Sample holder, sample holder set, sample processing device, and fastening tool

Abstract

To provide a sample holder that can reduce the displacement of the sample. [Solution] The sample holder 100 is a sample holder for a sample processing apparatus that processes a sample by irradiating it with an ion beam, and includes a holder base 10, a sample holding part 20 that holds the sample 2, and a position fixing part 40 that fixes the position of the sample holding part 20. The position fixing part 40 includes a shaft 42 connected to the sample holding part 20, a first support member 44 that rotatably supports the shaft 42, and a second support member 46 that supports the first support member 44 so that it can move along an axis perpendicular to the axis of the shaft 42. By rotating the second support member 46, the second support member 46 moves along the axis of the shaft 42, fastening the sample holding part 20 and the holder base 10, and the rotation of the first support member 44 accompanying the rotation of the second support member 46 is restricted.

Description

Technical Field

[0001] The present invention relates to a sample holder, a sample holder set, a sample processing apparatus, and a fastening tool.

Background Art

[0002] As a sample processing apparatus for processing a sample using an ion beam, a cross-section polisher (registered trademark) is known. In a sample processing apparatus such as a cross-section polisher, for example, in a through hole on a printed circuit board or a semiconductor chip having a fine pattern, a cross-section at a specific position can be produced.

[0003] For example, Patent Document 1 discloses a sample holder system including a sample holder for holding a sample, and a sample adjustment unit detachably connected to the sample holder for aligning the positions of the sample and a shielding plate. In the sample holder system disclosed in Patent Document 1, since the alignment of the sample and the shielding plate can be performed using the sample adjustment unit, simplification of the configuration of the sample holder can be achieved.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the sample holder system described in Patent Document 1, after adjusting the position of the sample held by the sample holding part by the sample adjustment unit, the sample holding part is fastened to the holder main body by tightening a fixing screw. In such a sample holder, when tightening the fixing screw, the sample holding part may move as the fixing screw rotates, resulting in a displacement from the position with respect to the shielding plate.

Means for Solving the Problems

[0006] One embodiment of the sample holder according to the present invention is: A sample holder for a sample processing apparatus that processes a sample by irradiating it with an ion beam, Holder base and A sample holding section for holding the aforementioned sample, A position fixing part for fixing the position of the sample holding part, Includes, The aforementioned position fixing part is, A shaft connected to the sample holding section, A first support member that rotatably supports the shaft, A second support member supports the first support member so that it can move along an axis perpendicular to the axis of the shaft, Includes, By rotating the second support member, the second support member moves along the axis of the shaft, fastening the sample holding portion and the holder base. The rotation of the first support member is restricted in conjunction with the rotation of the second support member.

[0007] In this type of sample holder, the second support member is rotated to tighten the sample holding part and the holder base. When fastening, the first support member does not rotate in conjunction with the rotation of the second support member. Therefore, in such a sample holder, the displacement of the sample when fastening the sample holding part and the holder base can be reduced.

[0008] One embodiment of the sample holder set according to the present invention is: The above sample holder and, A fastening tool for tightening the second support member to a predetermined torque value or less, Includes.

[0009] Such a sample holder set includes the sample holder, thus reducing the displacement of the sample when fastening the sample holding section and the holder base. Furthermore, such a sample holder set includes a fastening tool that tightens the second support member with a torque value below a predetermined value, thereby reducing the strain on the holder base, sample holding section, shaft, first support member, and second support member caused by tightening the second support member, and thus reducing the displacement of the sample.

[0010] One embodiment of the sample processing apparatus according to the present invention includes the above-mentioned sample holder.

[0011] One embodiment of the fastening tool according to the present invention is: A fastening tool for tightening fastening members, A shaft member whose tip is connected to the fastening member, A shaft support member that rotatably supports the rear end of the shaft member, A positioning member for positioning the aforementioned shaft member, Includes, A recess is provided at the rear end of the shaft member. The positioning member is The ball portion that fits into the recess, An elastic member that presses the ball portion against the recess, Includes, When a torque greater than a predetermined torque value is applied to the fastening member, the ball portion disengages from the recess.

[0012] In such fastening tools, if a torque greater than a predetermined torque value is applied to the fastening member, the ball portion disengages from the recess and the fastening tool bends. Therefore, such fastening tools can prevent a torque greater than a predetermined torque value from being applied to the fastening member. [Brief explanation of the drawing]

[0013] [Figure 1] A schematic perspective view showing the sample holder. [Figure 2] A schematic perspective view showing the sample holder. [Figure 3] Cross-sectional perspective view schematically showing a sample holder. [Figure 4] Cross-sectional view schematically showing a sample holder. [Figure 5] Cross-sectional view schematically showing a sample holder. [Figure 6] Diagram for explaining the operation of the sample fixing part. [Figure 7] Cross-sectional view schematically showing a sample holder. [Figure 8] Cross-sectional view schematically showing a sample holder. [Figure 9] Exploded perspective view schematically showing the position fixing part. [Figure 10] Diagram for explaining the operation of the sample holder. [Figure 11] Diagram for explaining the operation of the sample holder. [Figure 12] Diagram for explaining the operation of the sample holder. [Figure 13] Diagram for explaining the operation of the sample holder. [Figure 14] Perspective view schematically showing a fastening tool. [Figure 15] Perspective view schematically showing a fastening tool. [Figure 16] Cross-sectional view schematically showing a fastening tool. [Figure 17] Cross-sectional view schematically showing a fastening tool. [Figure 18] Diagram for explaining a lid member. [Figure 19] Diagram for explaining a lid member. [Figure 20] Diagram showing an example of the configuration of a sample processing apparatus. [Figure 21] Diagram for explaining the operation of a sample stage drawing mechanism. [Figure 22] Diagram for explaining a jig for sample position adjustment. [Figure 23] Diagram for explaining a jig for sample position adjustment. [Figure 24] Flowchart showing an example of a sample processing method using a sample processing apparatus. [Figure 25] Diagram for explaining a modified example of a fastening tool. [Figure 26] A diagram illustrating a modified example of a fastening tool. [Modes for carrying out the invention]

[0014] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. The embodiments described below are not intended to unduly limit the scope of the present invention as described in the claims. Furthermore, not all of the configurations described below are essential components of the present invention.

[0015] 1. Sample holder 1.1. Sample holder configuration First, a sample holder according to one embodiment of the present invention will be described with reference to the drawings. Figures 1 and 2 are schematic perspective views showing a sample holder 100 according to one embodiment of the present invention. Figure 1 shows the sample 2 and shielding plate 50 attached to the sample holder 100, and Figure 2 shows the sample 2 and shielding plate 50 removed from the sample holder 100. Figures 1 and 2 show three mutually orthogonal axes: the X axis, the Y axis, and the Z axis.

[0016] The sample holder 100 is a sample holder for a sample processing apparatus that processes sample 2 using an ion beam. As shown in Figures 1 and 2, the sample holder 100 includes a holder base 10, a sample holding section 20, a sample fixing section 30, a position fixing section 40, and a shielding plate 50.

[0017] The holder base 10 has a box-like shape with an opening in the +X direction. The holder base 10 is provided with a position fixing part 40. The sample holding part 20 is fixed to the holder base 10 by the position fixing part 40. A shielding plate 50 is attached to the holder base 10 via a shielding plate holding member 60.

[0018] The sample holder 20 holds the sample 2. In the illustrated example, the sample holder 20 directly holds the sample 2, but although not shown, if the sample 2 is small, the sample holder 20 may hold the sample 2 together with a spacer member. The sample holder 20 has a box-like shape with an opening in the +X direction.

[0019] The sample fixing unit 30 fixes the sample 2 to the sample holding unit 20. The sample fixing unit 30 fixes the sample 2 to the sample holding unit 20 by making the sample 2 tightly attached to the sample holding unit 20.

[0020] The position fixing unit 40 fixes the position of the sample holding unit 20. The sample holder 100 can switch between a state in which the position of the sample holding unit 20 is fixed and a state in which the sample holding unit 20 is movable, using the position fixing unit 40.

[0021] The shielding plate 50 shields a portion of the sample 2 held in the sample holding section 20. The shielding plate 50 is attached to the holder base 10 via a shielding plate holding member 60. The shielding plate 50 is positioned so as to be in contact with the surface of the sample 2 facing the +Z direction, i.e., the upper surface of the sample 2. The shielding plate 50 has an edge 51, and the sample 2 is positioned so as to protrude from the edge 51.

[0022] 1.2. Holder base and sample holding section Figure 3 is a schematic cross-sectional perspective view of the sample holder 100. Figures 4 and 5 are schematic cross-sectional views of the sample holder 100. Figure 4 is a cross-sectional view taken along line IV-IV of Figure 3, and Figure 5 is a cross-sectional view taken along line VV of Figure 3.

[0023] As shown in Figures 4 and 5, the holder base 10 has an upper part 12, a lower part 14, and a connecting part 16 that connects the upper part 12 and the lower part 14. The sample holding part 20 is positioned in the space enclosed by the upper part 12, the lower part 14, and the connecting part 16. The upper part 12 is located on the +Z side of the sample holding part 20, and the lower part 14 is located on the -Z side of the sample holding part 20.

[0024] The sample holding section 20 has an upper section 22, a lower section 24, and a connecting section 26 that connects the upper section 22 and the lower section 24. The sample 2 is placed in the space enclosed by the upper section 22, the lower section 24, and the connecting section 26. The upper section 22 is located on the +Z side of the sample 2, and the lower section 24 is located on the -Z side of the sample 2.

[0025] 1.3. Sample Fixing Section As shown in Figure 5, the sample fixing section 30 includes a sample stage 32 and a sample stage support member 34 that supports the sample stage 32. The sample stage 32 contacts the surface of the sample 2 facing the -Z direction, i.e., the lower surface of the sample 2, and supports the sample 2. The sample stage 32 is connected to the tip of the sample stage support member 34. The sample stage support member 34 is a rod-shaped member to which the sample stage 32 is connected, and a male screw 35 is formed on its side.

[0026] In the sample fixing section 30, the sample stage 32 is pushed up by the sample stage support member 34, thereby pressing the sample 2 against the upper part 22 of the sample holding section 20. This allows the sample 2 to be brought into close contact with the upper part 22, and the sample 2 can be fixed to the sample holding section 20. For example, as shown in Figure 5, a female thread 25 is formed in the lower part 24 of the sample holding section 20, and by inserting the sample stage support member 34, which has a male thread 35, into the female thread 25 and tightening it, the sample stage 32 pushes up the sample 2, and the sample 2 can be brought into close contact with the upper part 22.

[0027] The sample stage support member 34 is not in contact with the holder base 10. A notch 15 is formed in the lower part 14 of the holder base 10, and the sample stage support member 34 is connected to the sample holding section 20 through the notch 15.

[0028] Figure 6 is a diagram illustrating the operation of the sample fixing part 30. The sample stage support member 34 supports the sample stage 32 so that it can be tilted. The sample stage support member 34 is cylindrical and has a groove 37 around its side surface (circumferential surface). The sample stage 32 has a recess 33, and the tip 36 of the sample stage support member 34 is housed in the recess 33. The edge 31 of the opening of the recess 33 protrudes toward the groove 37. The tip of the edge 31 of the recess 33 is located within the groove 37.

[0029] The edge 31 of the opening of the recess 33 and the bottom of the groove 37 are not in contact, and a gap G1 is formed between the edge 31 and the bottom of the groove 37. Also, the edge 31 of the opening of the recess 33 and the tip 36 are not in contact, and a gap G2 is formed between the edge 31 and the tip 36. Therefore, the sample stage 32 is tilted according to the shape of the lower surface of the sample 2. Consequently, the sample stage 32 can bring the upper surface of the sample 2 into close contact with the upper part 22 even if the lower surface of the sample 2 is tilted relative to the upper surface of the sample 2, or if the lower surface of the sample 2 has irregularities.

[0030] 1.4. Position fixing part Figures 7 and 8 are schematic cross-sectional views of the sample holder 100. Figure 7 is a cross-sectional view taken along line VII-VII in Figure 4, and Figure 8 is a cross-sectional view taken along line VIII-VIII in Figure 4. Figure 9 is an exploded perspective view schematicly showing the position fixing part 40.

[0031] The position fixing part 40 fixes the position of the sample holding part 20. By fixing the position of the sample holding part 20 with the position fixing part 40, the position of the sample 2 is fixed. As shown in Figures 4, 5, and 7 to 9, the position fixing part 40 has a shaft 42, a first support member 44, and a second support member 46.

[0032] The tip of the shaft 42 is connected to the upper part 22 of the sample holder 20, as shown in Figures 4 and 5. The sample holder 20 is supported by the shaft 42.

[0033] The shaft 42 is rotatably supported by the first support member 44. The shaft 42 is inserted into a hole 45 in the first support member 44. The rear end of the shaft 42 is wider (in diameter) than the diameter of the hole 45. Therefore, the rear end of the shaft 42 catches on the first support member 44, and the shaft 42 is supported.

[0034] The diameter of the portion of the shaft 42 inserted into the hole 45 is smaller than the diameter of the hole 45. This allows the shaft 42 to rotate around its axis (central axis). Therefore, the sample holder 20 can rotate around the shaft 42. The axis (central axis) of the shaft 42 is parallel to the Z-axis.

[0035] The first support member 44 rotatably supports the shaft 42. The first support member 44 has a shaft portion 440 and a wider portion 442 that is wider than the shaft portion 440. The shaft portion 440 is inserted into the insertion hole 47 of the second support member 46.

[0036] For example, as shown in Figure 8, the holder base 10 has an elongated hole 11 that penetrates the upper part 12 of the holder base 10. The elongated hole 11 has a length L along the X-axis that is greater than its width W along the Y-axis. The shaft portion 440 is inserted into the elongated hole 11. The shaft portion 440 has a first side surface 440a facing the +Y direction and a second side surface 440b facing the -Y direction. The first side surface 440a is in contact with the surface 11a that defines the width W of the elongated hole 11. The second side surface 440b is in contact with the surface 11b that defines the width W of the elongated hole 11. Surfaces 11a and 11b are opposing surfaces of the holder base 10 and define the width W of the elongated hole 11. That is, the distance between surface 11a and surface 11b corresponds to the width W of the elongated hole 11. The length L of the elongated hole 11 is greater than the width of the shaft portion 440 along the X-axis.

[0037] In this way, the rotation of the shaft portion 440 is restricted because the first side surface 440a of the shaft portion 440 contacts the surface 11a that defines the width of the elongated hole 11, and the second side surface 440b contacts the surface 11b that defines the width of the elongated hole 11. Therefore, even if the second support member 46 is rotated, the first support member 44 does not rotate. Although not shown in the figures, the first side surface 440a of the shaft portion 440 does not have to contact surface 11a, and the second side surface 440b does not have to contact surface 11b. Even in such a case, the rotation of the shaft portion 440 can be restricted. Furthermore, since the length L of the elongated hole 11 is greater than the width of the shaft portion 440 along the X axis, the first support member 44 is movable along the X axis. That is, the first support member 44 is movable along the X axis perpendicular to the axis of the shaft 42. Furthermore, the shape of the elongated hole 11 is not particularly limited, as long as the rotation of the shaft portion 440 is restricted and the first support member 44 can move along the X-axis, as described above. For example, although not shown in the figures, the length L of the elongated hole 11 may be less than or equal to the width W of the elongated hole 11.

[0038] As shown in Figures 4 and 5, the shaft portion 440 of the first support member 44 is the second support member 46 The first support member 44 is inserted into the insertion hole 47. The insertion hole 47 has a first portion 47a into which the shaft portion 440 is inserted, and a second portion 47b which has a larger diameter than the first portion 47a. Because the diameters of the first portion 47a and the second portion 47b are different, a step 47c is formed between the first portion 47a and the second portion 47b. The wide portion 442 of the first support member 44 is hooked onto the step 47c between the first portion 47a and the second portion 47b. As a result, the first support member 44 is supported by the second support member 46 so as to be movable along the X axis.

[0039] The second support member 46 supports the first support member 44 so that it can move along the X-axis. The second support member 46 is provided with an insertion hole 47 into which the shaft portion 440 of the first support member 44 is inserted. The second support member 46 has a knob 460 and a screw shaft 462.

[0040] The upper part 12 of the holder base 10 is provided with a first threaded portion 120. The first threaded portion 120 is, for example, a female thread. The screw shaft 462 of the second support member 46 is provided with a second threaded portion 463 that screws onto the first threaded portion 120. The second threaded portion 463 is, for example, a male thread. The second support member 46, which is provided with the second threaded portion 463 that screws onto the first threaded portion 120, constitutes a feed screw that converts rotational motion into linear motion.

[0041] For example, by rotating the second support member 46 counterclockwise, the second support member 46 moves in the +Z direction. This causes the first support member 44, supported by the second support member 46, to move in the +Z direction, and the shaft 42, supported by the first support member 44, to move in the +Z direction. Therefore, by rotating the second support member 46 counterclockwise, the sample holding part 20 connected to the shaft 42 can be moved in the +Z direction. In other words, by rotating the second support member 46 counterclockwise, the sample holding part 20, which is connected to the second support member 46 via the first support member 44 and the shaft 42, can be pulled up. Thus, the sample holding part 20 can be fastened to the upper part 12 of the holder base 10, and the sample holding part 20 can be fixed in place.

[0042] On the other hand, by turning the knob 460 clockwise, the second support member 46 moves in the -Z direction. As a result, the first support member 44 supported by the second support member 46 moves in the -Z direction, and the shaft 42 supported by the first support member 44 moves in the -Z direction. Therefore, by turning the second support member 46 clockwise, the sample holding part 20 connected to the shaft 42 can be moved in the -Z direction. In other words, by turning the second support member 46 clockwise, the fastening force between the holder base 10 and the sample holding part 20 can be reduced, or a gap can be formed between the holder base 10 and the sample holding part 20. Thus, the sample holding part 20 can be made movable and rotatable.

[0043] The configuration of the second support member 46 is not particularly limited as long as it can convert rotational motion into linear motion. For example, the sample holding part 20 may be raised by rotating the second support member 46 clockwise, and the fastening force between the holder base 10 and the sample holding part 20 may be reduced by rotating the second support member 46 counterclockwise.

[0044] 2. Operation of the sample holder 2.1. Rotation of the sample holder Figure 10 is a diagram illustrating the operation of the sample holder 100.

[0045] As shown in Figure 10, the sample holder 100 allows the sample holding section 20 to rotate around the shaft 42 as the axis of rotation. As described above, the sample holding section 20 is supported by the shaft 42. The shaft 42 is rotatably supported by the first support member 44. Therefore, the sample holding section 20 is rotatable around the shaft 42 as the axis of rotation. By rotating the sample holding section 20 around the shaft 42 as the axis of rotation, the inclination θ of the sample 2 with respect to the edge 51 of the shielding plate 50 can be adjusted.

[0046] 2.2. Movement of the sample holder along the X-axis Figures 11 to 13 are diagrams illustrating the operation of the sample holder 100. Figure 11 shows the state in which the shaft portion 440 of the first support member 44 is located at the +X end of the elongated hole 11, Figure 12 shows the state in which the shaft portion 440 is located at the center of the elongated hole 11, and Figure 13 shows the state in which the shaft portion 440 is located at the -X end of the elongated hole 11.

[0047] The first support member 44 is supported by the second support member 46 so as to be movable along an axis perpendicular to the axis of the shaft 42, i.e., the X-axis. Therefore, as shown in Figures 11 to 13, the shaft 42 supported by the first support member 44, the sample holding part 20 connected to the shaft 42, and the sample fixing part 30 are movable along the X-axis. By moving the sample holding part 20 along the X-axis, the amount A of the sample 2 protruding from the edge 51 of the shielding plate 50 fixed to the holder base 10 can be adjusted.

[0048] The operation of the sample holder 100 shown in Figures 11 to 13 above is performed by reducing the fastening force applied between the holder base 10 and the sample holding part 20, or by creating a gap between the holder base 10 and the sample holding part 20, thereby making the sample holding part 20 movable and rotatable.

[0049] 2.3. Fixing the sample holder In the sample holder 100, turning the knob 460 counterclockwise moves the second support member 46 in the +Z direction. This allows the sample holding section 20, which is connected to the second support member 46 via the first support member 44 and shaft 42, to be pulled up, and the sample holding section 20 can be fastened to the upper part 12 of the holder base 10. As a result, the sample holding section 20 is fixed in place.

[0050] Here, the rotation of the first support member 44 is restricted by the insertion of its shaft portion 440 into the elongated hole 11. Therefore, even if the second support member 46 is rotated, the first support member 44 does not rotate in conjunction with the rotation of the second support member 46. As a result, when fastening the sample holding portion 20 to the holder base 10 to fix the sample holding portion 20, the sample holding portion 20 can be fixed without moving the sample holding portion 20. Consequently, the displacement of the sample 2 when fastening the sample holding portion 20 to the holder base 10 can be reduced.

[0051] 3. Fastening tools Figures 14 and 15 are schematic perspective views of the fastening tool 200. Figures 16 and 17 are schematic cross-sectional views of the fastening tool 200. Figures 14 and 16 show the fastening tool 200 in a non-operating state, while Figures 15 and 17 show the fastening tool 200 in an operating state. In the example shown in Figures 14 and 16, the fastening tool 200 is shown in a straight state as an example of the non-operating state. In the example shown in Figures 15 and 17, the fastening tool 200 is shown in a bent state as an example of the operating state.

[0052] The fastening tool 200 is a tool for tightening fastening members. Fastening members include, for example, screws and bolts. The sample holder 100 and the fastening tool 200 constitute a sample holder set. In the sample holder set, the fastening tool 200 is used to tighten the second support member 46, which is a fastening member.

[0053] The fastening tool 200 is used to rotate and tighten the second support member 46 (knob 460) of the sample holder 100. By rotating the second support member 46 using the fastening tool 200, the second support member 46 is tightened to a set torque value (predetermined torque value) or less. This makes it possible to prevent a torque greater than the torque value set on the second support member 46 from being applied.

[0054] The fastening tool 200 includes a shaft member 210, a shaft support member 220, a positioning member 230, and a gripping portion 240, as shown in Figures 14 to 17.

[0055] The tip of the shaft member 210 is connected to the second support member 46. The shaft member 210 has two pins 212 that can be connected to the second support member 46. The two pins 212 are provided at the tip of the shaft member 210. Note that the configuration of the tip of the shaft member 210 may be other than the two pins 212, as long as it can be connected to the second support member 46.

[0056] Figures 18 and 19 illustrate the lid member 48. As shown in Figures 18 and 19, the second support member 46 has the lid member 48. The lid member 48 is attached to the knob 460 of the second support member 46. The lid member 48 is, for example, detachable from the knob 460. By rotating the lid member 48, the knob 460 rotates.

[0057] The lid member 48 is provided with a hole 49 for inserting a pin 212. One of the two pins 212 is inserted into the hole 49, and the other is positioned on the lid member 48. By sandwiching the lid member 48 with the two pins 212, the direction in which the fastening tool 200 is inserted can be restricted. Therefore, the tilt of the fastening tool 200 can be restricted, and the fastening tool 200 can be connected to the second support member 46 in a horizontal or nearly horizontal position. In this way, by sandwiching the lid member 48 with the two pins 212, the posture of the fastening tool 200 can be controlled so that the fastening tool 200 is in a horizontal or nearly horizontal position. Note that when the fastening tool 200 is horizontal, it means that the axis of the shaft member 210 is horizontal.

[0058] As shown in Figures 16 and 17, a spherical portion 214 is provided at the rear end of the shaft member 210. The shape of the spherical portion 214 is, for example, spherical. The surface of the spherical portion 214 is, for example, at least a part of it is spherical. The spherical portion 214 is slidably supported by the shaft support member 220. Therefore, the shaft member 210 is rotatable about the spherical portion 214. That is, the fastening tool 200 can bend in various directions. The shaft support member 220 is provided, for example, at the tip of the gripping portion 240. The shaft support member 220 constitutes a spherical bearing that rotatably supports the spherical portion 214.

[0059] A recess 216 is provided at the rear end (spherical portion 214) of the shaft member 210. The recess 216 is located on an axis connecting the centers of the front and rear ends of the shaft member 210. The axis connecting the front and rear ends is the central axis of the shaft member 210.

[0060] The positioning member 230 is provided on the gripping portion 240. The positioning member 230 includes a ball portion 232 that fits into the recess 216 and an elastic member 234 that presses the ball portion 232 against the recess 216. The shape of the ball portion 232 is, for example, spherical. The surface of the ball portion 232 is, for example, at least a part of it is spherical. The diameter of the ball portion 232 is, for example, greater than the width of the recess 216.

[0061] As shown in Figures 14 and 16, when the fastening tool 200 is straight, the ball portion 232 is fitted into the recess 216. As shown in Figures 15 and 17, when the fastening tool 200 is bent, the ball portion 232 is disengaged from the recess 216. The elastic member 234 presses the ball portion 232 against the recess 216. The torque value when the fastening tool 200 bends can be set by the magnitude of the force with which the elastic member 234 presses the ball portion 232 against the recess 216. For example, the greater the force with which the elastic member 234 presses the ball portion 232 against the recess 216, the greater the torque value when the fastening tool 200 bends.

[0062] The elastic member 234 is, for example, a compression spring. However, the elastic member 234 is not limited to a compression spring as long as it can press the ball portion 232 against the recess 216. The elastic member 234 may also be, for example, a leaf spring. The ball portion 232 and the elastic member 234 constitute, for example, a ball plunger.

[0063] The gripping portion 240 is a component for the user to grip the fastening tool 200. The gripping portion 240 is, for example, cylindrical, and a shaft support member 220 is provided at the end of the gripping portion 240. A shaft member 210 extends from the end of the gripping portion 240. When the fastening tool 200 is straight, the central axis of the shaft member 210 and the central axis of the gripping portion 240 are on the same straight line. When the fastening tool 200 is bent, the central axes of the shaft member 210 and the central axis of the gripping portion 240 are not on the same straight line and intersect.

[0064] As shown in Figure 19, the pin 212 at the tip of the shaft member 210 is inserted into the hole 49 of the lid member 48, and the lid member 48 is rotated with the fastening tool 200 held horizontally to tighten the second support member 46. This causes the position fixing part 40 to pull up the sample holding part 20, allowing the sample holding part 20 to be fastened to the upper part 12 of the holder base 10.

[0065] At this time, if a torque greater than the torque value set for the second support member 46 is applied, a force greater than the force exerted by the elastic member 234 to press the ball portion 232 against the recess 216 and maintain the posture of the shaft member 210 is applied to the shaft member 210, causing the ball portion 232 to disengage from the recess 216, as shown in Figures 15 and 17. As a result, the fastening tool 200 bends. Therefore, by tightening the second support member 46 with the fastening tool 200 until the fastening tool 200 bends, it is possible to prevent a torque greater than the torque value set for the second support member 46 from being applied.

[0066] The spherical portion 214 at the rear end of the shaft member 210 is supported by a shaft support member 220 that rotatably supports the spherical portion 214. Therefore, regardless of the direction of the force applied to the shaft member 210, if a force exceeding a predetermined value is applied to the shaft member 210, the ball portion 232 will disengage from the recess 216. Consequently, regardless of the direction of the force applied to the shaft member 210, if a force exceeding a predetermined value is applied to the shaft member 210, the fastening tool 200 will bend, thus more reliably preventing the application of a torque greater than the torque value set for the second support member 46. For example, even if a large force is applied to the shaft member 210 from an unintended direction, the fastening tool 200 will bend, thus more reliably preventing the application of a torque greater than the torque value set for the second support member 46.

[0067] By using the fastening tool 200 to tighten the second support member 46 to a torque value below the set value, the displacement of the sample holding part 20 can be reduced. For example, when fastening the sample holding part 20 to the holder base 10, if a large torque is applied to the second support member 46, strain may occur in the sample holding part 20, the holder base 10, and the position fixing part 40 (shaft 42, first support member 44, and second support member 46), which may cause displacement of the sample holding part 20. By using the fastening tool 200 to tighten the second support member 46, it is possible to prevent a torque greater than the set torque value from being applied to the second support member 46, thereby reducing the strain that occurs in the sample holding part 20, the holder base 10, and the position fixing part 40. Therefore, displacement of the sample holding part 20 can be reduced.

[0068] Furthermore, the force with which the elastic member 234 presses the ball portion 232 against the recess 216 may be made variable. This allows the torque value when the fastening tool 200 bends to be variable. For example, although not shown in the figures, a compression mechanism for compressing the compression spring as the elastic member 234 may be provided. This allows the amount of compression of the compression spring to be adjusted, and the force of the compression spring to be made variable. In other words, the force with which the elastic member 234 presses the ball portion 232 against the recess 216 can be varied. Therefore, the torque value when the fastening tool 200 bends can be adjusted. The compression mechanism may be, for example, a screw provided behind the elastic member 234. In such a compression mechanism, the amount of compression of the compression spring can be adjusted by how tightly the screw is tightened.

[0069] 4. Sample processing equipment Figure 20 shows an example of the configuration of the sample processing apparatus 300. The sample processing apparatus 300 is an ion beam processing apparatus that processes the sample 2 by irradiating it with an ion beam IB to prepare a sample for observation and analysis. The sample processing apparatus 300 can, for example, process the cross-section of the sample 2.

[0070] The sample processing device 300 is used, for example, to prepare samples for electron microscopes such as scanning electron microscopes (SEM), transmission electron microscopes (TEM), and scanning transmission electron microscopes (STEM). The sample processing device 300 is also used, for example, to prepare samples for electron probe microanalyzers (EPMA) and Auger microprobes.

[0071] The sample processing apparatus 300 includes a sample holder 100, as shown in Figure 20. The sample processing apparatus 300 further includes a vacuum chamber 310, a sample stage extraction mechanism 312, an exhaust device 314, an ion source 320, a sample stage 340, and an alignment camera 360.

[0072] Inside the vacuum chamber 310, the sample 2 is irradiated with an ion beam IB. The vacuum chamber 310 is evacuated by an exhaust device 314. The sample stage extraction mechanism 312 is a mechanism for extracting the sample stage 340 from the vacuum chamber 310. The sample stage extraction mechanism 312 is attached to the vacuum chamber 310 so as to be openable and closable, and closes the opening of the vacuum chamber 310. The sample stage 340 is attached to the sample stage extraction mechanism 312.

[0073] The ion source 320 irradiates the sample 2 with an ion beam IB. The ion source 320 is mounted in the vacuum chamber 310. The ion source 320 is an ion gun that accelerates and emits the ion beam IB at a predetermined acceleration voltage. The ion source 320 emits the ion beam IB by ionizing Ar gas, for example. The diameter of the ion beam IB is, for example, about 1 to 2 mm.

[0074] The sample holder 100 is attached to the sample stage 340. The sample holder 100 is detachable from the sample stage 340. The sample holder 100 holds the sample 2. The sample holder 100 also has a shielding plate 50. The shielding plate 50 is placed on the sample 2 and shields the ion beam IB. In the sample processing apparatus 300, the ion beam IB is irradiated onto the portion of the sample 2 that protrudes from the shielding plate 50. This allows the cross-section of the sample 2 to be processed.

[0075] The sample stage 340 supports the sample holder 100 so that it can oscillate (rotate). Therefore, the sample 2 can be irradiated with the ion beam IB while it is oscillating (rotating). The sample stage 340 is equipped with a cooling mechanism to cool the sample holder 100, for example, to reduce processing damage to the sample 2 caused by the ion beam.

[0076] The alignment camera 360 is mounted on top of the sample stage extraction mechanism 312. The alignment camera 360 is, for example, a camera mounted on an optical microscope.

[0077] Figure 21 is a diagram illustrating the operation of the sample stage extraction mechanism 312. The diagram shows the sample stage extraction mechanism 312 in the open position.

[0078] When the sample stage extraction mechanism 312 shown in Figure 21 is open and the target processing position of the sample 2 is aligned with the field of view of the alignment camera 360, the ion beam IB emitted from the ion source 320 when the sample stage extraction mechanism 312 shown in Figure 20 is closed is irradiated onto the target processing position. In this way, the sample processing apparatus 300 can irradiate the target processing position of the sample 2 with the ion beam IB by adjusting the position of the sample 2 using the alignment camera 360.

[0079] The sample processing apparatus 300 can align the sample 2 with respect to the shielding plate 50 using the alignment camera 360. The alignment of the sample 2 with respect to the shielding plate 50 is performed using a sample position adjustment jig 400. The sample position adjustment jig 400 will be described later.

[0080] 5. Jig for adjusting sample position Figures 22 and 23 illustrate the sample position adjustment jig 400. In Figures 22 and 23, the sample holder 100 and the sample position adjustment jig 400 are shown in a simplified manner.

[0081] In the sample holder 100, the alignment of the sample 2 with respect to the shielding plate 50 is performed using a sample position adjustment jig 400. The jig 400 is attached to the sample holder 100 as shown in Figures 22 and 23.

[0082] To adjust the amount A of the sample 2's protrusion from the edge 51 of the shielding plate 50, the sample holder 20 is pushed in or pulled out using the jig 400, as shown in Figure 22. Here, as shown in Figures 11 to 13, the sample holder 20 is movable along the X-axis. Therefore, the amount A of the protrusion can be adjusted by pushing in or pulling out the sample holder 20 using the jig 400.

[0083] Furthermore, when adjusting the inclination θ of the shielding plate 50 of sample 2 with respect to the edge 51, as shown in Figure 23, the jig 400 is used to push the +Y end of the sample holding part 20 or the -Y end of the sample holding part 20. As shown in Figure 10, the sample holding part 20 is rotatable around the shaft 42 as the axis of rotation. Therefore, the inclination θ can be adjusted by using the jig 400 to push the +Y end of the sample holding part 20 or the -Y end.

[0084] 6. Sample preparation method Figure 24 is a flowchart showing an example of a sample processing method using the sample processing device 300.

[0085] First, as shown in Figures 1, 3 to 5, sample 2 is placed in the sample holder 100 (step S100).

[0086] The sample 2 is fixed to the sample holding section 20 using the sample fixing section 30. Specifically, as shown in Figure 5, by tightening the sample stage support member 34, which has a male screw 35 formed on it, the sample stage support member 34 pushes up the sample stage 32, pressing the sample 2 against the upper part 22 of the sample holding section 20. This fixes the sample 2 to the sample holding section 20.

[0087] In this way, by pressing the sample 2 against the sample holding part 20 and making the sample 2 tightly attached to the sample holding part 20, surface contact can be made between the sample 2 and the sample holding part 20. This allows for cooling. The cooling efficiency of the sample 2 can be increased in the sample stage 340 which has a mechanism.

[0088] Next, the shielding plate 50 is attached to the shielding plate holding member 60 (step S102). At this time, the shielding plate 50 is pressed against the upper surface of the sample 2.

[0089] Next, as shown in Figure 21, the sample position adjustment jig 400 is attached to the sample holder 100 (step S104), and the sample holder 100 is attached to the sample stage 340 (step S106).

[0090] The sample stage pull-out mechanism 312 is opened, and the sample holder 100, to which the sample position adjustment jig 400 is attached, is mounted onto the sample stage 340.

[0091] Next, adjust the position of sample 2 (step S108).

[0092] In step S108, which adjusts the position of sample 2, the amount A protruding from the edge 51 of the shielding plate 50 and the inclination θ of sample 2 relative to the edge 51 of the shielding plate 50 are adjusted. While checking the positional relationship between the shielding plate 50 and sample 2 with the alignment camera 360, the amount A protruding is adjusted by pushing in or pulling out the sample holding part 20 using the jig 400, as shown in Figure 22. Also, while checking the positional relationship between the shielding plate 50 and sample 2 with the alignment camera 360, the inclination θ of sample 2 is adjusted by pushing the +Y end of the sample holding part 20 and the -Y end using the jig 400, as shown in Figure 23.

[0093] Next, the second support member 46 is tightened using the fastening tool 200 to fasten the sample holding part 20 and the holder base 10, thereby fixing the position of the sample 2 (step S110).

[0094] First, as shown in Figures 18 and 19, one of the two pins 212 is inserted into the hole 49 of the lid member 48 to make the fastening tool 200 horizontal. Next, the lid member 48 is rotated using the fastening tool 200 to tighten the second support member 46. Tightening is stopped when the fastening tool 200 bends. This fastens the sample holding part 20 and the holder base 10. As a result, the position of the sample holding part 20, i.e., the position of the sample 2, is fixed. By using the fastening tool 200, the second support member 46 can be tightened to a torque value below the set value, thereby reducing displacement of the sample 2.

[0095] The fastening tool 200 allows horizontal access to the sample holder 100, making it easy to access the sample holder 100 even when there is limited space above it.

[0096] Next, as shown in Figure 20, the fastening tool 200 and jig 400 are removed from the sample holder 100 (step S112), the sample stage extraction mechanism 312 is closed, and the vacuum chamber 310 is evacuated using the exhaust device 314 (step S114). After the vacuum chamber 310 reaches the target vacuum level, the sample 2 held in the sample holder 100 is irradiated with the ion beam IB to process the sample 2 (step S116).

[0097] Through the above process, sample 2 can be processed with an ion beam (IB).

[0098] 7. Effects The sample holder 100 is a sample holder for a sample processing apparatus that processes sample 2 by irradiating it with an ion beam. The sample holder 100 includes a holder base 10, a sample holding part 20 for holding sample 2, and a position fixing part 40 for fixing the position of the sample holding part 20. Furthermore, the position fixing section 40 includes a shaft 42 connected to the sample holding section 20, a first support member 44 that rotatably supports the shaft 42, and a second support member 46 that movably supports the first support member 44 along an axis perpendicular to the axis of the shaft 42. By rotating the second support member 46, the second support member 46 moves along the axis of the shaft 42, fastening the sample holding section 20 and the holder base 10, and restricting the rotation of the first support member 44 that occurs with the rotation of the second support member 46.

[0099] In the sample holder 100, when the second support member 46 is rotated to fasten the sample holding section 20 and the holder base 10, the first support member 44 does not rotate in conjunction with the rotation of the second support member 46. Therefore, the sample holder 100 can reduce the displacement of the sample 2 when fastening the sample holding section 20 and the holder base 10. In this way, by using the sample holder 100, the displacement of the sample 2 can be reduced, making it possible to create a cross-section at a targeted position, for example, in a sample with a fine pattern.

[0100] In the sample holder 100, the holder base 10 is provided with a first threaded portion 120, and the second support member 46 is provided with a second threaded portion 463 that screws into the first threaded portion 120. Therefore, in the sample holder 100, the second support member 46 can be tightened to fasten the sample holding portion 20 and the holder base 10.

[0101] In the sample holder 100, the position fixing part 40 fastens the sample holding part 20 to the holder base 10 by rotating the second support member 46 to pull up the sample holding part 20. In the sample holder 100, by pulling up the sample holding part 20, the sample 2 moves closer to the shielding plate 50, so that the sample 2 and the shielding plate 50 can be brought into close contact.

[0102] In the sample holder 100, the holder base 10 is provided with an elongated hole 11 that is aligned with the X-axis perpendicular to the shaft 42. The first support member 44 has a shaft portion 440 inserted into the elongated hole 11, and the shaft portion 440 has a first side surface 440a that contacts the surface 11a that defines the width W of the elongated hole 11. Therefore, in the sample holder 100, the rotation of the first support member 44 can be restricted in conjunction with the rotation of the second support member 46.

[0103] In the sample holder 100, the first support member 44 has a wide portion 442 that is wider than the width of the shaft portion 440. The second support member 46 is provided with an insertion hole 47 into which the first support member 44 is inserted. The insertion hole 47 has a first portion 47a into which the shaft portion 440 is inserted, and a second portion 47b that has a larger diameter than the first portion 47a, and the wide portion 442 catches on the step 47c between the first portion 47a and the second portion 47b. Therefore, in the sample holder 100, the first support member 44 is movable along the X-axis and can move along the Z-axis in conjunction with the movement of the second support member 46 along the Z-axis.

[0104] The sample holder 100 includes a shielding plate 50 that shields a portion of the sample 2. Therefore, the sample holder 100 can be used as a sample holder for cross-sectional processing.

[0105] The sample holder 100 includes a sample fixing part 30 for fixing the sample 2 to the sample holding part 20. The sample fixing part 30 has a sample stage 32 that contacts the sample 2 and a sample stage support member 34 that supports the sample stage 32 so that it can be tilted. Therefore, even if the lower surface of the sample 2 is inclined relative to the upper surface of the sample 2, or if the lower surface of the sample 2 has irregularities, the upper surface of the sample 2 can be brought into close contact with the upper part 22 of the sample holding part 20.

[0106] The sample holder set includes a sample holder 100 and a fastening tool 200 for tightening the second support member 46 to a predetermined torque value or less. Therefore, in the sample holder set, the holder base 10, the sample holding part 20, and the position fixing are achieved by tightening the second support member 46. This reduces the strain in the fixed section 40 and reduces the positional displacement of the sample 2.

[0107] For example, if the user directly tightens the second support member 46, excessive torque may be applied to the second support member 46, potentially causing significant strain in the holder base 10, sample holding section 20, and position fixing section 40. This increased strain can cause the sample 2 to shift position. By using the fastening tool 200 to tighten the second support member 46, excessive torque can be prevented, reducing strain in the holder base 10, sample holding section 20, and position fixing section 40. Therefore, using the fastening tool 200 reduces the misalignment of the sample 2 when fastening the holder base 10 and the sample holding section 20.

[0108] The fastening tool 200 includes a shaft member 210 whose tip can be connected to a second support member 46, a shaft support member 220 that rotatably supports the rear end of the shaft member 210, and a positioning member 230 for positioning the shaft member 210. A recess 216 is provided at the rear end of the shaft member 210, and the positioning member 230 includes a ball portion 232 that fits into the recess 216 and an elastic member 234 that presses the ball portion 232 against the recess 216. Furthermore, when a torque greater than a predetermined torque value is applied to the second support member 46, the ball portion 232 disengages from the recess 216. Therefore, in the fastening tool 200, when a torque greater than a predetermined torque value is applied to the second support member 46, the fastening tool 200 bends. Consequently, the fastening tool 200 can tighten the second support member 46 with a torque of less than or equal to the predetermined torque value, thereby reducing the displacement of the sample 2.

[0109] In the fastening tool 200, a spherical portion 214 is provided at the rear end of the shaft member 210, and a recess 216 is provided on the axis connecting the center and tip of the spherical portion 214. Therefore, in the fastening tool 200, regardless of the direction of the force applied to the shaft member 210, if a force exceeding a predetermined value is applied to the shaft member 210, the ball portion 232 will disengage from the recess 216. Consequently, regardless of the direction of the force applied to the shaft member 210, the fastening tool 200 will bend when a force exceeding a predetermined value is applied to the shaft member 210, thus more reliably preventing the application of a torque greater than the torque value set for the second support member 46.

[0110] In the fastening tool 200, the force with which the elastic member 234 presses the ball portion 232 against the recess 216 is variable. Therefore, the torque when tightening the second support member 46 using the fastening tool 200 can be adjusted.

[0111] Since the sample processing device 300 includes a sample holder 100, it can reduce the positional displacement of the sample 2 when fixing the sample 2, and can accurately process the target processing location.

[0112] 8. Variations The present invention is not limited to the embodiments described above, and various modifications can be implemented within the scope of the gist of the present invention.

[0113] 8.1. First Variation In the embodiment described above, as shown in Figure 21, the sample holder 100 was attached to the sample stage 340 of the sample processing device 300 to align the sample 2 with respect to the shielding plate 50. However, the sample 2 may be aligned with respect to the shielding plate 50 before attaching the sample holder 100 to the sample stage 340. For example, the sample 2 may be aligned using an optical microscope. After aligning the sample 2 with an optical microscope, the position of the sample holding part 20 may be fixed using the fastening tool 200, and the sample holder 100 may be attached to the sample stage 340 of the sample processing device 300.

[0114] 8.2. Second Variation In the embodiment described above, as shown in Figure 20, after removing the jig 400 for adjusting the sample position, the sample 2 held in the sample holder 100 was irradiated with the ion beam IB to process the sample 2. Alternatively, although not shown, the sample 2 may be processed by irradiating the sample 2 with the ion beam IB while the jig 400 is attached to the sample holder 100. For example, the tip of the shaft member 210 of the fastening tool 200 may be fixed to the second support member 46 of the sample holder 100.

[0115] 8.3. Third Variation In the embodiment described above, the second support member 46 was tightened using a fastening tool 200 that bends when a torque greater than a predetermined torque value is applied to the second support member 46. However, it is not necessary to use the fastening tool 200 when tightening the second support member 46. For example, the second support member 46 may be tightened using a tool that breaks when a torque greater than a predetermined torque value is applied to the second support member 46. Examples of such tools include wooden rods and resin rods. For example, the thickness and material of the rod may be adjusted to set the torque value at which the rod breaks.

[0116] By tightening the second support member 46 with a tool that breaks when a torque greater than a predetermined torque value is applied to the second support member 46, the same effect as when using the fastening tool 200 can be achieved. Such a tool may be disposable.

[0117] 8.4. Fourth Variation In the embodiments described above, as shown in Figures 18 and 19, the fastening tool 200 was connected to the cover member 48 of the second support member 46. However, the fastening tool 200 may also be connected to the second support member 46 by providing a hole in the knob 460 of the second support member 46 into which the pin 212 is inserted, without using the cover member 48.

[0118] 8.5. Fifth Variation Figures 25 and 26 illustrate modified versions of the fastening tool 200. Figure 25 shows the fastening tool 200 in a straight state, and Figure 26 shows the fastening tool 200 in a bent state.

[0119] As shown in Figures 25 and 26, the fastening tool 200 includes a shaft member 210, a positioning member 230, and a gripping portion 240.

[0120] In the fastening tool 200, the positioning member 230 is a leaf spring. The spring force of the leaf spring allows the torque value at which the fastening tool 200 bends to be set. The rear end of the shaft member 210 is provided with a rotatable part 218 that can rotate around the shaft 219 as the axis of rotation. The rotatable part 218 is provided with a recess 216. The recess 216 is located on the axis connecting the tip of the shaft member 210 and the shaft 219.

[0121] When the fastening tool 200 shown in Figure 25 is in a straight position, the leaf spring acting as the positioning member 230 is fitted into the recess 216. When a torque greater than a predetermined torque value is applied to the second support member 46, the leaf spring comes out of the recess 216, as shown in Figure 26. As a result, the fastening tool 200 bends.

[0122] In the fastening tool 200 shown in Figures 25 and 26, similar to the fastening tool 200 shown in Figures 14 to 17, it is possible to prevent a torque greater than a predetermined torque value from being applied to the second support member 46.

[0123] In the fastening tool 200 shown in Figures 14 to 17 above, the spherical portion 214 at the rear end of the shaft member 210 is supported by a shaft support member 220 that rotatably supports the spherical portion 214, so the fastening tool 200 can bend in various directions. However, the fastening tool 200 shown in Figures 25 and 26 bends around a single shaft 219. Although Figures 25 and 26 describe the case where there is one shaft that bends, the fastening tool 200 may have multiple shafts that bend, although these are not shown.

[0124] 8.6. Sixth Variation In the embodiments described above, the position of the sample 2 relative to the shielding plate 50 was adjusted using a sample position adjustment jig 400, as shown in Figures 22 and 23. However, the position of the sample 2 may also be adjusted by moving the sample holding part 20 using tweezers or the like, without using the jig 400.

[0125] The embodiments and modifications described above are merely examples and are not limiting. For example, each embodiment and each modification can be combined as appropriate.

[0126] The present invention is not limited to the embodiments described above, and various further modifications are possible. For example, the present invention includes configurations that are substantially identical to those described in the embodiments. A substantially identical configuration is, for example, a configuration that has the same function, method, and result, or a configuration that has the same purpose and effect. The present invention also includes configurations in which non-essential parts of the configuration described in the embodiments are replaced. Furthermore, the present invention includes configurations that produce the same effects or achieve the same purpose as the configuration described in the embodiments. Furthermore, the present invention includes configurations that add known technology to the configuration described in the embodiments. [Explanation of Symbols]

[0127] 2…Sample, 10…Holder base, 11…Slotted hole, 11a…Surface, 11b…Surface, 12…Upper part, 14…Lower part, 15…Notch, 16…Connecting part, 20…Sample holding part, 22…Upper part, 24…Lower part, 25…Female thread, 26…Connecting part, 30…Sample fixing part, 32…Sample stage, 33…Recess, 34…Sample stage support member, 35…Male thread, 36…Tip part, 40…Position fixing part, 42…Shaft, 44…First support member, 45…Hole, 46…Second support member, 47…Insertion hole, 47a…First part, 47b…Second part, 47c…Step, 48…Lid member, 49…Hole, 50…Shielding plate, 51…Edge, 60…Shielding plate holding member, 100…Sample holder Holder, 120...First threaded section, 200...Fastening tool, 210...Shaft member, 212...Pin, 214...Spherical section, 216...Recess, 218...Rotating section, 219...Shaft, 220...Shaft support member, 230...Positioning member, 232...Ball section, 234...Elastic member, 240...Gripping section, 300...Sample processing device, 310...Vacuum chamber, 312...Sample stage extraction mechanism, 314...Exhaust device, 320...Ion source, 340...Sample stage, 360...Alignment camera, 400...Sample position adjustment jig, 440...Shaft section, 440a...First side, 440b...Second side, 442...Wide section, 462...Screw shaft, 463...Second threaded section

Claims

1. A sample holder for a sample processing apparatus that processes a sample by irradiating it with an ion beam, Holder base and A sample holding section for holding the aforementioned sample, A position fixing part for fixing the position of the sample holding part, Includes, The aforementioned position fixing part is, A shaft connected to the sample holding section, A first support member that rotatably supports the shaft, A second support member supports the first support member so that it can move along an axis perpendicular to the axis of the shaft, Includes, By rotating the second support member, the second support member moves along the axis of the shaft, fastening the sample holding portion and the holder base. A sample holder in which the rotation of the first support member is restricted in conjunction with the rotation of the second support member.

2. In claim 1, The holder base is provided with a first threaded portion, A sample holder wherein the second support member is provided with a second threaded portion that screws into the first threaded portion.

3. In claim 1, The position fixing part fastens the sample holding part and the holder base by rotating the second support member to pull up the sample holding part, thereby providing a sample holder.

4. In claim 1, The holder base is provided with an elongated hole that is provided along the vertical axis, The first support member has a shaft portion inserted into the elongated hole, The aforementioned shaft portion has a surface that contacts the surface that defines the width of the elongated hole, in the sample holder.

5. In claim 4, The first support member has a wide portion that is wider than the width of the shaft portion, The second support member is provided with an insertion hole into which the first support member is inserted. The aforementioned insertion hole is The first part into which the shaft portion is inserted, A second part having a larger diameter than the first part, It has, The wide portion is a sample holder that catches on the step between the first portion and the second portion.

6. In claim 1, A sample holder including a shielding plate that shields a portion of the aforementioned sample.

7. In claim 1, The sample holding portion includes a sample fixing portion for fixing the sample, The aforementioned sample fixing portion is A sample stand that comes into contact with the aforementioned sample, A sample stand support member that supports the sample stand so that it can be tilted, A sample holder having

8. A sample holder according to any one of claims 1 to 7, A fastening tool for tightening the second support member with a torque value of less than or equal to a predetermined value, A sample holder set, including the sample holder set.

9. In claim 8, The fastening tool is, A shaft member whose tip can be connected to the second support member, A shaft support member that rotatably supports the rear end of the shaft member, A positioning member for positioning the aforementioned shaft member, Includes, A recess is provided at the rear end of the shaft member. The positioning member is The ball portion that fits into the recess, An elastic member that presses the ball portion against the recess, Includes, A sample holder set in which the ball portion detaches from the recess when a torque greater than the predetermined torque value is applied to the second support member.

10. In claim 9, A spherical portion is provided at the rear end of the shaft member. A sample holder set in which the recess is provided on an axis connecting the center of the spherical part and the tip.

11. In claim 9, A sample holder set in which the force with which the elastic member presses the ball portion against the recess is variable.

12. A sample processing apparatus comprising a sample holder according to any one of claims 1 to 7.

13. A fastening tool for tightening fastening members, A shaft member whose tip is connected to the fastening member, A shaft support member that rotatably supports the rear end of the shaft member, A positioning member for positioning the aforementioned shaft member, Includes, A recess is provided at the rear end of the shaft member. The positioning member is The ball portion that fits into the recess, An elastic member that presses the ball portion against the recess, Includes, A fastening tool in which, when a torque greater than a predetermined torque value is applied to the fastening member, the ball portion disengages from the recess.

Images