Bulk Refill Container

JP1809153SActive Publication Date: 2025-09-25ASM IP HLDG BV
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Patent Information

Application Number
JP2025011936D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-12-27
Filing Date
2025-06-17
Publication Date
2025-09-25
Estimated Expiration
2050-06-17

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Abstract

The article is a container for holding bulk (i.e., large quantities) of replenishment chemicals used in the processing of substrates, such as semiconductor substrates. Chemical supply lines are provided on the planar side of the article to supply the chemicals from within the article to an external platform for processing substrates, such as semiconductor substrates.
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