Optical apparatus, inspection apparatus, and alignment method

The use of a spatial light modulator for electrically controlled alignment of optical waveguides in optical integrated circuits addresses the inefficiency of mechanical alignment, enabling fast and efficient alignment of multiple channels.

JP2026135644APending Publication Date: 2026-08-25SCREEN HOLDINGS CO LTD
1 Cites 0 Cited by

Patent Information

Application Number
JP2025021280
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-13
Publication Date
2026-08-25

AI Technical Summary

Technical Problem

Conventional alignment techniques for optical waveguides in optical integrated circuits require mechanical movement for high-precision alignment, which is slow and inefficient, especially when multiple channels are involved.

Method used

Utilizing a spatial light modulator to electrically control the position of light beams, allowing for parallel alignment of multiple optical waveguides without mechanical movement, by modulating light into predetermined patterns to achieve precise alignment.

Benefits of technology

Significantly reduces alignment time and enables efficient inspection of multiple optical waveguides by performing alignment processing faster than conventional mechanical methods, with the potential to complete processing in less than 100 msec per channel.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

This reduces the time required for alignment processing, enabling efficient inspection of optical waveguides provided in optical integrated circuits. [Solution] This invention is an optical device for inspecting an optical integrated circuit, comprising: a light source that emits light; an illumination optical unit that shapes the light emitted by the light source into a predetermined shape; a modulation unit that receives the light shaped by the illumination optical unit and modulates the received light with the spatial light modulator to emit light having a predetermined pattern shape; and a light guide unit that guides the light emitted from the modulation unit to the input end of an optical waveguide provided in the optical integrated circuit.
Need to check novelty before this filing date? Find Prior Art