A sputtering coating machine

Abstract

This invention discloses a sputtering coating machine, relating to the field of coating equipment technology, comprising: a frame, on which a coating chamber is fixedly mounted, and a coating mechanism is disposed inside the coating chamber; and a powder cleaning assembly, disposed inside the coating chamber, comprising a cleaning component and a protective component, the cleaning component comprising a strip-shaped electrostatic dust suction head. This invention achieves coordinated automation of target protection and cleaning through the powder cleaning assembly. During target lifting, the protective plate automatically closes to cover the target when coating stops, while the strip-shaped electrostatic dust suction head cleans the surface of the target. This design integrates target shielding and surface cleaning functions into the same action sequence, eliminating the need for additional drive mechanisms or manual intervention. This effectively reduces particulate contamination of the target during non-working periods, thereby improving batch stability and product yield of coating quality, reducing manual intervention, lowering the risk of secondary contamination, and eliminating the need for operators to open the chamber.

Description

Technical Field

[0001] This invention relates to the field of coating equipment technology, and specifically to a sputtering coating machine. Background Technology

[0002] Sputtering coating technology is an important branch of physical vapor deposition. Its basic principle is to use high-energy particles to bombard the surface of the target material, causing the target atoms to be sputtered out and deposited on the surface of the workpiece to be coated to form a thin film. Magnetron sputtering coating machines have been widely used in semiconductor manufacturing, optical coating, surface engineering and new energy fields due to their advantages such as high film quality, strong film adhesion and wide applicability.

[0003] In the actual use of sputtering coating machines, the problem of particle contamination of the target material has always been an important factor affecting the coating quality and stable operation of the equipment. Since the target material is directly exposed in the coating chamber during non-working periods, it is easily contaminated by residual particles in the chamber. After these contaminants accumulate on the target surface, they will be carried to the substrate surface during the sputtering process when the coating is restarted, forming film defects such as pinholes and protrusions. Moreover, the cleaning of target surface contamination usually requires shutdown operation or separate treatment process, which cannot achieve coordinated automation of protection and cleaning. Summary of the Invention

[0004] The purpose of this invention is to provide a sputtering coating machine that solves the problem that traditional sputtering coating machines are easily contaminated by particles when the target material is exposed in the chamber when it is not working, and that cleaning the target material surface contamination usually requires shutdown or a separate processing step, which cannot achieve coordinated automation of protection and cleaning.

[0005] The present invention solves the above-mentioned technical problems through the following technical solution: A sputtering coating machine of the present invention includes: A frame, on which a coating chamber is fixedly mounted, and a coating mechanism is provided inside the coating chamber; A powder cleaning assembly is disposed inside the coating chamber. The powder cleaning assembly includes a cleaning component and a protective component. The cleaning component includes a strip-shaped electrostatic dust suction head, a dust collection box fixed to the bottom of the coating chamber, a follow-up moving component, and a self-adjusting component. The follow-up moving component is activated when the coating mechanism is raised or lowered. The self-adjusting component automatically adapts and changes its height when the strip-shaped electrostatic dust suction head moves horizontally. A corrugated connecting pipe is provided on the top of the strip-shaped electrostatic dust suction head, and one end of the connecting pipe extends to the inside of the dust collection box. A dust collection drawer is provided inside the dust collection box.

[0006] Preferably, the powder cleaning assembly further includes a mounting shell with two inclined slots. Two follow-up moving parts are provided. Each follow-up moving part includes a rotating wheel that rotates on the top of the mounting shell via a support frame, an upper inclined support slide rail fixed to the top of the mounting shell, a lifting bar that slides on the inner side of the mounting shell, and a pushing bar. A sliding sleeve slides on the upper inclined support slide rail via a slider. A rope is fixed between the sliding sleeve and the lifting bar, and the rope passes through the rotating wheel.

[0007] Preferably, two self-adjusting components are provided. The self-adjusting component includes a lower inclined plate fixed to the inside of the inclined groove and a sliding column passing through the inside of the sliding sleeve. The lower inclined plate has an inclined U-shaped groove. A magnetic suction plate is fixed to the inner wall of the inclined U-shaped groove. A magnetic suction head is fixed to one end of the sliding column. One end of the magnetic suction head passes through the inside of the inclined U-shaped groove. The strip-shaped electrostatic dust suction head is fixed to one end of the sliding column.

[0008] Preferably, one end of each sliding column in the two self-adjusting components is provided with a double-pass groove, and the protective component includes a protective plate. Two L-shaped connectors are fixed on one side of the protective plate, and the L-shaped connectors slide inside the double-pass groove.

[0009] Preferably, the coating mechanism includes a target material sliding inside the mounting housing, a hydraulic cylinder fixed to the bottom of the mounting housing, and a cooling water tank. A cooling box is fixed to the bottom of the target material. One end of the hydraulic cylinder telescopic rod extends to the inside of the mounting housing and is fixed to the bottom of the cooling box. An S-shaped water-cooling pipe is fixedly installed inside the cooling box. One end of the S-shaped water-cooling pipe is connected to the cooling water tank through a hose one, and the other end of the S-shaped water-cooling pipe is connected to the cooling water tank through a hose two and a water pump.

[0010] Preferably, the pushing strip is fixed to one side of the cooling box, the lifting strip is disposed below the pushing strip, and the target material and the cooling box are both disposed between two moving parts.

[0011] Preferably, a vacuum pump is fixedly installed outside the coating chamber, and an electrical control cabinet is fixedly installed at the bottom of the frame.

[0012] Preferably, a sealing door is hinged to the top of the coating chamber, and a product limiting mechanism is fixed to the bottom of the sealing door.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: The design achieves coordinated automation of target protection and cleaning through a specially designed powder cleaning component. By lifting the target, the protective plate automatically closes and covers the top of the target when the coating process stops. At the same time, the strip-shaped electrostatic dust suction head cleans the surface of the target. This design integrates the two functions of target shielding and surface cleaning into the same action sequence, without the need for additional drive mechanisms or manual intervention. It effectively reduces particulate contamination of the target during non-working periods, thereby improving the batch stability and product yield of coating quality, reducing manual intervention, lowering the risk of secondary contamination, and eliminating the need for operators to open their mouths. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a split bottom view of the present invention; Figure 3 This is a cross-sectional view of the coating chamber in this invention; Figure 4 for Figure 3 A diagram illustrating the breakdown; Figure 5 This is a schematic diagram showing the disassembled powder cleaning component and coating mechanism in this invention; Figure 6 This is a partial disassembly diagram of the powder cleaning component in this invention.

[0015] 1. Frame; 2. Coating chamber; 3. Coating mechanism; 31. Target material; 32. Hydraulic cylinder; 33. Cooling water tank; 34. Cooling box; 35. S-shaped water cooling pipe; 4. Powder cleaning assembly; 41. Strip-shaped electrostatic dust collection head; 42. Dust collection box; 43. Corrugated connecting pipe; 44. Dust collection drawer; 45. Mounting shell; 46. Inclined groove; 47. Rotating wheel; 48. Upper inclined support slide rail; 49. Lifting bar; 410. Sliding sleeve; 411. Rope; 412. Push bar; 413. Lower inclined plate; 414. Sliding column; 415. Inclined U-shaped groove; 416. Magnetic suction plate; 417. Magnetic suction connector; 418. Double through groove body; 419. Protective plate; 420. L-shaped connector; 5. Vacuum pump; 6. Sealed door. Detailed Implementation

[0016] The above-mentioned and other technical features and advantages of the present invention will be described in more detail below with reference to the accompanying drawings.

[0017] This invention provides a technical solution: a sputtering coating machine, such as... Figures 1-6As shown, the device includes a frame 1 and a powder cleaning assembly 4. A coating chamber 2 is fixedly mounted on the frame 1. Three coating chambers 2 are provided, and a coating mechanism 3 and a powder cleaning assembly 4 are mounted inside each of the three coating chambers 2. A vacuum pump 5 and an air intake pump are fixedly mounted outside each coating chamber 2. An electrical control cabinet is fixedly mounted at the bottom of the frame 1. A sealing door 6 is hinged to the top of each coating chamber 2. A product limiting mechanism for limiting the product to be coated is fixed at the bottom of the sealing door 6. As is well known to those skilled in the art, the working principles and wiring methods of the vacuum pump 5, air intake pump, and product limiting mechanism are commonplace and have not been improved in this application. They are all conventional methods or common knowledge and will not be described in detail here. Those skilled in the art can arbitrarily select and configure them according to their needs or convenience. The coating mechanism 3 includes a target 31, a hydraulic cylinder 32, and a cooling water tank 33. A cooling box 34 is fixed to the bottom of the material 31. One end of the telescopic rod of the hydraulic cylinder 32 is fixed to the bottom of the cooling box 34. An S-shaped water cooling pipe 35 is fixedly installed inside the cooling box 34. One end of the S-shaped water cooling pipe 35 is connected to the cooling water tank 33 through a hose one. The other end of the S-shaped water cooling pipe 35 is connected to the cooling water tank 33 through a hose two and a water pump. An inlet pipe is fixed to the water inlet end of the water pump. One end of the inlet pipe extends into the interior of the cooling water tank 33. A semiconductor cooling chip is installed inside the cooling water tank 33. The water inside the cooling water tank 33 is cooled by the semiconductor cooling chip. As is well known to those skilled in the art, the working principle and wiring method of the semiconductor cooling chip and the water pump are commonplace. This application has not improved them. They are all conventional means or common knowledge. They will not be described in detail here. Those skilled in the art can make any selection according to their needs or convenience.

[0018] The powder removal component 4 includes cleaning components and protective components. The cleaning components include a strip-shaped electrostatic dust suction head 41, a dust collection box 42 fixed to the bottom of the coating chamber 2, a follow-up moving component, and a self-adjusting component. The target material 31 and the cooling box 34 are both disposed between two follow-up moving components. Multiple suction holes are provided below the strip-shaped electrostatic dust suction head 41. The strip-shaped electrostatic dust suction head 41 is an existing mature technology that uses electrostatic dust suction to remove powder from the surface of the target material 31. As is well known to those skilled in the art, the working principle and wiring method of electrostatic dust suction are commonplace and are considered conventional methods or common knowledge, so they will not be elaborated further here. Those skilled in the art can easily understand them. The selection can be made according to its needs or convenience, as long as the suction head is designed in a strip shape. This strip suction head should be the same width as the target material 31 to ensure that the powder on the surface of the target material 31 can be fully removed. The moving part is activated when the coating mechanism 3 is raised and lowered. The self-adjusting part automatically adapts and changes its own height when the strip electrostatic suction head 41 is moved horizontally. The top of the strip electrostatic suction head 41 is provided with a corrugated connecting pipe 43. One end of the connecting pipe 43 extends to the inside of the dust collection box 42. The inside of the dust collection box 42 is provided with a dust collection drawer 44. The dust collection drawer 44 is provided with a handle. The handle is exposed to facilitate the removal of the dust collection drawer 44 for powder removal.

[0019] The powder cleaning assembly 4 also includes a mounting housing 45, with the target material 31 sliding inside the mounting housing 45. The hydraulic cylinder 32 and the cooling water tank 33 are both fixed to the bottom of the mounting housing 45. One end of the telescopic rod of the hydraulic cylinder 32 extends to the inside of the mounting housing 45 to facilitate its fixation to the bottom of the cooling box 34. Figure 4 As shown, the mounting shell 45 has two symmetrical inclined grooves 46. Two pull-moving components are provided, and the two pull-moving components are symmetrically arranged. The pull-moving components include a rotating wheel 47 that rotates on the top of the mounting shell 45 via a support frame, an upper inclined support slide rail 48 fixed to the top of the mounting shell 45, a lifting bar 49 that slides on the inner side of the mounting shell 45, and a pushing bar 412 fixed to one side of the cooling box 34. The lifting bar 49 is located below the pushing bar 412. A sliding sleeve 410 slides on the upper inclined support slide rail 48 via a slider. A rope 411 is fixed between the sliding sleeve 410 and the lifting bar 49. The rope 411 passes through the rotating wheel 47. After the target material 31 is lifted upward by the hydraulic cylinder 32, the sliding sleeve 410 is at the lowest end of the upper inclined support slide rail 48.

[0020] There are two self-adjusting components, which are arranged opposite to each other. Each self-adjusting component includes a lower inclined plate 413 fixed inside the inclined groove 46 and a sliding column 414 passing through the inner side of the sliding sleeve 410. The length of the sliding column 414 is slightly greater than that shown in the image. Figure 4The horizontal length of the rope 411 shown (when the sliding sleeve 410 is at the lowest end of the upper inclined support slide rail 48) is shown. An inclined U-shaped groove 415 is provided on the lower inclined plate 413, and a magnetic plate 416 is fixed to the inner wall of the inclined U-shaped groove 415. Figure 6 As shown, the magnetic suction plate 416 is located on the top side wall of one end of the inclined U-shaped groove 415 at its lower position. A magnetic connector 417 is fixed to one end of the sliding column 414. One end of the magnetic connector 417 passes through the inner side of the inclined U-shaped groove 415. If the magnetic plate 416 has an "N" pole, then the magnetic connector 417 has an "S" pole, and the two can attract each other when they meet. The strip-shaped electrostatic dust collection head 41 is fixed to one end of the sliding column 414 in the two self-adjusting components. Figure 4 As shown, when the target 31 is at its highest point, the strip-shaped electrostatic dust collection head 41 is located on one side of the target 31.

[0021] One end of each sliding column 414 in the two self-adjusting components is provided with a double-pass groove 418. The protective component includes a protective plate 419. Two L-shaped connectors 420 are fixed on one side of the protective plate 419. The L-shaped connectors 420 slide inside the double-pass groove 418. The corrugated connecting pipe 43 passes through the inside of the protective plate 419. As the strip-shaped electrostatic dust suction head 41 moves on the target material 31, the protective plate 419 will be pulled to cover the top of the target material 31 until the protective plate 419 seals the mounting shell 45.

[0022] In use: When the coating machine is stopped, one end of the extension rod of the hydraulic cylinder 32 is not extended. At this time, the target material 31 is at the deepest part of the mounting shell 45. The protective plate 419 seals the opening of the mounting shell 45. The magnetic connector 417 is in the position corresponding to the magnetic plate 416. The magnetic connector 417 will move upward to the upper part of the inclined U-shaped groove 415 under the attraction of the magnetic plate 416, so that the sliding column 414 moves upward by a certain distance. When the sliding column 414 moves upward, the L-shaped connector 420 on the protective plate 419 will slide relative to each other in the double-pass groove 418. This allows the protective plate 419 to maintain a horizontal position while moving with the sliding column 414, preventing the strip-shaped electrostatic dust suction head 41 from contacting the surface of the target material 31 during the movement without dust suction.

[0023] Before coating, the sealing door 6 is opened to fix the product to be coated using the product limiting mechanism. Then, the sealing door 6 is closed to seal the coating chamber 2. Subsequently, the air inside the coating chamber 2 is extracted by the vacuum pump 5, creating a vacuum in the coating chamber 2. The extension rod of the hydraulic cylinder 32 extends to push the cooling box 34 and the target material 31 upward. The cooling box 34 straightens hoses one and two. At this time, it will not affect the connection between the cooling box 34 and the cooling water tank 33. When the cooling box 34 moves upward, the push bar 412 will also move upward, thereby relieving the pressure on the lifting bar 49. At the same time, the sliding sleeve 410 will slide down to the lowest end of the upward inclined support rail 48 under its own weight and the tilt angle of the upward inclined support rail 48. During the sliding, the sliding sleeve 410 will pull the lifting bar 49 upward through the rope 411, and at the same time drive the sliding column 414 to move together. When the sliding column 414 moves, it will move in the inclined U-shaped groove 4. The sliding column 414 gradually moves upward at an inclination of 15, thereby moving upward in the sliding sleeve 410 and simultaneously moving the strip-shaped electrostatic dust suction head 41 horizontally and upward, so that the strip-shaped electrostatic dust suction head 41 is always kept above the target material 31, avoiding collision between the strip-shaped electrostatic dust suction head 41 and the target material 31 when it moves upward, which would affect the normal up and down movement of the target material 31. As the sliding column 414 moves, it will drive the protective plate 419 to gradually slide through the L-shaped connector 420 sliding in the double-pass groove 418, thereby opening the top opening of the mounting shell 45. When the protective plate 419 opens, the magnetic connector 417 will move to the upper end of the inclined U-shaped groove 415, and without the action of magnetic force, the magnetic connector 417 will fall to the groove position below the inclined U-shaped groove 415. The sliding column 414 will also drive the strip-shaped electrostatic dust suction head 41 to move down a certain distance. At this time, the target material 31 will also move to the position close to the opening of the mounting shell 45 to prepare for the coating work.

[0024] During coating, the water pump draws water from the cooling water tank 33 through the inlet pipe and then through the second hose to the S-shaped water cooling pipe 35 to control the temperature of the target material 31. The water in the S-shaped water cooling pipe 35, which is full of water, is discharged back to the cooling water tank 33 through the first hose after heat exchange. The water is then cooled by the semiconductor cooling chip and then pumped back to the S-shaped water cooling pipe 35 for use, thus creating a cycle.

[0025] When the coating process stops, the hydraulic cylinder 32 retracts its telescopic rod, causing the cooling box 34 and the target material 31 to move downwards. The cooling box 34 pushes the lifting bar 49 downwards via the pushing bar 412. The lifting bar 49 then pulls the sliding sleeve 410 along the inclined support rail 48 upwards via the rope 411. The sliding sleeve 410 drives the sliding column 414 to move horizontally. Simultaneously, the sliding column 414 slides downwards in the inclined direction of the magnetic connector 417 and the inclined U-shaped groove 415, allowing the sliding column 414 to slide down within the sliding sleeve 410. This ensures that the strip-shaped electrostatic dust collection head 41 maintains a consistent dust collection distance from the descending target material 31, guaranteeing a consistent dust removal effect. During the retraction of the hydraulic cylinder 32 telescopic rod, the strip-shaped electrostatic dust suction head 41 is activated to remove powder from the upper surface of the target material 31. The powder contaminants falling back onto the upper surface of the target material 31 will be drawn into the dust collection box 42 through the corrugated connecting pipe 43 by the strip-shaped electrostatic dust suction head 41 and fall into the dust collection drawer 44. The dust collection drawer 44 can be pulled out and the collected dust emptied periodically. During the movement of the strip-shaped electrostatic dust suction head 41, the protective plate 419 will maintain a relative sliding state through the L-shaped connector 420 and the sliding column 414, so that the protective plate 419 is always kept in a horizontal position, and the opening of the mounting shell 45 is closed by the translation of the sliding column 414, thus returning to the state when the coating machine is stopped.

[0026] The above description is merely a preferred embodiment of the present invention and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present invention, all of which will fall within the protection scope of the present invention.

Claims

1. A sputter coater, characterized by comprising: include: A frame (1) is fixedly provided with a coating chamber (2), and a coating mechanism (3) is provided on the inner side of the coating chamber (2). The cleaning component (4) is located inside the coating chamber (2). The cleaning component (4) includes a cleaning component and a protective component. The cleaning component includes a strip-shaped electrostatic dust suction head (41), a dust collection box (42) fixed to the bottom of the coating chamber (2), a pull-along component, and a self-adjusting component. The pull-along component is activated when the coating mechanism (3) is raised or lowered. The self-adjusting component automatically adapts and changes its height when the strip-shaped electrostatic dust suction head (41) moves horizontally. A corrugated connecting pipe (43) is provided on the top of the strip-shaped electrostatic dust suction head (41). One end of the connecting pipe (43) extends to the inside of the dust collection box (42). A dust collection drawer (44) is provided on the inside of the dust collection box (42).

2. The sputtering coating machine according to claim 1, characterized in that, The powder cleaning component (4) also includes a mounting shell (45), on which two inclined grooves (46) are provided. Two follow-up moving parts are provided. The follow-up moving parts include a rotating wheel (47) that rotates on the top of the mounting shell (45) via a support frame, an upper inclined support slide rail (48) fixed to the top of the mounting shell (45), a lifting bar (49) that slides on the inner side of the mounting shell (45), and a pushing bar (412). A sliding sleeve (410) slides on the upper inclined support slide rail (48) via a slider. A rope (411) is fixed between the sliding sleeve (410) and the lifting bar (49). The rope (411) passes through the rotating wheel (47).

3. The sputtering coating machine according to claim 2, characterized in that, Two self-adjusting components are provided. The self-adjusting components include a lower inclined plate (413) fixed inside the inclined groove (46) and a sliding column (414) passing through the inside of the sliding sleeve (410). An inclined U-shaped groove (415) is provided on the lower inclined plate (413). A magnetic suction plate (416) is fixed on the inner wall of the inclined U-shaped groove (415). A magnetic suction head (417) is fixed at one end of the sliding column (414). One end of the magnetic suction head (417) passes through the inner side of the inclined U-shaped groove (415). The strip-shaped electrostatic dust suction head (41) is fixed to one end of the sliding column (414).

4. A sputtering coating machine according to claim 3, characterized in that, One end of each sliding column (414) in the two self-adjusting components is provided with a double-pass groove (418). The protective component includes a protective plate (419). Two L-shaped connectors (420) are fixed on one side of the protective plate (419). The L-shaped connectors (420) slide on the inner side of the double-pass groove (418).

5. A sputtering coating machine according to claim 2, characterized in that, The coating mechanism (3) includes a target material (31) that slides inside the mounting shell (45), a hydraulic cylinder (32) fixed to the bottom of the mounting shell (45), and a cooling water tank (33). A cooling box (34) is fixed to the bottom of the target material (31). One end of the telescopic rod of the hydraulic cylinder (32) extends to the inside of the mounting shell (45) and is fixed to the bottom of the cooling box (34). An S-shaped water cooling pipe (35) is fixedly installed inside the cooling box (34). One end of the S-shaped water cooling pipe (35) is connected to the cooling water tank (33) through a hose one, and the other end of the S-shaped water cooling pipe (35) is connected to the cooling water tank (33) through a hose two and a water pump.

6. A sputtering coating machine according to claim 5, characterized in that, The push bar (412) is fixed to one side of the cooling box (34), the lifting bar (49) is located below the push bar (412), and the target material (31) and the cooling box (34) are both located between two moving parts.

7. A sputtering coating machine according to claim 1, characterized in that, A vacuum pump (5) is fixedly installed on the outside of the coating chamber (2), and an electrical control cabinet is fixed on the bottom of the frame (1).

8. A sputtering coating machine according to claim 1, characterized in that, The top of the coating chamber (2) is hinged with a sealing door (6), and the bottom of the sealing door (6) is fixed with a product limiting mechanism.

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