Workpiece conveyance apparatus, cylindrical grinding apparatus, and deviation amount correction method

Abstract

To provide a workpiece conveyance apparatus capable of automatically clamping a workpiece between a spindle unit (spindle pipe sleeve) and a tail unit (tail pipe sleeve) in a state in which the crystal axis of the workpiece and the rotation axis of a cylindrical grinding apparatus coincide.SOLUTION: The workpiece conveyance apparatus includes: a clamp mechanism 250 including a pair of claw sections 261a, 261b that clamps a workpiece; a turning mechanism configured to turn the clamp mechanism in a state of clamping the workpiece; and an X-ray apparatus configured to measure a crystal plane orientation of the workpiece clamped between a spindle pipe sleeve and a tail pipe sleeve of a cylindrical grinding apparatus main body in a state in which a center axis of the workpiece and a rotation axis of the cylindrical grinding apparatus main body coincide, and output a correction value for correcting a deviation amount of a crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present disclosure relates to a workpiece transport device, a cylindrical grinding device, and a misalignment correction method. [Background technology]

[0002] A cylindrical grinding machine for grinding a cylindrical workpiece is known (see, for example, Patent Document 1). Also, a method for measuring crystal orientation is known (see, for example, Patent Document 2). In response to this, the present inventors have studied a cylindrical grinding machine capable of performing predetermined processing (for example, grinding the outer peripheral surface of the workpiece, additional processing such as flat surface (OF) or V-shaped notches) on cylindrical workpieces of various diameters and lengths (lengths in the central axis direction) so as to satisfy predetermined processing conditions. In a factory where a cylindrical grinding machine is installed, cylindrical workpieces of various diameters and lengths (lengths in the central axis direction) are stored, and it is required that the corresponding workpiece taken out from the storage location as necessary is clamped between the spindle unit (spindle jaw) and the tail unit (tail jaw) of the cylindrical grinding machine, and the clamped workpiece is subjected to predetermined processing so as to satisfy predetermined processing conditions. At that time, it is desirable that the workpiece is clamped between the spindle unit (spindle jaw) and the tail unit (tail jaw) in a state in which the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding machine.

[0003] For this reason, conventionally, the crystal axis of the workpiece is measured using a crystal orientation measuring device (e.g., model SU-021, manufactured by Toshiba IT Control Systems Corporation) as an X-ray device, and the misalignment between this measured crystal axis and the rotation axis of the cylindrical grinding machine is corrected, and then the corrected workpiece is re-clamped between the spindle unit (spindle nozzle) and tail unit (tail nozzle) of the cylindrical grinding machine. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2009-190142 A [Patent Document 2] JP 2000-266697 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, the measurement of the crystal axis of the workpiece, the correction of the amount of deviation, and the re-clamping must be performed manually, which poses a problem of a heavy workload.

[0006] The present disclosure has been made to solve such problems, and aims to provide a workpiece transport device, a cylindrical grinding device, and a misalignment correction method that can automatically clamp a workpiece between a spindle unit (spindle nozzle) and a tail unit (tail nozzle) while the crystal axis of the workpiece and the rotation axis of the cylindrical grinding device are aligned. [Means for solving the problem]

[0007] The workpiece conveying device according to the present disclosure is A workpiece conveying device that conveys a cylindrical workpiece to be machined to a cylindrical grinding device body, A clamping mechanism having a pair of claws for clamping the workpiece; A turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the workpiece clamped between a spindle jaw and a tail jaw of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X-axis, the axis perpendicular to the X-axis is defined as the Y-axis, and the axis perpendicular to the plane including the X-axis and the Y-axis is defined as the Z-axis, The rotation mechanism rotates the clamping mechanism, while it is clamping the workpiece, by an angle corresponding to the correction value around a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0008] With this configuration, it is possible to provide a work transport device that can automatically clamp the work between the spindle unit (spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the work with the rotation axis of the cylindrical grinding device.

[0009] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0010] In addition, in the above workpiece transport device, The claw moving mechanism may clamp the workpiece by moving the pair of claws in a direction approaching each other in the Y-axis direction and abutting the pair of claws against an outer peripheral surface of the workpiece.

[0011] In addition, in the above workpiece transport device, The moving mechanism includes: a first moving mechanism that moves the clamp mechanism in the Z-axis direction; a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the Y-axis direction; The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the X-axis direction.

[0012] In addition, in the above workpiece transport device, The moving mechanism includes: a first moving mechanism that moves the clamp mechanism in the Z-axis direction; a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the X-axis direction; The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the Y-axis direction.

[0013] In addition, in the above workpiece transport device, Each of the pair of claw portions may have a first abutment portion that abuts against a lower portion of the workpiece and a second abutment portion that abuts against an upper portion of the workpiece when the pair of claw portions move in a direction approaching each other.

[0014] In addition, in the above workpiece transport device, The pair of claw portions may have tapered surfaces that open toward each other in a V-shape and function as the first contact portion and the second contact portion, respectively.

[0015] In addition, in the above workpiece transport device, The moving mechanism may move the clamping mechanism that clamps the workpiece until a central axis of the workpiece coincides with a rotation axis of the cylindrical grinding device body between a main shaft and a tail of the cylindrical grinding device body.

[0016] In addition, in the above workpiece transport device, The moving mechanism may further move the clamping mechanism that clamps the workpiece until one end face of the workpiece abuts against the spindle.

[0017] In addition, in the above workpiece transport device, The pair of claw portions may clamp a center of the workpiece.

[0018] The cylindrical grinding device according to the present disclosure is A cylindrical grinding device body, A cylindrical grinding machine including a workpiece conveying device that conveys a cylindrical workpiece to be processed to the cylindrical grinding machine body, The workpiece transport device is A clamping mechanism having a pair of claws for clamping the workpiece; A turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the workpiece clamped between a spindle jaw and a tail jaw of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X-axis, the axis perpendicular to the X-axis is defined as the Y-axis, and the axis perpendicular to the plane including the X-axis and the Y-axis is defined as the Z-axis, The rotation mechanism rotates the clamping mechanism, while it is clamping the workpiece, by an angle corresponding to the correction value around a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0019] With this configuration, it is possible to provide a cylindrical grinding device that can automatically clamp the workpiece between the spindle unit (spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the workpiece with the rotation axis of the cylindrical grinding device.

[0020] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0021] The misalignment correction method according to the present disclosure includes: A method for correcting a misalignment amount of the clamped workpiece relative to a rotation shaft of the cylindrical grinding machine body by using the workpiece transport device, comprising: a measurement process in which a cylindrical workpiece to be machined is clamped in a state in which a spindle jaw of a cylindrical grinding device body is in contact with a top end face of the cylindrical workpiece and a tail jaw of the cylindrical grinding device body is in contact with a bottom end face of the workpiece, and the crystal plane orientation of the workpiece is measured while the workpiece is positioned at a reference position and rotated a predetermined angle from the reference position, and a correction value is output to correct the amount of deviation of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; and a deviation amount correcting step of controlling the turning mechanism so as to eliminate the deviation amount.

[0022] With this configuration, it is possible to provide a misalignment correction method that can automatically clamp the workpiece between the spindle unit (spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the workpiece with the rotation axis of the cylindrical grinding device.

[0023] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0024] In the above-mentioned misalignment correction method, The first measuring step, the second measuring step, the misalignment amount calculation step, and the misalignment amount correction step may be repeatedly performed until the misalignment amount of the workpiece after the misalignment amount correction step becomes equal to or less than a set value.

[0025] In the above-mentioned misalignment correction method, the amount of deviation is a deviation angle of a central axis of the workpiece relative to a rotation axis of the cylindrical grinding machine body, The misalignment amount correcting step may include controlling the turning mechanism so that the clamping mechanism that clamps the workpiece turns by the misalignment angle. Effect of the Invention

[0026] The present disclosure makes it possible to provide a workpiece transport device, a cylindrical grinding device, and a method for correcting misalignment that can automatically clamp a workpiece between a spindle unit (spindle jaw) and a tail unit (tail jaw) while the crystal axis of the workpiece and the rotation axis of the cylindrical grinding device are aligned. [Brief description of the drawings]

[0027] [Figure 1] FIG. 1 is a perspective view of a cylindrical grinding device 1. [Diagram 2] FIG. [Diagram 3] 1 is a schematic configuration diagram of a cylindrical grinding device main body 100. FIG. [Figure 4] (a) is a diagram showing the state in which the workpiece W is clamped between the spindle unit 110 (spindle nozzle 111) and the tail unit 120 (tail nozzle 121) (when the central axis AXW of the workpiece W is aligned with the rotation axis AX100), and (b) is a diagram showing the state in which the workpiece W is clamped between the spindle unit 110 (spindle nozzle 111) and the tail unit 120 (tail nozzle 121) (when the central axis AXW of the workpiece W is misaligned by an angle θ with respect to the rotation axis AX100). [Diagram 5] (a) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW coinciding with the rotation axis AX100; (b) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW misaligned by an angle θ with respect to the rotation axis AX100; (c) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW misaligned by an angle θ with respect to the rotation axis AX100. [Figure 6] 1A is a diagram showing how the circle grinding unit 130 performs circle grinding or orientation flat (orientation flat) processing on the workpiece W, and FIG. 1B is a diagram showing how the notch unit 140 performs notch processing on the workpiece W. FIG. [Figure 7] FIG. 2 is a perspective view of the workpiece transport device 200. [Figure 8]8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and the associated configuration (the second movable frame 230, etc.) extracted from FIG. 7. [Figure 9] 8 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated configuration (second movable frame 230, etc.) extracted from FIG. 7. FIG. [Figure 10] 8 is a perspective view of a third movable frame 240 and its associated configuration (clamp mechanism 250, etc.) extracted from FIG. 7. FIG. [Figure 11] 1 is an example of a rotation mechanism (rotation motor 260) that rotates the clamp mechanism 250. [Figure 12] FIG. 2 is a perspective view of a clamp mechanism 250. [Figure 13] 13 is a schematic diagram showing a state in which a workpiece W is clamped by a pair of claw portions 251a and 251b. [Figure 14] FIG. 13 is a perspective view of a sensor attached to a pair of claw portions 251a and 251b. [Figure 15] 13 is a schematic diagram showing how the length L of the workpiece W is measured by a sensor attached to a pair of claw portions 251a, 251b. FIG. [Figure 16] FIG. 2 is a system configuration diagram including a control device 300. [Figure 17] 4 is a flowchart of an example of the operation of the cylindrical grinding device 1. [Figure 18] FIG. 1 is a perspective view of a cylindrical grinding machine 1 installed in a factory. [Figure 19] 11A to 11C are diagrams for explaining the operation of the clamp mechanism 250. [Figure 20] 11A to 11C are diagrams for explaining the operation of the clamp mechanism 250. [Figure 21] 4A to 4C are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. [Figure 22] 4A to 4C are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. [Diagram 23] 13 is a flowchart of a deviation amount measuring process. [Figure 24]This is a diagram showing that the workpiece W is rotated by 90 degrees at a time. [Diagram 25] 13 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom-side end face Wb. [Figure 26] 24 is a table summarizing the measured values ​​Δct, Δcb, θ, and ΔY of each workpiece WW3-W1, WW2-W4, WW1-W3, and WW4-W2 measured as a result of the processing of FIG. 23. [Figure 27] 13 is a flowchart of a misalignment amount correction process. [Figure 28] FIG. 17(a) is a diagram for explaining the movement directions of the movable frames 220, 230, 240 of the cylindrical grinding apparatus 1, and FIG. 17(b) is a diagram for explaining the movement directions of the movable frames 220, 230, 240 of a modified cylindrical grinding apparatus 1. [Figure 29] 11A and 11B are diagrams for explaining a specific example 1 of the misalignment amount correction process. [Diagram 30] 11A and 11B are diagrams for explaining a specific example 2 of the misalignment amount correction process. [Diagram 31] 13A to 13C are diagrams for explaining a specific example 3 of the misalignment amount correction process. [Diagram 32] 13A and 13B are diagrams for explaining a specific example 4 of the misalignment amount correction process. [Diagram 33] 13 is a diagram for explaining a specific example 5 of the misalignment amount correction process. FIG. [Diagram 34] 13 is a diagram for explaining a specific example 6 of the misalignment amount correction process. FIG. [Diagram 35] 10 is a flowchart of another operation example of the cylindrical grinding device 1. [Diagram 36] This is an oblique view showing a state in which the workpiece W is clamped between the spindle jaw 111 (spindle 101) and the tail jaw 121 (tail 102) with the central axis AXW of the workpiece W aligned with the rotation axis AX100 of the cylindrical grinding device body 100. [Figure 37] 13 is a flowchart of a surface orientation measurement process. [Figure 38] 1 is a diagram showing a state in which an X-ray device 150 irradiates a workpiece W with X-rays and measures its surface orientation. [Figure 39]13 is a flowchart of a rotation angle / swing angle correction process. [Diagram 40] 1 is a diagram showing a state in which an X-ray device 150 irradiates a workpiece W with X-rays and measures its surface orientation. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] (Embodiment 1) Hereinafter, a cylindrical grinding device 1 according to a first embodiment of the present disclosure will be described with reference to the accompanying drawings. In each drawing, corresponding components are given the same reference numerals, and duplicated explanations will be omitted. <Cylindrical grinding machine 1> FIG. 1 is a perspective view of a cylindrical grinding machine 1. As shown in FIG.

[0029] As shown in Fig. 1, the cylindrical grinding machine 1 includes a cylindrical grinding machine main body 100, a workpiece transport device 200, and a control device 300 that controls the cylindrical grinding machine main body 100 and the workpiece transport device 200. In Fig. 1, the reference symbol AX 100 indicates a rotation axis (machining axis) of the cylindrical grinding device main body 100. Hereinafter, the rotation axis AX 100 It is called. <Work W> First, a configuration example of the cylindrical workpiece W to be machined will be described.

[0030] FIG. 2 is a perspective view of the workpiece W.

[0031] The workpiece W is, for example, a single crystal silicon ingot (for example, a silicon ingot that has been cylindrically ground) or a cylindrical workpiece (also called a block) cut from the single crystal silicon ingot. The workpiece W is aligned along its central axis AX W The workpiece W has a top end surface Wt and a bottom end surface Wb that are perpendicular to the workpiece W. The workpiece W has various diameters D and various lengths L (center axis AX W directional length) can be used. <Cylindrical grinding device body 100> Next, a configuration example of the cylindrical grinding device main body 100 will be described.

[0032] FIG. 3 is a schematic diagram of the cylindrical grinding device main body 100. As shown in FIG.

[0033] For the sake of convenience, the X, Y and Z axes are defined below as shown in FIG. 1. The X axis corresponds to the rotation axis AX of the cylindrical grinding machine body 100. 100 The Y-axis extends in a direction perpendicular to the X-axis (horizontal axis). The Z-axis extends in a direction perpendicular to the plane containing the X-axis and Y-axis (vertical axis).

[0034] The cylindrical grinding device main body 100 is a known cylindrical grinding device capable of performing a predetermined processing on the workpiece W so as to satisfy predetermined processing conditions. The processing conditions are, for example, the amount of grinding of the outer peripheral surface of the workpiece W, and whether or not additional processing such as a chamfered surface (OF) or a V-shaped notch is performed, and are input by an operator via, for example, the operation device 400. The predetermined processing is, for example, grinding of the outer peripheral surface of the workpiece, and additional processing such as a chamfered surface (OF) or a V-shaped notch.

[0035] As shown in FIG. 3, the cylindrical grinding machine main body 100 includes a spindle unit 110, a tail unit 120, a cylindrical grinding unit 130, a notch unit 140, an X-ray device 150, and the like.

[0036] The spindle unit 110 is installed in a state where it is fixed to the floor surface, while the tail unit 120 is installed in a state where it is movable in the X-axis direction.

[0037] FIG. 4(a) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121) (center axis AX of the workpiece W). W and rotation axis AX 100 4B shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121) (when the central axis AX of the workpiece W is the same as the axis AX of the tail unit 120). W is the axis of rotation AX 100 (When there is an angle θ deviation from the

[0038] As shown in FIG. 4(a), the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121).

[0039] At this time, the mating surface between the spindle jaw 111 and the rotating shaft rotated by the spindle motor 113 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), W is the axis of rotation AX 100 Even if the spindle jaws 111 are inclined at an angle θ with respect to the top end face Wt of the workpiece W, the spindle jaws 111 rotate following the top end face Wt of the workpiece W and abuts (comes into close contact with) the top end face Wt.

[0040] Similarly, the mating surface between the tail jaw 121 and the rotating shaft rotated by the tail motor 123 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), W is the axis of rotation AX 100 Even if the tail jaw 121 is inclined at the angle θ with respect to the bottom end face Wb of the work W, the tail jaw 121 rotates following the bottom end face Wb of the work W and abuts (comes into close contact with) the bottom end face Wb.

[0041] 3, the spindle unit 110 includes a spindle mouthpiece 111, a spindle body 112, and a spindle motor 113. The spindle mouthpiece 111 is rotated by the spindle motor 113 to rotate a rotary shaft AX 100 The main shaft motor 113 is, for example, a servo motor.

[0042] The tail unit 120 includes a tail base 121, a tail body 122, and a tail motor 123. The tail base 121 is rotated by the tail motor 123 around a rotation axis AX 100 The tail motor 123 is attached to a rotating shaft that rotates around a center. The tail motor 123 is, for example, a servo motor. The main shaft motor 113 and the tail motor 123 are controlled so as to rotate in synchronization with each other.

[0043] The workpiece W is aligned along its central axis AXW and rotation axis AX 100 It is desirable that the main shaft ferrule 111 and the tail ferrule 121 are clamped together in such a manner that the central axis AX W and rotation axis AX 100 In some cases, the main shaft ferrule 111 and the tail ferrule 121 may be clamped in a state where they are not aligned (see FIG. 5(b) and FIG. 5(c)).

[0044] FIG. 5(a) shows a state in which a workpiece W is aligned along its central axis AX W and rotation axis AX 100 FIG. 5(b) shows a state in which the workpiece W is clamped between the main shaft jaw 111 and the tail jaw 121 in a state in which the central axis AX W is the axis of rotation AX 100 FIG. 5(b) shows the state in which the workpiece W is clamped between the spindle jaw 111 and the tail jaw 121 with the workpiece W being misaligned at an angle θ with respect to the center point CP (center axis AX W The center point above is the rotation axis AX 100 The rectangle A1 in Fig. 5(b) is drawn with a dotted line and represents the workpiece W in Fig. 5(a).

[0045] Similarly, FIG. 5(c) shows a case where the workpiece W is rotated along its central axis AX W is the axis of rotation AX 100 FIG. 5(c) shows the state in which the workpiece W is clamped between the spindle jaw 111 and the tail jaw 121 with an angle of θ deviation from the center point CP (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the axis of rotation AX 100 The workpiece W is located at a position shifted ΔY in the Y-axis direction from the center point CP, and is shifted by an angle θ from the center point CP. The shift angle θ and shift distance ΔY are corrected as described below. The rectangle A2 drawn by the dotted line in Fig. 5(c) represents the workpiece W in Fig. 5(b).

[0046] In addition, in FIG. 5(b) and FIG. 5(c), Δct is the distance between the center of the top end face Wt and the rotation axis AX 100On the other hand, Δcb represents the distance between the center of the bottom end face Wb and the rotation axis AX 100 ΔY can be calculated by Δct-Δcb. In the case of FIG. 5(b), that is, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 On the other hand, in the case of FIG. 5(c), that is, when the center point CP of the workpiece W is the true center, the relationship Δct = Δcb holds. W The center point above is the rotation axis AX 100 If not, the relationship is Δct>Δcb (or Δct<Δcb).

[0047] The grinding unit 130 is a device for performing grinding or orientation flat (orientation flat) processing on the workpiece W clamped between the spindle jaw 111 and the tail jaw 121, and is held by a grinding base 132. The grinding unit 130 is equipped with a grinding wheel 131 and a grinding motor 133 that rotates the grinding wheel 131.

[0048] FIG. 6(a) is a diagram showing a state in which the circle grinding unit 130 performs circle grinding or orientation flat (orientation flat) processing on the workpiece W.

[0049] The grinding wheel 131 rotated by the grinding motor 133 cuts into the rotating workpiece W by the grinding amount x1 inputted and instructed to perform grinding (cylindrical grinding mode). On the other hand, the grinding unit 130 cuts into the non-rotating workpiece W by the grinding amount x1 inputted and instructed to perform orientation flat (orientation flat grinding mode).

[0050] The notch unit 140 is a device for performing notch processing on the workpiece W clamped between the spindle jaw 111 and the tail jaw 121, and is held by a notch frame 142. The notch unit 140 includes a notch grindstone 141, a notch motor 143 that rotates the notch grindstone 141, and the like.

[0051] 6(b) is a diagram showing the state in which the notch unit 140 performs notch processing on the workpiece W. The notch grindstone 141 rotated by the notch motor 143 cuts into the non-rotating workpiece W by an input commanded grinding amount x2 to perform orientation flat processing.

[0052] The X-ray device 150 is a device for measuring the crystal plane orientation of the workpiece W, and is provided so as to be movable in the X-axis direction. For example, a crystal orientation measuring device (manufactured by Toshiba IT Control Systems Corporation, model SU-021) can be used as the X-ray device 150. This crystal orientation measuring device simultaneously measures the cut plane orientation (axial orientation) of the workpiece W before it is processed into a wafer, and the crystal orientation of the V-notch. <Work transport device 200> Next, a configuration example of the workpiece transport device 200 will be described.

[0053] FIG. 7 is a perspective view of the workpiece transport device 200.

[0054] As shown in Figure 7, the work transport device 200 comprises a fixed frame 210 supported by four vertical pillars 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 so as to be movable in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 so as to be movable in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 so as to be movable in the Z-axis direction, and a clamp mechanism 250 fixed to the third movable frame 240. <Fixed Frame 210> The fixed frame 210 is a rectangular frame formed by combining a pair of first frames 211a, 211b extending in the X-axis direction and a pair of second frames 212a, 212b extending in the Y-axis direction.

[0055] The four vertical pillars 201 supporting the fixed frame 210 are fixed to the floor surface by anchors (not shown) with their lengths in the Z-axis direction adjusted by adjusters (not shown) provided at the bottoms of the vertical pillars so that the fixed frame 210 is horizontal. Each vertical pillar 201 is fixed to the cylindrical grinding machine body 100 by fastening members such as bolts. <First movable frame 220> As shown in FIG. 7, the first movable frame 220 is a rectangular frame configured by combining a pair of third frames 221a, 221b extending in the X-axis direction and a pair of fourth frames 222a, 222b extending in the Y-axis direction.

[0056] The first movable frame 220 is attached to the fixed frame 210 so as to be slidable in the X-axis direction. Specifically, the first movable frame 220 is attached to guide rails 223a, 223b extending in the X-axis direction and provided on the upper surface of the fixed frame 210 (first frames 211a, 211b) so as to be slidable.

[0057] The first movable frame 220 moves in the X-axis direction along the guide rails 223a, 223b as a ball screw 224 extending in the X-axis direction and connected to the first movable frame 220 is rotated forward and backward by a drive motor 225 (e.g., a servo motor) attached to the fixed frame 210 (first frame 211a).

[0058] The guide rails 223a, 223b, the ball screw 224, and the drive motor 225 constitute a movable frame moving mechanism M that moves the first movable frame 220 in the X-axis direction. 220 The movable frame moving mechanism M 220 is an example of the first moving mechanism of the present disclosure. <Outer diameter measurement mechanism 270> FIG. 8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and the associated configuration (the second movable frame 230, etc.) extracted from FIG.

[0059] As shown in FIG. 8, an outer diameter measuring mechanism 270 is provided on the first movable frame 220 (fourth frame 222a).

[0060] The outer diameter measuring mechanism 270 is a device that measures the outer diameter of the workpiece W clamped between the spindle jaw 111 and the tail jaw 121 (the outer diameters of the top end face Wt and the bottom end face Wb).

[0061] The outer diameter measuring mechanism 270 includes a lift frame 271, measuring arms 272a, 272b, probes 273a, 273b, and a carriage 274 to which these are attached.

[0062] The carriage 274 is slidably attached to a guide rail 275 extending in the Z-axis direction, which is provided on the first movable frame 220 (fourth frame 222a) side.

[0063] The outer diameter measurement mechanism 270 (measuring probes 273a, 273b, etc.) moves (lifts and lowers) in the Z-axis direction along the guide rail 275 as a ball screw (not shown) extending in the Z-axis direction and connected to the outer diameter measurement mechanism 270 is rotated forward and backward by a drive motor 276 (e.g., a servo motor) attached to the first movable frame 220 (third frame 221a) side.

[0064] Although not shown, the outer diameter measurement mechanism 270 includes a first probe moving mechanism that moves one measuring arm 272a (and probe 273a) in the Y-axis direction, and a second probe moving mechanism that moves the other measuring arm 272b (and probe 273b) in the Y-axis direction. The first probe moving mechanism and the second probe moving mechanism each include a probe drive motor (e.g., a servo motor). By controlling each probe drive motor, each of the probes 273a, 273b moves individually in the Y-axis direction.

[0065] According to the outer diameter measuring mechanism 270, the probes 273a, 273b move individually in the Y-axis direction and contact the outer peripheral surface of the workpiece W, thereby making it possible to acquire the position (position data) of each contact point. Then, the control device 300 executes a predetermined calculation based on these positions (position data), thereby making it possible to measure (calculate) the outer diameter of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 (the outer diameters of the top end face Wt and the bottom end face Wb of the workpiece W), etc. <Second movable frame 230> FIG. 9 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated configuration (second movable frame 230, etc.) extracted from FIG.

[0066] As shown in FIG. 9, the second movable frame 230 is a rectangular tubular frame extending in the Z-axis direction.

[0067] The second movable frame 230 is attached to the first movable frame 220 so as to be slidable in the Y-axis direction. Specifically, the second movable frame 230 is attached to guide rails 231a, 231b extending in the Y-axis direction and provided on the upper surface of the first movable frame 220 (fourth frames 222a, 222b) so as to be slidable.

[0068] The second movable frame 230 moves in the Y-axis direction along the guide rails 231a, 231b as a ball screw 232 extending in the Y-axis direction and connected to the second movable frame 230 is rotated forward and backward by a drive motor 233 (e.g., a servo motor) attached to the first movable frame 220 (fourth frame 222b).

[0069] The guide rails 231a and 231b, the ball screw 232, and the drive motor 233 constitute a movable frame moving mechanism M that moves the second movable frame 230 in the Y-axis direction. 230 The movable frame moving mechanism M 230 is an example of the second moving mechanism of the present disclosure. <Third movable frame 240> FIG. 10 is a perspective view of the third movable frame 240 and its associated configuration (clamp mechanism 250, etc.) extracted from FIG.

[0070] The third movable frame 240 is a rectangular tubular frame extending in the Z-axis direction, and is disposed within the second movable frame 230, which is also a rectangular tubular frame extending in the Z-axis direction.

[0071] The third movable frame 240 is attached to the second movable frame 230 so as to be slidable in the Z-axis direction. Specifically, the third movable frame 240 is attached so as to be slidable on guide rails 241a, 241b (see FIG. 10) attached to one inner surface of the second movable frame 230 and extending in the Z-axis direction, and a guide rail (not shown) attached to the other inner surface.

[0072] The third movable frame 240 (and the clamp mechanism 250 attached thereto) moves in the Z-axis direction along guide rails 241a, 241b, etc. as a ball screw (not shown) extending in the Z-axis direction and connected to the third movable frame 240 is rotated forward and backward by a drive motor 242 (e.g., a servo motor) attached to the second movable frame 230.

[0073] The guide rails 241a, 241b, a ball screw (not shown), and a drive motor 242 constitute a movable frame moving mechanism M that moves the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction. 240 The movable frame moving mechanism M 240 is an example of a third moving mechanism of the present disclosure. <Clamp mechanism 250> As shown in FIG. 10, a clamp mechanism 250 is attached to the lower end of the third movable frame 240 via a turning mechanism (a turning motor 260).

[0074] The clamp mechanism 250 is θ (See FIG. 11) is attached to the buffer shaft mount base 245 so as to be rotatable about the θ axis AX θis the center (center axis AX W 11 shows an example of a rotation mechanism (rotation motor 260) that rotates the clamp mechanism 250. The rotation mechanism (rotation motor 260) passes through the center of the clamp mechanism 250 and extends in the Z-axis direction.

[0075] Specifically, the clamp mechanism 250 is attached in a state where the rotation shaft of a rotation motor 260 (e.g., a hollow shaft motor) fixed to a top plate 262 is fixed to the buffer shaft mount base 245. As a result, the rotation motor 260 fixed to the top plate 262 rotates forward and backward, so that the clamp mechanism 250 rotates about the θ axis AX θ The motor 260 rotates at a predetermined angle (e.g., angle θ; see Figs. 5(b) and 5(c)) relative to the buffer shaft mount base 245. The motor 260 for rotation is an example of a rotation mechanism of the present disclosure. Note that, instead of the motor 260 for rotation (e.g., a hollow shaft motor), other drive mechanisms such as a worm gear, a wheel gear, and a general-purpose motor may be used as the rotation mechanism.

[0076] The buffer shaft mount base 245 to which the clamp mechanism 250 is attached as described above is attached to the Z-axis mount base 243 so as to be slidable in the X-axis direction. Specifically, a slide rail 244 extending in the X-axis direction provided on the upper surface of the buffer shaft mount base 245 is slidably engaged with the lower surface of the Z-axis mount base 243 fixed to the third movable frame 240. As a result, as described later, when the workpiece W (top side end surface Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, the buffer shaft mount base 245 (and the clamp mechanism 250 attached thereto) slides in the X-axis direction relative to the Z-axis mount base 243. As a result, when the workpiece W (top side end surface Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, excessive force is prevented from being applied to the clamp mechanism 250.

[0077] FIG. 12 is a perspective view of the clamp mechanism 250.

[0078] As shown in FIG. 12, the clamping mechanism 250 includes a pair of claws 251a, 251b for clamping the workpiece W, and a claw moving mechanism M for moving the pair of claws 251a, 251b in a direction toward or away from each other. 250 Equipped with.

[0079] One of the claws 251a is attached to the lower end of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, one of the claws 251a is fixed to the lower surface of one of the movable frames 254a which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction provided on the lower surface of a frame 252 fixed to the lower end of the third movable frame 240.

[0080] Similarly, the other claw portion 251b is also attached to the lower end of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, the other claw portion 251b is fixed to the lower surface of the other movable frame 254b which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction and provided on the lower surface of a frame 252 fixed to the lower end of the third movable frame 240.

[0081] The pair of claws 251a, 251b move in a direction approaching each other (Y-axis direction) along the guide rails 253a, 253b together with the movable frames 254a, 254b by forward rotation of a coaxial ball screw (not shown) extending in the Y-axis direction and connected to the movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed by a drive motor 255 attached to the frame 252. In addition, the pair of claws 251a, 251b move in a direction away from each other (Y-axis direction) along the guide rails 253a, 253b together with the movable frames 254a, 254b by reverse rotation of a coaxial ball screw (not shown) connected to the movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed by the drive motor 255.

[0082] The guide rails 253a and 253b, the left and right ball screws (not shown) and the drive motor 255 constitute a claw moving mechanism M that moves the pair of claws 251a and 251b in a direction toward or away from each other. 250 Configure.

[0083] FIG. 13 is a schematic diagram showing a state in which the workpiece W is clamped by the pair of claw portions 251a, 251b.

[0084] As shown in FIG. 13, the pair of claws 251a, 251b each have a first contact portion 256a that contacts the lower portion of the workpiece W and a second contact portion 256b that contacts the upper portion of the workpiece W. Specifically, the pair of claws 251a, 251b each have a tapered surface that opens toward each other in a V-shape (a cross-sectional shape in the YZ plane is V-shaped). This tapered surface functions as the first contact portion 256a and the second contact portion 256b. Hereinafter, the first contact portion 256a and the second contact portion 256b are also referred to as tapered surfaces 256a, 256b.

[0085] The pair of claws 251a, 251b are made of synthetic resin or metal with tapered surfaces 256a, 256b covered with synthetic resin. When the workpiece W is a cylindrical workpiece other than a silicon ingot, the pair of claws 251a, 251b may be made of metal with tapered surfaces 256a, 256b not covered with synthetic resin.

[0086] The pair of claws 251a, 251b move in directions approaching each other, and clamp the workpiece W in a state where the tapered surfaces 256a, 256b are in contact with the outer circumferential surface of the workpiece W (see FIG. 13).

[0087] The pair of claws 251a, 251b always rotates the workpiece W along the central axis AX of the workpiece W, regardless of the size of the diameter of the workpiece W. W The workpiece W can be clamped while being positioned at the same position.

[0088] FIG. 14 is a perspective view of the sensor attached to the pair of claws 251a, 251b.

[0089] Further, a sensor for measuring the length L (see FIG. 2) of the workpiece W is attached to the pair of claws 251a, 251b. As shown in FIG. 14, this sensor is composed of a light projector 257a attached to the lower part of one claw 251a and a light receiver 257b attached to the lower part of the other claw 251b. Note that, conversely, the light projector 257a may be attached to the lower part of the other claw 251a, and the light receiver 257b may be attached to the lower part of one claw 251a.

[0090] FIG. 15 is a schematic diagram showing how the length L of the workpiece W is measured by the sensors attached to the pair of claws 251a, 251b.

[0091] With this sensor, for example, as shown in FIG. 15, the clamp mechanism 250 (light projector 257a and light receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W, and the length L of the workpiece W can be measured by calculating the position p1 (coordinate position in the three-dimensional coordinate system possessed by the workpiece conveying device 200) where the workpiece W blocks the light ray (see FIG. 14) from the light projector 257a and received by the light receiver 257b, and the position p2 (coordinate position in the three-dimensional coordinate system possessed by the workpiece conveying device 200) where the light receiver 257b receives the light ray (see FIG. 14) from the light projector 257a. <Control device 300> Next, the control device 300 will be described.

[0092] FIG. 16 is a diagram showing the system configuration including the control device 300.

[0093] Although not shown, the control device 300 includes a processor, a RAM, a ROM, etc. As shown in FIG. 16, the control device 300 includes a movable frame moving mechanism M that moves the first movable frame 220 in the X-axis direction. 220 a drive motor 225 that configures the second movable frame 230, and a movable frame moving mechanism M 230a drive motor 233 constituting the third movable frame 240 (and a clamp mechanism 250 attached thereto) for moving the third movable frame 240 in the Z-axis direction; 240 a drive motor 242 which constitutes the claw portion moving mechanism M for moving the pair of claw portions 251a, 251b in a direction approaching each other or in a direction separating each other; 250 The drive motor 255 constituting the mechanism 250, a rotation motor 260 which rotates the clamp mechanism 250, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circle grinding unit 130 (circle grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the rotation motor 260, the outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), the operation device 400, the pallet loader 500, and sensors (light projector 257a, light receiver 257b) are electrically connected to each other.

[0094] The processor is, for example, a CPU. There may be one processor or multiple processors. For example, the processor executes a program loaded from the ROM to the RAM, thereby functioning as a control means for controlling the drive motors 225, 233, 242, 255, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circle grinding unit 130 (circle grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), and the like.

[0095] Next, an example of the operation of the cylindrical grinding device 1 having the above configuration will be described.

[0096] Fig. 17 is a flowchart of an example of the operation of the cylindrical grinding machine 1. Fig. 18 is a perspective view of the cylindrical grinding machine 1 installed in a factory. Figs. 19 and 20 are views for explaining the operation of the clamp mechanism 250. Figs. 21, 22(a), and 22(b) are views for explaining the operation of the spindle unit 110 and the tail unit 120.

[0097] 18, reference numerals AGV1 and AGV2 denote automated guided vehicles, and reference numeral 500 denotes a pallet loader. Hereinafter, the automated guided vehicles will be referred to as AGV1, AGV2, and pallet loader 500.

[0098] The automated guided vehicle AGV1 transports a pallet P1 carrying the workpiece W to be processed (workpiece W1 in FIG. 18) from a designated location in a factory where cylindrical workpieces of various diameters and lengths (lengths in the central axis direction) are stored to a pallet loader 500 installed adjacent to the cylindrical grinding machine 1, and then hands over the pallet P1 to the pallet loader 500 by known means (workpiece W2 and pallet P2 in FIG. 18).

[0099] The pallet loader 500 transports the pallet P2 delivered from the automated guided vehicle AGV1 to a predetermined waiting position (in FIG. 18, workpiece W3 and pallet P3). The central axis AX of the workpiece W (in FIG. 18, workpiece W3) placed on the pallet P3 transported to the waiting position W extends in the X-axis direction.

[0100] An example of the operation of the cylindrical grinding device 1 installed in a factory will be described below with reference to FIG.

[0101] First, information on the workpiece W to be processed is acquired (step S10). The information on the workpiece W to be processed is, for example, the diameter D (see FIG. 2) of the workpiece W to be processed, and is affixed to a predetermined location on the pallet as a barcode. For example, the information (barcode) on the workpiece W to be processed is read by a barcode reader (not shown) attached to a predetermined location on the pallet loader 500 at the timing when the pallet P1 is handed over to the pallet loader 500. The control device 300 acquires this read information on the workpiece W to be processed. Note that the control device 300 may also acquire information on the workpiece W to be processed transmitted from another device.

[0102] Next, the machining conditions for the workpiece W to be machined (e.g., the amount of grinding of the outer peripheral surface of the workpiece W, whether or not additional machining such as a flat surface (OF) or a V-shaped notch is to be performed, etc.) are acquired (step S11). The machining conditions are input, for example, by an operator via the operation device 400. The control device 300 acquires the input machining conditions. Note that the control device 300 may also acquire machining conditions transmitted from another device.

[0103] Next, the length L (see FIG. 2) of the workpiece W is measured (step S11A). For example, as shown in FIG. 15, the clamp mechanism 250 (projector 257a and receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W. As a result, the length L of the workpiece W is measured by calculating the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the workpiece W (workpiece W3 in FIG. 18) conveyed to the standby position blocks the light Ray (see FIG. 14) from the projector 257a received by the receiver 257b, and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the receiver 257b receives the light Ray (see FIG. 14) from the projector 257a. This is realized by the control device 300 (processor) executing a program loaded from the ROM to the RAM.

[0104] Next, as shown in FIGS. 19(a) and 19(b), the clamp mechanism 250 is moved above the workpiece W (workpiece W3 in FIG. 18) that has been transported to the standby position (step S12).

[0105] Specifically, as shown in FIG. 19(a), in the Y-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the central axis AX of the workpiece W. W 19(b), the clamp mechanism 250 is moved in the X-axis direction until the center Pb of the pair of claws 251a, 251b coincides with a vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined, which is automatically measured in step S11A). This is achieved by the control device 300 controlling the control motors (servo motors) 225, 233, 242.

[0106] Next, as shown in FIG. 20(a), in the Z-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the central axis AX W The clamp mechanism 250 is moved (lowered) until it matches the position (step S13). This is achieved by the control device 300 controlling the drive motor 242. The moving distance d (lowering distance; see FIG. 20(a)) of the clamp mechanism 250 at that time can be calculated based on the diameter D of the workpiece W to be machined, etc., acquired in step S10.

[0107] 20(b), the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer circumferential surface of the workpiece W, thereby clamping the workpiece W (step S14). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

[0108] Next, the workpiece W clamped as described above is transported to the cylindrical grinding machine main body 100 (between the spindle jaws 111 and the tail jaws 121) (step S15).

[0109] In this case, in the cylindrical grinding machine 1, for example, before the process of step S10, the same process as steps S12 to S15 is performed on the master work (not shown), so that the central axis AX of the master work is aligned between the spindle jaw 111 and the tail jaw 121 of the cylindrical grinding machine main body 100. MW and a rotation axis AX of the cylindrical grinding device main body 100. 100 The clamp mechanism 250 that clamps the master work is set to move so that the positions of the master work and the clamping mechanism 250 coincide with each other.

[0110] Therefore, in step S15, as shown in FIG. 21, first, the central axis AX of the master workpiece set as described above is aligned between the spindle jaw 111 and the tail jaw 121 of the cylindrical grinding device main body 100. MW and a rotation axis AX of the cylindrical grinding device main body 100.100 The clamp mechanism 250 clamping the workpiece W is moved so that the central axis AX of the master workpiece W coincides with the central axis AX of the master workpiece W. This is achieved by the control device 300 controlling the control motors (servo motors) 225, 233, and 242. Next, as shown in FIG. 22(b), the central axis AX of the master workpiece W is moved so that the central axis AX of the master workpiece W coincides with the central axis AX of the master workpiece W. MW and a rotation axis AX of the cylindrical grinding device main body 100. 100 The workpiece W in this aligned state is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121) (step S16).

[0111] 22(a), the clamp mechanism 250 clamping the workpiece W is moved in the X-axis direction until the top end face Wt of the workpiece W abuts against the spindle jaws 111. This is achieved by the control device 300 controlling the control motor (servo motor) 225.

[0112] Next, as shown in FIG. 22(b), the tail unit 120 is moved in the X-axis direction so that the tail jaw 121 abuts against the bottom end face Wb of the workpiece W and applies pressure with sufficient force against the weight of the workpiece and external machining forces. This is achieved by the control device 300 controlling the tail motor 123. At that time, the control device 300 measures (calculates) the length L of the workpiece W based on the position at the time when the tail jaw 121 contacts the bottom end face Wb of the workpiece W. The length L of the workpiece W measured here is measured with higher accuracy than the length L of the workpiece W measured in step S11A. In the following description, the length L measured with high accuracy is used as the length L of the workpiece W.

[0113] Next, the pair of claws 251a, 251b release the clamping of the workpiece W (step S17). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

[0114] Next, the control device 300 executes a deviation amount measuring process (step S17A).

[0115] FIG. 23 is a flowchart of the deviation amount measuring process.

[0116] The deviation measurement process is performed on the rotation axis AX of the cylindrical grinding device main body 100. 100 This is a process of measuring (calculating) the amount of deviation (deviation angle θ and deviation distance ΔY; see Figures 5(b) and 5(c)) of the clamped workpiece W relative to the workpiece W.

[0117] The misalignment amount measurement process (steps S17A1 to S17A3) is executed n times for the workpiece W. The following describes an example in which n is 2. n (the number of measurements) is input by an operator via the operation device 400, for example. n is input at any time before the misalignment amount measurement process is executed. Note that n that is input in advance and stored in a predetermined storage unit may be used. Note that n may be any integer equal to or greater than 2. In other words, the minimum value of n is 2. Also, the maximum value of n is about 16, taking practicality into consideration.

[0118] When n is 2, the deviation amount measurement process (steps S17A1 to S17A3) is performed on the workpiece W (hereinafter, the workpiece W) in the state shown in FIG. 24(a) (hereinafter, also referred to as the origin state or origin position). W3-W1 ), and the work W rotated 180 degrees / n (here, 90 degrees) counterclockwise from the original state (see Figure 24(b). Hereinafter, the work W W2-W4 This is executed for each of the following (a total of two executions):

[0119] First, the workpiece W in the origin state W3-W1 (see FIG. 24(a)), the processes from step S17A1 onward are executed.

[0120] That is, the outer diameter of the top end surface Wt is measured (step S17A1). Specifically, in the Z-axis direction, the center between one probe 273a and the other probe 273b is located at the center of the workpiece W W3-W1 The rotation axis AX is located near the top end face Wt of 100Then, the outer diameter measuring mechanism 270 is lowered until it coincides with the workpiece W. Next, the measuring arms 272a and 272b are moved in a direction approaching each other (Y-axis direction). W3-W1 The control device 300 then contacts the outer peripheral surface of the workpiece W near the top end face Wt of the workpiece W. This acquires the positions (position data) of the respective contact points. W3-W1 The center position of the top end surface Wt, and the center position and the rotation axis AX 100 Calculate the distance Δct between

[0121] Next, the outer diameter of the bottom end face Wb is measured (step S17A2). Fig. 25 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom end face Wb. Note that for convenience of explanation, Fig. 25 depicts the workpiece W in an unclamped state, but in reality, the outer diameter measuring mechanism 270 measures the workpiece W in a state in which the spindle jaws 111 are in contact with the top end face Wt and the tail jaws 121 are in contact with the bottom end face Wb (i.e., in a clamped state). W3-W1 The outer diameter of the top end face Wt and the outer diameter of the bottom end face Wb are measured.

[0122] Specifically, in the Z-axis direction, the center between one probe 273a and the other probe 273b is located at the center of the workpiece W. W3-W1 In the vicinity of the bottom end face Wb of the 100 The outer diameter measuring mechanism 270 is lowered until it coincides with the workpiece W (see FIG. 25). Next, the measuring arms 272a and 272b are moved in a direction approaching each other (Y-axis direction) (see FIG. 25). As a result, the measuring probes 273a and 273b are W3-W1 The control device 300 then contacts the outer peripheral surface of the workpiece W near the bottom end surface Wb of the workpiece W. This acquires the positions (position data) of the respective contact points. Based on these positions (position data), the control device 300 W3-W1 The center position of the bottom side end surface Wb, and the relationship between the center position and the rotation axis AX 100 Calculate the distance Δcb between

[0123] Next, the control device 300 calculates the amount of deviation based on the measurement value (position data) (step S17A3). Specifically, the control device 300 calculates the amount of deviation as the deviation angle θ and the deviation distance ΔY (see FIG. 5(b) and FIG. 5(c)).

[0124] The angle θ is the axis of rotation AX 100 Center axis AX of workpiece W relative to W (See Fig. 5(b) and Fig. 5(c)). ΔY is the deviation angle of the center point CP of the workpiece W (center axis AX W (center point above) and rotation axis AX 100 (See FIG. 5(c)).

[0125] The deviation angle θ can be calculated as follows.

[0126] As shown in Figure 5(a), the central axis AX of the workpiece W W and rotation axis AX 100 When these are in agreement, the relationship Δct = Δcb = 0 holds.

[0127] On the other hand, as shown in FIG. 5(b), the rotation axis AX 100 Center axis AX of workpiece W W When the center point CP is inclined at an angle of θ, the axis of rotation AX 100 When the angle θ is above the target, the relationship is Δct = Δcb ≠ 0. In this case, the deviation angle θ can be calculated using the following formula 1. As shown in Figure 5(c), the rotation axis AX 100 Center axis AX of workpiece W W When the center point CP is inclined at an angle of θ, the axis of rotation AX 100 If the angle θ is not on the upper side, the relationship is Δct>Δcb (or Δct<Δcb). In this case, the deviation angle θ can be calculated in the same manner as above.

[0128] Next, it is determined whether steps S17A1 to S17A3 have been performed n times (here, n=2 times) (step S17A4). If steps S17A1 to S17A3 have not been performed n times (step S17A4: No), the workpiece W is rotated 180 degrees / n (here, 90 degrees) (S17A5), and the workpiece W is W2-W4 (see FIG. 24(b)), steps S17A1 to S17A3 are executed in the same manner as above (second execution).

[0129] Then, when steps S17A1 to S17A3 have been executed n times (here, n=2 times) (step S17A4: Yes), the processing in FIG. 23 ends.

[0130] FIG. 26 shows the results of the process of FIG. 23 for each work W W3-W1 , W W2-W4 26 is a table summarizing the measured values ​​Δct, Δcb, θ, and ΔY (stored in a predetermined storage unit). W3-W1 , Δcb W3-W1 , θ W3-W1 , ΔY W3-W1 is Work W W3-W1 Similarly, the measured value Δct W2-W4 , Δcb W2-W4 , θ W2-W4 , ΔY W2-W4 is Work W W2-W4 This indicates that the measurement value was obtained by measuring

[0131] Next, returning to FIG. 17, it is determined whether the amount of deviation measured in step S17A is equal to or smaller than a set value (a predetermined threshold value) (step S17B).

[0132] If the determination result in step S17B is No, the control device 300 executes a deviation amount correction process (step S17C).

[0133] FIG. 27 is a flowchart of the deviation amount correction process.

[0134] The deviation amount correction process is performed by correcting the deviation of the rotation axis AX of the cylindrical grinding machine body 100 measured in step S17A. 100This is a process for correcting the amount of deviation (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W relative to the workpiece W.

[0135] Specific examples 1 to 6 of the misalignment amount correction process will be described below. <Example 1> FIG. 29 is a diagram for explaining specific example 1 of the misalignment amount correction process.

[0136] In the first specific example, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 29(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 29(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's on top.

[0137] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 29(b)), the central axis AX W and rotation axis AX 100 It is consistent with.

[0138] As a result of executing the misalignment amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 29(c) are obtained. In FIG. 29(c), the measurement values ​​θ W3-W1 represents a number other than 0.

[0139] First, in the Y-axis direction, the pair of claws 251a, 251b are moved in a direction approaching each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 29(a) and Figure 29(b)) W3-W1 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1).W3-W1 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W3-W1 Center of (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0140] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W3-W1 The clamp on is released (step S17C2).

[0141] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) is eliminated by setting the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0142] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0143] Next, the pair of claws 251a and 251bW3-W1 The clamp on is released (step S17C5).

[0144] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0145] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes. <Example 2> FIG. 30 is a diagram for explaining specific example 2 of the misalignment amount correction process.

[0146] In the second specific example, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 30(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 30(b)), the central axis AX W and rotation axis AX 100 It is consistent with.

[0147] On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 30(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's on top.

[0148] As a result of executing the misalignment amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 30(c) are obtained. In FIG. 30(c), the measurement values ​​θW2-W4 represents a number other than 0.

[0149] First, Work W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see Fig. 30(b)), and the workpiece W is W2-W4 This is realized by the control device 300 controlling the main shaft motor 113 and the tail motor 123.

[0150] Next, the pair of claws 251a, 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W2-W4 (See Figure 30(d)) to abut against the outer periphery of the workpiece W W2-W4 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W2-W4 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W2-W4 Center (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0151] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W2-W4 The clamp on is released (step S17C2).

[0152] Next, reloading is performed (step S17C3). W2-W4 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) is eliminated. θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0153] Next, as shown in FIG. 22(b), the workpiece W W2-W4 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0154] Next, the pair of claws 251a and 251b W2-W4 The clamp on is released (step S17C5).

[0155] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0156] If the result of the determination in step S17B is Yes, that is, if the workpiece W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 On the other hand, if the result of the determination in step S17B is No, that is, if the workpiece W W2-W4 If the re-measured deviation amount is not less than or equal to the set value in step S17A, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes. <Example 3> FIG. 31 is a diagram for explaining a specific example 3 of the misalignment amount correction process.

[0157] In the specific example 3, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 31(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 31(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the axis of rotation AX 100 in the Y-axis direction from W3-W1 ) is in the wrong position.

[0158] On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 31(b)), the central axis AX W and rotation axis AX 100 It is consistent with.

[0159] As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 31(c) are obtained. In FIG. 31(c), the measurement values ​​θ W3-W1 , ΔY W3-W1 represents a number other than 0.

[0160] First, in the Y-axis direction, the pair of claws 251a, 251b are moved in a direction approaching each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W3-W1 (See Fig. 31(a) and Fig. 31(b)) W3-W1 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W3-W1 Center of (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0161] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W3-W1 The clamp on is released (step S17C2).

[0162] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) is eliminated. θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0163] Along with this, Work W W3-W1 The clamp mechanism 250 that clamped the W3-W1 ) is eliminated by adjusting the deviation distance ΔY (ΔY W3-W1 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W3-W1 ) is corrected.

[0164] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0165] Next, the pair of claws 251a and 251b W3-W1 The clamp on is released (step S17C5).

[0166] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0167] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes. <Example 4> FIG. 32 is a diagram for explaining a specific example 4 of the misalignment amount correction process.

[0168] In the fourth specific example, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 32(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 32(b)), the central axis AX W and rotation axis AX 100 It is consistent with.

[0169] On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 32(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100Not on top, but on the axis of rotation AX 100 in the Z-axis direction from ΔY (ΔY W2-W4 ) is in the wrong position.

[0170] As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 32(c) are obtained. In FIG. 32(c), the measurement values ​​θ W2-W4 , ΔY W2-W4 represents a number other than 0.

[0171] First, Work W W3-W1 is rotated counterclockwise by 180° / n (here, 90°) from the origin state (see Fig. 32(b)), and the workpiece W is W2-W4 This is realized by the control device 300 controlling the main shaft motor 113 and the tail motor 123.

[0172] Next, the pair of claws 251a, 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W2-W4 (See Figure 32(d)) to abut against the outer periphery of the workpiece W W2-W4 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W2-W4 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W2-W4 Center of (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0173] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W2-W4 The clamp on is released (step S17C2).

[0174] Next, reloading is performed (step S17C3). W2-W4The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) is eliminated. θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0175] Along with this, Work W W2-W4 The clamp mechanism 250 that clamped the W2-W4 ) is eliminated by adjusting the deviation distance ΔY (ΔY W2-W4 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected.

[0176] Next, as shown in FIG. 22(b), the workpiece W W2-W4 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0177] Next, the pair of claws 251a and 251b W2-W4 The clamp on is released (step S17C5).

[0178] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0179] If the result of the determination in step S17B is Yes, that is, if the workpiece W W2-W4 When the deviation amount measured in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes. <Example 5> FIG. 33 is a diagram for explaining a specific example 5 of the misalignment amount correction process.

[0180] In the fifth specific example, the workpiece W to be subjected to the misalignment measurement process (step S17A) and the misalignment correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 33(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 33(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's on top.

[0181] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 33(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's on top.

[0182] As a result of executing the misalignment amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 33(c) are obtained. In FIG. 33(c), the measurement values ​​θ W3-W1 , θ W2-W4 represents a number other than 0.

[0183] First, in the Y-axis direction, the pair of claws 251a, 251b are moved in a direction approaching each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 33(a) and Figure 33(b)) W3-W1 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W3-W1 Center of (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0184] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W3-W1 The clamp on is released (step S17C2).

[0185] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) is eliminated by setting the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, as shown in FIG. 33(d), the angle θ (θ W3-W1 ) is corrected.

[0186] Next, as shown in FIG. 22(b), the workpiece W W3-W1is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0187] Next, the pair of claws 251a and 251b W3-W1 The clamp on is released (step S17C5).

[0188] Next, Work W W3-W1 is rotated counterclockwise by 180° / n (here, 90°) from the state shown in FIG. 33(d), and the work W is W2-W4 The state is as follows.

[0189] Next, similarly to step S17C1, the workpiece W is clamped by the clamping mechanism 250. W2-W4 Then, the workpiece W is clamped. W2-W4 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) is eliminated. θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0190] Next, as shown in FIG. 22(b), the workpiece W W2-W4is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0191] Next, the pair of claws 251a and 251b W2-W4 The clamp on is released (step S17C5).

[0192] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0193] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation amount measured again in step S17A is less than or equal to the set value, and the work W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes. <Example 6> FIG. 34 is a diagram for explaining a sixth specific example of the misalignment amount correction process.

[0194] In the sixth specific example, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 34(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 34(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the axis of rotation AX 100 from ΔY (ΔY W3-W1 ) is in the wrong position.

[0195] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 34(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the axis of rotation AX 100 from the Z axis to ΔY (ΔY W2-W4 ) is in the wrong position.

[0196] As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 34(c) are obtained. In FIG. 34(c), the measurement values ​​θ W3-W1 , θ W2-W4 , ΔY W3-W1 , ΔY W2-W4 represents a number other than 0.

[0197] First, in the Y-axis direction, the pair of claws 251a, 251b are moved in a direction approaching each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W3-W1 (See Fig. 34(a) and Fig. 34(b)) W3-W1In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W3-W1 Center of (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0198] Next, the workpiece W of the main shaft jaw 111 and the tail jaw 121 W3-W1 The clamp on is released (step S17C2).

[0199] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) is eliminated by setting the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0200] Along with this, Work W W3-W1 The clamp mechanism 250 that clamped the W3-W1 ) is eliminated by adjusting the deviation distance ΔY (ΔY W3-W1 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W3-W1 ) is corrected.

[0201] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction Wand a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0202] Next, the pair of claws 251a and 251b W3-W1 The clamp on is released (step S17C5).

[0203] Next, Work W W3-W1 is rotated counterclockwise by 180° / n (here, 90°) from the state shown in FIG. 34(d), and the work W is W2-W4 The state is as follows.

[0204] Next, similarly to step S17C1, the workpiece W is clamped by the clamping mechanism 250. W2-W4 Then, the workpiece W is clamped. W2-W4 The clamp mechanism 250 that clamped the object is then moved to the position corresponding to the deviation angle θ (θ W2-W4 ) is eliminated. θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0205] Along with this, Work W W2-W4 The clamp mechanism 250 that clamped the W2-W4 ) is eliminated by adjusting the deviation distance ΔY (ΔY W2-W4 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected.

[0206] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0207] Next, the pair of claws 251a and 251b W2-W4 The clamp on is released (step S17C5).

[0208] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0209] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation amount measured again in step S17A is less than or equal to the set value, and the work W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes.

[0210] Next, the process from step S18 onwards will be described.

[0211] That is, if the determination result in step S17B is Yes, a predetermined machining is performed on the workpiece W clamped between the spindle jaw 111 and the tail jaw 121 so as to satisfy the machining conditions acquired in step S11 (step S18). For example, the outer peripheral surface of the workpiece W clamped between the spindle jaw 111 and the tail jaw 121 is ground.

[0212] Then, when the specified processing of the workpiece W to be processed (for example, grinding the outer surface of the workpiece, additional processing such as creating a flat surface (OF) or a V-shaped notch) is completed (step S19: Yes), the processed workpiece W is clamped by the clamping mechanism 250 in the same manner as described above, and the clamped processed workpiece W is transported to a specified location (for example, pallet P4 in Figure 18) (step S20).

[0213] The pallet P4 on which the machined workpiece W (workpiece W4 in FIG. 18) is placed is transferred together with the pallet P4 to the automatic guided vehicle AGV2 by, for example, a known means (workpiece W5 and pallet P5 in FIG. 18).

[0214] Then, the automated guided vehicle AGV2 transports the pallet P5 on which the machined workpiece W (workpiece W5 in FIG. 18) is placed to the next process.

[0215] As described above, according to this embodiment, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 In a state where these are aligned, the workpiece W can be clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121).

[0216] This is because the clamp mechanism 250 with the workpiece W clamped is rotated along the θ axis AX θ This is because the clamping mechanism 250 is provided with a rotation mechanism (rotation motor 260) that rotates the clamping mechanism 250 around a center (which passes through the center of the workpiece W clamped by the clamping mechanism 250 and extends in the Z-axis direction).

[0217] Furthermore, according to this embodiment, workpieces W of various lengths can be transported in a stable manner at all times.

[0218] This is because the clamping mechanism 250 moves in the Y-axis direction until the center Pb of the pair of claw portions 251a, 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be processed, which was automatically measured in step S11A) (step S12, see Figure 19 (b)), and the clamping mechanism 250 (pair of claw portions 251a, 251b) clamps the center of the workpiece W in the Y-axis direction.

[0219] Next, a modified example will be described.

[0220] FIG. 28(a) is a diagram for explaining the movement directions of the movable frames 220, 230, 240 of the cylindrical grinding apparatus 1, and FIG. 28(b) is a diagram for explaining the movement directions of the movable frames 220, 230, 240 of the modified cylindrical grinding apparatus 1.

[0221] In the above embodiment, as shown in FIG. 28(a), the moving mechanism of the present disclosure is a movable frame moving mechanism M attached to the second movable frame 230, which moves the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction. 240 (an example of the first moving mechanism of the present disclosure), and the second movable frame 230 (clamping mechanism 250 and movable frame moving mechanism M 240 A movable frame moving mechanism M attached to the first movable frame 220 moves the movable frame 210 in the Y-axis direction. 230 (an example of the second moving mechanism of the present disclosure), and the first movable frame 220 (clamp mechanism 250, movable frame moving mechanism M 230 and the movable frame moving mechanism M 240 A movable frame moving mechanism M attached to the fixed frame 210 moves the 220 Although an example using the third moving mechanism (an example of the third moving mechanism of the present disclosure) has been described, the present invention is not limited to this.

[0222] For example, as shown in FIG. 28(b), the moving mechanism of the present disclosure may be a moving frame moving mechanism M attached to the second moving frame 230, which moves the third moving frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction. 240 (an example of the first moving mechanism of the present disclosure), and the second movable frame 230 (clamping mechanism 250 and movable frame moving mechanism M 240 A movable frame moving mechanism M attached to the first movable frame 220 moves the movable frame 210 in the X-axis direction. 230 (an example of the second moving mechanism of the present disclosure), and the first movable frame 220 (clamp mechanism 250, movable frame moving mechanism M 230 and the movable frame moving mechanism M 240 A movable frame moving mechanism M attached to the fixed frame 210 moves the movable frame 210 in the Y-axis direction. 220 (an example of the third moving mechanism of the present disclosure) may be used.

[0223] Hereinafter, another operation example of the cylindrical grinding device 1 will be described with reference to FIG.

[0224] Fig. 35 is a flowchart of another operation example of the cylindrical grinding device 1. Fig. 36 is a flowchart of the central axis AX W and a rotation axis AX of the cylindrical grinding device main body 100. 100 1 is a perspective view showing a state in which a workpiece W is clamped between a spindle jaw 111 (spindle 101) and a tail jaw 121 (tail 102) in a state in which the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) are aligned.

[0225] In Figure 36, the symbol AX C indicates the crystal axis of the workpiece W, which is a silicon crystal (single crystal). Hereinafter, the crystal axis AX C In addition, the crystal plane and the crystal axis AX C has the meaning as shown in the rectangle in FIG.

[0226] As a result of steps S10 to S17C shown in FIG. 17, the central axis AX W and a rotation axis AX of the cylindrical grinding device main body 100. 100When the workpiece W is clamped between the spindle jaw 111 (spindle 101) and the tail jaw 121 (tail 102) in a state where the crystal axis AX C represents a rotation axis AX of the cylindrical grinding device body 100. 100 Therefore, in order to correct this deviation, the crystal axis AX C and a rotation axis AX of the cylindrical grinding device main body 100. 100 In order to make them match (approximately match), the process of FIG. 35 is executed.

[0227] In the process of FIG. 35, steps S10 to S17C shown in FIG. 17 are executed, the determination result of step S17B is Yes, and the central axis AX W and a rotation axis AX of the cylindrical grinding device main body 100. 100 This is performed when the workpiece W is clamped between the spindle jaw 111 (spindle 101) and the tail jaw 121 (tail 102) in a state where the positions are aligned (approximately aligned) (see FIG. 36).

[0228] First, it is determined whether or not a provisional notch is present (step S30). This is achieved, for example, by irradiating the workpiece W with a laser from a laser sensor (not shown) and rotating the workpiece 360° to search for the presence or absence of a provisional notch (notch groove). If the determination result in step S30 is No, provisional notch processing is performed on the workpiece W (step S31). The location where the provisional notch processing is performed is automatically determined based on the measurement results of the X-ray device 150. The provisional notch processing is achieved by the notch unit 140.

[0229] Next, the control device 300 executes a surface orientation measurement process (step S32).

[0230] FIG. 37 is a flowchart of the surface orientation measurement process.

[0231] The surface orientation measurement process is performed on the rotation axis AX 100 for the crystal axis AX C This is a process of measuring (calculating) the amount of deviation (deviation rotation angle Δδ and swing angle Δφ).

[0232] The plane orientation measuring process (steps S321 to S324) is executed n times for the workpiece W. The following description will be given taking an example where n is 2. n (the number of measurements) is input by an operator via the operation device 400, for example. n is input at any time before the plane orientation measuring process is executed. Note that n that is input in advance and stored in a predetermined storage unit may be used. Note that n may be any integer equal to or greater than 2. In other words, the minimum value of n is 2.

[0233] First, the control device 300 rotates the workpiece W until the provisional notch N1 is located at the reference position (step S321).

[0234] Next, the plane orientation is measured (step S322). This is achieved by the X-ray device 150. The X-ray device 150 irradiates X-rays (towards the workpiece center Wc) on surface A (see FIG. 36) of the workpiece W positioned at the reference position as described above, and performs plane orientation measurement. The diagram at the left end of FIG. 38 and FIG. 40 are diagrams showing how the X-ray device 150 irradiates X-rays on the workpiece W and performs plane orientation measurement. The plane orientation measurement for the workpiece center Wc is performed when the workpiece center Wc is aligned along the θ-axis AX θ Therefore, when making the correction described later, the clamp mechanism 250 with the workpiece W clamped is moved along the θ axis AX θ This is because even if the wafer is rotated around the center, the distance to the X-ray device 150 does not change. The X-ray device 150 outputs the plane orientation and correction value (plane orientation and correction value of the C plane based on the notch) as the measurement value for the A plane.

[0235] Next, it is determined whether step S322 has been performed n times (here, n=2 times) (step S323), and if it has not been performed n times (step S323: No), the workpiece W is rotated by a predetermined angle (e.g., 90 degrees) (S324), and X-rays are irradiated (toward the workpiece center Wc) (see the center diagram in FIG. 38) to surface B (see FIG. 36) of the workpiece W after the rotation by the predetermined angle (e.g., 90 degrees) to measure the surface orientation (step S322) (second execution). The X-ray device 150 outputs the surface orientation and correction value (the surface orientation and correction value of the C surface based on the notch) as the measurement value for surface B.

[0236] Then, when step S322 has been executed n times (here, n=2 times) (step S323: Yes), the axial misalignment rotation angle Δδ and the swing angle Δφ are calculated based on the measurements made in step S322 (step S325). The X-ray device 150 outputs the calculated axial misalignment rotation angle Δδ and the swing angle Δφ. The axial misalignment rotation angle Δδ is calculated based on the central axis AX of the workpiece W. W And the straight line L1 passing through the provisional notch N1 and the central axis AX of the workpiece W W and a straight line L2 passing through the main notch (main notch planned location N2) (see FIG. 38). On the other hand, the workpiece W that is the target of the swing angle correction process (step S34) is clamped between the spindle jaw 111 and the tail jaw 121, and when viewed from the direction of the arrow Ar3 (see FIG. 38), the crystal axis AX C is the axis of rotation AX 100 The swing angle is shifted by Δφ from the above (see Figure 35).

[0237] Next, returning to FIG. 35, it is determined whether the deviation amount (swing angle Δφ) measured in step S32 is equal to or smaller than a set value (a predetermined threshold value) (step S33).

[0238] If the determination result in step S33 is No, the control device 300 executes a rotation angle / swing angle correction process (step S34).

[0239] The rotation angle / swing angle correction process is performed by adjusting the rotation axis AX of the cylindrical grinding device body 100 measured (calculated) in step S32. 100 for the crystal axis AX C This is a process for correcting the deviation amount (deviation rotation angle Δδ and swing angle Δφ).

[0240] FIG. 39 is a flowchart of the rotation angle / swing angle correction process.

[0241] First, the control device 300 rotates the workpiece W until the misalignment rotation angle of the plane orientation becomes horizontal (step S341). That is, the control device 300 rotates the workpiece W by a predetermined angle (270°±misalignment rotation angle Δδ) until the main notch (predetermined location N2 of the main notch) is located at the reference position, as shown at the right end of Fig. 38. The misalignment rotation angle Δδ is a correction value that corrects the amount of misalignment of the main notch (predetermined location N2 of the main notch) from the reference position.

[0242] Next, the pair of claws clamp the workpiece (step S342). Specifically, the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer circumferential surface of the workpiece W, thereby clamping the workpiece W. In this manner, in a state in which the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W, the θ-axis AX θ The clamp mechanism 250 clamps the workpiece W (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0243] Next, the workpiece W is released from the clamping of the spindle jaws 111 and the tail jaws 121 (step S343).

[0244] Next, the clamp mechanism 250 that clamps the workpiece W is moved to a position where the angle of the plane orientation is corrected (step S344). Specifically, the clamp mechanism 250 is moved around the θ axis AX so as to cancel the swing angle Δφ calculated in step S325. θ This is achieved by the control device 300 controlling the rotation motor 260. This allows the deviation (swing angle Δφ) to be corrected. The swing angle Δφ is the AX of the crystal axis of the workpiece W. C The cylindrical grinding device body 100 has a rotation axis AX 100 This is a correction value for correcting the amount of deviation from the

[0245] Next, the workpiece W whose deviation (swing angle Δφ) has been corrected as described above is clamped between the spindle jaw 111 and the tail jaw 121 (step S345). C and a rotation axis AX of the cylindrical grinding device main body 100. 100 With these aligned, the shaft is clamped between the main shaft base 111 (main shaft 101) and the tail base 121 (tail 102).

[0246] Next, the clamping of the workpiece W by the pair of claws 251a, 251b is released (step S346).

[0247] Next, returning to FIG. 35, the processes of steps S32 and S33 are executed again.

[0248] If the result of the determination in step S33 is Yes, that is, if the deviation amount (swing angle Δφ) measured again in step S32 for the workpiece W is ≦ the set value (predetermined threshold value), the crystal axis AX C and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that they match (approximately match), so the processes in and after step S35 are executed. On the other hand, if the determination result in step S33 is No, the processes in steps S34 and S32 are repeatedly executed until the determination result in step S33 becomes Yes.

[0249] Next, the process from step S35 onwards will be described.

[0250] That is, if the determination result in step S33 is Yes, the workpiece W clamped between the spindle jaw 111 and the tail jaw 121 is subjected to a circular grinding process so as to satisfy the machining conditions acquired in step S11 (step S35). That is, the outer peripheral surface of the workpiece W clamped between the spindle jaw 111 and the tail jaw 121 is ground. In FIG. 35 "Circular grinding process", the hatched area indicates the area to be circularly ground (grinded). This is achieved by the circular grinding unit 130 (see FIG. 6(a)).

[0251] Next, notch machining (main notch machining) is performed on the workpiece (step S36). The location where notch machining is performed (main notch planned location N2) is determined based on the measurement results of the X-ray device 150. The notch machining is performed by the notch unit 140. Specifically, the workpiece W is rotated another 90° from the state at the right end of FIG. 38 to bring the location where notch machining is performed (main notch planned location N2) into opposition to the notch unit 140, and then the main notch is formed at the main notch planned location N2 by the notch unit 140 (see FIG. 6(b)). As a result, the main notch is aligned with the crystal axis AX c Precisely along the crystal axis AX c It can be formed on the workpiece W in a direction perpendicular to the crystal planes at both ends of the workpiece W.

[0252] Then, when the circular grinding and notch machining (main notch machining) on ​​the workpiece W is completed, the machined workpiece W is clamped by the clamping mechanism 250 in the same manner as described above, and the clamped machined workpiece W is transported to a predetermined location (for example, pallet P4 in Figure 18) (step S37).

[0253] All the numerical values ​​shown in the above embodiment are merely examples, and it goes without saying that other appropriate numerical values ​​can be used.

[0254] The above-described embodiment is merely an example in all respects. The present invention should not be construed as being limited by the description of the above-described embodiment. The present invention can be implemented in various other forms without departing from the spirit or main characteristics thereof. [Explanation of symbols]

[0255] 1...Cylindrical grinding device 100... Cylindrical grinding device body 110...Spindle unit 111...Main shaft nozzle 112…Spindle body 113...Main shaft motor 120…Tail unit 121…Tail cap 122…Tail body 123…Tail motor 130…Circle Research Unit 131...Circular grinding wheel 132…Enken Base 133...Engen Motor 140…Notch unit 141...Notched grindstone 142…Notch frame 143...Notch motor 150...X-ray equipment 200...Work transport device 201...Vertical column 210…Fixed frame 211a…1st frame 211b…1st frame 212a…2nd frame 212b...2nd frame 220…First movable frame 221a…3rd frame 221b…3rd frame 222a…4th frame 222b…4th frame 223a...Guide rail 223b...Guide rail 224...Ball screw 225...Drive motor 230…Second movable frame 231a...Guide rail 231b...Guide rail 232...Ball screw 233...Drive motor 240…Third movable frame 241a, 241b...Guide rail 242...Drive motor 243…Z-axis stand base 244…Slide rail 245…Buffer shaft mount base 250…Clamp mechanism 251a, 251b...Claw part 252…frame 253a...Guide rail 253b...Guide rail 254a…movable frame 254b…movable frame 255...Drive motor 256a...First contact portion (tapered surface) 256b...First contact portion (tapered surface) 257a…Floodlight 257b…Receiver 260...Rotation motor 262…Top plate 270…Outer diameter measurement mechanism 271…Lifting frame 272a, 272b...Measuring arms 273a, 273b...Measuring point 274…Carriage 275…Guide rail 276...Drive motor 300...Control device 400...Operating device 500…Pallet loader A1, A2...Rectangle AGV1, AGV2...Automated guided vehicles AX 100 …Rotation axis AX W ...center axis AX θ ...θ axis AX MW …Master work central axis CP…Center point M 220 ... Movable frame movement mechanism M 230 ... Movable frame movement mechanism M 240 ... Movable frame movement mechanism M 250 …Claw movement mechanism P1~P5…Palette W…Work Wt: Top end surface Wb: Bottom end surface d…Distance traveled x1, x2...grinding amount θ…deviation angle ΔY…Displacement distance

Claims

1. A workpiece conveying device that conveys a cylindrical workpiece to be machined to a cylindrical grinding device body, A clamping mechanism having a pair of claws for clamping the workpiece; A turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the work clamped between a spindle jaw and a tail jaw of the cylindrical grinding device body in a state where the central axis of the work coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation of the crystal axis of the work from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X-axis, the axis perpendicular to the X-axis is defined as the Y-axis, and the axis perpendicular to the plane including the X-axis and the Y-axis is defined as the Z-axis, The rotation mechanism is a workpiece transport device that rotates the clamping mechanism, when it is clamping the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

2. The workpiece transport device of claim 1 , wherein the claw portion moving mechanism moves the pair of claw portions in a direction approaching each other in the Y-axis direction and clamps the workpiece by abutting the pair of claw portions against the outer peripheral surface of the workpiece.

3. The moving mechanism includes: a first moving mechanism that moves the clamp mechanism in the Z-axis direction; a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the Y-axis direction; The workpiece transport device according to claim 2 , further comprising: a third moving mechanism that moves the clamp mechanism, the first moving mechanism, and the second moving mechanism in the X-axis direction.

4. The work transport device according to claim 1, wherein each of the pair of claw portions has a first abutment portion that abuts against a lower portion of the workpiece and a second abutment portion that abuts against an upper portion of the workpiece when the pair of claw portions move in a direction approaching each other.

5. The workpiece transport device according to claim 4 , wherein the pair of claw portions have tapered surfaces that open toward each other in a V-shape and function as the first contact portion and the second contact portion, respectively.

6. 2. The work transport device according to claim 1, wherein the moving mechanism moves the clamping mechanism that clamps the work until a central axis of the work coincides with a rotation axis of the cylindrical grinding device body between a spindle and a tail of the cylindrical grinding device body.

7. 7. The workpiece transport device according to claim 6, wherein the moving mechanism further moves the clamping mechanism that clamps the workpiece until one end surface of the workpiece abuts against the spindle.

8. The workpiece transport device according to claim 1 , wherein the pair of claws clamps the center of the length of the workpiece.

9. A cylindrical grinding device body, A cylindrical grinding machine including a workpiece conveying device that conveys a cylindrical workpiece to be processed to the cylindrical grinding machine body, The workpiece transport device is A clamping mechanism having a pair of claws for clamping the workpiece; A turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the work clamped between a spindle jaw and a tail jaw of the cylindrical grinding device body in a state where the central axis of the work coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation of the crystal axis of the work from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X-axis, the axis perpendicular to the X-axis is defined as the Y-axis, and the axis perpendicular to the plane including the X-axis and the Y-axis is defined as the Z-axis, The rotating mechanism is a cylindrical grinding device that rotates the clamping mechanism, while it is clamping the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

10. 2. A method for correcting a misalignment of the clamped workpiece relative to a rotation shaft of the cylindrical grinding machine body by using the workpiece transport device according to claim 1, comprising: a measurement process in which a cylindrical workpiece to be machined is clamped in a state in which a spindle jaw of a cylindrical grinding device body is in contact with a top end face of the cylindrical workpiece and a tail jaw of the cylindrical grinding device body is in contact with a bottom end face of the workpiece, and the crystal plane orientation of the workpiece is measured while the workpiece is positioned at a reference position and rotated a predetermined angle from the reference position, and a correction value is output to correct the amount of deviation of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; and a misalignment correction step of controlling the rotation mechanism so as to eliminate the misalignment.

11. The method for correcting the amount of deviation according to claim 11 , further comprising repeatedly executing the measuring step and the amount of deviation correcting step until the amount of deviation of the workpiece after the amount of deviation correcting step becomes equal to or smaller than a set value.

12. the deviation amount is a deviation angle of a crystal axis of the workpiece relative to a rotation axis of the cylindrical grinding machine body, 13. The method for correcting the amount of deviation according to claim 11 or 12, wherein the step of correcting the amount of deviation comprises controlling the turning mechanism so that the clamping mechanism that clamps the workpiece turns by the deviation angle.

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