Superconducting nanowire detector and superconducting nanowire time-resolved single-photon spectrometer

Abstract

The invention discloses a superconducting nanowire detector and a superconducting nanowire time-resolved single-photon spectrometer. The superconducting nanowire detector comprises a light response unit adopting a 1 * N discrete linear array structure, adjacent single detection units are spaced through delay lines, the delay lines on the two sides of the light response unit are connected with electrodes through gradient line units, and the gradient line units are arranged at the edge of the light response unit. Similar structure units which are in mirror symmetry with the gradual change line units are arranged on the two sides of the gradual change line units. The spectrometer comprises a displacement table, an optical fiber, an optical fiber focus lens, a diffraction grating, a focusing lens, the superconducting nanowire detector and a reading circuit. According to the detector, the current crowding effect can be avoided, the improvement of critical current and the reduction of dark count are realized, and the formation of an ultra-large-area superconducting nanowire linear array layout is facilitated. The spectrograph calibrates a spectrum through position mapping, wavelength information of incident light can be obtained only by measuring time difference, and the time resolution capability is achieved.

Description

Technical Field

[0001] This invention belongs to the field of superconducting single-photon detection technology, specifically relating to a superconducting nanowire detector and a superconducting nanowire time-resolved single-photon spectrometer. Background Technology

[0002] Traditional spectrometers rely on the principles of dispersion or interference to analyze the wavelength of incident light, and can be divided into dispersive spectrometers and Fourier transform spectrometers. The core principle of a dispersive spectrometer is to use dispersive elements such as prisms or gratings to disperse the incident light according to wavelength space. A typical setup includes components such as an entrance slit, collimating mirror, dispersive elements, focusing mirror, and detector array. Fourier transform spectrometers are based on the principle of interferometry, acquiring interferograms by scanning the moving mirror of a Michelson interferometer, and then obtaining spectral information through Fourier transform. Both dispersive and interferometric traditional spectrometers are limited by the readout noise and dark count of semiconductor detectors, making them unsuitable for weak light detection.

[0003] In quantum optics research, the light intensity of quantum light sources is often on the order of single photons. Measuring such light sources requires not only high sensitivity but also the preservation of quantum state properties. Traditional spectroscopic measurement processes can destroy quantum coherence, leading to information loss. Furthermore, special applications such as quantum correlation measurements require spectrometers to have time correlation analysis capabilities.

[0004] Time-resolved spectroscopy is an important direction in modern photonics research. It reveals rich information about dynamic physical, chemical, or biological processes by analyzing the temporal and spectral characteristics of light signals. Compared to traditional spectroscopic techniques, time-resolved single-photon spectrometers not only measure the wavelength distribution of photons but also record their arrival times and temporal correlation characteristics. Time-resolved spectroscopy is widely used in fields such as fluorescence lifetime imaging and quantum correlation measurements.

[0005] This demonstrates the enormous demand and development potential for single-photon spectrometers with time-resolved capabilities. Currently, the number of single-photon spectrometers on the market is relatively small, primarily due to the lack of highly sensitive single-photon detector arrays.

[0006] Superconducting nanowires, as a type of single-photon detector, outperform other single-photon detection technologies in several key indicators, such as detection efficiency, dark count, time jitter, and recovery time. In recent years, superconducting nanowire detectors have been increasingly used in the fabrication of highly sensitive single-photon spectrometers.

[0007] In Risheng Cheng's 2019 paper, "Broadband on-chip single-photon spectrometer," an on-chip single-photon spectrometer was successfully fabricated by integrating a dispersive echelle grating and a superconducting nanowire detector array on a single chip. This study covered a wide wavelength range of 600 nm to 2000 nm, but the highest resolution reached was only 2.5 nm. This limitation is attributed to the constraints of the on-chip dispersive echelle grating size and the number of detector channels.

[0008] In Wladick Hartmann's 2020 paper, "Broadband Spectrometer with Single-PhotonSensitivity Exploiting Tailored Disorder," a broadband on-chip spectrometer was fabricated using disordered light scattering. The results showed that the resolution of the spectrometer based on disordered scattering is dependent on the incident wavelength, with a resolution of only 4 nm in the communication band. This problem arises because the scattering power of incident light gradually decreases with increasing wavelength.

[0009] In Ling-Dong Kong's 2021 paper, "An optics-free computational spectrometer using a broadband and tunable dynamic detector," a computational spectrometer without optical components was successfully fabricated by studying the nonlinear relationship between the quantum efficiency of a superconducting nanowire detector and the bias current and incident light wavelength. This spectrometer achieved a broadband spectral response of 660 nm–1900 nm, but its spectral resolution in the communication band was only 6 nm. This limitation stems from the uncertainty of the response matrix and the accuracy of the reconstruction algorithm. Summary of the Invention

[0010] To address the aforementioned problems in the prior art, this invention provides a superconducting nanowire detector and a superconducting nanowire time-resolved single-photon spectrometer.

[0011] To achieve the above objectives, the present invention provides the following technical solution:

[0012] This invention provides a superconducting nanowire detector, including a light-response unit located in the middle. The light-response unit includes a detector array with a 1×N discrete linear array structure. The detector array contains N individual detector units, and adjacent individual detector units are separated by delay lines. The delay lines on both sides of the light-response unit along the arrangement direction of the detector array are connected to electrodes through gradient line units. At the edge of the light-response unit, similar structural units are arranged on both sides of the gradient line units along the extension direction of the individual detector units. The similar structural units are mirror-symmetrical to the gradient line units at the edge of the light-response unit.

[0013] Furthermore, the superconducting nanowire detector adopts a microwave transmission line structure, and the layout of the superconducting nanowire detector is covered with a SiO2 layer and a gold reflector layer.

[0014] Furthermore, adjacent delay lines are connected end to end in an S-shape.

[0015] Furthermore, the method for realizing a high temporal resolution single-photon spectrometer based on the superconducting nanowire detector includes:

[0016] Step 1: The laser is focused onto the superconducting nanowire detector by a diffraction grating, and the detector responds to the photon;

[0017] Step 2: Based on the arrival times of the left and right pulses at both ends of the nanowire , Through formula Solve for the photon absorption position ,in The speed at which electrical signals travel in nanowires;

[0018] Step 3: Refraction angle of the diffraction grating With incident wavelength satisfy ,in Angle of incidence The grating constant is used to establish the incident wavelength. and photon absorption position Based on the results obtained in step 2, the mapping matrix is ​​used to obtain the wavelength-position curve.

[0019] Step 4: Perform the above processing on each pair of left and right pulses to obtain a curve of photon number versus wavelength. Based on the relationship between photon number and energy, obtain a curve of energy versus wavelength.

[0020] Step 5: From the formula Obtain the photon arrival time ,in The geometric length of the nanowire is used to obtain a wavelength-photon arrival time curve, which is used to describe the time variation of the spectrum and realize a single-photon spectrometer with high time resolution.

[0021] Furthermore, the resolution variation law and potential improvement space of the superdetector under different sampling conditions are verified through an oversampling resolution simulation algorithm. This algorithm is based on the array geometry and determines the total array length. Pixel width Under these conditions, by changing the number of pixels And based on the relation Calculate the corresponding pixel spacing This allows the total array length to remain constant, thereby adjusting the sampling rate. The algorithm distinguishes the impact of sampling geometric constraints and optical focusing constraints on system performance, verifying that the current resolution is mainly limited by optical conditions, while the array sampling capability still has room for improvement. This provides a quantitative evaluation basis and simulation verification method for subsequent structural optimization and system design.

[0022] Furthermore, the algorithm includes the following steps:

[0023] Step 1: Set the detector array structure parameters and generate a Gaussian spectral signal with adjacent bimodal characteristics as the input sample;

[0024] Step 2: Under the condition that the spot diameter remains unchanged, apply the given formula to the given... Calculate the corresponding pixel spacing And perform discrete sampling and reconstruction of spectral signals at different sampling rates;

[0025] Step 3: Extract reconstruction error and resolution index from the reconstructed spectrum to analyze the impact of changes in the number of sampling points on the system's resolution performance and to determine the performance saturation characteristics of the system after entering the oversampling region;

[0026] Step 4: While keeping the array sampling parameters constant, change the spot diameter of the optical system. Simulate the signal acquisition process under different focusing conditions;

[0027] Step 5: Sample and reconstruct the signal after changing the spot diameter, and calculate the resolution as the light spot diameter changes. The changing trend is used to assess the limitations of optical focusing on the overall resolution of the system.

[0028] The present invention also provides a superconducting nanowire time-resolved single-photon spectrometer, comprising a displacement stage, an optical fiber, an optical fiber focusing mirror, a diffraction grating, a focusing lens, the aforementioned superconducting nanowire detector, and a readout circuit; the optical fiber is connected to the optical fiber focusing mirror, the optical fiber focusing mirror, the diffraction grating, and the focusing lens are fixed on the displacement stage, the laser is focused on the superconducting nanowire detector, the displacement stage realizes the scanning of the light spot on the superconducting nanowire detector, and the signal after the superconducting nanowire detector responds is read out by the readout circuit.

[0029] Furthermore, the fiber focusing mirror, diffraction grating, and focusing lens are fixed on the displacement stage using a cage-like structure.

[0030] Compared with the prior art, the beneficial effects of the present invention are:

[0031] This invention, through optimized design of the superconducting nanowire detector mechanism, successfully avoids the current crowding effect, achieving an increase in critical current and a reduction in dark count. Typically, to prevent optical and electrical crosstalk between adjacent detection units, the delay line length is usually tens or even hundreds of times longer than the photoresponse unit. This results in a very large device layout area, making the nanowires highly susceptible to breakage during heating and cooling, increasing fabrication difficulty and shortening lifespan. This invention, by designing similar structures at the layout edges, reduces proximity effects, provides support, and lowers the likelihood of nanowire breakage, improving the yield of large-area superconducting nanowire devices and facilitating the formation of ultra-large-area superconducting nanowire linear arrays.

[0032] This invention provides a near-infrared single-photon spectral processing method based on a superconducting nanowire array and a spectrometer based thereon. The spectrum is calibrated by position mapping, and the wavelength information of the incident light can be obtained simply by measuring the time difference, with time resolution capability. The spectrometer of this invention achieves high-precision spectral resolution, up to 0.5 nm. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of an embodiment of a superconducting nanowire detector; where a is a complete layout schematic diagram; and b is an enlarged structural schematic diagram of the photoresponse unit.

[0034] Figure 2 This is a schematic diagram of a similar structural unit in a superconducting nanowire detector;

[0035] Figure 3 This is a cross-sectional view of the superconducting nanowire detector layout, used to show the SiO2 layer and gold mirror layer covering the layout where the superconducting nanowire detector is located.

[0036] Figure 4 This is a schematic diagram of an embodiment of a superconducting nanowire time-resolved single-photon spectrometer;

[0037] Figure 5 This is a bandwidth-response curve of the spectrometer obtained in the example.

[0038] The diagram is labeled as follows: 1. Photoresponse unit; 2. Delay line unit; 3. Similar structure unit; 4. Gradient line unit; 5. Gold mirror; 6. Single detector unit; 7. Single delay line. Detailed Implementation

[0039] The present invention will now be described in further detail with reference to the accompanying drawings.

[0040] This invention provides a superconducting nanowire detector, comprising a photoresponse unit 1 and gradient line units 4 connected to both sides of the photoresponse unit. The photoresponse unit 1 includes a detector array containing N individual detector units 6, the detector array employing a 1×N discrete linear array structure. Adjacent individual detector units 6 are separated by single delay lines 7, which are sequentially connected end-to-end in an S-shaped arrangement. The delay lines on both sides of the photoresponse unit 1 (along the direction of the detector array arrangement) are connected to electrodes via the gradient line units 4, as shown below. Figure 1 As shown. At the edge of the photoresponse unit 1, similar structural units 3 are arranged on both sides of the gradient line unit 4 (along the extension direction of a single detection unit). These similar structural units 3 are mirror images of the gradient line unit 4 at the edge of the photoresponse unit 1, as shown. Figure 2 As shown. Typically, to prevent optical and electrical crosstalk between adjacent detection units, the delay line length is usually tens or even hundreds of times longer than the photoresponse unit. This results in a very large device layout area, making the nanowires highly susceptible to breakage during heating and cooling, increasing fabrication difficulty and shortening lifespan. This invention, by designing similar structures at the layout edges, reduces proximity effects and provides support, lowering the likelihood of nanowire breakage and improving the yield of large-area superconducting nanowire devices. This is beneficial for forming ultra-large-area superconducting nanowire linear arrays.

[0041] The superconducting nanowire detector array used in this embodiment adopts a microwave transmission line structure, such as... Figure 3 As shown, the superconducting nanowire detector is covered with a SiO2 layer and a gold mirror layer. Specifically, the detector material is silicon tungstenide (WSix), the substrate is thermally oxidized silicon (SiOx), and the detection region is 5 μm wide and 420 μm long. The detector array is designed as a 1×512 discrete linear array, dividing the superconducting nanowire into photoresponse units and delay lines. The connection between the delay lines and the detector units is optimized through simulation to avoid current crowding effects, thereby increasing the device's critical current and reducing dark counts. Furthermore, this discrete structure also avoids optical and electrical crosstalk between adjacent detector units.

[0042] The materials, dimensions, pixel spacing, and number of pixels of the aforementioned superconducting nanowire detector array can be adjusted according to experimental needs. Furthermore, a single detector unit can be modified into a superconducting nanowire avalanche detector with more nanowires connected in parallel, which can further improve the signal-to-noise ratio of the output electrical pulse, but will also place higher demands on the fabrication process.

[0043] The method for achieving a high time resolution single-photon spectrometer based on the aforementioned superconducting nanowire detector is as follows:

[0044] Step 1: After the detector responds to the photon, read the left pulse ( Right pulse ( The arrival times of the left and right pulses and photons at both ends of the nanowire are related because the device is designed as a microwave transmission line structure. ) and photon absorption position ( The following relationship is satisfied:

[0045]

[0046]

[0047] in, The geometric length of the nanowire. The speed at which electrical signals travel through the nanowire is denoted as .

[0048] Step 2: Process the arrival times of the acquired left and right pulses, according to...

[0049]

[0050]

[0051] Inverse solution to determine the photon arrival time ( ) and photon absorption position ( ).

[0052] Step 3: Due to the refraction angle of the diffraction grating ( ) and incident wavelength ( )satisfy (in Angle of incidence (where is the grating constant) indicates that different wavelengths correspond to different angles of refraction, and the points where the light converges on the detector after passing through the focusing lens are also different, thus establishing the incident wavelength ( ). ) and photon absorption position ( The mapping matrix of ) can be obtained based on the results obtained in step 2, and the wavelength () can be obtained. )-Location( (The curve graph).

[0053] Step 4: Perform the above processing on each pair of left and right pulses to obtain the photon count ( )-wavelength( The curve of ) is used to obtain the energy (based on the relationship between photon number and energy). )-wavelength( (The curve graph).

[0054] Step 5: From the photon arrival time obtained in Step 2, the wavelength can be obtained ( - Photon arrival time ( The curve of the spectrum is used to describe the time change of the spectrum, thus realizing a single-photon spectrometer with high time resolution.

[0055] The resolution of this invention can be improved by incorporating subsequent algorithmic processing. For example, the resolution can be improved by statistically analyzing the times of all detected photons and then adding a time gate to filter out background noise interference. Alternatively, mature Gaussian fitting algorithms can be used to accurately fit the acquired light spot data, thereby improving the resolution of this invention.

[0056] Superconducting nanowire time-resolved single-photon spectrometer, such as Figure 4 As shown, the system includes a displacement stage (preferably a triaxial piezoelectric displacement stage in this embodiment), an optical fiber, a fiber focusing mirror, a diffraction grating (preferably a transmission diffraction grating in this embodiment), a focusing lens, the aforementioned superconducting nanowire detector, and a readout circuit. The optical fiber connects to the fiber focusing mirror, and a cage-like structure fixes the fiber focusing mirror, diffraction grating, and focusing lens onto the displacement stage. The laser is focused onto the superconducting nanowire detector, and the displacement stage scans the light spot on the detector. The signal from the superconducting nanowire detector is read out by the readout circuit.

[0057] Incident light is coupled from the laser to the focusing lens through an optical fiber. The focusing lens collimates the incident light into parallel light and then sends it into the transmission diffraction grating. Light of different wavelengths has different diffraction angles, so the light diffracted by the grating will converge at different positions of the detector linear array through the focusing lens, thereby establishing a mapping relationship between wavelength and position.

[0058] The transmissive diffraction grating in this embodiment can also be replaced with a refractive diffraction grating. However, the transmissive diffraction grating is easier to use, has less stray light interference, and does not require additional reflectors to change the optical path, thus simplifying the system structure.

[0059] The testing method for the spectrometer is as follows:

[0060] Step 1: Determine the incident angle of the center wavelength ( For a transmission diffraction grating, the optical path difference between the two slits satisfies ,(in Angle of incidence For the angle of refraction, Let (where is the grating constant) equal to the center wavelength ( ),and The center wavelength incident angle can then be obtained. Then, the installation angle of the diffraction grating is determined by manually rotating the stage.

[0061] Step 2: Fix the fiber focusing lens, transmission diffraction grating and focusing lens with a cage structure to ensure that the optical axes of the three are at the same height.

[0062] Step 3: Move the cage structure using a piezoelectric displacement stage to change the z-axis and determine the optimal operating point of the focusing lens.

[0063] Step 4: Turn on the laser, set the incident wavelength to the center wavelength, and use the displacement device to change the x-axis and y-axis so that the light spot is focused on the geometric center of the device.

[0064] Step 5: Apply a bias current to the device through the electrical input port. The device absorbs photons and generates left and right pulse pairs. Use an oscilloscope to collect the time difference between the left and right pulse pairs to obtain the relationship between the number of photons and the time difference. Establish the relationship between the incident wavelength and the arrival position of the photons and determine the time response range of the center wavelength.

[0065] Step 6: Modify the laser output wavelength, repeat step 5, and calibrate the device's spectral bandwidth and response curve, as shown below. Figure 5 As shown.

[0066] Step 7: Replace the laser with an unknown light source. As long as the input wavelength is within the spectral bandwidth, the input light wavelength information can be obtained from the response curve. Obtain the arrival time of the photons based on the time difference between the left and right pulse pairs, and record the time change of the incident spectrum.

[0067] To verify the resolution variation law and potential improvement space of the superconducting nanowire linear array single-photon spectrometer under different sampling conditions, this invention also provides an oversampling resolution simulation algorithm. This algorithm is based on the array geometry and, after determining the total array length... = 410 μm, pixel width Under the condition of 500 nm, by changing the number of pixels And based on the relation:

[0068]

[0069] Calculate the corresponding pixel spacing This keeps the total array length constant, thus adjusting the sampling rate. The specific algorithm flow is as follows:

[0070] Step 1: Set the array structure parameters and generate a Gaussian spectral signal with adjacent bimodal characteristics as the input sample;

[0071] Step 2: Under the condition that the spot diameter remains unchanged, apply the above relationship to the given... Calculate the corresponding pixel spacing And perform discrete sampling and reconstruction of spectral signals at different sampling rates;

[0072] Step 3: Extract reconstruction error and resolution index from the reconstructed spectrum to analyze the impact of changes in the number of sampling points on the system's resolution performance and to determine the performance saturation characteristics of the system after entering the oversampling region;

[0073] Step 4: While keeping the array sampling parameters constant, change the spot diameter of the optical system. Simulate the signal acquisition process under different focusing conditions;

[0074] Step 5: Sample and reconstruct the signal after changing the spot diameter, and calculate the resolution as the light spot diameter changes. The changing trend is used to assess the limitation of optical focusing on the overall resolution of the system.

[0075] Through the comprehensive analysis of the two types of simulations mentioned above, the algorithm can distinguish the impact of sampling geometric constraints and optical focusing constraints on system performance, verifying that the resolution of the current spectrometer is mainly limited by optical conditions, while the array sampling capability still has room for improvement. This provides a quantitative evaluation basis and simulation verification method for subsequent structural optimization and system design.

[0076] Compared to existing technologies, this invention offers higher sensitivity, operates under incident light power below -50 dBm, and is virtually unaffected by dark count interference, making it more suitable for spectral detection in low-light environments. Through a suitable combination of a transmission diffraction grating and a focusing lens, and thanks to the ultra-high channel count (512 pixels) of the superconducting nanowire detector array, this invention can improve spectral resolution by an order of magnitude. By fabricating an ultra-large-scale superconducting nanowire detector array, this invention ensures consistent spectral resolution within the communication band (1547 nm-1555 nm). This invention can obtain not only the wavelength information of the incident light but also its temporal information, and holds promise for applications in fluorescence lifetime imaging experiments and entangled photon pair experiments. Compared to the non-adjustable optical path of on-chip integrated spectrometers, this invention allows for the selection of different types of lenses and diffraction gratings for different wavelengths, offering greater flexibility and scalability. The adjustable optical path makes operation simpler and more convenient, and the fiber coupling scheme makes this invention easier to apply to various scenarios.

[0077] The above embodiments are merely typical implementations of the present invention and are not intended to limit the present invention. All equivalent substitutions or improvements made within the scope of the claims of the present invention are within the protection scope of the present invention.

Claims

1. A superconducting nanowire detector, characterized by, The light response unit includes a detection array in a 1*N discrete linear array structure, and the detection array includes N single detection units.

2. The superconducting nanowire detector of claim 1, wherein, The superconducting nanowire detector adopts a microwave transmission line structure, and a SiO2 layer and a gold mirror layer are covered on a layout of the superconducting nanowire detector.

3. The superconducting nanowire detector of claim 1, wherein, The adjacent delay lines are sequentially connected in an S-shaped arrangement.

4. The superconducting nanowire detector of claim 1, wherein, The method for implementing a single-photon spectrometer based on the high-time-resolution superconducting nanowire detector includes: Step 1: laser is focused on the superconducting nanowire detector through a diffraction grating, and the detector responds to photons; Step 2: Calculate the time of left and right pulses reaching the ends of the nanowire , , the position of the photon absorption is calculated by the formula , where is the speed of the electrical signal in the nanowire;​ Step 3: Refractive angle of diffraction grating with incident wavelength satisfies wherein is the incident angle, is the grating constant, according to which the mapping matrix of incident wavelength and photon absorption position is established, and the wavelength-position curve is obtained based on the results obtained in step 2; Step 4: each left-right pulse pair is processed as above to obtain a photon number-wavelength curve, and an energy-wavelength curve is obtained according to the relationship between the photon number and the energy; Step 5: Obtain the photon arrival time from the formula where where is the geometric length of the nanowire, and further obtain the wavelength-photon arrival time curve to describe the time variation of the spectrum, and realize a high time resolution single-photon spectrometer.

5. The superconducting nanowire detector of claim 1, wherein, By means of an oversampling resolution simulation algorithm, the resolution variation law and potential improvement space of the super detector under different sampling conditions are verified, the algorithm is based on the array geometry structure, under the condition of determining the total length of the array , the pixel width , by changing the number of pixels and calculating the corresponding pixel spacing according to the relationship , the total length of the array is kept unchanged, so as to realize the adjustment of the sampling rate; by means of the algorithm, the influence of the sampling geometry constraint and the optical focusing constraint on the system performance is distinguished, it is verified that the current resolution is mainly limited by the optical condition, and the array sampling capacity still has the improvement space, which provides the quantitative evaluation basis and simulation verification means for the subsequent structure optimization and system design.

6. The superconducting nanowire detector of claim 5, wherein, The algorithm includes the following steps: Step 1: set the detection array structure parameters and generate a Gaussian spectral signal with adjacent double-peak characteristics as an input sample; Step 2: Under the condition that the spot diameter remains unchanged, the given The corresponding pixel spacing is calculated And the spectral signals under different sampling rates are discretely sampled and reconstructed; Step 3: extract the reconstruction error and resolution index from the reconstructed spectrum to analyze the influence of the sampling point number change on the system resolution performance and determine the performance saturation characteristics of the system after entering the oversampling area; Step 4: Under the condition that the array sampling parameters remain unchanged, the signal acquisition process under different focusing conditions is simulated by changing the optical system spot diameter . Step 5: Sampling and reconstruction of the signal after changing the spot diameter, calculating the trend of resolution change to evaluate the limitation of optical focusing on the overall resolution of the system. Step 5: Sampling and reconstruction of the signal after changing the spot diameter, calculating the trend of resolution change to evaluate the limitation of optical focusing on the overall resolution of the system.

7. A superconducting nanowire time resolved single photon spectrometer, characterized in that, The system includes a displacement table, an optical fiber, an optical fiber focusing mirror, a diffraction grating, a focusing lens, the superconducting nanowire detector and the readout circuit in any one of claims 1-6, the optical fiber is connected to the optical fiber focusing mirror, the optical fiber focusing mirror, the diffraction grating and the focusing lens are fixed on the displacement table, laser is focused on the superconducting nanowire detector, the displacement table is used to realize scanning of a light spot on the superconducting nanowire detector, and the signal of the superconducting nanowire detector after response is read out through the readout circuit.

8. The superconducting nanowire time resolved single photon spectrometer of claim 7, wherein, The optical fiber focusing mirror, the diffraction grating and the focusing lens are fixed on the displacement table through a cage structure.

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