Large-area uniform coating control method based on dynamic and static combination optimization strategy

Abstract

This invention discloses a large-area uniform coating control method based on a dynamic-static combined optimization strategy. Addressing the technical problems of uneven film thickness and poor film consistency in existing large-area coating processes, this method combines the dynamic movement mode of the coating target with the static positioning optimization of the substrate and the precise control of static parameters of the coating environment to construct a dynamic-static synergistic coating control system. Simultaneously, it introduces strategies such as zoned coating compensation, real-time film thickness monitoring feedback, and dynamic adaptation of motion trajectory to achieve uniform deposition of coating materials on the surface of large-area substrates, effectively improving the film thickness consistency, film uniformity, and film performance stability of large-area coatings. This method is convenient to operate, provides precise control, and is compatible with various coating processes such as magnetron sputtering, vacuum evaporation, and ion plating. It can be widely applied to large-area coating production in fields such as flat panel displays, photovoltaic glass, semiconductor wafers, and large-area optical devices.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and in particular to a method for controlling large-area uniform coating based on a dynamic-static combined optimization strategy. Background Technology

[0002] Coating technology is a process that uses physical or chemical methods to deposit coating materials onto the surface of a substrate to form a functional film layer. It is widely used in various fields such as flat panel displays, photovoltaic energy, semiconductors, optical devices, and aerospace. With industrial development, the demand for coating on large-area substrates is increasing, such as large-size photovoltaic glass, flat panel display panels, large-area optical lenses, and semiconductor wafers. These products have extremely high requirements for the uniformity and thickness consistency of the film layer. Uneven film layer can directly lead to deviations in the product's optical performance, electrical performance, and wear resistance, reducing the product qualification rate.

[0003] Existing methods for controlling large-area coating mainly fall into two categories: one is the static coating method, where both the coating target and the substrate remain stationary, and coating is achieved by simply adjusting parameters such as the coating source power and vacuum level. This method is simple to operate, but because the particles emitted from the coating source are directional, the dose of coating particles received by the central and edge areas of a large-area substrate differs greatly, easily leading to problems such as "thick at the center and thin at the edge" or local film loss, making it difficult to guarantee film thickness uniformity. The other is the dynamic coating method, where the coating target or substrate undergoes a single rotation or translational motion, attempting to expand the coverage area of ​​the coating particles through movement. However, this method does not consider the coating compensation needs of different areas of the substrate and lacks real-time film thickness monitoring feedback. The setting of motion parameters is also arbitrary, and for ultra-large-area substrates, there are still problems such as large film thickness deviations and poor film uniformity.

[0004] Meanwhile, in existing coating control methods, the regulation of coating environment parameters and the motion control of coating components are independent of each other, failing to form a synergistic optimization system. Although some methods introduce film thickness monitoring, the feedback adjustment only targets a single parameter and does not combine the target motion trajectory and local coating power for comprehensive adjustment, resulting in poor film thickness deviation correction. In addition, existing methods have poor adaptability, requiring redesign of control schemes for different coating processes (such as magnetron sputtering and vacuum evaporation), increasing the cost and operational complexity of industrial production.

[0005] In summary, there is an urgent need for a large-area uniform coating control method that can achieve precise control of static parameters of the coating environment and coordinated optimization of dynamic motion of coating components, combined with real-time monitoring and zonal compensation. This method would solve the technical problems of poor film uniformity, low thickness consistency and weak adaptability in existing technologies, and meet the high-quality requirements of industrial fields for large-area coating. Summary of the Invention

[0006] In view of the problems mentioned in the background art, the purpose of this invention is to provide a method for controlling large-area uniform coating based on a dynamic-static combined optimization strategy, so as to solve the problems mentioned in the background art.

[0007] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a large-area uniform coating control method based on a dynamic-static combination optimization strategy, comprising the following steps: Step 1, coating parameter calibration: static parameter calibration of the coating chamber is performed to determine the reference static parameters of the vacuum degree, working gas partial pressure, and coating source power of the coating chamber and to keep the reference static parameters stable during the coating process.

[0008] Step 2, Positioning Optimization: Static positioning optimization is performed on the large-area substrate. The optimal static position of the substrate in the coating chamber is determined according to the size and specifications of the substrate, so that the effective coating distance deviation between each area of ​​the substrate and the coating source is controlled within the preset range.

[0009] Step 3, Path Setting: Plan the dynamic motion trajectory of the coating target. Based on the area and shape of the substrate, set the motion speed, motion path, and motion coverage angle of the coating target around the substrate.

[0010] Step 4, Coating Compensation: Start the coating process. The coating target moves according to the planned dynamic motion trajectory. At the same time, based on the preset partitioned coating compensation strategy, the coating dose is compensated for the edge area of ​​the substrate.

[0011] Step 5, Coating Control and Adjustment: During the coating process, the film thickness is detected in real time at multiple monitoring points on the substrate surface through the film thickness monitoring module. The detection data is fed back to the control terminal, and the control terminal dynamically adjusts the motion parameters of the coating target and the local coating power according to the film thickness deviation. Step 6: Coating control termination: When the film thickness on the substrate surface reaches the preset value, stop the movement of the coating target and the operation of the coating source according to the preset program to complete the large-area uniform coating.

[0012] Preferably, the calibration process of the reference static parameters in step one includes evacuating the coating chamber to a preset vacuum level, introducing working gas and adjusting the gas partial pressure to the coating process adaptation value, setting the coating source power and preheating to stabilize it, and recording the values ​​of each parameter as reference static parameters after stabilization.

[0013] Preferably, the optimal static position in step two is determined based on the ratio of the shortest distance from the center region to the edge region of the substrate to the coating source being 1:(1.02~1.05), and the placement plane of the substrate is parallel to the emission surface of the coating source, with a parallelism deviation of no more than 0.5°.

[0014] Preferably, the dynamic motion mode of the coating target in step three is a combination of rotational motion and reciprocating translational motion. The angular velocity of the rotational motion is 0.5~5 r / min, the speed of the reciprocating translational motion is 5~20 mm / s, and the motion path covers the projection area of ​​the substrate surface and the edge coverage width is not less than 10% of the side length of the substrate.

[0015] Preferably, the partitioned coating compensation strategy in step four involves dividing the substrate surface into a central region and an edge region, with the coating dose in the edge region being 1.1 to 1.3 times that in the central region. The coating dose is achieved by adjusting the residence time of the coating target in the corresponding region.

[0016] Preferably, the film thickness monitoring module in step five is a non-contact optical film thickness monitor, with monitoring points distributed in an array on the substrate surface. The spacing between monitoring points in the central area is 5-10 cm, and the spacing between monitoring points in the edge area is 3-5 cm. The real-time detection frequency is 1-5 times / second.

[0017] Preferably, the criterion for determining the film thickness deviation in step five is that the absolute value of the deviation between the actual film thickness at the monitoring point and the preset film thickness is no more than 5%. When the absolute value of the deviation exceeds 5%, the control terminal corrects the deviation by increasing the residence time of the coating target in the corresponding area of ​​the monitoring point or by increasing the local coating power.

[0018] Preferably, the motion parameter adjustment of the coating target in step five includes angular velocity adjustment, translational velocity adjustment and dwell time adjustment, with the adjustment range being ±5% to ±20% of the original parameters, and the local coating power adjustment range being ±5% to ±15% of the original power.

[0019] In summary, the present invention has the following main advantages: The present invention significantly improves the uniformity and thickness consistency of large-area coatings: The present invention adopts a dynamic-static combined optimization strategy, combining the static precise control of the coating chamber and substrate position with the dynamic movement of the coating target, and introduces a partitioned coating compensation strategy to specifically solve the problem of insufficient coating dosage in the edge area; with array-type real-time film thickness monitoring and dynamic parameter feedback adjustment, real-time correction of film thickness deviation is achieved, ultimately making the film thickness uniformity on the substrate surface no less than 95%, which is far higher than the uniformity level of existing static coating or single dynamic coating methods, effectively solving the industry pain point of "thick center and thin edge".

[0020] This invention constructs a collaboratively optimized coating control system to avoid disconnected parameter control: This invention breaks the status quo in the prior art where coating environment parameters and coating component motion control are independent of each other. It integrates static parameter calibration, static positioning optimization, dynamic motion planning, and real-time feedback adjustment into one system, forming a dynamic-static synergy and multi-parameter linkage coating control system. During the coating process, each parameter cooperates with each other and is precisely controlled, reducing the influencing factors of uneven film layer from the source and improving the stability of the coating process.

[0021] This invention is highly adaptable and compatible with various coating processes: The control method of this invention is not limited to a certain coating process. It can be adapted to different processes such as magnetron sputtering, vacuum evaporation, and ion beam coating by simply adjusting the calibration range of the reference static parameters. There is no need to redesign the motion trajectory and control scheme, which reduces the cost and operational complexity of process switching in industrial production. It is suitable for large-area coating production in various industries.

[0022] This invention is easy to operate, low in cost, and easy to promote in industrial applications: The method of this invention does not require the addition of expensive coating equipment. It can be implemented simply by upgrading the software and optimizing the logic of the motion control system and parameter monitoring system of the existing coating equipment. The motion parameters, zonal compensation ratio, and feedback adjustment range of the coating target all have clear numerical ranges. The operation process is standardized and regulated, easy for workers to master, and suitable for large-scale industrial production applications.

[0023] This invention improves the stability of film performance and increases product yield: By achieving uniform film deposition, this invention ensures consistent optical, electrical, and wear resistance properties across all areas of the substrate surface, avoiding performance deviations caused by uneven film deposition and significantly improving the yield of large-area coated products. Simultaneously, stable parameter adjustments and vacuum environment control during the coating process reduce internal defects in the film, enhance the adhesion between the film and the substrate, and extend the film's lifespan. Attached Figure Description

[0024] Figure 1 This is a flowchart of the present invention. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] refer to Figure 1A large-area uniform coating control method based on a dynamic-static combination optimization strategy includes the following steps: Step 1, coating parameter calibration: Static parameter calibration of the coating chamber is performed to determine the reference static parameters of the vacuum degree, working gas partial pressure, and coating source power of the coating chamber and keep the reference static parameters stable during the coating process.

[0027] Step 2, Positioning Optimization: Static positioning optimization is performed on the large-area substrate. The optimal static position of the substrate in the coating chamber is determined according to the size and specifications of the substrate, so that the effective coating distance deviation between each area of ​​the substrate and the coating source is controlled within the preset range.

[0028] Step 3, Path Setting: Plan the dynamic motion trajectory of the coating target. Based on the area and shape of the substrate, set the motion speed, motion path, and motion coverage angle of the coating target around the substrate.

[0029] Step 4, Coating Compensation: Start the coating process. The coating target moves according to the planned dynamic motion trajectory. At the same time, based on the preset partitioned coating compensation strategy, the coating dose is compensated for the edge area of ​​the substrate.

[0030] Step 5: Coating Control and Adjustment: During the coating process, the film thickness is detected in real time at multiple monitoring points on the substrate surface through the film thickness monitoring module. The detection data is fed back to the control terminal, which dynamically adjusts the motion parameters of the coating target and the local coating power according to the film thickness deviation.

[0031] Step 6: Coating control termination: When the film thickness on the substrate surface reaches the preset value, stop the movement of the coating target and the operation of the coating source according to the preset program to complete the large-area uniform coating.

[0032] refer to Figure 1 The calibration process of the reference static parameters in step one includes evacuating the coating chamber to a preset vacuum level, introducing working gas and adjusting the gas partial pressure to the coating process adaptation value, setting the coating source power and preheating to stabilize it, and recording the values ​​of each parameter as reference static parameters after stabilization.

[0033] refer to Figure 1 In step two, the optimal static position is determined by the ratio of the shortest distance from the center region to the edge region of the substrate to the coating source being 1:(1.02~1.05). The placement plane of the substrate is parallel to the emission surface of the coating source, with a parallelism deviation of no more than 0.5°. In step three, the dynamic motion mode of the coating target is a combination of rotational motion and reciprocating translational motion. The angular velocity of the rotational motion is 0.5~5 r / min, and the speed of the reciprocating translational motion is 5~20 mm / s. The motion path covers the projected area of ​​the substrate surface, and the edge coverage width is not less than 10% of the substrate side length.

[0034] refer to Figure 1In step four, the partitioned coating compensation strategy divides the substrate surface into a central region and an edge region. The coating dose in the edge region is 1.1 to 1.3 times that in the central region. The coating dose is adjusted by changing the residence time of the coating target in the corresponding region. In step five, the film thickness monitoring module is a non-contact optical film thickness monitor. The monitoring points are arrayed on the substrate surface, with a spacing of 5 to 10 cm between monitoring points in the central region and 3 to 5 cm between monitoring points in the edge region. The real-time detection frequency is 1 to 5 times / second.

[0035] refer to Figure 1 In step five, the criterion for judging the film thickness deviation is that the absolute value of the deviation between the actual film thickness at the monitoring point and the preset film thickness is no more than 5%. When the absolute value of the deviation exceeds 5%, the control terminal corrects the deviation by increasing the residence time of the coating target in the corresponding area of ​​the monitoring point or by increasing the local coating power. The adjustment of the motion parameters of the coating target in step five includes angular velocity adjustment, translation speed adjustment, and residence time adjustment, with an adjustment range of ±5% to ±20% of the original parameters. The adjustment range of the local coating power is ±5% to ±15% of the original power.

[0036] refer to Figure 1 This invention significantly improves the uniformity and thickness consistency of large-area coatings: It adopts a dynamic-static combined optimization strategy, combining the static precise control of the coating chamber and substrate position with the dynamic movement of the coating target. At the same time, it introduces a zoned coating compensation strategy to specifically solve the problem of insufficient coating dosage in the edge area. With array-type real-time film thickness monitoring and dynamic parameter feedback adjustment, it realizes real-time correction of film thickness deviation, and finally makes the film thickness uniformity on the substrate surface no less than 95%, which is far higher than the uniformity level of existing static coating or single dynamic coating methods, effectively solving the industry pain point of "thick center and thin edge".

[0037] refer to Figure 1 This invention constructs a collaboratively optimized coating control system to avoid disconnected parameter control: Breaking away from the existing technology where coating environment parameters and coating component motion control are independent, this invention integrates static parameter calibration, static positioning optimization, dynamic motion planning, and real-time feedback adjustment into a unified system. This forms a dynamic-static synergy and multi-parameter linkage coating control system, where parameters cooperate and are precisely controlled during the coating process, reducing the impact of uneven film layers from the source and improving the stability of the coating process. This invention is highly adaptable and compatible with various coating processes: The control method of this invention is not limited to a single coating process. It can be adapted to different processes such as magnetron sputtering, vacuum evaporation, and ion beam coating by simply adjusting the calibration range of the reference static parameters. This eliminates the need to redesign motion trajectories and control schemes, reducing the cost and operational complexity of process switching in industrial production. It is suitable for large-area coating production in various industries.

[0038] refer to Figure 1 This invention is convenient to operate, low in cost, and easy to promote industrially: The method of this invention does not require the addition of expensive coating equipment; it can be implemented simply by upgrading and optimizing the software and logic of the motion control system and parameter monitoring system of existing coating equipment. The motion parameters, zonal compensation ratio, and feedback adjustment range of the coating target all have clearly defined numerical ranges. The operation process is standardized and regulated, easy for workers to master, and suitable for large-scale industrial production applications. This invention improves the stability of film performance and increases product qualification rate: Through uniform film deposition, this invention ensures that the optical, electrical, and wear resistance properties of the film in each area of ​​the substrate surface are consistent, avoiding product performance deviations caused by uneven film layers, and significantly improving the qualification rate of large-area coated products. At the same time, the stable adjustment of parameters and stable control of the vacuum environment during the coating process reduce internal defects in the film, improve the adhesion between the film and the substrate, and extend the service life of the film.

[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A method for controlling large-area uniform film deposition based on a dynamic-static combined optimization strategy, characterized in that: Includes the following steps: Step 1: Calibration of coating parameters: Perform static parameter calibration on the coating chamber to determine the reference static parameters of vacuum degree, working gas partial pressure, and coating source power of the coating chamber, and keep the reference static parameters stable during the coating process; Step 2, Positioning Optimization: Static positioning optimization is performed on the large-area substrate. The optimal static position of the substrate in the coating chamber is determined according to the size and specifications of the substrate, so that the effective coating distance deviation between each area of ​​the substrate and the coating source is controlled within the preset range. Step 3, Path Setting: Plan the dynamic motion trajectory of the coating target. Based on the area and shape of the substrate, set the motion speed, motion path, and motion coverage angle of the coating target around the substrate. Step 4, Coating Compensation: Start the coating process. The coating target moves according to the planned dynamic motion trajectory. At the same time, based on the preset partitioned coating compensation strategy, the coating dose is compensated for the edge area of ​​the substrate. Step 5, Coating Control and Adjustment: During the coating process, the film thickness is detected in real time at multiple monitoring points on the substrate surface through the film thickness monitoring module. The detection data is fed back to the control terminal, and the control terminal dynamically adjusts the motion parameters of the coating target and the local coating power according to the film thickness deviation. Step 6: Coating control termination: When the film thickness on the substrate surface reaches the preset value, stop the movement of the coating target and the operation of the coating source according to the preset program to complete the large-area uniform coating.

2. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The calibration process of the reference static parameters in step one includes evacuating the coating chamber to a preset vacuum level, introducing working gas and adjusting the gas partial pressure to the coating process adaptation value, setting the coating source power and preheating to stabilize it, and recording the values ​​of each parameter as reference static parameters after stabilization.

3. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The optimal static position in step two is determined by the ratio of the shortest distance from the center region to the edge region of the substrate to the coating source being 1:(1.02~1.05). The placement plane of the substrate is parallel to the emission surface of the coating source, and the parallelism deviation is no greater than 0.5°.

4. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The dynamic motion mode of the coating target in step three is a combination of rotational motion and reciprocating translational motion. The angular velocity of the rotational motion is 0.5~5 r / min, the speed of the reciprocating translational motion is 5~20 mm / s, and the motion path covers the projection area of ​​the substrate surface and the edge coverage width is not less than 10% of the side length of the substrate.

5. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The partitioned coating compensation strategy in step four involves dividing the substrate surface into a central region and an edge region. The coating dose in the edge region is 1.1 to 1.3 times that in the central region. The coating dose is achieved by adjusting the residence time of the coating target in the corresponding region.

6. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The film thickness monitoring module in step five is a non-contact optical film thickness monitor. The monitoring points are distributed in an array on the substrate surface. The spacing between monitoring points in the central area is 5~10cm, and the spacing between monitoring points in the edge area is 3~5cm. The real-time detection frequency is 1~5 times / second.

7. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The criterion for determining the film thickness deviation in step five is that the absolute value of the deviation between the actual film thickness at the monitoring point and the preset film thickness is no more than 5%. When the absolute value of the deviation exceeds 5%, the control terminal corrects the deviation by increasing the residence time of the coating target in the corresponding area of ​​the monitoring point or by increasing the local coating power.

8. The method for controlling large-area uniform film coating based on a dynamic-static combined optimization strategy according to claim 1, characterized in that: The motion parameter adjustment of the coating target in step five includes angular velocity adjustment, translation speed adjustment and dwell time adjustment, with the adjustment range being ±5% to ±20% of the original parameters, and the local coating power adjustment range being ±5% to ±15% of the original power.

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