Sample fixing device for electron probe microscopic analysis

Abstract

The utility model discloses a sample fixing device for electron probe microscopic analysis, belongs to the technical field of electron probe microscopic analysis equipment, and is used for fixing an analysis sample for electron probe microscopic analysis. According to the technical scheme, a base is a cylinder, the lower ends of two side plates are fixed to the two opposite sides of the top face of the base respectively, a plurality of sliding holes are evenly distributed in the top face of the base, a plurality of spring sleeves are embedded in the sliding holes respectively, supporting springs are placed in the spring sleeves, and the lower ends of the supporting springs are connected with the bottom face of the base in an abutting mode. The inner sides of the upper parts of the two side plates are respectively provided with two grooves, a clamping piece and the rear end of a conductive pointer are embedded in each groove, and the front ends of the clamping piece and the conductive pointer are respectively opposite to the upper end of a spring sleeve above the top surface of the base between the two side plates. The sample fixing device is simple in structure and convenient to use, and can be finely adjusted according to the shape and the size of a sample so as to adapt to samples with different shapes and sizes, so that the optimal sample fixing effect is realized, and the accuracy and the stability of an experiment are improved.

Description

Technical Field

[0001] The utility model relates to a device for fixing an electron probe microanalysis sample, belonging to the technical field of electron probe microanalysis equipment. Background Art

[0002] Electron probe microanalysis (EPMA) is a widely used microbeam analysis technique that can be used for quality management and quality inspection. It has the characteristics of microstructural analysis, extensive elemental analysis, quantitative accuracy, non-destructive analysis and rapidity. It has broad application prospects in fields such as materials science, geology, mineralogy and metallurgy.

[0003] During electron probe microanalysis, electrons emitted from a filament are accelerated by a high-voltage electron tube and then bombarded onto the sample surface. The high-voltage electrons excite the sample, emitting a characteristic X-ray signal. This X-ray signal is collected and analyzed by the probe to reveal the chemical composition of the detected location. During electron probe microanalysis, the sample's surface must be perpendicular to the electron beam to ensure accurate test results. X-rays are emitted from the sample surface at a certain angle. If the sample surface is uneven, the emitted X-rays may be irregularly absorbed, reducing the X-ray measurement intensity. Surface flatness is particularly critical for quantitative testing.

[0004] Currently, in actual operation, samples usually need to have their observation surface ground, polished, and cleaned before observation. They should then be placed upright in the sample holder and fixed with four screws on the left and right sides to make the observation surface of the sample level with the surface of the sample holder. However, in many cases, after cutting and subsequent manual grinding and polishing, although the observation surface of the sample is level, the bottom and side surfaces are uneven. As a result, during the process of fixing the sample, the entire sample cannot be placed inside the sample holder and can only be fixed in mid-air. Due to gravity, the sample may tilt during the process of fixing the screws. At the same time, it is difficult to operate when fixing the screws, resulting in uneven force on the four screw points, causing the sample to tilt. In this case, re-cutting, grinding, or re-removing and reinstalling the four screw points is time-consuming and labor-intensive, and does not achieve good results. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a sample fixing device for electron probe microanalysis, which can simplify the installation steps of electron probe microanalysis samples, reduce the operator's sample loading time, can stably fix irregular samples, and improve the accuracy and stability of the experiment.

[0006] The technical solution to the above technical problems is:

[0007] A sample fixing device for electron probe microanalysis, comprising a base, side plates, a spring sleeve, a support spring, a clamping piece, and a conductive pointer. The base is a cylinder, the top surface of the base and the cylinder wall are an integral structure, the bottom surface of the base is separated from the cylinder wall, and the bottom surface of the base and the cylinder wall are connected by fixing bolts. The side plates are upright arc-shaped plates, the lower ends of the two side plates are respectively fixed to the opposite sides of the top surface of the base, the top surface of the base is uniformly distributed with multiple sliding holes, and multiple spring sleeves are respectively embedded in the multiple sliding holes on the top surface of the base. The support spring is placed in the spring sleeve in the hole, the lower end of the support spring is tightly connected to the bottom surface of the base, the upper inner sides of the two side plates respectively have two grooves, each groove is embedded with the rear end of the clamping piece and the conductive pointer, the front ends of the clamping piece and the conductive pointer are respectively opposite to the upper end of the spring sleeve above the top surface of the base between the two side plates, the sample is placed above the spring sleeve, the bottom surface of the sample is in close contact with the top surfaces of multiple spring sleeves respectively, and the front ends of the clamping piece and the conductive pointer are pressed against the upper surface of the sample.

[0008] The sample fixing device for the above-mentioned electron probe microanalysis has an outer diameter of the spring sleeve that matches the diameter of the sliding hole on the top surface of the base, and the outer wall of the spring sleeve is in sliding fit with the inner wall of the sliding hole on the top surface of the base. The upper end of the spring sleeve is an arc-shaped top surface, and the outer periphery of the lower end of the spring sleeve has an annular protrusion, the outer diameter of the annular protrusion is larger than the diameter of the sliding hole on the top surface of the base, and the annular protrusion is located below the top surface of the base.

[0009] The sample clamping device for electron probe microanalysis mentioned above has screw holes on the top surfaces of the two side plates opposite to the groove, and the screw holes pass vertically downward through the top and bottom surfaces of the groove. The connecting bolts are installed in the screw holes from the top surface of the side plates downward, and the lower ends of the connecting bolts are screwed and connected with the screw holes below the bottom surface of the groove.

[0010] The above-mentioned irregular sample fixing device for action probe microscopic analysis has a rotation hole at the rear end of the clamping piece and the conductive pointer respectively, and the rear end of the clamping piece and the conductive pointer are overlapped and placed in the groove on the upper inner side of the side plate, and the rotation holes of the clamping piece and the conductive pointer are mounted on the rod body of the connecting bolt in the groove, and the rotation holes of the clamping piece and the conductive pointer are rotationally matched with the connecting bolt.

[0011] The beneficial effects of the utility model are:

[0012] The upper ends of the multiple spring sleeves of the utility model support the bottom surface of the sample. When the bottom surface of the sample has irregular undulations, the supporting springs in the spring sleeves can change their lengths accordingly, so that the heights of the multiple spring sleeves adapt to the undulations of the bottom surface of the sample to maintain the horizontal position of the upper surface of the sample; the rear ends of the clamping piece and the conductive pointer are fixed in the groove of the side plate by connecting bolts, and the upper end of the sample is pressed by the front ends of the clamping piece and the conductive pointer, and the clamping piece and the conductive pointer can rotate around the connecting bolts to adjust the position of the front ends of the clamping piece and the conductive pointer.

[0013] The utility model has a simple structure and is easy to use. It can be fine-tuned according to the shape and size of the sample to adapt to samples of different shapes and sizes, achieve the best sample fixing effect, and improve the accuracy and stability of the experiment; the clamping force and clamping angle can be adjusted when clamping the sample, so that the sample can be stably fixed and the experimental error can be reduced; the conductive pointer can ensure good electrical conductivity between the electronic probe and the sample, thereby improving the accuracy of signal transmission and measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 yes Figure 1 sectional view of

[0016] Figure 3 This is a schematic diagram of the installation of the clamping piece and the conductive pointer;

[0017] Figure 4 It is a cross-sectional view of the utility model for placing a sample;

[0018] Figure 5 For Figure 4 Top view of .

[0019] The markings in the figure are as follows: base 1, side plate 2, spring sleeve 3, support spring 4, clamping piece 5, conductive pointer 6, bottom surface 7, fixing bolt 8, sliding hole 9, annular protrusion 10, groove 11, screw hole 12, connecting bolt 13, sample 14. DETAILED DESCRIPTION

[0020] The utility model is composed of a base 1, a side plate 2, a spring sleeve 3, a support spring 4, a clamping piece 5, a conductive pointer 6, a fixing bolt 8, and a connecting bolt 13.

[0021] Figure 1 、 2 It is shown that the base 1 is a cylinder, the top surface of the base 1 and the cylindrical wall are an integrated structure, the top surface of the base 1 is evenly distributed with multiple sliding holes 9, the bottom surface 7 of the base 1 is separated from the cylindrical wall, and the bottom surface 7 of the base 1 and the cylindrical wall are connected by fixing bolts 8.

[0022] With such a structure, the spring sleeve 3 and the support spring 4 can be placed in the cylindrical inner cavity of the base 1. The sliding hole 9 on the top surface of the base 1 can allow the upper end of the spring sleeve 3 to extend to support the sample, while the spring sleeve 3 and the support spring 4 can be placed by opening the bottom surface 7 of the base 1.

[0023] Figure 1 、 2 As shown, multiple spring sleeves 3 are respectively embedded in multiple sliding holes 9 on the top surface of the base 1, and support springs 4 are placed in the spring sleeves 3. The lower end of the support spring 4 is tightly connected to the bottom surface 7 of the base 1. The outer diameter of the spring sleeve 3 matches the diameter of the sliding hole 9 on the top surface of the base 1. The outer wall of the spring sleeve 3 slides with the inner wall of the sliding hole 9 on the top surface of the base 1. The upper end of the spring sleeve 3 has an arc-shaped top surface, and the outer periphery of the lower end of the spring sleeve 3 has an annular protrusion 10. The outer diameter of the annular protrusion 10 is larger than the diameter of the sliding hole 9 on the top surface of the base 1. The annular protrusion 10 is located below the top surface of the base 1. The annular protrusion 10 prevents the spring sleeve 3 from escaping upward from the sliding hole 9, but also prevents the spring sleeve 3 from being inserted through the sliding hole 9 and can only be inserted from the bottom surface 7 of the base 1.

[0024] Figure 1 、 2 As shown, the side panels 2 are upright curved panels, with the lower ends of the two side panels 2 fixed to opposite sides of the top surface of the base 1. The upper inner sides of the two side panels 2 each have two grooves 11 for mounting the clamping piece 5 and the conductive pointer 6. Screw holes 12 are respectively provided on the top surfaces of the two side panels 2 opposite the grooves 11. The screw holes 12 pass vertically downward through the top and bottom surfaces of the grooves 11. Connecting bolts 13 are installed in the screw holes 12 from the top surface of the side panels 2 downward. The lower ends of the connecting bolts 13 are screwed and connected to the screw holes 12 below the bottom surface of the grooves 11. The connecting bolts 13 are used to mount the clamping piece 5 and the conductive pointer 6.

[0025] Figure 2 、 3 The rear ends of the clamping plate 5 and the conductive pointer 6 each have a rotation hole. The rear ends of the clamping plate 5 and the conductive pointer 6 overlap and fit within a groove 11 on the upper inner portion of the side panel 2. The rotation holes of the clamping plate 5 and the conductive pointer 6 fit over the rod of a connecting bolt 13 within the groove 11. The clamping plate 5 and the conductive pointer 6 can rotate around the connecting bolt to adjust the position of their front ends, thereby compressing the sample 14 and conducting electrical signals. The clamping plate 5 is made of an elastic material, capable of generating sufficient pressure to hold the sample in place during clamping. All parts are made of conductive material, providing an electrical conduction path between the electron probe and the sample.

[0026] Figure 4 、 5It is shown that when the present invention is in use, the sample 14 is placed above multiple spring sleeves 3, and the bottom surface of the sample 14 is in close contact with the top surfaces of the multiple spring sleeves 3 respectively. The upper ends of the multiple spring sleeves 3 support the bottom surface of the sample 13. When the bottom surface of the sample 13 has irregular undulations, the bottom surface of the sample 14 presses different spring sleeves 3. The support spring 4 in the spring sleeve 3 can be compressed or stretched as the spring sleeve 3 moves up and down, and the length changes accordingly, so that the height of the multiple spring sleeves 3 adapts to the undulations of the bottom surface of the sample 14, so that the height of the sample 14 can be accurately controlled and the horizontal position of the upper surface of the sample 14 can be maintained.

[0027] During operation, the clamping piece 5 and conductive pointer 6 can be rotated about the connecting bolt 13 to adjust the position of the front ends of the clamping piece 5 and conductive pointer 6. The contact position of the conductive pointer 6 with the clamping piece 5 can be adjusted according to the actual shape and size of the sample 14 to ensure that the sample 14 is firmly pressed and fixed. The clamping piece 5 is made of an elastic material, which can generate sufficient pressure during clamping to keep the sample 14 in place. The use of the conductive pointer 6 ensures good electrical conduction between the electron probe and the sample 14 when using non-conductive embedded samples 14, improving signal transmission and measurement accuracy.

[0028] A specific embodiment of the present invention is as follows:

[0029] The base 1 has a diameter of 46 mm, a height of 13 mm, and a top sliding hole 9 with a diameter of 2 mm;

[0030] The arc length of side panel 2 is 18 mm and the height is 20 mm;

[0031] The spring sleeve 3 has a diameter of 4 mm and a height of 12 mm, and the annular protrusion 10 has a diameter of 5 mm and a height of 1 mm;

[0032] The support spring 4 has a diameter of 3 mm and a height of 24 mm;

[0033] The length of the clamping piece 5 is 20 mm, the width is 3 mm, and the thickness is 1 mm;

[0034] The conductive pointer 6 has a length of 24 mm, a width of 1 mm, and a thickness of 0.5 mm;

[0035] The groove 11 has a length of 4 mm, a width of 3 mm, and a height of 2 mm;

[0036] The diameter of the screw hole 12 is 1.6 mm and the length is 4.5 mm;

[0037] The connecting bolt 13 has a diameter of 1.4 mm and a length of 4 mm.

Claims

1. A sample fixing device for electron probe microanalysis, characterized in that: It includes a base (1), a side plate (2), a spring sleeve (3), a support spring (4), a clamping piece (5), and a conductive pointer (6). The base (1) is a cylinder. The top surface of the base (1) and the cylinder wall are an integrated structure. The bottom surface (7) of the base (1) is separated from the cylinder wall. The bottom surface (7) of the base (1) and the cylinder wall are connected by a fixing bolt (8). The side plate (2) is a vertical arc-shaped plate. The lower ends of the two side plates (2) are respectively fixed to the opposite sides of the top surface of the base (1). The top surface of the base (1) is uniformly distributed with a plurality of sliding holes (9). The plurality of spring sleeves (3) are respectively embedded in the plurality of sliding holes (9) on the top surface of the base (1). The support spring (4) is placed In the spring sleeve (3), the lower end of the support spring (4) is tightly connected to the bottom surface (7) of the base (1), and the upper inner sides of the two side plates (2) are respectively provided with two grooves (11), and the rear ends of the clamping piece (5) and the conductive pointer (6) are embedded in each groove (11), and the front ends of the clamping piece (5) and the conductive pointer (6) are respectively opposite to the upper end of the spring sleeve (3) above the top surface of the base (1) between the two side plates (2). The sample (14) is placed above the spring sleeve (3), and the bottom surface of the sample (14) is in close contact with the top surfaces of the multiple spring sleeves (3), and the front ends of the clamping piece (5) and the conductive pointer (6) are pressed against the upper surface of the sample (14).

2. The sample fixing device for electron probe microanalysis according to claim 1, characterized in that: The outer diameter of the spring sleeve (3) matches the diameter of the sliding hole (9) on the top surface of the base (1), the outer wall of the spring sleeve (3) and the inner wall of the sliding hole (9) on the top surface of the base (1) are in sliding fit, the upper end of the spring sleeve (3) is an arc-shaped top surface, and the outer periphery of the lower end of the spring sleeve (3) is provided with an annular protrusion (10), the outer diameter of the annular protrusion (10) is larger than the diameter of the sliding hole (9) on the top surface of the base (1), and the annular protrusion (10) is located below the top surface of the base (1).

3. The sample fixing device for electron probe microanalysis according to claim 1, characterized in that: The top surfaces of the two side panels (2) are respectively provided with screw holes (12) at positions opposite to the groove (11). The screw holes (12) vertically pass through the top and bottom surfaces of the groove (11). The connecting bolts (13) are installed in the screw holes (12) from the top surface of the side panels (2) downward. The lower ends of the connecting bolts (13) are screwed and connected to the screw holes (12) below the bottom surface of the groove (11).

4. The sample fixing device for electron probe microanalysis according to claim 3, characterized in that: The rear ends of the clamping piece (5) and the conductive pointer (6) are respectively provided with rotation holes. The rear ends of the clamping piece (5) and the conductive pointer (6) are overlapped and placed in the groove (11) on the upper inner side of the side plate (2). The rotation holes of the clamping piece (5) and the conductive pointer (6) are sleeved on the rod body of the connecting bolt (13) in the groove (11). The rotation holes of the clamping piece (5) and the conductive pointer (6) are rotationally matched with the connecting bolt (13).

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