A reel wheel transfer structure

By designing a roller conveyor structure, the problems of unstable transmission and high cost are solved, achieving high-precision and low-cost material conveying, which is suitable for semiconductor coating and brushing processes.

CN224410910UActive Publication Date: 2026-06-26HONGSHENG XINCHUANG SEMICON EQUIP (KUNSHAN) CO LTD
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Patent Information

Application Number
CN202521423379.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-08
Publication Date
2026-06-26
Estimated Expiration
2035-07-08

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Abstract

The utility model discloses a kind of reel transmission structures, it is related to reel transmission technical field, including driving sprocket and driven sprocket, the driving sprocket and driven sprocket are arranged in parallel, driving sprocket and driven sprocket are tensioned and provided with synchronous belt, the side coaxial fixed with one reel of driving sprocket, the same side coaxial fixed with two reels of driven sprocket, the wheel rim of one reel and two reels is evenly distributed with pin column convex column, the upper level of one reel and two reels is provided with flow channel plate, the flow channel plate is fixed in machine tool workstation by bolt mounting mode. The utility model is ensured that product can be strictly conveyed according to preset path and position by the cooperation of pin column convex column and product round hole, realizes accurate step type conveying.
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Description

Technical Field

[0001] This utility model relates to the field of roller conveying technology, and specifically to a roller conveying structure. Background Technology

[0002] Semiconductor coating and brushing processes typically involve multiple closely linked steps, such as cleaning, coating, soft baking, exposure, development, and hard baking. In the transfer stage, product materials such as tape and roll frames, substrates, and thin plates need to be accurately and stably transferred from one process step to the next to ensure the continuity of the entire process. Transfer operation is an important part of automated production of semiconductor coating and brushing processes. By adopting automated transfer equipment, such as roll conveyor structures, belt conveyors, or robotic arms, the automatic transfer of product materials between different process steps can be achieved, reducing manual intervention.

[0003] In the existing semiconductor coating and brushing processes, traditional belt conveyors are susceptible to friction fluctuations and component wear, resulting in unstable material transport and insufficient positioning accuracy, which makes it difficult to meet the needs of precision manufacturing. Although gripper conveyors can guarantee a certain level of accuracy, they suffer from high equipment costs, complex structures, and difficult maintenance, which limits their large-scale application.

[0004] Therefore, it is necessary to invent a reel conveyor structure to solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to provide a reel conveyor structure that solves the problems of belt conveyors being susceptible to friction fluctuations and component wear, resulting in unstable material conveying and insufficient positioning accuracy, and gripper conveyors having high equipment costs, complex structures, and difficult maintenance.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a winding conveyor structure, comprising an active synchronous wheel and a driven synchronous wheel, wherein the active synchronous wheel and the driven synchronous wheel are arranged in parallel, and a synchronous belt is tensioned on the active synchronous wheel and the driven synchronous wheel; a first winding wheel is coaxially fixed on one side of the active synchronous wheel, and a second winding wheel is coaxially fixed on the same side of the driven synchronous wheel; pin-shaped protrusions are evenly distributed around the rims of the first winding wheel and the second winding wheel; a flow channel plate is horizontally arranged above the first winding wheel and the second winding wheel, and the flow channel plate is fixed to the machine tool worktable by bolt installation.

[0007] Preferably, the top of the pin-shaped protrusion is rounded, and the size of the pin-shaped protrusion is adapted to the size of the circular hole opened on the product. The rounded corner can prevent the protrusion from scratching or damaging the product when it is inserted into the long through groove of the product, and at the same time, it can help the pin-shaped protrusion to be smoothly inserted into the long through groove.

[0008] Preferably, the flow channel plate is a metal sheet, and a groove is provided in the middle of the flow channel plate. The groove is a rectangular groove, which can restrict the lateral movement of the product and ensure the positional accuracy of the product during the conveying process.

[0009] Preferably, three support bars are evenly distributed on the bottom surface inside the groove. The support bars can support the product and improve the stability of the conveying process.

[0010] Preferably, the flow channel plate has an elongated through groove at the position corresponding to the pin-shaped protrusion, so that when the first and second winding wheels rotate, their pin-shaped protrusions can smoothly pass through the elongated through groove and form a periodic lifting action above the flow channel plate.

[0011] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0012] 1. This utility model utilizes the rigid support of the flow plate and the matching of pin-shaped protrusions on the first and second reels with the round holes on the product. During the material conveying process, the pin-shaped protrusions pass through the round holes on the product, providing a solid physical foundation and precise guidance for product conveying. Compared with belt conveying, it can effectively eliminate shaking and deviation during the conveying process, significantly improve the conveying accuracy, and ensure that the product can be conveyed strictly according to the preset path and position. Compared with the traditional mechanical gripper conveying method, this structure has obvious advantages in terms of cost. Therefore, the cooperation between the pin-shaped protrusions and the round holes of the product ensures that the product can be conveyed strictly according to the preset path and position, realizing precise step-by-step conveying.

[0013] 2. This utility model avoids the high equipment purchase and maintenance costs of gripper transmission, achieves efficient transmission with a simpler structure, and reduces the overall cost while ensuring a certain level of transmission accuracy and reliability, thus achieving an optimal balance between performance and cost.

[0014] 3. As a compromise solution, this utility model not only makes up for the lack of stability of belt transmission, but also improves the disadvantage of excessive cost of gripper transmission. It provides a more cost-effective and reliable transmission option for the semiconductor field, helps to improve the transmission efficiency of products, adapts to diverse production scenarios and needs, and provides the industry with a technical option that combines reliability and economy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is an exploded three-dimensional structural diagram of the active synchronizing pulley, driven synchronizing pulley, and synchronizing belt of this utility model;

[0017] Figure 3This is a front view schematic diagram of the active synchronizing pulley, driven synchronizing pulley, and synchronizing belt of this utility model;

[0018] Figure 4 This is a three-dimensional cross-sectional structural diagram of the pin-shaped protrusion and the flow channel plate of this utility model.

[0019] Figure 5 For the present utility model Figure 1 Enlarged 3D structural diagram at point A.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Active synchronizing pulley; 2. Driven synchronizing pulley; 3. Synchronizing belt; 4. No. 1 winding pulley; 5. No. 2 winding pulley; 6. Pin-shaped protrusion; 7. Flow channel plate; 8. Groove; 9. Support bar; 10. Long through groove. Detailed Implementation

[0022] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0023] This utility model provides, for example Figure 1-5 The illustrated reel conveyor structure includes an active synchronous pulley 1 and a driven synchronous pulley 2. The active synchronous pulley 1 and the driven synchronous pulley 2 are arranged in parallel. A synchronous belt 3 is tensioned on the active synchronous pulley 1 and the driven synchronous pulley 2. A first reel 4 is coaxially fixed on one side of the active synchronous pulley 1, and a second reel 5 is coaxially fixed on the same side of the driven synchronous pulley 2. A flow channel plate 7 is horizontally arranged above the first reel 4 and the second reel 5.

[0024] In this embodiment, the active synchronous pulley 1 and the driven synchronous pulley 2 are powered by a synchronous belt 3. The motor drives the active synchronous pulley 1 to rotate, and the active synchronous pulley 1 drives the driven synchronous pulley 2 and the coaxially mounted first and second winding pulleys 4 and 5 to rotate synchronously, forming a precision transmission system with multi-winding pulleys working together to ensure that the speed of each winding pulley is consistent and to achieve high-precision step-by-step transmission of the product.

[0025] The first winding wheel 4 and the second winding wheel 5 have pin-shaped protrusions 6 evenly distributed around their circumference. The top of the pin-shaped protrusions 6 is rounded. The size of the pin-shaped protrusions 6 is adapted to the size of the round hole on the product. The flow channel plate 7 has a long through groove 10 corresponding to the position of the pin-shaped protrusions 6.

[0026] In this embodiment, the rounded corner design of the top of the pin-shaped protrusion 6 can avoid scratching or damaging the product when it passes through the product's round hole. At the same time, it helps the pin-shaped protrusion 6 to pass smoothly into the product's round hole. The elongated through groove 10 provides an unobstructed movement channel for the pin-shaped protrusion 6. When the pin-shaped protrusion 6 passes through the elongated through groove 10, the pin-shaped protrusion 6 will pass into the round hole opened on the side of the product. As the first roller 4 and the second roller 5 continue to rotate, a "push-forward-fall" cycle action is formed, thereby realizing the step-by-step conveying of materials.

[0027] The flow channel plate 7 is a metal sheet. The flow channel plate 7 is fixed to the machine tool worktable by bolt installation. A groove 8 is provided in the middle of the flow channel plate 7. The groove 8 is a rectangular groove. Three support bars 9 are evenly distributed on the bottom surface inside the groove 8.

[0028] In this embodiment, the fixed-position flow channel plate 7 provides a stable and precise moving channel for the product, and the groove 8 provides a placement space for the product, restricting the lateral movement of the product in the horizontal direction, ensuring the positional accuracy of the product during the conveying process, effectively preventing the product from sliding due to the rotation of the roller or its own inertia during the conveying process, and improving the stability and reliability of the conveying.

[0029] Working principle of this utility model:

[0030] Refer to the instruction manual appendix Figure 1-5 When using this utility model, firstly, the product is placed in the groove 8 in the middle of the flow channel plate 7. When the power source, such as the motor, drives the active synchronous wheel 1 to rotate, the synchronous belt 3 transmits the power to the driven synchronous wheel 2, so that the two rotate synchronously. The first winding wheel 4 and the second winding wheel 5 will rotate synchronously with the rotation of the active synchronous wheel 1 and the driven synchronous wheel 2. During the rotation of the first winding wheel 4 and the second winding wheel 5, the pin-shaped protrusion 6 passes through the long through groove 10 of the flow channel plate 7 and is precisely inserted into the round hole of the product. Through the cooperation between the pin-shaped protrusion 6 and the round hole, the rotational motion of the winding wheel is converted into the linear transfer of the product, so that the product is stably transferred to the winding wheel of the next station.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A reel conveyor structure, comprising a driving synchronous pulley (1) and a driven synchronous pulley (2), characterized in that: The active synchronous pulley (1) and the driven synchronous pulley (2) are arranged in parallel. A synchronous belt (3) is tensioned on the active synchronous pulley (1) and the driven synchronous pulley (2). A first winding pulley (4) is coaxially fixed on one side of the active synchronous pulley (1). A second winding pulley (5) is coaxially fixed on the same side of the driven synchronous pulley (2). Pin-shaped protrusions (6) are evenly distributed around the rims of the first winding pulley (4) and the second winding pulley (5). A flow channel plate (7) is horizontally arranged above the first winding pulley (4) and the second winding pulley (5). The flow channel plate (7) is fixed to the machine tool worktable by bolt installation.

2. The reel conveying structure according to claim 1, characterized in that: The top of the pin-shaped protrusion (6) is rounded, and the size of the pin-shaped protrusion (6) is adapted to the size of the circular hole opened on the product.

3. The reel conveying structure according to claim 1, characterized in that: The flow channel plate (7) is a metal plate, and a groove (8) is provided in the middle of the flow channel plate (7). The groove (8) is a rectangular groove.

4. The reel conveying structure according to claim 3, characterized in that: Three support bars (9) are evenly distributed on the bottom surface inside the groove (8).

5. The reel conveying structure according to claim 1, characterized in that: The flow channel plate (7) has a long through groove (10) at the position corresponding to the pin-shaped protrusion (6).