Heating pipe

Abstract

The utility model relates to the technical field of electric heating tubes, in particular to a heating tube, which is used for generic semiconductor equipment and comprises a tube base body and an electric heating film layer, the tube base body is provided with a spiral tube part, at least part of the electric heating film layer is located on the outer wall of the spiral tube part, the screw pitch of the spiral tube part is Dj, the outer radius of the spiral tube part is r, and Dj is larger than 3r. The screw pitch of the spiral pipe part and the outer radius of the spiral pipe part are reasonably arranged, it can be guaranteed that the electrothermal film layer of the spiral pipe part is arranged more evenly, and the evenly-arranged electrothermal film layer can guarantee the better fluid heating effect.

Description

Technical Field

[0001] The utility model relates to the technical field of electric heating tubes, in particular to a heating tube. Background Art

[0002] Fluid heating equipment can be used in the semiconductor, photovoltaic solar energy, display panels, testing equipment, micro-chemical and other industries, such as wet cleaning equipment in semiconductor processes. Fluid heating equipment can be applied to multiple links, such as etching and degumming, ultrapure water cleaning, etc. These all require heating of acid and alkali liquids, chemical liquids, pure water or ultrapure water. By increasing the temperature of the cleaning liquid, the cleaning effect is improved and the cleaning speed is accelerated.

[0003] At present, the liquid flow rate in semiconductor wet cleaning equipment is relatively large. In order to meet the heating efficiency, the heating tube is designed to be spiral. The structural design of the spiral heating tube in the prior art is unreasonable, resulting in uneven setting of the electric heating film on the surface of the spiral heating tube. The uneven electric heating film will affect the heating effect and the service life of the electric heating tube. Utility Model Content

[0004] The utility model aims to solve the problems pointed out in the background technology and provides a heating tube.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A heating tube for use in pan-semiconductor equipment comprises a tube substrate and an electric heating film layer, wherein the tube substrate has a spiral tube portion, at least part of the electric heating film layer is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion is D_j, and the outer radius of the spiral tube portion is r, wherein D_j>3r.

[0007] The outer radius r of the spiral tube portion satisfies: 4mm≤r≤40mm; and\or, the thermal distance d of the spiral tube portion satisfies: d≥5mm; and\or, the number of spiral turns n of the spiral tube portion satisfies: 3≤n≤20; and\or, the wall thickness t of the tube substrate satisfies: 1.5mm≤t≤3mm; and\or, the middle diameter Dm of the spiral tube portion satisfies: 15mm≤Dm≤300mm, and / or, the pitch of the spiral tube portion is D_j, the outer radius of the spiral tube portion is r, wherein D_j>4r.

[0008] The tube base includes a first connecting section and a second connecting section, the first connecting section and the second connecting section are respectively located at two ends of the spiral tube portion, the first connecting section has an integrated first joint portion, and the second connecting section has an integrated second joint portion.

[0009] The first connecting section includes a first straight tube portion, one end of the first straight tube portion is connected to the spiral tube portion, the other end of the first straight tube portion is connected to the first joint portion, and the first straight tube portion and the first joint portion are integrally arranged; and\or, the second connecting section includes a second straight tube portion, one end of the second straight tube portion is connected to the spiral tube portion, the other end of the second straight tube portion is connected to the second joint portion, and the second straight tube portion and the second joint portion are integrally arranged.

[0010] The first joint portion includes an integrated first reduced diameter portion and a first expanded diameter portion, the first reduced diameter portion is connected to the first straight tube portion, and the outer diameter of the first reduced diameter portion is smaller than the outer diameters of the first straight tube portion and the first expanded diameter portion; and\or, the second joint portion includes an integrated second reduced diameter portion and a second expanded diameter portion, the second reduced diameter portion is connected to the second straight tube portion, and the outer diameter of the second reduced diameter portion is smaller than the outer diameters of the second straight tube portion and the second expanded diameter portion.

[0011] The outer diameters of the first straight tube portion and the second straight tube portion are equal to the outer diameter of the spiral tube portion, and the spiral tube portion, the first connecting section, and the second connecting section are integrally arranged; or, the outer diameters of the first straight tube portion and the second straight tube portion are larger than or smaller than the outer diameter of the spiral tube portion, and the spiral tube portion is respectively welded and fixed to the first connecting section and the second connecting section.

[0012] The heating tube comprises at least two first electrode layers, two second electrode layers, and a first conductive element connected to at least two first electrode layers, and a second conductive element connected to at least two second electrode layers, wherein the first electrode layers and the second electrode layers are alternately arranged, and the first electrode layers and the second electrode layers are silver electrode layers;

[0013] The first conductive element includes at least two first copper electrodes and a first wire, the first copper electrodes correspond to and are connected to the first electrode layer one by one, the first wire is connected to at least two first copper electrodes, the second conductive element includes at least two second copper electrodes and a second wire, the second copper electrodes correspond to and are connected to the second electrode layer one by one, the second wire is connected to at least two second copper electrodes, the width of the first electrode layer and the second electrode layer are both 5mm-8mm, and the width of the copper electrode is 3mm-5mm; or the first conductive element is a silver wire wrapped around the first electrode layer, the second conductive element is a silver wire wrapped around the second electrode layer, the width of the first electrode layer and the second electrode layer are both 8mm-10mm, and the wire diameter of the silver wire is 0.2mm-1.0mm.

[0014] The silver wire is connected to a power source, and a first high-temperature insulating sheath is provided on the surface of a portion of the silver wire that is not in contact with the first electrode layer and the second electrode layer;

[0015] Alternatively, a second high-temperature insulating sheath is provided on the surface of the portion where the first conductive wire and the second conductive wire are not in contact with the first copper electrode and the second copper electrode.

[0016] It is defined that the first copper electrode and the second copper electrode are both copper electrodes, and the first electrode layer and the second electrode layer are both electrode layers. The copper electrode includes an annular portion wrapped around the outer circumference of the electrode layer and a power connection portion integrally formed with the annular portion, and the annular portion includes a plurality of elastic portions protruding outward. A silver layer is provided at a portion where the copper electrode contacts the electrode layer, and the thickness of the silver layer is 30um-200um. The thickness of the copper electrode is 0.2mm-0.5mm.

[0017] The total length of the heating area of ​​the electric heating film layer on the tube substrate is L, wherein 1000mm≤L≤4000mm.

[0018] The utility model provides a heating tube, which has the beneficial effect that the pitch of the spiral tube portion and the outer radius of the spiral tube portion are reasonably set, which can ensure that the electric heating film layer of the spiral tube portion is set more evenly, and the evenly set electric heating film layer can ensure a better fluid heating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0020] Figure 2 It is a left-side structural schematic diagram of the utility model;

[0021] Figure 3 This is a schematic diagram of the radial cross-section structure of the tube substrate of the utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the tube substrate of the utility model in a straightened state;

[0023] Figure 5 It is a partial structural schematic diagram of the utility model;

[0024] Figure 6 This is a schematic diagram of the assembly structure of the metal element and the tube substrate of the utility model;

[0025] Figure 7 This is a schematic diagram of the winding structure of the silver wire and the tube matrix of the utility model;

[0026] Figure 8 The structure diagram of the copper electrode connection method of the utility model is shown in FIG. Figure 1 ;

[0027] Fig. 9 The structure diagram of the copper electrode connection method of the utility model is shown in FIG. Figure 2 .

[0028] In the figure: tube substrate 1, electric heating film layer 2, electrode layer 3, annular portion 6, power connection portion 7, elastic portion 8, spiral tube portion 9, first connecting section 10, second connecting section 11, first joint portion 102, second joint portion 112, first reduced diameter portion 1021, first expanded diameter portion 1022, second reduced diameter portion 1121, second expanded diameter portion 1122, first electrode layer 31, second electrode layer 32, first conductive element 41, second conductive element 42, first wire 412, second wire 422, first copper electrode 411, second copper electrode 421. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0030] refer to Figure 1-9 A heating tube for use in pan-semiconductor equipment comprises a tube substrate 1 and an electric heating film layer 2, wherein the tube substrate 1 comprises a spiral tube portion 9, at least part of the electric heating film layer 2 is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion 9 is D_j, and the outer radius of the spiral tube portion is r, wherein D_j>3r.

[0031] The tube base 1 of the device is provided with a spiral tube portion 9, and at least the outer wall of the spiral tube portion 9 is provided with an electric heating film layer 2. The electric heating film layer 2 is energized to conduct heat to the tube base 1, and the fluid is heated when passing through the tube base 1. The pitch of the spiral tube portion 9 of the device and the outer radius of the spiral tube portion are reasonably set, which can ensure that the setting of the electric heating film layer 2 of the spiral tube portion is more uniform, and the uniformly set electric heating film layer 2 can ensure a better fluid heating effect.

[0032] The pitch of the spiral tube portion 9 is D_j, and the outer radius of the spiral tube portion 9 is r, wherein D_j>3r; the pitch of the spiral tube portion 9 is greater than 3 times of its outer radius, so that the electric heating film layer 2 can be evenly plated on the outer surface of the spiral tube portion 9; it is understandable that when the pitch of the spiral tube portion 9 is not greater than 3 times of its outer radius, the uniformity of the coating inside and outside the spiral tube is difficult to ensure, and the film on the inside will be significantly thinner than the outside, affecting the normal use of the heating tube. Preferably, the pitch of the spiral tube portion 9 is greater than 3.5 times of its outer radius, so as to take into account the printing of the electrode layer of the heating tube and the uniform setting of the electric heating film. Furthermore, the pitch of the spiral tube portion 9 is greater than 4 times of its outer radius to ensure the quality of the heating tube.

[0033] The electric heating tube has a spiral tube portion 9, which can reduce the space occupancy rate of the electric heating equipment and is very suitable for heating pan-semiconductor equipment, including integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment material industries, including semiconductors.

[0034] The electric heating film layer 2 of the device can be attached to the tube substrate by spraying or coating.

[0035] The outer radius r of the spiral tube portion satisfies: 4mm≤r≤40mm; and\or, the thermal distance d of the spiral tube portion satisfies: d≥5mm, where the thermal distance d refers to the minimum distance between the outer walls of two adjacent spiral units of the spiral tube portion 9; and\or, the number of spiral turns n of the spiral tube portion satisfies: 3≤n≤20; and\or, the wall thickness t of the tube matrix satisfies: 1.5mm≤t≤3mm; and\or, the median diameter Dm of the spiral tube portion satisfies: 15mm≤Dm≤300mm.

[0036] The larger the outer radius r of the tube base, the larger the flow rate of the heated fluid needs to be. Otherwise, the lower the Reynolds number of the fluid when flowing through the inner wall of the quartz tube, the more likely it is to be in a laminar state. The temperature distribution at the center of the heated fluid is quite different from the temperature close to the inner wall of the quartz tube. The thinner the wall thickness, the better the heat transfer effect and the obvious energy saving effect. However, the wall thickness cannot be too thin, which will affect the mechanical strength of the quartz glass. The closer the distance between similar spiral segments, that is, the smaller the thermal distance, the greater the radiation temperature rise. Excessive thermal radiation will affect the service life of the heating tube. The greater the power density of the heating tube, the higher the fluid heating temperature, and the greater the required thermal distance d.

[0037] refer to Figure 1 The tube base includes a first connecting section 10 and a second connecting section 11, which are respectively located at the two ends of the spiral tube portion 9, and the first connecting section 10 has an integrated first joint portion 102, and the second connecting section 11 has an integrated second joint portion 112. The first connecting section 10 and the second connecting section 11 are arranged at the two ends of the spiral tube portion 9 for connecting external equipment, such as connecting a PILLAR connector.

[0038] As an implementation mode of the first connecting section 10 and the second connecting section 11, the first connecting section 10 includes a first straight tube portion 101, one end of the first straight tube portion 101 is connected to the spiral tube portion 9, the other end of the first straight tube portion 101 is connected to the first joint portion 102, and the first straight tube portion 101 and the first joint portion 102 are integrally arranged; and\or, the second connecting section 11 includes a second straight tube portion 111, one end of the second straight tube portion 111 is connected to the spiral tube portion, the other end of the second straight tube portion 111 is connected to the second joint portion 112, and the second straight tube portion 111 and the second joint portion 112 are integrally arranged. The arrangement of the first straight tube portion 101 and the second straight tube portion 111 can better connect external equipment.

[0039] As an implementation mode of the first joint part 102 and the second joint part 112, the first joint part 102 includes an integrated first reduced diameter part 1021 and a first expanded diameter part 1022, the first reduced diameter part 1021 is connected to the first straight tube part 101, and the outer diameter of the first reduced diameter part 1021 is smaller than the outer diameters of the first straight tube part 101 and the first expanded diameter part 1022; and / or, the second joint part 112 includes an integrated second reduced diameter part 1121 and a second expanded diameter part 1122, the second reduced diameter part 1121 is connected to the second straight tube part 111, and the outer diameter of the second reduced diameter part 1121 is smaller than the outer diameters of the second straight tube part 111 and the second expanded diameter part 1122. The Cao feature is formed by the arrangement of the first reduced diameter part 1021 and the first expanded diameter part 1022, and the second reduced diameter part 1121 and the second expanded diameter part 1122, so that the joint of the external equipment can be better connected.

[0040] As another embodiment, the outer diameters of the first straight tube portion 101 and the second straight tube portion 111 are equal to the outer diameter of the spiral tube portion 9, and the spiral tube portion, the first connecting segment 10, and the second connecting segment 11 are integrally arranged; or, the outer diameters of the first straight tube portion 101 and the second straight tube portion 111 are larger than or smaller than the outer diameter of the spiral tube portion 9, and the spiral tube portion is respectively welded and fixed to the first connecting segment 10 and the second connecting segment 11, and different molding methods can be selected according to different external equipment.

[0041] refer to Figure 7-Figure 9 The heating tube includes at least two first electrode layers 31, two second electrode layers 32, and a first conductive element 41 connecting at least two first electrode layers, and a second conductive element 42 connecting at least two second electrode layers 32. The first electrode layers 31 and the second electrode layers 32 are arranged alternately. The first electrode layers 31 and the second electrode layers 32 are silver electrode layers. A heating area is formed between every two adjacent electrode layers. By arranging a plurality of first electrode layers 31 and a second electrode layer 32, the electric heating tube forms a plurality of heating areas, thereby reducing the resistance of the electric heating film layer, improving the heating efficiency, and facilitating extending the service life of the heating tube.

[0042] refer to Figure 7 The first conductive element 41 is a silver wire wrapped around the first electrode layer 31, and the second conductive element 42 is a silver wire wrapped around the second electrode layer 32. The width of the first electrode layer 31 and the second electrode layer 32 are both 8mm-10mm, and the wire diameter of the silver wire is 0.2mm-1.0mm. The multiple electric heating areas are connected in series through the silver wire, and the power connection method is simple, which reduces the complexity of the structure;

[0043] As another way to connect the heating tube to the power supply, refer to Figure 8The first conductive element 41 includes at least two first copper electrodes 411 and a first wire 412. The first copper electrodes correspond to and are connected to the first electrode layer one by one. The first wire is connected to at least two first copper electrodes. The second conductive element 42 includes at least two second copper electrodes 421 and a second wire 422. The second copper electrodes correspond to and are connected to the second electrode layer 32 one by one. The second wire is connected to at least two second copper electrodes. The width of the first electrode layer 31 and the second electrode layer 32 is 5mm-8mm, and the width of the copper electrode 5 is 3mm-5mm. The copper electrodes and the wires are used to connect multiple heating areas in series. This power connection method has lower cost and longer service life.

[0044] As another embodiment of copper electrode connection, refer to Fig. 9 When the heating power is relatively large, the first conductive element 41 and the second conductive element 42 are set to be multiple groups connected in series to avoid excessive current affecting the service life and safety of the wire.

[0045] The silver wire is connected to the power supply, and a first high-temperature insulating sheath is provided on the surface of the portion of the silver wire that is not in contact with the first electrode layer 31 and the second electrode layer 32;

[0046] Alternatively, a second high-temperature insulating sheath is provided on the surface of the first wire 412, the second wire 422 that is not in contact with the first copper electrode 411, the second copper electrode 421. The high-temperature insulating sheath can ensure a safe distance between the conductor silver wire or the wire and the heating film layer, and will not cause electrical safety risks. The high-temperature insulating sheath is generally able to withstand a temperature between 500-1000 degrees.

[0047] The first copper electrode 411 and the second copper electrode 421 are both defined as copper electrodes, the first electrode layer 31 and the second electrode layer 32 are both defined as electrode layers 3, the copper electrode includes an annular portion 6 wrapped around the outer circumference of the electrode layer, and a power connection portion 7 integrally formed with the annular portion 6, the annular portion 6 includes a plurality of elastic portions 8 protruding outward, and a silver layer is provided at a portion where the copper electrode contacts the electrode layer, the thickness of the silver layer is 30um-200um, and the thickness of the copper electrode is 0.2mm-0.5mm.

[0048] The elastic part 8 can make up for the dimensional tolerance of the tube substrate and ensure a close fit. The use of copper electrodes has the advantages of low cost and high efficiency assembly. A silver layer is provided at the contact portion between the copper electrode and the electrode layer to reduce the contact resistance between the copper electrode clamp and the silver electrode layer.

[0049] The total length of the heating area of ​​the electric heating film layer 2 on the tube substrate 1 is L, wherein 1000 mm ≤ L ≤ 4000 mm.

[0050] The above is only a preferred specific implementation method of the utility model, but the protection scope of the utility model is not limited thereto. Any technical solution, concept, and design obtained by equivalent replacement or change based on the technical solution and utility model concept of the utility model by any technician familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model.

Claims

1. A heating tube for use in pan-semiconductor equipment, characterized in that: The invention comprises a tube substrate (1) and an electric heating film layer (2), wherein the tube substrate (1) has a spiral tube portion (9), at least part of the electric heating film layer (2) is located on the outer wall of the spiral tube portion, the pitch of the spiral tube portion (9) is D_j, and the outer radius of the spiral tube portion is r, wherein D_j>3r.

2. A heating tube according to claim 1, characterized in that: The outer radius r of the spiral tube portion satisfies: 4mm≤r≤40mm; and\or, the thermal distance d of the spiral tube portion satisfies: d≥5mm; and\or, the number of spiral turns n of the spiral tube portion satisfies: 3≤n≤20; and\or, the wall thickness t of the tube substrate satisfies: 1.5mm≤t≤3mm; and\or, the middle diameter Dm of the spiral tube portion satisfies: 15mm≤Dm≤300mm; and / or, the pitch of the spiral tube portion (9) is D_j, the outer radius of the spiral tube portion is r, wherein D_j>4r.

3. A heating tube according to claim 1 or 2, characterized in that: The tube base comprises a first connecting section (10) and a second connecting section (11), the first connecting section (10) and the second connecting section (11) being respectively located at two ends of the spiral tube portion (9), the first connecting section (10) having an integral first joint portion (102), and the second connecting section (11) having an integral second joint portion (112).

4. A heating tube according to claim 3, characterized in that: The first connecting section (10) comprises a first straight tube portion (101), one end of the first straight tube portion (101) is connected to the spiral tube portion (9), the other end of the first straight tube portion (101) is connected to the first joint portion (102), and the first straight tube portion (101) and the first joint portion (102) are integrally arranged; and / or, the second connecting section (11) comprises a second straight tube portion (111), one end of the second straight tube portion (111) is connected to the spiral tube portion, the other end of the second straight tube portion (111) is connected to the second joint portion (112), and the second straight tube portion (111) and the second joint portion (112) are integrally arranged.

5. A heating tube according to claim 4, characterized in that: The first joint portion (102) comprises an integrated first diameter-reducing portion (1021) and a first diameter-expanding portion (1022), the first diameter-reducing portion (1021) is connected to the first straight tube portion (101), and the outer diameter of the first diameter-reducing portion (1021) is smaller than the outer diameters of the first straight tube portion (101) and the first diameter-expanding portion (1022); and\or, the second joint portion (112) comprises an integrated second diameter-reducing portion (1121) and a second diameter-expanding portion (1122), the second diameter-reducing portion (1121) is connected to the second straight tube portion (111), and the outer diameter of the second diameter-reducing portion (1121) is smaller than the outer diameters of the second straight tube portion (111) and the second diameter-expanding portion (1122).

6. A heating tube according to claim 4, characterized in that: The outer diameters of the first straight tube portion (101) and the second straight tube portion (111) are equal to the outer diameter of the spiral tube portion (9), and the spiral tube portion, the first connecting section (10), and the second connecting section (11) are integrally arranged; or, the outer diameters of the first straight tube portion (101) and the second straight tube portion (111) are greater than or less than the outer diameter of the spiral tube portion (9), and the spiral tube portion is respectively fixed to the first connecting section (10) and the second connecting section (11) by welding.

7. A heating tube according to claim 1 or 2 or 4 or 5, characterized in that: The heating tube comprises at least two first electrode layers (31), two second electrode layers (32), and a first conductive element (41) connecting at least two first electrode layers, and a second conductive element (42) connecting at least two second electrode layers (32), wherein the first electrode layers (31) and the second electrode layers (32) are arranged alternately, and the first electrode layers (31) and the second electrode layers (32) are silver electrode layers; The first conductive element (41) comprises at least two first copper electrodes (411) and a first wire (412), the first copper electrodes correspond to and are connected to the first electrode layer one by one, the first wire is connected to at least two of the first copper electrodes, the second conductive element (42) comprises at least two second copper electrodes (421) and a second wire (422), the second copper electrodes correspond to and are connected to the second electrode layer (32) one by one, the second wire is connected to at least two of the second copper electrodes, the width of the first electrode layer (31) and the second electrode layer (32) are both 5 mm-8 mm, and the width of the copper electrode (5) is 3 mm-5 mm; or the first conductive element (41) is a silver wire wound around the first electrode layer (31), the second conductive element (42) is a silver wire wound around the second electrode layer (32), the width of the first electrode layer (31) and the second electrode layer (32) are both 8 mm-10 mm, and the wire diameter of the silver wire is 0.2 mm-1.0 mm.

8. A heating tube according to claim 7, characterized in that: A first high-temperature insulating sheath is provided on the surface of the portion of the silver wire that is not in contact with the first electrode layer (31) and the second electrode layer (32); Alternatively, a second high-temperature insulating sheath is provided on the surface of the portion of the first conductive wire (412) or the second conductive wire (422) that is not in contact with the first copper electrode (411) or the second copper electrode (421).

9. The heating tube according to claim 7, characterized in that: The first copper electrode (411) and the second copper electrode (421) are both copper electrodes, and the first electrode layer (31) and the second electrode layer (32) are both electrode layers. The copper electrode comprises an annular portion (6) wrapped around the outer circumference of the electrode layer, and a power connection portion (7) integrally formed with the annular portion (6). The annular portion (6) comprises a plurality of elastic portions (8) protruding outward. A silver layer is provided at a portion where the copper electrode contacts the electrode layer. The thickness of the silver layer is 30 um to 200 um. The thickness of the copper electrode is 0.2 mm to 0.5 mm.

10. A heating tube according to claim 1 or 2 or 4 or 5 or 8 or 9, characterized in that: The total length of the heating area of ​​the electric heating film layer (2) on the tube substrate (1) is L, wherein 1000mm≤L≤4000mm.

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