Microwave normal-pressure plasma jet array based on power divider

Abstract

The utility model discloses a microwave normal-pressure plasma jet array based on a power divider, which relates to the field of microwave normal-pressure plasma and comprises a cavity and an upper cavity arranged at the upper end of an outer cavity, a metal cover plate is arranged at the upper end of the upper cavity, an inner conductor is arranged in the outer cavity, and an outer conductor is arranged in the outer cavity. And the surface of the inner conductor is arranged between the outer cavity and the upper cavity. According to the microwave normal-pressure plasma jet array based on the power divider, microwave low-temperature plasmas can increase the excitation, ionization and dissociation processes of gas molecules, the number of excited sub-state atoms is large, the ionization and dissociation degrees of the plasma to gas are one order of magnitude higher than those of other types of plasmas (such as radio-frequency electric field plasmas), the plasma density is large, and the plasma density is high. The plasma beam is high in ionization degree, large in energy and high in activity, related physical and chemical reactions are easier to occur or initiate, the bacteria can be killed by hitting a culture dish containing the bacteria or a skin wound, and the sterilization effect is achieved.

Description

Technical Field

[0001] This utility model relates to the field of microwave atmospheric pressure plasma technology, specifically a microwave atmospheric pressure plasma jet array based on a power divider. Background Technology

[0002] Microwave atmospheric pressure plasma jet arrays are innovative devices that utilize microwave technology to generate plasma, with broad application potential. When operating, these jet arrays can generate plasma flows at atmospheric pressure and, through the combination of multiple jets, achieve the treatment, cleaning, or modification of various material surfaces.

[0003] Existing technologies are costly, cumbersome to use, and have poor impedance performance.

[0004] To overcome the above shortcomings, a prior art Chinese patent (publication number CN119155875A) discloses an atmospheric pressure microwave plasma jet device, including an outer conductor, an inner conductor coaxially arranged inside the outer conductor, a nozzle threadedly connected to the bottom end of the outer conductor, a pin at the end of an RF connector connected to the inner conductor via a connecting conductor, a gas pipe connector threadedly connected to the outer conductor, a short-circuit plug threadedly connected to the top end of the outer conductor, a short-circuit reflective surface at the bottom of a connector installed inside the outer conductor, and a gas guide ring nested on the inner conductor and located between the RF connector and the gas pipe connector. This device is simple, reliable, and low-cost. It eliminates the need for complex control modules to adjust the impedance matching of the system, thus achieving a stable atmospheric pressure microwave plasma jet. It also ensures more stable gas flow, preventing interference with the plasma at the outlet. Furthermore, the short-circuit reflective surface is designed for threaded adjustment, allowing for impedance matching through fine-tuning.

[0005] While existing technologies can overcome the shortcomings mentioned above, other problems still exist in their operation, such as: the area of ​​microwave atmospheric pressure plasma discharge is small, which is not conducive to user operation; at the same time, due to external factors, the discharge is prone to unevenness, and the energy utilization rate is not high. Utility Model Content

[0006] The purpose of this invention is to provide a microwave atmospheric pressure plasma jet array based on a power divider, in order to solve the problems mentioned in the background art, such as the small area of ​​microwave atmospheric pressure plasma discharge, which is not conducive to user operation, and the uneven discharge due to external factors during discharge, as well as the low energy utilization rate.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a microwave atmospheric pressure plasma jet array based on a power divider, comprising an outer cavity and an upper cavity disposed at the upper end of the outer cavity, wherein a metal cover plate is disposed at the upper end of the upper cavity, an inner conductor is disposed inside the outer cavity, and the surface of the inner conductor is disposed between the outer cavity and the upper cavity, and a gap is disposed between the outer cavity and the inner conductor, an RF connector is disposed on the outer side of the inner conductor, and the RF connector is configured as an "N" type, a coaxial body is disposed at the upper end of the RF connector through a mounting head, and a microwave atmospheric pressure plasma jet unit is disposed inside the coaxial body, wherein the microwave atmospheric pressure plasma jet unit is provided with a conductor post, and the conductor post is embedded inside the coaxial body.

[0008] Furthermore, a microwave source is provided at the lower end of the outer cavity, and the upper end of the microwave source is connected to the inner conductor. The outer side of the inner conductor is fixedly installed on the inner side of the outer cavity and the upper cavity through a supporting medium.

[0009] Furthermore, the inner conductor has the shape of a stepped impedance transformation structure with varying diameters, and an isolation dielectric plate is disposed inside the upper cavity, with the conductor probe of the isolation dielectric plate embedded inside the inner conductor.

[0010] Furthermore, the lower end of the coaxial body is connected to the mounting head through a coaxial connecting end, and air guide holes are provided on the left and right sides of the coaxial body, and working medium is provided inside the air guide holes, and the lower end of the working medium is connected to the gas cylinder.

[0011] Furthermore, the upper end of the coaxial body is provided with an open Teflon layer, and a top rotating cap is threaded onto the upper end of the coaxial body.

[0012] Furthermore, the upper end of the conductor post is provided with a discharge tip, and the upper end of the discharge tip is provided with a dielectric layer. The middle end of the conductor post penetrates the interior of the perforated Teflon layer, and the lower end of the conductor post is connected to the upper end of the mounting head.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. Microwave low-temperature plasma can further increase the excitation, ionization, and dissociation processes of gas molecules, resulting in more excited substate atoms. Its ionization and dissociation of gases are an order of magnitude higher than other types of plasma (such as radio frequency electric field plasma). The plasma has high density, high degree of ionization, high energy, and strong activity, making it easier to initiate or trigger related physical and chemical reactions. Therefore, it is more efficient in medical applications that rely on plasma active components. By applying the plasma beam to a petri dish containing bacteria or a skin wound, the bacteria can be killed, achieving a sterilization effect.

[0015] 2. The structure is compact, small, portable, easy to assemble and mass-produce. The design of the power divider and its isolation structure ensures that the properties of each plasma jet are consistent. The discharge tip of the conductor in the jet unit is detachable, and the appropriate discharge tip can be replaced according to the frequency of the microwave source.

[0016] Furthermore, an open-pore Teflon layer is provided near the upper part between the conductor post and the coaxial body to help constrain the airflow and stabilize the airflow to a certain extent, making the airflow at the tip more stable, so that the plasma beam can be output stably. The plasma jet is then applied to the plate to be treated, or at a certain distance from the plate. The plasma cleans the surface of the plate through physical and chemical actions, achieving a better adhesion effect and facilitating bonding. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0018] Figure 2 This is a three-dimensional structural diagram of the present invention viewed from below;

[0019] Figure 3 This is a schematic diagram of the layered three-dimensional structure of this utility model;

[0020] Figure 4 This is a frontal sectional view of the three-dimensional structure of this utility model;

[0021] Figure 5 This is a cross-sectional three-dimensional structural diagram of the coaxial main body of this utility model;

[0022] Figure 6 This is a schematic diagram of the three-dimensional structure of the conductor column of this utility model.

[0023] In the diagram: 1. Outer cavity; 2. Upper cavity; 3. Metal cover plate; 4. Microwave source; 5. Inner conductor; 6. Supporting dielectric; 7. RF connector; 8. Isolation dielectric plate; 9. Mounting head; 10. Coaxial body; 11. Vent hole; 12. Working fluid; 13. Top rotating cover; 14. Perforated Teflon layer; 15. Conductor post; 16. Discharge tip; 17. Dielectric layer. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: As Figures 1-4The technical solution shown is a microwave atmospheric pressure plasma jet array based on a power divider. To solve the problem of small excitation area, it discloses: an outer cavity 1 and an upper cavity 2 disposed at the upper end of the outer cavity 1, and a metal cover plate 3 disposed at the upper end of the upper cavity 2; an inner conductor 5 disposed inside the outer cavity 1, and the surface of the inner conductor 5 disposed between the outer cavity 1 and the upper cavity 2, and a gap disposed between the outer cavity 1 and the inner conductor 5; an RF connector 7 disposed on the outer side of the inner conductor 5, and the RF connector 7 is "N" type; a microwave source 4 disposed at the lower end of the outer cavity 1, and the upper end of the microwave source 4 is connected to the inner conductor 5; and the outer side of the inner conductor 5 is fixedly installed inside the outer cavity 1 and the upper cavity 2 by a support medium 6; the inner conductor 5 is a stepped impedance transformation structure with different diameters; an isolation medium plate 8 is disposed inside the upper cavity 2, and the conductor probe of the isolation medium plate 8 is embedded inside the inner conductor 5.

[0026] Connect the microwave source 4 at the lower end of the device to the power divider, then inject the working fluid 12 through the two gas inlets 11. Turn on the microwave source 4, and the microwave energy is evenly distributed to each plasma jet array unit through the power divider and focused at the annular slit at the upper end of the device, making the electric field intensity at this point very high. Adjust the output power of the microwave source 4, and when it reaches a certain value, the electric field intensity at the tip annular slit breaks down the nearby gas, generating plasma. Because the device uses a gradient structure to excite the plasma, the required excitation microwave power is low, so the plasma temperature within the electromagnetic wave is low, and the plasma jets of multiple jet units can handle a large area.

[0027] Example 2: Figures 1-6 The technical solution shown, based on Embodiment 1, discloses the following to address the problem of poor airflow stability: A coaxial body 10 is mounted on the upper end of the RF connector 7 via a mounting head 9. A microwave atmospheric pressure plasma jet unit is disposed inside the coaxial body 10, and the microwave atmospheric pressure plasma jet unit is provided with conductor posts 15, which are embedded inside the coaxial body 10. The lower end of the coaxial body 10 is connected to the mounting head 9 via a coaxial connection end, and the left and right sides of the coaxial body 10 are open... A gas guide hole 11 is provided, and a working medium 12 is provided inside the gas guide hole 11. The lower end of the working medium 12 is connected to the gas cylinder. An open Teflon layer 14 is provided inside the upper end of the coaxial body 10. A top rotating cover 13 is threadedly installed on the upper end of the coaxial body 10. A discharge tip 16 is provided at the upper end of the conductor post 15. A dielectric layer 17 is provided at the upper end of the discharge tip 16. The middle end of the conductor post 15 penetrates the interior of the open Teflon layer 14. The lower end of the conductor post 15 is connected to the upper end of the mounting head 9.

[0028] The design of the power divider and the isolation structure in the outer cavity 1 and the upper cavity 2 ensures that the properties of each plasma jet are consistent. The discharge tip 16 of the jet unit conductor post 15 is detachable, and the appropriate discharge tip 16 can be replaced according to the frequency of the microwave source 4. An open Teflon layer 14 is provided near the upper part between the conductor post 15 and the coaxial body 10 to help constrain the airflow and stabilize the airflow to a certain extent, making the airflow at the tip more stable, thereby enabling the plasma beam to be output stably.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A microwave atmospheric pressure plasma jet array based on power divider, comprising an outer cavity (1) and an upper cavity (2) arranged at the upper end of the outer cavity (1), and a metal cover plate (3) arranged at the upper end of the upper cavity (2). characterized in that An inner conductor (5) is arranged inside the outer cavity (1), and the surface of the inner conductor (5) is arranged between the outer cavity (1) and the upper cavity (2), and a gap is arranged between the outer cavity (1) and the inner conductor (5), and an RF connector (7) is arranged on the outer side of the inner conductor (5), and the RF connector (7) is arranged in an "N" shape. The upper end of the RF connector (7) is provided with a coaxial body (10) through a mounting head (9), and the inside of the coaxial body (10) is provided with a microwave atmospheric pressure plasma jet unit, and the microwave atmospheric pressure plasma jet unit is provided with a conductor column (15), and the conductor column (15) is embedded in the inside of the coaxial body (10).

2. The microwave atmospheric pressure plasma jet array based on power dividers according to claim 1, characterized in that: The lower end of the outer cavity (1) is provided with a microwave source (4), and the upper end of the microwave source (4) is connected with the inner conductor (5), and the outer side of the inner conductor (5) is fixedly installed in the inner side of the outer cavity (1) and the upper cavity (2) through a supporting medium (6).

3. A microwave atmospheric pressure plasma jet array based on power dividers according to claim 2, characterized in that: The shape of the inner conductor (5) is a stepped impedance transformation structure with different diameters, and the inside of the upper cavity (2) is provided with an isolation medium plate (8), and the conductor probe of the isolation medium plate (8) is embedded in the inside of the inner conductor (5).

4. The microwave atmospheric pressure plasma jet array based on power dividers according to claim 1, characterized in that: The lower end of the coaxial body (10) is connected with the mounting head (9) through a coaxial connection end, and gas guide holes (11) are opened on the left and right sides of the coaxial body (10), and the inside of the gas guide holes (11) is provided with a working medium (12), and the lower end of the working medium (12) is connected with a gas cylinder.

5. A microwave atmospheric pressure plasma jet array based on power dividers according to claim 4, characterized in that: The inside of the upper end of the coaxial body (10) is provided with an open hole Teflon layer (14), and the upper end of the coaxial body (10) is screw-mounted with a top rotating cover (13).

6. A microwave atmospheric pressure plasma jet array based on power dividers according to claim 5, characterized in that: The upper end of the conductor column (15) is provided with a discharge tip (16), and the upper end of the discharge tip (16) is provided with a dielectric layer (17), and the middle end of the conductor column (15) penetrates the inside of the open hole Teflon layer (14), and the lower end of the conductor column (15) is connected with the upper end of the mounting head (9).

Images