Sample fixing device and scanning electron microscope

Abstract

The invention relates to the technical field of scanning electron microscopes, in particular to a sample fixing device and a scanning electron microscope. The device comprises a base for fixing and a sliding table capable of being quickly disassembled and assembled. A clamping column and an elastic clamping piece are arranged on the base; the sliding table is provided with a sliding groove matched with the clamping column, and the sliding table is connected with a sample support used for containing a sample. When the sliding table slides into the base, the sliding groove and the clamping column are matched to compress the elastic clamping piece to generate elastic clamping force, and rapid locking is achieved. When a sample is replaced, the sliding table can be disassembled and assembled only by simply pushing and pulling, and the sample support can be disassembled and assembled without rotating a fastener. Rapid sample replacement without tools can be achieved, navigation memory of the sample position is achieved through the mechanical positioning structure, and the sample replacement efficiency of the scanning electron microscope is remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of scanning electron microscopy, specifically to a sample fixation device and a scanning electron microscope. Background Technology

[0002] Scanning electron microscopes, as important microscopic observation equipment, are widely used in materials science, life sciences and other fields.

[0003] Currently, scanning electron microscope (SEM) sample stages generally employ a traditional rigid clamping structure. When changing samples, operators must first vent the sample chamber, remove the sample stage from the microscope cavity, and then use specialized tools to loosen each set screw or clamp securing the sample. After removing the observed sample, a new sample is placed, and all fixtures are tightened again using the same tools. This process is cumbersome and time-consuming, extending the time the sample stage is exposed to the atmosphere and requiring a longer subsequent vacuuming time, severely impacting the equipment's efficiency. Summary of the Invention

[0004] In view of this, the present invention provides a sample fixing device and a scanning electron microscope to solve the problem of cumbersome sample changing procedures.

[0005] In a first aspect, the present invention provides a sample fixing device, including a base, an elastic clamp, a locking post, and a slide; the base has a through hole extending along a first direction; the elastic clamp is disposed at a first end of the base along the first direction; the locking post includes a rod and a limiting part connected to each other, the limiting part is located at a second end of the base along the first direction, and the rod passes through the through hole and is connected to the elastic clamp, the elastic clamp having an elastic force on the rod toward the limiting part; the slide is disposed at a second end of the base along the first direction and has a sliding groove extending along the second direction, the sliding groove slidingly engaging with the limiting part; wherein, the first direction and the second direction are perpendicular to each other.

[0006] In one optional embodiment, the base is further provided with a protrusion located at the second end of the base along the first direction and extending toward a third direction; wherein the third direction is perpendicular to both the first direction and the second direction.

[0007] In one alternative embodiment, the slide has a flat portion located at the edge of the slide and fitted with a protrusion.

[0008] In one alternative embodiment, the base is further provided with an inclined portion, which is disposed opposite to the protrusion and inclined in a second direction.

[0009] In one alternative embodiment, the groove is a dovetail groove, and the limiting part coincides with the projection of the groove along the second direction.

[0010] In one alternative embodiment, the rod body is further provided with a clamp assembly, which includes an annular sleeve and a gasket, and the clamp assembly abuts against the elastic clip.

[0011] In one optional embodiment, the elastic clip is annular, and the inner edge of the elastic clip is provided with continuously distributed gear-shaped protrusions. When the rod passes through the through hole, the gear-shaped protrusions bend in the first direction and partially fit the rod.

[0012] In one alternative embodiment, the first end of the base is provided with an insulating component and a connecting hole extending along a first direction. At least three connecting holes are provided, and the insulating component and the base are bolted together through the connecting holes.

[0013] In one optional embodiment, the insulating assembly includes a base insulating gasket and an insulating mounting gasket. The base insulating gasket has mounting holes that correspond to the connection holes. The insulating mounting gasket is embedded in the connection holes and fits against the bolts.

[0014] In a second aspect, the present invention also provides a scanning electron microscope, including the sample fixation device described in the first aspect.

[0015] Since scanning electron microscopes include a sample fixation device, which has the same effect as a sample fixation device, it will not be elaborated here.

[0016] The technical solution proposed in this application has at least the following technical effects: This application provides a quick-assembly and disassembly sample fixing device for scanning electron microscopes (SEMs) by using a sliding fit, effectively improving the efficiency of sample changeover. The invention uses a base, elastic clips, locking posts, and a slide to fix the sample in the SEM's sample stage. A sample holder is connected to the slide, which can hold the sample. The locking posts are inserted into the base and limit the movement of the slide to prevent it from falling off. The slide engages with the locking posts through a sliding groove, and the elastic deformation of the elastic clips makes the groove and locking posts fit more tightly, achieving a locking effect and making the structure more stable. When changing samples, the operation can be completed simply by pushing or pulling the slide in, without the use of any tools. This invention has a simple structure, is easy to operate, significantly shortens sample changeover time, and significantly improves the sample changeover efficiency of SEMs. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1This is an exploded view of a sample fixing device according to an embodiment of the present invention; Figure 2 This is another exploded view of a sample fixing device according to an embodiment of the present invention; Figure 3 This is a front view of a sample fixing device according to an embodiment of the present invention; Figure 4 This is a cross-sectional view of a sample fixing device according to an embodiment of the present invention; Figure 5 This is an isometric view of a sample fixing device according to an embodiment of the present invention; Figure 6 This is another cross-sectional view of a sample fixing device according to an embodiment of the present invention.

[0019] Explanation of reference numerals in the attached figures: 1. Base; 101. Protrusion; 102. Sloping surface; 103. Through hole; 104. Connecting hole; 2. Locking post; 201. Limiting part; 202. Rod body; 3. Slide table; 301. Slide groove; 302. Flat surface; 4. Elastic locking element; 401. Gear-shaped protrusion; 5. Clamp assembly; 501. Annular clamp; 502. Gasket; 6. Insulation assembly; 601. Base insulation gasket; 602. Insulation mounting gasket; 603. Mounting hole; 7. Sample holder. X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] It should be understood that the terminology used herein is for the purpose of describing specific embodiments only and is not intended to impose strict limitations on the technical solutions unless the context clearly indicates otherwise. For example, the use of "a," "an," and "the" to modify a feature does not preclude the possibility that the feature may be plural in other embodiments.

[0022] It should be understood that the terms "comprising," "including," and "having" are open-ended, indicating the presence of the stated features but not excluding the possibility of other features in the embodiment. Similarly, the use of terms such as "first," "second," etc., to describe multiple features only indicates the distinction between one feature and another, and such terms do not imply order or sequence unless explicitly stated in the context.

[0023] It should be understood that, unless the context clearly indicates otherwise, the terms "setup," "connection," and "installation" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integrated connection; they can refer to a direct connection or an indirect connection via a medium. Those skilled in the art will understand the specific meaning of these terms in this document based on the specific circumstances.

[0024] In addition, for ease of description, the text will use terms of spatial relative relationship to describe the position of one feature relative to another feature, such as "inner", "outer", "end", "side", "upper", "middle", "lower", "high", "low", "axial", "circumferential", "radial", "horizontal", "vertical", "first direction", "second direction", etc. It can be understood that the spatial relative relationship between two features should include other specific situations besides those shown in the accompanying drawings of the specification.

[0025] The embodiments of this application are described below with reference to the accompanying drawings. It can be understood that the technical features involved in the different embodiments described below can be combined with each other as long as they do not conflict with each other.

[0026] The following is combined Figures 1 to 6 The following describes embodiments of the present invention.

[0027] According to an embodiment of the present invention, in a first aspect, a sample fixing device is provided, including a base 1, an elastic clamp 4, a locking post 2, and a slide 3; the base 1 is provided with a through hole 103 extending along a first direction X; the elastic clamp 4 is provided at a first end of the base 1 along the first direction X; the locking post 2 includes a rod 202 and a limiting part 201 connected to each other, the limiting part 201 is located at a second end of the base 1 along the first direction X, and the rod 202 passes through the through hole 103 and is connected to the elastic clamp 4, the elastic clamp 4 having an elastic force on the rod 202 toward the limiting part 201; the slide 3 is provided at the second end of the base 1 along the first direction X, and is provided with a sliding groove 301 extending along a second direction Y, the sliding groove 301 slidingly engaging with the limiting part 201; wherein, the first direction X and the second direction Y are perpendicular to each other.

[0028] It should be noted that the slide table 3 is equipped with a sample holder 7 for holding samples. The sample holder 7 moves synchronously with the slide table 3 to enable rapid sample replacement.

[0029] In this embodiment, a split sliding fixing structure is adopted to provide a quick-assembly and disassembly sample fixing device for scanning electron microscopes, effectively solving the problem of low sample stage clamping efficiency in traditional methods. The invention includes a base 1 fixed to the sample stage, a locking post 2 disposed on the base 1, an elastic locking element 4 sleeved on the locking post 2, and a quick-assembly and disassembly sliding stage 3. The sliding stage 3 has a sliding groove 301 that cooperates with the locking post 2. When the sliding stage 3 slides into the base 1, the locking post 2 compresses the elastic locking element 4 to produce elastic deformation, restricting the axial movement of the locking post 2, thereby achieving automatic locking and positioning of the sliding stage 3. When changing samples, the operation can be completed simply by pushing in or pulling out the sample transfer sliding stage 3 by hand, without the use of any tools. This invention has a simple structure and convenient operation, shortening the original sample change process of several minutes to several seconds, significantly improving the sample change efficiency and equipment utilization rate of scanning electron microscopes.

[0030] In one alternative implementation, refer to Figure 1 and Figure 2 The base 1 is also provided with a protrusion 101, which is located at the second end of the base 1 along the first direction X and extends to the third direction Z; wherein the third direction Z is perpendicular to both the first direction X and the second direction Y.

[0031] Specifically, in this embodiment, the protrusion 101 extends along the third direction Z, restricting the movement of the slide 3 in the second direction Y and playing a positioning role. When the slide 3 moves into the base 1 and contacts the protrusion 101, it means that the slide 3 has moved into the preset position.

[0032] In one alternative embodiment, the slide 3 is provided with a flat portion 302, which is located at the edge of the slide 3 and is fitted to the protrusion 101.

[0033] Specifically, the protrusion 101 is a positioning step that extends vertically along the edge of the base 1. The flat part 302 is machined on the corresponding edge of the slide table 3, and its surface flatness is precision ground to ensure close contact with the protrusion 101.

[0034] Furthermore, in this embodiment, the cooperation between the flat part 302 and the protrusion 101 prevents the slide 3 from rotating around its axis, ensuring that the sample orientation is consistent.

[0035] In one alternative embodiment, the base 1 is further provided with a sloped portion 102, which is disposed opposite to the protrusion 101 and is inclined along the second direction Y.

[0036] Understandably, the inclined surface 102 is tilted downward along the second direction Y, and its tilt angle a is controlled within the range of 15° to 30°.

[0037] Specifically, 'a' can take any one of 15°, 20°, or 30°, or be within a range of any two of these values.

[0038] In this embodiment, the inclined design of the inclined surface 102 can capture the edge of the slide table 3 entrance, and even if there is an initial alignment deviation, the sliding path can be automatically corrected by the guiding effect of the inclined surface.

[0039] In one alternative embodiment, the slide 301 is a dovetail groove, and the limiting part 201 coincides with the projection of the slide 301 along the second direction Y.

[0040] Optionally, the structure of the groove 301 may include, but is not limited to, a dovetail groove, a square groove, or the like.

[0041] Specifically, in some embodiments, the dovetail groove has a standard isosceles trapezoidal cross-section, and the limiting part 201 is machined with an inverted trapezoidal structure that perfectly matches it.

[0042] Furthermore, the slide 301 and the limiting part 201 form a mechanical interlock structure, which effectively prevents the slide 3 from dislodging in the plane perpendicular to the second direction Y.

[0043] In one alternative embodiment, the rod 202 is further provided with a clamp assembly 5, which includes an annular sleeve 501 and a gasket 502, and the clamp assembly 5 abuts against the elastic clip 4.

[0044] Specifically, the clamp assembly 5 is clamped to the rod body 202 to prevent the elastic clip 4 from falling off the rod body 202.

[0045] Furthermore, the clamp assembly 5 clamps the locking post 2 at the first end of the base 1 to prevent the locking post 2 from loosening in the first direction X, and at the same time prevents the slide table 3 from slipping due to the loosening of the locking post 2.

[0046] In one optional embodiment, the elastic clip 4 is annular, and the inner edge of the elastic clip 4 is provided with continuously distributed gear-shaped protrusions 401. When the rod 202 passes through the through hole 103, the gear-shaped protrusions 401 bend in the first direction X and partially fit the rod 202.

[0047] Specifically, the gear-shaped protrusion 401 will bend and fit against the rod 202 due to the push of the rod 202. The bent gear-shaped protrusion 401 will have a clamping effect, fixing the pin 2 to prevent loosening or angular deflection.

[0048] In one optional embodiment, the first end of the base 1 is provided with an insulating component 6 and a connecting hole 104 extending along the first direction X. At least three connecting holes 104 are provided, and the insulating component 6 and the base 1 are bolted together through the connecting holes 104.

[0049] In this embodiment, there are three connecting holes 104, which are arranged in an equilateral triangle.

[0050] Understandably, the insulating component 6 is connected below the base 1 to prevent the components of the sample fixing device from conducting and interfering with the observation.

[0051] In one optional embodiment, the insulating component 6 includes a base insulating gasket 601 and an insulating mounting gasket 602. The base insulating gasket 601 is provided with a mounting hole 603, which is correspondingly provided with a connection hole 104. The insulating mounting gasket 602 is embedded in the connection hole 104 and fits against the bolt.

[0052] Specifically, the insulating mounting gasket 602 is embedded in the connecting hole 104 so that the bolt does not come into contact with the connecting hole 104, thereby avoiding conduction due to the bolt connection.

[0053] Furthermore, the insulating mounting gasket 602 has an insulating surface extending outwards at one end, which fits into the nut to insulate the bolt from the sample fixing device.

[0054] In a second aspect, the present invention also provides a scanning electron microscope, including the sample fixation device described in the first aspect.

[0055] It should be noted that since scanning electron microscopes include sample fixation devices and have the same effect as sample fixation devices, they will not be described in detail here.

[0056] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A sample fixing device, characterized in that, include: The base (1) has a through hole (103) extending along the first direction (X); An elastic clip (4) is disposed at the first end of the base (1) along the first direction (X); The locking post (2) includes a rod (202) and a limiting part (201) connected to each other. The limiting part (201) is located at the second end of the base (1) along the first direction (X). The rod (202) passes through the through hole (103) and is connected to the elastic locking member (4). The elastic locking member (4) has an elastic force on the rod (202) toward the limiting part (201). A slide (3) is provided at the second end of the base (1) along the first direction (X) and has a slide groove (301) extending along the second direction (Y). The slide groove (301) is slidably engaged with the limiting part (201). Wherein, the first direction (X) and the second direction (Y) are perpendicular to each other.

2. The sample fixing device according to claim 1, characterized in that, The base (1) is also provided with a protrusion (101), which is located at the second end of the base (1) along the first direction (X) and extends to the third direction (Z); The third direction (Z) is perpendicular to both the first direction (X) and the second direction (Y).

3. The sample fixing device according to claim 2, characterized in that, The slide (3) has a flat part (302), which is located at the edge of the slide (3) and is fitted to the protrusion (101).

4. The sample fixing device according to claim 2, characterized in that, The base (1) is also provided with a sloped part (102), which is disposed opposite to the protrusion (101) and is inclined in the second direction (Y).

5. The sample fixing device according to claim 1, characterized in that, The slide (301) is a dovetail groove, and the limiting part (201) and the slide (301) are projected along the second direction (Y).

6. The sample fixing device according to claim 1, characterized in that, The rod (202) is also provided with a clamp assembly (5), which includes an annular clamp (501) and a gasket (502), and the clamp assembly (5) abuts against the elastic clip (4).

7. The sample fixing device according to claim 1, characterized in that, The elastic clip (4) is annular, and the inner edge of the elastic clip (4) is provided with continuously distributed gear-shaped protrusions (401). When the rod (202) passes through the through hole (103), the gear-shaped protrusions (401) bend in the first direction (X) and partially fit the rod (202).

8. The sample fixing device according to claim 1, characterized in that, The base (1) has an insulating component (6) at its first end and a connecting hole (104) extending along the first direction (X). At least three connecting holes (104) are provided. The insulating component (6) and the base (1) are bolted together through the connecting holes (104).

9. The sample fixing device according to claim 8, characterized in that, The insulating component (6) includes a base insulating pad (601) and an insulating mounting pad (602). The base insulating pad (601) is provided with a mounting hole (603), and the mounting hole (603) is correspondingly provided with the connection hole (104). The insulating mounting gasket (602) is embedded in the connecting hole (104) and fits against the bolt.

10. A scanning electron microscope, characterized in that, Includes the sample fixing device according to any one of claims 1 to 9.

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