PCB processing system
The substrate processing system improves productivity by integrating efficient transfer and processing units with multi-axis robot arms, facilitating simultaneous substrate handling and preventing pattern collapse.
JP2026116434APending Publication Date: 2026-07-09TOKYO ELECTRON LTD
Patent Information
- Application Number
- JP2026075991
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-02-21
- Filing Date
- 2026-04-30
- Publication Date
- 2026-07-09
Smart Images
Figure 2026116434000001_ABST
Abstract
This technology can improve the productivity of substrate processing systems. [Solution] A substrate processing system according to one aspect of the present disclosure includes an loading / unloading unit for loading and unloading cassettes containing a plurality of substrates, a batch processing unit for processing lots containing a plurality of substrates at once, a single-wafer processing unit for processing the substrates in the lot one by one, and an interface unit for transferring the substrates between the batch processing unit and the single-wafer processing unit, wherein the batch processing unit includes a first transport device for transporting the lot, and the interface unit includes an immersion tank for immersing the lot, and a second transport device for transferring the lot between the first transport device and the immersion tank.
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Citation Information
Patent Citations
Substrate processing system, and substrate processing method
JP2021064654A