Helium recovery device for helium mass spectrum leak detection
By designing a helium recovery device including a multi-layer filter screen, the problems of poor sealing and poor filtration of existing devices are solved, and better sealing and efficient filtration of helium are achieved.
Patent Information
- Application Number
- CN202421484593.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-06-27
AI Technical Summary
The existing helium recovery device with helium mass spectrometry leak detection has poor sealing properties, resulting in helium overflow and lacks an effective filtration system.
A helium recovery device including a detection chamber, an outlet pipe, a recovery mechanism and a plurality of filter screens is designed. The recovery mechanism realizes the flow rate control and filtration of helium through the air pipe and resistor structure, including a helium screen, an oil removal screen and a drying screen.
Improves the sealing of the device, avoids helium overflow, and effectively removes oil film and moisture through a multi-layer filtration system, ensuring the recovered helium is dry and pure.
Smart Images
Figure CN222866155U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of helium mass spectrometer leak detection and recovery, in particular to a helium gas recovery device used for helium mass spectrometer leak detection. Background Art
[0002] The helium recovery device for helium mass spectrometer leak detection combines gas separation, storage and transportation technologies to recover and reuse the helium used in the leak detection process. The helium recovery device for helium mass spectrometer leak detection combines gas separation, storage and transportation technologies to recover and reuse the helium used in the leak detection process.
[0003] The existing helium recovery devices for helium mass spectrometer leak detection generally have a gas delivery system: this system is responsible for delivering the separated and stored helium to the helium mass spectrometer leak detection equipment for detection. It usually includes components such as gas pipelines, valves, and pressure regulators, which can control the flow and pressure of helium. Ensure that helium can be stably delivered to the leak detection equipment to ensure the accuracy and reliability of detection;
[0004] However, the existing helium recovery devices for helium mass spectrometry leak detection generally have gaps in their valves, which cannot achieve complete closure of the device, resulting in poor sealing of the device. If the device is left for too long, helium will overflow from the device. In addition, the device does not have a good filtering device. Therefore, a helium recovery device for helium mass spectrometry leak detection is proposed to solve the above problems. Utility Model Content
[0005] In order to make up for the above shortcomings, the utility model provides a helium recovery device for helium mass spectrometry leak detection, aiming to improve the problems of poor sealing structure and poor filtering system in the prior art.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a helium recovery device for helium mass spectrometry leak detection, comprising a detection box, one side of the upper end of the detection box is fixedly connected with an outlet pipe, the other side of the upper end of the detection box is fixedly connected with a recovery mechanism, one end of the outlet pipe is fixedly connected with a helium cylinder, the recovery mechanism comprises component two, the bottom end of component two is fixedly connected to the detection box, component two comprises air pipe two, the air pipe two is fixedly connected to the detection box, one upper part of one side of the air pipe two is fixedly connected with component one, component one comprises air pipe one, one end of the air pipe one is fixedly connected to air pipe two, the other end of the air pipe one is fixedly connected with a recovery cylinder, and an air pump is fixedly connected to the upper middle part of one side of the recovery cylinder.
[0007] The inspection box can provide a vacuum environment and a placement for the workpiece. The outlet pipe can ensure the circulation of helium to spray out while inspecting the workpiece. The helium cylinder provides a placement for helium, and the recovery mechanism ensures the recovery of helium. Component 2 ensures the flow rate of helium when recovering helium, gas pipe 2 ensures the circulation of nitrogen when the device recovers nitrogen, and component 1 ensures that the device can further filter helium. Gas pipe 1 ensures the circulation of helium.
[0008] As a further description of the above technical solution: a blocking ring 1 is fixedly connected to both sides of the inner middle part of the air pipe 1, and a helium screen is arranged in the middle part of the blocking ring 1.
[0009] The barrier ring 1 ensures that the helium screen will not move. The helium screen can recover helium for the device and further filter the helium;
[0010] As a further description of the above technical solution: a second blocking ring is fixedly connected to the bottom end of the inner middle portion of the second air pipe, and an oil removal screen is arranged at the upper end of the second blocking ring.
[0011] The purpose of the second stop ring is to prevent the oil removal screen from slipping off. The oil removal screen prevents the oil stains in the oil film on the workpiece from being recovered into the device during recovery.
[0012] As a further description of the above technical solution: a blocking ring three is provided at the upper end of the oil removal screen, and the blocking ring three is fixedly connected to the lower middle part of the inner ring of the air pipe two, and a drying screen is provided at the upper end of the blocking ring three.
[0013] The purpose of the barrier ring is to separate the drying screen and the oil removal screen so that they do not affect each other. The drying screen ensures that the helium recovered by the device is relatively dry;
[0014] As a further description of the above technical solution: a resistance ring four is provided at the upper end of the drying screen, and a plurality of inner magnets are fixedly connected to the resistance ring four. The resistance ring four is fixedly connected to the middle part of the inner side of the trachea two, and the lower ends of the plurality of inner magnets are slidably connected to the upper end of the resistance ring four, and the outer walls of the plurality of inner magnets are slidably connected to the inner side of the trachea two.
[0015] Block ring 4 provides a position for the inner magnet to slide, and the inner magnet provides movement conditions for the limit block;
[0016] As a further description of the above technical solution: a retaining ring is fixedly connected to the upper ends of the plurality of inner magnets, a limiting block is fixedly connected to the outer side of the retaining ring, a slide groove 1 is provided at the inner upper end of the air pipe 2, the limiting block is slidably connected to the slide groove 1, and a cross screw block is fixedly connected to the middle part of the retaining ring.
[0017] The retaining ring can block the opening of the air pipe 1 to achieve the purpose of controlling the flow. The limit block slides in the slide groove 1 to ensure that the retaining ring does not rotate. In addition, there is no limit block at its outlet to ensure better control of the flow. The cross screw block ensures that the retaining ring can move up and down;
[0018] As a further description of the above technical solution: a fixed block is fixedly connected to the middle of the multiple inner magnets, a screw rod is fixedly connected to the middle of the fixed block, the upper end of the screw rod is slidably connected to the inner top of the second air pipe, and a cross screw block is threadedly connected to the middle of the screw rod.
[0019] The fixed block in the middle of the inner magnet ensures that the lower end of the screw rod has a fixed place. The screw rod rotates with the inner magnet to ensure the up and down movement of the fixed block, which plays a role in closing the size of the helium sieve opening and achieving the effect of controlling the flow rate.
[0020] As a further description of the above technical solution: a plurality of external magnets are slidably connected to the upper middle portion of the outer side of the second trachea, an anti-slip ring plate is fixedly connected to the outer sides of the plurality of external magnets, a ring-shaped slider is fixedly connected to the upper ends of the plurality of external magnets, a ring-shaped slide groove is slidably connected to the upper end of the ring-shaped slider, a ring-shaped slide groove is provided at the lower end of the ring-shaped slide groove, the ring-shaped slide groove is slidably connected to the second slide groove, and the ring-shaped slide groove is fixedly connected to the second trachea.
[0021] The outer magnet rotates, and the coupling effect ensures that 1054 rotates, ensuring the flow rate is controlled. The anti-skid ring plate ensures that when the outer magnet rotates, the friction force can be increased to prevent slipping. The ring-shaped slider is slidably connected to the second slide groove of the ring-shaped slide groove, ensuring that the outer magnet can be relatively stably pushed to a certain part of the second air pipe.
[0022] The utility model has the following beneficial effects:
[0023] 1. In the utility model, the fixed block, the inner magnet, the screw rod, the ring-shaped slider limit block and the retaining ring structure are driven to work by the external magnet structure, so as to realize the upward movement of the retaining ring, control the size of the air pipe flow opening, and ensure the flow rate of helium. This component 2 does not require additional small holes to be opened in the device, thereby ensuring a better sealing effect of the entire device.
[0024] 2. In the utility model, with the cooperation of the structures of the second, third, fourth and first blocking rings, the oil removal screen, the drying screen and the helium screen can work to solve the problem that the traditional filtering device is lacking or the decontamination is not good enough. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 This is an overall schematic diagram of a helium recovery device for helium mass spectrometry leak detection proposed by the utility model;
[0026] Figure 2This is an overall schematic diagram of a recovery mechanism of a helium recovery device for helium mass spectrometry leak detection proposed by the utility model;
[0027] Figure 3 It is a partial schematic diagram of a recovery mechanism of a helium recovery device for helium mass spectrometry leak detection proposed by the utility model;
[0028] Figure 4 This is a disassembly diagram of component 1 and component 2 for helium mass spectrometer leak detection proposed by the utility model;
[0029] Figure 5 This is a dissection diagram of a circular slideway for helium mass spectrometer leak detection proposed by the utility model;
[0030] Figure 6 This is a sectional diagram of a gas pipe 2 for helium mass spectrometry leak detection proposed by the utility model;
[0031] Figure 7 The utility model provides a partial structural schematic diagram of a cross screw block for helium mass spectrometer leak detection.
[0032] Legend:
[0033] 1. Recovery mechanism; 101. Recovery cylinder; 102. Vacuum pump; 103. Component one; 1031. Air pipe one; 1032. Block ring one; 1033. Helium screen; 104. Component two; 1041. Air pipe two; 1042. Annular slideway; 1043. Annular slider; 1044. Block ring two; 1045. Oil removal screen; 1046. Block ring three; 1047. Drying screen; 1048. Block ring four; 1049. Block ring; 1050. Limit block; 1051. Anti-slip ring plate; 1052. External magnet; 1053. Screw rod; 1054. Internal magnet; 1055. Fixed block; 1056. Slideway one; 1057. Slideway two; 1058. Cross screw block; 2. Helium cylinder; 3. Detection box; 4. Air outlet pipe. DETAILED DESCRIPTION
[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0035] Reference Figure 1-Figure 3The utility model provides an embodiment: a helium recovery device for helium mass spectrometry leak detection, comprising a detection box 3, characterized in that: an upper end side of the detection box 3 is fixedly connected with an outlet pipe 4, the other upper end side of the detection box 3 is fixedly connected with a recovery mechanism 1, one end of the outlet pipe 4 is fixedly connected with a helium cylinder 2, the recovery mechanism 1 comprises a second component 104, the bottom end of the second component 104 is fixedly connected to the detection box 3, the second component 104 comprises a second air pipe 1041, the second air pipe 1041 is fixedly connected to the detection box 3, a component 103 is fixedly connected to an upper part of one side of the second air pipe 1041, the component 103 comprises a first air pipe 1031, one end of the first air pipe 1031 is fixedly connected to the second air pipe 1041, the other end of the first air pipe 1031 is fixedly connected to a recovery cylinder 101, and a vacuum pump 102 is fixedly connected to the upper middle part of one side of the recovery cylinder 101.
[0036] The detection box 3 can provide a vacuum environment and a placement position for the workpiece, the outlet pipe 4 can ensure the circulation of helium and spray out while detecting the workpiece, the helium cylinder 2 provides a placement position for helium, and the recovery mechanism 1 ensures the recovery of helium. Component 2 104 ensures the flow rate of helium when recovering helium, gas pipe 2 1041 ensures the circulation of nitrogen when the device recovers nitrogen, and component 1 103 ensures that the device can further filter helium. Gas pipe 1 1031 ensures the circulation of helium.
[0037] Reference Figure 3-Figure 5 , the blocking ring 1032 ensures that the helium screen 1033 will not move. The helium screen 1033 can further filter the helium for the device to recover the helium. The purpose of the blocking ring 2 1044 is to prevent the de-oiling screen 1045 from slipping off. The de-oiling screen 1045 prevents the oil stains in the oil film on the workpiece from being recovered into the device during recovery. The purpose of the blocking ring 3 1046 is to separate the drying screen 1047 and the de-oiling screen 1045 so that they do not affect each other. The drying screen 1047 ensures that the helium recovered by the device is relatively dry. The blocking ring 4 1048 provides a position for the sliding of the inner magnet 1054. The inner magnet 1054 provides movement conditions for the limit block 1050. The retaining ring 1049 ensures that the opening of the air pipe 1031 can be blocked to achieve the purpose of controlling the flow rate. The limit block 1050 slides in the slide groove 1056 to ensure that the retaining ring 1049 does not rotate. In addition, the limit block 1050 is not at the outlet 1030, which ensures that the flow rate can be better controlled. The cross screw block 1058 ensures that the retaining ring 1049 can move up and down. The fixed block 1055 in the middle of the inner magnet 1054 ensures that the lower end of the screw rod 1053 has a fixed place. The screw rod 1053 rotates with the inner magnet 1054 to ensure the up and down movement of the fixed block 1055, which plays a role in closing the size of the helium screen 1033 opening and achieving the effect of controlling the flow rate.
[0038] Reference Figure 3-Figure 6A plurality of external magnets 1052 are slidably connected to the upper middle part of the outer side of the second air pipe 1041, an anti-slip ring plate 1051 is fixedly connected to the outer side of the plurality of external magnets 1052, a circular slider 1043 is fixedly connected to the upper end of the plurality of external magnets 1052, a circular slide groove 1042 is slidably connected to the upper end of the circular slider 1043, a second slide groove 1057 is provided at the lower end of the circular slide groove 1042, the circular slider 1043 is slidably connected to the second slide groove 1057, and the circular slide groove 1042 is fixedly connected to the second air pipe 1041.
[0039] The outer magnet 1052 rotates, and the coupling effect ensures that 1054 rotates, ensuring the flow rate is controlled. The anti-skid ring plate 1051 ensures that when the outer magnet 1052 rotates, the friction force can be increased to prevent slipping. The ring-shaped slider 1043 is slidably connected to the second slide groove 1057 of the ring-shaped slide groove 1042, ensuring that the outer magnet 1052 can move relatively stably at a certain position on the second trachea 1041.
[0040] Working principle: first, turn on the switch of the helium cylinder (2) to detect the workpiece. After the detection is completed, turn on the vacuum pump (102). If the amount of recovered helium is to be controlled, first turn on the anti-slip ring plate (1051). Then, when the anti-slip ring plate (1051) is turned, the outer magnet (1052) will drive the inner magnet (1054) to rotate due to the coupling effect. The rotation of the inner magnet (1054) drives the screw rod (1053) to rotate. Since the screw rod (1053) rotates and the screw rod (1053) and the cross screw block (1058) are threadedly connected, it will slide with the limit block (1050) and (1949). Since the limit block (1050) is slidably connected to the slide groove (1056), it is ensured that the retaining ring (1049) will not rotate. The circular slide groove (1042) is fixedly connected to the second air pipe (1041), and the circular slider (1043) is slidably connected to the circular slide groove (1042), ensuring that the position of the outer magnet (1052) and the inner magnet (1054) are relatively stable while the outer magnet (1052) rotates.
[0041] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A helium recovery device for helium mass spectrometry leak detection, comprising a detection box (3), characterized in that: One side of the upper end of the detection box (3) is fixedly connected to an air outlet pipe (4), the other side of the upper end of the detection box (3) is fixedly connected to a recovery mechanism (1), one end of the air outlet pipe (4) is fixedly connected to a helium cylinder (2), the recovery mechanism (1) comprises a second component (104), the bottom end of the second component (104) is fixedly connected to the detection box (3), the second component (104) comprises a second air pipe (1041), the second air pipe (1041) is fixedly connected to the detection box (3), The air pipe 1 (1041) is fixedly connected to the detection box (3); the upper part of one side of the air pipe 2 (1041) is fixedly connected to the component 1 (103); the component 1 (103) comprises an air pipe 1 (1031); one end of the air pipe 1 (1031) is fixedly connected to the air pipe 2 (1041); the other end of the air pipe 1 (1031) is fixedly connected to the recovery cylinder (101); and the upper middle part of one side of the recovery cylinder (101) is fixedly connected to the exhaust fan (102).
2. A helium recovery device for helium mass spectrometry leak detection according to claim 1, characterized in that: A blocking ring (1032) is fixedly connected to both sides of the inner middle part of the air pipe (1031), and a helium screen (1033) is arranged in the middle part of the blocking ring (1032).
3. A helium recovery device for helium mass spectrometry leak detection according to claim 1, characterized in that: A second blocking ring (1044) is fixedly connected to the bottom end of the inner middle portion of the second air pipe (1041), and an oil removal screen (1045) is arranged at the upper end of the second blocking ring (1044).
4. A helium recovery device for helium mass spectrometry leak detection according to claim 3, characterized in that: The upper end of the oil removal screen (1045) is provided with a third blocking ring (1046), and the third blocking ring (1046) is fixedly connected to the lower middle part of the inner ring of the second air pipe (1041), and the upper end of the third blocking ring (1046) is provided with a drying screen (1047).
5. A helium recovery device for helium mass spectrometry leak detection according to claim 4, characterized in that: A resistance ring four (1048) is provided at the upper end of the drying screen (1047), and the resistance ring four (1048) is fixedly connected to a plurality of inner magnets (1054). The resistance ring four (1048) is fixedly connected to the middle part of the inner side of the second air pipe (1041), and the lower ends of the plurality of inner magnets (1054) are slidably connected to the upper end of the resistance ring four (1048), and the outer walls of the plurality of inner magnets (1054) are slidably connected to the inner side of the second air pipe (1041).
6. A helium recovery device for helium mass spectrometry leak detection according to claim 5, characterized in that: The upper ends of the plurality of inner magnets (1054) are fixedly connected with a retaining ring (1049), the outer side of the retaining ring (1049) is fixedly connected with a limiting block (1050), the inner upper end of the second air pipe (1041) is provided with a slide groove (1056), the limiting block (1050) is slidably connected to the slide groove (1056), and the middle part of the retaining ring (1049) is fixedly connected with a cross screw block (1058).
7. The helium recovery device for helium mass spectrometry leak detection according to claim 5, characterized in that: A fixing block (1055) is fixedly connected to the middle of the plurality of inner magnets (1054), a screw rod (1053) is fixedly connected to the middle of the fixing block (1055), the upper end of the screw rod (1053) is slidably connected to the inner top of the second air pipe (1041), and a cross screw block (1058) is threadedly connected to the middle of the screw rod (1053).
8. The helium recovery device for helium mass spectrometry leak detection according to claim 1, characterized in that: A plurality of external magnets (1052) are slidably connected to the upper middle portion of the outer side of the second trachea (1041); an anti-slip ring plate (1051) is fixedly connected to the outer sides of the plurality of external magnets (1052); a ring-shaped slider (1043) is fixedly connected to the upper ends of the plurality of external magnets (1052); a ring-shaped slide groove (1042) is slidably connected to the upper end of the ring-shaped slider (1043); a second slide groove (1057) is provided at the lower end of the ring-shaped slide groove (1042); the ring-shaped slider (1043) is slidably connected to the second slide groove (1057); and the ring-shaped slide groove (1042) is fixedly connected to the second trachea (1041).