Beam scraper structure for beam line of ion implanter

Abstract

The utility model discloses a beam scraping device structure for a beam line of an ion implanter, which relates to the technical field of high-energy physical experiments and accelerators and comprises a beam scraping device, the beam scraping device is integrally machined and formed, and the beam scraping device is of a structure with a square rod in the middle and disc flanges at two ends. Beam channels are formed in the middles of the two ends of the beam scraping device. The cross section of the beam channel is square and is adjusted according to the shape of the beam. A plurality of round holes are formed in the disc flange-shaped surfaces at the two ends of the beam scraping device, and the two ends of the beam scraping device are connected with the beam line main pipeline through the plurality of round holes. Two U-shaped tubular water cooling flow channels are formed in the middle of a square rod in the middle of the beam scraping device, and an inlet and an outlet are formed in the positions, on the surface of the beam scraping device, of the two ends of each water cooling flow channel respectively. The utility model relates to a beam scraping device with a long beam pipeline. The utility model relates to a beam scraping device with a water cooling structure. According to the beam scraping device, an integral processing mode is adopted, and a beam channel is processed in a wire cutting mode.

Description

Technical Field

[0001] This utility model relates to the fields of high-energy physics experiments and accelerator technology, specifically a scraper structure for beam streamlines in ion implanters. Background Technology

[0002] A beam scraper is a device used to control and regulate a beam. Its main function is to remove scattered or stray particles from the outer edge of the beam envelope. By precisely designing the geometry and position of the beam scraper, the beam can be shaped, making it more concentrated and uniform, thus improving beam stability. It works by physically blocking unwanted particles, causing them to lose energy and stop moving within the beam scraper structure, allowing only the desired beam to pass through. Beam scrapers play a crucial role in high-energy physics experiments, accelerators, and other applications, improving beam quality and stability while reducing unnecessary particle loss and background noise.

[0003] Currently, most beam scrapers are used in areas with short beam tube lengths. Due to the energy requirements of ion implanters, multiple beam scrapings are needed over a very short distance. Using multiple independent short beam scrapers presents the following technical challenges:

[0004] Water-cooling design challenges: Due to limited space, it is difficult to design an effective water-cooling system for multiple independent short beam scrapers, resulting in poor heat dissipation and potentially causing the beam scrapers to overheat and be damaged under the impact of high-energy beams.

[0005] Increased sealing surfaces: Multiple independent beam scrapers significantly increase the number of sealing surfaces, increasing installation complexity and the risk of vacuum leakage. This affects beam stability and experimental reliability. Utility Model Content

[0006] To achieve the above objectives, this utility model employs the following technical solution:

[0007] A beam scraper structure for an ion implanter beamline includes a beam scraper that is integrally machined and has a shape of a square rod in the middle and disc-flange-shaped structures at both ends. Beam channels are opened in the middle of both ends of the beam scraper.

[0008] As a preferred embodiment of this utility model, the cross-section of the beam channel is square, and is adjusted according to the shape of the beam.

[0009] As a preferred technical solution of this utility model, the disc flange-shaped surfaces at both ends of the beam scraper are provided with a number of circular holes, and the two ends of the beam scraper are connected to the main pipeline of the beam line through the number of circular holes.

[0010] As a preferred technical solution of this utility model, the middle square rod of the scraper has two U-shaped tubular water-cooling channels, and each water-cooling channel has an inlet and an outlet at both ends on the surface of the scraper.

[0011] As a preferred technical solution of this utility model, the beam channel runs through the middle of both ends of the beam scraper, the length of the beam channel is 20cm, and the beam channel is formed by wire cutting.

[0012] As a preferred technical solution of this utility model, each of the water-cooled channels is independent of each other.

[0013] 1. This utility model relates to a beam scraper with a long beam channel; the beam channel is manufactured using wire cutting.

[0014] 2. The scraper with water cooling structure of this utility model improves heat dissipation and effectively avoids overheating damage to the scraper under the impact of high-energy beams;

[0015] 3. The beam scraper of this utility model adopts an integral processing method, and the beam channel is processed by wire cutting.

[0016] Other advantages, objectives, and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination and study, or may be learned from practice of this invention. The objectives and other advantages of this invention can be realized and obtained through the following description. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the external structure of the scraper structure for the beam streamline of an ion implanter according to this utility model;

[0018] Figure 2 This is a front view schematic diagram of the beam scraper structure for the ion implanter beam streamline of this utility model;

[0019] Figure 3 Appendix to the specification of this utility model Figure 2 A schematic diagram of the AA cross-sectional structure;

[0020] Figure 4 Appendix to the specification of this utility model Figure 2 Schematic diagram of CC cross-section structure;

[0021] Figure 5 This is a cross-sectional structural diagram of the scraper structure for the beam streamline of an ion implanter according to this utility model;

[0022] In the diagram: 1 is the beam scraper; 2 is the beam channel; 3 is the water-cooling channel. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0026] In the above description of this utility model, it should be noted that the terms "one side," "the other side," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] Furthermore, terms such as "identical" do not imply that components must be absolutely identical; minor differences are permissible. The term "perpendicular" simply means that the positional relationship between components is more perpendicular than "parallel," not that the structure must be perfectly perpendicular; a slight tilt is acceptable. Example

[0028] Please see Figure 1-5 The present invention provides a technical solution: a scraper structure for a beamline of an ion implanter, comprising a scraper 1, which is integrally formed and has a square rod in the middle and disc-flange-shaped structures at both ends. Beam channels 2 are provided in the middle of both ends of the scraper 1. The cross-section of the beam channels 2 is square.

[0029] The scraper 1 has several circular holes on its disc-flange-shaped surfaces at both ends, which connect it to the main beam line pipe. Two U-shaped water-cooled channels 3 are located in the middle of the square rod of the scraper 1, each with an inlet and an outlet at both ends on the surface of the scraper 1. The beam channel 2 runs through the middle of both ends of the scraper 1. Each water-cooled channel 3 is independent of the others.

[0030] Example 2

[0031] Please see Figure 1-5 This is another technical solution provided by the present invention. This embodiment has the same features as the above embodiment 1, and the similarities will not be described in this embodiment. The specific differences are as follows:

[0032] A beam scraper structure for ion implanter beam lines includes a beam scraper 1, which is integrally machined and has a square rod in the middle and disc-flange-shaped structures at both ends. Beam channels 2 are opened in the middle of both ends of the beam scraper 1.

[0033] The cross-section of beam channel 2 can be square, circular, or other shapes, depending on the beam shape.

[0034] 1 is the beam scraper, 2 is the beam channel, and 3 is the water-cooled flow channel. The beam scraper is machined as a single piece, and both ends of the scraper are connected to the main beam line pipe. The scraper has 2 inlets and 2 outlets, and 3 independent water-cooled flow channels. The beam channel has a square cross-section, adjusted according to the beam shape, and is 20cm long. This relatively long length was machined using wire cutting.

[0035] A beam scraper is a device used to control and regulate a beam. Its main function is to remove scattered or stray particles from the outer edge of the beam envelope. By precisely designing the geometry and position of the beam scraper, the beam can be shaped, making it more concentrated and uniform, thus improving beam stability. It works by physically blocking unwanted particles, causing them to lose energy and stop moving within the beam scraper structure, allowing only the desired beam to pass through. Beam scrapers play a crucial role in high-energy physics experiments, accelerators, and other applications, improving beam quality and stability while reducing unnecessary particle loss and background noise.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A beam scraper structure for ion implanter beam streamlines, comprising a beam scraper (1), characterized in that: The beam scraper (1) is integrally formed. The shape of the beam scraper (1) is a square rod in the middle and a disc flange structure at both ends. Beam channels (2) are opened in the middle of both ends of the beam scraper (1).

2. The beam scraper structure for ion implanter beam streamlines according to claim 1, characterized in that: The beam channel (2) has a square cross-section.

3. The beam scraper structure for ion implanter beam streamlines according to claim 1, characterized in that: The scraper (1) has several circular holes on the disc flange-shaped surfaces at both ends, and the two ends of the scraper (1) are connected to the main pipeline of the beam line through several circular holes.

4. A scraper structure for beam lines in an ion implanter according to claim 1, characterized in that: The scraper (1) has two U-shaped tubular water-cooling channels (3) in the middle of the square rod. Each water-cooling channel (3) has an inlet and an outlet at both ends on the surface of the scraper (1).

5. A scraper structure for beam lines in an ion implanter according to claim 2, characterized in that: The beam channel (2) runs through the middle of both ends of the beam scraper (1).

6. A scraper structure for ion implanter beam streamlines according to claim 4, characterized in that: Each of the water-cooled channels (3) is independent of each other.

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