Quartz boat surface grinding and polishing equipment

Abstract

The utility model provides quartz boat surface grinding and polishing equipment, which relates to the technical field of grinding and polishing and comprises a grinding and polishing component, a mounting component is arranged at the top of the grinding and polishing component, a dust collection component is arranged at one end of the grinding and polishing component, and the grinding and polishing component comprises a grinding and polishing box. The mounting assembly comprises a grinding motor, and a hydraulic lifting column is mounted at the top of the grinding motor. The pull rod is pulled outwards, so that the spring is stressed and compressed, then the mounting sleeve is arranged on the outer side of the rotating shaft in a sleeving mode, the mounting strip is promoted to be installed in the limiting groove in a sliding mode, the grinding and polishing head is conveniently installed, then the pull rod is loosened, and the spring drives one end of the pull rod to be installed in the rotating shaft through the elasticity of the spring; and limiting is facilitated, operation is convenient and rapid, the grinding and polishing head can be conveniently maintained and replaced at any time, operation convenience is improved, the equipment downtime is shortened, and working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to polishing technology field especially, relates to a quartz boat surface grinding and polishing equipment. BACKGROUND

[0002] Quartz boat surface grinding and polishing is a process of fine processing of quartz boat, which has important significance and effect. Through grinding and polishing, scratches, defects and rough parts on the surface of the quartz boat can be removed, making the surface smoother and more uniform, and reducing the surface roughness. This is crucial for quartz boats used in high-precision fields such as semiconductor manufacturing, as surface quality directly affects product performance and yield.

[0003] The existing grinding and polishing equipment needs to be maintained and replaced regularly during use because the grinding and polishing head is in contact with the surface of the quartz boat for a long time. However, the connection structure of the existing polishing head and the equipment main body is complex, the operation is cumbersome, and a lot of time and effort is wasted, resulting in low maintenance efficiency. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the problem of complex connection structure of the existing polishing head and the equipment main body, cumbersome operation, and a lot of time and effort wasted, resulting in low maintenance efficiency in the prior art, and proposes a quartz boat surface grinding and polishing equipment.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a quartz boat surface grinding and polishing equipment, comprising a grinding and polishing assembly, the top of the grinding and polishing assembly is provided with a mounting assembly, one end of the grinding and polishing assembly is provided with a dust collection assembly, the grinding and polishing assembly comprises a grinding and polishing box, the mounting assembly comprises a grinding motor, the top of the grinding motor is provided with a hydraulic lifting column, the top of the hydraulic lifting column is connected with a moving block, the outer side of the moving block is provided with a moving groove, the top of the moving groove is provided with a support frame, the side surface of the support frame is penetrated and installed with a third air cylinder, the output end of the third air cylinder is connected with the moving block, the bottom of the grinding motor is connected with a rotating shaft, the outer side of the rotating shaft is symmetrically provided with a mounting strip, the outer side of the rotating shaft is provided with a mounting sleeve, the inside of the mounting sleeve is symmetrically provided with a limiting groove, the mounting strip is slidably installed in the limiting groove, and the bottom of the mounting sleeve is provided with a grinding and polishing head.

[0006] Preferably, the dust collection assembly comprises a dust collection cover, the side surface of the dust collection cover is connected with a conveying channel, the inside of the conveying channel is provided with a filter element, and the side surface of the conveying channel is provided with a suction fan.

[0007] Preferably, the top of the grinding and polishing head is provided with a fixing frame, the inside of the fixing frame is provided with a pull rod, the outside of the pull rod is connected with a spring, and one end of the spring is arranged on the side of the rotating shaft.

[0008] Preferably, the outside of the air suction fan is provided with a protective frame, and the filter element is arranged on the side of the air suction fan.

[0009] Preferably, the two ends of the grinding and polishing box are provided with first air cylinders, the output ends of the first air cylinders are connected with rotating motors, and one end of the rotating motor is provided with a rotating disc.

[0010] Preferably, the side of the rotating disc is provided with a second air cylinder, the two ends of the second air cylinder are connected with clamping plates, and the inside of the grinding and polishing box is provided with a collecting groove.

[0011] Compared with the prior art, the quartz boat surface grinding and polishing equipment has the advantages and positive effects that,

[0012] 1. In the utility model, the spring is compressed by pulling the pull rod outward, then the mounting sleeve is sleeved on the outside of the rotating shaft, the mounting strip is slid into the limiting groove, the grinding and polishing head is conveniently installed, then the pull rod is loosened, the spring is elastically deformed, one end of the pull rod is arranged in the rotating shaft, the position is limited, the operation is convenient and fast, the grinding and polishing head is conveniently maintained and replaced, the operation convenience is improved, the equipment downtime is reduced, the work efficiency is improved, the time and labor cost are saved without complicated disassembly of parts, and the maintenance efficiency is improved.

[0013] 2. In the utility model, the air suction fan works to generate suction force, the generated debris and dust in the machining process are effectively sucked, when the air suction fan stops working, the impurities and debris enter the inside of the collecting groove through the conveying channel, the collecting groove is arranged in the grinding and polishing box, the falling debris in the machining process is collected, the dust concentration in the working environment is effectively reduced, the health of the operator is protected, the debris is removed in real time during the machining process, the subsequent cleaning work is reduced, the filter element prevents the impurities and debris from entering the air suction fan, and finally the collected impurities and debris are cleaned by removing the collecting groove. ACCURACY OF DRAWINGS

[0014] Figure 1 A three-dimensional structure schematic diagram of the quartz boat surface grinding and polishing equipment is provided.

[0015] Figure 2 A partial structural schematic diagram of the quartz boat surface grinding and polishing equipment is provided.

[0016] Figure 3The utility model provides a kind of quartz boat surface grinding and polishing equipment's grinding and polishing subassembly structure schematic diagram;

[0017] Figure 4 The utility model provides a kind of quartz boat surface grinding and polishing equipment's mounting assembly exploded structure schematic diagram;

[0018] Figure 5 The utility model provides a kind of quartz boat surface grinding and polishing equipment's internal structure schematic diagram;

[0019] Figure 6 The utility model provides a kind of quartz boat surface grinding and polishing equipment's local structure schematic diagram.

[0020] Legend: 1, grinding and polishing subassembly;101, grinding and polishing box;102, first air cylinder;103, rotating motor;104, turntable;105, second air cylinder;106, clamping plate;107, collection groove;2, mounting assembly;201, support frame;202, third air cylinder;203, moving groove;204, moving block;205, hydraulic lifting column;206, grinding motor;207, rotating shaft;208, mounting strip;209, mounting sleeve;210, limit groove;211, fixed frame;212, pull rod;213, spring;214, grinding and polishing head;3, dust collection assembly;301, dust collection cover;302, conveying channel;303, filter element;304, suction fan;305, protection frame. DETAILED DESCRIPTION

[0021] In order to more clearly understand the above-mentioned purposes, features and advantages of the utility model, the utility model is further described below in conjunction with the drawings and examples. It should be noted that the embodiments of the present application and the features in the examples can be combined with each other without conflict.

[0022] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, however, the present application can also be implemented in other ways different from those described herein, therefore, the present application is not limited to the specific embodiments disclosed in the following description.

[0023] Example 1: as Figures 1-6The utility model provides a technical scheme: a quartz boat surface grinding and polishing equipment, including grinding and polishing subassembly 1, grinding and polishing subassembly 1's top is provided with mounting assembly 2, grinding and polishing subassembly 1 one end is provided with dust collection subassembly 3, grinding and polishing subassembly 1 includes grinding and polishing box 101, mounting assembly 2 includes grinding motor 206, grinding motor 206's top is installed with hydraulic lift column 205, hydraulic lift column 205's top is connected with moving block 204, moving block 204's outside is installed with moving groove 203, moving groove 203's top is installed with support frame 201, support frame 201's side is installed with third cylinder 202, third cylinder 202's output is connected with moving block 204, grinding motor 206's bottom is connected with the shaft 207, the shaft 207's outside symmetry is installed with mounting strip 208, the shaft 207's outside is installed with mounting sleeve 209, mounting sleeve 209's inside symmetry is set up with limit groove 210, mounting strip 208 is slidably installed in the limit groove 210, mounting sleeve 209's bottom is installed with grinding and polishing head 214, grinding and polishing head 214's top is installed with fixed frame 211, fixed frame 211's inside is installed with pull rod 212, pull rod 212's outside is connected with spring 213, spring 213 one end is installed in the side of the shaft 207.

[0024] In the embodiment, the third cylinder 202 is telescopic, which facilitates the third cylinder 202 to push the moving block 204 to move in the moving groove 203, adjusts the position, improves the grinding and polishing range, and extends the hydraulic lift column 205, which facilitates the grinding motor 206 to descend, the grinding motor 206 is electrically driven to rotate the shaft 207, and the grinding and polishing head 214 grinds and polishes the surface of the quartz boat. By pulling the pull rod 212 outward, the spring 213 is compressed, the mounting sleeve 209 is sleeved on the outside of the shaft 207, the mounting strip 208 is slidably installed in the limit groove 210, the grinding and polishing head 214 is installed, the pull rod 212 is released, the spring 213 is elastically deformed, the spring 213 drives one end of the pull rod 212 to be installed in the shaft 207, which is convenient and fast to limit, maintains and replaces the grinding and polishing head 214 at any time, improves the operation convenience, reduces the equipment downtime, improves the work efficiency, saves time and labor cost without complicated disassembly of parts, and improves the maintenance efficiency.

[0025] Embodiment 2: as Figures 1-6As shown, the dust suction assembly 3 comprises a dust suction cover 301, the side of the dust suction cover 301 is connected with a conveying channel 302, the inside of the conveying channel 302 is provided with a filter core 303, the side of the conveying channel 302 is provided with a suction fan 304, the outside of the suction fan 304 is provided with a protective frame 305, the filter core 303 is installed on the side of the suction fan 304, both ends of the grinding and polishing box 101 are provided with a first cylinder 102, the output end of the first cylinder 102 is connected with a rotating motor 103, one end of the rotating motor 103 is provided with a rotating disc 104, the side of the rotating disc 104 is provided with a second cylinder 105, both ends of the second cylinder 105 are connected with a clamping plate 106, the inside of the grinding and polishing box 101 is provided with a collecting groove 107.

[0026] In this embodiment, the second cylinder 105 is telescopic, and the clamping plate 106 effectively clamps the quartz boat, ensuring the stability of the quartz boat and improving the stability of the quartz boat during grinding and polishing, thereby improving the machining precision. The first cylinder 102 is telescopic, which is conducive to driving the rotating motor 103 to adjust according to the size of the quartz boat, and the rotating motor 103 is electrically driven to rotate the disc 104, which is conducive to the rotation of the quartz boat and the comprehensive grinding and polishing of the surface of the quartz boat, thereby improving the machining range. When the quartz boat is machined, the suction fan 304 works to generate suction, which is conducive to effectively removing the debris and dust generated during machining. When the suction fan 304 stops working, impurities and debris enter the inside of the collecting groove 107 through the conveying channel 302, and the collecting groove 107 is installed in the inside of the grinding and polishing box 101, which is conducive to collecting the debris falling during machining and effectively reducing the dust concentration in the working environment, thereby protecting the health of the operator. At the same time, the debris is removed in real time during machining, reducing the subsequent cleaning work. The filter core 303 is conducive to preventing impurities and debris from entering the suction fan 304. Finally, the collected impurities and debris are removed from the collecting groove 107.

[0027] The working principle of the embodiment is as follows: in use, first, the second cylinder 105 is retracted, so that the clamping plate 106 effectively clamps the quartz boat, and the first cylinder 102 is retracted, so that the rotating motor 103 is driven to adjust according to the size of the quartz boat, then the third cylinder 202 is retracted, so that the third cylinder 202 drives the moving block 204 to move in the moving groove 203, which is beneficial to adjust the position, and cooperate with the hydraulic lifting column 205 to extend, which is beneficial to drive the grinding motor 206 to descend, the grinding motor 206 is driven to rotate the rotating shaft 207, so that the grinding and polishing head 214 grinds and polishes the surface of the quartz boat, and the rotating motor 103 is driven to rotate the turntable 104, which is beneficial to the rotation of the quartz boat and the comprehensive grinding and polishing of the surface of the quartz boat, when the grinding and polishing head 214 needs to be maintained, the pull rod 212 is pulled outward, so that the spring 213 is compressed under stress, then the mounting sleeve 209 is sleeved on the outside of the rotating shaft 207, the mounting strip 208 is slidably installed in the limiting groove 210, which facilitates the installation of the grinding and polishing head 214, then the pull rod 212 is loosened, and the spring 213 is elastically installed in the rotating shaft 207, which facilitates the maintenance and replacement of the grinding and polishing head 214 at any time, and the collecting groove 107 is installed in the grinding and polishing box 101, which is beneficial to collect the debris and the like falling during the processing, and the air suction machine 304 works to generate suction force, which is beneficial to effectively suction the debris and dust generated during the processing, when the air suction machine 304 stops working, the impurities and debris enter the collecting groove 107 through the conveying channel 302, and finally the collecting groove 107 is removed to clean the suctioned impurities and debris.

[0028] The above is only a preferred embodiment of the present application, and is not intended to limit the present application in other forms. Any skilled person in the art can modify or change the above disclosed technical content to equivalent embodiments applied to other fields, but any simple modification, equivalent change and modification of the above embodiments without departing from the technical solution of the present application, according to the technical essence of the present application, still belongs to the protection scope of the technical solution of the present application.

Claims

1. A quartz boat surface grinding and polishing device, comprising a grinding and polishing assembly (1), characterized in that: The grinding and polishing assembly (1) has an installation assembly (2) on its top and a dust collection assembly (3) on one end. The grinding and polishing assembly (1) includes a grinding and polishing box (101). The installation assembly (2) includes a grinding motor (206). A hydraulic lifting column (205) is installed on the top of the grinding motor (206). A moving block (204) is connected to the top of the hydraulic lifting column (205). A moving groove (203) is installed on the outside of the moving block (204). A support frame (201) is installed on the top of the moving groove (203). A third cylinder (202) is installed through the side of (201). The output end of the third cylinder (202) is connected to the moving block (204). A rotating shaft (207) is connected to the bottom of the grinding motor (206). An installation strip (208) is symmetrically installed on the outside of the rotating shaft (207). An installation sleeve (209) is installed on the outside of the rotating shaft (207). A limiting groove (210) is symmetrically opened inside the installation sleeve (209). The installation strip (208) is slidably installed inside the limiting groove (210). A grinding and polishing head (214) is installed at the bottom of the installation sleeve (209).

2. The quartz boat surface grinding and polishing equipment according to claim 1, characterized in that: The dust collection assembly (3) includes a dust collection hood (301), a conveying channel (302) is connected to the side of the dust collection hood (301), a filter element (303) is installed inside the conveying channel (302), and a suction fan (304) is installed on the side of the conveying channel (302).

3. The quartz boat surface grinding and polishing equipment according to claim 1, characterized in that: The grinding and polishing head (214) is equipped with a fixing frame (211) on top. A pull rod (212) is installed inside the fixing frame (211). A spring (213) is connected to the outside of the pull rod (212). One end of the spring (213) is installed on the side of the rotating shaft (207).

4. The quartz boat surface grinding and polishing equipment according to claim 2, characterized in that: A protective frame (305) is installed on the outside of the suction fan (304), and the filter element (303) is installed on the side of the suction fan (304).

5. The quartz boat surface grinding and polishing equipment according to claim 1, characterized in that: The grinding and polishing box (101) is equipped with a first cylinder (102) at both ends. The output end of the first cylinder (102) is connected to a rotary motor (103). A turntable (104) is installed at one end of the rotary motor (103).

6. The quartz boat surface grinding and polishing equipment according to claim 5, characterized in that: A second cylinder (105) is installed on the side of the turntable (104), and clamps (106) are connected to both ends of the second cylinder (105). A collection trough (107) is installed inside the grinding and polishing box (101).

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