Intelligent production equipment for electronic-grade tungsten hexafluoride

Abstract

The utility model relates to the technical field of tungsten hexafluoride production, and discloses intelligent production equipment for electronic-grade tungsten hexafluoride, which comprises a cooling box body, material guide pipes are arranged on the left side and the right side of the cooling box body in a penetrating manner, and cooling pipes are wound outside the material guide pipes; the water adding pipe is arranged on the left side of the cooling box body in a penetrating manner; the temperature sensor is arranged on the right side of the inner surface of the cooling box body; and the display screen is arranged on the outer surface of the cooling box body. According to the intelligent production equipment for the electronic-grade tungsten hexafluoride, a material guide pipe and a partition plate are arranged to be of a detachable structure, cleaning liquid can be injected into the material guide pipe for shaking cleaning after the material guide pipe is detached, the interior of the cooling box body can be fully cleaned, it is avoided that much water scale adheres to the interior of the cooling box body and the interior of the material guide pipe, and the service life of the cooling box body is prolonged. And the conveyed tungsten hexafluoride can be scattered and conveyed through the first baffle plate and the second baffle plate, so that sufficient heat dissipation of the tungsten hexafluoride is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of tungsten hexafluoride production, in particular to intelligent production equipment for electronic-grade tungsten hexafluoride. Background Art

[0002] Tungsten hexafluoride is a colorless and odorless gas at room temperature and pressure. It is mainly used as the wiring material of integrated circuits. Therefore, with the development of integrated circuits, the demand for electronic-grade tungsten hexafluoride is increasing. Because tungsten hexafluoride is usually made in a high-temperature and high-pressure environment, a cooling device is required to cool the tungsten hexafluoride during the production and preparation process.

[0003] The currently authorized announcement number is: CN218380067U, a cooling device for tungsten hexafluoride production, including a transmission pipe for tungsten hexafluoride production output, a cooling box for the transmission pipe, and a cooling water circulation pump, the end of the transmission pipe passes through the support seat at the bottom of the cooling box and is connected to the receiving device, and the transmission pipe is provided with a cooling section arranged in the cooling box; the outer wall of the cooling section is spirally provided with a cooling water circulation pipe that fits the outer surface of the cooling section, the lower part of the cooling box is provided with a bow-shaped cooling water pipe, and the output of the cooling water circulation pump The first output pipe and the second output pipe are connected to the end through a three-way valve, and the first output pipe and the second output pipe are connected to the cooling water circulation pipe and the cold water pipe respectively; the transmission pipe for the production and output of tungsten hexafluoride runs through the cooling box, and a cooling water circulation pipe in contact with the cooling section on the transmission pipe is arranged in the cooling box, so that when the produced tungsten hexafluoride is output to the inside of the container through the transmission pipe, the cooling water in the cooling box immerses the cooling section of the transmission pipe arranged in the cooling box, and the heat generated by the production of tungsten hexafluoride discharged by the cooling section itself is cooled by the cooling water.

[0004] However, there are also some problems in the use of the above-mentioned cooling device for tungsten hexafluoride production. For example, the above-mentioned device cools the pipeline for transporting tungsten hexafluoride by passing cold water into the cooling pipe, and the cooling water is stored inside the box. Since the pipeline and the device adopt an integrated structure, as the use time increases, there is more scale inside the pipeline and the box, which will cause pipeline blockage during subsequent use. Utility Model Content

[0005] The utility model aims to provide an intelligent production device for electronic-grade tungsten hexafluoride. By arranging the pipeline as a detachable structure, the pipeline can be disassembled and cleaned, and the inside of the box can be fully cleaned by disassembly.

[0006] To achieve the above purpose, the utility model provides the following technical solutions: an intelligent production equipment for electronic grade tungsten hexafluoride, comprising a cooling box, a material guide pipe is provided through the left and right sides of the cooling box, a cooling pipe is provided around the outside of the material guide pipe, and a heat dissipation fin group is provided at the middle position of the lower end of the cooling box;

[0007] Also includes:

[0008] A water supply pipe is provided on the left side of the cooling box through the cooling box;

[0009] A temperature sensor is arranged on the right side of the inner surface of the cooling box;

[0010] A display screen is arranged on the outer surface of the cooling box, and the display screen is electrically connected to the temperature sensor through a wire;

[0011] The limiting component is arranged outside the cooling box, and the limiting component and the outer surface of the material guide pipe are in contact with each other;

[0012] The partition assembly is arranged on the inner surface of the cooling box.

[0013] Preferably, a first baffle and a second baffle are provided inside the material guiding tube, and the outer surfaces of the first baffle and the second baffle are set to be smooth. Through the above structure, the purpose of breaking up and conveying the conveyed material can be achieved under the action of the first baffle and the second baffle.

[0014] Preferably, the limiting assembly includes a fixed plate and a pulling plate, and the left and right sides of the outer surface of the cooling box body are interconnected with the fixed plate, and the pulling plate is inserted into a groove provided on the fixed plate. Through the above structure, it is convenient to support and limit the pulling plate through the fixed plate.

[0015] Preferably, the limiting assembly also includes a pulling spring and a clamping plate, and the pulling spring is installed on the pulling plate, and the pulling spring and the fixed plate are interconnected, the clamping plate and the pulling plate are connected to each other, and the clamping plate and the outer surface of the material guide tube are in contact with each other. Through the above structure, it is convenient to clamp and fix the outside of the material guide tube through the clamping plate, thereby realizing stable limiting installation of the material guide tube.

[0016] Preferably, the partition assembly includes a sealing rail and a sealing plate, and the sealing rail is installed on the inner surface of the cooling box body, and the sealing plate is tightly fitted with the sealing rail through a groove opened on the sealing rail. Through the above structure, the sealing plate is conveniently tightly fitted with the groove opened on the sealing rail, thereby ensuring the sealing effect between the partition plate and the cooling box body.

[0017] Preferably, the partition assembly also includes a partition plate and a fastening screw, and a sealing plate is installed at the lower end of the partition plate. The fastening screw passes through the plate-like structure arranged on the upper end of the partition plate, and the fastening screw is connected to the cooling box body through a threaded hole opened on the cooling box body. Through the above structure, the partition plate can be fixedly installed on the cooling box body under the action of the fastening screw.

[0018] Compared with the prior art, the beneficial effects of the utility model are as follows: the intelligent production equipment of electronic grade tungsten hexafluoride adopts a new structural design, and by setting the material guide pipe and the partition plate as a detachable structure, it is possible to realize that after the material guide pipe is disassembled, a cleaning liquid can be injected into the interior thereof for shaking and cleaning, and the interior of the cooling box can be fully cleaned to avoid the adhesion of a large amount of scale to the interior of the cooling box and the material guide pipe, thereby ensuring the heat dissipation effect of the tungsten hexafluoride, and the transported tungsten hexafluoride can be scattered and transported by the first baffle plate and the second baffle plate, thereby ensuring sufficient heat dissipation of the tungsten hexafluoride. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the main three-dimensional structure of the cooling box of the utility model;

[0020] Figure 2 This is a right-view stereoscopic structural diagram of the display screen of the utility model;

[0021] Figure 3 This is a schematic diagram of the three-dimensional structure of the cooling pipe of the utility model from top view;

[0022] Figure 4 This is a schematic diagram of the three-dimensional cross-sectional structure of the material guide pipe of the utility model;

[0023] Figure 5 It is a schematic diagram of the three-dimensional cross-sectional structure of the partition plate of the utility model.

[0024] In the figure: 1. cooling box; 2. material guide pipe; 3. cooling pipe; 4. heat dissipation fin group; 5. water supply pipe; 6. temperature sensor; 7. display screen; 8. first baffle plate; 9. second baffle plate; 10. limit assembly; 1001. fixing plate; 1002. pulling plate; 1003. pulling spring; 1004. clamping plate; 11. partition assembly; 1101. sealing track; 1102. sealing plate; 1103. partition plate; 1104. fastening screws. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1-Figure 5 The utility model provides a technical solution: an intelligent production equipment for electronic grade tungsten hexafluoride, comprising a cooling box 1, a material guide pipe 2 is provided on the left and right sides thereof, a cooling pipe 3 is wound around the outside of the material guide pipe 2, and a heat dissipation fin group 4 is provided at the middle position of the lower end of the cooling box 1; a water supply pipe 5 is provided on the left side of the cooling box 1; a temperature sensor 6 is provided on the right side of the inner surface of the cooling box 1; a display screen 7 is provided on the outer surface of the cooling box 1, and the display screen 7 is electrically connected to the temperature sensor 6 through a wire; a first baffle 8 and a second baffle 9 are provided inside the material guide pipe 2, and the outer surfaces of the first baffle 8 and the second baffle 9 are provided to be smooth;

[0027] When it is necessary to cool the electronic grade tungsten hexafluoride in the production process, the material box of tungsten hexafluoride is connected to the guide pipe 2, and then the tungsten hexafluoride enters the guide pipe 2, and then the first baffle 8 and the second baffle 9 can be used to break up the tungsten hexafluoride that has entered, so that the tungsten hexafluoride can be fully cooled later. Then, the cooling water at the lower end of the cooling box 1 is extracted by the water pump arranged on the extension pipe on the right side of the cooling pipe 3. At this time, the cooling water in the cooling pipe 3 begins to fully cool the tungsten hexafluoride in the guide pipe 2 (the cooling water begins to transfer heat with the high-temperature tungsten hexafluoride, and the temperature of the cooling water begins to rise). At this time, the heated cooling water enters the cooling box 1 through the extension pipe arranged on the left side of the cooling pipe 3. At the lower end, the cooling water after the temperature rises in the cooling box 1 can be dissipated and cooled by the heat dissipation fin group 4, and the temperature sensor 6 can be used to measure the temperature of the water at the lower end of the cooling box 1, and then displayed on the display screen 7, so as to achieve the purpose of intelligently detecting the temperature of the cooling water in the cooling box 1, so as to ensure that the tungsten hexafluoride in the guide pipe 2 is cooled evenly (avoiding the tungsten hexafluoride from cooling too fast due to the low cooling water temperature and affecting the quality of the tungsten hexafluoride, and avoiding the tungsten hexafluoride from cooling too slowly due to the high cooling water temperature), so as to ensure the cooling effect of the tungsten hexafluoride, and as the use time increases, water can be added to the cooling box 1 through the water adding pipe 5, so as to avoid the cooling box 1 from having too little water and affecting the heat dissipation effect;

[0028] The limiting component 10 is arranged on the outside of the cooling box 1, and the limiting component 10 and the outer surface of the guide tube 2 are mutually attached; the partition component 11 is arranged on the inner surface of the cooling box 1; the limiting component 10 includes a fixed plate 1001 and a pulling plate 1002, and the left and right sides of the outer surface of the cooling box 1 are interconnected with the fixed plate 1001, and the pulling plate 1002 is penetrated in a groove provided on the fixed plate 1001; the limiting component 10 also includes a pulling spring 1003 and a clamping plate 1004, and the pulling spring 1003 is installed on the pulling plate 1002, and the pulling spring 1003 and the fixed plate 1001 are mutually connected, and the clamping plate 1004 and the pulling plate 1002 The partition assembly 11 includes a sealing track 1101 and a sealing plate 1102, and the sealing track 1101 is installed on the inner surface of the cooling box 1, and the sealing plate 1102 is tightly fitted with the sealing track 1101 through a groove opened on the sealing track 1101; the partition assembly 11 also includes a partition plate 1103 and a fastening screw 1104, and the sealing plate 1102 is installed at the lower end of the partition plate 1103, and the fastening screw 1104 is penetrated and arranged on the plate-like structure at the upper end of the partition plate 1103, and the fastening screw 1104 is connected to the cooling box 1 through a threaded hole opened on the cooling box 1;

[0029] When it is necessary to clean the inside of the cooling box 1 and disassemble the material guide tube 2 for cleaning, the pulling plate 1002 is pulled, and the pulling plate 1002 begins to move away from the fixed plate 1001. Because the pulling plate 1002 is equipped with a pulling spring 1003, the pulling spring 1003 begins to be stretched and deformed. Because the pulling plate 1002 is equipped with a clamping plate 1004, the clamping plate 1004 begins to move away from the material guide tube 2 (the outer surface of the material guide tube 2 is set to a matte structure, and the surface of the arc-shaped groove opened on the clamping plate 1004 is also set to a matte structure) until the clamping plate 1004 is no longer in contact with the material guide tube 2. At this time, it is no longer in contact with the material guide tube 2. The material guide tube 2 is then pulled to realize the disassembly of the material guide tube 2, and then the fastening screw 11 is turned. 04, so that the fastening screw 1104 starts to move away from the plate-like structure at the upper end of the partition plate 1103, until the fastening screw 1104 is no longer connected to the threaded hole opened on the cooling box body 1, at this time, the limit between the cooling box body 1 and the partition plate 1103 is released, and then the partition plate 1103 is pulled upward, and the partition plate 1103 begins to drive the sealing plate 1102 to move away from the sealing track 1101, until the sealing plate 1102 is no longer fitted with the groove opened on the sealing track 1101, at this time, the partition plate 1103 can be removed, and the cooling pipe 3 can be disassembled (the cooling pipe 3 is fixedly arranged on the partition plate 1103), so that the lower surface of the interior of the cooling box body 1 can be fully scrubbed, and the inside of the cooling pipe 3 can be shaken and cleaned to ensure the cleaning effect.

[0030] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An intelligent production device for electronic grade tungsten hexafluoride, comprising a cooling box (1), a material guide pipe (2) penetrating the left and right sides of the cooling box, a cooling pipe (3) wound around the outside of the material guide pipe (2), and a heat dissipation fin group (4) arranged at the middle position of the lower end of the cooling box (1); It is characterized in that Also includes: A water supply pipe (5) is provided through the left side of the cooling box (1); A temperature sensor (6) is arranged on the right side of the inner surface of the cooling box (1); A display screen (7) is arranged on the outer surface of the cooling box (1), and the display screen (7) is electrically connected to the temperature sensor (6) via a wire; A limit assembly (10) is arranged outside the cooling box (1), and the limit assembly (10) and the outer surface of the material guide tube (2) are in contact with each other; The partition assembly (11) is arranged on the inner surface of the cooling box body (1).

2. The intelligent production equipment for electronic grade tungsten hexafluoride according to claim 1, characterized in that: A first baffle plate (8) and a second baffle plate (9) are arranged inside the material guiding tube (2), and the outer surfaces of the first baffle plate (8) and the second baffle plate (9) are arranged to be smooth.

3. The intelligent production equipment for electronic grade tungsten hexafluoride according to claim 1, characterized in that: The limiting assembly (10) comprises a fixed plate (1001) and a pulling plate (1002), and the left and right sides of the outer surface of the cooling box (1) are interconnected with the fixed plate (1001), and the pulling plate (1002) is arranged to penetrate a groove provided on the fixed plate (1001).

4. The intelligent production equipment for electronic grade tungsten hexafluoride according to claim 3 is characterized in that: The limiting assembly (10) further comprises a pulling spring (1003) and a clamping plate (1004), wherein the pulling spring (1003) is mounted on the pulling plate (1002), and the pulling spring (1003) and the fixing plate (1001) are interconnected, and the clamping plate (1004) and the pulling plate (1002) are interconnected, and the clamping plate (1004) and the outer surface of the material guide tube (2) are in contact with each other.

5. The intelligent production equipment for electronic grade tungsten hexafluoride according to claim 1, characterized in that: The partition assembly (11) comprises a sealing track (1101) and a sealing plate (1102), wherein the sealing track (1101) is mounted on the inner surface of the cooling box (1), and the sealing plate (1102) is tightly fitted to the sealing track (1101) via a groove provided on the sealing track (1101).

6. The intelligent production equipment for electronic grade tungsten hexafluoride according to claim 5, characterized in that: The partition assembly (11) further comprises a partition plate (1103) and a fastening screw (1104), and a sealing plate (1102) is installed at the lower end of the partition plate (1103), and the fastening screw (1104) penetrates the plate-like structure at the upper end of the partition plate (1103), and the fastening screw (1104) is connected to the cooling box (1) through a threaded hole opened on the cooling box (1).

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