Single crystal silicon discharge needle structure

Abstract

The application relates to the discharge device structure field of an ion generator, in particular to a single-crystal silicon discharge needle structure. The single-crystal silicon discharge needle structure comprises a main body, a bottom cover, a discharge needle mechanism, wherein the main body is provided with a first through hole; the bottom cover is sleeved on the discharge needle main body; the discharge needle mechanism comprises a fixing assembly, an end cover, a copper pipe and a discharge needle; the fixing assembly is assembled at one end of the main body and located in the first through hole; one end of the end cover is fixed in the fixing assembly; the copper pipe is located in the first through hole; one end of the discharge needle is located in the copper pipe; one end of the copper pipe is sleeved with the end cover, and the other end has a reduced inner diameter for the tip of the other end of the discharge needle to pass through and be located in the first through hole; the discharge needle is made of single-crystal silicon. The application can ensure stable discharge performance and prolong the service life, and the discharge needle structure is relatively simple in assembly and maintenance, so that the use cost and difficulty can be reduced.

Description

Technical Field

[0001] This application relates to the field of discharge device structures for ion generators, and in particular to a single-crystal silicon discharge needle structure. Background Technology

[0002] In numerous industries such as electronics and chemicals, the generation and accumulation of static electricity often triggers a series of problems, such as affecting product quality, damaging electronic components, and even causing safety accidents. To effectively eliminate static electricity, discharge needle technology has emerged and continuously developed. As a key component for static electricity elimination, the discharge needle plays a crucial role in various industrial scenarios, and its performance directly affects the effectiveness of static electricity elimination and the normal operation of related equipment. With technological advancements, the requirements for discharge needles are becoming increasingly stringent, demanding not only high-efficiency discharge performance but also excellent stability and durability. For example, in high-precision industries such as semiconductor manufacturing, the requirements for static electricity control are extremely stringent, and the performance of the discharge needle directly impacts product yield and production efficiency.

[0003] In traditional discharge needle technology, various structures and materials are typically employed to achieve the discharge function. A common approach is to use a metal discharge needle mounted on a specific bracket or base, forming a discharge circuit by connecting it to a power source. Metal discharge needles have good conductivity, enabling them to eliminate static electricity to some extent. Another approach uses insulating materials such as ceramics as a support structure, fixing the metal discharge needle within it to improve its stability and insulation performance. Furthermore, some technologies incorporate special airflow channels around the discharge needle, introducing airflow to enhance the discharge effect and promote static dissipation. These conventional methods, for a certain period, met some of the needs for static electricity elimination and were widely used in various industrial sectors.

[0004] However, existing discharge needle technology has significant drawbacks. Traditional metal discharge needles are susceptible to oxidation and corrosion during long-term use, leading to a gradual decline in their discharge performance and a shortened lifespan. Furthermore, metal discharge needles may react chemically with the surrounding medium under certain conditions, further affecting their performance and stability. Moreover, some existing discharge needle structures are complex to assemble and maintain, increasing usage costs and difficulty. These problems severely limit the wider application and further development of discharge needles.

[0005] Therefore, designing a stable and easy-to-assemble single-crystal silicon discharge needle structure is a technical problem that urgently needs to be solved. Utility Model Content

[0006] The purpose of this application is to overcome the above-mentioned technical problems and provide a single-crystal silicon discharge needle structure that can ensure stable discharge performance and extend service life. At the same time, the discharge needle structure is relatively simple to assemble and maintain, which can reduce the cost and difficulty of use.

[0007] This application discloses a single-crystal silicon discharge needle structure, which specifically adopts the following scheme: A single-crystal silicon discharge needle structure includes: a main body having a first through hole; a bottom cover fitted onto the discharge needle body; and a discharge needle mechanism including: a fixing component, an end cap, a copper tube, and a discharge needle. The fixing component is assembled at one end of the main body and located in the first through hole. One end of the end cap is inserted into the fixing component and fixed. The copper tube is located in the first through hole, and one end of the discharge needle is located in the copper tube. The end cap is fitted onto one end of the copper tube, and the inner diameter of the other end is reduced to allow the tip of the other end of the discharge needle to pass through and be located in the first through hole. The discharge needle is made of single-crystal silicon.

[0008] By adopting the above technical solution, the main body is provided with a first through hole, which provides installation space for components such as the discharge needle mechanism, facilitating the reasonable layout of each component; the bottom cover is fitted onto the discharge needle body, which can provide a certain degree of protection for the main body and prevent external impurities from entering; the fixing component of the discharge needle mechanism is assembled at one end of the main body and located in the first through hole, which can stably install the discharge needle mechanism inside the main body; one end of the end cap is inserted into the fixing component and fixed, ensuring the installation stability of the end cap; the copper tube is located in the first through hole, which provides guidance and protection for the discharge needle; one end of the discharge needle is located on the copper tube, and one end of the copper tube is fitted with an end cap, while the inner diameter of the other end is reduced so that the tip of the other end of the discharge needle can pass through and be located in the first through hole, so that the discharge needle can be accurately positioned in the appropriate position for discharge; the discharge needle is made of monocrystalline silicon material, which has good conductivity and stability, which can improve discharge efficiency and reliability, and enhance the overall discharge performance.

[0009] Optionally, the fixing component includes: a positioning member, which is inserted into one end of the main body and is provided with a first receiving groove and a second through hole; an insulating member, which is located in the first receiving groove and is provided with a third through hole that passes through the second through hole; an end cap passes through the third through hole and abuts against the inner wall of the insulating member; the insulating member abuts against and fits against the inner wall of the positioning member through the end cap; and a copper tube passes through the second through hole and sleeves the end cap.

[0010] By adopting the above technical solution, the positioning component is inserted at one end of the main body, which can realize the installation and positioning of the fixing component on the main body. The positioning component is provided with a first receiving groove and a second through hole. The first receiving groove can be used to accommodate the insulating component, and the second through hole allows the copper tube to pass through. The insulating component is located in the first receiving groove, which can ensure the insulation performance between the positioning component and the end cap and other components. The insulating component is provided with a third through hole that passes through the second through hole, which facilitates the insertion of the end cap. The end cap can be inserted into the third through hole and abut against the inner wall of the insulating component. The end cap abuts against the inner wall of the insulating component, which allows the insulating component to abut against and fit against the inner wall of the positioning component through the end cap, ensuring a tight connection between the components. The copper tube passes through the second through hole and is fitted with the end cap, which realizes the abutment between the copper tube and the end cap, thereby enabling the components of the discharge needle mechanism to be installed in the main body in an orderly manner.

[0011] Optionally, the discharge needle mechanism further includes: an elastic element located inside the copper tube, one end of which abuts against the end cap and the other end of which abuts against the discharge needle, wherein the positioning element is movably inserted into one end of the main body, and the elastic element is elastically compressed or returns to its original position as the positioning element moves.

[0012] By adopting the above technical solution, the elastic element is located inside the copper tube, with one end abutting against the end cap and the other end abutting against the discharge needle, which can keep the discharge needle in a stable position inside the copper tube and ensure the normal operation of the discharge needle; the positioning element can be movably inserted into one end of the main body, and the elastic element can be elastically compressed or returned to its original position as the positioning element moves, which can buffer the impact force when the positioning element moves and ensure the stable operation of the discharge needle mechanism.

[0013] Optionally, the bottom cover has a fourth through hole on the inner wall near the main body for air to flow in, and the main body has a fifth through hole at the end away from the end cover, which passes through the fourth through hole for air to flow out.

[0014] By adopting the above technical solution, when assembling the single-crystal silicon discharge needle structure, air can flow in from the fourth through hole of the bottom cover and flow out through the fifth through hole of the main body, which facilitates air exhaust.

[0015] Optionally, it also includes: a sealing ring, fitted onto the bottom cover, and a second receiving groove provided on the bottom cover corresponding to the sealing ring.

[0016] By adopting the above technical solution, a sealing ring is fitted on the bottom cover, and a second receiving groove is correspondingly provided on the bottom cover, which can improve the sealing performance of the monocrystalline silicon discharge needle structure.

[0017] Optionally, the outer periphery of the main body component away from the bottom cover is provided with a guide protrusion and a locking protrusion for assembly.

[0018] By adopting the above technical solution, guide bumps and engaging bumps are set on the main body, which can play a guiding role when assembling the single crystal silicon discharge needle structure, making the assembly operation easier. At the same time, the engaging bumps can achieve engagement, making the assembly more stable.

[0019] Optionally, the outer periphery of the positioning member is configured as a stepped structure for fitting into one end of the main body.

[0020] By adopting the above technical solution, the outer periphery of the positioning component is set as a stepped structure, which can be more firmly inserted into one end of the main body component, ensuring the connection stability between the positioning component and the main body component, and helping to improve the assembly accuracy and reliability of the entire single crystal silicon discharge needle structure.

[0021] Optionally, one end of the end cap is provided with a stepped structure on its outer periphery, for inserting into the third through hole and abutting against the inner wall of the insulating component.

[0022] By adopting the above technical solution, the outer periphery of one end of the end cap is set as a stepped structure, which facilitates the insertion of the third through hole and can better abut against the inner wall of the insulating component. This can enhance the connection stability and sealing between the end cap and the insulating component, making the structure of the discharge needle mechanism more stable and improving the overall performance and reliability of the single crystal silicon discharge needle structure.

[0023] In summary, this application includes at least one of the following beneficial technical effects: 1. The discharge needle is made of monocrystalline silicon, which avoids the problems of reduced discharge performance and shortened service life caused by oxidation and corrosion of traditional metal discharge needles, thus improving discharge performance and stability; 2. The fixing component is inserted at one end of the main body, and the end cap is inserted into the fixing component for fixation, so that the discharge needle mechanism is installed firmly and the overall structure is more stable; 3. A fourth through hole is provided on the inner wall of the bottom cover near the main body, and a fifth through hole is provided on the end of the main body away from the end cover, forming an air flow channel, which can enhance the discharge effect and promote the dissipation of static electricity. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of a single-crystal silicon discharge needle structure disclosed in an embodiment of this application; Figure 2 for Figure 1 A schematic cross-sectional view of a single-crystal silicon discharge needle structure in an interlocking state. Figure 3 for Figure 1 An exploded view of the socket assembly in a disclosed monocrystalline silicon discharge needle structure.

[0025] Explanation of reference numerals in the attached figures: 10. Main body; 11. First through hole; 12. Fifth through hole; 13. Guide protrusion; 14. Engaging protrusion; 20. Bottom cover; 21. Fourth through hole; 30. Discharge needle mechanism; 31. Fixing component; 311. Positioning component; 3111. First receiving groove; 3112. Second through hole; 312. Insulating component; 3121. Third through hole; 32. End cover; 33. Copper tube; 34. Discharge needle; 35. Elastic component; 40. Sealing ring. Detailed Implementation

[0026] The terminology used in the following embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” and “this” are intended to include the plural expressions as well, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in this application refers to and includes any or all possible combinations of one or more of the listed items.

[0027] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature, and in the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0028] The technical solutions in the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. The described embodiments are only possible technical implementations of the present invention, but are not limited thereto. Other embodiments obtained by those skilled in the art in conjunction with the embodiments of the present invention without creative effort are also within the protection scope of the present invention.

[0029] See Figure 1 and Figure 2 This application discloses a single-crystal silicon discharge needle structure, including a main body 10, a bottom cover 20, and a discharge needle mechanism 30. The main body 10 has a first through hole 11 at its center. The bottom cover 20 is fitted onto the main body 10, and the discharge needle mechanism 30 is disposed within the main body 10 through the first through hole 11. The main body 10 provides space for the installation and protection of the discharge needle mechanism 30, while the bottom cover 20 serves a sealing and protective function. This structural combination allows the discharge needle 34 to operate stably and improves the static electricity elimination effect.

[0030] The main body 10 is made of a material with certain strength and insulation properties, such as plastic or ceramic. The first through hole 11 provides a channel for the installation of the discharge needle mechanism 30. The structure of the main body 10 is as follows: Figure 2 and Figure 3 As shown. The bottom cover 20 is fitted onto the main body of the discharge needle 34. The bottom cover 20 and the main body 10 can be fitted and fixed by screwing through a threaded connection. The bottom cover 20 is made of a material compatible with the main body 10, such as plastic.

[0031] See Figure 1 and Figure 3 The bottom cover 20 has a fourth through hole 21 on its inner wall near the main body 10 for air to flow in. The main body 10 has a fifth through hole 12 at the end away from the end cover 32, which passes through the fourth through hole 21. This allows air to flow out during the assembly of the single-crystal silicon discharge needle structure. This enhances the discharge effect and promotes the dissipation of static electricity. The shape and size of the bottom cover 20 match the main body 10 to ensure a tight fit.

[0032] See Figure 1 , Figure 2 and Figure 3 The discharge needle mechanism 30 includes a fixing component 31, an end cap 32, a copper tube 33, and a discharge needle 34. The fixing component 31 is assembled at one end of the main body 10 and is located in the first through hole 11. One end of the end cap 32 is inserted into the fixing component 31 and fixed. The copper tube 33 is located in the first through hole 11, and one end of the discharge needle 34 is located in the copper tube 33.

[0033] The fixing component 31 includes a positioning member 311 and an insulating member 312. The outer periphery of the positioning member 311 is configured with a stepped structure, such as... Figure 2 The structure shown can be inserted into one end of the main body 10 by external force. This stepped structure can better fit with the main body 10, ensuring accurate positioning, and facilitating assembly and disassembly. A first receiving groove 3111 and a second through hole 3112 are provided in the center of the positioning component 311. The positioning component 311 is made of metal material and has a certain strength and stability.

[0034] The insulating component 312 is located in the first receiving groove 3111 and is provided with a third through hole 3121 that passes through the second through hole 3112. The third through hole 3121 is used for the end cap 32 to be pushed in by external force, and one end of the copper tube 33 passes through the second through hole 3112 and abuts against the end cap 32 located in the third through hole 3121. The insulating component 312 is made of a material with good insulation properties, such as Teflon (i.e., polytetrafluoroethylene (PTFE)). Its function is to ensure the insulation between the discharge needle 34 and other components and prevent leakage.

[0035] See Figure 2 and Figure 3One end of the end cap 32 has a stepped structure on its outer periphery, which is used to penetrate the third through hole 3121 and abut against the inner wall of the insulating component 312. This stepped structure allows the end cap 32 to better fit with the insulating component 312, achieving stable fixation. The end cap 32 can be made of plastic material, which has a certain strength and corrosion resistance.

[0036] The copper tube 33 is located in the first through hole 11, and one end of the discharge needle 34 is located in the copper tube 33. One end of the copper tube 33 is fitted with an end cap 32, and the inner diameter of the other end is reduced so that the tip of the other end of the discharge needle 34 can pass through and be located in the first through hole 11. The discharge needle 34 is made of single crystal silicon material.

[0037] Among them, monocrystalline silicon has good electrical conductivity and chemical stability, which can effectively avoid the problems of easy oxidation and corrosion of traditional metal discharge needles 34, thereby improving discharge performance and service life. The copper tube 33 can be made of metal materials such as copper, which has good electrical and thermal conductivity, and can provide stable support and conductive channels for the discharge needle 34.

[0038] See Figure 2 and Figure 3 The discharge needle mechanism 30 also includes an elastic element 35 located inside the copper tube 33. One end of the elastic element 35 is used to abut against the end cap 32, and the other end is used to abut against the sleeved discharge needle 34. The positioning element 311 is movably inserted into one end of the main body 10, and the elastic element 35 can be elastically compressed or returned to its original position as the positioning element 311 moves.

[0039] Among them, the elastic element 35 can be a spring, which can buffer and adjust the discharge needle 34 when the positioning element 311 moves, ensuring a stable electrical connection between the tip of the discharge needle 34 and the high-voltage power supply. At the same time, it can compensate for the positional displacement caused by assembly errors or vibration through its own elasticity, ensuring that the discharge gap is constant.

[0040] It is also worth mentioning that the elastic element 35, combined with the reduced inner diameter of the other end of the copper tube 33, ensures that the discharge needle 34 does not protrude from the copper tube 33 after being abutted by the elastic element 35. This guarantees a stable electrical connection between the tip of the discharge needle 34 and the high-voltage power supply.

[0041] Furthermore, to ensure that dust, moisture, etc., enter the interior of the single-crystal silicon discharge needle structure after assembly, thus affecting the performance of the discharge needle 34, see [link to documentation]. Figure 1 In this embodiment, a sealing ring 40 is also included, which is sleeved on the bottom cover 20. The bottom cover 20 has a matching second receiving groove (not shown in the figure) corresponding to the sealing ring 40. The sealing ring 40 can be made of materials such as rubber to enhance the sealing between the bottom cover 20 and the main body 10.

[0042] Furthermore, to facilitate the installation and fixation of the entire discharge needle 34 structure. See [link / reference]. Figure 1 and Figure 3 In this embodiment, a guide bump 13 and a locking bump 14 for assembly are provided on the outer periphery of the end of the main body 10 away from the bottom cover 20. Multiple guide bumps 13 and locking bumps 14 can be provided. Guided by the guide bump 13, the locking bump 14 can accurately mount the single-crystal silicon discharge needle structure onto the corresponding device. Correspondingly, the structures of the guide bump 13 and the locking bump 14 are as follows: Figure 1 , 3 The design shown is not limited to the examples shown here and can be adapted to the specific circumstances.

[0043] In summary, the monocrystalline silicon discharge needle structure disclosed in this application, by using monocrystalline silicon material for the discharge needle 34, can solve the problems of easy oxidation and corrosion of traditional metal discharge needles 34, ensure long-term discharge performance, extend service life, meet the strict requirements of high-precision industries for electrostatic control, and improve product yield and production efficiency. The structure of the fixing component 31 with the main body 10 inserted and the end cap 32 inserted into the fixing component 31 solves the problem of complex assembly and maintenance of the existing discharge needle 34 structure, making the discharge needle mechanism 30 firmly installed, improving the overall structural stability, and reducing the cost and difficulty of use. The fourth through hole 21 of the bottom cover 20 and the fifth through hole 12 of the main body 10 form an airflow channel, which enhances the discharge effect, facilitates static dissipation, and further improves the static elimination capability. The elastic element 35 ensures a stable electrical connection between the tip of the discharge needle 34 and the high-voltage power supply. At the same time, it compensates for the positional shift caused by assembly errors or vibration through its own elasticity, ensuring a constant discharge gap. The sealing ring 40 prevents external impurities from entering, protects the internal structure, and improves stability and durability. The guide protrusion 13 and the engaging protrusion 14 of the main body 10 facilitate assembly and improve assembly efficiency. The stepped structure on the outer periphery of the positioning element 311 makes it easy to tighten the main body 10, making the installation more stable. The stepped structure on the outer periphery of one end of the end cover 32 makes it easy to pass through the third through hole 3121 and abut against the inner wall of the insulating element 312, enhancing the structural stability.

[0044] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A single-crystal silicon discharge needle structure, characterized in that, include: The main body (10) is provided with a first through hole (11); The bottom cover (20) is fitted onto the body of the discharge needle (34); The discharge needle mechanism (30) includes: a fixing component (31), an end cap (32), a copper tube (33), and a discharge needle (34). The fixing component (31) is assembled at one end of the main body (10) and located in the first through hole (11). One end of the end cap (32) is inserted into the fixing component (31) and fixed. The copper tube (33) is located in the first through hole (11). One end of the discharge needle (34) is located in the copper tube (33). The end cap (32) is sleeved on one end of the copper tube (33), and the inner diameter of the other end is reduced so that the tip of the other end of the discharge needle (34) can pass through and be located in the first through hole (11). The discharge needle (34) is made of single crystal silicon.

2. The single-crystal silicon discharge needle structure according to claim 1, characterized in that, The fixing component (31) includes: The positioning element (311) is inserted at one end of the main body (10) and is provided with a first receiving groove (3111) and a second through hole (3112). An insulating component (312) is located in the first receiving groove (3111) and is provided with a third through hole (3121) that passes through the second through hole (3112). The end cap (32) passes through the third through hole (3121) and abuts against the inner wall of the insulating component (312). The insulating component (312) abuts against and fits against the inner wall of the positioning component (311) through the end cap (32). The copper tube (33) passes through the second through hole (3112) and sleeves the end cap (32).

3. The single-crystal silicon discharge needle structure according to claim 2, characterized in that, The discharge needle mechanism (30) further includes: an elastic element (35) located inside the copper tube (33), one end of which abuts against the end cap (32) and the other end of which abuts against the discharge needle (34) sleeved thereon, wherein the positioning element (311) is movably inserted into one end of the main body (10), and the elastic element (35) is elastically compressed or returns to its original position as the positioning element (311) moves.

4. The single-crystal silicon discharge needle structure according to claim 1, characterized in that, The bottom cover (20) has a fourth through hole (21) on the inner wall near the main body (10) for air to flow in, and the main body (10) has a fifth through hole (12) that passes through the fourth through hole (21) at the end away from the end cover (32) for air to flow out.

5. The single-crystal silicon discharge needle structure according to claim 1, characterized in that, Also includes: A sealing ring (40) is fitted onto the bottom cover (20), and a second receiving groove is provided on the bottom cover (20) corresponding to the sealing ring (40).

6. The single-crystal silicon discharge needle structure according to claim 1, characterized in that, The outer periphery of the main body (10) away from the bottom cover (20) is provided with a guide protrusion (13) and a locking protrusion (14) for assembly.

7. The single-crystal silicon discharge needle structure according to claim 3, characterized in that, The outer periphery of the positioning member (311) is configured with a stepped structure for being inserted into one end of the main body member (10).

8. The single-crystal silicon discharge needle structure according to claim 2, characterized in that, One end of the end cap (32) is provided with a stepped structure on its outer periphery, which is used to penetrate the third through hole (3121) and abut against the inner wall of the insulating component (312).

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