A furnace door assembly and diffusion furnace

Abstract

The application discloses a furnace door assembly and a diffusion furnace. The furnace door assembly comprises a furnace door body, the furnace door body comprises a first furnace door and a second furnace door which are oppositely arranged, the first furnace door faces a furnace opening, and the second furnace door is detachably connected with the first furnace door. The furnace door assembly further comprises a furnace door connecting assembly which is used for connecting a furnace door driving mechanism and the furnace door body. The furnace door connecting assembly comprises a furnace door support which is used for being assembled on the furnace door driving mechanism, a first connecting arm which is rotatably connected to the furnace door support, and a second connecting arm which is rotatably assembled on the first connecting arm. The rotating axis of the second connecting arm intersects with the rotating axis of the first connecting arm, and the furnace door body is fixed relative to the second connecting arm. The double-axis rotating design enables the furnace door body to realize multi-degree-of-freedom movement, and the inner side of the furnace door body can be rotated to an angle which is convenient for an operator to operate, then the first furnace door can be detached and replaced, and the working efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of solar cell technology, and in particular to a furnace door assembly and a diffusion furnace. Background Technology

[0002] In the field of semiconductor material processing, diffusion furnaces, as key equipment, are widely used in diffusion, oxidation, and annealing processes in various industries such as solar cell manufacturing, large-scale integrated circuits, and discrete devices. They control impurity diffusion to regulate material properties. Currently, diffusion furnace door assemblies typically employ a structure combining an outer aluminum metal component and an inner concave disc-shaped quartz component. The door opens and closes via a positioning post and a drive mechanism insertion hole, utilizing cylinder extension and retraction. While this structure offers simplicity and efficiency, it has significant drawbacks. Because the quartz furnace door is located inside the furnace opening, in practical use, when the door needs to be disassembled or replaced due to high temperatures or corrosive gases, the entire door assembly must be removed from the drive structure. This cumbersome and complex process severely impacts equipment maintenance efficiency, increases labor intensity and maintenance costs, and fails to meet the efficient and convenient production demands of semiconductor manufacturing. Utility Model Content

[0003] This application discloses a furnace door assembly and a diffusion furnace, which enables the inner side of the furnace door body to be rotated to an angle convenient for the operator to operate, and then the first furnace door can be disassembled and replaced. This makes the disassembly and installation of the first furnace door simpler, significantly reduces the difficulty of operation, and improves work efficiency.

[0004] To achieve the above objectives, this application discloses a furnace door assembly for mounting on a furnace door drive mechanism of a diffusion furnace, the diffusion furnace comprising a furnace tube having a furnace opening, and including:

[0005] The furnace door body includes a first furnace door and a second furnace door arranged opposite to each other, the first furnace door facing the furnace opening, and the second furnace door being detachably connected to the first furnace door;

[0006] Furnace door connecting assembly, the furnace door connecting assembly being used to connect the furnace door drive mechanism and the furnace door body, the furnace door connecting assembly comprising:

[0007] A furnace door support component, which is used to be assembled on the furnace door drive mechanism;

[0008] A first connecting arm is rotatably connected to the furnace door support;

[0009] The second connecting arm is rotatably mounted on the first connecting arm, and the rotation axis of the second connecting arm intersects with the rotation axis of the first connecting arm. The furnace door body is fixed relative to the second connecting arm.

[0010] In one possible implementation, a first rotating shaft is fixed to the furnace door support, and the first connecting arm is sleeved on the first rotating shaft to be rotatably connected to the furnace door support.

[0011] The furnace door connecting assembly further includes a second rotating shaft, the first end of which is fixed to the first connecting arm, and the second connecting arm is sleeved on the second end of the second rotating shaft and rotatably connected to it via the second rotating shaft and the first connecting arm.

[0012] In one possible implementation, the rotation axis of the first connecting arm is perpendicular to the rotation axis of the second connecting arm.

[0013] In one possible implementation, the first rotation axis is arranged vertically and the second rotation axis is arranged horizontally.

[0014] In one possible implementation, the rotation angle of the first connecting arm relative to the furnace door support is in the range of 45°-90°;

[0015] And / or, the rotation angle of the second connecting arm relative to the first connecting arm is in the range of 45°-90°.

[0016] In one possible implementation, the furnace door assembly further includes a cover plate movably disposed on the furnace door support member. The cover plate has a release position and a blocking position relative to the furnace door connecting assembly. In the release position, the cover plate is able to avoid the first rotating shaft and the second rotating shaft. In the blocking position, the cover plate is able to cover the outer sides of the first rotating shaft and the second rotating shaft.

[0017] In one possible implementation, the cover plate is slidably disposed on the furnace door support, and along the sliding direction of the cover plate, the width of the cover plate is greater than the sum of the widths of the first connecting arm and the second connecting arm.

[0018] In one possible implementation, the second furnace door and the first furnace door are both circular structures and coaxially arranged, with the size of the second furnace door being larger than the size of the first furnace door.

[0019] In one possible implementation, the first furnace door is a quartz door and the second furnace door is a metal door.

[0020] This application also discloses a diffusion furnace, including a furnace tube, a furnace door assembly, and a furnace door drive mechanism. The furnace tube has a furnace opening, and the furnace door assembly is mounted on the furnace door drive mechanism. The furnace door drive mechanism is capable of moving the furnace door assembly closer to or away from the furnace opening. The furnace door assembly is as described in any of the above-mentioned furnace door assemblies.

[0021] Compared with the prior art, the beneficial effects of this application are as follows:

[0022] In the furnace door assembly and diffusion furnace provided in this application, the furnace door body consists of a first furnace door (facing the furnace opening) and a second furnace door arranged opposite to each other, which are detachably connected. The first furnace door directly faces the high-temperature environment of the furnace tube and is used to seal the furnace opening and withstand the erosion of process gases. The second furnace door is connected to the drive mechanism, providing structural support and transmitting driving force. The furnace door support is fixed to the furnace door drive mechanism (such as a cylinder or motor) and serves as the mounting base for the entire furnace door assembly. One end of the first connecting arm is rotatably connected to the furnace door support and can rotate around a first axis. The second connecting arm is rotatably assembled at the other end of the first connecting arm, and its rotation axis intersects with the axis of the first connecting arm, forming a spatial revolute pair. The furnace door body is linked to the drive mechanism through the second connecting arm. When the drive mechanism extends or retracts, the double-link mechanism converts the motion into the opening and closing action of the furnace door.

[0023] Therefore, this dual-axis rotation design allows the furnace door body to achieve multi-degree-of-freedom movement, enabling the inner side of the furnace door body to be rotated to an angle convenient for operators to operate, and then the first furnace door to be disassembled and replaced. Unlike existing technologies, it is not necessary to disassemble the entire furnace door before replacement, which simplifies the disassembly and installation of the first furnace door, significantly reduces the difficulty of operation, improves work efficiency, and provides a safer maintenance environment for operators, further ensuring the quality and safety of maintenance work. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A front view of a furnace door assembly provided in an embodiment of this utility model;

[0026] Figure 2 A top view of a furnace door assembly provided for an embodiment of this utility model;

[0027] Figure 3 A schematic diagram of the structure of a furnace door connection assembly provided in an embodiment of this utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the furnace door body of a furnace door assembly provided in an embodiment of the present utility model.

[0029] Explanation of reference numerals in the attached figures:

[0030] 10-Furnace door body; 11-First furnace door; 111-Connecting part; 12-Second furnace door; 20-Furnace door connecting assembly; 21-Furnace door support; 22-First connecting arm; 23-Second connecting arm; 24-Second rotating shaft; 30-Cover plate. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] In this application, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0034] In the field of semiconductor material processing, diffusion furnaces, as key equipment, are widely used in diffusion, oxidation, and annealing processes in various industries such as solar cell manufacturing, large-scale integrated circuits, and discrete devices. They control impurity diffusion to regulate material properties. Currently, diffusion furnace door assemblies typically employ a structure combining an outer aluminum metal component and an inner concave disc-shaped quartz component. The door opens and closes via a positioning post and a drive mechanism insertion hole, utilizing cylinder extension and retraction. While this structure offers simplicity and efficiency, it has significant drawbacks. Because the quartz furnace door is located inside the furnace opening, in practical use, when the door needs to be disassembled or replaced due to high temperatures or corrosive gases, the entire door assembly must be removed from the drive structure. This cumbersome and complex process severely impacts equipment maintenance efficiency, increases labor intensity and maintenance costs, and fails to meet the efficient and convenient production demands of semiconductor manufacturing.

[0035] In view of this, some embodiments of this application provide a furnace door assembly and a diffusion furnace. The dual-axis rotation design enables the furnace door body to achieve multi-degree-of-freedom movement, allowing the inner side of the furnace door body to be rotated to an angle convenient for operators to operate, and then the first furnace door to be disassembled and replaced. This makes the disassembly and installation of the first furnace door simpler, significantly reduces the difficulty of operation, improves work efficiency, and provides a safer maintenance environment for operators, further ensuring the quality and safety of maintenance work.

[0036] The present application will be described in detail below through specific embodiments:

[0037] The furnace door assembly of this application embodiment, such as Figures 1 to 4 As shown, a furnace door assembly is used for mounting on a furnace door drive mechanism of a diffusion furnace, the diffusion furnace including furnace tubes having furnace openings, comprising:

[0038] The furnace door body 10 includes a first furnace door 11 and a second furnace door 12 arranged opposite to each other. The first furnace door 11 faces the furnace opening, and the second furnace door 12 is detachably connected to the first furnace door 11.

[0039] Furnace door connection assembly 20, used to connect furnace door drive mechanism and furnace door body 10, includes:

[0040] Furnace door support 21, which is used to be assembled on the furnace door drive mechanism;

[0041] The first connecting arm 22 is rotatably connected to the furnace door support 21;

[0042] The second connecting arm 23 is rotatably mounted on the first connecting arm 22. The rotation axis of the second connecting arm 23 intersects with the rotation axis of the first connecting arm 22. The furnace door body 10 is fixed relative to the second connecting arm 23.

[0043] In the furnace door assembly provided in this application embodiment, the furnace door body 10 consists of a first furnace door 11 (facing the furnace opening) and a second furnace door 12 arranged opposite to each other, and the two are detachably connected. The first furnace door 11 directly faces the high-temperature environment of the furnace tube and is used to seal the furnace opening and withstand the erosion of process gases. The second furnace door 12 is connected to the drive mechanism, providing structural support and transmitting driving force. The furnace door support member 21 is fixed to the furnace door drive mechanism (such as a cylinder or motor) and serves as the mounting base for the entire furnace door assembly. One end of the first connecting arm 22 is rotatably connected to the furnace door support member 21 and can rotate around a first axis. The second connecting arm 23 is rotatably assembled at the other end of the first connecting arm 22, and its rotation axis intersects with the axis of the first connecting arm 22, forming a spatial rotation pair. The furnace door body 10 is linked to the drive mechanism through the second connecting arm 23. When the drive mechanism extends or retracts, the double linkage mechanism converts the motion into the opening and closing action of the furnace door.

[0044] Therefore, this dual-axis rotation design allows the furnace door body 10 to achieve multi-degree-of-freedom movement, enabling the inner side of the furnace door body 10 to be rotated to an angle convenient for operators to operate, and then the first furnace door 11 to be disassembled and replaced. Unlike the prior art, it is not necessary to disassemble the entire furnace door before replacement, which makes the operation steps of disassembling and installing the first furnace door 11 simpler, significantly reduces the difficulty of operation, improves work efficiency, and provides a safer maintenance environment for operators, further ensuring the quality and safety of maintenance work.

[0045] It should be explained that the first furnace door 11 is typically made of high-temperature and corrosion-resistant quartz material to seal the furnace opening and withstand the erosion of process gases. The second furnace door 12, connected to the drive mechanism, can be made of metal (such as aluminum alloy) to provide structural support and transmit driving force. Both can be quickly assembled and disassembled using snaps, bolts, or slots, facilitating the replacement of the first furnace door 11 (quartz component) without disassembling the entire furnace door body 10.

[0046] Wherein, the X direction is the direction of the rotation axis of the second connecting arm 23 (i.e., the horizontal direction), and the X direction is the direction of the rotation axis of the first connecting arm 22 (i.e., the vertical direction).

[0047] In some embodiments, such as Figure 1 As shown, a first rotating shaft is fixed on the furnace door support 21, and a first connecting arm 22 is sleeved on the first rotating shaft to be rotatably connected to the furnace door support 21.

[0048] like Figure 3 As shown, the furnace door connecting assembly 20 also includes a second rotating shaft 24. The first end of the second rotating shaft 24 is fixed to the first connecting arm 22, and the second connecting arm 23 is sleeved on the second end of the second rotating shaft 24 and rotatably connected to it through the second rotating shaft 24 and the first connecting arm 22.

[0049] Specifically, the furnace door support 21 has a mounting groove with an opening facing the first connecting arm 22. The first rotating shaft is fixed to the two opposite groove walls. Then, a mounting shaft hole is provided at the end of the first connecting arm 22 near the furnace door support 21. The first rotating shaft passes through the mounting shaft hole and is rotatably connected to the mounting hole, realizing the rotatable connection between the first connecting arm 22 and the furnace door support 21. This ensures that the rotation trajectory of the first connecting arm 22 around the first rotating shaft is unique, avoiding shaking or deviation. At the same time, the structure is simple and compact, and the maintenance and disassembly costs are low.

[0050] Furthermore, mounting shaft holes are respectively provided at the opposite ends of the first connecting arm 22 and the second connecting arm 23. The first end of the second rotating shaft 24 is fixed to the mounting shaft hole of the first connecting arm 22, and the second end of the second rotating shaft 24 is disposed in the mounting shaft hole of the second connecting arm 23 and rotatably connected thereto, thereby realizing the rotatable connection between the second connecting arm 23 and the first connecting arm 22. The spatial arrangement of the rotating shaft is highly flexible, and multi-dimensional rotation can be achieved by intersecting the axes of the first rotating shaft and the second rotating shaft 24 to meet complex motion requirements. For example, the dual-axis rotation design in the furnace door assembly allows the furnace door body 10 to rotate around the first rotating shaft first and then around the second rotating shaft 24 during the opening and closing process, ultimately achieving the desired orientation adjustment of the furnace door body 10, which facilitates maintenance and operation.

[0051] In some embodiments, such as Figure 1 As shown, the rotation axis of the first connecting arm 22 is perpendicular to the rotation axis of the second connecting arm 23.

[0052] The rotation axis of the first connecting arm 22 is perpendicular to the rotation axis of the second connecting arm 23. This perpendicular axis decomposes the driving force into independent components, avoiding structural deformation caused by torque coupling. When the force is transmitted through the rotation of the second connecting arm 23, the second rotating shaft mainly bears the torque along the axial direction of the second rotating shaft. When the first connecting arm 22 rotates around the first rotating shaft, it mainly bears the torque along the axial direction of the first rotating shaft. Because the two rotating axes are perpendicular, this load decomposition makes the force direction of the components clear, reducing the risk of bending torque or rotational wear and enhancing overall rigidity. The orthogonal axis design allows for more flexible motion paths and avoids interference with surrounding components of the furnace body (such as furnace tubes and pipelines).

[0053] In some embodiments, such as Figure 1 and Figure 3 As shown, the first rotation axis is arranged in the vertical direction, and the second rotation axis 24 is arranged in the horizontal direction.

[0054] The first connecting arm 22 rotates around the first rotating axis arranged vertically, causing the furnace door body 10 to swing horizontally. The second connecting arm 23 rotates around the second rotating axis 24 arranged horizontally, causing the furnace door body 10 to tilt and flip. The two work together to allow the furnace door body 10 to gradually rotate from the vertical state of sealing the furnace opening to a horizontal state where the inside of the furnace door body 10 faces upward or towards itself (such as a maintenance position). The inside of the first furnace door 11 can be exposed without the need for complete disassembly, which greatly simplifies maintenance operations. Operators can stand and operate the bolts naturally, reducing fatigue, shortening maintenance time, and reducing the rate of operational errors.

[0055] In some embodiments, the rotation angle of the first connecting arm 22 relative to the furnace door support 21 is in the range of 45°-90°, and the rotation angle of the second connecting arm 23 relative to the first connecting arm 22 is in the range of 45°-90°.

[0056] The rotation angle range of the first connecting arm 22 relative to the furnace door support 21 is 45°-90°. The lower limit of 45° ensures that the furnace door is away from the high-temperature zone of the furnace opening and far from the outer wall of the furnace tube, avoiding collision between the inner side (heat-resistant ceramic surface) of the first furnace door 11 and the heating wire. The upper limit of 90° prevents excessive rotation of the furnace door from causing interference between the second connecting arm 23 and the drive cylinder, etc., and maintains a safe distance from other components after flipping. The rotation angle range of the second connecting arm 23 relative to the first connecting arm 22 is 45°-90°, so that the flipping angle of the second connecting arm 23 is not too small, which would prevent the inner side of the first furnace door 11 from being fully exposed, nor is it too large, which would make the second connecting arm 23 too loose.

[0057] For example, different combinations of 45° and 45°, 45° and 90°, 90° and 45°, and 90° and 90° can be used to correspond to different maintenance scenarios. 45° and 45° can quickly inspect the furnace opening, while 90° and 90° can easily and completely disassemble the first furnace door 11.

[0058] Of course, in other embodiments, for example, the first connecting arm 22 can be rotated 75° and the second connecting arm 23 can be flipped 60°, or other combinations of angles such as 45° and 70° can be used.

[0059] The second furnace door 12 has a connecting part 111 in the middle of the side away from the first furnace door 11, and the second connecting arm 23 is fixedly connected to the connecting part 111 to fix the furnace door connecting assembly 20 to the furnace door body 10.

[0060] In some embodiments, such as Figure 1 As shown, the furnace door assembly also includes a cover plate 30, which is movably mounted on the furnace door support 21. The cover plate 30 has a release position and a blocking position relative to the furnace door connecting assembly 20. When the cover plate 30 is in the release position, it can avoid the first rotating shaft and the second rotating shaft 24. When the cover plate 30 is in the blocking position, it can cover the outside of the first rotating shaft and the outside of the second rotating shaft 24.

[0061] The cover plate 30 is movably mounted on the furnace door support 21, allowing it to have both a released position and a covered position relative to the furnace door connecting assembly 20. When the cover plate 30 is in the covered position, it covers the outer sides of the first and second rotating shafts 24, preventing operators from accidentally contacting rotating parts. This is particularly suitable for industrial furnaces, high-temperature equipment, and other similar applications, reducing the risk of mechanical injury. The cover plate 30 also forms a physical barrier, reducing the entry of impurities and extending the service life of the rotating shafts and connecting arms.

[0062] When the cover plate 30 is in the released position, it does not interfere with the rotation of the rotating shaft, ensuring the rotational freedom of the furnace door support 21 (such as the first and second connecting arms 23) and meeting the requirements for opening and closing the furnace door. At the same time, the cover plate 30 avoids the rotating shaft, making it easy to directly inspect the shaft wear and lubrication, or replace bearings and other components without disassembling complex structures, thus improving maintenance efficiency.

[0063] In some embodiments, such as Figure 1 and Figure 3 As shown, the cover plate 30 is slidably mounted on the furnace door support 21. Along the sliding direction of the cover plate 30, the width of the cover plate 30 is greater than the sum of the widths of the first connecting arm 22 and the second connecting arm 23.

[0064] The cover plate 30 is slidably engaged with the furnace door support 21 via guide rails, grooves, and other structures, allowing it to move linearly in a specific direction (such as the horizontal) to switch between the release and shielding positions. The sliding guide structure must have low friction and high rigidity to ensure smooth movement of the cover plate 30 and prevent jamming.

[0065] The width of the cover plate 30 is greater than the sum of the widths of the first connecting arm 22 and the second connecting arm 23. This means that when the cover plate 30 slides to the shielding position, it can completely cover the outer areas of the two connecting arms, ensuring that the rotating shaft and connecting joints are completely shielded, forming an overall shielding effect.

[0066] Moreover, the sliding design eliminates the need to disassemble components; simply pushing the cover plate 30 in a straight line switches the protection state, saving operation time and making it particularly suitable for scenarios requiring frequent opening and closing of protection (such as equipment maintenance and routine cleaning). The sliding motion occurs in one dimension, and the cover plate 30 slides on the surface of the furnace door support 21, occupying little space and making it suitable for equipment with limited installation space.

[0067] In other embodiments, the cover plate 30 can also be hinged to the side of the furnace door support 21 near the first connecting arm 22 to form a hinged cover plate 30 to achieve the release and blocking positions.

[0068] In some embodiments, such as Figure 2 and Figure 4 As shown, the second furnace door 12 and the first furnace door 11 are both circular structures and are coaxially arranged, with the size of the second furnace door 12 being larger than that of the first furnace door 11.

[0069] The second furnace door 12 (outer layer) is coaxially nested with the first furnace door 11 (inner layer), forming a double-layer sealing structure. The outer furnace door can cover the edge gaps of the inner furnace door, and when used with a sealing ring, it can significantly reduce gas leakage inside the furnace (such as high-temperature flue gas and protective atmosphere). Moreover, the outer furnace door is larger in size and can cover the outer area of ​​the inner furnace door, forming an air insulation layer (or filling with insulation material), reducing the conduction of heat from inside the furnace to the outside. For high-temperature equipment, the outer furnace door can reduce the surface temperature, preventing burns to operators, while also reducing heat loss and improving energy efficiency.

[0070] The circular coaxial design is stacked along the axial direction (furnace door axis), eliminating the need to increase the width or height of the equipment. This makes it suitable for installation space-constrained scenarios. The circular design also reduces wasted space at the corners, resulting in a more compact structure.

[0071] In other embodiments, a double-layer structure of a rectangular furnace door may also be used.

[0072] In some embodiments, such as Figure 2 As shown, the first furnace door 11 is a quartz door, and the second furnace door 12 is a metal door.

[0073] The first furnace door 11 is a quartz door. Quartz doors are resistant to high temperatures and corrosion, with a melting point exceeding 1700℃. They do not readily react with acids or alkalis at high temperatures, making them a primary choice for furnace doors in high-temperature environments. The second furnace door 12 is made of metal, offering high strength and resistance to deformation. It serves as the main structure of the furnace door, supporting hinges, drive mechanisms (such as cylinders and motors), and sealing components (such as sealing rings), ensuring the reliability of the furnace door's opening and closing.

[0074] The second furnace door 12 can be an aluminum alloy door, a stainless steel door, a cast iron door, etc., and this application does not limit it.

[0075] This application also discloses a diffusion furnace, including a furnace tube, a furnace door assembly, and a furnace door drive mechanism. The furnace tube has a furnace opening, and the furnace door assembly is mounted on the furnace door drive mechanism. The furnace door drive mechanism can move the furnace door assembly closer to or away from the furnace opening. The furnace door assembly in this diffusion furnace is the aforementioned furnace door assembly. Therefore, the diffusion furnace in this embodiment has roughly the same technical effect as the aforementioned furnace door assembly. Since the technical effect of the furnace door assembly has been fully explained, it will not be repeated here.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A furnace door assembly for mounting on a furnace door drive mechanism of a diffusion furnace, the diffusion furnace comprising a furnace tube having a furnace opening, characterized in that, include: The furnace door body includes a first furnace door and a second furnace door arranged opposite to each other, the first furnace door facing the furnace opening, and the second furnace door being detachably connected to the first furnace door; Furnace door connecting assembly, the furnace door connecting assembly being used to connect the furnace door drive mechanism and the furnace door body, the furnace door connecting assembly comprising: A furnace door support component, which is used to be assembled on the furnace door drive mechanism; A first connecting arm is rotatably connected to the furnace door support; The second connecting arm is rotatably mounted on the first connecting arm, and the rotation axis of the second connecting arm intersects with the rotation axis of the first connecting arm. The furnace door body is fixed relative to the second connecting arm.

2. The furnace door assembly according to claim 1, characterized in that, A first rotating shaft is fixed on the furnace door support, and the first connecting arm is sleeved on the first rotating shaft to be rotatably connected to the furnace door support. The furnace door connecting assembly further includes a second rotating shaft, the first end of which is fixed to the first connecting arm, and the second connecting arm is sleeved on the second end of the second rotating shaft and rotatably connected to it via the second rotating shaft and the first connecting arm.

3. The furnace door assembly according to claim 1, characterized in that, The rotation axis of the first connecting arm is perpendicular to the rotation axis of the second connecting arm.

4. The furnace door assembly according to claim 2, characterized in that, The first rotating shaft is arranged in a vertical direction, and the second rotating shaft is arranged in a horizontal direction.

5. The furnace door assembly according to any one of claims 1-4, characterized in that, The rotation angle range of the first connecting arm relative to the furnace door support is 45°-90°; And / or, the rotation angle of the second connecting arm relative to the first connecting arm is in the range of 45°-90°.

6. The furnace door assembly according to claim 2, characterized in that, The furnace door assembly also includes a cover plate, which is movably mounted on the furnace door support. The cover plate has a release position and a blocking position relative to the furnace door connecting assembly. When the cover plate is in the release position, it can avoid the first rotating shaft and the second rotating shaft. When the cover plate is in the blocking position, it can cover the outer side of the first rotating shaft and the outer side of the second rotating shaft.

7. The furnace door assembly according to claim 6, characterized in that, The cover plate is slidably mounted on the furnace door support. Along the sliding direction of the cover plate, the width of the cover plate is greater than the sum of the widths of the first connecting arm and the second connecting arm.

8. The furnace door assembly according to any one of claims 1-4, characterized in that, The second furnace door and the first furnace door are both circular and coaxially arranged, and the size of the second furnace door is larger than that of the first furnace door.

9. The furnace door assembly according to claim 8, characterized in that, The first furnace door is a quartz door, and the second furnace door is a metal door.

10. A diffusion furnace, characterized in that, The furnace includes a furnace tube, a furnace door assembly, and a furnace door drive mechanism. The furnace tube has a furnace opening, and the furnace door assembly is mounted on the furnace door drive mechanism. The furnace door drive mechanism is capable of moving the furnace door assembly closer to or away from the furnace opening. The furnace door assembly is the furnace door assembly as described in any one of claims 1-9.

Images