Mass spectrometry apparatus having a variable configuration energy analyzer and method of controlling the same

Abstract

This invention relates to the field of semiconductor detection technology and discloses a mass spectrometry device with a variable configuration energy analyzer and its control method. By coordinating a variable slit mechanism, an electrode system, and a mode switching controller, this invention enables the same mass spectrometry device to flexibly switch between two operating modes: wide energy acquisition and high sensitivity, and narrow passband and high energy resolution. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Through pre-storing target operating mode parameter sets and a parallel control strategy, parameters for all operating modes are pre-calculated and calibrated, and can be directly recalled during mode switching without real-time calculation. Simultaneously, the slit width, the output voltage of each electrode, and the operating status of the ion source components are adjusted, effectively reducing the mode switching time and ensuring that the switching time is controlled within a set time, meeting the requirements for online real-time switching during process operations.

Description

Technical Field

[0001] This invention relates to the field of semiconductor detection technology, and in particular to a mass spectrometry device with a variable configuration energy analyzer and its control method. Background Technology

[0002] Mass spectrometry is widely used in vacuum process monitoring, such as in semiconductor manufacturing, thin film material research, plasma diagnostics, and leak detection. In different applications, mass spectrometry devices typically need to handle different types of analytical tasks.

[0003] Taking process monitoring of vacuum process chambers as an example, there are two typical demand scenarios: The first scenario involves monitoring gaseous components within a chamber, such as background gases, process gases, byproducts, and leaked gases. In this scenario, the ion energy range to be analyzed is relatively wide, requiring the mass spectrometer to have high ion throughput and a wide energy acquisition window to ensure sensitive detection of low-concentration components.

[0004] The second scenario involves analyzing secondary ions sputtered from a sample surface to obtain surface composition information or achieve interface resolution, such as endpoint detection in multilayer film structures. In this scenario, the energy range of the ions to be analyzed is narrow and there are subtle energy differences, requiring the mass spectrometer to have high energy resolution and the ability to finely screen ions in specific energy ranges.

[0005] However, in existing mass spectrometry devices, the design parameters of the energy analyzer are usually fixed during manufacturing. Users need to select a specific configuration of energy analyzer based on the expected main application scenario when purchasing, and once selected, it cannot be adjusted according to changes in the task during use. This results in a single mass spectrometry device being unable to simultaneously handle the analytical tasks of the two different scenarios mentioned above; for example, if the energy analyzer is designed with a wide passband configuration, its performance will be insufficient in scenarios requiring high energy resolution; if the energy analyzer is designed with a narrow passband configuration, the signal strength will be too low in scenarios requiring high sensitivity. If users purchase multiple mass spectrometry devices with different configurations to meet different analytical needs, it increases equipment costs and maintenance complexity. Summary of the Invention

[0006] The technical problem solved by this invention is to provide a mass spectrometry device with a variable configuration energy analyzer and its control method, which helps to solve the technical problem that the energy analyzer parameters in existing mass spectrometry devices are fixed and cannot be optimized according to the needs of different analysis tasks.

[0007] In a first aspect, the present invention provides a mass spectrometry device with a variable configuration energy analyzer, comprising: an ion source assembly, an energy analyzer assembly, a mass analyzer assembly, and a detector assembly arranged in series along an ion transport path; The energy analyzer assembly includes an energy analyzer body, a variable slit mechanism, and an electrode system; the variable slit mechanism is disposed at the inlet and / or outlet of the energy analyzer body; the electrode system includes a programmable power supply unit electrically connected to each electrode of the energy analyzer body. The mass spectrometer also includes an operating mode switching controller, which is communicatively connected to the variable slit mechanism, the programmable power supply unit and the ion source assembly, respectively. The operating mode switching controller has at least two sets of target operating mode parameters pre-stored in it. The operating mode switching controller is configured to, upon receiving an instruction to switch the target operating mode parameter group, control the variable slit mechanism to adjust the slit width for ions to enter and / or leave the energy analyzer body, control the programmable power supply unit to switch the voltage configuration of the electrodes, and adjust the operating state of the ion source assembly.

[0008] Beneficial effects: By setting the variable slit mechanism at the inlet and / or outlet of the energy analyzer body; electrically connecting the programmable power supply unit of the electrode system to each electrode of the energy analyzer body; and then making the operating mode switching controller communicatively connected to the variable slit mechanism, the programmable power supply unit and the ion source assembly respectively, and pre-storing at least two sets of target operating mode parameters in the operating mode switching controller. When the operating mode switching controller receives a command to switch the target operating mode parameter set, it controls the variable slit mechanism to adjust the slit width for ions to enter and / or leave the energy analyzer body, specifically adjusting it to the slit width corresponding to the target operating mode parameter set after the switch. Simultaneously, it controls the programmable power supply unit to switch the electrode voltage configuration, specifically switching it to the voltage corresponding to the target operating mode parameter set after the switch, and adjusts the operating state of the ion source assembly, specifically adjusting it to the operating state corresponding to the target operating mode parameter set after the switch. This allows the mass spectrometer to switch from the current operating mode to another, enabling the same mass spectrometer to switch between different operating modes, such as flexibly switching between wide energy acquisition and high sensitivity versus narrow passband and high energy resolution modes. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Compared to purchasing multiple mass spectrometers with different configurations, this effectively reduces the user's equipment investment costs and maintenance complexity.

[0009] By pre-storing target operating mode parameter groups and using parallel control strategies, parameters for all operating modes are pre-calculated and calibrated, and can be directly recalled when switching operating modes without real-time calculation. At the same time, the slit width, the output voltage of each electrode, and the operating status of the ion source components are adjusted simultaneously, thereby effectively reducing the operating mode switching time and ensuring that the operating mode switching time can be controlled within the set time, meeting the requirements for online real-time switching in the process.

[0010] For different application scenarios, such as cavity atmosphere monitoring, surface composition analysis, and interface endpoint detection, the requirements for energy resolution and sensitivity vary. The configurable features of this invention allow users to flexibly optimize the parameters of the energy analyzer components according to specific needs to adapt to the usage requirements of different scenarios.

[0011] In one possible implementation, the variable slit mechanism includes a drive assembly, a transmission assembly, an actuation assembly, and a position detection assembly; the transmission assembly is drively connected to the output shaft of the drive assembly, and the actuation assembly is disposed on the transmission assembly; the position detection assembly is located on one side of the actuation assembly and is used to detect the position of the actuation assembly.

[0012] Furthermore, the driving assembly includes a stepper motor; the transmission assembly includes a lead screw and a slider, the slider being connected to the lead screw, and the lead screw being drively connected to the output shaft of the stepper motor; The actuation component includes a baffle mounted on the slider.

[0013] Beneficial effects: The operating mode switching controller sends the number of pulses and direction signals corresponding to the target slit width to the stepper motor; the stepper motor generates corresponding rotational motion according to the command, driving the slider and the baffle set on the slider to move linearly through the transmission screw; the position detection component detects the actual position of the baffle in real time and feeds the position signal back to the controller; the controller compares the target position and the actual position of the baffle and adjusts the drive signal until the error between the actual position and the target position of the baffle is within the allowable range; after the position of the baffle stabilizes, the controller sends an instruction to the variable slit mechanism that the slit width adjustment is in place; while adjusting the slit width, the output voltage of the electrodes and the operating state of the ion source component can be switched simultaneously to shorten the operating mode switching time of the mass spectrometer. Through the cooperation between the operating mode switching controller and various components, the variable slit mechanism can adjust the slit width for ions to enter and / or leave the energy analyzer component, allowing the energy analyzer component to switch between different operating modes, so that the mass spectrometer can adapt to different application scenarios.

[0014] In one possible implementation, the baffle has a bevel near the slit end, the bevel is inclined toward the energy analyzer body, and the surface of the baffle is provided with a protective coating.

[0015] Beneficial effects: By setting a bevel at the end of the baffle near the slit and tilting the bevel towards the energy analyzer body, the edge of the baffle near the slit is made sharper. When ions hit the bevel, they are directly absorbed with almost no scattering, reducing the risk of ions escaping from the slit due to scattering. This ensures that only ions with energies within the designed range can pass through the slit, making the actual bandgap consistent with the theoretical value, thus guaranteeing the mass spectrometer has high energy resolution. A protective coating on the surface of the baffle improves its structural strength and gives it excellent wear resistance. It also prevents contaminants from adhering to the beveled surface of the baffle, reducing the risk of increased bevel thickness and thus maintaining the high energy resolution of the mass spectrometer.

[0016] In one possible implementation, the target operating mode parameter group includes a first operating mode parameter group and a second operating mode parameter group; The first operating mode parameter group is configured as follows: the slit width of the ions entering the main body of the energy analyzer is ≥1.0mm, the slit width of the ions leaving the main body of the energy analyzer is ≥2.0mm, the band width of the energy analyzer component is 5eV-15eV, and the ion source component is enabled for ionization. The second operating mode parameter group is configured as follows: the slit width of the ions entering the main body of the energy analyzer is ≤0.3mm, the slit width of the ions leaving the main body of the energy analyzer is ≤0.5mm, the band width of the energy analyzer component is 0.3eV-1.0eV, and the ion source component has its ionization function turned off.

[0017] Beneficial Effects: The first operating mode allows for wide energy acquisition and high sensitivity, enabling as many ions as possible to pass through the energy analyzer assembly, ensuring sensitive detection of low-concentration components. In this mode, by appropriately setting the slit widths for ion entry and exit from the energy analyzer body, high ion transmission efficiency is achieved while maintaining a certain energy resolution, ensuring the mass spectrometer's sensitivity to sample detection. By appropriately setting the bandgap of the energy analyzer assembly, more ions pass through the energy analyzer body and are received by the mass analyzer assembly, further improving sample detection sensitivity. Furthermore, by appropriately setting the voltage scan step of the energy analyzer assembly, rapid scanning and real-time monitoring of the step size of each voltage change allow for monitoring of each energy change step, facilitating the capture of transient anomalies during the process and ensuring sensitive sample detection.

[0018] The second operating mode is a narrow-band, high-energy-resolution mode, which allows ions with similar energies to be distinguished, eliminating complex background interference and ensuring high energy resolution of the mass spectrometer. In this mode, by appropriately setting the slit widths for ion entry and exit from the energy analyzer, angular divergence of ions can be effectively limited, and ions in specific energy ranges can be finely screened to ensure high energy resolution of the sample. By appropriately setting the band width of the energy analyzer components, minute differences between ion energies can be effectively resolved, contributing to improved sample energy resolution. Furthermore, by appropriately setting the voltage scan step of the energy analyzer components, fine scanning can be performed, acquiring multiple data points on a single energy peak to map the shape and position of the peak and identify ions based on the peak, thus ensuring high energy resolution of the mass spectrometer.

[0019] In one possible implementation, the operating mode switching controller includes: A memory is used to pre-store the first operating mode parameter group and the second operating mode parameter group; A motor driver is electrically connected to the stepper motor; A power control interface is electrically connected to the programmable power supply unit; An ion source control interface is electrically connected to the ion source assembly.

[0020] Beneficial effects: Through the cooperation of the memory, motor driver, power control interface, ion source control interface and energy analyzer and ion source components, the components in the energy analyzer and ion source components can respond quickly, so as to quickly switch the target working mode and meet the online real-time switching requirements in the process.

[0021] In one possible implementation, the energy analyzer body includes a first electrode plate and a second electrode plate that are parallel to each other, forming an ion transport and analysis channel between the first electrode plate and the second electrode plate, and the ion inlet is at a predetermined angle relative to the ion transport and analysis channel; or The main body of the energy analyzer includes several cylindrical electrodes.

[0022] Beneficial effects: By applying a DC voltage between the first and second electrode plates, which are arranged parallel to each other, a uniform electrostatic deflection electric field is formed, thereby creating an ion transport and analysis channel between the first and second electrode plates. Furthermore, by subjecting the ions to the ion transport and analysis channel at a predetermined angle, the energy analyzer body can achieve significantly higher energy resolution.

[0023] In one possible implementation, the slit width through which the ions enter the energy analyzer body is 0.1 mm to 3.0 mm, and the slit width through which the ions leave the energy analyzer body is 0.1 mm to 5.0 mm.

[0024] Beneficial effects: By rationally setting the slit widths for ions entering and leaving the energy analyzer body, ions can stably enter the ion transport and analysis channel and be effectively transported to the mass analyzer assembly. This avoids a significant reduction in the number of ions transported to the mass analyzer assembly due to an excessively narrow slit width when ions leave the energy analyzer body, thus ensuring the detection sensitivity and energy resolution of the mass spectrometer under different operating modes.

[0025] On the other hand, the present invention also provides a control method for a mass spectrometry device with a variable configuration energy analyzer, applied to the mass spectrometry device with a variable configuration energy analyzer as described above, the control method comprising: Receive a switching instruction and parse the switching instruction to determine the target operating mode of the energy analyzer; Read the pre-stored target operating mode parameter group corresponding to the target operating mode; Based on the target operating mode parameter set, and in conjunction with the variable slit mechanism, the slit width for ions to enter and / or leave the energy analyzer body is adjusted; Based on the target operating mode parameter set, and in conjunction with the programmable power supply unit, the output voltage of each electrode in the energy analyzer is adjusted to the target value; The operating state of the ion source component is adjusted based on the target operating mode parameter set to complete the switching of the target operating mode of the energy analyzer.

[0026] Beneficial effects: By coordinating the variable slit mechanism, electrode system, and operating mode switching controller, the same mass spectrometer can flexibly switch between two operating modes: wide energy acquisition and high sensitivity, and narrow passband and high energy resolution. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Compared to purchasing multiple mass spectrometers with different configurations, this effectively reduces the user's equipment investment costs and maintenance complexity.

[0027] By pre-storing target operating mode parameter groups and using parallel control strategies, parameters for all operating modes are pre-calculated and calibrated, and can be directly recalled when switching operating modes without real-time calculation. At the same time, the slit width, the output voltage of each electrode, and the operating status of the ion source components are adjusted simultaneously, thereby effectively reducing the operating mode switching time and ensuring that the operating mode switching time can be controlled within the set time, meeting the requirements for online real-time switching in the process.

[0028] In one possible implementation, the control method further includes: After determining the target operating mode of the energy analyzer, the ion inlet shutter of the mass spectrometer is controlled to be closed; After adjusting the operating state of the ion source assembly, wait for the output voltage of each electrode in the energy analyzer to stabilize; After waiting for the target time to be met, the ion inlet shutter is opened.

[0029] On the other hand, the present invention also provides a computer-readable storage medium storing computer instructions for causing a processor to execute the above-described control method for a mass spectrometer device with a variable-configuration energy analyzer.

[0030] In summary, the present invention provides a mass spectrometry device and its control method with a variable configuration energy analyzer, which involves setting a variable slit mechanism at the inlet and / or outlet of the energy analyzer body; electrically connecting the programmable power supply unit of the electrode system to each electrode of the energy analyzer body; and then making the operating mode switching controller communicatively connected to the variable slit mechanism, the programmable power supply unit and the ion source assembly, respectively, and pre-storing at least two sets of target operating mode parameters in the operating mode switching controller.

[0031] When the operating mode switching controller receives a command to switch the target operating mode parameter set, it controls the variable slit mechanism to adjust the slit width for ions to enter and / or leave the energy analyzer body, specifically adjusting it to the slit width corresponding to the target operating mode parameter set after the switch. Simultaneously, it controls the programmable power supply unit to switch the electrode voltage configuration, specifically switching it to the voltage corresponding to the target operating mode parameter set after the switch, and adjusts the operating state of the ion source assembly, specifically adjusting it to the operating state corresponding to the target operating mode parameter set after the switch. This allows the mass spectrometer to switch from the current operating mode to another, enabling the same mass spectrometer to switch between different operating modes, such as flexibly switching between wide energy acquisition and high sensitivity versus narrow passband and high energy resolution modes. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Compared to purchasing multiple mass spectrometers with different configurations, this effectively reduces the user's equipment investment costs and maintenance complexity.

[0032] By pre-storing target operating mode parameter groups and using parallel control strategies, parameters for all operating modes are pre-calculated and calibrated, and can be directly recalled when switching operating modes without real-time calculation. At the same time, the slit width, the output voltage of each electrode, and the operating status of the ion source components are adjusted simultaneously, thereby effectively reducing the operating mode switching time and ensuring that the operating mode switching time can be controlled within the set time, meeting the requirements for online real-time switching in the process. Attached Figure Description

[0033] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of a mass spectrometry device with a variable configuration energy analyzer according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the energy analyzer component and the mass analyzer component in a mass spectrometry device with a variable configuration energy analyzer according to an embodiment of the present invention; Figure 3 This is a schematic flowchart illustrating a control method for a mass spectrometer with a variable configuration energy analyzer according to an embodiment of the present invention.

[0035] Figure label: 100, Ion source assembly; 200, Energy analyzer assembly; 201, Energy analyzer body; 2011, First electrode plate; 2012, Second electrode plate; 202, Variable slit mechanism; 2021, Drive assembly; 2022, Transmission assembly; 2023, Actuation assembly; 2024, Position detection assembly; 203, Electrode system; 300, Mass analyzer assembly; 400, Detector assembly. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] In the description of this invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0038] According to embodiments of the present invention, such as Figure 1 and Figure 2 As shown, a mass spectrometry device with a variable-configuration energy analyzer is provided, comprising: an ion source assembly 100, an energy analyzer assembly 200, a mass analyzer assembly 300, and a detector assembly 400 arranged in series along an ion transport path; the energy analyzer assembly 200 includes an energy analyzer body 201, a variable slit mechanism 202, and an electrode system 203; the variable slit mechanism 202 is disposed at the inlet end and / or outlet end of the energy analyzer body 201; the electrode system 203 includes a programmable power supply unit electrically connected to each electrode of the energy analyzer body 201; The spectrometer also includes an operating mode switching controller, which is communicatively connected to the variable slit mechanism 202, the programmable power supply unit, and the ion source assembly 100. The operating mode switching controller has at least two sets of target operating mode parameter groups pre-stored in it. The operating mode switching controller is configured to, upon receiving a switching command for the target operating mode parameter group, control the variable slit mechanism 202 to adjust the slit width of ions entering and / or leaving the energy analyzer body 201, control the programmable power supply unit to switch the voltage configuration of the electrodes, and adjust the operating state of the ion source assembly 100.

[0039] In this embodiment, the ion source assembly 100, energy analyzer assembly 200, mass analyzer assembly 300, and detector assembly 400 are sequentially connected in series along the ion transmission optical path. The ion source assembly 100 serves as the front-end inlet of the mass spectrometer, receiving ions or gaseous molecules from an external cavity and selectively ionizing the gaseous molecules to convert them into ions that can be manipulated by an electric field. The ion source assembly 100 can be a radially symmetrical open electron bombardment ion source, with two identical filaments installed at symmetrical positions: one as the main filament and the other as a backup filament. The control system monitors the emission current of the filaments in real time. Under normal operation, the emission current remains stable at a set value. When the main filament ages or breaks, the emission current drops sharply below a threshold. The control system cuts off the power to the main filament within milliseconds, connects the power to the backup filament, and automatically adjusts parameters such as filament current and electron energy to ensure the ion source operates normally, thereby improving the reliability of long-term continuous operation in industrial environments.

[0040] The ions generated by the ion source have different initial kinetic energies. The energy analyzer assembly 200 is connected in series downstream of the ion source assembly 100, so that the energy analyzer assembly 200 allows ions with kinetic energies falling within a specific narrow range to pass through and further reach the downstream mass analyzer assembly 300 and detector assembly 400. The energy analyzer assembly 200 determines the energy resolution of the mass spectrometer so that it can be applied to high-energy resolution or high-sensitivity analysis scenarios.

[0041] The energy analyzer assembly 200 includes an energy analyzer body 201, a variable slit mechanism 202, and an electrode system 203. The energy analysis range of the energy analyzer body 201 is 0-100 eV, covering the ion kinetic energy range of most organic compounds and inorganic small molecules, meeting most needs of industrial online analysis. The band width of the energy analyzer body 201 can be finely adjusted to 0.5 eV, allowing users to flexibly switch between high resolution and high sensitivity according to actual needs. For example, when analyzing complex matrix samples, a narrow band, such as 0.5 eV, is used to improve sample resolution and reduce interference; when analyzing low-concentration samples, a wide band is used to improve sample resolution sensitivity.

[0042] A variable slit mechanism 202 is disposed at the inlet and / or outlet of the energy analyzer body 201. When the variable slit mechanism 202 is disposed at the inlet of the energy analyzer body 201, the slit width for ions entering the energy analyzer body 201 can be adjusted. When the variable slit mechanism 202 is disposed at the outlet of the energy analyzer body 201, the slit width for ions leaving the energy analyzer body 201 can be adjusted. A wider slit width allows more ions to pass through the energy analyzer assembly 200, resulting in higher sensitivity of the mass spectrometer, but relatively lower energy resolution. Conversely, a narrower slit width allows for more stringent kinetic energy screening of ions passing through the energy analyzer assembly 200, resulting in higher energy resolution of the mass spectrometer and enabling fine screening of ions in specific energy ranges, but relatively lower ion detection sensitivity.

[0043] The electrode system 203 includes a programmable power supply unit, which is electrically connected to each electrode of the energy analyzer body 201. All electrodes of the energy analyzer body 201 require a DC voltage to operate. The programmable power supply unit can independently and accurately control the output voltage of each electrode under the command of the controller, and the output voltage of each electrode of the energy analyzer body 201 is adjustable within the range of -500V to +500V, with a voltage switching time of less than 50ms, facilitating dynamic adjustment of the energy analysis range and bandgap. The bandgap is determined by the slit width, electrode voltage, and analyzer geometry; this invention achieves variable bandgap through coordinated adjustment of the slit and voltage. The programmable power supply unit is built based on a high-voltage operational amplifier or uses modular high-voltage power supply products, and also features overvoltage, overcurrent, short-circuit protection, and arc discharge protection. The programmable power supply unit employs advanced topology technology, exhibiting low ripple, which is a significant advantage in the field of mass spectrometry analysis.

[0044] A mass analyzer assembly 300 is connected in series downstream of the energy analyzer assembly 200 to separate ions based on their mass-to-charge ratio. A detector assembly 400 is connected in series downstream of the mass analyzer assembly 300 to convert the ion signal into an electrical signal, thereby determining the intensity of the separated ions. The detector assembly 400 can be an electron multiplier pulse ion counting detector.

[0045] The operating mode switching controller is communicatively connected to the variable slit mechanism 202, the programmable power supply unit, and the ion source assembly 100. At least two sets of target operating mode parameter groups are pre-stored in the controller. These target operating mode parameter groups may include parameters such as the ion inlet slit width setting, the ion outlet slit width setting, the voltage settings of each electrode in the energy analyzer body 201, and the ion source operating state setting. When the operating mode switching controller receives a command to switch the target operating mode parameter group, it controls the variable slit mechanism 202 to adjust the slit width for ions entering and / or leaving the energy analyzer body 201, specifically adjusting it to the slit width corresponding to the target operating mode parameter group after the switch. Simultaneously, it controls the programmable power supply unit to switch the voltage configuration of each electrode, specifically switching it to the voltage corresponding to the target operating mode parameter group after the switch, and adjusts the operating state of the ion source assembly 100, specifically adjusting it to the operating state corresponding to the target operating mode parameter group after the switch. This allows the mass spectrometer to switch from the current operating mode to another operating mode, thereby enabling the same mass spectrometer to switch between different operating modes. For example, when a mass spectrometer is used in an analytical scenario requiring wide energy acquisition and high ion throughput, the mass spectrometer operates in the first mode; when it is used in an analytical scenario requiring high energy resolution, the mass spectrometer operates in the second mode.

[0046] By combining the variable slit mechanism 202 and the electrode system 203, along with the operating mode switching controller, the same mass spectrometer can flexibly switch between two operating modes: wide energy acquisition and high sensitivity, and narrow passband and high energy resolution. This resolves the contradiction that existing fixed-parameter energy analyzers cannot meet the needs of different analytical tasks. Compared to purchasing multiple mass spectrometers with different configurations, this effectively reduces the user's equipment investment costs and maintenance complexity.

[0047] By pre-storing the target operating mode parameter group and using a parallel control strategy, the parameters for all operating modes are pre-calculated and calibrated, and can be directly called when switching operating modes without real-time calculation. At the same time, the slit width, the output voltage of each electrode, and the operating status of the ion source component 100 are adjusted simultaneously, thereby effectively reducing the operating mode switching time and ensuring that the operating mode switching time can be controlled within the set time, meeting the requirements for online real-time switching in the process.

[0048] For different application scenarios, such as cavity atmosphere monitoring, surface composition analysis, and interface endpoint detection, the requirements for energy resolution and sensitivity vary. The configurable feature of this embodiment allows users to flexibly optimize the parameters of the energy analyzer component 200 according to specific needs to adapt to the usage requirements of different scenarios.

[0049] In some implementations, the mass spectrometer also includes a vacuum chamber and a differential pumping system. The vacuum chamber houses the ion source assembly 100, the energy analyzer assembly 200, the mass analyzer assembly 300, and the detector assembly 400. The vacuum chamber is made of stainless steel, such as 316L stainless steel, and is equipped with a vacuum flange interface. The vacuum chamber is connected to the differential pumping system to maintain the ultra-high vacuum environment required for the operation of the mass spectrometer. The differential pumping system preferably uses a combination of an 80 L / s turbomolecular pump and an ion pump, employing a differential pressure pumping design to optimize the vacuum distribution in different regions.

[0050] In one embodiment, the variable slit mechanism 202 includes a drive assembly 2021, a transmission assembly 2022, an execution assembly 2023, and a position detection assembly 2024. The transmission assembly 2022 is drive-connected to the output shaft of the drive assembly 2021, and the execution assembly 2023 is disposed on the transmission assembly 2022. The position detection assembly 2024 is located on one side of the execution assembly 2023 and is used to detect the position of the execution assembly 2023. Further, the drive assembly 2021 includes a stepper motor; the transmission assembly 2022 includes a lead screw and a slider, the slider being connected to the lead screw, and the lead screw being drive-connected to the output shaft of the stepper motor; the execution assembly 2023 includes a baffle mounted on the slider.

[0051] In this embodiment, the drive component 2021 is the power source for the variable slit mechanism 202, providing power for adjusting the slit width. The drive component 2021 can be a stepper motor suitable for a vacuum environment, which can be used in 10... -11 The system provides a vacuum environment of hPa to cover all applications of mass spectrometry devices; it uses non-magnetic stainless steel and gold-plated leads, and controls the material escaping rate to 10. -12 Pa·m 3 The speed is below / s. This eliminates the interference of stray magnetic fields on the ion optical system, ensuring that the resolution of the mass analyzer component 300 remains unaffected. Gold plating on the leads reduces contact resistance and prevents oxidation, while the gold plating layer has an extremely low outgassing rate, making it suitable for ultra-high vacuum environments. Meanwhile, the stepper motor offers advantages such as high resolution, accurate positioning, and no cumulative error.

[0052] The transmission assembly 2022 can be a lead screw and a slider. The output shaft of the stepper motor is connected to the lead screw, and the slider is connected to the lead screw. The lead screw converts the rotational motion output by the drive assembly 2021 into the linear motion of the slider, and transmits torque and displacement. Furthermore, the lead screw can be a ball screw with a preload nut, and the slider is fixedly connected to the nut. The cooperation between the ball screw and the preload nut eliminates the gap between the ball screw and the nut, avoiding backlash errors, thus achieving sub-micron level linear displacement accuracy, resulting in a positioning resolution of 0.1μm and a repeatability of ±0.75μm.

[0053] The execution component 2023 may include a pair of opposing baffles, one baffle being mounted on a slider so that it can move with the slider; the other baffle being fixed to one side of the movable baffle. The interaction of the two baffles allows the slit width for ions to enter and / or exit the energy analyzer component 200 to be varied.

[0054] The position detection component 2024 is located on one side of the execution component 2023. It is used to detect the actual position of the execution component 2023 in real time and feed the position signal back to the controller to form a complete closed-loop control system. The position detection component 2024 can be a miniature optocoupler or a linear grating ruler to achieve closed-loop control of the slit width and high-precision position feedback.

[0055] During the operation of the variable slit mechanism 202, the operating mode switching controller sends the number of pulses and direction signals corresponding to the target slit width to the stepper motor. The stepper motor generates corresponding rotational motion according to the command, driving the slider and the baffle mounted on the slider to move linearly via the transmission screw, causing the baffle to move closer to or further away from another baffle. The position detection component 2024 detects the actual position of the baffle in real time and feeds the position signal back to the controller. The controller compares the target position and the actual position of the baffle and adjusts the drive signal until the error between the actual and target positions is within the allowable range. After the baffle position stabilizes, the controller sends an instruction to the variable slit mechanism 202 indicating that the slit width adjustment is in place. While adjusting the slit width, voltage switching and the adjustment of the ion source component 100's operating state can be performed simultaneously to shorten the time for switching operating modes of the mass spectrometer. Through the cooperation between the operating mode switching controller and various components, the variable slit mechanism 202 can adjust the slit width for ions to enter and / or leave the energy analyzer component 200, allowing the energy analyzer component 200 to switch between different operating modes, thus adapting the mass spectrometer to different application scenarios.

[0056] In other possible implementations, the transmission component 2022 can also be a linear guide rail, with the slider mounted on the linear guide rail and the actuator component 2023 mounted on the slider; the linear guide rail can also convert the rotational motion output by the stepper motor into the linear motion of the actuator component 2023, so as to facilitate the adjustment of the slit width for ions to enter and / or leave the energy analyzer component 200.

[0057] Other possible implementations include internal mounting: the stepper motor, lead screw, slider, and baffle are all installed inside the vacuum chamber. This mounting method is compact and helps improve the overall space utilization of the mass spectrometer.

[0058] External drive method: The stepper motor is installed outside the vacuum chamber, while the drive screw, slider, and baffle are installed inside the vacuum chamber. The internal baffle is driven by the drive screw, which is sealed by a bellows. This installation method can use a common stepper motor, significantly reducing the manufacturing cost of the mass spectrometer.

[0059] In one embodiment, the baffle has a bevel near the slit end, the bevel is inclined toward the energy analyzer body 201, and the surface of the baffle is provided with a protective coating.

[0060] In this embodiment, by setting a slope at one end of the baffle near the slit and tilting the slope toward the energy analyzer body, the edge of the baffle near the slit is made sharper. When ions hit the slope, they are directly absorbed with almost no scattering, reducing the risk of ions escaping from the slit after scattering. This ensures that only ions with energy within the design range can pass through the slit, making the actual bandgap consistent with the theoretical value, thereby ensuring that the mass spectrometer has a high energy resolution.

[0061] The protective coating can be a titanium nitride coating, which has the characteristics of low gas escaping rate and high hardness, making it suitable for ultra-high vacuum environments. By applying a protective coating to the surface of the baffle, the structural strength of the baffle can be improved, giving it excellent wear resistance and enabling it to maintain the sharpness of the bevel over a long period of time; moreover, it makes it difficult for contaminants to adhere to the baffle, reducing the risk of the baffle's bevel thickness increasing, thus helping to maintain the high energy resolution of the mass spectrometer.

[0062] Furthermore, the beveled surface of the baffle is knife-edged, and the radius of the blade can be any value among 0.001mm, 0.005mm, 0.007mm, 0.01mm, 0.012mm, 0.015mm, 0.017mm, and 0.02mm, or any value between 0 and 0.02mm. If the radius of the blade is greater than 0.02mm, when ions are incident on the surface of the baffle at a certain angle, the ions will be scattered on the arc surface of the blade. The scattered ions will deviate from their original trajectory, resulting in a wider range of ion energy passing through the mass analyzer assembly 300 and a decrease in energy resolution. By reasonably setting the radius of the blade, ions hitting the blade are directly absorbed with almost no scattering, ensuring that only ions with energy within the designed range can pass through the slit, thereby ensuring that the mass spectrometer has a high energy resolution.

[0063] Furthermore, for applications with high heat loads, the baffle material can be tungsten alloy, which has a high thermal conductivity and a low coefficient of thermal expansion, resulting in minimal thermal deformation under high heat loads and meeting the usage requirements of high heat load applications.

[0064] In one embodiment, the slit width for ions to enter the energy analyzer body 201 is 0.1 mm to 3.0 mm, and the slit width for ions to leave the energy analyzer body 201 is 0.1 mm to 5.0 mm.

[0065] In this embodiment, the slit width for ions entering the energy analyzer body 201 can be any value or a value between any two of the following: 0.1 mm, 0.3 mm, 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, 2.5 mm, and 3.0 mm. If the slit width is too small, such as less than 0.1 mm, minor deformation of the cutting edge or contaminant deposition can cause slit blockage. If the slit width is too large, such as greater than 3.0 mm, the height limitation of the ionization region of the parallel plate energy analyzer increases the risk of the ion beam hitting the edge of the electrode plate, preventing ions from effectively entering the ion transport and analysis channel, thereby affecting the detection sensitivity of the mass spectrometer. The slit width for ions leaving the energy analyzer body 201 can be any value or a value between any two of the following: 0.1 mm, 0.3 mm, 0.5 mm, 1.0 mm, 1.5 mm, 2.0 mm, 2.5 mm, 3.0 mm, 3.5 mm, 4.0 mm, 4.5 mm, and 5.0 mm. Furthermore, the slit width of ions leaving the energy analyzer body 201 is greater than or equal to the slit width of ions entering the energy analyzer body 201, thus avoiding the risk of reducing ion transmission efficiency.

[0066] By rationally setting the slit widths for ions entering the energy analyzer body 201 and leaving the energy analyzer body 201, ions can stably enter the ion transmission and analysis channel and be effectively transmitted to the mass analyzer assembly 300. This avoids a significant reduction in the number of ions transmitted to the mass analyzer assembly 300 due to an excessively narrow slit width leaving the energy analyzer body 201, thus ensuring the detection sensitivity and energy resolution of the mass spectrometer under different operating modes.

[0067] In one embodiment, the target operating mode parameter set includes a first operating mode parameter set and a second operating mode parameter set; the first operating mode parameter set is configured as follows: the slit width for ions entering the energy analyzer body 201 is ≥1.0 mm, the slit width for ions leaving the energy analyzer body 201 is ≥2.0 mm, the band width of the energy analyzer assembly 200 is 5 eV-15 eV, and the ion source assembly 100 has its ionization function enabled; the second operating mode parameter set is configured as follows: the slit width for ions entering the energy analyzer body 201 is ≤0.3 mm, the slit width for ions leaving the energy analyzer body 201 is ≤0.5 mm, the band width of the energy analyzer assembly 200 is 0.3 eV-1.0 eV, and the ion source assembly 100 has its ionization function disabled.

[0068] In this embodiment, the first operating mode can be a wide energy acquisition and high sensitivity operating mode, allowing as many ions as possible to pass through the energy analyzer component 200 to ensure sensitive detection of low-concentration components. The second operating mode can be a narrow passband and high energy resolution operating mode, enabling ions with similar energies to be distinguished, eliminating complex background interference, and ensuring that the mass spectrometer has high energy resolution.

[0069] In the first operating mode, the ion source assembly 100 is activated with electron bombardment ionization. In this mode, the ion source assembly 100 operates in ionization mode, where the heated filament emits electrons that bombard neutral molecules, ionizing them and generating the ions to be analyzed. The slit width of the ions entering the energy analyzer body 201 is controlled to be greater than or equal to 1.0 mm, allowing the energy analyzer body 201 to collect most of the ions generated by the ion source assembly 100. Then, the slit width of the ions leaving the energy analyzer body 201 is controlled to be greater than or equal to 2.0 mm, enabling the mass analyzer assembly 300 to receive and analyze all ions that have passed through the energy analyzer body 201. By appropriately setting the slit widths of the ions entering and leaving the energy analyzer body 201, high ion transmission efficiency can be achieved while maintaining a certain energy resolution, ensuring the mass spectrometer's sensitivity to sample detection.

[0070] Furthermore, the band width of the energy analyzer component 200 can be any value or a value between any two of the following: 5eV, 6eV, 7eV, 8eV, 9eV, 10eV, 11eV, 12eV, 13eV, 14eV, and 15eV. Simultaneously, the voltage scan step of the energy analyzer component 200 is set to a first target value, such as 1V. A wider band width for the energy analyzer component 200 allows more ions to pass through, resulting in higher sensitivity. Therefore, by appropriately setting the band width of the energy analyzer component 200, more ions can pass through the energy analyzer body 201 and be received by the mass analyzer component 300, which helps improve the sample detection sensitivity. Furthermore, by appropriately setting the voltage scan step of the energy analyzer component 200, it can scan rapidly, monitoring the step size of each voltage change in real time, thereby monitoring the step size of each energy change. This facilitates the capture of transient anomalies during the process, ensuring sensitive sample detection.

[0071] In the second operating mode, the ion source assembly 100 is controlled to shut down its ionization function, completely shutting off the filament and preventing electron emission and ionization. Appropriate voltages can be applied to all electrodes of the ion source assembly 100 to form an ion lens system, facilitating the transmission of low-energy ions generated in the external cavity to the energy analyzer assembly 200. The slit width for ions entering the energy analyzer body 201 is controlled to be less than or equal to 0.3 mm to limit ion angular divergence. Furthermore, the slit width for ions leaving the energy analyzer body 201 is controlled to be less than or equal to 0.5 mm to limit the energy range of ions, thereby enabling precise screening and analysis of ions in specific energy ranges. By appropriately setting the slit widths for ions entering and leaving the energy analyzer body 201, ion angular divergence can be effectively limited, and ions in specific energy ranges can be screened more precisely, ensuring high energy resolution of the mass spectrometer for the sample.

[0072] Furthermore, the band width of the energy analyzer component 200 can be any value or a value between any two of 0.3 eV, 0.4 eV, 0.5 eV, 0.6 eV, 0.7 eV, 0.8 eV, 0.9 eV, and 1.0 eV. Simultaneously, the voltage scan step of the energy analyzer component 200 is set to a second target value, such as 0.05 V. The sputtered ions generated by external plasma have very small kinetic energy differences; therefore, by appropriately setting the band width of the energy analyzer component 200, minute differences in ion energy can be effectively distinguished, helping to improve the energy resolution of the sample. Furthermore, by appropriately setting the voltage scan step of the energy analyzer component 200, it can perform fine scanning, acquiring multiple data points on a single energy peak to facilitate plotting the shape and position of the energy peak and identifying ions based on the energy peak, thereby ensuring the high energy resolution of the mass spectrometer.

[0073] In one embodiment, the operating mode switching controller includes: a memory for pre-storing a first operating mode parameter set and a second operating mode parameter set; a motor driver electrically connected to a stepper motor; a power control interface electrically connected to a programmable power supply unit; and an ion source control interface electrically connected to the ion source assembly 100.

[0074] In this embodiment, the operating mode switching controller also includes a microcontroller and a communication interface. The microcontroller, as the core, is responsible for executing control logic, processing communication protocols, and managing timing. The memory includes non-volatile memory for pre-storing a first operating mode parameter set and a second operating mode parameter set. Each parameter set includes at least the following parameters: ion inlet slit width setting value, ion outlet slit width setting value, electrode voltage setting values ​​for the energy analyzer body 201, and ion source operating state setting value.

[0075] In the first operating mode, the voltage configuration is as follows: the first electrode plate 2011 is grounded (0V), and the second electrode plate 2012 scans from 0V to 100V in steps of a first target value. For the Bessel energy analyzer, a lower voltage ratio is used to obtain a wider bandgap. In the second operating mode, the voltage configuration is as follows: the first electrode plate 2011 is grounded (0V), and the second electrode plate 2012 scans from 0V to 50V in steps of a second target value. For the Bessel energy analyzer, a higher voltage ratio is used to obtain a narrower bandgap and higher energy resolution.

[0076] The motor driver is electrically connected to the stepper motor of the variable slit mechanism 202, providing precise current control and micro-stepping functionality. Simultaneously, the electrode driver can integrate microstepping functionality to achieve smooth movement and precise positioning of the stepper motor. The power control interface can be accessed via SPI bus, I / O... 2 The C-bus or analog voltage control line connects to each programmable power supply unit for sending voltage configuration data and switching commands. The ion source control interface connects to the mode switching electrode of the ion source assembly 100 for controlling the ionization function of the ion source assembly 100. The communication interface communicates with the host computer to receive switching commands and report the status information of the mass spectrometer. The communication protocol can use Ethernet, USB, or RS-485.

[0077] Through the cooperation of the memory, motor driver, power control interface, ion source control interface, and energy analyzer assembly 200 and ion source assembly 100, the components in the energy analyzer assembly 200 and ion source assembly 100 can respond quickly, so as to quickly switch the target working mode and meet the online real-time switching requirements in the process.

[0078] Furthermore, the operating mode switching controller is also equipped with a transient control program to protect the electrode surface of the energy analyzer body 201 from contamination when switching between different operating modes. By closing the ion inlet shutter during the switching process, no ion bombardment of the electrode surface is prevented during electrode voltage transients, thus avoiding contamination deposition caused by ion beam jitter, and significantly extending the maintenance cycle and service life of the energy analyzer.

[0079] In one embodiment, the energy analyzer body 201 includes a first electrode plate 2011 and a second electrode plate 2012 that are parallel to each other, and an ion transport and analysis channel is formed between the first electrode plate 2011 and the second electrode plate 2012. The ion inlet is at a preset angle relative to the ion transport and analysis channel; or the energy analyzer body 201 includes a plurality of cylindrical electrodes.

[0080] In this embodiment, the energy analyzer body 201 can be a parallel plate energy analyzer, which includes a first electrode plate 2011 and a second electrode plate 2012, which are arranged parallel to each other. By applying a DC voltage between the first electrode plate 2011 and the second electrode plate 2012, a uniform electrostatic deflection electric field is formed, thereby creating an ion transport and analysis channel between the first electrode plate 2011 and the second electrode plate 2012. Simultaneously, a programmable power supply unit is electrically connected to the first electrode plate 2011 and the second electrode plate 2012. The programmable power supply unit requires at least two independent programmable channels, enabling it to independently and accurately control the output voltage of the first electrode plate 2011 and the second electrode plate 2012 under the command of the controller.

[0081] The parallel-plate energy analyzer is designed based on second-order focusing theory. The ion inlet is at a preset angle relative to the ion transport and analysis channel, ensuring that ions are incident at this preset angle. The preset angle can be any value from 20°, 25°, 30°, 35°, 40°, or 45°, or any value between two of these; preferably, it is 30°. Under point source conditions, the parallel-plate energy analyzer with a 30° incident angle exhibits second-order focusing characteristics, and its optical performance is superior to all other 2π geometry electrostatic analyzers. Specifically, the conventional 45° incident angle parallel-plate energy analyzer only exhibits first-order focusing characteristics, with energy resolution linearly related to the deviation of the ion incident angle, making it highly sensitive to ion beam angular divergence. In contrast, the 30° incident angle analyzer exhibits second-order focusing characteristics, with energy resolution showing a second-order relationship (i.e., the square of the error) to the deviation of the ion incident angle, effectively reducing sensitivity to angular divergence. This indicates that under the same slit width and angular divergence conditions, the 30° incident angle parallel-plate energy analyzer achieves significantly higher energy resolution.

[0082] The main body 201 of the energy analyzer can also be a Bessel energy filter, which consists of multiple cylindrical electrodes, such as a cylindrical electrode, a centrally located disk electrode, and two endplate electrodes with central apertures. The Bessel energy filter has ion-receiving characteristics along the ion beam path axis. Ions are incident into the Bessel energy filter along the central axis, and a specific voltage combination is applied to the electrodes, forming an electrostatic field with a Bessel function distribution. Only ions with specific kinetic energies can stably advance along the axis in the electrostatic field and pass through the exit aperture; ions with inconsistent kinetic energies will deviate from the axis and be absorbed by striking the electrode walls. The cylindrical cavity geometry of the Bessel energy filter effectively blocks vacuum ultraviolet photons and soft X-rays from the ion source from reaching the downstream detector, thereby reducing background noise and making the mass spectrometer suitable for high-sensitivity detection scenarios.

[0083] Because Bessel energy filters consist of multiple stages of cylindrical electrodes, the programmable power supply unit requires more independent programmable channels, each corresponding to a specific cylindrical electrode, to independently control the output voltage of each electrode. For Bessel energy analyzers, different energy resolutions are achieved by changing the proportion of the output voltage applied to each electrode. Therefore, by adjusting the proportion of the output voltage at each electrode, the Bessel energy analyzer can obtain various energy resolution configurations ranging from wide passband to narrow passband.

[0084] In some implementations, the mass analyzer assembly 300 includes any one of a quadrupole mass analyzer, a time-of-flight mass analyzer, an ion trap mass analyzer, and a magnetic sector mass analyzer, giving the mass spectrometer good versatility and scalability. When the mass analyzer assembly 300 uses a quadrupole mass analyzer, a triple-filter structure is preferred, including a pre-barrel, a main quadrupole, and a rear pre-barrel arranged sequentially along the axial direction. The main quadrupole is driven by an independent RF power supply or DC power supply to achieve more accurate mass separation, while the pre-barrel and rear pre-barrel are only supplied with RF voltage to focus ions and reduce contamination of the main quadrupole.

[0085] When the mass analyzer assembly 300 uses a time-of-flight mass analyzer, the energy analyzer assembly 200 works in conjunction with the time-of-flight analyzer. The energy analyzer assembly 200 performs energy screening of ions before performing time-of-flight mass separation, which can effectively improve the mass resolution.

[0086] When the mass analyzer assembly 300 employs a magnetic sector mass analyzer, the energy analyzer assembly 200 can be used as the electrostatic analyzer portion of a dual-focusing mass spectrometer.

[0087] On the other hand, such as Figure 3 As shown, the present invention also provides a control method for a mass spectrometry device with a variable configuration energy analyzer, applied to the mass spectrometry device with a variable configuration energy analyzer as described above. The control method includes the following steps: Step S100: Receive the switching instruction and parse the switching instruction to determine the target operating mode of the energy analyzer; Step S200: Read the pre-stored target operating mode parameter group corresponding to the target operating mode; Step S300: Based on the target operating mode parameter set, and in conjunction with the variable slit mechanism 202, adjust the slit width for ions to enter and / or leave the energy analyzer body 201; Step S400: Based on the target operating mode parameter group and in conjunction with the programmable power supply unit, adjust the output voltage of each electrode in the energy analyzer to the target value; Step S500: Adjust the working state of the ion source component 100 based on the target working mode parameter group to complete the switching of the target working mode of the energy analyzer.

[0088] In this embodiment, the operating mode switching controller receives a switching command from the host computer via a communication interface, parses the content of the switching command to determine the target operating mode of the energy analyzer, such as the first operating mode or the second operating mode. Then, it reads the pre-stored target operating mode parameter set corresponding to the target operating mode from the memory, including but not limited to the ion inlet slit width setting value, the ion outlet slit width setting value, the electrode voltage setting values ​​of the energy analyzer body 201, and the ion source operating status setting value. Next, the motor driver of the operating mode switching controller sends a pulse signal to the stepper motor of the variable slit mechanism 202, driving the stepper motor to rotate in a specified direction and number of steps. The rotational motion output by the stepper motor is converted into linear motion of the slider via the transmission screw, which moves the blade baffle to the target position, thereby adjusting the slit width for ions to enter and / or leave the energy analyzer body 201. The adjustment of the ion inlet slit width and the ion outlet slit width can be performed in parallel to shorten the switching time. The relationship between the rotation angle of the stepper motor and the slit width is pre-calibrated by the design parameters of the transmission screw lead and the transmission assembly 2022.

[0089] The power control interface of the operating mode switching controller is then used to send target voltage configuration data to each programmable power supply unit. Upon receiving the instruction, the programmable power supply unit adjusts the output voltage of each electrode to the target value. Furthermore, the ion source control interface of the operating mode switching controller is used to adjust the operating state of the ion source assembly 100, enabling or disabling the ionization function, thereby achieving the switching of the energy analyzer's target operating mode. For the second operating mode, the ion source assembly 100 is controlled to disable the ionization function and enter transmission mode; for the first operating mode, the ion source assembly 100 is controlled to enable the ionization function.

[0090] By coordinating the variable slit mechanism 202, the electrode system 203, and the operating mode switching controller, the same mass spectrometer can flexibly switch between two operating modes: wide energy acquisition and high sensitivity, and narrow passband and high energy resolution. This resolves the contradiction that existing fixed-parameter energy analyzers cannot simultaneously meet the needs of different analytical tasks. Compared to purchasing multiple mass spectrometers with different configurations, this effectively reduces the user's equipment investment costs and maintenance complexity.

[0091] By pre-storing the target operating mode parameter group and using a parallel control strategy, the parameters for all operating modes are pre-calculated and calibrated, and can be directly called when switching operating modes without real-time calculation. At the same time, the slit width, the output voltage of each electrode, and the operating status of the ion source component 100 are adjusted simultaneously, thereby effectively reducing the operating mode switching time and ensuring that the operating mode switching time can be controlled within the set time, meeting the requirements for online real-time switching in the process.

[0092] In one embodiment, the control method further includes: After determining the target operating mode of the energy analyzer, the ion inlet shutter of the mass spectrometer is kept closed. After adjusting the working state of the ion source assembly 100, wait for the output voltage of each electrode in the energy analyzer to stabilize; After waiting for the target time to be met, the ion inlet shutter is opened.

[0093] In this embodiment, after determining the target operating mode of the energy analyzer, if the mass spectrometer is equipped with an ion inlet shutter, the ion inlet shutter is first closed to prevent contamination deposition on the energy analyzer surface caused by ion beam jitter due to transient electrode voltage changes during the switching of operating modes. After adjusting the operating state of the ion source assembly 100, a target waiting time is allowed to stabilize the output voltage of each electrode in the energy analyzer. This waiting time can be any value among 35ms, 40ms, 45ms, and 50ms, or any value between two of these. The specific waiting time can be adjusted according to the actual power supply response characteristics. Finally, the ion inlet shutter is opened to restore ion transmission, completing the switching of the energy analyzer to the target operating mode.

[0094] In one specific embodiment, a mass spectrometry device with a variable-configuration energy analyzer includes: an ion source assembly 100, which is a radially symmetric open electron bombardment ion source equipped with a dual-filament structure. A mode switching electrode is connected to a controller, which can activate the electron bombardment ionization function in a first operating mode and deactivate the ionization function and enter transmission mode in a second operating mode.

[0095] The energy analyzer assembly 200 includes a parallel plate energy analyzer, comprising a first electrode plate 2011 and a second electrode plate 2012 that are parallel to each other. The distance between the first electrode plate 2011 and the second electrode plate 2012 is 8 mm, and the length of each electrode plate 2011 and the second electrode plate 2012 is 60 mm. The ion inlet is incident at a 30° angle relative to the ion transport and analysis channel between the first electrode plate 2011 and the second electrode plate 2012. Based on the second-order focusing theory, it achieves high energy resolution in a compact structure. The energy analysis range is 0-100 eV. The variable slit mechanism 202 includes a stepper motor, a transmission screw, a slider, and a baffle. The output shaft of the stepper motor is driven by the transmission screw, the slider is connected to the transmission screw, and the baffle is installed on the slider. This allows the slit width for ions to enter the energy analyzer body 201 to be 0.1 mm-3.0 mm, and the slit width for ions to leave the energy analyzer body 201 to be 0.1 mm-5.0 mm. The stepper motor is vacuum-compatible, and the blade baffle is coated with titanium nitride. The electrode system 203 includes a programmable power supply unit, which is based on a high-voltage operational amplifier with an output range of -500V to 500V and a switching time of <20ms.

[0096] The mass analyzer assembly 300 is a quadrupole mass analyzer with a main quadrupole diameter of 6 mm and a length of 125 mm, providing a mass range of 1-300 amu. It employs a triple-filter structure, with only RF voltage applied to the pre- and post-pre-amplifiers. The detector assembly 400 is an electron multiplier pulsed ion counting detector with a gain >10. 7 The vacuum chamber is connected to a differential pumping system, which uses a combination of an 80L / s turbomolecular pump and an ion pump. The differential pressure pumping design optimizes the vacuum distribution in different areas.

[0097] The operating mode switching controller pre-stores a first operating mode parameter set and a second operating mode parameter set. The first operating mode parameter set corresponds to the first operating mode, i.e., wide energy acquisition and high sensitivity operating mode; the second operating mode parameter set corresponds to the second operating mode, i.e., narrow passband and high energy resolution operating mode. The specific parameters for the first and second operating modes are shown in Table 1. Table 1

[0098] As shown in Table 1, in this embodiment of the invention, when the mass spectrometer is in the first operating mode, the inlet slit width at the inlet end of the energy analyzer body 201 is 1.5 mm, the outlet slit width at the outlet end of the energy analyzer body 201 is 3.0 mm, the voltage of the first electrode plate 2011 is 0 V, the second electrode plate 2012 scans from 0 V to 100 V in 1 V steps, the band width of the energy analyzer assembly 200 is 10 eV, and the ion source assembly 100 is in ionization mode. When the mass spectrometer is in the second operating mode, the inlet slit width at the inlet end of the energy analyzer body 201 is 0.2 mm, the outlet slit width at the outlet end of the energy analyzer body 201 is 0.3 mm, the voltage of the first electrode plate 2011 is 0 V, the second electrode plate 2012 scans from 0 V to 50 V in 0.05 V steps, the band width of the energy analyzer assembly 200 is 0.5 eV, the ion source assembly 100 is in ionization mode and enters transmission mode.

[0099] Furthermore, the timing parameters such as stepper motor response time, slit width adjustment time, and high-voltage power supply switching time are shown in Table 2: Table 2

[0100] As shown in Table 2, in this embodiment of the invention, the response time of the stepper motor is typically less than 10ms. Since the slit width can be adjusted in parallel, even if both the inlet and outlet slit widths need to be adjusted, the total adjustment time can be controlled to be less than 100ms. The high-voltage power supply switching time of the parallel plate energy analyzer is less than 50ms, and after the parallel plate energy analyzer switches power voltages, it needs to wait 50ms to allow the high-voltage power supply to establish a stable output. The opening and closing response time of the ion inlet shutter is less than 10ms. In summary, when switching operating modes, the total switching time can be less than 200ms. If only the inlet slit width is adjusted, the total switching time can be controlled to within 120ms.

[0101] Furthermore, a control method for a mass spectrometer with a variable configuration energy analyzer includes: a host computer issuing a working mode switching command; parsing the content of the switching command to determine the target working mode of the energy analyzer; detecting the current ion inlet shutter state, and if it is open, controlling the ion inlet shutter to close; wherein the response time of the ion inlet shutter closing is <10ms; sending a pulse signal to the stepper motor of the variable slit mechanism 202 through the motor driver of the working mode switching controller, driving the stepper motor to rotate in a specified direction and number of steps, and converting the rotational motion output by the stepper motor into the linear motion of the slider through the transmission screw, thereby moving the blade baffle to the target position, thereby adjusting the... The slit width for ions to enter and / or leave the energy analyzer body 201 is controlled, with a total switching time of less than 100ms. The voltage setting value in the pre-stored target operating mode parameter group is called, and the configuration data is sent to each programmable power supply unit via the SPI bus. After receiving the instruction, the programmable power supply unit adjusts the output voltage of each electrode to the target value. The operating state of the ion source assembly 100 is adjusted, such as turning the ionization function on or off. After waiting for 50ms, the output voltage of each electrode is stabilized. The ion inlet shutter is opened to resume ion transmission, completing the switching of the target operating mode of the energy analyzer. The total switching time is less than 200ms, meeting the requirements for online real-time switching in the process.

[0102] This invention also provides a computer-readable storage medium. The methods described above according to embodiments of the invention can be implemented in hardware or firmware, or implemented as computer code that can be recorded on a storage medium, or implemented as computer code downloaded via a network and originally stored on a remote storage medium or a non-transitory machine-readable storage medium and then stored on a local storage medium. Thus, the methods described herein can be processed by software stored on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. The storage medium can be a magnetic disk, optical disk, read-only memory, random access memory, flash memory, hard disk, or solid-state drive, etc.; further, the storage medium can also include combinations of the above types of memory. It is understood that computers, processors, microprocessor controllers, or programmable hardware include storage components capable of storing or receiving software or computer code, which, when accessed and executed by the computer, processor, or hardware, implements the methods shown in the above embodiments.

[0103] In the specific implementation of the above embodiments, the technical features can be combined in any non-contradictory way. For the sake of brevity, not all possible combinations of the above technical features are described. However, as long as the combination of these technical features is not contradictory, it should be considered to be within the scope of this specification.

[0104] The specific embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A mass spectrometry device with a variable-configuration energy analyzer, characterized in that, include: An ion source assembly (100), an energy analyzer assembly (200), a mass analyzer assembly (300), and a detector assembly (400) are sequentially connected in series along the ion transport path. The energy analyzer assembly (200) includes an energy analyzer body (201), a variable slit mechanism (202), and an electrode system (203); the variable slit mechanism (202) is disposed at the inlet end and / or outlet end of the energy analyzer body (201); the electrode system (203) includes a programmable power supply unit, which is electrically connected to each electrode of the energy analyzer body (201); The mass spectrometer also includes a mode switching controller, which is communicatively connected to the variable slit mechanism (202), the programmable power supply unit and the ion source assembly (100), respectively. The mode switching controller has at least two sets of target mode parameters pre-stored in it. The operating mode switching controller is configured to, upon receiving an instruction to switch the target operating mode parameter group, control the variable slit mechanism (202) to adjust the slit width for ions to enter and / or leave the energy analyzer body (201), control the programmable power supply unit to switch the voltage configuration of the electrodes, and adjust the operating state of the ion source assembly (100).

2. The mass spectrometry device with a variable configuration energy analyzer according to claim 1, characterized in that, The variable slit mechanism (202) includes a drive assembly (2021), a transmission assembly (2022), an actuation assembly (2023), and a position detection assembly (2024); the transmission assembly (2022) is connected to the output shaft of the drive assembly (2021), and the actuation assembly (2023) is disposed on the transmission assembly (2022); the position detection assembly (2024) is located on one side of the actuation assembly (2023) and is used to detect the position of the actuation assembly (2023).

3. The mass spectrometry device with a variable configuration energy analyzer according to claim 2, characterized in that, The drive assembly (2021) includes a stepper motor; the transmission assembly (2022) includes a lead screw and a slider, the slider being connected to the lead screw, and the lead screw being connected to the output shaft of the stepper motor. The execution component (2023) includes a baffle mounted on the slider.

4. The mass spectrometry device with a variable configuration energy analyzer according to claim 3, characterized in that, The baffle has an inclined surface near the slit end, the inclined surface is inclined toward the energy analyzer body (201), and the surface of the baffle is provided with a protective coating.

5. The mass spectrometry apparatus with a variable configuration energy analyzer according to claim 3, characterized in that, The target operating mode parameter group includes a first operating mode parameter group and a second operating mode parameter group; The first operating mode parameter group is configured as follows: the slit width of the ion entering the energy analyzer body (201) is ≥1.0mm, the slit width of the ion leaving the energy analyzer body (201) is ≥2.0mm, the band width of the energy analyzer assembly (200) is 5eV-15eV, and the ion source assembly (100) is enabled for ionization. The second operating mode parameter group is configured as follows: the slit width of the ions entering the energy analyzer body (201) is ≤0.3mm, the slit width of the ions leaving the energy analyzer body (201) is ≤0.5mm, the band width of the energy analyzer assembly (200) is 0.3eV-1.0eV, and the ion source assembly (100) is turned off.

6. The mass spectrometry apparatus with a variable configuration energy analyzer according to claim 5, characterized in that, The operating mode switching controller includes: A memory is used to pre-store the first operating mode parameter group and the second operating mode parameter group; A motor driver is electrically connected to the stepper motor; A power control interface is electrically connected to the programmable power supply unit; An ion source control interface is electrically connected to the ion source assembly (100).

7. The mass spectrometry apparatus with a variable configuration energy analyzer according to claim 1, characterized in that, The energy analyzer body (201) includes a first electrode plate (2011) and a second electrode plate (2012) that are parallel to each other. An ion transport and analysis channel is formed between the first electrode plate (2011) and the second electrode plate (2012). The ion inlet is at a preset angle relative to the ion transport and analysis channel; or The energy analyzer body (201) includes several cylindrical electrodes.

8. The mass spectrometry apparatus with a variable configuration energy analyzer according to claim 1, characterized in that, The slit width of the ions entering the energy analyzer body (201) is 0.1mm-3.0mm, and the slit width of the ions leaving the energy analyzer body (201) is 0.1mm-5.0mm.

9. A control method for a mass spectrometer with a variable configuration energy analyzer, characterized in that, The control method, applied to a mass spectrometer with a variable-configuration energy analyzer as described in any one of claims 1-8, comprises: Receive a switching instruction and parse the switching instruction to determine the target operating mode of the energy analyzer; Read the pre-stored target operating mode parameter group corresponding to the target operating mode; Based on the target operating mode parameter set, and in conjunction with the variable slit mechanism, the slit width for ions to enter and / or leave the energy analyzer body is adjusted; Based on the target operating mode parameter set, and in conjunction with the programmable power supply unit, the output voltage of each electrode in the energy analyzer is adjusted to the target value; The operating state of the ion source component is adjusted based on the target operating mode parameter set to complete the switching of the target operating mode of the energy analyzer.

10. The control method for a mass spectrometer with a variable configuration energy analyzer according to claim 9, characterized in that, The control method further includes: After determining the target operating mode of the energy analyzer, the ion inlet shutter of the mass spectrometer is controlled to be closed; After adjusting the operating state of the ion source assembly, wait for the output voltage of each electrode in the energy analyzer to stabilize; After waiting for the target time to be met, the ion inlet shutter is opened.

11. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that, when executed by a processor, implement the control method of the mass spectrometer device with a variable-configuration energy analyzer as described in any one of claims 9-10.

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