is also movably installed on the upper wall of the sliding plate 6.

[0022] The upper and lower walls of the arc-shaped plate 10 are symmetrically equipped with insert rods 13. The adjustment plate 11 is movably installed on both ends of the arc-shaped plate 10 via the insert rods 13. Both the arc-shaped plate 10 and the adjustment plate 11 have hollow chamber designs inside. The side walls of both the arc-shaped plate 10 and the adjustment plate have ventilation holes for gas flow. The ventilation holes are connected to the hollow chambers. A vent pipe 14 is installed between the upper wall of the arc-shaped plate 10 and the upper wall of the adjustment plate 11, so that the gas in the arc-shaped plate 10 can enter the adjustment plate 11 through the vent pipe 14.

[0023] The connecting plate 9 has fixing holes 15, which are respectively located at the upper end of the fixing groove 8. A fixing clip 16 is movably installed in the fixing groove 8. A threaded rod 17 is installed at the upper end of the fixing clip 16. The threaded rod 17 is movably installed through the fixing hole 15. The bottom wall of the middle part of the connecting plate 9 is movably engaged in the second sliding groove 7. The connecting plate 9 can be adjusted along the second sliding groove 7 and the fixing groove 8. After the position is adjusted, the nut is screwed onto the threaded rod 17 to fix the connecting plate 9 and the arc plate 10.

[0024] The first fixing plate 2 and the second fixing plate 3 have the same structure. The first fixing plate 2 has a first sliding groove 18, and the sliding plate 6 is movably engaged in the first sliding groove 18.

[0025] The first fixed plate 2 is also equipped with a first hydraulic rod 19 and an air pump 20. The movable end of the first hydraulic rod 19 is connected to the side wall of the sliding plate 6. The operation of the first hydraulic rod 19 can push the sliding plate 6 to move along the first sliding groove 18. The first fixed plate 2 is also movably equipped with an unwinding wheel 21 and an intermediate wheel 22. The unwinding wheel 21 holds a roll of flexible substrate 23 that needs to be exposed. The flexible substrate 23 is movably positioned on the tensioning wheel 12 and the intermediate wheel 22 in sequence and then enters the laser imaging exposure machine for exposure processing. The air pump 20 is equipped with a connecting pipe 24. The connecting pipe 24 is connected to the inner cavity of the arc plate 10. The operation of the air pump 20 can deliver gas to the inner cavity of the arc plate 10 through the connecting pipe 24. The gas in the arc plate 10 enters the inner cavity of the adjusting plate 11 through the vent pipe 14 and is discharged through the vent hole to clean the surface of the flexible substrate 23.

[0026] The laser imaging exposure machine includes a housing 25, in which an exposure device 26, a fixed platform 27, and a fixing component are installed. The fixed platform 27 has an adsorption hole. By connecting to a vacuum machine, the gas on the fixed platform 27 can be extracted through the adsorption hole to adsorb and fix the flexible substrate.

[0027] The fixing components are provided in two sets, respectively located on both sides of the exposure device 26. The fixing components include a second hydraulic rod 28, a mounting plate 29, a lower pressure plate 30, and a flat plate 31. The flat plate 31 and the mounting plate 29 are mounted on the side wall of the housing 25. The fixed end of the second hydraulic rod 28 is located on the mounting plate 29. The lower pressure plate 30 is connected to the movable end of the second hydraulic rod 28. The lower pressure plate 30 is located at the upper end of the flat plate 31. The flexible substrate 23 is located between the lower pressure plate 30 and the flat plate 31 and moves against the upper wall of the flat plate 31. When the flexible substrate 23 needs to be exposed, the second hydraulic rod 28 works to push the lower pressure plate 30 downward, and the lower pressure plate 30 initially fixes the flexible substrate 23 at the upper end of the flat plate 31.

[0028] The specific usage is as follows: The rolled flexible substrate 23 is installed on the unwinding roller 21. The substrate passes sequentially around the tensioning roller 12 and the intermediate roller 22. The first hydraulic rod 19 pushes the sliding plate 6 to move along the first sliding groove 18. The position of the tensioning roller 12 is adjusted to keep the substrate under stable tension. The position of the adjusting plate 11 is adjusted to fit the curved surface of the adjusted flexible substrate 23. The air pump 20 is started, and the gas enters the hollow cavity between the arc plate 10 and the adjusting plate 11 through the connecting pipe 24 and is discharged through the vent hole to clean the surface of the substrate online.

[0029] The cleaned flexible substrate 23 is continuously conveyed as the unwinding wheel 21 rotates and enters the housing 25 of the laser imaging exposure machine, where it moves against the upper wall of the flat plate 31. When the substrate reaches the exposure area, the second hydraulic rod 28 pushes the lower pressure plate 30 to move down, initially fixing the substrate on the flat plate 31, and the unwinding assembly and the winding assembly 5 stop moving.

[0030] The vacuum machine on the fixed platform 27 is started, and the gas is extracted through the adsorption hole to tightly adsorb the substrate onto the fixed platform 27 to ensure the flatness of the exposure area; the exposure device 26 is started to perform laser imaging exposure on the substrate according to the preset pattern.

[0031] After exposure is completed, the lower pressure plate 30 moves upward and the vacuum adsorption stops. The substrate continues to be conveyed by the traction of the winding assembly 5. The winding assembly 5 collects the exposed substrate at a speed matched with the unwinding assembly, while new unexposed substrates enter the exposure area, realizing continuous cycle processing.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents. In conclusion, if those skilled in the art, inspired by this description, design similar structural methods and embodiments without departing from the inventive spirit of the invention, such designs should fall within the protection scope of the present invention.

Claims

1. A laser imaging exposure machine, characterized in that, The device includes a laser imaging exposure machine body, a first fixed plate, and a second fixed plate. The first fixed plate and the second fixed plate are respectively located at both ends of the laser imaging exposure machine body. A relaxation component is installed on the first fixed plate, and a winding component is installed on the second fixed plate. After the flexible substrate is relaxed by the relaxation component, it is exposed by the laser imaging exposure machine body and then collected by the winding component.

2. The laser imaging exposure machine according to claim 1, characterized in that, The relaxation component includes a sliding plate, which is movably engaged with a first fixed plate. The sliding plate has a second sliding groove and a fixed groove. There are two sets of fixed grooves, which are respectively located at both ends of the second sliding groove. A connecting plate is movably engaged in the second sliding groove. An arc-shaped plate is installed on the upper wall of the connecting plate. Adjustment plates are movably installed at both ends of the arc-shaped plate. A tensioning wheel is also movably installed on the upper wall of the sliding plate.

3. A laser imaging exposure machine according to claim 2, characterized in that, The upper and lower walls of the arc-shaped plate are symmetrically equipped with insert rods. The adjusting plate is movably installed on both ends of the arc-shaped plate via the insert rods. Both the arc-shaped plate and the adjusting plate have hollow chamber designs inside. Ventilation holes for gas flow are opened on the side walls of both the arc-shaped plate and the adjusting plate. The ventilation holes are connected to the hollow chambers. A vent pipe is installed between the upper walls of the arc-shaped plate and the upper walls of the adjusting plate, so that the gas inside the arc-shaped plate can enter the adjusting plate through the vent pipe.

4. A laser imaging exposure machine according to claim 3, characterized in that, The connecting plate has fixing holes, which are respectively located at the upper end of the fixing groove. Fixing clips are movably installed in the fixing groove. A threaded rod is installed at the upper end of the fixing clip. The threaded rod movably passes through the fixing hole. The bottom wall of the middle part of the connecting plate is movably engaged in the second sliding groove.

5. A laser imaging exposure machine according to claim 4, characterized in that, The first fixed plate has a first sliding groove, and the sliding plate is movably engaged in the first sliding groove.

6. A laser imaging exposure machine according to claim 5, characterized in that, The first fixed plate is also equipped with a first hydraulic rod and an air pump. The movable end of the first hydraulic rod is connected to the side wall of the sliding plate. The first fixed plate is also movably equipped with an unwinding wheel and an intermediate wheel. A roll of flexible substrate to be exposed is placed on the unwinding wheel. The flexible substrate is movably positioned on the tensioning wheel and the intermediate wheel in sequence and then enters the laser imaging exposure machine for exposure processing. A connecting pipe is installed on the air pump, and the connecting pipe is connected to the inner cavity of the arc plate.

7. A laser imaging exposure machine according to claim 6, characterized in that, The laser imaging exposure machine includes a housing, inside which an exposure device, a fixed platform, and a fixing component are installed. The fixed platform has suction holes.

8. A laser imaging exposure machine according to claim 7, characterized in that, The fixing assembly is provided in two sets, respectively located on both sides of the exposure device. The fixing assembly includes a second hydraulic rod, a mounting plate, a lower pressure plate, and a flat plate. The flat plate and the mounting plate are mounted on the side wall of the housing. The fixed end of the second hydraulic rod is located on the mounting plate. The lower pressure plate is connected to the movable end of the second hydraulic rod and is located at the upper end of the flat plate.

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