Six-axis force sensor

Abstract

A six-dimensional force sensor with high manufacturability and compact structure, comprising: a central force bearing; a peripheral force bearing coaxially located at the periphery of the central force bearing; at least three cantilever beams integrally connecting the central force bearing and the peripheral force bearing in a transverse plane; and a printed conductive circuit arranged insulatively and at least partially on the axial top end surface of the cantilever beam; for each cantilever beam: the axial two end surfaces are provided with a total of eight strain resistors in four groups of four, each group of strain resistors including two strain resistor pairs; the two strain resistor pairs of the first group of strain resistors are symmetrically arranged at the axial two ends, and the two strain resistors in each strain resistor pair of the first group of strain resistors are symmetrically arranged on both sides of the radial center line of the cantilever beam, which forms three Wheatstone full bridges for measuring three orthogonal force components; the second group of strain resistors is opposite to the first group, which forms three Wheatstone full bridges for measuring three orthogonal moment components of the force.

Description

Technical Field

[0001] This application relates to the field of sensor technology, specifically to a six-dimensional force sensor. Background Technology

[0002] Six-dimensional force sensors are core components for precise force control in fields such as robotics, advanced manufacturing, and biomechanics. Traditional six-dimensional force sensors are mostly designed based on strain gauge principles. Their typical structure includes an elastomer, upper and lower end caps, and a connecting flange. External forces are calculated by measuring the micro-strain generated by a deformable beam under stress. The traditional approach involves attaching strain gauges to the four surfaces of the deformable beam (top, bottom, left, and right). The differential tensile and compressive strains generated on each surface under different directional forces / torques are utilized, and theoretical decoupling of the six-dimensional force / torque is achieved by acquiring four signals. However, this traditional technical solution is not designed for mass production and still suffers from the following problems: 1. High manufacturing costs and reliance on manual operation: Four-surface mount technology requires stringent precision, necessitating skilled technicians to manually position, bond, and solder the sensors under a microscope. This manual operation leads to significant individual sensor variations, requiring subsequent compensation and calibration to be performed individually, making batch calibration difficult and drastically increasing R&D and production costs. 2. Due to structural design limitations, the volume is difficult to compress. In order to reserve space for manual mounting and welding, the beam spacing and external dimensions must be enlarged. At the same time, it is also necessary to accommodate complex wiring paths, which leads to an increase in both the radial dimension and axial thickness of the sensor, making it difficult to meet the requirements of modern robots for lightweight and compact installation. 3. The wiring is complex and lacks reliability. Each strain gauge requires at least two leads, resulting in eight leads for a single beam. The number of leads increases exponentially with multi-beam structures. Cables must pass through and be secured within the narrow elastic body to prevent breakage or wear under stress and deformation. Dense solder joints and bends are potential failure points, easily leading to fatigue fracture or poor contact due to vibration and bending during high-frequency reciprocating motion, affecting long-term reliability.

[0003] In summary, while traditional solutions have laid the technical foundation for six-dimensional force measurement, their complex processes, design limitations, and the resulting problems of high cost, large size, and low reliability make them unsuitable for the urgent needs of modern industries for high-performance, miniaturized sensors. Summary of the Invention

[0004] In view of the shortcomings of the prior art, this application aims to provide a six-dimensional force sensor to solve at least one of the above-mentioned defects.

[0005] A six-dimensional force sensor, comprising: Central load-bearing component; The outer bearing portion is located coaxially around the central bearing portion; At least three cantilever beams integrally connecting the central load-bearing part and the peripheral load-bearing part in the transverse plane; And printed conductive lines, which are insulated and at least partially arranged on the axial top surface of the cantilever beam; Specifically, for each cantilever beam: a total of eight strain gauges, four in each group, are provided on the surfaces of both axial ends. Each group of strain gauges includes two pairs of strain gauges. The two pairs of strain gauges in the first group are symmetrically arranged at both axial ends, and the two strain gauges in each pair of the first group are symmetrically arranged on both sides of the radial centerline of the cantilever beam. The two pairs of strain gauges in the second group are symmetrically arranged on both sides of the radial centerline, and the two strain gauges in each pair of the second group are symmetrically arranged at both axial ends. With the connection of the conductive line and / or external circuit, each of the strain gauges forms a Wheatstone half-bridge, and two Wheatstone half-bridges in the same group form a Wheatstone full-bridge; the three Wheatstone full-bridges formed by the first group of strain gauges on the three cantilever beams are respectively used to measure the three orthogonal force components of the force exerted by the peripheral load-bearing part on the central load-bearing part, and the three Wheatstone full-bridges formed by the second group of strain gauges on the three cantilever beams are respectively used to measure the three orthogonal torque components of the force.

[0006] Preferably, the impedance direction of the strain gauge to the current is parallel to the radial centerline.

[0007] Preferably, in the first group of strain gauges, two strain gauges on the same end but different pairs form two opposite arms of the corresponding Wheatstone bridge; in the second group of strain gauges, two strain gauges on the same side but different pairs form two opposite arms of the corresponding Wheatstone bridge.

[0008] Preferably, the cantilever beam includes a radial beam extending along the radial centerline and two tangential beams extending integrally from the radial outer ends of the radial beams along the radial centerline to both sides to the peripheral load-bearing portion, and the strain resistors are arranged on the axial top surface of the tangential beams.

[0009] Preferably, the strain resistors are all disposed on the axial end face of the corresponding radial beam of the cantilever beam; the conductive circuit includes conductive circuit units printed on the axial end faces of the corresponding radial beams; on the axial end face of each radial beam: the conductive circuit unit includes five pads and five radial traces arranged side by side at intervals perpendicular to the radial center line for electrical connection with external circuits, and the five pads are electrically connected to the four strain resistors on the corresponding axial end face of the corresponding radial beam through the five radial traces.

[0010] Preferably, on the axial end face of each radial beam: five of the pads are disposed on the corresponding axial end face of the radial beam near the radially outer edge portion.

[0011] Preferably, on the axial end face of each radial beam: one of the radial traces extends along the radial centerline, and the radial inner ends of two of the strain resistors in the first group are each directly connected to the radial trace from the tangential sides of the radial trace through a tangential trace.

[0012] Preferably, the strain gauge is a thick-film resistor, and the strain gauges at the same axial end and the corresponding portions of the conductive lines are arranged on the same transverse plane.

[0013] Preferably, the peripheral load-bearing portion includes a plurality of island-shaped portions arranged interlaced with the cantilever beam in the circumferential direction; the circumferentially adjacent ends of every two circumferentially adjacent island-shaped portions are integrally connected by a circumferential connecting portion, and a hollow gap is left between the radially inner side of the circumferential connecting portion and the radially outer end of the cantilever beam.

[0014] Preferably, there are four cantilever beams, which are arranged at equal angular intervals in the circumferential direction; the six Wheatstone bridges on three of the cantilever beams are used to measure the six force-moment vectors respectively; the two Wheatstone bridges on the other cantilever beam are used to correct or back up any one or two of the six force-moment vectors.

[0015] The six-dimensional force sensor of this invention measures six-dimensional force and torque using a thick-film resistive bridge specially provided on the shaft end surface of a metal elastic element, exhibiting excellent performance. Simultaneously, the thick-film process, sintering the sensor onto the two shaft end planes, avoids the difficulties of stress-sensitive unit patching and the degradation during use, while improving mass production capacity and product consistency, resulting in strong manufacturability. Furthermore, the conductive lines printed on the shaft end surface enhance system integration and compactness, reducing wiring difficulties and overall size. The elastomer structure is simple and can be mass-produced using precision cutting or precision die casting processes, reducing production costs and ensuring consistent machining dimensions. The consistency of the thick-film printing process ensures highly stable sensitive unit characteristics within the same batch of sensors, providing a basis for batch calibration. In applications where high accuracy is not required, the calibrated decoupling matrix can be directly transferred to sensors in the same batch to be calibrated, further simplifying the calibration process and reducing production costs. Attached Figure Description

[0016] Figure 1 This is a front view of a six-dimensional force sensor according to a preferred embodiment.

[0017] Figure 2 This is a rear view of a six-dimensional force sensor according to a preferred embodiment.

[0018] Figure 3 for Figure 1 The diagram shows a partial structural schematic of the six-dimensional force sensor.

[0019] Figure 4 for Figure 1 The diagram shows a partial structural schematic of the six-dimensional force sensor.

[0020] Figure 5 This is a schematic diagram of the bridge configuration of the strain resistors in a preferred embodiment of a six-dimensional force sensor. Detailed Implementation

[0021] The technical solution of this application will now be clearly and completely described with reference to the accompanying drawings. The following embodiments are exemplary and are only used to explain this application, and should not be construed as limiting this application. In the following description, the same reference numerals are used to denote the same or equivalent elements, and repeated descriptions are omitted.

[0022] In the description of this application, it should be understood that the terms "upper," "lower," "inner," "outer," "left," and "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the equipment or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the prepositions "first," "second," and "third," etc., are only used for the purpose of distinguishing the modified objects, and should not be construed as indicating or implying relative importance.

[0023] Furthermore, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] It should also be further understood that the term "and / or" as used in this application specification and the corresponding claims refers to any combination of one or more of the listed items and all possible combinations.

[0025] like Figures 1-4As shown, in the first embodiment, the six-dimensional force sensor includes an integrally connected metal elastic element 1. The metal elastic element 1 includes a central load-bearing portion 11 arranged axially along the longitudinal direction, an outer load-bearing portion 12 coaxially surrounding the central load-bearing portion 11, and three cantilever beams 13a-13c integrally connecting the central load-bearing portion 11 and the outer load-bearing portion 12 radially. These three radial beams 131 are distributed at equal angular (120°) intervals along the entire circumference. The metal elastic element 1 can be made of 420 stainless steel or other suitable stainless steel, or other suitable metal.

[0026] The central load-bearing part 11 and the outer load-bearing part 12 are connected radially only by the three cantilever beams 13a to 13c described above. For example, a hollow gap 1a can be formed between the central load-bearing part 11 and the outer load-bearing part 12 in the radial direction. The hollow gap 1a is also spaced between the outer load-bearing part 12 and the circumferential sides of the cantilever beams 13a to 13c. Preferably, the central load-bearing part 11 is circular, the hollow gap 1a is generally arc-shaped, and the cantilever beams 13a to 13c preferably have a radial centerline M, that is, the cantilever beams 13a to 13c are symmetrical about the radial centerline M in the transverse plane.

[0027] When a certain interaction force exists between the central load-bearing part 11 and the outer load-bearing part 12, the cantilever beams 13a to 13c undergo corresponding bending and shear deformations. The standard components describing this force (collectively referred to as force-moment components) include three force components Fx, Fy, and Fz along the coordinate axes of the Cartesian coordinate system, and three moment components Mx, My, and Mz about these coordinate axes. Figure 1 As shown, in the coordinate system described above, the horizontal plane can be taken as the xy plane, and... Figure 1 The upper side of the plane is the +y direction, the direction perpendicular to the +y direction on the horizontal plane is the +x direction, and the direction perpendicular to the paper and inwards is the +z direction. These force-torque component data can be obtained by static measurement when a six-dimensional force sensor is mounted on a six-dimensional force calibration platform.

[0028] The cantilever beams 13a-13c include at least a radially extending radial beam 131, with one radially inner end of the radial beam 131 connected to the central load-bearing portion 11. Preferably, the cantilever beams 13a-13c may further include two tangential beams 132 extending integrally from the radially outer end of the radial beam 131 along the tangential direction L to both sides of the peripheral load-bearing portion 12. This can increase the deformation of the tangential beams 132.

[0029] In this embodiment, the peripheral load-bearing portion 12 may include three island-shaped portions 121 arranged circumferentially staggered with the three cantilever beams 13a-13c. Each tangential beam 132 has its two ends integrally connected to two circumferentially adjacent island-shaped portions 121. Additionally, the peripheral load-bearing portion 12 may also include three circumferential connecting portions 122 arranged circumferentially staggered with the three island-shaped portions 121. Each circumferential connecting portion 122 has its two ends integrally connected to two circumferentially adjacent island-shaped portions 121. A slotted gap 1c is provided between the circumferential connecting portion 122 and the radially outer end of the corresponding tangential beam 132. The slotted gap 1c can be used for positioning with other components.

[0030] like Figure 1 Four strain gauges R' are installed on the top surface of the tangential beam 132 of the cantilever beams 13a to 13c. i2 、R' i4 R i3 and R i4 (Here and in the following text, i is denoted as 1, 2 and 3 for cantilever beams 13a to 13c, respectively); Four strain gauges R' are installed on the bottom surface of the tangential beam 132 of the cantilever beams 13a to 13c. i3 、R' i1 R i2 and R i1 Preferably, the cantilever beam 13 has a radial centerline M, and a longitudinal plane passing through the radial centerline M divides the cantilever beam 13 into two symmetrical parts on both tangential sides.

[0031] On each cantilever beam, these strain gauges are arranged as follows: R i1 R i2 R i3 and R i4 These are denoted as the first group of strain gauges, which form Wheatstone bridge B. i , R' i1 、R' i2 、R' i3 and R' i4 These are denoted as the second group of strain gauges, which form a Wheatstone bridge B1 and a Wheatstone bridge B'. i For Wheatstone bridge B i A pair of strain gauges R i1 R i2 A pair of strain gauges R are symmetrically located on either side of the radial centerline M along the tangent. i3 R i4 The strain gauges R are symmetrically located on both sides of the radial centerline M along the tangent. i1 R i3 They are symmetrically positioned at both ends of the cantilever beam (i.e., Figure 1 The top of the paper facing outwards, andFigure 2 (the bottom end perpendicular to the paper and facing outwards), strain gauge R i2 R i4 They are symmetrically positioned at the top and bottom of the cantilever beam, respectively; for the Wheatstone bridge B' i A pair of strain gauges R i1 R i2 A pair of strain gauges R are symmetrically positioned at the top and bottom ends of the cantilever beam, respectively. i3 R i4 Strain gauges R' are symmetrically positioned at both ends of the cantilever beam along its axial direction. i1 、R' i2 Strain gauges R' are symmetrically positioned at the top and bottom ends of the cantilever beam, respectively. i3 、R' i4 They are symmetrically arranged at the top and bottom of the cantilever beam, respectively. Each strain gauge is connected to the circuit from both radial ends, that is, the impedance direction of each strain gauge to the current is arranged radially. Preferably, the length direction of each strain gauge is arranged radially.

[0032] On each cantilever beam, the conductive line unit 60, which forms part of the conductive line 6, includes five pads 71d to 75d at the top, five radial traces 601d to 605d, and five pads 71d to 75d and five radial traces 601e to 605e at the top. The five pads 71d to 75d are along the tangential direction +L (where L is the distance from L to L). Figure 3 The five pads 71e to 75e are arranged side-by-side at intervals along the top end face of the radial beam 131, with the clockwise direction (measured as tangential + L). Figure 3 (From the perspective of) the top end face of the radial beam 131 is arranged in a row at intervals on the edge near the radial outer side.

[0033] At the top of radial beam 131, pad 73d and radial trace 603d are both located on the radial centerline M, and pads 71d and 72d are respectively connected to strain gauge R'. i2 At both the inner and outer radial ends, pad 71d is also connected to strain gauge R. i3 At the radial outer ends, pads 75d and 74d are respectively connected to strain gauge R' i4 At both the inner and outer radial ends, pad 75d is also connected to strain gauge R. i4 The radial outer end and the radial inner end of the radial trace 603d are each connected to the strain resistor R via a tangential trace 606d. i3 and R i4At the radial inner end; at the bottom end of the radial beam 131, pad 73e and radial trace 603e are both located on the radial centerline M, and pads 71e and 72e are respectively connected to strain gauge R' i1 At both the inner and outer radial ends, pad 71e is also connected to strain gauge R. i1 At the radial outer ends, pads 75e and 74e are respectively connected to strain gauge R' i3 At both the inner and outer radial ends, pad 75e is also connected to strain gauge R. i2 The radial outer end and the radial inner end of the radial trace 603e are each connected to the strain resistor R via a tangential trace 606e. i2 and R i1 One end of the radial inner side. Thus, a pattern is formed on the six-dimensional force measuring element 1. Figure 5 The six Wheatstone full-bridges shown are B1, B'1, B2, B'2, B3, and B'3, which output voltages Vout1 to Vout6 respectively. R... i1 ~R i4 In series, R i1 and R i3 For the relative bridge arm, R i2 and R i4 For the relative bridge arm, R i1 and R i2 To form a Wheatstone half-bridge, R is on the same side of the bridge arm. i3 and R i4 To form a Wheatstone half-bridge, the same side arms are connected; on Wheatstone full bridge B'1 to B'3, R' i1 ~R' i4 In sequence, R' i1 and R' i3 For the relative bridge arms, R' i2 and R' i4 For the relative bridge arms, R' i1 and R' i2 To form a Wheatstone half-bridge, R' i3 and R' i4 The two sides of the bridge arm are connected to form a Wheatstone half-bridge.

[0034] in, Figure 5The portion shown by the dashed line relies on an external circuit for bridging, rather than directly on the conductive lines 6 set on the six-dimensional force measuring element 1. This requires only 30 leads to connect the six-dimensional force measuring element 1 to the external circuit, completely eliminating flying wires and greatly improving manufacturability. Furthermore, the simple arrangement of the conductive line units 60 on each end face of the radial beam 131 with the corresponding four strain resistors allows for a significant reduction in the tangential width of the radial beam 131, thereby reducing the overall size of the six-dimensional force measuring element 1.

[0035] The strain gauges are thick-film resistors, which can be manufactured using thick-film processes including printing (e.g., screen printing) and sintering. To facilitate the thick-film process, all the strain gauges and conductive lines are arranged on the same transverse plane. The outer edge of the peripheral load-bearing portion 12 can protrude towards the bottom to form a flange 123 of a certain height. The cantilever beams 13a-13c, the hollow space 1c, and the conductive lines are all enclosed within the flange 123, thereby preventing interference when the metal elastic element 1 is connected to other elements. A connection hole 123a may be provided on the flange 123. Specifically, the six-dimensional force sensor may also include a force-receiving portion 14 extending from the center of the central load-bearing portion 11 towards the bottom. The force-receiving portion 14 can be columnar.

[0036] like Figure 5 As shown, the six force-torque components Fx, Mx, Fy, My, Mz, and Fz can be independently measured by the full-bridge components B1, B'1, B2, B'2, B3, and B'3, respectively. Correspondingly, they are sequentially correlated with the output voltage V determined by the following formulas. out1 ~V out6 Linear correlation within a certain range: Among them, V in This refers to the power supply voltage. When calibrating the pressure sensor, a high-precision six-dimensional force calibration platform can be used to obtain multiple sets of measurement data, each set containing six corresponding output voltages. Each set of measurement data includes a set of standard force vector data (i.e., standard force-torque components Fx, Mz, Fy, Fz, Mx, My) and a set of raw voltage data (V). out1 ~V out6Based on the force-torque components and their corresponding output voltages, a linear relationship between each force-torque component and its corresponding output voltage can be obtained through fitting, which can then be used for measurement. When the six-dimensional force sensor is mounted on a high-precision six-dimensional force calibration platform, the flange 123 and the force-receiving part 14 can be connected to two parts of the high-precision six-dimensional force calibration platform, respectively.

[0037] Due to interdimensional coupling, each force-torque component is not only linearly correlated with its corresponding output voltage, but also likely linearly correlated with the other five output voltages. Therefore, based on multiple sets of different forces (loads) and all six output voltages, the linear relationship matrix between the force-torque components and their corresponding output voltages is obtained through calculation (decoupling), thus achieving interdimensional decoupling. Figure 1 The angles of the +y and +x directions shown relative to the elastic metal element can be changed, for example, in... Figure 1 Based on the +y and +x directions shown, rotate clockwise or counterclockwise by a certain angle. Preferably, the rotation angle is -15°, that is, the angle between the +y direction and the cantilever beam 13a is 15°. At this time, the angle bisectors of the +y and +x directions coincide with the radial center line M of one of the cantilever beams 13b in the circumferential direction. This makes the accuracy of the force-moment in each dimension calculated according to the above formula more balanced.

[0038] In some other embodiments, the metal elastic element 1 can be supplemented by an additional cantilever beam based on the three cantilever beams 13a-13c, resulting in a total of four cantilever beams distributed at equal angular (90°) intervals in the circumferential direction. Correspondingly, the peripheral load-bearing portion 12 can include four island-shaped sections 121, which are integrally connected by four circumferentially intersecting connecting portions 122. The two ends of the circumferential connecting portions 122 are respectively integrally connected to the corresponding ends of two adjacent island-shaped sections 121 in the circumferential direction. The output voltages of the two additional full-bridge components can be used for calculation or verification to reduce interdimensional crosstalk errors, or for redundant backup of the full-bridge on the opposite side. Furthermore, the symmetrical arrangement of resistors on a single cantilever beam can effectively counteract the effects of common-mode signals such as temperature drift.

[0039] The scope of this disclosure is not limited by the detailed description, but by the claims and their equivalents, and all variations within the scope of the claims and their equivalents are to be included in this disclosure.

Claims

1. A six-dimensional force sensor (100), characterized in that, include: Central load-bearing component (11); The outer bearing part (12) is located coaxially around the central bearing part (11); At least three cantilever beams (13) integrally connect the central load-bearing part (11) and the peripheral load-bearing part (12) in the transverse plane; and printed conductive lines (6), which are insulated and at least partially arranged on the axial top surface of the cantilever beam (13); For each cantilever beam (13): a total of eight strain resistors are provided on the surfaces of its two axial ends, each group consisting of four strain resistors and two strain resistor pairs; the two strain resistor pairs of the first group are symmetrically arranged at its two axial ends, and the two strain resistors in each strain resistor pair of the first group are symmetrically arranged on both sides of the radial center line (M) of the cantilever beam (13); the two strain resistor pairs of the second group are symmetrically arranged on both sides of its radial center line (M), and the two strain resistors in each strain resistor pair of the second group are symmetrically arranged at its two axial ends. With the connection of the conductive line (6) and / or external circuit, each of the strain resistors forms a Wheatstone half-bridge, and two Wheatstone half-bridges in the same group form a Wheatstone full-bridge; the three Wheatstone full-bridges (B1, B2, B3) formed by the first group of strain resistors on the three cantilever beams (13) are respectively used to measure the three orthogonal force components (Fx, Fy, Fz) of the force exerted by the peripheral load-bearing part (12) on the central load-bearing part (11), and the three Wheatstone full-bridges (B'1, B'2, B'3) formed by the second group of strain resistors on the three cantilever beams (13) are respectively used to measure the three orthogonal moment components (Mx, My, Mz) of the force.

2. The six-dimensional force sensor (100) according to claim 1, characterized in that, The impedance direction of the strain gauges to current is parallel to the radial centerline (M).

3. The six-dimensional force sensor (100) according to claim 1, characterized in that, In the first group of strain gauges, two strain gauges on the same end but different pairs form two opposite arms of the corresponding Wheatstone bridge; in the second group of strain gauges, two strain gauges on the same side but different pairs form two opposite arms of the corresponding Wheatstone bridge.

4. The six-dimensional force sensor (100) according to claim 1, characterized in that, The cantilever beam (13) includes a radial beam (131) extending along the radial center line and two tangential beams (132) extending integrally from the radial outer ends of the radial beam (131) along both sides perpendicular to the radial center line (M) to the peripheral load-bearing portion (12). The strain resistors are arranged on the axial top surface of the tangential beams (132).

5. The six-dimensional force sensor (100) according to claim 4, characterized in that, The strain resistors are all disposed on the axial end face of the corresponding radial beam (131) of the cantilever beam (13); the conductive line (6) includes conductive line units (60) printed on the axial end face of the corresponding radial beam (131); on the axial end face of each radial beam (131): the conductive line unit (60) includes five pads and five radial traces arranged side by side at intervals perpendicular to the radial center line (M) for electrical connection with external circuits, and the five pads are electrically connected to the four strain resistors on the axial end face of the corresponding radial beam (131) through the five radial traces.

6. The six-dimensional force sensor (100) according to claim 5, characterized in that, On the axial end face of each radial beam (131): five said pads are disposed on the edge portion near the radial outer side of the corresponding axial end face of the radial beam (131).

7. The six-dimensional force sensor (100) according to claim 5, characterized in that, On the axial end face of each radial beam (131): one of the radial traces extends along the radial center line (M), and the radial inner ends of two of the strain resistors in the first group are each directly connected to the radial trace from the tangential sides of the radial trace through a tangential trace.

8. The six-dimensional force sensor (100) according to any one of claims 1 to 7, characterized in that, The strain gauge is a thick film resistor, and the strain gauges at the same end of the axial direction and the corresponding portions of the conductive lines are arranged on the same transverse plane.

9. The six-dimensional force sensor (100) according to any one of claims 1 to 7, characterized in that, The outer load-bearing part (12) includes a plurality of island-shaped parts (121) arranged interlaced with the cantilever beam (13) in the circumferential direction; the circumferential adjacent ends of every two circumferentially adjacent island-shaped parts (121) are integrally connected by a circumferential connecting part (122), and a hollow space gap (1c) is left between the radial inner side of the circumferential connecting part (122) and the radial outer end of the cantilever beam (13).

10. The six-dimensional force sensor (100) according to any one of claims 1 to 7, characterized in that, There are four cantilever beams (13) in total, which are arranged at equal angular intervals in the circumferential direction; the six Wheatstone bridges on three of the cantilever beams (13) are used to measure the six force-moment vectors respectively; the two Wheatstone bridges on the other cantilever beam (13) are used to correct or back up any one or two of the six force-moment vectors.

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