Device with a protective cover for a production unit, its use, and a method for operating a production unit under cleanroom conditions

Abstract

Device with a protective cover for a production unit, which is suitable and designed to enclose at least one area of ​​the unit in such a way that the protective cover is able to separate a spatial area containing the at least one area of ​​the unit from an environment immediately surrounding the protective cover. characterized in that the protective cover has at least two layers, a first and a second, separated by a spacer layer, that at least the first layer is permeable to flow, that the spacer layer has a supporting structure that keeps the two layers apart and allows flow through them along the longitudinal axis of the layer, and that at least one flow unit is provided which is fluidically connected to the spacer layer or to the spatial area.

Description

Technical area

[0001] The invention relates to a device with a protective cover for a production unit, which is suitable and designed to enclose at least one region of the unit in such a way that the protective cover can separate a spatial area containing the at least one region of the unit from the environment immediately surrounding the protective cover, and to the use of the device. Furthermore, a method for operating a production unit under clean room conditions is described. State of the art

[0002] If it is necessary to use production-technical units under cleanroom conditions, e.g. in the form of robots, manipulators, passive support structures or other handling mechanisms, which do not meet the required cleanliness regulations, protective covers are used which are arranged over or around a corresponding unit in order to demarcate or separate the cleanroom from the unclean unit.

[0003] Such a generic protective device for an industrial robot is disclosed in DE 20 2007 006 121 U1. For the purposes of mechanical robustness and fluid tightness, it provides at least two flexible protective sheath layers, one of which consists of a flexible plastic material and the other of which has a metal-containing layer. The flexible protective sheath encloses a space containing the unit, through which a protective gas also flows.

[0004] A similar protective device for a robot can be found in WO 2017 / 015207 A1. It consists of a tubular casing that can be attached to the robot arm in a gas-tight manner via fastening sleeves and hermetically encloses a spatial area containing the robot arm. Optionally, a fluid channel is installed in or on the tubular casing to stabilize the spatial shape of the tubular casing. A flow flows through the fluid channel, which also serves cooling purposes.

[0005] US Pat. No. 4,904,514 discloses a protective cover for mechanical handling units. Depending on the design of the unit to be shielded, it consists of several parts, each of which is attached to the handling unit in an overlapping manner. The partially multi-layered protective device is made of a non-textile material that is both liquid-tight and particle-tight.

[0006] All protective measures known to date are based on no or only insufficiently defined cleanroom and cleanliness requirements, so that they are not suitable or only partially suitable for use in clean or ultra-clean rooms.

[0007] The term "cleanroom" or "ultraclean room" describes a space that is sealed off from the surrounding environment and in which the concentration of airborne particles is kept as low as necessary, depending on the processes or activities to be carried out within the space. Cleanrooms are primarily used in semiconductor manufacturing, optics and laser technology, life sciences, medical research, and aerospace engineering, to name just a few areas of application.

[0008] In addition to the aspect of the concentration of airborne particles or particles that can lead to undesirable contamination on technical surfaces, it is particularly important in areas of application where chemically and microbiologically sensitive measures are carried out to take appropriate precautions in order to be able to exclude chemical and / or microbiological contamination within a defined spatial area.

[0009] Typically, clean rooms and ultra-clean rooms are complex and technically sophisticated spaces, access to which is usually achieved via various airlock systems. Clean rooms are supplied with specially designed air conditioning units that ensure that contaminants are immediately removed from the air.

[0010] For cleanroom operation, particle measurements are conducted for classification and quality control purposes, allowing for a classification of the cleanliness of the room. The German industrial standard DIN EN ISO 14644-1:2016-06, for example, provides for a division into nine different cleanroom classes, ISO 1 to ISO 9. Corresponding cleanroom quality requirements with regard to food-relevant microorganisms per m 3 Air are regulated in the VDI 2083 guideline. A standardized number of germ-forming units (CFU) relevant for pharmaceutical cleanroom applications is regulated in the cleanroom classification according to the EU-GMT Guideline Annex 1.

[0011] Currently known measures for enabling production-related units or components, such as production and automation components, to be used quickly and without great effort in cleanroom or ultra-cleanroom environments are inadequate. Currently, no technical solutions exist for operating such units under cleanroom conditions, especially since the known protective measures cannot prevent self-contamination and, moreover, have inadequate cleanliness criteria and mechanical properties regarding stability, tear resistance, elongation, electrostatic dissipation, cleanability, and sterilizability. Description of the invention

[0012] The invention is based on the object of developing a device with a protective cover for a production unit, which is suitable and designed to enclose at least one region of the unit in such a way that the protective cover can separate a spatial area containing the at least one region of the unit from an environment immediately surrounding the protective cover, such that the protective cover meets the high standards of cleanliness requirements as stipulated in the German industrial standard DIN EN ISO 14644-1:2016-06. The device with a protective cover according to the solution is intended to avoid the disadvantages explained above with regard to the prior art and to enable rapid deployment of production and automation components within clean rooms or ultra-clean rooms.

[0013] Furthermore, a method is to be specified which enables the maintenance of a cleanliness-controlled spatial area outside the protective enclosure according to the solution, within which an above-mentioned production or automation component, in short a unit, is mounted and operated.

[0014] The solution to the problem underlying the invention is defined in claim 1. Claims 22 and 23 relate to preferred uses of the device. Claim 24 defines a method according to the invention for operating a manipulator unit under clean room conditions.

[0015] The device according to the solution with a protective covering for a production unit, for example in the form of a machine, a manipulator, a passive support structure or a handling unit, which is suitable and designed to enclose at least one region of the unit, so that the protective covering is able to separate a spatial region containing the at least one region of the unit from an environment immediately surrounding the protective covering, is characterized in that the protective covering has at least two layers, a first and a second, separated by a spacer layer, of which at least the first layer is made of a flow-permeable material. The spacer layer has a support structure which keeps the two layers at a distance and can be flowed through in the longitudinal extent of the layer, i.e. through which gas can flow, and which is preferably designed in the form of a spacer knitted fabric.Furthermore, at least one flow unit is provided which is fluidically connected to the spacer layer or to the spatial region in which the unit is contained.

[0016] In a preferred embodiment, the first and second layers each consist of textile material, wherein the first layer has a flow permeability in the range of 500 to 49000 m 3 / m 2 / h. In contrast, the second layer is impermeable to flow or largely impermeable to flow, ie it has a flow permeability of 0 to 100 m 3 / m 2 / h.

[0017] In this embodiment, the protective cover is mounted relative to the unit such that the flow-permeable first layer is oriented facing the unit.

[0018] Using a flow unit, preferably a filter-fan unit designed to produce ultra-pure air from ambient air, ultra-pure air is fed into the space between the protective enclosure and the unit. Alternatively, a technical gas can be fed into the space instead of ultra-pure air. For this purpose, the flow unit is connected to a technical gas reservoir.

[0019] By injecting ultrapure air or a technical gas, e.g., hydrogen peroxide (H2O2), into the room, a pressure difference develops between the room and the spacer layer within the protective shell, establishing a material flow from the room through the first, flow-permeable layer facing the unit into the spacer layer. The material flow, which may contain particle and / or molecular contamination, is removed from the spacer layer via a suitable fluidic discharge or drainage system or is appropriately purified. Since the second layer of the protective shell, facing the environment, i.e., the cleanroom area, is impermeable to flow, no contamination of any kind from the spacer layer enters the environment.

[0020] In combination with or as an alternative to the supply of ultrapure air or a technical gas into the space between the unit and the protective sheath, a further flow unit can be used which is fluidically connected to the spacer layer between the first and second layers and is preferably designed in the form of a suction unit or can be operated as a suction unit in order to generate a negative pressure within the spacer layer relative to the space. This negative pressure can be used to initiate a material flow from the space through the flow-permeable first layer into the spacer layer, driven or supported by the negative pressure. The material flow sucked through the spacer layer with the aid of the suction unit can be purified via a corresponding filter unit, which can be separate or combined with the flow unit, and can be supplied to the cleanroom environment or the space in the form of ultrapure air.Alternatively, the extracted material flow can be disposed of via an appropriate fluid line system.

[0021] The protective cover according to the solution, which in its simplest embodiment consists of two textile layers spaced apart by a spacer layer, each with different flow permeabilities, is preferably made of a flexible and elastic, contamination-free textile material so as not to impair the mobility of the production unit. Likewise, it is also conceivable to form the protective cover according to the solution using suitably rigid textile materials. Likewise, it is also possible to apply the protective cover directly to the surface of the unit. In one possible embodiment, it is also conceivable for the first layer of the protective cover facing the unit to be the surface of the unit itself.

[0022] A further preferred embodiment provides a third and a fourth layer, each separated from one another by a further spacer layer, of which the third and the above-described second layer are connected to one another via a joint or are manufactured in one piece, i.e., monolithically. The third and second layers are made of a flow-impermeable material, i.e., the respective textile layer material has a permeability of only 0 to 100 m 3 / m 2 / h. The fourth layer, however, is permeable to flow and has a flow permeability in the range between 500 and 49,000 m 3 / m 2 / h. The flow permeabilities of the first and fourth layers do not necessarily have to be identical and can differ from each other. Similar to the spacer layer in the previously explained embodiment, the additional spacer layer also has a supporting structure through which gas can flow along the length of the layer, preferably in the form of a spacer fabric. The function, arrangement relative to the unit, and the different operating modes of the protective cover designed according to the solution are explained in more detail below with reference to the figures.

[0023] Further multilayer combinations are also conceivable, in which two of the layer systems described above, each comprising the first to fourth layers with the two spacer layers arranged in between, are combined via one of their respective flow-permeable layers. In this way, the multilayer combinations can be scaled as required in terms of the number of layers.

[0024] So-called filter-fan units, which can be operated either with overpressure or with negative pressure, are preferably suitable as flow units for flow application or flow discharge into or from the multi-layer protective cover or into the space containing the production-technical unit in order to either specifically suck in and absorb contaminated material flows or, conversely, to specifically shield the contamination originating from the unit by feeding ultrapure air into the additional outer spacer layer.

[0025] Furthermore, filter-fan units are capable of generating ultra-clean air by sucking in ambient air through an appropriate filter selection.

[0026] In a further embodiment, the protective cover designed according to the invention provides at least one sensor on or within the individual layers, which is capable of detecting state variables within the protective cover designed according to the invention. Suitable sensors for this purpose include: particulate contamination sensor (PAC), molecular or chemical contamination sensor (MOC), temperature sensor (T), pressure sensor (p), humidity sensor (h), flow sensor, electrostatic sensor (ESD), and biocontamination sensor.

[0027] The sensors mounted in the respective layers or between the layers are electrically contacted with known rigid or elastic-flexible electrical conductor structures for electrical energy supply as well as signal supply and transmission, which do not or only insignificantly impair the elastic properties of the protective sheath.

[0028] The signals recorded by the sensors are fed to an evaluation and control unit, preferably arranged separately from the protective sheath, in which the sensor signals are evaluated in a suitable form and assigned suitable parameters. With the help of the sensors, contamination parameters such as particle number, particle size, degree of chemical contamination, etc., as well as parameters relating to the flow conditions within the spatial area encompassing the unit and within the respective spacer layer can be determined. In addition, deformations within the protective sheath as well as possible excessive material stresses, which can even lead to material failure, can be recorded. All of the recorded sensor signals advantageously serve to regulate or control the at least one turbo machine that is actively in fluid communication with the protective sheath.The pressure and flow conditions prevailing in the respective spacing layers or the spatial area are controlled by means of at least one turbo machine, preferably subject to a functionally and energy-optimized maintenance of the barrier effect by the protective cover.

[0029] A signal generated by the control or regulation unit, which can be transmitted for the regulation or control of at least one flow unit as well as the production unit for its operation, can preferably be transmitted to a higher-level AI software to ensure optimized functional monitoring and, if necessary, functional control of the protective cover designed according to the solution. Of course, all sensor signals and determined parameters can also be archived in a storage unit for quality monitoring and assurance.

[0030] In summary, the following advantages can be noted from the use of at least one sensor within the protective cover designed according to the solution: - Possibility of evaluating and predicting possible wear of the production unit as well as the protective cover according to the solution, - Possibility of continuous monitoring of the integrity and functionality of the textile protective cover according to the solution, - Possibility of monitoring the room conditions between the protective cover designed according to the solution and the production unit as well as monitoring the clean room conditions.

[0031] In addition, overheating of the enclosed production unit can be avoided by controlling or regulating the amount of ultrapure air or technical gas supplied to the room area.

[0032] Furthermore, within the framework of individual measurement cycles, which are carried out at intervals using the sensors placed on the protective cover, analyses and predictions can be made with which statements can be made about required maintenance measures as well as about the aging behavior of the protective cover designed according to the solution and the production-technical unit.

[0033] The protective cover according to the solution is preferably made exclusively of cleanroom-compatible materials, which ensures that no contamination can enter a cleanroom area from the protective cover.

[0034] In the same way that the protective cover is capable of maintaining or ensuring cleanroom conditions outside the protective cover despite the operation of a non-sterile production unit partially or completely enclosed by the protective cover, the protective cover designed according to the solution also protects the enclosed production unit from harmful influences that may arise from the surrounding area. To achieve this, the flow permeability of at least the first and second layers of the protective cover designed according to the solution must be selected appropriately.

[0035] Advantageously, but not necessarily, the protective cover designed according to the solution has consistent flow permeabilities across its surface within the individual layers. Depending on the intended use and the specific production unit to be enclosed, it may be advisable to provide directly adjacent surface areas of the protective cover with different flow permeabilities. For example, it is conceivable that the first layer facing the production unit, in areas where the unit has no or only negligible contamination risks, could use a textile layer area that has greater flow permeability than neighboring protective cover areas. In this way, flow-relevant cooling effects can be dimensioned to varying degrees.The same applies to the nature of the at least one spacer layer, in which a permeable support structure is incorporated, which can have different permeabilities in different areas.

[0036] The device according to the solution is particularly suitable for creating and / or maintaining a cleanliness-controlled spatial area inside or outside the spatial area separated by the protective cover.

[0037] In particular, the protective cover designed according to the solution is suitable for maintaining a cleanliness-controlled spatial area outside the protective cover, wherein a production-technology unit is contained within the protective cover, which is designed for use in the following areas: aerospace; optics; life sciences, including biochemistry, bioinformatics, biology, biomedicine, biophysics, bio- and genetic engineering, nutritional sciences, food technology, medicine, medical technology, pharmacy and pharmacology, environmental management and environmental technology; chemistry; automotive; microsystem technology; semiconductor technology; automation technology and energy industry.

[0038] The protective cover according to the solution is based on a method for operating the production unit under cleanroom conditions in the following way: First, the protective cover must be arranged around the production unit in such a way that the protective cover separates a spatial area containing the unit from an environment in which cleanroom conditions prevail, with the first layer of the protective cover oriented towards the unit. Subsequently, a relative negative pressure is generated within the spacer layer compared to a pressure prevailing in the spatial area, so that a material flow, driven by negative pressure, develops from the spatial area through the first layer into the spacer layer. Finally, the material flow escaping from the spacer layer must be removed and, preferably with the aid of a filter unit, converted into ultrapure air and fed into the cleanroom environment or disposed of accordingly.The further preferred modes of operation of the protective cover designed according to the solution are referred to in the figures in the following. Brief description of the invention

[0039] The invention is described below, without limiting the general inventive concept, using exemplary embodiments with reference to the drawings. They show: Fig. 1 schematic representation of a protective cover designed according to the solution and illustration of the operating principle, Fig. 2 schematic representation of a preferred embodiment for the realization of the protective cover designed according to the solution with four layers and two spacer layers, Fig. 3 schematically shown protective cover with sensors and Fig. 4 System arrangement with a protective cover designed according to the solution for the operation of a production-technical unit. Ways of implementing the invention, industrial applicability

[0040] Fig. Figure 1 shows a protective cover S designed according to the invention, comprising a first layer 1, a second layer 2, and a spacer layer 3, which supports the first and second layers 1, 2 at a distance a from each other. The first and second layers 1, 2 preferably consist of a purity-related textile material with a manufacturing-related flow permeability through the textile fabric. The first layer 1 has a flow permeability, preferably in a range between 500 and 49,000 m 3 / m 2 / h, whereas the second layer 2 is designed to be impermeable to flow, ie it has a flow permeability in the range of 0 and 100 m 3 / m 2 / h. For mechanical spacing of the first and second layers 1, 2, the spacer layer 3 has an inner support structure 4, preferably in the form of a spacer fabric, which has a virtually unhindered flowability in the layer's longitudinal extent s.

[0041] As an alternative to forming the second layer 2 by using a cleanliness-related textile material, it is also conceivable to use alternative cleanliness-related material, such as a plastic film.

[0042] The protective cover S designed according to the solution is arranged with its flow-permeable first layer 1 facing the production-technology unit 5 and is connected to it, preferably in a fixed manner, so that the protective cover S separates a spatial area 6 containing the unit 5 from the environment 7 surrounding the protective cover S, which corresponds to the clean room, i.e., seals it in a fluid-tight or contamination-free manner. The attachment of the protective layer S to the production-technology unit 5 or to sub-areas of the production-technology unit 5 is carried out using fastening means known per se, which are not the subject of this invention and are known to the person skilled in the art.

[0043] In addition, a flow unit 8 is provided, preferably in the form of a filter-fan unit, which is capable of producing ultra-pure air 11 from ambient air, which is fed into the spatial area 6 via a fluid line 9. The feed of the ultra-pure air 11 into the spatial area 6 leads to a pressure difference with the interior of the spacer layer 3, so that a material flow 10 is formed from the spatial area 6 through the first layer 1 into the spacer layer 3.

[0044] The amount of material flow 10 passing through the first layer 1 depends on the pressure difference between the spatial area 6 and the interior of the spacer layer 3 as well as on the choice of the flow permeability of the first layer 1.

[0045] The material flow 10 passing through the first layer 1 comprises, on the one hand, the supplied ultra-clean air, which is contaminated with particles or similar due to the operation of the production unit within the room area 6. In addition to particle contamination, the material flow can also be contaminated by chemical, biological or similar contamination, all of which pass through the first layer 1 and flow away within the spacer layer 3 for further discharge of the material flow 10'. Since the second layer 2 represents a barrier to the material flow 10 entering within the spacer layer 3, the environment 7 corresponding to the clean room is neither polluted nor contaminated. The material flow 10' flowing away along the layer's longitudinal extension s can be discharged without pressure via a non- Fig. 1 shown disposal line.

[0046] In a further embodiment, a further flow unit 8' is provided, which serves as a suction unit and is fluidically connected to the spacer layer 3. Via the flow unit 8' operating as a suction unit, the material flow 10' is discharged from the spacer layer 3 in a controlled manner by means of a predeterminable suction power. Advantageously, the flow unit 8', which is also designed as a filter-fan unit, can convert the contaminated material flow 10' into ultrapure air 11 through appropriate filtration, which is then returned to the environment 7, i.e., the clean room, or the room area 6, via a discharge line 12.

[0047] In addition to the protective function of the protective sheath S designed according to the solution, the protective sheath S can also serve to dissipate heat or cool the production unit 5 in operation, especially since the ultra-clean air supplied into the room area 6 can also dissipate heat through the first layer 1 and by flowing out along the spacer layer 3.

[0048] As an alternative to feeding ultrapure air 11 into the room area 6, it is suitable to feed in a technical gas, e.g. H2O2, by means of the flow unit 8, which in this case is connected to a corresponding technical gas reservoir, not shown.

[0049] Fig. 2 shows an extended embodiment of a protective cover S designed according to the solution, which consists of a doubling of the Fig. 1. The protective cover S has the layer arrangement shown in Fig. 2 comprises a first layer 1, a second layer 2, a third layer 13, and a fourth layer 14. For the sake of clarity, the second layer 2 and the third layer 13 are shown spaced apart from each other. Otherwise, they are joined to form a single layer or are formed in one piece, i.e., monolithic. The first layer 1 and the fourth layer 14 consist of a flow-permeable textile cleanroom material, each with a flow permeability between 500 and 49,000 m². 3 / m 2 / h. The second layer 2 and the third layer 13 are made of aerodynamically impermeable textile material. The additional spacer layer 15, enclosed between the third layer 13 and the fourth layer 14, has a supporting structure 4, similar to the spacer layer 3, which keeps the third and fourth layers 13, 14 spaced apart.

[0050] As if the representation in Fig. 1, the protective cover S is oriented with its first layer 1 facing the production unit 5, whereas the fourth layer 14 is oriented facing the environment 7, which corresponds to the clean room.

[0051] In order to avoid repetition, reference is made to the above explanations of the functioning of the flow units 8 and 8' with regard to the generation and supply of ultra-clean air 11 into the room area 6 or the controlled vacuum-driven discharge of the contaminated material flow 10' with the aid of the flow unit 8' and the optional processing to ultra-clean air 11.

[0052] Fluidically connected to the further spacer layer 15, which is delimited by the third and fourth layers 13, 14, is another flow unit 8", which is operated as a vacuum source and is capable of extracting a material flow 10" and optionally converting it into ultrapure air 11, which can be supplied to the environment 7 via a discharge line 12'. With the aid of the flow unit 8", which serves as a vacuum source, air L is sucked from the environment 7 through the fourth layer 14 into the further spacer layer 15. In this way, the environment 7, which corresponds to the clean room, experiences an additional cleaning effect.

[0053] Fig. 3 shows a protective cover S according to the Fig. 2, which is supplemented by at least one sensor 16 which is attached to or in the protective cover S. The Fig. The number of sensors 16 illustrated in Figure 3, as well as their locations for attachment to or in the protective cover S, illustrate preferred possibilities, which, however, do not limit the general inventive concept. The sensors 16 attached to or in the individual layers 1, 2, 3, 13, 14, 15 can be freely selected from the following types of sensors, depending on requirements: sensor for particulate contamination (PRC), sensor for molecular or chemical contamination (MOC), temperature sensor (T), pressure sensor (p), humidity sensor (h), flow sensor, electrostatic sensor (ESD), sensor for biocontamination, etc.

[0054] With the help of the sensors 16 attached to the protective sheath S, not only contamination parameters can be recorded, but also the condition of the protective sheath S, the clean room quality of the environment 7, and the functioning of the production unit 5 can be recorded and monitored. The sensor signals generated by the individual sensors 16 are fed to an evaluation and control unit 17, which can generate at least one signal 18 that can be used for a variety of further functions: For example, the signal 18 serves the controlled operation of the individual flow units 8, 8', 8'. Furthermore, the signal 18 can be used to control the production unit 5. Furthermore, the signal 18 can be used, using AI software or similar, to analyze and predict the protective function and reliability of the protective sheath in operation.

[0055] Fig. Figure 4 shows a schematic arrangement of the protective cover S around a production unit 5 for separating it from the environment 7, which is preferably designed as a clean room. It is assumed that the protective cover S is designed in the manner of the Fig. 3, see magnifying glass. The first layer 1 is oriented toward the production unit 5 and encloses the spatial area 6, whereas the fourth layer 14 is oriented toward the environment 7, i.e., the clean room. The spacer layers 3 and 15 located therebetween are separated by the flow-impermeable layers 2, 13.

[0056] Three flow units 8, 8', 8' are provided for operating the protective cover S. The flow unit 8 feeds ultrapure air 11 or a technical gas, preferably H2O2, into the spatial area 6, generating an overpressure there compared to the atmospheric pressure conditions generally prevailing in the environment 7. The flow unit 8' is fluidically connected to the spacer layer 3 and sucks away a contaminated material flow 10'. Similarly, the flow unit 8', serving as a suction unit, can suck away a material flow 10 from the further spacer layer 15.

[0057] The Fig. The protective cover arrangement S illustrated in Figure 4 provides a high level of contamination barrier safety and guarantees the cleanliness of the environment 7 while the production unit 5 is in operation.

[0058] The protective cover S with the sensors 16 integrated therein are preferably mounted, brought and / or slipped over the unit 5, e.g. robot, so that a fluidic enclosure is created around the unit 5.

[0059] The proposed device offers the following advantages in terms of cleanliness and hygiene (low emissions of the system elements, controlled interior with regard to particulate, chemical and microbiological contaminants): The flow units, in the form of a filter-fan unit, generate a defined volume flow to clean air qualities of air purity classes 1 to 9, as defined in ISO 14644-1.

[0060] Variants for defined flow guidance to ensure a defined overpressure / underpressure: - Implementation by at least one cleanliness-compliant textile or multi-layer cover, consisting of at least one layer, i.e., a first and second layer with a spacer layer in between. The permeability levels of the individual layers can be varied, depending on the cleanliness specifications to be met. - The cleanliness (assembly, commissioning) is achieved within a short time frame (quick assembly and dismantling).

[0061] Low inherent rigidity which means that the movement sequence is only minimally restricted. - The device for creating cleanliness is of low weight. - Use in cleanliness-controlled areas. - The device meets the cleanliness / hygiene requirements as described in the relevant standard families, such as ISO 14644, VDI 2083, cGMP classes A to D (limits the number of airborne germs). - The device allows for the components to be cleaned mechanically. - The device allows layer-specific exposure to technical gases, which can protect the environment, the product and the automation unit - Low adhesive forces between textile or multi-layer cover and automation components - The flow rate is adjustable, allowing individual zones to be individually designed and supplied with increased levels of ultrapure air, for example, depending on the degree of contamination. The same applies to other application areas or gases, e.g., for dissipating heat loads or maintaining a protective gas atmosphere. - The measurement methods allow a variety of analyses, both on the process, the condition of the automation unit and the condition of the actual system, thus achieving a high level of reliability and system stability. - The construction of the protective cover material in a product-specific design (with adjustable / configurable permeability): from completely closed (airtight) to semi-permeable to highly open in terms of flow technology.

[0062] The protective cover material, i.e. the material of the first to fourth layers, can also have the following additional properties: - electrostatically conductive covering material of the textile / multi-layer cover - low-particle casing material - low-outgassing casing material - microbicidal and sterilizable casing material - particle-absorbing or filtering cover material - without additional support structure - Complete extraction of the production plant, without additional hoses; quasi-integral extraction - quasi-integral extraction = the inside of the protective cover (facing the system / automation component) and the outside of the protective cover are extracted together into the interior of the spacer fabric. - Textile / multi-layer cover (spacer material) acts as an integral extraction - internal air-permeable rotation axis construction for negative pressure extraction - tight-fitting textile / multi-layer cover, minimal bulk and minimal restriction of movement - electrically conductive - fire retardant. List of reference symbols 1 first layer 2 second layer 3 spacer layer 4 Supporting structure / spacer fabric 5 production-technical unit 6 Room area 7 Environment, clean room 8, 8', 8'' flow unit 9 Fluid line 10, 10', 10'' material flow 11 Ultra-pure air 12, 12' derivative 13 third layer 14 fourth layer 15 additional spacer layers 16 sensors 17 Evaluation / control unit 18 Signal S protective cover L Air

Claims

[1] Device with a protective cover for a production-technical unit, which is suitable and designed to enclose at least one area of ​​the unit in such a way that the protective cover is able to separate a spatial area containing the at least one area of ​​the unit from an environment immediately surrounding the protective cover, characterized by that the protective cover has at least two, a first and a second, layers separated by a spacer layer, that at least the first layer is permeable to flow, that the spacer layer has a supporting structure that keeps the two layers at a distance and allows flow along the length of the layer, and that at least one flow unit is provided which is fluidically connected to the spacer layer or to the spatial region. [2] Device according to claim 1, characterized bythat at least the first layer is made of a textile material. [3] Device according to claim 1 or 2, characterized by that the at least first layer has a flow permeability in the range of 500 to 49000 m 3 / m 2 / h has. [4] Device according to one of claims 1 to 3, characterized by that the second layer has a flow permeability of 0 to 100 m 3 / m 2 / h has. [5] Device according to one of claims 1 to 4, characterized by that the first layer is oriented towards the unit. [6] Device according to one of claims 1 to 5, characterized by that the supporting structure is designed as a spacer fabric. [7] Device according to one of claims 1 to 6, characterized by that a third and a fourth layer are provided, separated by a further spacer layer, that the third layer is connected to the second layer via a joint or in one piece, that the fourth layer is permeable to flow, that the further spacing layer has a supporting structure that keeps the third and fourth layers at a distance and allows flow to pass through the layer's length. [8] Device according to claim 7, characterized by that at least one flow unit is provided which is fluidically connected to the further spacer layer. [9] Device according to claim 7 or 8, characterized by that at least one flow unit is provided which is fluidically connected to the spatial area. [10] Device according to one of claims 7 to 9, characterized by that the fourth layer and the first layer are made of the same material with the same material properties, that the third layer and the second layer are made of the same material with the same material properties, and that the spacer layer and the further spacer layer each have a supporting structure made of the same material with the same material properties. [11] Device according to one of claims 1 to 10, characterized by that the at least one flow unit is a filter-fan unit that can be operated as a negative or positive pressure source. [12] Device according to claim 11, characterized by that the at least one filter-fan unit operable as an overpressure source provides a flow inlet connected to a gas reservoir, into which ambient air can alternatively be sucked, and a flow outlet fluidically connected to the spatial region or the and / or the further spacer layer. [13] Device according to claim 11, characterized bythat the filter-fan unit is designed to produce ultra-clean air according to DIN EN ISO 14644-1:2016-06 from ambient air and the fluidic connection between the flow outlet and the room area or the spacer layer is manufactured as a hollow duct made of a cleanroom-compatible material according to DIN EN ISO 14644-14:2017-01 [14] Device according to one of claims 1 to 13, characterized by that at least the first and second layers are made exclusively from at least one cleanroom-compatible material that is suitable for directly delimiting a cleanroom of ISO classes 1 to 9 according to DIN EN ISO 14644-1:2016-06. [15] Device according to one of claims 1 to 14, characterized by that at least one sensor of the following type is attached to at least the first layer, second layer and / or spacer layer: Particulate contamination sensor (PAC), molecular or chemical contamination (MOC), temperature sensor (T), pressure sensor (p), humidity sensor (h), flow sensor, electrostatic sensor (ESD), biocontamination sensor. [16] Device according to claim 15, characterized by that the at least one sensor is connected to an evaluation and control or regulating unit which generates at least one signal which can be transmitted to a higher-level software and / or to the at least one flow unit and / or to the unit. [17] Device according to one of claims 1 to 16, characterized by that at least regions of at least the first and second layers and the spacer layer are made of flexible and / or elastic material. [18] Device according to one of claims 1 to 17, characterized by that at least the first layer has at least two surface areas in which the flow permeability through the first layer differs from one another. [19] Device according to one of claims 1 to 18, characterized by that at least the spacer layer has at least two layer regions in which the permeability differs from one another in the longitudinal extent of the layer. [20] Device according to one of claims 1 to 19, characterized by that the first layer is part of a surface of the production unit. [21] Device according to one of claims 1 to 20, characterized by that the production unit is a machine, a manipulator, a passive support structure or a handling unit. [22] Use of the device according to one of claims 1 to 21 for creating and / or maintaining a purity-controlled spatial area inside or outside the spatial area separated by the protective cover. [23] Use of the device according to one of claims 1 to 21 for maintaining a purity-controlled spatial area outside the protective cover, wherein a production-technical unit is contained within the protective cover, which is designed to be suitable for use in the following areas: aerospace; optics; life sciences, including biochemistry, bioinformatics, biology, biomedicine, biophysics, bio- and genetic engineering, nutritional sciences, food technology, medicine, medical technology, pharmacy and pharmacology, environmental management and environmental technology; chemistry; automotive; microsystems technology; semiconductor technology; automation technology and energy industry. [24] Method for operating a production unit under clean room conditions with a device according to one of claims 1 to 21, characterized by the combination of the following process steps: - Arranging the protective cover around the unit in such a way that the protective cover separates a spatial area containing the unit from an environment in which clean room conditions prevail, and the first layer of the protective cover faces the unit, - generating a relative negative pressure within the spacer layer compared to a pressure prevailing in the spatial area such that a material flow driven by negative pressure is formed from the spatial area through the first layer into the spacer layer and - Discharge of a material flow escaping from the spacer layer. [25] Method according to claim 24, characterized by that the discharge of the material flow is controlled. [26] Method according to claim 24 or 25, characterized by that the discharged material flow is cleaned and fed into the environment in the form of ultra-clean air or disposed of. [27] Method according to one of claims 24 to 26, characterized bythat the generation of the negative pressure and the removal of the material flow from the spacer layer takes place by means of a controlled flow unit. [28] Method according to one of claims 24 to 26 and for operating a production unit under clean room conditions with a device according to one of claims 7 to 20, characterized by that the protective cover is arranged around the unit in such a way that the first layer directly faces the spatial area containing the unit, that the room area is supplied with ultrapure air and / or a technical gas in a controlled manner, that a relative negative pressure is formed within the spacer layer compared to the spatial area, through which a material flow from the spatial area through the first layer into the spacer layer is formed, and that the material flow entering the spacer layer is discharged. [29] Method according to claim 28, characterized by that a relative negative pressure is formed within the further spacer layer compared to the environment immediately surrounding the protective cover, through which a material flow from the environment through the fourth layer into the further spacer layer is formed, and that the material flow entering the further spacer layer is discharged. [30] Method according to claim 28 or 29, characterized by that the supply of ultrapure air and / or a technical gas to the room area and the removal of the material flow from the spacer layer and / or the further spacer layer are each carried out using controlled, coordinated flow units. [31] Method according to one of claims 27 to 30, characterized bythat the controlled operation of the flow units is based on sensor signals originating from at least one sensor of the following type attached to the protective sheath: particulate contamination sensor (PAC), molecular or chemical contamination sensor (MOC), temperature sensor (T), pressure sensor (p), humidity sensor (h), flow sensor, electrostatic sensor (ESD), biocontamination sensor.

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