Galvano-scanner unit and laser processing machine

Abstract

To provide a galvano-scanner unit which can increase vibration frequency of a galvano-mirror.SOLUTION: A first set of galvano-mirrors of first to fourth galvano-mirrors 321, 323, 325, 327 displace laser beam in a direction of a first shaft along a face of a sheet metal. A second set of galvano-mirrors other than the first set of galvano-mirrors displace laser beam in a direction of a second shaft orthogonal to the direction of the first shaft along the face of the sheet metal. A first set of galvano-motors for rotating the first set of galvano-mirrors simultaneously rotate the first set of galvano-mirrors so as to displace laser beam in a mutually same direction including positive and negative directions of the direction of the first shaft by only a same distance. A second set of galvano-motors for rotating the second set of galvano-mirrors simultaneously rotate the second set of galvano-mirrors so as to displace laser beam in a mutually same direction including positive and negative directions of the direction of the second shaft by only a same distance.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a galvanometer scanner unit and a laser processing machine. [Background technology]

[0002] Patent Document 1 describes a laser processing machine that processes sheet metal by vibrating a laser beam emitted from a processing head using a pair of galvanometer mirrors in a galvanometer scanner unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-155404 [Patent Document 2] Japanese Patent Application Laid-Open No. 2004-230466 [Patent Document 3] Japanese Patent Application Laid-Open No. 2004-249364 Summary of the Invention [Problem to be solved by the invention]

[0004] In recent years, the power of laser beams emitted from laser oscillators has been increasing. As the power of laser beams increases, the galvanometer mirror needs to be larger to improve its light resistance. As the galvanometer mirror becomes larger, the galvanometer motor that drives the galvanometer mirror to rotate back and forth within a specified angle range needs to be larger. As the galvanometer mirror and galvanometer motor become larger, the inertia (rotational moment) increases, and the maximum vibration frequency decreases. As the power of laser beams increases, the sheet metal processing speed increases, so ideally the vibration frequency at which the laser beam vibrates needs to be increased.

[0005] However, the inertia of the galvanometer mirror and galvanometer motor increases, lowering the maximum vibration frequency, making it impossible to increase the vibration frequency with the configuration of the conventional galvanometer scanner unit. There is a demand for a galvanometer scanner unit that can increase the vibration frequency of the galvanometer mirror more than conventional ones, and for a laser processing machine equipped with the same. [Means for solving the problem]

[0006] A first aspect of one or more embodiments provides a galvanometer scanner unit including: a first galvanometer mirror that reflects an incident laser beam; a first galvanometer motor that drives the first galvanometer mirror to rotate; a second galvanometer mirror that receives the laser beam reflected by the first galvanometer mirror and reflects the incident laser beam; a second galvanometer motor that drives the second galvanometer mirror to rotate; a third galvanometer mirror that receives the laser beam reflected by the second galvanometer mirror and reflects the incident laser beam; a third galvanometer motor that drives the third galvanometer mirror to rotate; a fourth galvanometer mirror that receives the laser beam reflected by the third galvanometer mirror and reflects the incident laser beam; and a fourth galvanometer motor that drives the fourth galvanometer mirror to rotate.

[0007] In the galvanometer scanner unit configured as described above, a first set of galvanometer mirrors, which is a set of any two galvanometer mirrors among the first to fourth galvanometer mirrors, displaces the laser beam irradiated onto the metal sheet to be processed in the direction of a first axis along the surface of the metal sheet, and a second set of galvanometer mirrors, which is a set of two galvanometer mirrors among the first to fourth galvanometer mirrors other than the first set, displaces the laser beam irradiated onto the metal sheet in the direction of a second axis perpendicular to the direction of the first axis along the surface of the metal sheet. A first set of galvanometer motors, which is a set of two galvanometer motors that rotate the first set of galvanometer mirrors, simultaneously drives the first set of galvanometer mirrors so as to displace the laser beam irradiated onto the metal sheet by the same distance in the same direction, including the positive and negative directions of the first axis. The second set of galvanometer motors, which are a pair of two galvanometer motors that rotate the second set of galvanometer mirrors, simultaneously drive the second set of galvanometer mirrors so as to displace the laser beams irradiated onto the metal plate by the same distance in the same direction, including the positive and negative directions of the second axis.

[0008] A second aspect of one or more embodiments includes a collimation lens that converts a diverging laser beam into collimated light, a galvanometer scanner unit that receives the laser beam emitted from the collimation lens and vibrates the laser beam to be irradiated onto a metal plate to be processed, a processing head having a focusing lens that focuses the laser beam emitted from the galvanometer scanner unit and irradiates the metal plate, a movement mechanism that moves the processing head relatively to a surface of the metal plate, and a control device that controls the vibration of the laser beam by the galvanometer scanner unit and controls the relative movement of the processing head by the movement mechanism, wherein the galvanometer scanner unit has a first galvanometer mirror that reflects the incident laser beam. a first galvanometer motor that drives the first galvanometer mirror to rotate; a second galvanometer mirror onto which a laser beam reflected by the first galvanometer mirror is incident and which reflects the incident laser beam; a second galvanometer motor that drives the second galvanometer mirror to rotate; a third galvanometer mirror onto which the laser beam reflected by the second galvanometer mirror is incident and which reflects the incident laser beam; a third galvanometer motor that drives the third galvanometer mirror to rotate; a fourth galvanometer mirror onto which the laser beam reflected by the third galvanometer mirror is incident and which reflects the incident laser beam; and a fourth galvanometer motor that drives the fourth galvanometer mirror to rotate.

[0009] In the laser processing machine configured as described above, a first set of galvanometer mirrors, which is a set of any two galvanometer mirrors from the first to fourth galvanometer mirrors, is a galvanometer mirror that displaces the laser beam irradiated onto the sheet metal in the direction of a first axis along the surface of the sheet metal, and a second set of galvanometer mirrors, which is a set of two galvanometer mirrors from the first to fourth galvanometer mirrors other than the galvanometer mirrors from the first set, is a galvanometer mirror that displaces the laser beam irradiated onto the sheet metal in the direction of a second axis that is perpendicular to the direction of the first axis along the surface of the sheet metal. The control device simultaneously controls a first set of galvanometer motors, each consisting of two galvanometer motors that rotate the first set of galvanometer mirrors, so that the laser beams irradiated onto the metal sheet are displaced by the first set of galvanometer mirrors by the same distance in the same direction, including positive and negative directions in the direction of the first axis, and simultaneously controls a second set of galvanometer motors, each consisting of two galvanometer motors that rotate the second set of galvanometer mirrors, so that the laser beams irradiated onto the metal sheet are displaced by the second set of galvanometer mirrors by the same distance in the same direction, including positive and negative directions in the direction of the second axis. [Effects of the Invention]

[0010] According to the galvanometer scanner unit and laser processing machine according to one or more embodiments, the vibration frequency of the galvanometer mirror can be made higher than conventionally. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a diagram illustrating a laser processing machine according to one or more embodiments. [Figure 2] FIG. 2 is a perspective view of a galvanometer scanner unit according to one or more embodiments. [Figure 3] FIG. 3 is a characteristic diagram showing the relationship between the deflection angle of the galvanometer motor and the vibration frequency of the galvanometer mirror. [Figure 4]FIG. 4 is a characteristic diagram showing the relationship between the amplitude of the beam and the oscillation frequency of the galvanometer mirror when the galvanometer scanner unit according to one or more embodiments and a conventional galvanometer scanner unit oscillate the laser beam. DETAILED DESCRIPTION OF THE INVENTION

[0012] A galvanometer scanner unit and a laser processing machine according to one or more embodiments will be described below with reference to the accompanying drawings. First, an example of the overall configuration of a laser processing machine according to one or more embodiments will be described. In FIG. 1, a laser processing machine 100 includes a laser oscillator 10, a process fiber 12, a laser processing unit 20, an NC device 50, and an assist gas supply device 80.

[0013] The laser oscillator 10 generates and emits a laser beam, and the process fiber 12 transmits the laser beam emitted from the laser oscillator 10 to the laser processing unit 20. Typically, the laser oscillator 10 is a fiber laser oscillator that emits a laser beam with a wavelength of 1060 nm to 1080 nm. The NC device 50 is an example of a control device that controls each part of the laser processing machine 100.

[0014] The laser processing unit 20 has a processing table 21 on which the metal sheet W to be processed is placed, a gate-shaped X-axis carriage 22, a Y-axis carriage 23, a collimator unit 30 fixed to the Y-axis carriage 23, and a processing head 35. The X-axis carriage 22 is configured to be movable in the X-axis direction on the processing table 21. The Y-axis carriage 23 is configured to be movable in the Y-axis direction perpendicular to the X-axis on the X-axis carriage 22. The X-axis carriage 22 and the Y-axis carriage 23 function as a movement mechanism that moves the processing head 35 along the surface of the metal sheet W in the X-axis direction, the Y-axis direction, or any combined direction of the X-axis and Y-axis directions.

[0015] Instead of moving the processing head 35 along the surface of the metal sheet W, the processing head 35 may be configured to be fixed in position and the metal sheet W may move. The laser processing machine 100 may be provided with a movement mechanism that moves the processing head 35 relative to the surface of the metal sheet W.

[0016] The processing head 35 is fitted with a nozzle 36 having a circular opening 36a at its tip, which emits a laser beam from the opening 36a. The laser beam emitted from the opening 36a of the nozzle 36 is irradiated onto the metal sheet W. An assist gas supply device 80 supplies nitrogen, oxygen, or the like as an assist gas to the processing head 35. When the metal sheet W is processed, the assist gas is sprayed onto the metal sheet W from the opening 36a.

[0017] 2, the collimator unit 30 includes a collimation lens 301, a galvanometer scanner unit 302, and a bend mirror 303. The collimation lens 301 converts the diverging laser beam emitted from the process fiber 12 into parallel light (collimated light). The galvanometer scanner unit 302 includes first to fourth galvanometer mirrors 321, 323, 325, and 327, and first to fourth galvanometer motors 322, 324, 326, and 328 that drive the first to fourth galvanometer mirrors 321, 323, 325, and 327 to rotate them, respectively. The bend mirror 303 reflects the laser beam emitted from the galvanometer scanner unit 302 downward in the Z-axis direction, which is perpendicular to the X-axis and Y-axis.

[0018] In FIG. 2, the first to fourth galvanometer motors 322, 324, 326, and 328 are fixed to a support member (not shown), and the positions of the first to fourth galvanometer mirrors 321, 323, 325, and 327 within the space of the collimator unit 30 are set.

[0019] The processing head 35 includes a focusing lens 304 that focuses the laser beam reflected by the bend mirror 303 and irradiates the metal plate W with the focused laser beam.

[0020] The laser processing machine 100 is centered so that the laser beam emitted from the opening 36a of the nozzle 36 is positioned at the center of the opening 36a. In the standard state, the laser beam is emitted from the center of the opening 36a. The galvano scanner unit 302 functions as a beam vibration mechanism that vibrates the laser beam, which travels through the processing head 35 and is emitted from the opening 36a, within the opening 36a. Under the control of the NC device 50, the galvano scanner unit 302 vibrates the laser beam in a direction parallel to the traveling direction of the processing head 35 (laser beam), in a direction perpendicular to the traveling direction, or so that the beam spot draws a circle.

[0021] The configuration and operation of the galvanometer scanner unit 302 will be described in detail. A collimated laser beam emitted from the collimation lens 301 is incident on the first galvanometer mirror 321, which reflects the incident laser beam. The laser beam reflected by the first galvanometer mirror 321 is incident on the second galvanometer mirror 323, which reflects the incident laser beam. The laser beam reflected by the second galvanometer mirror 323 is incident on the third galvanometer mirror 325, which reflects the incident laser beam. The laser beam reflected by the third galvanometer mirror 325 is incident on the fourth galvanometer mirror 327, which reflects the incident laser beam.

[0022] A first set of galvanometer mirrors, which is a set of any two galvanometer mirrors among the first to fourth galvanometer mirrors 321, 323, 325, and 327, is a galvanometer mirror that displaces the laser beam irradiated onto the metal sheet W in the X-axis direction (direction of the first axis) along the surface of the metal sheet W. A second set of galvanometer mirrors, which is a set of two galvanometer mirrors other than the first set of galvanometer mirrors among the first to fourth galvanometer mirrors 321, 323, 325, and 327, is a galvanometer mirror that displaces the laser beam irradiated onto the metal sheet W in the Y-axis direction (direction of the second axis) along the surface of the metal sheet.

[0023] The first set of galvanometer motors, which are a pair of two galvanometer motors that rotate the first set of galvanometer mirrors, simultaneously drive the first set of galvanometer mirrors so as to displace the laser beam irradiated onto the metal sheet W by the same distance in the same direction, including the positive and negative directions in the X-axis direction. In other words, if one direction in the X-axis direction is defined as the positive X-axis direction and the opposite direction is defined as the negative X-axis direction, the first set of galvanometer motors simultaneously drive the first set of galvanometer mirrors so as to displace the laser beam by the same distance in the positive X-axis direction, or simultaneously drive the first set of galvanometer mirrors so as to displace the laser beam by the same distance in the negative X-axis direction.

[0024] The second set of galvanometer motors, which are a pair of two galvanometer motors that rotate the second set of galvanometer mirrors, simultaneously drive the second set of galvanometer mirrors so as to displace the laser beam irradiated onto the metal sheet W by the same distance in the same direction, including the positive and negative directions in the Y-axis direction. In other words, if one direction in the Y-axis direction is defined as the positive direction in the Y-axis direction and the opposite direction is defined as the negative direction in the Y-axis direction, the second set of galvanometer motors simultaneously drive the second set of galvanometer mirrors so as to displace the laser beam by the same distance in the positive direction in the Y-axis direction, or simultaneously drive the second set of galvanometer mirrors so as to displace the laser beam by the same distance in the negative direction in the Y-axis direction.

[0025] The NC device 50 controls the first set of galvanometer motors so that the laser beams irradiated onto the metal sheet W are displaced by the first set of galvanometer mirrors by the same distance in the same direction, including the positive and negative directions in the X-axis direction. The NC device 50 simultaneously controls the first set of galvanometer motors so that the first set of galvanometer mirrors rotate simultaneously in synchronization with each other. The NC device 50 controls the second set of galvanometer motors so that the second set of galvanometer mirrors displace the laser beams irradiated onto the metal sheet W by the same distance in the same direction, including the positive and negative directions in the Y-axis direction. The NC device 50 simultaneously controls the second set of galvanometer motors so that the second set of galvanometer mirrors rotate simultaneously in synchronization with each other.

[0026] The galvanometer scanner unit 302 can combine the rotation of the first set of galvanometer mirrors with the rotation of the second set of galvanometer mirrors under the control of the NC device 50. This allows the galvanometer scanner unit 302 to displace the laser beam irradiated onto the metal sheet W in the X-axis direction, the Y-axis direction, or any composite direction of the X-axis direction and the Y-axis direction.

[0027] 2, the positional relationship between first galvanometer mirror 321 and first galvanometer motor 322 is the same as the positional relationship between third galvanometer mirror 325 and third galvanometer motor 326. The positional relationship between second galvanometer mirror 323 and second galvanometer motor 324 is the same as the positional relationship between fourth galvanometer mirror 327 and fourth galvanometer motor 328. Therefore, it is preferable that first galvanometer mirror 321 and third galvanometer mirror 325 form a first set of galvanometer mirrors, and second galvanometer mirror 323 and fourth galvanometer mirror 327 form a second set of galvanometer mirrors.

[0028] In the following, an example will be taken in which the first galvanometer mirror 321 and the third galvanometer mirror 325 form a first set of galvanometer mirrors, and the second galvanometer mirror 323 and the fourth galvanometer mirror 327 form a second set of galvanometer mirrors.

[0029] In this case, in order to displace the laser beams irradiated onto the metal sheet W by the same distance in the same direction, including the positive and negative directions in the X-axis and Y-axis directions, the first galvanometer motor 322 and the third galvanometer motor 326 may be rotated in the same direction, and the first galvanometer mirror 321 and the third galvanometer mirror 325 may be rotated in the same angular direction. Also, the second galvanometer motor 324 and the fourth galvanometer motor 328 may be rotated in the same direction, and the second galvanometer mirror 323 and the fourth galvanometer mirror 327 may be rotated in the same angular direction.

[0030] If the positional relationship between first galvanometer mirror 321 and first galvanometer motor 322 and the positional relationship between third galvanometer mirror 325 and third galvanometer motor 326 are reversed, the rotation direction of first galvanometer motor 322 and the rotation direction of third galvanometer motor 326 must be reversed. If the positional relationship between second galvanometer mirror 323 and second galvanometer motor 324 and the positional relationship between fourth galvanometer mirror 327 and fourth galvanometer motor 328 are reversed, the rotation direction of second galvanometer motor 324 and the rotation direction of fourth galvanometer motor 328 must be reversed.

[0031] Consider the configuration of a conventional galvanometer scanner unit that has only one galvanometer mirror for one axis, as described in Patent Document 1. In this case, the amplitude L of the laser beam at the processing point on the metal sheet W is expressed by equation (1), where θa is the angle variable amount of the galvanometer mirror and f is the focal length of the focusing lens 304. L=2fθa …(1)

[0032] In contrast, the galvanometer scanner unit 302 is configured with two galvanometer mirrors for one axis, so if the angle variable amounts of the first galvanometer mirror 321 and the third galvanometer mirror 325 are θ321 and θ325, respectively, the amplitude L of the laser beam is expressed by equation (2). L=2f(θ321+θ325) …(2)

[0033] If the amplitude L is the same between the conventional galvano-scanner unit and the galvano-scanner unit 302, the angle variations θa, θ321, and θ325 have the relationship shown in equation (3). θa / 2=θ321=θ325 …(3)

[0034] From equation (3), it can be seen that when the galvanometer scanner unit 302 shown in FIG. 2 is used, the amount of angle variation of one galvanometer mirror is half the amount of angle variation of one galvanometer mirror in a conventional galvanometer scanner unit.

[0035] The relationship between the deflection angle of the galvanometer motor and the vibration frequency of the galvanometer mirror is shown in Figure 3. The smaller the deflection angle of the galvanometer motor, the higher the vibration frequency. With the galvanometer scanner unit 302, the amount of angle variation of the galvanometer mirror required to oscillate the laser beam with the same amplitude L, as shown in equation (3), is half that of a conventional galvanometer scanner unit.

[0036] In Fig. 4, the solid line shows the relationship between the beam amplitude and the oscillation frequency of one galvanometer mirror when one galvanometer motor is used to rotate the laser beam to oscillate the laser beam in the conventional galvanometer scanner unit shown in Fig. 3. The dashed line shows the relationship between the beam amplitude and the oscillation frequency of first galvanometer mirror 321 and third galvanometer mirror 325, or second galvanometer mirror 323 and fourth galvanometer mirror 327 when two galvanometer mirrors are rotated by first galvanometer motor 322 and third galvanometer motor 326, or second galvanometer motor 324 and fourth galvanometer motor 328 in galvanometer scanner unit 302 to oscillate the laser beam. As shown in Fig. 4, galvanometer scanner unit 302 can increase the oscillation frequency for the same beam amplitude compared to conventional galvanometer scanner units.

[0037] As described above, the galvanometer scanner unit 302 and the laser processing machine 100 according to one or more embodiments can increase the vibration frequency of the first to fourth galvanometer mirrors 321, 323, 325, and 327 compared to conventional ones. Therefore, the increase in the vibration frequency can offset the decrease in vibration frequency caused by the increase in inertia that accompanies the increase in size of the first to fourth galvanometer mirrors 321, 323, 325, and 327 and the first to fourth galvanometer motors 322, 324, 326, and 328.

[0038] According to the galvanometer scanner unit 302 and the laser processing machine 100 of one or more embodiments, even if the first to fourth galvanometer mirrors 321, 323, 325, 327 are enlarged in accordance with the increase in the output of the laser beam, the vibration frequency of the laser beam can be increased in response to the increase in the processing speed of the sheet metal W.

[0039] Incidentally, Patent Documents 2 and 3 describe laser processing machines equipped with configurations corresponding to first to fourth galvanometer mirrors and first to fourth galvanometer motors. However, in the configurations described in Patent Documents 2 and 3, the first and third galvanometer mirrors and the second and fourth galvanometer mirrors are not rotated simultaneously. Therefore, the configurations described in Patent Documents 2 and 3 cannot achieve the objective of increasing the vibration frequency of the galvanometer mirrors.

[0040] The present invention is not limited to one or more of the embodiments described above, and various modifications are possible without departing from the spirit of the present invention. In one or more of the embodiments described above, there are two pairs of galvanometer mirrors, each of which displaces the laser beam in the X-axis direction and the Y-axis direction, but three or more pairs are also possible. [Explanation of symbols]

[0041] 10 Laser oscillator 12 Process Fiber 20 Laser processing unit 21 Processing table 22 X-axis carriage (movement mechanism) 23 Y-axis carriage (movement mechanism) 30 Collimator Unit 35 Processing head 36 nozzles 36a aperture 50 NC unit (control unit) 80 Assist gas supply device 100 Laser Processing Machine 301 Collimation Lens 302 Galvano Scanner Unit 303 Bend Mirror 304 focusing lens 321 First Galvanometer Mirror 322 First Galvanometer Motor 323 Second Galvanometer Mirror 324 Second Galvanometer Motor 325 Third Galvanometer Mirror 326 Third Galvanometer Motor 327 Fourth Galvanometer Mirror 328 Fourth Galvano Motor W sheet metal

Claims

1. a first galvanometer mirror that reflects the incident laser beam; a first galvanometer motor that drives the first galvanometer mirror to rotate; a second galvanometer mirror on which the laser beam reflected by the first galvanometer mirror is incident and which reflects the incident laser beam; a second galvanometer motor that drives the second galvanometer mirror to rotate; a third galvanometer mirror onto which the laser beam reflected by the second galvanometer mirror is incident and which reflects the incident laser beam; a third galvanometer motor that drives the third galvanometer mirror to rotate; a fourth galvanometer mirror onto which the laser beam reflected by the third galvanometer mirror is incident and which reflects the incident laser beam; a fourth galvanometer motor that drives the fourth galvanometer mirror to rotate; Equipped with a first set of galvanometer mirrors, which is a set of any two galvanometer mirrors among the first to fourth galvanometer mirrors, is a galvanometer mirror that displaces the laser beam irradiated onto the metal sheet to be processed in the direction of a first axis along a surface of the metal sheet, a second set of galvanometer mirrors, which is a set of two galvanometer mirrors other than the first set of galvanometer mirrors among the first to fourth galvanometer mirrors, displaces the laser beam irradiated onto the metal plate in a direction of a second axis perpendicular to the direction of the first axis along a surface of the metal plate, a first set of galvanometer motors, each of which is a pair of two galvanometer motors that rotate the first set of galvanometer mirrors, simultaneously drives the first set of galvanometer mirrors so as to displace the laser beams irradiated onto the metal plate by the same distance in the same direction, including the positive and negative directions of the first axis; The second set of galvanometer motors, which are a pair of two galvanometer motors that rotate the second set of galvanometer mirrors, simultaneously drive the second set of galvanometer mirrors so as to displace the laser beams irradiated onto the metal plate by the same distance in the same direction, including the positive and negative directions of the second axis. Galvanometer scanner unit.

2. the first set of galvanometer mirrors are the first and third galvanometer mirrors, and the first set of galvanometer motors are the first and third galvanometer motors; The second set of galvanometer mirrors are the second and fourth galvanometer mirrors, and the second set of galvanometer motors are the second and fourth galvanometer motors. The galvanometer scanner unit according to claim 1 .

3. a collimation lens that converts the diverging laser beam into collimated light; a galvano scanner unit into which the laser beam emitted from the collimation lens is incident and which vibrates the laser beam to be irradiated onto the sheet metal to be processed; a processing head having a focusing lens that focuses the laser beam emitted from the galvano scanner unit and irradiates the laser beam onto the metal plate; a moving mechanism that moves the processing head relative to the surface of the metal plate; a control device that controls the vibration of the laser beam by the galvano scanner unit and controls the relative movement of the processing head by the movement mechanism; Equipped with The galvanometer scanner unit includes: a first galvanometer mirror that reflects the incident laser beam; a first galvanometer motor that drives the first galvanometer mirror to rotate; a second galvanometer mirror on which the laser beam reflected by the first galvanometer mirror is incident and which reflects the incident laser beam; a second galvanometer motor that drives the second galvanometer mirror to rotate; a third galvanometer mirror onto which the laser beam reflected by the second galvanometer mirror is incident and which reflects the incident laser beam; a third galvanometer motor that drives the third galvanometer mirror to rotate; a fourth galvanometer mirror onto which the laser beam reflected by the third galvanometer mirror is incident and which reflects the incident laser beam; a fourth galvanometer motor that drives the fourth galvanometer mirror to rotate; and a first set of galvanometer mirrors, which is a set of any two galvanometer mirrors among the first to fourth galvanometer mirrors, is a galvanometer mirror that displaces the laser beam irradiated onto the metal plate in a direction of a first axis along a surface of the metal plate; a second set of galvanometer mirrors, which is a set of two galvanometer mirrors other than the first set of galvanometer mirrors among the first to fourth galvanometer mirrors, displaces the laser beam irradiated onto the metal plate in a direction of a second axis perpendicular to the direction of the first axis along a surface of the metal plate, The control device a first set of galvanometer motors, each set consisting of two galvanometer motors that rotate the first set of galvanometer mirrors, are simultaneously controlled so that the laser beams irradiated onto the metal plate are displaced by the first set of galvanometer mirrors by the same distance in the same direction including the positive and negative directions of the first axis; A second set of galvanometer motors, each consisting of two galvanometer motors that rotate the second set of galvanometer mirrors, is simultaneously controlled so that the laser beams irradiated onto the metal plate are displaced by the second set of galvanometer mirrors by the same distance in the same direction including the positive and negative directions of the second axis. Laser processing machine.

4. the first set of galvanometer mirrors are the first and third galvanometer mirrors, and the first set of galvanometer motors are the first and third galvanometer motors; The second set of galvanometer mirrors are the second and fourth galvanometer mirrors, and the second set of galvanometer motors are the second and fourth galvanometer motors.

4. The laser processing machine according to claim 3.

Images