Hot wire tensioning device and chemical vapor deposition equipment

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a hot wire tensioning device and chemical vapor deposition equipment, and solves the problem that a hot wire deforms and falls in a high-temperature state. The hot wire tensioning device comprises a supporting assembly, at least one butt joint assembly and at least two tensioning assemblies. The butt joint assembly is connected with the supporting assembly in an insulating mode, and the butt joint assembly is electrically connected with the first ends of the two hot wires. The at least two tensioning assemblies are located on the two sides of the butt joint assembly respectively and are in insulated connection with the supporting assembly. The tensioning assembly is electrically connected with the second end of the hot wire and generates pulling force on the hot wire in the extending direction of the hot wire through the elastic restoring force of the tensioning assembly, so that the hot wire is in a tensioned state. The two heating wires are electrically connected with the positive electrode and the negative electrode of a power source respectively. Due to the fact that the long hot wire is divided into the two short hot wires, the two short hot wires are tensioned respectively, and the problem that the hot wire is still deformed and falls due to the fact that the tension of the tensioning assembly is insufficient due to the fact that the hot wire is too long is solved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a hot wire tensioning device and a chemical vapor deposition apparatus. BACKGROUND

[0002] The working principle of a hot wire chemical vapor deposition (HWCVD) apparatus is to use the high temperature and catalytic effect of a hot wire to make the products obtained after the cracking of a process gas to be deposited on the surface of a workpiece, so as to form a solid thin film on the surface of the workpiece. Since the hot wire will soften in a high temperature state, the hot wire will be deformed and fall down.

[0003] In order to avoid the deformation and falling down of the hot wire as much as possible, a tensioning assembly is usually used to tension the hot wire in the related art. However, in the case that the hot wire is long, the tensioning force of the tensioning assembly on the hot wire is not enough, so that the hot wire will still be deformed and fall down in a high temperature state. CONTENT OF THE INVENTION

[0004] Therefore, the embodiments of the present disclosure provide a hot wire tensioning device and a chemical vapor deposition apparatus, which solve the problem of deformation and falling down of the hot wire in a high temperature state.

[0005] In a first aspect, the embodiments of the present disclosure provide a hot wire tensioning device configured to tension at least two hot wires, the hot wire tensioning device comprising: a support assembly; at least one butt joint assembly insulatedly connected with the support assembly, the butt joint assembly being electrically connected with the first ends of the two hot wires respectively; and at least two tensioning assemblies respectively located on the two sides of the butt joint assembly, and insulatedly connected with the support assembly and respectively arranged corresponding to the two hot wires, the tensioning assembly being electrically connected with the second ends of the corresponding hot wires, configured to provide an elastic restoring force and use the elastic restoring force to generate a tension force along the extension direction of the hot wire on the hot wire, so that the hot wire can be in a tensioned state; and wherein the two hot wires are electrically connected with the positive and negative poles of a power supply respectively.

[0006] In some embodiments, the docking assembly comprises: a first base connected with the support assembly, wherein the material of the first base is an insulating material; a first pressing block located above the first base and connected with the first base, and having a first groove with an opening facing upward; a second pressing block located above the first pressing block and detachably connected with the first pressing block, and having a second groove with an opening facing downward, the second groove and the first groove forming a clamping groove, the first end of the hot wire being capable of extending into the clamping groove so that the first pressing block and the second pressing block clamp the first end of the two hot wires; wherein the material of the first pressing block is a conductive material, and / or the material of the second pressing block is a conductive material.

[0007] In some embodiments, the hot wire extends along a first direction, the first groove extends to opposite edges of the first pressing block along the first direction, the second groove extends to opposite edges of the second pressing block along the first direction, the first end of one of the hot wires extends into a first end of the clamping groove, and the first end of the other hot wire extends into a second end of the clamping groove.

[0008] In some embodiments, the cross section of the hot wire is circular, the cross section of the first groove is semicircular, the cross section of the second groove is semicircular, so that the cross section of the clamping groove is circular, and the diameter of the clamping groove is smaller than the diameter of the hot wire.

[0009] In some embodiments, the first pressing block has a first opening extending through the first pressing block along a vertical direction, the second pressing block has a second opening extending through the second pressing block along the vertical direction, the first opening communicates with the first groove, the second opening communicates with the second groove, and the first opening and the second opening are aligned in the vertical direction; wherein the first end of the two hot wires respectively extends into the clamping groove on both sides of the first opening and the second opening, and does not contact each other.

[0010] In some embodiments, the tensioning assembly comprises: a second base connected with the support assembly, wherein the material of the second base is an insulating material; a hot wire clamping piece located above the second base and slidably connected with the second base, the first end of the hot wire clamping piece clamping the second end of the hot wire; an elastic piece located above the second base, the first end of the elastic piece being connected with the second end of the hot wire clamping piece, and the second end of the elastic piece being connected with the second base; wherein when the elastic piece is in a stretched state, the elastic piece generates a pulling force on the hot wire along the extension direction of the hot wire, so that the hot wire is in a tensioned state.

[0011] In some embodiments, the tensioning assembly further comprises: a shaft located above the second base and connected with the hot wire holder; at least two bearings respectively located on both sides of the hot wire holder, inner rings of the bearings being sleeved on end portions of the shaft, wherein the bearings are made of insulating material; two guide seats respectively located on both sides of the hot wire holder and connected with the second base, the guide seats having guide grooves extending in a first direction, the at least two bearings being respectively located in the guide grooves of the two guide seats, and outer rings of the bearings being in rolling connection with the guide grooves, wherein the first direction is parallel to an extending direction of the hot wire.

[0012] In some embodiments, the number of the docking assemblies and the number of the tensioning assemblies are both plural, and the number of the hot wires is plural, wherein the plurality of docking assemblies are arranged in a second direction, and each of the docking assemblies is provided with one of the tensioning assemblies on each side in the first direction, and one of the docking assemblies cooperates with two of the tensioning assemblies to tension two of the hot wires respectively, wherein the second direction is perpendicular to the first direction.

[0013] In some embodiments, the hot wire tensioning device further comprises: at least one connecting assembly extending in the second direction and connecting the plurality of docking assemblies and the support assembly, and / or connecting the plurality of tensioning assemblies and the support assembly; an adjusting rod vertically arranged, a first end of the adjusting rod being connected with the support assembly, a second end of the adjusting rod penetrating through the connecting assembly and being screwed with the connecting assembly; and at least two locking members respectively located above and below the connecting assembly and screwed with the adjusting rod and configured to lock the connecting assembly and the adjusting rod.

[0014] In a second aspect, embodiments of the present disclosure provide a chemical vapor deposition device, comprising: a cavity having a chamber configured to accommodate a workpiece; a hot wire arranged in the chamber and configured to catalyze a process gas introduced into the chamber to coat the workpiece; and the hot wire tensioning device of the first aspect configured to tension the hot wire.

[0015] In the embodiments of the present disclosure, a longer hot wire is divided into two shorter hot wires, a docking assembly is used to electrically connect with a first end of each of the two hot wires, and two tensioning assemblies are used to electrically connect with second ends of the two hot wires. The tensioning assemblies can provide elastic restoring force and generate a pulling force along the extending direction of the hot wire by using the elastic restoring force, so that the hot wire can be in a tensioned state, thereby avoiding the problem that the pulling force of the tensioning assembly on the hot wire is not enough due to the hot wire being too long, and the hot wire still deforms and falls under high temperature. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Fig. 1 shows a schematic diagram of an application scenario of a hot wire tensioning device according to an embodiment of the present disclosure.

[0017] Figure 2 Fig. 2 shows a schematic diagram of a structure of a docking assembly and a hot wire according to an embodiment of the present disclosure.

[0018] Figure 3 Fig. 3 shows a sectional view of a docking assembly and a hot wire according to an embodiment of the present disclosure.

[0019] Figure 4 Fig. 4 shows a side view of a docking assembly according to an embodiment of the present disclosure.

[0020] Figure 5 Fig. 5 shows a schematic diagram of a structure of a tensioning assembly and a hot wire according to an embodiment of the present disclosure.

[0021] Figure 6 Fig. 6 shows a schematic diagram of an arrangement of a docking assembly, a tensioning assembly and a hot wire according to an embodiment of the present disclosure.

[0022] Figure 7 Fig. 7 shows a schematic diagram of a structure of a hot wire tensioning device, a hot wire and a gas distribution box according to an embodiment of the present disclosure.

[0023] Figure 8 Fig. 8 shows a schematic diagram of a hot wire tensioning device, a hot wire and a gas distribution box according to an embodiment of the present disclosure. Figure 7 Fig. 9 shows a partial enlarged view of a hot wire tensioning device, a hot wire and a gas distribution box in a region A according to an embodiment of the present disclosure.

[0024] Figure 9 Fig. 10 shows a schematic diagram of a chemical vapor deposition apparatus according to an embodiment of the present disclosure.

[0025] Figure 10 Fig. 11 shows a sectional view of a support assembly, a gas inlet pipeline and a gas distribution box according to an embodiment of the present disclosure.

[0026] Reference signs:

[0027] 12345, chemical vapor deposition equipment; 10, hot wire tensioning device; 100, support assembly; 200, docking assembly; 210, first base; 220, first pressing block; 2201, first groove; 2202, first opening; 230, second pressing block; 2301, second groove; 2302, second opening; 201, clamping groove; 2011, first end of clamping groove; 2012, second end of clamping groove; 300, tensioning assembly; 310, second base; 320, hot wire clamping piece; 3201, first end of hot wire clamping piece; 3202, second end of hot wire clamping piece; 330, elastic piece; 3301, first end of elastic piece; 3302, second end of elastic piece; 340, mandrel; 350, bearing; 360, guide seat; 3601, guide groove; 370, support column; 400, connecting assembly; 500, adjusting rod; 501, first end of adjusting rod; 502, second end of adjusting rod; 600, locking piece; 20, hot wire; 2001, first end of hot wire; 2002, second end of hot wire; X1, first direction; X2, second direction; 30, cavity; 3001, chamber; 40, air inlet pipeline; 50, air uniformization box; 5001, air outlet hole; 2, power supply; 21, positive electrode; 22, negative electrode. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present disclosure.

[0029] Figure 1 The application scenario of the hot wire tensioning device provided by an embodiment of the present disclosure is shown. As shown in the figure, the hot wire tensioning device is applied to a chemical vapor deposition equipment. Figure 1As shown, the hot wire tensioning device 10 is configured to tension at least two hot wires 20. The hot wire tensioning device 10 comprises a support assembly 100, at least one butt joint assembly 200, and at least two tensioning assemblies 300. The butt joint assembly 200 is insulatedly connected with the support assembly 100, and the butt joint assembly 200 is electrically connected with the first ends 2001 of the two hot wires respectively. The at least two tensioning assemblies 300 are respectively located on the two sides of the butt joint assembly 200, and are insulatedly connected with the support assembly 100, and are respectively arranged corresponding to the two hot wires 20. The tensioning assembly 300 is electrically connected with the second ends 2002 of the corresponding hot wire. The tensioning assembly 300 is configured to provide an elastic restoring force, and to generate a pulling force along the extension direction of the hot wire 20 on the hot wire 20 by using the elastic restoring force, so that the hot wire 20 can be in a tensioned state. The two hot wires 20 are electrically connected with the positive electrode 21 and the negative electrode 22 of the power supply 2 respectively, so that the two hot wires 20, the butt joint assembly 200 and the power supply 2 form a closed loop, and under the condition that the power supply 2 is turned on, the hot wire 20 can be electrified and generate heat.

[0030] In the embodiment of the present disclosure, the longer hot wire is divided into two shorter hot wires 20, the first ends 2001 of the two hot wires are electrically connected with the butt joint assembly 200 respectively, and the second ends 2002 of the two hot wires are electrically connected with the two tensioning assemblies 300 respectively. The tensioning assembly 300 can provide an elastic restoring force, and generate a pulling force along the extension direction of the hot wire 20 on the hot wire 20 by using the elastic restoring force, so that the hot wire 20 can be in a tensioned state, thereby avoiding the problem that the pulling force of the tensioning assembly 300 on the hot wire 20 is not enough due to the too long hot wire 20, and the hot wire 20 still deforms and falls under the high temperature state.

[0031] Exemplarily, as shown in FIG. 1, Figure 1 As shown, the hot wire tensioning device 10 comprises a support assembly 100, one butt joint assembly 200 and two tensioning assemblies 300. In the first direction X1, the two tensioning assemblies 300 are respectively located on the two sides of the butt joint assembly 200, and the two hot wires 20 extend along the first direction X1. One tensioning assembly 300 cooperates with the butt joint assembly 200 to tension one hot wire 20.

[0032] Exemplarily, the second end 2002 of the hot wire is electrically connected with the positive electrode 21 or the negative electrode 22 of the power supply 2 through a wire. Exemplarily, the hot wire tensioning device 10 further comprises a plurality of electrode rods, wherein two electrode rods are arranged on the support assembly 100 and are electrically connected with the positive electrode 21 and the negative electrode 22 of the power supply 2 respectively, and the other two electrode rods are arranged on the two tensioning assemblies 300 respectively and are electrically connected with the two tensioning assemblies 300 respectively, and are electrically connected with the two electrode rods arranged on the support assembly 100 respectively.

[0033] Exemplarily, the first end 2001 of the hot wire is detachably connected with the docking assembly 200, and the second end 2002 of the hot wire is detachably connected with the tensioning assembly 300, so as to facilitate replacement and maintenance of the hot wire 20.

[0034] In some embodiments, as shown in Figures 1 to 4 The docking assembly 200 includes a first base 210, a first pressing block 220, and a second pressing block 230. The first base 210 is connected with the support assembly 100, and the material of the first base 210 is an insulating material. The first pressing block 220 is located above the first base 210 and is connected with the first base 210 and has a first recess 2201 with an opening facing upward. The second pressing block 230 is located above the first pressing block 220 and is detachably connected with the first pressing block 220 and has a second recess 2301 with an opening facing downward. The second recess 2301 and the first recess 2201 form a clamping groove 201, and the first end 2001 of the hot wire can extend into the clamping groove 201, so that the first pressing block 220 and the second pressing block 230 clamp the first end 2001 of the two hot wires. The material of the first pressing block 220 is an electrically conductive material, or the material of the second pressing block 230 is an electrically conductive material, or the materials of the first pressing block 220 and the second pressing block 230 are both electrically conductive materials. Among them, Figure 3 The dashed line in the first direction X1 in represents the boundary line of the first recess 2201 and the second recess 2301. Figure 4 The dashed line in represents the boundary line of the first recess 2201 and the second recess 2301.

[0035] The above docking assembly 200 has a simple structure, and the docking assembly 200 realizes electrical connection with the first end 2001 of the hot wire by clamping, which is convenient and realizes the conduction state between the two hot wires 20.

[0036] Exemplarily, the first base 210 is detachably connected with the support assembly 100, so as to facilitate disassembly and maintenance of the docking assembly 200. Exemplarily, the first pressing block 220 is detachably connected with the first base 210, so as to facilitate disassembly and maintenance of the first pressing block 220 and the first base 210.

[0037] In some embodiments, as shown in Figure 3 and Figure 4 The hot wire 20 extends in the first direction X1, the first recess 2201 extends to the opposite two edges of the first pressing block 220 in the first direction X1, the second recess 2301 extends to the opposite two edges of the second pressing block 230 in the first direction X1, the first end 2001 of one hot wire extends into the first end 2011 of the clamping groove, and the first end 2001 of the other hot wire extends into the second end 2012 of the clamping groove.

[0038] Through the above arrangement, the first pressing block 220 and the second pressing block 230 can clamp the first end 2001 of the hot wire without bending the first end 2001 of the hot wire, and the first end 2001 of the hot wire can be clamped by the docking assembly 200 more conveniently.

[0039] In some embodiments, as shown in Figures 2 to 4 the cross section of the hot wire 20 is circular, the cross section of the first recess 2201 is semicircular, the cross section of the second recess 2301 is semicircular, the cross section of the clamping groove 201 is circular, the diameter of the clamping groove 201 is smaller than the diameter of the hot wire 20, the inner wall of the first recess 2201 and the inner wall of the second recess 2301 can completely fit the side wall of the first end 2001 of the hot wire, and the clamping groove 201 can stably clamp the first end 2001 of the hot wire, so that the first pressing block 220 and the second pressing block 230 can stably clamp the first end 2001 of the hot wire, and the hot wire 20 can be prevented from falling off the docking assembly 200.

[0040] In some embodiments, as shown in Figures 2 to 4 the first pressing block 220 has a first opening 2202 penetrating the first pressing block 220 in the vertical direction, and the second pressing block 230 has a second opening 2302 penetrating the second pressing block 230 in the vertical direction. The first opening 2202 communicates with the first recess 2201, the second opening 2302 communicates with the second recess 2301, and the first opening 2202 and the second opening 2302 are aligned in the vertical direction. The first ends 2001 of the two hot wires respectively extend into the clamping grooves 201 on both sides of the first opening 2202 and the second opening 2302, and do not contact each other.

[0041] The operator can observe and confirm whether the first ends 2001 of the two hot wires are not in contact through the first opening 2202 or the second opening 2302. When the first ends 2001 of the two hot wires are not in contact, the problem of sparking due to the contact of the first ends 2001 of the two hot wires can be avoided.

[0042] In some embodiments, as shown in Figure 1 and Figure 5As shown, the tensioning assembly 300 comprises a second base 310, a hot wire clamping piece 320 and an elastic piece 330. The second base 310 is connected with the support assembly 100, and the material of the second base 310 is an insulating material. The hot wire clamping piece 320 is located above the second base 310 and is slidably connected with the second base 310, and a first end 3201 of the hot wire clamping piece clamps the second end 2002 of the hot wire. The elastic piece 330 is located above the second base 310, a first end 3301 of the elastic piece is connected with a second end 3202 of the hot wire clamping piece, and a second end 3302 of the elastic piece is connected with the second base 310. In the case that the elastic piece 330 is in a stretched state, the elastic piece 330 generates a pulling force on the hot wire 20 along the extension direction of the hot wire 20, so that the hot wire 20 is in a tensioned state.

[0043] The tensioning assembly 300 has a simple structure, can stably fix the second end 2002 of the hot wire, and tension the hot wire 20.

[0044] Exemplarily, the elastic piece 330 can be a tension spring, a spring sheet, an elastic band, etc.

[0045] Exemplarily, the tensioning assembly 300 further comprises a support column 370, the support column 370 is located above the second base 310 and is vertically arranged, and a first end of the support column 370 is connected with the second base 310, and a second end of the support column 370 is connected with the second end 3302 of the elastic piece. Exemplarily, the material of the support column 370 is an insulating material.

[0046] Exemplarily, the first end 3301 of the elastic piece is detachably connected with the second end 3202 of the hot wire clamping piece, and the second end 3302 of the elastic piece is detachably connected with the second end of the support column 370, so as to facilitate replacement and maintenance of the hot wire clamping piece 320 and the elastic piece 330.

[0047] In some embodiments, as Figure 5 As shown, the tensioning assembly 300 further comprises a mandrel 340, at least two bearings 350 and two guide seats 360. The mandrel 340 is located above the second base 310 and is connected with the hot wire clamping piece 320. The at least two bearings 350 are respectively located on both sides of the hot wire clamping piece 320, the inner ring of the bearing 350 is sleeved on the end of the mandrel 340, and the material of the bearing 350 is an insulating material. The two guide seats 360 are respectively located on both sides of the hot wire clamping piece 320 and are both connected with the second base 310, and the guide seat 360 has a guide groove 3601 extending along the first direction X1. The at least two bearings 350 are respectively located in the guide grooves 3601 of the two guide seats 360, and the outer ring of the bearing 350 is in rolling connection with the guide groove 3601. The first direction X1 is parallel to the extension direction of the hot wire 20.

[0048] The rolling connection of the hot wire clamping piece 320 and the second base 310 is achieved by arranging the mandrel 340 and the bearing 350, and the rolling connection is used to replace the sliding connection, so as to reduce the friction between the hot wire clamping piece 320 and the second base 310, and facilitate the movement of the hot wire clamping piece 320 along the extension direction of the hot wire 20 under the pulling force of the elastic piece 330, so as to tension the hot wire 20.

[0049] As shown in the example, Figure 5 The tensioning assembly 300 includes two bearings 350, which are respectively connected with the two ends of the mandrel 340 and are respectively located in the guide groove 3601 of the two guide seats 360.

[0050] In some embodiments, as shown in the example, Figure 6 The number of the docking assemblies 200 and the tensioning assemblies 300 is multiple, and the number of the hot wires 20 is multiple. The multiple docking assemblies 200 are arranged in the second direction X2. In the first direction X1, one tensioning assembly 300 is arranged on each side of each docking assembly 200, and one docking assembly 200 cooperates with two tensioning assemblies 300 to tension two hot wires 20 respectively. The second direction X2 is perpendicular to the first direction X1.

[0051] By arranging multiple hot wires in the second direction X2 and using one docking assembly 200 to cooperate with two tensioning assemblies 300 to tension two hot wires 20 arranged in the first direction X1 respectively, the hot wire tensioning device 10 simultaneously tensions multiple hot wires 20. In addition, the heat generated by the multiple hot wires 20 has a larger radiation area in the first direction X1 and the second direction X2, and the heat distribution is more uniform.

[0052] In some embodiments, as shown in the example, Figure 7 and Figure 8 The hot wire tensioning device 10 further includes at least one connecting assembly 400, an adjusting rod 500, and at least two locking pieces 600. The connecting assembly 400 extends in the second direction X2, and the connecting assembly 400 connects the multiple docking assemblies 200 and the support assembly 100, or the connecting assembly 400 connects the multiple tensioning assemblies 300 and the support assembly 100, or the connecting assembly 400 connects the multiple docking assemblies 200 and the support assembly 100, and connects the multiple tensioning assemblies 300 and the support assembly 100. The adjusting rod 500 is vertically arranged, the first end 501 of the adjusting rod is connected with the support assembly 100, the second end 502 of the adjusting rod penetrates through the connecting assembly 400 and is screwed with the connecting assembly 400. The at least two locking pieces 600 are respectively located above and below the connecting assembly 400 and are screwed with the adjusting rod 500, and are configured to lock the connecting assembly 400 and the adjusting rod 500.

[0053] The connecting assembly 400 is used to connect the plurality of docking assemblies 200 and the support assembly 100, and connect the plurality of tensioning assemblies 300 and the support assembly 100, and the connection is simple and convenient.

[0054] In addition, the relative position of the connecting assembly 400 and the adjusting rod 500 is adjusted in the vertical direction to adjust the distance between the plurality of docking assemblies 200 and the plurality of tensioning assemblies 300 connected with the connecting assembly 400 and the support assembly 100 in the vertical direction, and the connecting assembly 400 and the adjusting rod 500 are locked by the two locking members 600 located above and below the connecting assembly 400 to fix the position of the connecting assembly 400 in the vertical direction.

[0055] For example, the hot wire tensioning device 10 includes three connecting assemblies 400, one connecting assembly 400 connects the plurality of docking assemblies 200, one connecting assembly 400 connects the plurality of tensioning assemblies 300 located on one side of the docking assembly 200, and one connecting assembly 400 connects the plurality of tensioning assemblies 300 located on the other side of the docking assembly 200. Each end of each connecting assembly 400 is provided with one adjusting rod 500 and two locking members 600, so that each connecting assembly 400 can be stably connected with the support assembly 100.

[0056] Figure 9 The structure of the chemical vapor deposition equipment provided by an embodiment of the present disclosure is shown in a schematic diagram. As shown in the figure, Figure 9 As shown, the chemical vapor deposition equipment 12345 includes the hot wire tensioning device 10, the hot wire 20, and the cavity 30 mentioned in the above embodiments. The cavity 30 has a chamber 3001 configured to accommodate a workpiece. The hot wire 20 is arranged in the chamber 3001 and is configured to catalyze the process gas entering the chamber 3001 to coat the workpiece. The hot wire tensioning device 10 is configured to tension the hot wire 20.

[0057] For example, the support assembly 100 of the hot wire tensioning device 10 is connected with the cavity 30.

[0058] For example, as shown in the figure, Figures 7 to 10 As shown, the chemical vapor deposition equipment 12345 further includes a plurality of gas inlet pipelines 40 and a plurality of uniform gas boxes 50. The uniform gas box 50 is located between the support assembly 100 and the hot wire 20 and is connected with the support assembly 100. The side of the uniform gas box 50 close to the hot wire 20 has a plurality of gas outlet holes 5001. Each uniform gas box 50 communicates with at least one gas inlet pipeline 40, the first end of the gas inlet pipeline 40 communicates with a gas supply device, and the second end of the gas inlet pipeline 40 extends into the inside of the uniform gas box 50. The process gas provided by the gas supply device is transported to the inside of the uniform gas box 50 by the gas inlet pipeline 40 and enters the chamber 3001 through the plurality of gas outlet holes 5001, thereby improving the uniformity of gas inlet.

[0059] In addition, the plurality of hot wires 20 arranged along the first direction X1 and the second direction X2 are simultaneously tensioned by the hot wire tensioning device 10, the heat generated by the plurality of hot wires 20 has a larger radiation area in the first direction X1 and the second direction X2, and the heat distribution is more uniform, which can better meet the process requirements of the workpiece with larger power, and the chemical vapor deposition equipment 12345 has better film coating uniformity for the workpiece.

[0060] Since the chemical vapor deposition equipment 12345 comprises the hot wire tensioning device 10, the chemical vapor deposition equipment 12345 comprises all the technical features and technical effects of the hot wire tensioning device 10, which will not be described here.

[0061] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolts and nuts, screws, buckles, magnetic attraction and the like. In some connections, if there is no special requirement for the form of detachable cooperation, it can be connected in a non-detachable manner through welding, bonding and the like.

[0062] In the specification, “one embodiment”, “an embodiment” and the like mean that the described embodiment can include a specific feature, structure or characteristic, but not necessarily every embodiment includes the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in combination with an embodiment, it is within the knowledge of those skilled in the art to realize such feature, structure or characteristic in combination with other embodiments described explicitly or implicitly.

[0063] It should be understood that “on”, “above” and “over” in the present disclosure should be interpreted in the broadest way, so that “on” not only means “directly on”, but also includes the meaning of “on” with intermediate features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over”, but also includes the meaning of “above” or “over” without intermediate features or layers therebetween (i.e. directly on).

[0064] In addition, spatial relative terms such as “below”, “under”, “below”, “above”, “over” and the like can be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the drawings. The spatial relative terms are intended to include different orientations of the components in use or operation in addition to the orientations shown in the drawings. The device can have other orientations (rotated 90 degrees or in other orientations), and the spatial relative terms used herein can also be interpreted accordingly.

[0065] It should be noted that, in the present document, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a", "comprising", or "comprises" does not, without further qualification, preclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0066] The preferred embodiments of the present disclosure have been described above with the intention of being illustrative rather than limiting, thus covering all modifications and equivalents within the scope of the disclosure.

Claims

1. A hot wire tensioning device, characterized in that, Configured to tension at least two hot wires, the hot wire tensioning device includes: Support components; At least one docking component is insulated from the support component, and the docking component is electrically connected to the first ends of the two hot wires respectively; At least two tensioning components are located on both sides of the docking component and are insulated from the support component. They are respectively arranged corresponding to the two hot wires. The tensioning components are electrically connected to the second end of the corresponding hot wire and are configured to provide elastic restoring force and use the elastic restoring force to generate a tension force on the hot wire along the extension direction of the hot wire so that the hot wire can be in a tensioned state. The two hot wires are electrically connected to the positive and negative terminals of the power supply, respectively.

2. The hot wire tensioning device according to claim 1, characterized in that, The docking components include: A first base is connected to the support assembly, wherein the material of the first base is an insulating material; The first pressure block is located above and connected to the first base, and has a first groove with an opening facing upward; The second pressure block is located above the first pressure block and is detachably connected to the first pressure block. It has a second groove with an opening facing downward. The second groove and the first groove form a slot. The first end of the hot wire can extend into the slot so that the first pressure block and the second pressure block clamp the first ends of the two hot wires. Wherein, the material of the first pressing block is a conductive material, and / or the material of the second pressing block is a conductive material.

3. The hot wire tensioning device according to claim 2, characterized in that, The hot wire extends along a first direction, the first groove extends along the first direction to two opposite edges of the first pressure block, the second groove extends along the first direction to two opposite edges of the second pressure block, a first end of one hot wire extends into a first end of the slot, and a first end of the other hot wire extends into a second end of the slot.

4. The hot wire tensioning device according to claim 3, characterized in that, The hot wire has a circular cross-section, the first groove has a semi-circular cross-section, and the second groove has a semi-circular cross-section, so that the slot has a circular cross-section, wherein the diameter of the slot is smaller than the diameter of the hot wire.

5. The hot wire tensioning device according to claim 3, characterized in that, The first pressing block has a first opening that extends vertically through the first pressing block, and the second pressing block has a second opening that extends vertically through the second pressing block. The first opening communicates with the first groove, and the second opening communicates with the second groove. The first opening and the second opening are aligned in the vertical direction. The first ends of the two heating wires extend into the slots on both sides of the first opening and the second opening, respectively, without contacting each other.

6. The hot wire tensioning device according to any one of claims 1 to 5, characterized in that, The tensioning component includes: The second base is connected to the support assembly, wherein the material of the second base is an insulating material; A hot wire clamp is located above the second base and is slidably connected to the second base. The first end of the hot wire clamp clamps the second end of the hot wire. An elastic element is located above the second base. The first end of the elastic element is connected to the second end of the hot wire clamp, and the second end of the elastic element is connected to the second base. When the elastic element is in a stretched state, the elastic element exerts a pulling force on the hot wire along the extension direction of the hot wire, so that the hot wire is in a taut state.

7. The hot wire tensioning device according to claim 6, characterized in that, The tensioning assembly also includes: The mandrel is located above the second base and is connected to the hot wire clamp. At least two bearings are located on both sides of the hot wire clamp, and the inner ring of the bearing is fitted onto the end of the mandrel, wherein the material of the bearing is an insulating material; Two guide seats are located on both sides of the hot wire clamping member and are connected to the second base. Each guide seat has a guide groove extending along a first direction. At least two bearings are located in the guide grooves of the two guide seats respectively, and the outer rings of the bearings are in rolling connection with the guide grooves. The first direction is parallel to the extension direction of the hot wire.

8. The hot wire tensioning device according to claim 7, characterized in that, The number of docking components and tensioning components are both multiple, and the number of hot wires is multiple. The multiple docking components are arranged at intervals along the second direction. In the first direction, each docking component has a tensioning component on each side. One docking component cooperates with two tensioning components to tension two hot wires respectively. The second direction is perpendicular to the first direction.

9. The hot wire tensioning device according to claim 8, characterized in that, Also includes: At least one connecting component extends along the second direction to connect the plurality of said docking components to the support component, and / or to connect the plurality of said tensioning components to the support component; An adjusting rod is vertically arranged, with its first end connected to the support assembly and its second end passing through the connecting assembly and screwed to it. At least two locking elements are located above and below the connecting assembly, respectively, and are screwed to the adjusting rod, configured to lock the connecting assembly and the adjusting rod.

10. A chemical vapor deposition apparatus, characterized in that, include: A cavity, having chambers, configured to accommodate workpieces; A hot filament, disposed in the chamber, is configured to catalyze the process gas introduced into the chamber to coat the workpiece; The hot wire tensioning device according to any one of claims 1 to 9 is configured to tension the hot wire.

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