A low-temperature wire-source evaporation device

Abstract

This invention provides a low-temperature line-source evaporation deposition apparatus. The apparatus includes a crucible, a heat spreader, a heating wire, a heating electrode, a thermocouple, a water-cooling pipe, and a heat-insulating shielding layer. The heat spreader has a crucible groove milled into its inner side and a heating wire groove milled into its outer side, with a hole at the bottom. The crucible is placed in the crucible groove, the heating wire is embedded in the groove, and the thermocouple is inserted into the hole below the crucible. The water-cooling pipe is located outside the heat spreader, and the heat-insulating shielding layer is located outside the water-cooling pipe. A baffle is placed around the heat-insulating shielding layer to form a heat-insulating cavity. Using this low-temperature line-source evaporation deposition apparatus, heat is conducted between the heating wire, heat spreader, and crucible through contact, enabling rapid and uniform heating of the crucible and effectively reducing the loss of the evaporation material. The linear temperature field uniformity can be controlled within 0.1℃, thus ensuring uniform evaporation rate. The resulting film material has good thickness uniformity and density, significantly improving the efficiency of photovoltaic cells.

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