Accurate alignment floating module

Abstract

The utility model belongs to the technical field of alignment floating modules, and discloses an accurate alignment floating module, which comprises a base, a test module is mounted on the base, a plurality of support blocks are mounted on the lower end face of the base, the bottom ends of the support blocks are connected with calibration probes, a screw limiting plate is arranged above the base, and the screw limiting plate is connected with the test module. A screw limiting plate is arranged on the support block, a plurality of support blocks are arranged on the screw limiting plate, a plurality of mounting grooves are formed in the screw limiting plate, equal-height screws are arranged in the mounting grooves, a protection plate is arranged above the screw limiting plate, the protection plate is made of composite materials, and a through groove is formed in the protection plate. Compared with an existing positioning mode, the positioning and debugging device has the advantages of being simple in structure, easy to debug and install, low in cost, accurate in product positioning and faster in debugging.

Description

Technical Field

[0001] The utility model belongs to the technical field of alignment floating modules, and in particular relates to a precise alignment floating module. Background Art

[0002] In today's society, science and technology are developing rapidly, and the requirements for product positioning accuracy are getting higher and higher. In the chip manufacturing process, different graphic layers need to be aligned to ensure the accuracy and performance of the final chip. The precise alignment floating module can align different graphic layers on the chip at the nanometer level by using precise optical systems and mechanical control.

[0003] The existing precision alignment floating module needs manual debugging when in use. The high-precision processing cost is high, the manual debugging is difficult to control and time-consuming, and the technical level of the debugging personnel is high, which makes the space limited and makes the equipment difficult to operate. Utility Model Content

[0004] The purpose of the utility model is to provide a precise positioning floating module to solve the problems of manual debugging proposed in the above-mentioned background technology, high precision processing cost, difficult and time-consuming manual debugging, high technical level requirements for the debugging personnel, limited space, and difficult operation of the equipment.

[0005] To achieve the above objectives, the utility model provides the following technical solutions: a precise alignment floating module, comprising: a base, on which a test module is installed, a plurality of support blocks are installed on the lower end surface of the base, and the bottom ends of the plurality of support blocks are connected to calibration probes.

[0006] Preferably, a screw limiting plate is provided above the base, a plurality of mounting slots are formed on the screw limiting plate, and screws of equal height are provided in each of the plurality of mounting slots.

[0007] Preferably, a protective plate is provided above the screw limiting plate, and the protective plate is made of a composite material.

[0008] Preferably, a through slot is provided on the protection plate, and the position of the through slot corresponds to the mounting slot.

[0009] Preferably, the outer wall of the protection plate is provided with a protective coating, and the protective coating is provided with a fire retardant coating and a waterproof coating.

[0010] Preferably, a limiting groove is provided on the screw limiting plate, a limiting column is installed on the upper end surface of the base, and the limiting groove and the limiting column are matched.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] (1) The utility model helps the device to perform positioning and debugging by providing support blocks and calibration probes. When in use, multiple support blocks and calibration probes are automatically aligned to help the device to perform positioning and debugging, thereby reducing positioning errors, simplifying manual operations, and reducing the probability of manual errors. Compared with existing positioning methods, the utility model has a simple structure, is easy to debug and install, has a low cost, can accurately position products, and can be debugged more quickly.

[0013] (2) The utility model optimizes the space requirement by providing mounting grooves and equal-height screws. When in use, the bearing is installed in the mounting groove, the equal-height screws are screwed, and the equal-height screws are combined with the shaft, thereby simplifying the design, optimizing the space requirement, and increasing safety and efficiency. The bearing is used to assist in calibration, thereby avoiding the tilting that would be caused by the equal-height screws alone. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 It is a three-dimensional diagram of the utility model;

[0016] Figure 3 This is the appearance diagram of the utility model;

[0017] Figure 4 for Figure 1 A magnified view of part A in FIG.

[0018] Figure 5 for Figure 1 A magnified view of part B in FIG.

[0019] In the figure: 1. Base; 2. Support block; 3. Calibration probe; 4. Screw limit plate; 5. Test module; 6. Mounting slot; 7. Equal height screws; 8. Protection plate; 9. Through slot; 10. Protective coating; 11. Limit slot; 12. Limit column. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-Figure 4 As shown, the utility model provides the following technical solutions: a precise alignment floating module, comprising: a base 1, a test module 5 is installed on the base 1, a plurality of support blocks 2 are installed on the lower end surface of the base 1, and the bottom ends of the plurality of support blocks 2 are all connected to calibration probes 3.

[0022] Through the above technical solution:

[0023] When in use, multiple support blocks 2 and calibration probes 3 are automatically aligned to help the equipment to perform positioning and debugging, thereby reducing the positioning error. The test module 5 uses precise sensors and motion control systems to accurately align the floating module to achieve micro-nano level positioning accuracy, ensuring the precise placement of the workpiece at the required position. This module is automatically aligned, which simplifies manual operation and reduces the chance of manual errors. Compared with existing positioning methods, the present invention has a simple structure, is easy to debug and install, has a low cost, can accurately position the product, and can be debugged more quickly.

[0024] See also Figure 1-Figure 5 As shown, a screw limiting plate 4 is provided above the base 1 , and a plurality of mounting grooves 6 are formed on the screw limiting plate 4 , and screws 7 of equal height are provided in the plurality of mounting grooves 6 .

[0025] Furthermore, a limiting groove 11 is provided on the screw limiting plate 4 , and a limiting column 12 is installed on the upper end surface of the base 1 , and the limiting groove 11 and the limiting column 12 are matched.

[0026] Through the above technical solution:

[0027] When in use, align the limit groove 11 and the limit column 12 so that the limit column 12 enters the limit groove 11, which is convenient for quick installation of the screw limit plate 4, and then install the bearing into the installation groove 6, screw the equal height screw 7, and merge the equal height screw 7 with the shaft, which simplifies the design and optimizes the space requirement. This mechanism is modular and easy to operate manually. There is no need to frequently replace modules, which reduces the chance of errors and saves debugging time. While reducing errors, it improves work efficiency and occupies less space, reducing the space requirement for products and equipment.

[0028] For further information, see Figure 1 As shown, a protection plate 8 is provided above the screw limiting plate 4, and the protection plate 8 is made of a composite material.

[0029] Furthermore, a through slot 9 is formed on the protection plate 8 , and the position of the through slot 9 corresponds to the mounting slot 6 .

[0030] Furthermore, the outer wall of the protection plate 8 is provided with a protective coating 10, and the protective coating 10 is provided with a fire retardant coating and a waterproof coating.

[0031] Specifically, the protection plate 8 can protect the equipment. The composite material is composed of a variety of materials, including glass fiber reinforced plastic and carbon fiber composite materials. The composite material makes the protection plate 8 have higher strength and rigidity, and has the advantages of light weight and corrosion resistance, which can enhance the service life of the equipment. The through groove 9 on the protection plate 8 can facilitate the installation of equal height screws 7 in the installation groove 6, thereby improving work efficiency. The fire retardant coating in the protective coating 10 includes acrylic resin and silicate, which can produce a chemical reaction when a fire occurs to form a carbonized layer or a heat-insulating layer to slow down the spread of the fire. The waterproof coating includes acrylic emulsion and polyurethane emulsion, which can form a sealing layer to prevent moisture from entering the equipment or structure and play a waterproof protection role.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A precise alignment floating module, characterized in that: include: A base (1) is provided with a test module (5) mounted on the base (1); a plurality of support blocks (2) are mounted on the lower end surface of the base (1); and the bottom ends of the plurality of support blocks (2) are all connected to calibration probes (3).

2. The precise alignment floating module according to claim 1, characterized in that: A screw limiting plate (4) is provided above the base (1), a plurality of mounting grooves (6) are provided on the screw limiting plate (4), and screws (7) of equal height are provided in the plurality of mounting grooves (6).

3. The precise alignment floating module according to claim 2, characterized in that: A protective plate (8) is provided above the screw limiting plate (4), and the protective plate (8) is made of a composite material.

4. The precise alignment floating module according to claim 3, characterized in that: The protection plate (8) is provided with a through slot (9), and the position of the through slot (9) corresponds to the mounting slot (6).

5. The precise alignment floating module according to claim 4, characterized in that: The outer wall of the protection plate (8) is provided with a protective coating (10), and the protective coating (10) is provided with a fireproof coating and a waterproof coating.

6. The precise alignment floating module according to claim 5, characterized in that: A limiting groove (11) is provided on the screw limiting plate (4), a limiting column (12) is installed on the upper end surface of the base (1), and the limiting groove (11) and the limiting column (12) are matched.

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