An automatic transport system for an integrated circuit production line

Abstract

This invention relates to the field of circuit production line technology and discloses an automatic transfer system for integrated circuit production lines, addressing the technical problems of low transfer efficiency and poor space utilization in existing technologies. The system includes: a three-dimensional storage scheduling module located on one side of the production line, used to store wafer cassettes or photomasks and generate material release instructions according to the production cycle; a vertical conveying system located below the storage module, used to transport materials from a first plane where the three-dimensional storage is located to a second plane flush with the cleanroom floor; and a horizontal conveying system located on the second plane, used to receive materials and complete automatic handover with the production equipment. This application enables fully automated transportation of materials from three-dimensional storage to the production equipment without manual intervention, significantly reducing labor costs and improving the automation level of the production line and the utilization rate of storage space.

Description

Technical Field

[0001] This invention relates to the field of circuit production line technology, specifically to an automated transmission system for an integrated circuit production line. Background Technology

[0002] The integrated circuit manufacturing industry has extremely stringent requirements for the cleanliness of the production environment. During core processes such as photolithography, etching, and deposition, the allowable particle size and density on the surface of wafers are strictly limited. As a result, cleanrooms are classified into different levels of standards. Repeated wafer turnover is an unavoidable part of the production process, and the transport system, as the bridge connecting various process equipment, directly determines the yield of the final product through its operational stability and cleanliness compatibility.

[0003] Automated transfer systems are responsible for transferring wafers between different process equipment. Their basic working principle involves the positioning control of the transfer carrier, path planning, and docking and coordination with adjacent equipment on the production line. In actual production scenarios, the transfer system needs to achieve seamless connection between the wafer and the processing chamber while ensuring operational efficiency. However, the vibration and airflow disturbance generated by the transfer carrier during its movement will carry suspended particles in the air and cause them to settle on the wafer surface.

[0004] Due to the inherent contradiction between the operation of the transmission system and the maintenance of a clean environment, high-frequency wafer transfer operations are inevitably accompanied by more intense airflow disturbances, which leads to a sharp increase in the risk of particulate contamination on the wafer surface, resulting in a decrease in yield in subsequent processes. Against this backdrop, how to effectively suppress particulate contamination while maintaining the necessary transmission efficiency has become a technical problem that has plagued the industry for many years. Summary of the Invention

[0005] This application provides an automated transport system for an integrated circuit production line, which aims to achieve fully automated and intelligent transport of materials such as wafer cassettes or photomasks on the integrated circuit production line, and solve the technical problems of low transport efficiency, poor space utilization, and difficulty in adapting to diverse process requirements in the prior art.

[0006] The first aspect of this application provides an automated transfer system for an integrated circuit production line, comprising:

[0007] The three-dimensional storage scheduling module is set on one side of the production line to store wafer cassettes or photomasks to be transported, and sends material outbound instructions to the vertical conveyor system according to the production cycle requirements.

[0008] The vertical conveying system is located below the three-dimensional storage scheduling module and is used to lift and transport the materials released by the three-dimensional storage scheduling module along the vertical direction of the production line workshop, and to transport the materials from the first plane where the three-dimensional storage scheduling module is located to the second plane that is flush with the floor of the clean room of the production line.

[0009] The horizontal conveying system is set on the second plane to receive materials conveyed by the vertical conveying system and guides the materials to move precisely in the horizontal direction according to the position information of the production equipment station, so as to transport the materials to the loading station of the target production equipment.

[0010] The production equipment docking module is set at the loading station of each production equipment. It is used to exchange materials with the horizontal conveying system, receive the materials delivered by the horizontal conveying system, and load the materials to the processing position of the production equipment to complete the material supply for the production process.

[0011] Furthermore, the three-dimensional storage scheduling module includes a multi-layer three-dimensional rack, a rack stacking mechanism, and an inventory management controller; the multi-layer three-dimensional rack is arranged in a vertical stacked manner, with several storage positions on each layer; the rack stacking mechanism is located at the front end of the multi-layer three-dimensional rack and is used to move in the width direction of the multi-layer three-dimensional rack to grab or place materials on the storage positions; the inventory management controller is used to record the material identification information on each storage position and generate material outbound instructions according to production cycle requirements, controlling the rack stacking mechanism to move the target material from the corresponding storage position to the material outbound port; the vertical conveying system is located directly below the material outbound port.

[0012] Furthermore, the vertical conveying system includes a vertical guide rail, a lifting platform, and a lifting drive device; the vertical guide rail is fixedly installed on the structural columns of the production line workshop and extends in the vertical direction; the lifting platform is slidably disposed on the vertical guide rail and is used to carry materials; the lifting drive device is disposed at the top or bottom end of the vertical guide rail and is used to drive the lifting platform to move up and down along the vertical guide rail, conveying materials from the first plane to the second plane; the horizontal conveying system is disposed on the second plane and is located below the lifting platform of the vertical conveying system.

[0013] Furthermore, the horizontal conveying system includes a track guidance system, a conveying trolley, and a central dispatch controller; the track guidance system is laid on the ground of the second plane and extends along a preset path, covering the loading stations of each production equipment; the conveying trolley is set on the track guidance system and is used to carry materials and move along the track guidance system; the central dispatch controller is used to receive material demand information sent by the production equipment docking module, calculate the optimal path from the current position to the target loading station, control the conveying trolley to travel along the optimal path, and convey the materials to the target loading station.

[0014] Furthermore, the track guidance system adopts a contactless power supply and signal transmission structure, including a guide rail body, a power supply coil laid inside the guide rail body, and a signal transmission antenna; the power supply coil is used to provide wireless charging power to the conveyor trolley; the signal transmission antenna is used to communicate bidirectionally with the central dispatch controller and report the position information of the conveyor trolley and the material status information in real time.

[0015] Furthermore, the conveying trolley adopts a bidirectional drive structure, including a main body, a drive wheel assembly mounted on the bottom of the main body, a material carrying mechanism mounted on the main body, and a vehicle control unit. The drive wheel assembly includes front drive wheels and rear drive wheels respectively located at both ends of the main body. The front drive wheels and rear drive wheels are driven by independent motors to realize the forward, backward, and in-situ turning of the main body. The material carrying mechanism includes a rotating chassis and a lifting mechanism. The rotating chassis is used to adjust the orientation angle of the material, and the lifting mechanism is used to lift the material to the target height. The vehicle control unit is used to receive motion commands from the central dispatch controller and control the drive wheel assembly and the material carrying mechanism to perform corresponding actions.

[0016] Furthermore, the production equipment docking module is installed at the loading station of each production equipment, including a docking platform, a position detection sensor, and a docking controller. The docking platform is located at the entrance of the loading station and is used to receive materials delivered by the horizontal conveyor system. The position detection sensor is used to detect the position offset and angular deviation of the material on the docking platform. The docking controller is used to adjust the height and angle of the docking platform according to the detection results of the position detection sensor to compensate for the position deviation of the material and ensure that the material is precisely aligned with the loading interface of the production equipment. After the production equipment docking module completes the position adjustment, it sends a material arrival signal to the production equipment to trigger the production equipment to perform automatic loading.

[0017] Furthermore, the automated transmission system for the integrated circuit production line described in this application also includes a central monitoring and management system; the central monitoring and management system is located in the monitoring room of the production line workshop and includes a data server, a display terminal, and an alarm device; the data server is used to collect and store the operating data of the three-dimensional storage scheduling module, the vertical conveying system, the horizontal conveying system, and the production equipment docking module; the display terminal is used to display the operating status of each module and the material transportation progress in a graphical interface; the alarm device is used to issue an audible and visual alarm signal when an abnormal state is detected to prompt maintenance personnel to handle the fault in a timely manner.

[0018] Furthermore, the operation method of the automatic transmission system for the integrated circuit production line described in this application includes the following steps: the three-dimensional storage scheduling module generates a material outbound instruction according to the production plan, and transfers the target material from the three-dimensional storage shelf to the material outbound port; after receiving the material, the vertical conveying system lowers the material from the first plane where the three-dimensional storage scheduling module is located to the receiving position of the horizontal conveying system on the second plane; the central scheduling controller of the horizontal conveying system calculates the optimal travel path according to the location information of the target production equipment, and controls the conveying trolley to transport the material to the loading station of the target production equipment along the optimal path; the production equipment docking module detects the positional deviation of the material and makes automatic adjustments to complete the material handover with the production equipment.

[0019] In one optional implementation, the inventory management controller of the three-dimensional storage scheduling module is also used to communicate with the main control system of the production line, receive production task orders issued by the main control system, and pre-transfer the required materials from the storage location to the pre-outbound location near the outbound outlet according to the material requirement list in the production task order, so as to shorten the waiting time for material outbound; when an urgent task order occurs, the inventory management controller prioritizes the processing of the urgent task order, interrupts the current outbound operation, and controls the shelf stacking mechanism to prioritize grabbing the materials corresponding to the urgent task order.

[0020] In one optional implementation, the central dispatch controller employs a dynamic path planning algorithm to dynamically adjust the travel path of the conveyor trolley based on the real-time operating status of each production device. When the target production device is busy, the central dispatch controller controls the conveyor trolley to wait in the buffer zone until the target production device is released, and then the material is conveyed to the target loading station. When the amount of waiting material in the buffer zone exceeds a preset threshold, the central dispatch controller sends a flow restriction command to the upstream vertical conveying system to suspend material outflow in order to avoid material accumulation in the buffer zone.

[0021] In one optional embodiment, the vertical conveying system is further equipped with a safety detection device, including an infrared beam sensor and a weight detection sensor. The infrared beam sensor is located at the upper and lower ends of the vertical guide rail and is used to detect whether there are any abnormal obstacles on the lifting platform. The weight detection sensor is located on the bearing surface of the lifting platform and is used to detect the actual weight of the material on the lifting platform. When the infrared beam sensor detects an abnormal obstacle, or when the actual weight detected by the weight detection sensor exceeds the tolerance range of the preset weight, the lifting drive device immediately stops operating and sends an abnormal alarm signal to the central monitoring and management system.

[0022] In one optional implementation, the production equipment docking module and the production equipment use a standardized communication interface, including a material type code, a unique material identifier, a target equipment number, and a loading timestamp information; the material type code is used to identify the category of the material; the unique material identifier is used to uniquely identify each material; the target equipment number is used to identify the target production equipment; the loading timestamp information is used to record the time the material is delivered; the production equipment executes the corresponding process program based on the received material information.

[0023] In an optional embodiment, the automatic transmission system of the integrated circuit production line described in this application is further provided with a backup transmission channel; when the central monitoring and management system detects a failure in the main transmission path of the horizontal transmission system, the backup transmission channel switches to the main transmission channel to take over the material transmission task; the backup transmission channel is laid on the side of the main transmission path, arranged in parallel with the main transmission path, and covers the loading station of key production equipment to ensure the continuous operation of key processes.

[0024] The automated transport system for the integrated circuit production line provided in this application, through the establishment of a three-dimensional storage scheduling module, a vertical conveying system, a horizontal conveying system, and a production equipment docking module, realizes fully automated transportation of materials from three-dimensional storage to production equipment loading, eliminating the need for manual intervention, significantly reducing labor costs, and improving the automation level of the production line. The three-dimensional storage scheduling module adopts a multi-layer three-dimensional rack structure, effectively utilizing the vertical space of the production line workshop, greatly increasing the storage capacity per unit area, and solving the problem of low storage space utilization in existing technologies. The vertical conveying system and the horizontal conveying system work together to achieve seamless transfer of materials between different planes, ensuring the continuity of transportation. The horizontal conveying system adopts a track-guided structure and a bidirectional drive trolley, achieving precise positioning and flexible turning of materials, and can adapt to the complex equipment layout in the production line workshop. The production equipment docking module is set at the loading station of each production equipment, which can automatically compensate for the positional deviation of materials, ensuring precise docking of materials with production equipment, improving loading efficiency and accuracy. The central monitoring and management system provides unified monitoring and management of each module, realizing visualized operation and maintenance management of the entire line, enabling timely detection and handling of faults, and ensuring the stable operation of the production line.

[0025] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0026] This invention achieves fully automated and intelligent material transportation on integrated circuit production lines through multi-level collaboration of three-dimensional storage, vertical conveying, horizontal conveying, and equipment docking. This significantly improves transmission efficiency and reliability, and effectively reduces labor costs and human error. The invention employs a multi-layered three-dimensional shelving structure, greatly improving storage space utilization and reducing unnecessary occupation of vertical space by the production line. It utilizes a dynamic path planning algorithm to flexibly adjust transportation paths based on the real-time status of production equipment, preventing material accumulation at bottleneck workstations. The invention is equipped with safety detection devices and backup transmission channels, significantly improving system safety and availability. Its modular architecture and standardized interfaces facilitate subsequent production line expansion and capacity upgrades, adapting to the development needs of the integrated circuit manufacturing industry's transformation towards intelligent manufacturing. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall technical solution of the automated transmission system for integrated circuit production lines proposed in this invention.

[0028] Figure 2 This is a schematic diagram illustrating the core principle of the collaborative operation between the three-dimensional storage scheduling module and the vertical conveying system in this invention.

[0029] Figure 3 This is a schematic diagram illustrating the interactive operation of the horizontal conveying system and the production equipment docking module in this invention.

[0030] Figure 4 This is a flowchart illustrating the process by which the central monitoring and management system of this invention performs unified monitoring and management of various modules. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Reference Figure 1 The system includes: a three-dimensional storage scheduling module, a vertical conveying system, a horizontal conveying system, and a production equipment docking module.

[0033] The three-dimensional storage scheduling module is located on one side of the production line to store wafer cassettes or photomasks to be transported and sends material release instructions to the vertical conveying system according to production cycle requirements. The vertical conveying system is located below the three-dimensional storage scheduling module and is used to lift and transport the materials released by the three-dimensional storage scheduling module along the vertical direction of the production line workshop, transporting the materials from the first plane where the three-dimensional storage scheduling module is located to the second plane, which is level with the cleanroom floor of the production line. The horizontal conveying system is located on the second plane and is used to receive the materials transported by the vertical conveying system and guide the materials to move precisely in the horizontal direction according to the position information of the production equipment station, transporting the materials to the loading station of the target production equipment. The production equipment docking module is located at the loading station of each production equipment and is used to exchange materials with the horizontal conveying system, receive the materials delivered by the horizontal conveying system, and load the materials into the processing position of the production equipment to complete the material supply for the production process.

[0034] In this embodiment, in the automated transport system of the integrated circuit production line, the three-dimensional storage scheduling module serves as the logistics starting point of the entire transport system. It is responsible for storing wafer cassettes or photomasks to be processed and generating material release instructions based on the production plan through the inventory management controller. When the main control system of the production line issues a production task order, the inventory management controller queries the material storage location in the three-dimensional storage rack according to the material requirement list in the task order, generates a material release instruction, and controls the rack stacking mechanism to move the target material from its corresponding storage location to the material release port. The rack stacking mechanism moves along the width of the multi-layer three-dimensional rack to grab the material and places it at the material release port, completing the release action. After the material is released, the three-dimensional storage scheduling module sends a material release signal to the vertical conveying system. Upon receiving the material, the vertical conveying system performs a descent conveying operation, lowering the material from the first plane (the height of the three-dimensional storage scheduling module) to the second plane (the height level with the cleanroom floor of the production line). The horizontal conveying system is located on the second plane, below the lifting platform of the vertical conveying system, and receives the material transferred from the lifting platform. The central dispatch controller of the horizontal conveyor system calculates the optimal path from the current location to the target loading station based on the location information of the target production equipment, and controls the conveyor trolley to travel along the optimal path, transporting the material to the loading station of the target production equipment. The production equipment docking module detects the positional deviation of the material and automatically adjusts it to complete the material handover with the production equipment, realizing automated material loading. This application, through the above-mentioned multi-level collaborative transmission mechanism, realizes fully automated transportation of materials from three-dimensional storage to production equipment loading, without manual intervention, significantly reducing labor costs and improving the automation level of the production line.

[0035] In one embodiment, this application also provides an automated conveying system for an integrated circuit production line. In this system, a three-dimensional storage scheduling module includes a multi-layer three-dimensional rack, a rack stacking mechanism, and an inventory management controller. The multi-layer three-dimensional rack is arranged in a vertical direction, and each layer of the rack has several storage positions. The rack stacking mechanism is located at the front end of the multi-layer three-dimensional rack and is used to move in the width direction of the rack to grab or place materials in the storage positions. The inventory management controller is used to record the material identification information of each storage position and generate material outbound instructions according to the production cycle requirements, and control the rack stacking mechanism to move the target material from the corresponding storage position to the material outbound port. The vertical conveying system is located directly below the material outbound port.

[0036] In this embodiment, the three-dimensional storage scheduling module adopts a multi-layer three-dimensional rack structure, stacked vertically to effectively utilize the vertical space of the production line workshop and significantly increase the storage capacity per unit area. The specific number of layers of the multi-layer three-dimensional rack is determined according to the height of the production line workshop and storage requirements. Each layer of the rack has several storage positions for placing wafer boxes or photomasks. The inventory management controller internally stores a management database of material storage positions, records the material identification information (such as material number, material type, storage time, etc.) of each storage position, and generates material outbound instructions according to the production plan. When outbound is required, the inventory management controller queries the storage location of the target material and sends a grabbing instruction to the rack stacking mechanism. After receiving the grabbing instruction, the rack stacking mechanism automatically moves to the storage position of the rack where the target material is located in the width direction of the multi-layer three-dimensional rack, grabs the material with a grabbing device (such as a gripper or suction cup), moves it in the width direction to the material outbound port, places the material at the material outbound port, and waits for the vertical conveying system to receive it. The material outlet is located at the bottom of the automated storage and dispatching module, directly opposite the entrance of the vertical conveyor system. After sliding down from the outlet, the material is picked up by the lifting platform of the vertical conveyor system. To shorten the waiting time for material outbound, the inventory management controller also communicates with the main control system of the production line, receives production task orders from the main control system, and pre-transfers the required materials from the storage location to the pre-outbound location near the outlet based on the material requirement list in the production task order. When an urgent task order occurs, the inventory management controller prioritizes the urgent task order, interrupts the current outbound operation, and controls the rack stacking mechanism to prioritize grabbing the materials corresponding to the urgent task order, ensuring the priority processing of urgent orders.

[0037] In one embodiment, this application also provides an automated conveying system for an integrated circuit production line. In this system, the vertical conveying system includes a vertical guide rail, a lifting platform, and a lifting drive device. The vertical guide rail is fixedly installed on the structural columns of the production line workshop and extends in the vertical direction. The lifting platform is slidably disposed on the vertical guide rail for carrying materials. The lifting drive device is disposed at the top or bottom of the vertical guide rail for driving the lifting platform to move up and down along the vertical guide rail, conveying materials from a first plane to a second plane. The horizontal conveying system is disposed on the second plane and located below the lifting platform of the vertical conveying system.

[0038] In this embodiment, the vertical conveying system is responsible for lowering and conveying materials from the first plane (high position) where the three-dimensional storage and scheduling module is located to the second plane (low position) level with the cleanroom floor of the production line, realizing the transfer of materials between different planes. Vertical guide rails are fixedly installed on the structural columns of the production line workshop to ensure installation accuracy and operational stability. The vertical guide rails extend vertically, and their length is determined based on the height difference between the first and second planes. A lifting platform is slidably mounted on the vertical guide rails and is driven by a lifting drive device to move up and down along the vertical guide rails. The lifting drive device can be driven by a servo motor or hydraulically, and is located at the top or bottom of the vertical guide rails, connected to the lifting platform via wire ropes or hydraulic rods. When the lifting drive device drives the lifting platform to descend, the lifting platform carries the material down along the vertical guide rails, conveying the material from the first plane to the second plane. After the lifting platform descends to the second plane, the conveyor trolley of the horizontal conveying system waits below the lifting platform. The material is transferred from the lifting platform to the conveyor trolley, and the horizontal conveying system continues to perform subsequent conveying tasks. To ensure safety during the lifting process, the vertical conveying system is also equipped with safety detection devices, including infrared beam sensors and weight detection sensors. The infrared beam sensors are located at the top and bottom of the vertical guide rails to detect any abnormal obstacles on the lifting platform. The weight detection sensors are located on the bearing surface of the lifting platform to detect the actual weight of the material on the lifting platform. When the infrared beam sensors detect an abnormal obstacle, or when the actual weight detected by the weight detection sensors exceeds the tolerance range of the preset weight, the lifting drive device immediately stops operating and sends an abnormal alarm signal to the central monitoring and management system.

[0039] In one embodiment, this application also provides an automated conveying system for an integrated circuit production line. In this system, the horizontal conveying system includes a track guide system, a conveying trolley, and a central dispatch controller. The track guide system is laid on the ground of a second plane and extends along a preset path, covering the loading stations of each production equipment. The conveying trolley is mounted on the track guide system and is used to carry materials and move along the track guide system. The central dispatch controller is used to receive material demand information sent by the production equipment docking module, calculate the optimal path from the current position to the target loading station, and control the conveying trolley to travel along the optimal path to convey the materials to the target loading station.

[0040] In this embodiment, the horizontal conveying system is set on the second plane (at the same height as the cleanroom floor of the production line) and is responsible for conveying materials from the receiving position of the vertical conveying system to the loading station of the target production equipment. The track guide system is laid on the ground of the second plane, extending along a preset path that covers the loading stations of each production equipment, forming a complete material conveying network. The track structure of the track guide system can be a grooved guide rail or an embedded guide rail, with navigation markers or magnetic strips inside the track to guide the direction of travel of the conveyor trolley. The conveyor trolley is mounted on the track guide system and is driven by a drive motor to move along the track guide system. The central dispatch controller dynamically calculates the optimal path from the current position to the target loading station based on the real-time operating status of each production equipment and controls the conveyor trolley to travel along the optimal path. When the target production equipment is busy, the central dispatch controller controls the conveyor trolley to wait in the buffer zone until the target production equipment is released before conveying materials to the target loading station. When the amount of waiting material in the buffer zone exceeds a preset threshold, the central dispatch controller sends a flow-limiting command to the upstream vertical conveying system to suspend material outflow to avoid material accumulation in the buffer zone. Dynamic path planning algorithms can flexibly adjust transportation routes based on the real-time operating status of each production device, thus avoiding the accumulation of materials at bottleneck workstations.

[0041] In one embodiment, this application also provides an automated transmission system for an integrated circuit production line. In this system, the track guidance system adopts a contactless power supply and signal transmission structure, including a guide rail body, a power supply coil laid inside the guide rail body, and a signal transmission antenna. The power supply coil is used to provide wireless charging power to the conveyor trolley. The signal transmission antenna is used to communicate bidirectionally with the central dispatch controller and report the position information of the conveyor trolley and the material status information in real time.

[0042] In this embodiment, the track guidance system adopts a contactless power supply and signal transmission structure, realizing wireless power supply and communication for the conveyor trolley. A power supply coil is laid inside the guide rail body. When the conveyor trolley travels to a specific section of the guide rail, it obtains electrical energy from the power supply coil through electromagnetic induction to power the drive motor and control unit of the conveyor trolley. This eliminates the need for power sources such as slip rings or cables, avoiding wire wear and safety hazards. A signal transmission antenna is also installed inside the guide rail body. The wireless communication module on the conveyor trolley communicates bidirectionally with the central dispatch controller through the signal transmission antenna, reporting the conveyor trolley's position information (position coordinates on the track), material status information (material type, material identification, etc.), and equipment status information (battery charge, motor temperature, etc.) in real time. The central dispatch controller monitors and dispatches the conveyor trolley in real time based on the received information. The contactless power supply and signal transmission structure improves the system's reliability and ease of maintenance.

[0043] In one embodiment, this application also provides an automated conveying system for an integrated circuit production line. In this system, the conveying trolley adopts a bidirectional drive structure, including a trolley body, a drive wheel assembly mounted on the bottom of the trolley body, a material carrying mechanism mounted on the trolley body, and a vehicle control unit. The drive wheel assembly includes a front drive wheel and a rear drive wheel respectively disposed at both ends of the trolley body. The front drive wheel and the rear drive wheel are driven by independent motors to realize the forward, backward, and in-situ turning of the trolley body. The material carrying mechanism includes a rotating chassis and a lifting mechanism. The rotating chassis is used to adjust the orientation angle of the material, and the lifting mechanism is used to lift the material to a target height. The vehicle control unit is used to receive motion commands from the central scheduling controller and control the drive wheel assembly and the material carrying mechanism to perform corresponding actions.

[0044] In this embodiment, the conveying trolley adopts a bidirectional drive structure, achieving flexibility and precision in material conveying. The drive wheel set includes front drive wheels and rear drive wheels respectively located at both ends of the trolley body. The front drive wheels and rear drive wheels are driven by independent motors. By controlling the speed and direction of the front drive wheels and rear drive wheels respectively, the trolley body can move forward, backward, and turn in place without the need for an additional steering mechanism, simplifying the structural design. The material carrying mechanism includes a rotating chassis and a lifting mechanism. The rotating chassis is installed on the upper part of the trolley body and is driven by a rotary motor. It can adjust the orientation angle of the material (0 degrees to 360 degrees) to adapt to the loading direction requirements of different production equipment. The lifting mechanism is installed below the rotating chassis and is driven by a lifting motor. It can lift the material to the target height (adjustable) for precise alignment with the loading station or docking platform of the production equipment. The vehicle control unit is built into the trolley body and is used to receive motion commands sent by the central dispatch controller via wireless communication. Based on the motion commands, it controls the drive wheel set and the material carrying mechanism to perform corresponding actions, realizing automated material conveying and precise docking.

[0045] In one embodiment, this application also provides an automatic conveying system for an integrated circuit production line. In this system, a production equipment docking module is installed at the loading station of each production equipment, including a docking platform, a position detection sensor, and a docking controller. The docking platform is installed at the entrance of the loading station and is used to receive materials delivered by the horizontal conveying system. The position detection sensor is used to detect the position offset and angular deviation of the material on the docking platform. The docking controller is used to adjust the height and angle of the docking platform according to the detection results of the position detection sensor to compensate for the position deviation of the material and make the material precisely aligned with the loading interface of the production equipment. After the production equipment docking module completes the position adjustment, it sends a material arrival signal to the production equipment to trigger the production equipment to perform an automatic loading action.

[0046] In this embodiment, the production equipment docking module is located at the loading station of each production piece of equipment. It is responsible for receiving materials delivered by the horizontal conveyor system and precisely loading the materials into the processing position of the production equipment. The docking platform is located at the entrance of the loading station and receives materials delivered by the conveyor trolley of the horizontal conveyor system. After the materials are placed on the docking platform, position detection sensors begin to detect the material's positional offset and angular deviation. The position detection sensors can be vision sensors (such as industrial cameras) or laser sensors. Through image processing or laser ranging technology, they acquire precise positional information of the material relative to the docking platform, including X-axis offset, Y-axis offset, Z-axis offset (height deviation), and angular deviation. Based on the detection results from the position detection sensors, the docking controller calculates the compensation amount, controls the lifting mechanism of the docking platform to fine-tune the height, and controls the rotating chassis to fine-tune the angle to compensate for the material's positional deviation, ensuring precise alignment between the material and the loading interface of the production equipment. After the position adjustment is completed, the docking controller sends a material arrival signal to the production equipment. The signal includes the material type code, the material's unique identifier, the target equipment number, and the loading timestamp. Based on the received material information, the production equipment executes the corresponding process program to complete the automatic loading of the material. The standardized communication interface ensures the accuracy and reliability of material information transmission.

[0047] In one embodiment, this application also provides an automated transmission system for an integrated circuit production line. In this system, a central monitoring and management system is set up in the monitoring room of the production line workshop, including a data server, a display terminal, and an alarm device. The data server is used to collect and store the operating data of the three-dimensional storage scheduling module, the vertical conveying system, the horizontal conveying system, and the production equipment docking module. The display terminal is used to display the operating status of each module and the material transportation progress in a graphical interface. The alarm device is used to issue audible and visual alarm signals when an abnormal state is detected to prompt maintenance personnel to handle the fault in a timely manner.

[0048] In this embodiment, the central monitoring and management system is located in the monitoring room of the production line workshop, responsible for the unified monitoring and management of the entire automated transmission system. The data server is connected to each module via industrial Ethernet or fieldbus, collecting and storing in real time the operational data of the three-dimensional storage scheduling module, vertical conveying system, horizontal conveying system, and production equipment docking module. This includes equipment operating status (standby, running, fault, etc.), material storage status (material type, quantity, storage location, etc.), material conveying status (current location, target location, estimated arrival time, etc.), and equipment maintenance information (maintenance cycle, fault records, etc.). The display terminal shows the operating status of each module and the material transport progress in a graphical interface, using a 3D view or 2D plan view to show the flow of materials throughout the transmission system. Maintenance personnel can intuitively monitor the operating status of the entire production line through the display terminal. An alarm device is installed inside the monitoring room. When the central monitoring and management system detects an abnormal state (such as equipment failure, material blockage, safety detection anomalies, etc.), it issues an audible and visual alarm signal to prompt maintenance personnel to handle the fault promptly. In addition, the central monitoring and management system is equipped with a backup transmission channel. When the main conveying path of the horizontal conveying system fails, the backup transmission channel will switch to the main transmission channel to take over the material conveying task. The backup transmission channel is laid on the side of the main conveying path and is arranged in parallel with the main conveying path, covering the loading station of key production equipment to ensure the continuous operation of key processes.

[0049] In one embodiment, this application also provides an automatic transmission system for an integrated circuit production line. In this system, the inventory management controller of the three-dimensional storage scheduling module is also used to communicate with the main control system of the production line, receive production task orders issued by the main control system, and pre-transfer the required materials from the storage location to the pre-outbound location near the outbound outlet according to the material requirement list in the production task order, so as to shorten the waiting time for material outbound. When an urgent task order occurs, the inventory management controller prioritizes the processing of the urgent task order, interrupts the current outbound operation, and controls the shelf stacking mechanism to prioritize grabbing the materials corresponding to the urgent task order.

[0050] In this embodiment, the inventory management controller communicates with the main control system of the production line, receiving production task orders from the main control system. These orders include a material requirement list (such as material number, material quantity, target production equipment, etc.). Upon receiving the production task order, the inventory management controller queries the storage location of the target materials based on the material requirement list and pre-transfers the required materials from their storage locations to pre-shipment locations near the outbound gate, shortening the material outbound waiting time and improving outbound efficiency. When an urgent task order occurs (such as an urgent expedited order or an abnormal material shortage on the production line), the inventory management controller immediately prioritizes the urgent task order, interrupting the current outbound operation and controlling the shelf stacking mechanism to prioritize grabbing the materials corresponding to the urgent task order, ensuring timely response to urgent orders. The priority processing mechanism adopts an interrupt priority design, with urgent task orders having a higher priority than ordinary task orders, ensuring the timely execution of critical production tasks.

[0051] In one embodiment, this application also provides an automatic transmission system for an integrated circuit production line. In this system, the central dispatch controller uses a dynamic path planning algorithm to dynamically adjust the travel path of the conveyor trolley according to the real-time operating status of each production device. When the target production device is busy, the central dispatch controller controls the conveyor trolley to wait in the buffer zone until the target production device is released, and then transports the material to the target loading station. When the number of waiting materials in the buffer zone exceeds a preset threshold, the central dispatch controller sends a flow restriction command to the upstream vertical conveying system to suspend material outflow in order to avoid material accumulation in the buffer zone.

[0052] In this embodiment, the central dispatch controller employs a dynamic path planning algorithm to dynamically calculate the optimal travel path based on the real-time operating status of each production device. The central dispatch controller maintains communication with the docking controllers of each production device to obtain the real-time operating status of each device (including idle, processing, and fault status) and the occupancy status of the loading stations. When the target production device is busy (performing a processing task), the central dispatch controller controls the conveyor trolley to wait in the buffer zone. The buffer zone is located on the path of the horizontal conveying system and has multiple buffer positions for temporarily storing waiting materials. After the target production device completes its current processing task and releases the material, the central dispatch controller selects the highest priority material from the buffer zone and controls the conveyor trolley to transport the material to the target loading station. When the number of waiting materials in the buffer zone exceeds a preset threshold (indicating that the processing efficiency of the target production device is lower than the material supply efficiency, and materials begin to accumulate), the central dispatch controller sends a flow-limiting command to the upstream vertical conveying system, requesting a pause or slowdown in material outflow to prevent excessive accumulation in the buffer zone and maintain overall transmission efficiency. The dynamic path planning algorithm can flexibly adjust the transportation path according to the real-time status of the production devices, avoiding material accumulation at bottleneck stations and improving overall transmission efficiency.

[0053] In one embodiment, this application also provides an automatic conveying system for an integrated circuit production line. In this system, the vertical conveying system is further equipped with a safety detection device, including an infrared beam sensor and a weight detection sensor. The infrared beam sensor is installed at the upper and lower ends of the vertical guide rail to detect whether there are any abnormal obstacles on the lifting platform. The weight detection sensor is installed on the bearing surface of the lifting platform to detect the actual weight of the material on the lifting platform. When the infrared beam sensor detects an abnormal obstacle, or when the actual weight detected by the weight detection sensor exceeds the tolerance range of the preset weight, the lifting drive device immediately stops operating and sends an abnormal alarm signal to the central monitoring and management system.

[0054] In this embodiment, the safety detection device of the vertical conveying system includes an infrared beam sensor and a weight detection sensor to ensure safety during the lifting process. The infrared beam sensor is installed at both ends of the vertical guide rail, with the transmitting and receiving ends facing each other. When the lifting platform passes by, the infrared beam is blocked by the platform, but the receiving end receives the signal normally. When there is an abnormal obstacle on the lifting platform (such as material tilting or falling), the infrared beam is blocked, the receiving end cannot receive the signal, and an abnormal alarm is triggered. The weight detection sensor is installed on the bearing surface of the lifting platform. It detects the actual weight of the material on the lifting platform in real time through a pressure sensor and compares it with a preset weight. When the actual weight exceeds the tolerance range of the preset weight (such as material slippage causing a weight reduction, or material stacking causing a weight increase), an abnormal alarm is immediately triggered. After the safety detection device detects an abnormality, the lifting drive immediately stops operating and sends an abnormal alarm signal to the central monitoring and management system. After receiving the alarm signal, the central monitoring and management system displays the fault information on the display terminal and issues an audible and visual alarm through the alarm device to prompt maintenance personnel to handle the situation promptly. The safety detection device significantly improves the safety and reliability of the system.

[0055] In one embodiment, this application also provides an automated transfer system for an integrated circuit production line. In this system, the production equipment docking module and the production equipment adopt a standardized communication interface, including a material type code, a unique material identifier, a target equipment number, and loading timestamp information. The material type code is used to identify the category of the material (such as a wafer cassette, a mask, etc.). The unique material identifier is used to uniquely identify each material. The target equipment number is used to identify the target production equipment. The loading timestamp information is used to record the time when the material is delivered. The production equipment executes the corresponding process program according to the received material information.

[0056] In this embodiment, a standardized communication interface is used between the production equipment docking module and the production equipment to ensure the accuracy and reliability of material information transmission. The standardized communication interface includes the following information fields: material type code (used to identify the material category, such as "WP" for wafer cassettes, "MP" for photomasks, etc.), unique material identifier (used to uniquely identify each material, in the form of a barcode or RFID tag, with each material corresponding to a unique number), target equipment number (used to identify the target production equipment, using a unique identifier based on the equipment number), and loading timestamp information (used to record the material delivery time, accurate to the millisecond level). After receiving the material arrival signal, the production equipment queries the corresponding process program (such as processing parameters, process flow, etc.) based on the material information, executes the corresponding automatic loading action, and loads the material to the processing position. The standardized communication interface facilitates integration with different types of production equipment, improving the system's adaptability and scalability.

[0057] In one embodiment, this application also provides an automatic transmission system for an integrated circuit production line. In this system, a backup transmission channel is also provided. When the central monitoring and management system detects a failure in the main conveying path of the horizontal conveying system, the backup transmission channel switches to the main transmission channel to take over the material conveying task. The backup transmission channel is laid on the side of the main conveying path and arranged in parallel with the main conveying path, covering the loading station of key production equipment to ensure the continuous operation of key processes.

[0058] In this embodiment, to improve the reliability and availability of the system, the automated conveying system also includes a backup conveying channel. The backup conveying channel is laid laterally to the main conveying path, running parallel to it. The path covers the loading stations of critical production equipment (such as core process equipment and high-value production equipment), ensuring that critical processes are not interrupted due to failures in the main conveying path. When the central monitoring and management system detects a failure in the main conveying path of the horizontal conveying system (such as track damage or conveyor trolley malfunction), it activates the backup conveying channel contingency plan, switching the backup channel to the main conveying channel to take over the material conveying task. Simultaneously, a fault alarm is sent to maintenance personnel, prompting them to promptly repair the main conveying channel. The backup conveying channel significantly improves the system's safety and availability, ensuring the continuous operation of critical processes.

[0059] In one embodiment, see Figures 1 to 4 As shown, Figure 1 This is a schematic diagram of the overall technical solution architecture of the automated transmission system for integrated circuit production lines proposed in this invention; Figure 2 This is a schematic diagram illustrating the core principle framework of the collaborative operation between the three-dimensional storage scheduling module and the vertical conveying system in this invention. Figure 3 This is a flowchart illustrating the main process framework for the interactive operation of the horizontal conveying system and the production equipment docking module in this invention. Figure 4 This is a structural block diagram of the central monitoring and management system in this invention, which performs unified monitoring and management of each module.

[0060] The integrated circuit production line automated transport system proposed in this application achieves fully automated material transport from three-dimensional storage to production equipment by setting up a three-dimensional storage scheduling module, a vertical conveying system, a horizontal conveying system, and a production equipment docking module. This eliminates the need for manual intervention, significantly reducing labor costs and increasing the automation level of the production line. The three-dimensional storage scheduling module adopts a multi-layer three-dimensional rack structure, effectively utilizing the vertical space of the production line workshop and greatly increasing the storage capacity per unit area, solving the problem of low storage space utilization in existing technologies. The vertical and horizontal conveying systems work together to achieve seamless material transfer between different planes, ensuring continuous transport. The horizontal conveying system uses a track-guided structure and bidirectional drive trolleys to achieve precise material positioning and flexible turning, adapting to complex equipment layouts within the production line workshop. The production equipment docking module is located at the loading station of each production equipment, automatically compensating for material positional deviations to ensure precise docking between materials and production equipment, improving loading efficiency and accuracy. The central monitoring and management system provides unified monitoring and management of all modules, achieving visualized operation and maintenance management of the entire line, enabling timely detection and handling of faults, and ensuring the stable operation of the production line.

[0061] Compared with existing technologies, the advantages and positive effects of this invention are as follows: This invention achieves fully automated and intelligent transportation of materials on the integrated circuit production line through multi-level collaboration of three-dimensional storage, vertical conveying, horizontal conveying, and equipment docking, significantly improving transmission efficiency and reliability, and effectively reducing labor costs and human error; This invention adopts a multi-layer three-dimensional rack structure, greatly improving the utilization rate of storage space and reducing unnecessary occupation of vertical space by the production line; This invention uses a dynamic path planning algorithm, which can flexibly adjust the transportation path according to the real-time status of production equipment, avoiding the accumulation of materials at bottleneck workstations; This invention is equipped with safety detection devices and backup transmission channels, significantly improving the safety and availability of the system; The overall modular architecture and standardized interfaces of this invention facilitate subsequent production line expansion and capacity upgrades, and can adapt to the development needs of the integrated circuit manufacturing industry's transformation towards intelligent manufacturing.

[0062] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automated conveying system for an integrated circuit production line, characterized in that, include: The three-dimensional storage scheduling module is used to store wafer cassettes or photomasks to be transported and to send material outbound instructions to the vertical conveying system according to production cycle requirements. The vertical conveying system is located below the three-dimensional storage and scheduling module. It is used to receive the materials released by the three-dimensional storage and scheduling module and transport the materials from the first plane to the second plane along the vertical direction of the production line workshop. The horizontal conveying system, located on the second plane, is used to receive materials conveyed by the vertical conveying system and guide the materials to move horizontally to the loading station of the target production equipment according to the location information of the production equipment station. The production equipment docking module is set at the loading station of each production equipment to transfer materials with the horizontal conveying system and load the materials to the processing position of the production equipment.

2. The automated conveying system for an integrated circuit production line according to claim 1, characterized in that, The three-dimensional storage scheduling module includes multi-layer three-dimensional shelves, shelf stacking mechanism, and inventory management controller; the multi-layer three-dimensional shelves are arranged vertically, and each layer of the three-dimensional shelves has several storage positions; the shelf stacking mechanism is located at the front end of the multi-layer three-dimensional shelves and is used to move in the width direction of the multi-layer three-dimensional shelves to grab or place materials in the storage positions; the inventory management controller is used to record the material identification information of each storage position and generate material outbound instructions according to the production cycle requirements, and control the shelf stacking mechanism to move the target material from the corresponding storage position to the material outbound port; the vertical conveying system is located directly below the material outbound port.

3. The automated conveying system for an integrated circuit production line according to claim 1, characterized in that, The vertical conveying system includes a vertical guide rail, a lifting platform, and a lifting drive device. The vertical guide rail is fixedly installed on the structural columns of the production line workshop and extends vertically. The lifting platform is slidably mounted on the vertical guide rail and is used to carry materials. The lifting drive device is located at the top or bottom of the vertical guide rail and is used to drive the lifting platform to move up and down along the vertical guide rail, conveying materials from a first plane to a second plane. The horizontal conveying system is located on the second plane and below the lifting platform of the vertical conveying system.

4. The automated conveying system for an integrated circuit production line according to claim 1, characterized in that, The horizontal conveying system includes a track guidance system, a conveying trolley, and a central dispatch controller. The track guidance system is laid on the ground of the second plane and extends along a preset path, covering the loading stations of each production equipment. The conveying trolley is set on the track guidance system to carry materials and move along the track guidance system. The central dispatch controller is used to receive material demand information sent by the production equipment docking module, calculate the optimal path from the current position to the target loading station, control the conveying trolley to travel along the optimal path, and convey the materials to the target loading station.

5. The automated transfer system for an integrated circuit production line according to claim 4, characterized in that, The track guidance system adopts a contactless power supply and signal transmission structure, including a guide rail body, a power supply coil laid inside the guide rail body, and a signal transmission antenna; the power supply coil is used to provide wireless charging power to the conveyor trolley; the signal transmission antenna is used to communicate bidirectionally with the central dispatch controller and report the position information of the conveyor trolley and the material status information in real time.

6. The automated conveying system for an integrated circuit production line according to claim 4, characterized in that, The conveying trolley adopts a bidirectional drive structure, including a main body, a drive wheel assembly mounted on the bottom of the main body, a material carrying mechanism mounted on the main body, and a vehicle control unit. The drive wheel assembly includes a front drive wheel and a rear drive wheel respectively located at both ends of the main body. The front drive wheel and the rear drive wheel are driven by independent motors to realize the forward, backward, and in-situ turning of the main body. The material carrying mechanism includes a rotating chassis and a lifting mechanism. The rotating chassis is used to adjust the orientation angle of the material, and the lifting mechanism is used to lift the material to the target height. The vehicle control unit is used to receive motion commands from the central dispatch controller and control the drive wheel set and material carrying mechanism to perform corresponding actions.

7. The automated conveying system for an integrated circuit production line according to claim 1, characterized in that, The production equipment docking module is installed at the loading station of each production equipment and includes a docking platform, a position detection sensor, and a docking controller. The docking platform is located at the entrance of the loading station and is used to receive materials delivered by the horizontal conveyor system. The position detection sensor is used to detect the position offset and angular deviation of the material on the docking platform. The docking controller is used to adjust the height and angle of the docking platform according to the detection results of the position detection sensor to compensate for the position deviation of the material and ensure that the material is precisely aligned with the loading interface of the production equipment. After the production equipment docking module completes the position adjustment, it sends a material arrival signal to the production equipment to trigger the production equipment to perform automatic loading.

8. The automated conveying system for an integrated circuit production line according to claim 1, characterized in that, It also includes a central monitoring and management system; the central monitoring and management system is set up in the monitoring room of the production line workshop, including a data server, a display terminal and an alarm device; the data server is used to collect and store the operating data of the three-dimensional storage scheduling module, the vertical conveying system, the horizontal conveying system and the production equipment docking module; the display terminal is used to display the operating status of each module and the material transportation progress in a graphical interface; the alarm device is used to issue an audible and visual alarm signal when an abnormal state is detected, so as to prompt the operation and maintenance personnel to deal with the fault in a timely manner.

9. The automated conveying system for an integrated circuit production line according to claim 2, characterized in that, The inventory management controller is also used to communicate with the main control system of the production line, receive production task orders issued by the main control system, and, according to the material requirement list in the production task order, pre-transfer the required materials from the storage location to the pre-outbound location near the outbound port in order to shorten the waiting time for material outbound. When an urgent task order occurs, the inventory management controller prioritizes processing the urgent task order, interrupts the current outbound operation, and controls the rack stacking mechanism to prioritize grabbing the materials corresponding to the urgent task order.

10. The automated conveying system for an integrated circuit production line according to claim 4, characterized in that, The central dispatch controller employs a dynamic path planning algorithm to dynamically adjust the travel path of the conveyor trolley based on the real-time operating status of each production device. When the target production device is busy, the central dispatch controller controls the conveyor trolley to wait in the buffer zone until the target production device is released before conveying the material to the target loading station. When the amount of waiting material in the buffer zone exceeds a preset threshold, the central dispatch controller sends a flow restriction command to the upstream vertical conveying system to suspend material outflow in order to avoid material accumulation in the buffer zone.

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