Rotary coating glue uniformizing equipment with heating and temperature control functions

Abstract

The utility model relates to spin-coating glue-uniformizing equipment with heating and temperature control functions, which comprises a main machine and an electrical control system, the main machine comprises a shell, a glue-uniformizing cavity is arranged at the upper part of the shell, a vacuum adsorption carrying disc is rotatably arranged in the glue-uniformizing cavity through a main shaft, an electromagnetic induction heating coil is arranged on the shell below the carrying disc, and the electromagnetic induction heating coil is arranged on the shell below the carrying disc. The object carrying disc is heated; an infrared temperature measuring probe is mounted on the shell above the glue uniformizing cavity; and the electromagnetic induction heating coil and the infrared temperature measurement probe are electrically connected with the electrical control system and are controlled by the electrical control system to operate. The vacuum adsorption device is simple in structure and high in reliability, can perform vacuum adsorption on the substrate to ensure high-speed stable rotation of the substrate, and simultaneously heats the substrate and accurately controls the temperature.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of spin coating glue uniform equipment with heating temperature control function, belong to semiconductor integrated circuit processing equipment technical field. BACKGROUND

[0002] The glue uniform machine is a very important equipment in semiconductor chip manufacturing process, and the glue uniform machine has many common names, such as: glue coating machine, glue spinning machine, rotary glue coating machine, rotary film coating machine, rotary coating machine, etc., which can be applied to the film production in sol-gel test, and the working principle is to rotate the substrate at high speed, and use the centrifugal force to uniformly coat the glue on the substrate, so that the glue is uniformly formed into a film. The existing spin coating glue uniform equipment with heating temperature control function generally adopts two heating methods: heating sheet method or atmosphere heating method. The heating sheet of the former is generally located below the object carrier, which is tightly attached to the object carrier. Since the conductive slip ring structure for supplying power to the heating sheet needs to be set inside, it is not convenient to set a vacuum suction structure in the object carrier, so the structure of the spin coating glue uniform equipment with heating sheet method is complex and does not have a vacuum suction function. The glue uniform equipment with atmosphere heating has a vacuum suction function, but the heating performance and temperature control precision are poor.

[0003] Therefore, there is an urgent need for a spin coating glue uniform equipment with simple structure, high reliability, which can perform vacuum suction on the substrate to ensure its high-speed stable rotation, and at the same time, heat and accurately control the temperature. SUMMARY

[0004] The utility model aims at overcoming the above-mentioned shortcomings, and provides a kind of spin coating glue uniform equipment with simple structure, high reliability, which can perform vacuum suction on the substrate to ensure its high-speed stable rotation, and at the same time, heat and accurately control the temperature.

[0005] The utility model is achieved as follows:

[0006] A spin coating glue uniform equipment with heating temperature control function includes a host computer and an electrical control system, the host computer includes a housing, an uniform glue cavity is provided on the upper part of the housing, a vacuum suction object carrier is rotatably arranged in the uniform glue cavity by a main shaft, an electromagnetic induction heating coil is installed on the housing below the object carrier to heat the object carrier, an infrared temperature measurement probe is installed on the housing above the uniform glue cavity, the electromagnetic induction heating coil and the infrared temperature measurement probe are electrically connected with the electrical control system and controlled by the electrical control system.

[0007] Further, a rotary motor is installed in the housing, which is connected with the main shaft through a synchronous belt transmission.

[0008] Further, the main shaft is internally provided with a vacuum adsorption pipeline, a top end of the vacuum adsorption pipeline is communicated with a hollow adsorption cavity in the inside of the object supporting disc, and a bottom end of the vacuum adsorption pipeline is communicated with a negative pressure sealing cavity arranged at the bottom of the shell.

[0009] Further, the electromagnetic induction heating coil is in a ring structure, and the main shaft is rotatably embedded in a ring-shaped center hole of the electromagnetic induction heating coil.

[0010] Further, the infrared temperature measuring probe is mounted on the shell through a universal adjusting arm, and the temperature measuring position of the infrared temperature measuring probe is adjusted through the universal adjusting arm.

[0011] Further, the electric control system is provided with a man-machine interaction touch screen and a control module; the touch screen is used for setting the main machine running parameters, including the object supporting disc rotating speed, the heating temperature and the heating speed; the control module controls the electromagnetic induction heating coil to heat the object supporting disc, and adjusts the heating power in real time according to the temperature feedback of the infrared temperature measuring probe, so as to ensure the temperature control accuracy.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] The utility model discloses a main machine of spin coating glue equipment with heating temperature control function, which is characterized by the following: the main machine comprises a shell, a rotating motor, a main shaft, a vacuum adsorption pipeline, a synchronous belt, an electromagnetic induction heating coil, a glue uniform cavity and an object supporting disc. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is a main machine sectional structure schematic view of the utility model discloses a kind of spin coating glue equipment with heating temperature control function.

[0015] Fig. 2 It is a schematic diagram of the utility model discloses a kind of spin coating glue equipment with heating temperature control function.

[0016] Wherein:

[0017] Shell 1, rotating motor 2, main shaft 3, vacuum adsorption pipeline 4, synchronous belt 5, electromagnetic induction heating coil 6, glue uniform cavity 7, object supporting disc 8, main machine 10, electric control system 11, touch screen 12. DETAILED DESCRIPTION

[0018] Reference Figs. 1-2The utility model relates to a kind of spin coating glue uniformizing equipment with heating temperature control function, include host computer 10 and electrical control system 11, the host computer 10 include shell 1, glue uniformizing cavity 7 is equipped in shell 1 upper portion, vacuum adsorption carrier 8 is rotationally arranged in glue uniformizing cavity 7 by main shaft 3;Rotary motor 2 is installed in shell 1, and it is connected with main shaft 3 by synchronous belt 5 transmission;Vacuum adsorption pipeline 4 is equipped in main shaft 3, the top of this vacuum adsorption pipeline 4 is communicated with the hollow adsorption cavity in carrier 8, bottom is communicated with the negative pressure sealing cavity being arranged in shell 1 bottom, and the negative pressure sealing cavity is formed by external vacuum pump suction negative pressure;By vacuum adsorption, carrier 8 is adsorbed on the surface of substrate, and drive substrate high-speed stable rotation;

[0019] Electromagnetic induction heating coil 6 is installed on shell 1 below carrier 8, and carrier 8 is heated, and the electromagnetic induction heating coil 6 is annular structure, main shaft 3 is rotationally embedded in the annular center hole of electromagnetic induction heating coil 6, and the electromagnetic induction heating coil 6 is electrically connected with electrical control system 11;Using the non-contact electromagnetic induction heating principle, alternating electromagnetic field is generated by electrical control system 11 control electromagnetic induction heating coil 6, so that current is generated in the inside of aluminum alloy carrier 8 above it, and temperature rises, realizes heating function, and the structure of traditional contact type heating sheet heating is simpler, and control is more convenient;

[0020] Infrared temperature measurement probe 9 is installed on shell 1 above glue uniformizing cavity 7 by universal adjusting arm, and the temperature measurement position of infrared temperature measurement probe 9 is adjusted by universal adjusting arm, and the temperature of any position of carrier 8 can be measured and controlled;Infrared temperature measurement probe 9 is electrically connected with electrical control system 11, and the temperature data fed back by infrared temperature measurement probe 9 is received by electrical control system 11, and the heating power of electromagnetic induction heating coil 6 is adjusted according to target set temperature, to ensure that temperature meets requirements, satisfies the temperature control demand of uniformizing glue;

[0021] For further convenient operation and control, man-machine interaction touch screen 12 and control module are arranged on the electrical control system 11;The touch screen 12 is used to set host computer 10 operating parameter, including carrier 8 rotating speed, heating temperature and heating speed;The control module controls electromagnetic induction heating coil 6 to heat carrier 8, and real-time adjusts heating power according to the temperature feedback of infrared temperature measurement probe 9, to ensure that temperature control is accurate.

[0022] In addition: it needs to be noticed that the above specific embodiment is only an optimization scheme of the patent, and any change or improvement made by the person skilled in the art according to the above concept is within the protection scope of the patent.

Claims

1. A spin coating glue uniformization device with heating temperature control function, comprising a main machine (10) and an electrical control system (11), the main machine (10) comprises a shell (1), a glue uniformization cavity (7) is arranged on the upper part of the shell (1), a vacuum adsorption object disc (8) is rotatably arranged in the glue uniformization cavity (7) through a main shaft (3), characterized in that: An electromagnetic induction heating coil (6) is installed on the shell (1) below the object carrier disc (8) to heat the object carrier disc (8); an infrared temperature measuring probe (9) is installed on the shell (1) above the glue uniformizing cavity (7); the electromagnetic induction heating coil (6) and the infrared temperature measuring probe (9) are electrically connected with the electrical control system (11) and are controlled to operate by the electrical control system (11). ​ 2. The spin coater with heating temperature control function according to claim 1, wherein: A rotary motor (2) is installed in the shell (1) and is drivingly connected with the main shaft (3) through a synchronous belt (5).

3. The spin coater with heating temperature control function according to claim 1, wherein: A vacuum suction pipeline (4) is arranged in the main shaft (3) and is in communication at the top end with a hollow suction cavity in the object carrier disc (8) and at the bottom end with a negative pressure sealing cavity arranged at the bottom of the shell (1); the negative pressure sealing cavity is formed into negative pressure by an external vacuum pump.

4. The spin coater with heating temperature control function according to claim 1, wherein: The electromagnetic induction heating coil (6) is of a ring structure and the main shaft (3) is rotatably embedded in the ring center hole of the electromagnetic induction heating coil (6).

5. The spin coater with heating temperature control function according to claim 1, wherein: The infrared temperature measuring probe (9) is installed on the shell (1) through a universal adjusting arm to adjust the temperature measuring position of the infrared temperature measuring probe (9).

6. The spin coater with heating temperature control function according to claim 1, wherein: The electrical control system (11) is provided with a man-machine interactive touch screen (12) and a control module; the touch screen (12) is used to set the operation parameters of the main machine (10), including the rotating speed of the object carrier disc (8), the heating temperature and the heating speed; the control module controls the electromagnetic induction heating coil (6) to heat the object carrier disc (8) and adjusts the heating power in real time according to the temperature feedback of the infrared temperature measuring probe (9) to ensure the temperature control accuracy.

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