A micro-hole repairing tool for repairing a nozzle orifice and processing a semiconductor precision micro-hole

Abstract

The application discloses a kind of micropore repair tools, belong to the technical field of precision micropore repair processing.The core of the device relies on body microscope to realize accurate positioning, electron microscope is used for high-definition observation and video shooting record, cooperate precision bench drill, micron level drill bit, multidimensional adjustment sliding table and down pressure height table, realize 0.02mm level high-precision feeding control.The application is mainly used for the accurate dredging repair of single blockage nozzle of industrial inkjet nozzle, solves the problem of nozzle single hole failure and scrap, and can be applied to the processing, dredging and repair of semiconductor precision micropore device and small precision hole piece.The application is accurate in positioning, controllable in feeding, and can record the operation process in real time with high definition, greatly improves the precision, safety and traceability of micropore repair, and is widely applicable.

Description

Technical Field

[0001] This invention relates to the field of precision micro-hole processing and repair technology, and in particular to a micro-hole repair tool for unclogging and repairing nozzle orifices and for precision micro-hole processing of semiconductors. Background Technology

[0002] Industrial inkjet printer nozzles, semiconductor microdevices, and precision fluid components all possess micron-sized pore structures. Among these, industrial printer nozzles, with their extremely small orifice diameters, are highly susceptible to clogging during use. Current nozzle cleaning methods, such as ultrasonic cleaning and immersion cleaning, are only effective for large-area blockages and cannot precisely unclog individual nozzles. Manual unclogging can easily cause orifice enlargement and damage to the orifice walls, directly leading to the complete failure of the printhead and resulting in extremely high repair costs.

[0003] Semiconductor precision micro-hole devices have stringent requirements for processing and repair precision. Conventional drilling and unclogging equipment cannot achieve micron-level precise positioning and micro-feeding. Existing precision equipment mostly uses a single observation lens and lacks a dual-mode observation structure of main positioning + high-definition recording. The operation process cannot be visualized and recorded, and the repair and processing lacks traceability, making it difficult to meet the needs of high-precision repair and process recording.

[0004] Therefore, there is an urgent need for a dedicated micropore repair tool that uses a stereomicroscope for primary positioning and an electron microscope for high-definition recording. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a micropore repair tool. It uses a stereo microscope as the core positioning and observation component, an electron microscope for high-definition magnification observation and recording of operation videos, and a precision feed and multi-dimensional displacement adjustment structure to achieve high-precision micropore unblocking and repair at the 0.02mm level. It can accurately repair single blocked nozzle holes and is also compatible with semiconductor precision micropore processing and repair.

[0006] The present invention provides a micropore repair tool, including a stereo microscope (01), an electron microscope (02), a pressure height gauge (03), a height gauge (04), a left and right adjustment slide (05), a front and back adjustment slide (06), a bench drill (12), a drill bit (10), and a workpiece platform (11).

[0007] The stereomicroscope (01) is the main positioning and observation component of the device, used by operators to accurately locate the blocked micropores and align them with the repair position;

[0008] The electron microscope (02) is an auxiliary observation component, used only for high-definition magnified observation of the micropore area and video recording of the operation process, and does not participate in the positioning operation;

[0009] The pressure height gauge (03) is used to control the drill bit feed depth, and the feed accuracy is controlled within 0.02mm;

[0010] The height gauge (04) is used to display the feed displacement in real time;

[0011] The left and right adjustment slide (05) and the front and back adjustment slide (06) are installed at the bottom of the workpiece platform (11) and are used to drive the workpiece to achieve precise left and right and front and back displacement adjustment.

[0012] The bench drill (12) is a drilling and unblocking power component. A drill bit (10) is installed at its output end. The drill bit diameter accuracy is 0.02mm, and the hole diameter accuracy can be repaired up to 0.03mm.

[0013] The workpiece platform (11) is used to place the nozzle or semiconductor microporous workpiece to be repaired.

[0014] Furthermore, the device is equipped with a final assembly station, a main observation and positioning station, a drilling and repair station, and a precision magnification and schematic diagram station, as shown in the attached diagram. Figures 1-4 ;

[0015] Furthermore, the pressure height gauge (03) is equipped with a partially enlarged schematic structure to visually demonstrate the 0.02mm level precision feed control accuracy.

[0016] During operation, the nozzle or semiconductor workpiece to be repaired is fixed on the workpiece platform (11); the operator uses a stereo microscope (01) to accurately locate the blocked nozzle / microhole, and adjusts the workpiece position by adjusting the left and right sliding table (05) and the front and back sliding table (06) to make the microhole and the drill bit accurately aligned.

[0017] The electron microscope (02) is set to high-definition mode to magnify the micropore area in real time and capture the operation video to preserve the process;

[0018] Start the bench drill (12), and control the drill bit (10) to feed micro-feed by pressing down the height gauge (03) to clear the blocked microhole with an accuracy of 0.02mm. The feed depth is monitored in real time by the height gauge (04) to avoid excessive feed and damage to the microhole wall, and complete the clearing and repair of a single nozzle.

[0019] Compared with the prior art, this application has at least the following beneficial technical effects:

[0020] 1. This invention uses a stereomicroscope for primary positioning, while an electron microscope is used only for high-definition observation and video recording. The division of labor is clear, and the positioning is precise and stable, solving the problem that a single lens cannot simultaneously achieve both precise positioning and high-definition recording.

[0021] 2. The feed accuracy can reach 0.02mm, and the drill bit accuracy is 0.02mm. It can accurately unclog individual nozzle holes, avoid hole enlargement and hole wall damage, and significantly reduce the nozzle scrap rate.

[0022] 3. Electron microscopes can capture high-definition video of the repair process, making the repair process visible and traceable, which is suitable for the process preservation requirements of precision semiconductor device manufacturing.

[0023] 4. With its compact structure and convenient adjustment, it can be used for micro-hole repair of industrial nozzles, as well as for micro-hole processing and unclogging of semiconductor micro-devices and precision fluid components, making it widely applicable. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the main observation and positioning station structure of the present invention;

[0026] Figure 2 This is a schematic diagram of the drilling repair station structure of the present invention;

[0027] Figure 3 This is a magnified schematic diagram of the workstation structure of the present invention.

[0028] Figure 4 This is a schematic diagram of the overall assembly structure of the present invention;

[0029] Figure reference numerals: 01-stereo microscope, 02-electron microscope, 03-press down height gauge, 04-height gauge, 05-left and right adjustment slide, 06-front and rear adjustment slide, 10-drill bit, 11-workpiece platform, 12-bench drill. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] The present invention will now be described in further detail with reference to the accompanying drawings.

[0032] This embodiment provides a micro-hole repair tool, which is mainly used for unclogging and repairing single-hole blockages in industrial inkjet printer heads, and can also be used for the processing and repair of semiconductor precision micro-hole devices.

[0033] Includes a stereo microscope (01), an electron microscope (02), a downward pressure height gauge (03), a height gauge (04), a left-right adjustment slide (05), a front-back adjustment slide (06), a bench drill (12), a drill bit (10), and a workpiece platform (11);

[0034] The stereomicroscope (01) is fixed to the upper part of the frame and serves as the only main positioning component. The operator can directly visually position and block the micropores through the stereomicroscope.

[0035] The electron microscope (02) is mounted obliquely on the side of the frame, with the lens aimed at the workpiece working area. It is only used for high-definition magnified observation and shooting repair videos, and is not used for positioning.

[0036] The vertical feed of the drill bit is controlled by the pressure height gauge (03), with a feed accuracy of ±0.02mm; the height gauge (04) displays the feed displacement in real time.

[0037] The bottom of the workpiece platform (11) is equipped with left and right and front and back adjustment slides to realize micron-level displacement adjustment of the workpiece;

[0038] The bench drill (12) is installed on the upper part of the frame, and the lower end is equipped with a precision drill bit with a diameter of 0.02mm, which can achieve hole diameter repair operation of 0.03mm.

[0039] Work process:

[0040] 1. Workpiece clamping: Fix the clogging nozzle to the workpiece platform;

[0041] 2. Precise positioning: Visually inspect the drill bit with a stereo microscope and adjust the dual-dimensional slide to align it with the blocked nozzle.

[0042] 3. High-definition recording: Turn on the electron microscope to capture high-definition video of the operation in real time;

[0043] 4. Micro-feeding: Start the bench drill and press down the height gauge to control the micro-feeding at the 0.02mm level to unclog the blocked micropores;

[0044] 5. Repair completed, individual nozzle cleared, nozzle can continue to be used normally.

[0045] This embodiment enables precise repair of a single nozzle hole, avoiding overall scrapping, while meeting the high precision and traceability requirements of precision micro-hole processing for semiconductor devices.

[0046] The above description of the embodiments is provided to enable those skilled in the art to understand and use this application. It will be apparent to those skilled in the art that various modifications can be made to these embodiments, and the general principles described herein can be applied to other embodiments without inventive effort. Therefore, this application is not limited to the above embodiments, and any improvements and modifications made by those skilled in the art based on the disclosure of this application without departing from the scope of this application should be within the protection scope of this application.

Claims

1. A micropore repair tool, characterized in that, Includes a stereo microscope (01), an electron microscope (02), a downward pressure height gauge (03), a height gauge (04), a left-right adjustment slide (05), a front-back adjustment slide (06), a bench drill (12), a drill bit (10), and a workpiece platform (11); The stereomicroscope (01) is the main positioning and observation component, used to locate the micropores to be repaired; The electron microscope (02) is an auxiliary observation component used for high-definition observation of micro-holes and video recording of operations, and does not participate in positioning; The pressure height gauge (03) is used to control the drill bit feed depth, with a feed accuracy of 0.02 mm; The height gauge (04) is used to display the feed displacement in real time; The left and right adjustment slide (05) and the front and back adjustment slide (06) are located at the bottom of the workpiece platform (11) and are used to drive the workpiece to adjust its left and right and front and back displacement. The output end of the bench drill (12) is connected to the drill bit (10), the drill bit accuracy is 0.02mm, and the repairable hole diameter accuracy is 0.03mm; The workpiece platform (11) is used to place the nozzle or semiconductor microporous workpiece to be repaired.

2. The micropore repair tool according to claim 1, characterized in that, It includes four work stations: main observation and positioning station, drilling and repair station, precision magnification and schematic diagram station, and overall assembly station. The main observation and positioning station displays a stereo microscope, an electron microscope, and a two-dimensional sliding stage structure. The drilling repair station showcases the combined structure of a bench drill, stereo microscope, and mobile platform. The magnified schematic diagram of the workstation shows the precision control structure for drill bits and workpiece micro-holes. The overall assembly station displays the integrated structure of all components.

3. The micropore repair tool according to claim 1, characterized in that, The downpressure height gauge (03) is equipped with a partially enlarged schematic structure to demonstrate the precision feed control accuracy of 0.02mm.

4. A micropore repair tool according to claim 1, characterized in that, This tool is used for precise unclogging and repair of single blocked nozzles in industrial inkjet printheads, or for the micro-hole processing and repair of precision micro-hole devices in semiconductors.

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