Patterning material, patterning composition, and method for forming a pattern

Abstract

The present application relates to a patterning material, a patterning composition, and a pattern forming method. The patterning material of the present application includes a metal-oxygen cluster framework, a radiation-sensitive organic ligand, and a second ligand. The radiation-sensitive organic ligand is coordinated to a metal M through a coordination atom. The coordination atom is at least one of an oxygen atom, a sulfur atom, a selenium atom, a nitrogen atom, and a phosphorus atom. The radiation-sensitive organic ligand is a monodentate ligand or a polydentate ligand having two or more dentates. The second ligand is an inorganic ion or a coordination group.

Description

[Technical field]

[0001] This application claims priority to Chinese Patent Application No. 202110402526.2, filed on April 14, 2021, which is incorporated herein by reference in its entirety.

[0002] The present application relates to the fields of patterning materials, radiation-sensitive patterning compositions, patterning methods, patterned substrates, methods of patterning a substrate, and integrated circuit devices, and in particular to patterning materials, radiation-sensitive patterning compositions comprising the patterning materials, patterning methods using the patterning materials, patterned substrates formed using the patterning materials, methods of patterning a substrate carried out using the patterned substrates, and integrated circuit devices comprising surface structures formed using the methods of patterning a substrate. [Background technology]

[0003] As consumer electronic products, especially various terminals such as tablet computers, notebook computers, digital cameras, mobile phones, wearable electronic devices, and virtual reality devices, become smaller and more powerful, there is an ever-increasing demand for high integration of integrated circuit (IC) devices, and the chip's computing power per unit area needs to be gradually increased, and the efficiency of electronic products needs to be increasingly improved. In order to support the rapid development of the integrated circuit industry, especially in terms of improving the chip's computing power per unit area, that is, making the corresponding critical dimensions smaller, the rapid development of patterning technology is inevitable. In order to support the mass production of chip processes, integrated circuit patterning processes have been developed. In particular, the patterning process usually includes the following steps: a coating substrate film layer is irradiated through a template of a given pattern to form an irradiation structure including an irradiated coating area and a non-irradiated coating area. The irradiated structure or the non-irradiated structure is selectively dissolved and washed. The pattern formed by the remaining material becomes the same as the pattern of the template. The remaining patterning material usually has an etching resistance in the etching step. Optionally, an underlying protective material may be provided, so that the substrate is not etched or is etched slowly. A pattern is then formed and transferred to the underlying substrate to form a pattern on a wafer, such as a silicon wafer, which is the pattern obtained by the first selective exposure. A specific process is shown in FIG.

[0004] The most advanced patterning processes, using light with wavelengths less than 15 nm, require low transmission efficiency of the light source of the patterning technology and high sensitivity of the patterning material. Typically, the exposure energy is 30 mJ / cm 2The maximum resolution is within 10 nm, the highest resolution is less than 20 nm, and the LER / LWR edge roughness is within 8% of the resolution. Current patterning materials cannot meet the highest resolution that should theoretically be obtained by the most advanced patterning of less than 10 nm. Existing material systems include organic polymers, organic small molecules, organometallics, organosilicon, etc. Organic polymer material systems are the traditional patterning materials. Organic polymer material systems are used before short wavelengths of less than 15 nm are used. When the wavelength of the light source for patterning is reduced to less than 15 nm, the requirements for the resolution of the patterns formed become higher. However, the current limit of the resolution of the patterns formed using organic polymer material systems is about 13 nm. Therefore, several material systems are being considered in the industry. Organosilicon material systems have high resolution and small molecular size. However, silicon has low sensitivity to light sources of less than 15 nm and requires extremely high exposure energy.

[0005] Metal-organic cluster patterning materials, such as those included in the metal-organic material system, have attracted much attention. Cluster materials have been studied in various fields for many years and have a mature material resource library. Metal-organic cluster materials are highly sensitive to light sources below 15 nm, have a variety of constituent elements and methods, have a large range of molecular clusters to choose from, and have a large range of tunable properties. In particular, the use of cluster molecules with sizes below 2 nm has the potential advantages of increasing the final pattern resolution, reducing edge roughness, and increasing sensitivity. Although the current material library is huge, the performance of metal-organic cluster patterning materials is not complete and is still being explored in many ways.

[0006] However, in the prior art, the metal-organic cluster patterning materials developed usually generate gases such as CO2 after exposure, which contaminates the inside of the exposure machine, making it difficult to implement large-scale industrial production, and adversely affecting the resolution and edge roughness of the formed pattern. In addition, in the prior art, the structural stability and radiation sensitivity of the metal-organic cluster patterning materials still have room for improvement. Summary of the Invention [Means for solving the problem]

[0007] In consideration of this, a patterning material is provided. The patterning material has a stable, uniform, flexible and tunable structure, a small molecular size, and is highly sensitive to radiation (ultraviolet light, X-rays, or electron beams, particularly ultraviolet light, X-rays, and electron beams with wavelengths of less than 15 nm) (exposure energy of 200 mJ / cm2 for ultraviolet light and X-rays). 2 For electron beams, the exposure energy is 100μC / cm 2 Less than 100 nm), and almost no harmful gas is generated during exposure (i.e., excellent low outgassing). Therefore, the patterning material may be used as a positive patterning material or a negative patterning material, and can be adapted to different scenarios, and can be exposed to obtain a pattern with high resolution (resolution of less than 100 nm, and even resolution of less than 10 nm), high pattern edge resolution (edge ​​roughness of less than 30% of the pattern resolution), and strong etching resistance, and almost no gas contamination occurs in the cavity of the exposure device during exposure. In addition, the synthesis method and synthesis process of the patterning material are simple, facilitating large-scale production.

[0008] A radiation-sensitive patterning composition is further provided, which may be used as a positive-tone patterning composition or a negative-tone patterning composition, adapted for different scenarios, and exposed to obtain patterns with high resolution, high pattern edge definition, and strong etching resistance, and little gas contamination is generated in the cavity of the exposure device during exposure.

[0009] A patterning method is further provided, which can efficiently form a pattern with high resolution, high pattern edge definition, and strong etching resistance, and causes little gas contamination in the cavity of the exposure device during exposure.

[0010] A patterned substrate is further provided, which includes a patterned film including a pattern with high resolution, high pattern edge resolution, and strong etching resistance, and is therefore suitable for forming surface structures with high resolution and high pattern edge resolution on various substrates in various application scenarios.

[0011] There is also provided a method of patterning a substrate, which uses the patterned substrate described above, to obtain surface structures with high resolution and high pattern edge resolution on a variety of substrates, and is particularly suitable for the manufacture of highly integrated circuits, where surface structures with high resolution and high pattern edge resolution are required.

[0012] An integrated circuit device is further provided, which can have a high integration since the surface structure is formed using the method of patterning a substrate.

[0013] According to a first aspect, an embodiment of the present application provides a patterning material comprising a metal-oxygen cluster framework formed by a metal M-oxygen bridge bond, a radiation sensitive organic ligand, and a second ligand.

[0014] The radiation-sensitive organic ligand is coordinated to the metal M through a coordinating atom. The coordinating atom is at least one of an oxygen atom, a sulfur atom, a selenium atom, a nitrogen atom, and a phosphorus atom. The radiation-sensitive organic ligand is a monodentate ligand or a polydentate ligand having two or more dentates. The second ligand is an inorganic ion or a coordinating group.

[0015] In this case, the patterning material of the present application is a metal-oxygen cluster material, which has a stable, uniform, flexible and tunable structure, a small molecular size, and is highly sensitive to radiation (ultraviolet light, X-rays, or electron beams, particularly ultraviolet light, X-rays, and electron beams with wavelengths of less than 15 nm) (for ultraviolet light and X-rays, the exposure energy is less than 200 mJ / cm2). 2 For electron beams, the exposure energy is 100 μC / cm 2Less than 100 nm), and almost no harmful gas is generated during exposure (i.e., excellent low outgassing). Therefore, the patterning material may be used as a positive patterning material or a negative patterning material, and can be adapted to different scenarios, and can be exposed to obtain a pattern with high resolution (resolution of less than 100 nm, and even resolution of less than 10 nm), high pattern edge resolution (edge ​​roughness of less than 30% of the pattern resolution), and strong etching resistance, and almost no gas contamination occurs in the cavity of the exposure device during exposure. In addition, the synthesis method and synthesis process of the patterning material are simple, facilitating large-scale production.

[0016] According to a first aspect, in a first possible embodiment of the patterning material, the patterning material is represented by the following general formula (1): M x O y (OH) n (L1) a (L2) b (L3) c (L4) d X m General style (1)

[0017] In the general formula (1), 3≦x≦72, 0≦y≦72, 0≦a≦72, 0≦b≦72, 0≦c≦72, 0≦d≦72, 0≦n≦72, 0≦m≦72, y+n+a+b+c+d+m≦8; x, x, y, a, b, c, d, m, and n are all integers, a, b, c, and d are not all 0; L1, L2, L3, and L4 are used individually as radiation-sensitive organic ligands, with two or more of L1, L2, L3, and L4 coexisting in the same ligand, and X is a second ligand.

[0018] In this case, the patterning material of the present application may have a more suitable molecular structure, better radiation sensitivity, and / or better low outgassing properties.

[0019] According to a first aspect, in a first or second possible implementation of the patterning material, the metal M comprises at least one of indium, tin, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, zirconium, niobium, molybdenum, palladium, platinum, silver, cadmium, antimony, tellurium, hafnium, tungsten, gold, lead, and bismuth.

[0020] In this case, the patterning material of the present application can have a more stable structure and good radiation sensitivity.

[0021] According to the first aspect, in a third possible implementation of the patterning material, the metal M further comprises at least one of sodium, magnesium, aluminum, potassium, calcium, scandium, gallium, germanium, arsenic, rubidium, strontium, yttrium, technetium, ruthenium, rhodium, cesium, barium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, tantalum, rhenium, osmium, iridium, mercury, and polonium.

[0022] In this case, the structure of the patterning material of the present application becomes more flexible and tunable without losing stability, and has good radiation sensitivity.

[0023] According to the first aspect, in any one of the first to fourth possible embodiments of the patterning material, the coordinating atom is an oxygen atom, and the oxygen atom in the radiation-sensitive organic ligand does not form a carboxyl group or a peroxide bond.

[0024] In this case, the patterning material of the present application can have a more stable structure and good low outgassing properties.

[0025] According to the first aspect, in any one of the first to fifth possible embodiments of the patterning material, the radiation-sensitive organic ligand is formed using at least one of an alcohol amine, an alcohol, a phenol, a nitrogen-containing heterocyclic compound, a nitrile, a phosphine, a phosphonic acid, a thiol, and an organic selenium compound.

[0026] In this case, the patterning material of the present application can have good radiation sensitivity and good low outgassing properties.

[0027] According to the first aspect, in any one of the first to sixth possible embodiments of the patterning material, the coordinating group is at least one of a halogen group, a carboxylic acid group, a sulfonic acid group, a nitro group, an aliphatic alcohol group, an aromatic alcohol group, an aliphatic hydrocarbon group, and an aromatic hydrocarbon group, and the inorganic ion is a halogen ion, SO4 2- , and NO3 - At least one of the following:

[0028] In this case, the patterning material of the present application may have a more stable structure, good radiation sensitivity, and / or good low outgassing properties.

[0029] According to the first aspect, in a second possible embodiment of the patterning material, L1, L2, L3, and L4 are each derived from at least one of an alcoholamine, an alcohol, a phenol, a nitrogen-containing heterocyclic compound, a nitrile, a phosphine, a phosphonic acid, a thiol, and an organoselenium compound.

[0030] In this case, the patterning material of the present application can have a more stable structure, good radiation sensitivity, and good low outgassing properties, and is more easily obtained.

[0031] According to a first aspect, in any one of the first to eighth possible embodiments of the patterning material, the patterning material is an indium-oxygen cluster material represented by the following general formula (1-1). [M4(μ4-O)] x1 M x2 O y (OH) n X m (L1) a (L2) b (L3) c (L4) d General style (1-1)

[0032] In the general formula (1-1), M comprises at least indium, 1≦x1≦12, 0≦x2≦24, 0≦y≦24, 0≦a≦36, 0≦b≦36, 0≦c≦36, 0≦d≦36, 0≦n≦24, 0≦m≦24, y+n+m+a+b+c+d≦31(x1)+8(x2), x1, x2, y, a, b, c, d, m, and n are all integers, and a, b, c, and d are not all 0; L1, L2, L3, and L4 are used individually as radiation-sensitive organic ligands, with two or more of L1, L2, L3, and L4 coexisting in the same ligand, and X is a second ligand.

[0033] The indium-oxygen cluster materials of the present application have a stable, uniform, flexible and tunable structure, good radiation sensitivity, and good low outgassing properties.

[0034] According to the first aspect, in a ninth possible embodiment of the patterning material, the radiation-sensitive organic ligand in the indium-oxygen cluster material is coordinated to the metal M via a nitrogen atom or an oxygen atom as a coordinating atom, and L1, L2, L3, and L4 are each derived from at least one of an alcohol amine, an alcohol, a phenol, a nitrogen-containing heterocyclic compound, and a nitrile.

[0035] In this case, the indium-oxygen cluster materials of the present application are more easily obtained and have superior radiation sensitivity.

[0036] According to the first aspect, in a ninth or tenth possible embodiment of the patterning material, at least one X is a halogen ion or a halogen group.

[0037] In this case, the indium-oxygen cluster materials of the present application have particularly good radiation sensitivity.

[0038] According to the first aspect, in any one of the ninth to eleventh possible embodiments of the patterning material, the patterning material is an indium-oxygen cluster material represented by the following general formula (1-11). [In4(μ4-O)] x1 In x2 O y (OH) n (L1) a (L2) b X m General style (1-11)

[0039] In the formula (1-11), x1, x2, y, a, b, m, and n are all integers, a and b are not all 0, 1≦x1≦4, 2≦x2≦8, 1≦y≦4, 0≦a≦8, 0≦b≦12, 0≦n≦10, 0≦m≦8, and L1 is OR. 1 and L2 is NR 2 (CR 3 R 4 CR 5 R 6 O)2. R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 are each H, substituted or unsubstituted alkyl having 1 to 18 carbon atoms, substituted or unsubstituted aryl having 6 to 14 carbon atoms, and heterocyclic groups having 3 to 14 heteroatoms. Heteroatoms in heterocyclic groups include oxygen, sulfur, nitrogen, and phosphorus atoms. X is independently -F, -Cl, or -Br.

[0040] By using the indium-oxygen cluster material represented by the general formula (1-11), the above-mentioned technical effects of the present application can be particularly advantageously obtained.

[0041] According to the first aspect, in any one of the first to eighth possible embodiments of the patterning material, the patterning material is a tin-oxygen cluster material represented by the following general formula (1-2). M x O y (L1) a (L2) b X m General style (1-2)

[0042] In the general formula (1-2), M contains at least tin, 3≦x≦34, 0≦y≦51, 0≦a≦51, 0≦b≦51, 0≦m≦51, y+a+b+m≦8x, x, y, a, b, and m are all integers, and a and b are not all 0, L1 and L2 are used individually as radiation-sensitive organic ligands, or both L1 and L2 are used as radiation-sensitive organic ligands in a manner that they coexist within the same ligand, and X is a second ligand.

[0043] The tin-oxygen cluster materials of the present application have a stable, uniform, flexible and tunable structure, good radiation sensitivity, and good low outgassing properties.

[0044] According to the first aspect, in a thirteenth possible embodiment of the patterning material, the radiation-sensitive organic ligand in the tin-oxygen cluster material is coordinated to the metal M via a nitrogen atom as a coordinating atom, and L1 and L2 are each derived from at least one of an alcohol amine, a nitrogen-containing heterocyclic compound, and a nitrile.

[0045] In this case, the tin-oxygen cluster materials of the present application are more easily obtained and have better radiation sensitivity.

[0046] According to the first aspect, in a thirteenth or fourteenth possible embodiment of the patterning material, at least one X is a halogen ion or a halogen group.

[0047] In this case, the tin-oxygen cluster materials of the present application have particularly good radiation sensitivity.

[0048] According to the first aspect, in any one of the 13th to 15th possible embodiments of the patterning material, the patterning material is a tin-oxygen cluster material represented by the following general formula (1-21). Sn x O y (L1) a X m General formula (1-21)

[0049] In general formula (1-21), x, y, a, and m are all integers, 4 ≦ x ≦ 15, 6 < y ≦ 20, 6 ≦ a ≦ 20, and 0 ≦ m ≦ 12. L1 is an independent, substituted or unsubstituted pyrazole, substituted or unsubstituted pyridine, substituted or unsubstituted imidazole, substituted or unsubstituted piperazine, or substituted or unsubstituted pyrazine. X is an independent -F, -Cl, or -Br.

[0050] By using the tin-oxygen cluster material represented by general formula (1-21), the technical effects of the present application can be obtained particularly advantageously.

[0051] According to the second aspect, one embodiment of the present application provides a radiation-sensitive patterning composition including a patterning material and a solvent according to any one of the 1st to 16th possible embodiments of the first aspect.

[0052] In this case, the radiation-sensitive patterning composition of the present application may be used as a positive-type patterning composition or a negative-type patterning composition, is suitable for different scenarios, and upon exposure, a pattern with high resolution, high pattern edge resolution, and strong etching resistance can be obtained, and almost no gas contamination occurs in the cavity of the exposure device during exposure.

[0053] According to the second aspect, in the first possible embodiment of the radiation-sensitive patterning composition, the solvent is at least one of a carboxylic acid ester, an alcohol having 1 to 8 carbon atoms, an aromatic hydrocarbon, a halogenated hydrocarbon, and an amide.

[0054] In this case, the radiation-sensitive patterning composition of the present application has good coatability.

[0055] According to a third aspect, an embodiment of the present application provides a patterning method comprising the following steps.

[0056] A substrate is formed that is coated with a radiation sensitive coating. The radiation sensitive coating comprises a patterning material according to any one of the first to sixteenth possible embodiments of the first aspect.

[0057] The coated substrate is exposed to radiation according to a required pattern to form an exposed structure that includes areas having exposed coating and areas having unexposed coating.

[0058] The exposed structures are selectively developed to form a patterned substrate comprising a patterned film.

[0059] In this case, by using the pattern formation method of the present application, a pattern with high resolution, high pattern edge resolution, and strong etching resistance can be efficiently formed, and little gas contamination occurs in the cavity of the exposure device during exposure.

[0060] According to the third aspect, in a first possible implementation of the patterning method, the radiation-sensitive coating is formed directly on the silicon wafer or on a silicon wafer covered with an intermediate material layer.

[0061] In this case, an integrated circuit device is efficiently obtained by using the patterning method of the present application.

[0062] According to a third aspect, in the first or second possible implementation of the patterning method, a radiation-sensitive coating is formed on a substrate covered with an intermediate material layer using a coating method.

[0063] In this case, a patterned substrate having a patterned film with a more uniform thickness is obtained, so that the resulting patterned substrate can be used more widely.

[0064] According to a third aspect, in any one of the first to third possible implementation modes of the pattern formation method, the radiation includes X-rays, electron beams, and ultraviolet light.

[0065] In this case, the exposure effect can be well implemented, so that a pattern with high resolution, high pattern edge resolution, and strong etching resistance can be more easily formed.

[0066] According to the third aspect, in any one of the first to fourth possible embodiments of the pattern formation method, the developer used for development is an aqueous developer or an organic solvent developer.

[0067] In this case, the development effect can be well carried out, so that a pattern with high resolution, high pattern edge resolution and strong etching resistance can be more easily formed.

[0068] According to a fourth aspect, an embodiment of the present application provides a patterned substrate comprising a patterned film and a substrate, the patterned film being present in selected regions on the substrate and absent in other regions on the substrate, and the patterned film being formed using a patterning material according to any one of the first to sixteenth possible implementations of the first aspect.

[0069] In this case, the patterned substrate of the present application includes a patterned film including a pattern having high resolution, high pattern edge resolution, and strong etching resistance, and is suitable for forming surface structures with high resolution and high pattern edge resolution on various substrates in various application scenarios.

[0070] According to the fourth aspect, in a first possible embodiment of the patterned substrate, the pattern of the patterned film has a pattern resolution of 3 to 100 nm and an edge roughness of 2 to 30% of the pattern resolution.

[0071] In this case, the patterned film included in the patterned substrate of the present application can include patterns having high resolution and high pattern edge definition.

[0072] According to a fifth aspect, an embodiment of the present application provides a method of patterning a substrate, comprising performing etching or electron injection on a patterned substrate according to the first or second possible implementation of the fourth aspect to form a patterned structure on a surface of the substrate.

[0073] In this case, by using the method of patterning a substrate of the present application, the aforementioned patterned substrate is used, so that surface structures with high resolution and high pattern edge resolution can be obtained on various substrates, which is particularly suitable for the manufacture of highly integrated circuits, where surface structures with high resolution and high pattern edge resolution are required.

[0074] According to a sixth aspect, an embodiment of the present application provides an integrated circuit device, comprising a surface structure formed on a silicon wafer as a substrate using the method for patterning a substrate according to an embodiment of the fifth aspect.

[0075] In this case, the integrated circuit device of the present application can have a high integration since the surface structure is formed using the method for patterning the substrate described above.

[0076] These and other aspects of the present application will be more concise and easier to understand in the description of the embodiment(s) that follows.

[0077] The accompanying drawings and this specification, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the present application and are intended to explain the principles of the present application. [Brief description of the drawings]

[0078] [Figure 1]1 is an exemplary flow chart of a patterning process. [Diagram 2] 1 shows an exemplary structural formula of an indium-oxygen cluster material according to the present application, generally represented by formula (1-11). [Diagram 3] 1 shows an exemplary structural formula of a tin-oxygen cluster material according to the present application, generally represented by formula (1-21). [Figure 4] 1 is an exemplary manufacturing flow chart of a patterning method according to the present application. [Diagram 5] 1 is an exemplary manufacturing flow chart of a method for patterning a substrate in accordance with the present application. [Figure 6] 2 is an exemplary manufacturing flow chart for an integrated circuit device according to the present application. [Figure 7] 1 is an infrared spectrum of indium-oxygen cluster compounds 1-8 according to the present application. [Figure 8] 1 is an EDX spectrum of indium-oxygen cluster compound 9 according to the present application. [Figure 9] 1 shows a line pattern formed using indium-oxygen cluster compound 3 according to the present application. [Figure 10] 1 shows another line pattern formed using indium-oxygen cluster compound 3 according to the present application. [Figure 11] 1 shows a line pattern formed using indium-oxygen cluster compound 2 according to the present application. [Figure 12] 1 shows another line pattern formed using indium-oxygen cluster compound 2 according to the present application. [Figure 13] 1 shows a line pattern formed using indium-oxygen cluster compound 9 according to the present application. [Figure 14] 1 shows another line pattern formed using indium-oxygen cluster compound 9 in accordance with the present application. [Figure 15] 1 is an infrared spectrum of tin-oxygen cluster compound 1 according to the present application. [Figure 16]1 is an infrared spectrum of tin-oxygen cluster compound 2 according to the present application. [Figure 17] 1 shows another line pattern formed using tin-oxygen cluster compound 1 according to the present application. [Figure 18] 4 shows another line pattern formed using tin-oxygen cluster compound 2 according to the present application. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0079] Various exemplary embodiments, features, and aspects of the present application are described in detail below with reference to the accompanying drawings, in which identical reference numbers indicate elements having the same or similar functions. While various aspects of the embodiments are illustrated in the accompanying drawings, the accompanying drawings are not necessarily drawn to scale unless otherwise specified.

[0080] The specific term "exemplary" herein means "serving as an example, embodiment, or illustration." An embodiment described as an "exemplary" is not necessarily described as being exemplary or better than other embodiments.

[0081] Furthermore, in order to better explain the present application, many specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present application can be practiced without some of the specific details. In some instances, methods, means, elements and circuits well known to those skilled in the art are not described in detail so as to emphasize the subject matter of the present application.

[0082] <First aspect> In order to solve the aforementioned technical problems, the present application provides a patterning material comprising a metal-oxygen cluster framework formed by a metal M-oxygen bridge bond, a radiation-sensitive organic ligand, and a second ligand.

[0083] The radiation-sensitive organic ligand is coordinated to the metal M through a coordinating atom. The coordinating atom is at least one of an oxygen atom, a sulfur atom, a selenium atom, a nitrogen atom, and a phosphorus atom. The radiation-sensitive organic ligand is a monodentate ligand or a polydentate ligand having two or more dentates. The second ligand is an inorganic ion or a coordinating group.

[0084] In the present application, in some preferred embodiments, when the coordinating atom is an oxygen atom, the oxygen atom in the radiation-sensitive organic ligand does not form a carboxyl group or a peroxide bond. "The oxygen atom in the radiation-sensitive organic ligand does not form a carboxyl group or a peroxide bond" means that when the organic ligand coordinates with the metal M using an oxygen atom as a coordinating atom, an acyloxymetal structure or a metal peroxide structure is not formed.

[0085] The patterning material of the present application may be sensitive to various types of radiation (even various types of radiation at specific wavelengths or wavelength ranges), such as ultraviolet light, X-rays, or electron beams based on a specific structure, which means that the radiation changes the solubility of the material by changing the metallic properties. Specifically, after irradiation (exposure), the solubility of the exposed material is significantly different from the solubility of the unexposed material in the developer, so that the material can be used to form a pattern of a specific shape.

[0086] The patterning material of the present application is a radiation-sensitive metal-oxygen cluster material having a small molecular size, a stable and uniform structure, and a flexible and adjustable structure due to a metal-oxygen cluster framework (specifically represented by the following general formula (1)). It is sensitive to radiation (200 mJ / cm in the case of ultraviolet light and X-rays). 2 Material properties are significantly altered with exposure energies of less than 100 μC / cm for electron beams. 2The material properties can be significantly changed with an exposure energy of 100 nm), and the specific radiation-sensitive organic ligand and the second ligand described above generate almost no harmful gas during exposure (i.e., excellent low outgassing). Therefore, the patterning material of the present application can be used as a positive patterning material or a negative patterning material, and can be adapted to different scenarios, and can be exposed to obtain a pattern with high resolution (resolution of less than 100 nm can be obtained, and even resolution of less than 10 nm can be obtained), high pattern edge resolution (edge ​​roughness of less than 30% of the pattern resolution can be obtained), and strong etching resistance, and almost no gas contamination occurs in the cavity of the exposure device during exposure. In addition, the synthesis method and synthesis process of the patterning material of the present application are simple, facilitating large-scale production.

[0087] In some preferred embodiments, the patterning material of the present application is represented by the following general formula (1): M x O y (OH) n (L1) a (L2) b (L3) c (L4) d X m General style (1)

[0088] In the general formula (1), 3≦x≦72, 0≦y≦72, 0≦a≦72, 0≦b≦72, 0≦c≦72, 0≦d≦72, 0≦n≦72, 0≦m≦72, y+n+a+b+c+d+m≦8; x, x, y, a, b, c, d, m, and n are all integers, a, b, c, and d are not all 0; L1, L2, L3, and L4 are used individually as radiation-sensitive organic ligands, with two or more of L1, L2, L3, and L4 coexisting in the same ligand, and X is a second ligand.

[0089] In this case, the patterning material of the present application may have a more suitable molecular structure, better radiation sensitivity, and / or better low outgassing properties.

[0090] The metal-oxygen cluster frameworks and ligands are described in detail below.

[0091] (Metal-Oxygen Cluster Framework) As mentioned above, the metal-oxygen cluster framework in the present application is a cluster structure formed by a metal M-oxygen bridge bond. In this case, the specific structure of the metal-oxygen cluster framework is not particularly limited, and may be a monometal-oxygen cluster framework or a heterometal-oxygen cluster framework containing two or more metals, and may be appropriately modified according to practical requirements. In some specific embodiments, in the above general formula (1), the single metal-oxygen cluster is represented by "M x O y " is expressed as

[0092] In the present application, the term "metal M" encompasses the concepts of metal elements and metalloid elements. In some preferred embodiments, the metal M comprises at least one of indium (In), tin (Sn), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), zirconium (Zr), niobium (Nb), molybdenum (Mo), palladium (Pd), platinum (Pt), silver (Ag), cadmium (Cd), antimony (Sb), tellurium (Te), hafnium (Hf), tungsten (W), gold (Au), lead (Pb), and bismuth (Bi). In some further preferred embodiments, the metal M comprises at least indium or tin.

[0093] Additionally, in some specific embodiments, the metal M forming the metal-oxygen cluster framework is optionally selected from the group consisting of sodium (Na), magnesium (Mg), aluminum (Al), potassium (K), calcium (Ca), scandium (Sc), gallium (Ga), germanium (Ge), arsenic (As), rubidium (Rb), strontium (Sr), yttrium (Y), technetium (Tc), ruthenium (Ru), rhodium (Rh), cesium (Cs), barium (Ba), lanthanum (L), sulphur (Sr), sulphur (Sb ... (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), promethium (Pm), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), lutetium (Lu), tantalum (Ta), rhenium (Re), osmium (Os), iridium (Ir), mercury (Hg), and polonium (Po).

[0094] (ligand) In this application, the radiation-sensitive organic ligand (sometimes referred to as the first ligand) and the second ligand are both ligands that coordinate to the metal M.

[0095] In the present application, the first ligand is an organic ligand having radiation sensitivity (e.g., ultraviolet light, X-rays, or electron beams, particularly ultraviolet light, X-rays, or electron beams with a wavelength of less than 15 nm), and the second ligand optionally has such radiation sensitivity. Therefore, the performance of the patterning material of the present application is mainly affected by the structure of the first ligand (particularly the coordinated atom). In particular, compared with the ligand containing a metal-carbon bond, the ligand containing a peroxide bond, or the ligand containing a metal-carboxylate bond, which are used as radiation-sensitive ligands in the prior art, the radiation-sensitive organic ligand in the present application can achieve excellent low outgassing while ensuring high radiation sensitivity. As for the first ligand, so long as the above-mentioned requirements for a radiation-sensitive organic ligand (a radiation-sensitive organic ligand that is coordinately bonded to a metal M via a coordination atom including at least one of an oxygen atom, a sulfur atom, a selenium atom, a nitrogen atom, and a phosphorus atom and is a monodentate ligand or a polydentate ligand having two or more dentates) are satisfied, the patterning material can have the performance expected in this application.

[0096] In some preferred embodiments, the radiation sensitive organic ligands are formed using at least one of alcohol amines, alcohols, phenols, nitrogen-containing heterocyclic compounds, nitriles, phosphines, phosphonic acids, thiols, and organoselenium compounds.

[0097] Generally, in the present application, the ratio of the number of the coordination atoms of radiation-sensitive organic ligand to the number of metal atoms is not particularly limited.In order to further increase the radiation sensitivity of the material of the present application, and further increase the pattern edge resolution and the resolution of the obtained pattern, in some preferred embodiments, the ratio of the number of the coordination atoms of radiation-sensitive organic ligand to the number of metal atoms is preferably 1:2~4:1.

[0098] In some preferred embodiments, when the patterning material of the present application is represented by the above-mentioned general formula (1), each of the radiation-sensitive organic ligands L1, L2, L3, and L4 is preferably derived from at least one of an alcohol amine, an alcohol, a phenol, a nitrogen-containing heterocyclic compound, a nitrile, a phosphine, a phosphonic acid, a thiol, and an organic selenium compound.

[0099] Alcoholamines are compounds that may be represented by NQ3 (wherein at least one Q is a hydrocarbon group having a hydroxyl group (preferably an alkyl group having a hydroxyl group) and another Q is independently H or a hydrocarbon group having 1 to 18 carbon atoms). Examples of alcoholamines include, but are not limited to, primary alcoholamines (such as methanolamine, ethanolamine, dimethylethanolamine, methylethanolamine, and divinylpropanolamine), secondary alcoholamines (such as diethanolamine, methyldiethanolamine, methylmethanolethanolamine, and ethyldiethanolamine), tertiary alcoholamines (such as triethanolamine, tripropanolamine, and tributanolamine), and the like.

[0100] Examples of alcohols include, but are not limited to, monohydric alcohols such as methanol, ethanol, propanol, butanol, n-hexanol, and cyclohexanol; polyhydric alcohols such as ethylene glycol, propylene glycol, butylene glycol, glycerin, butanetriol, pentaerythritol, and dipentaerythritol; and the like.

[0101] Examples of phenols include, but are not limited to, phenol, alkylphenols (such as cresol, ethylphenol, and phenylphenol), alkenylphenols (such as vinylphenol and allylphenol), alkynylphenols (such as acetenylphenol and propynylphenol), and the like.

[0102] Examples of nitrogen-containing heterocyclic compounds include, but are not limited to, pyridine (substituted or unsubstituted pyridine), pyrazole (substituted or unsubstituted pyrazole), imidazole (substituted or unsubstituted imidazole), piperazine (substituted or unsubstituted piperazine), and pyrazine (substituted or unsubstituted pyrazine), where the substituents in the "substituted or unsubstituted" compounds include, but are not limited to, deuterium, cyano, and nitro groups, halogen atoms such as fluorine, chlorine, bromine, and iodine, straight-chain or branched-chain alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, n-pentyl, isopentyl, neopentyl, and n-hexyl, straight-chain or branched-chain alkoxy groups such as methoxy, ethoxy, and propoxy, alkenyl groups such as vinyl and allyl, aryloxy groups such as phenoxy and tolyloxy, arylalkoxy groups such as benzyloxy and phenethyloxy, phenyl, biphenyl, triphenyl, naphthyl, phenyl ... The substituents include aromatic hydrocarbon groups or condensed polycyclic aromatic groups such as pyryl, anthryl, phenanthryl, fluorenyl, indenyl, pyrenyl, perylenyl, fluorantyl, and benzophenyl, aromatic heterocyclic groups such as pyridyl, pyrazolyl, pyrazinyl, piperazinyl, imidazolyl, pyrimidyl, triazinyl, thienyl, furyl, pyryl, quinolyl, isoquinolyl, benzofuryl, benzothiophenyl, indolyl, carbazolyl, benzoxazolyl, benzothiazolyl, quinoxalinyl, benzimidazolyl, dibenzofuranyl, dibenzothiophenyl, and carvinyl, arylvinyl groups such as styryl and naphthylvinyl, and acyl groups such as acetyl and benzoyl. These substituents are optionally further substituted with the above-mentioned substituents. In addition, these substituents are optionally bonded to each other to form a ring using a single bond, a substituted or unsubstituted methylene group, an oxygen atom, a nitrogen atom, a selenium atom, a phosphorus atom, or a sulfur atom.

[0103] Examples of nitriles include, but are not limited to, alkyl nitriles such as acetonitrile and propionitrile, alkenyl nitriles such as vinyl nitrile, allyl nitrile, and styryl nitrile, and alkynyl nitriles such as acetenyl nitrile and phenylethynyl nitrile.

[0104] Phosphines are compounds that can be represented by PQ3, where Q is independently H, a hydrocarbon group having 1 to 18 carbon atoms, or a hydrocarbonoxy group having 1 to 18 carbon atoms. Examples of phosphines include, but are not limited to, monohydrocarbon phosphines such as methylphosphine dihydride, ethylphosphine dihydride, propylphosphine dihydride, phenylphosphine dihydride, naphthylphosphine dihydride, vinylphosphine dihydride, and acetenylphosphine dihydride; dihydrocarbon phosphines such as dimethylphosphine hydride, diethylphosphine hydride, dipropylphosphine hydride, dibutylphosphine hydride, methylethylphosphine hydride, methylpentylphosphine hydride, methylphenylphosphine hydride, diphenylphosphine hydride, divinylphosphine hydride, methylvinylphosphine hydride, and diacetylenephosphine hydride; trihydrocarbon phosphines such as trimethylphosphine, triethylphosphine, tripropylphosphine, triphenylphosphine, dimethylphenylphosphine, diethylphenylphosphine, dipropylphenylphosphine, and dibutylphenoxyphosphine; methoxyphosphine dihydride; Monohydrocarbon oxyphosphines such as ethoxyphosphine dihydride, propoxyphosphine dihydride, phenoxyphosphine dihydride, naphthoxyphosphine dihydride, ethyleneoxyphosphine dihydride, and ethynyloxyphosphine dihydride, dimethoxyphosphine hydride, diethoxyphosphine hydride, dipropoxyphosphine hydride, dibutoxyphosphine hydride, methoxyethoxyphosphine hydride, methoxypentyloxyphosphine hydride, methoxyphenoxyphosphine hydride, These include dihydrocarbon phosphines such as sphinc hydrides, diphenoxyphosphine hydride, diethyleneoxyphosphine hydride, methylethyleneoxyphosphine hydride, and diethynyloxyphosphine hydride, as well as trihydrocarbon oxyphosphines such as trimethoxyphosphine, triethoxyphosphine, tripropoxyphosphine, triphenoxyphosphine, dimethylphenoxyphosphine, diethylphenoxyphosphine, dipropylphenoxyphosphine, and dibutoxyphenoxyphosphine.

[0105] Examples of phosphonic acids include, but are not limited to, butyl phosphonic acid, pentyl phosphonic acid, hexyl phosphonic acid, heptyl phosphonic acid, octyl phosphonic acid, (1-methylheptyl)phosphonic acid, (2-ethylhexyl)phosphonic acid, decyl phosphonic acid, dodecyl phosphonic acid, octadecyl phosphonic acid, oleyl phosphonic acid, phenyl phosphonic acid, (p-nonylphenyl)phosphonic acid, butyl butyl phosphonic acid, pentyl pentyl phosphonic acid, hexyl hexyl phosphonic acid, heptyl heptyl phosphonic acid, octyloctyl phosphonic acid, (1-methylheptyl) (1-methylheptyl) phosphonic acid, (2-ethylhexyl) Examples of suitable phosphonic acids include (p-nonylphenyl)(2-ethylhexyl)phosphonic acid, (p-nonylphenyl)(2-ethylhexyl)phosphonic acid, (p-nonylphenyl)phosphonic acid, (p-nonylphenyl)phosphonic acid, (p-nonylphenyl)phosphonic acid, (p-nonylphenyl)phosphonic acid, (p-nonylphenyl)phosphonic acid, (p-nonylphenyl)(2-ethylhexyl)phosphonic acid, (p-nonylphenyl)(2-ethylhexyl)phosphonic acid, (p-nonylphenyl)(2-ethylhexyl)phosphonic acid, and (p-nonylphenyl)(2-ethylhexyl)phosphonic acid.

[0106] Thiols include, but are not limited to, monothiols such as methanethiol, ethanethiol, propanethiol, butanethiol, n-hexanethiol, and cyclohexanethiol, and polythiols such as ethanedithiol, propanedithiol, butanedithiol, propanetrithiol, butanetrithiol, and butanetetrathiol.

[0107] Organoselenium compounds include, but are not limited to, organoselenic acids, selenols, selenides, selenophenes, hydrocarbyl seleniums, hydrocarbyl oxyseleniums, and the like.

[0108] Regarding the second ligand, the second ligand may be any inorganic ion that bonds to the metal M by an ionic bond, or may be any coordinating group that bonds to the metal M by a covalent bond (including general covalent bonds and coordinate covalent bonds).

[0109] In some preferred embodiments, when the patterning material of the present application is represented by the general formula (1) above, the second ligand of the patterning material preferably satisfies X of general formula (1).

[0110] In the present application, in some preferred embodiments, when the second ligand is a coordinating group (covalently bonded to the metal M), the second ligand is preferably at least one of a halogen group (such as -F, -Cl, -Br, or -I), a carboxylic acid group, a sulfonic acid group, a nitro group, an aliphatic alcohol group, an aromatic alcohol group, an aliphatic hydrocarbon group, and an aromatic hydrocarbon group for flexible coordination, where the term "flexible coordination" means that the ligand may be monodentate or polydentate, and the same ligand may be coordinated to the same or different metal centers.

[0111] In some other preferred embodiments of the present application, when the second ligand is an inorganic ion (bonded to the metal M by an ionic bond), the second ligand is preferably a halogen ion (such as -F, -Cl, -Br, or -I), SO 2- , and NO3 - It will be at least one of the following.

[0112] In addition, to further enhance radiation sensitivity, improve line edge roughness, and increase resolution, in some specific embodiments, the radiation-sensitive organic ligand and / or the coordinating group as the secondary ligand may be optionally substituted with any radiation-sensitive functional group. Examples of such radiation-sensitive functional groups include, but are not limited to, double bonds, triple bonds, epoxypropane groups, or combinations thereof.

[0113] Furthermore, in order to adjust the performance such as solubility of the patterning material of the present application, to further improve the thickness uniformity, roughness, adhesion, and corrosion resistance of the patterned film formed using the patterning material of the present application, and to further enhance the pattern resolution of the obtained pattern, in some specific embodiments, the coordinating group as the radiation-sensitive organic ligand and / or the secondary ligand may be optionally substituted with any functional group. Such functional groups include, but are not limited to, electrophilic or electron-donating groups, for example, halogen groups such as -F, -Cl, -Br, or -I, nitro groups, sulfonic acid groups, carboxylic acid groups, or ester groups.

[0114] Two preferred embodiments of the patterning material of the present application are described in further detail below.

[0115] (First embodiment) The patterning material of the present application may more preferably be an indium-oxygen cluster material represented by the following general formula (1-1). [M4(μ4-O)] x1 M x2 O y (OH) n X m (L1) a (L2) b (L3) c (L4) d General style (1-1)

[0116] In the general formula (1-1), M contains at least indium, 1≦x1≦12, 0≦x2≦24, 0≦y≦24, 0≦a≦36, 0≦b≦36, 0≦c≦36, 0≦d≦36, 0≦n≦24, 0≦m≦24, y+n+m+a+b+c+d≦31(x1)+8(x2), where x1, x2, y, a, b, c, d, m, and n are all integers, and a, b, c, and d are not all 0.

[0117] Here, the term "M4(μ4-O)" means that one oxygen (O) atom is bridged to four metals M.

[0118] In formula (1-1), L1, L2, L3, and L4 are described as in formula (1). Specifically, L1, L2, L3, and L4 are used individually as the radiation-sensitive organic ligand of the present application, or two or more of L1, L2, L3, and L4 are used as the radiation-sensitive organic ligand of the present application in a manner that they coexist in the same ligand. In some preferred embodiments, L1, L2, L3, and L4 are each derived from at least one of alcohol amines, alcohols, phenols, nitrogen-containing heterocyclic compounds, nitriles, phosphines, phosphonic acids, thiols, and organic selenium compounds. Here, examples of alcohol amines, alcohols, phenols, nitrogen-containing heterocyclic compounds, nitriles, phosphines, phosphonic acids, thiols, and organic selenium compounds are also described above. In addition, L1, L2, L3, and L4 are independently and optionally substituted with radiation-sensitive functional groups and / or functional groups.

[0119] More preferably, the radiation-sensitive organic ligands in the indium-oxygen cluster materials of the present application coordinate to the metal M via nitrogen or oxygen atoms as coordinating atoms, and L1, L2, L3, and L4 are each derived from at least one of an alcohol amine, an alcohol, a phenol, a nitrogen-containing heterocyclic compound, and a nitrile.

[0120] In the general formula (1-1), X is the second ligand of the present application, that is, an inorganic ion or a coordination group. More preferably, at least one X is a halogen ion or a halogen group, so that the patterning material has particularly excellent radiation sensitivity.

[0121] In some preferred embodiments, the ratio of the number of coordination atoms (the total number of nitrogen atoms and oxygen atoms) to the number of metal atoms M is preferably 3:2 to 3:1.

[0122] In some particularly specific embodiments, the patterning material of the present application may be particularly preferably an indium-oxygen cluster material represented by the following general formula (1-11): [In4(μ4-O)] x1 In x2 O y (OH) n (L1) a (L2) b X m General style (1-11)

[0123] In the general formula (1-11), x1, x2, y, a, b, m, and n are all integers, a and b are not all 0, and for 1≦x1≦4, preferably x1 is 2; for 2≦x2≦8, preferably x2 is 4; for 1≦y≦4, preferably y is 2; for 0≦a≦8, 0≦b≦12, preferably a is 4 and b is 8; for 0≦n≦10, preferably n is 2; and for 0≦m≦8, preferably m is 6.

[0124] In the formula (1-11), L1 is OR 1 and L2 is NR 2 (CR 3 R 4 CR 5 R 6 O)2. R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 are each H, a substituted or unsubstituted alkyl having 1 to 18 carbon atoms, a substituted or unsubstituted aryl having 6 to 14 carbon atoms, and a heterocyclic group having 3 to 14 heteroatoms (heteroatoms include, but are not limited to, oxygen, sulfur, nitrogen, phosphorus, etc.). Here, examples of the substituents of the "substituted or unsubstituted" compounds are preferably -F, -Cl, -Br, -NO2, and -SO3. X is independently -F, -Cl, or -Br.

[0125] The technical effects of the present application are particularly advantageously achieved by using an indium-oxygen cluster material represented by the general formula (1-11).

[0126] In the present application, FIG. 2 shows an exemplary structural formula of an indium-oxygen cluster material generally represented by the formula (1-11).

[0127] Second embodiment The patterning material in the present application may more preferably be a tin-oxygen cluster material represented by the following general formula (1-2). M x O y (L1) a (L2) b X m General style (1-2)

[0128] In the general formula (1-2), M contains at least tin, and 3≦x≦34, 0≦y≦51, 0≦a≦51, 0≦b≦51, 0≦m≦51, y+a+b+m≦8; x, x, y, a, b, and m are all integers, and a and b are not all 0.

[0129] In formula (1-2), L1 and L2 are described as in formula (1). Specifically, L1 and L2 are used individually as the radiation-sensitive organic ligand of the present application, or both L1 and L2 coexist in the same ligand, and are used as the radiation-sensitive organic ligand of the present application. In some preferred embodiments, L1 and L2 are each derived from at least one of alcohol amines, alcohols, phenols, nitrogen-containing heterocyclic compounds, nitriles, phosphines, phosphonic acids, thiols, and organic selenium compounds. Here, examples of alcohol amines, alcohols, phenols, nitrogen-containing heterocyclic compounds, nitriles, phosphines, phosphonic acids, thiols, and organic selenium compounds are also described above. In addition, L1 and L2 are independently and optionally substituted with radiation-sensitive functional groups and / or functional groups.

[0130] More preferably, the radiation-sensitive organic ligand in the tin-oxygen cluster material of the present application coordinates to the metal M via a nitrogen atom as the coordinating atom, and L1 and L2 are each derived from at least one of an alcohol amine, a nitrogen-containing heterocyclic compound, and a nitrile.

[0131] In general formula (1-2), X is the second ligand of the present application, that is, an inorganic ion or a ligand. More preferably, at least one X is a halogen ion or a halogen group, and as a result, the patterning material is particularly excellent in radiation sensitivity.

[0132] In some preferred embodiments, the ratio of the number of coordinating atoms (total number of nitrogen atoms) to the number of metal atoms M is preferably 2:3 to 3:2.

[0133] In some particularly specific embodiments, the patterning material of the present application may particularly preferably be a tin-oxygen cluster material represented by the following general formula (1-21). Sn x O y (L1) a X m General formula (1-21)

[0134] In general formula (1-21), x, y, a, and m are all integers. 4 ≦ x ≦ 15, preferably x = 10; 6 < y ≦ 20, preferably y = 12; 6 < a ≦ 20, preferably a = 12; 0 ≦ m ≦ 12, and m = 8.

[0135] In general formula (1-21), L1 is an independent, substituted or unsubstituted pyrazole, substituted or unsubstituted pyridine, substituted or unsubstituted imidazole, substituted or unsubstituted piperazine, or substituted or unsubstituted pyrazine. Here, the substituent in the "substituted or unsubstituted" compound is preferably a linear or branched alkyl group, more preferably a linear or branched alkyl group having 1 to 4 carbon atoms. Such an alkyl group as a substituent may further contain a substituent. Examples of the substituent of such an alkyl group include, but are not limited to, -F, -Cl, -Br, -NO2, and -SO3. X is an independent -F, -Cl, or -Br.

[0136] By using the tin-oxygen cluster material represented by general formula (1-21), the technical effects of the present application can be obtained particularly advantageously.

[0137] In the present application, FIG. 3 shows an exemplary structural formula of a tin-oxygen cluster material represented by the general formula (1-21) (a is L=3-methylpyrazole, b is L=4-methylpyrazole).

[0138] (Method of Preparing Patterning Material) The patterning material of the present application is not particularly limited and may be obtained based on the required structure using fabrication methods well known to those skilled in the art.

[0139] For example, the patterning material of the present application may be obtained using the following method: x X m In the method described above, a precursor of a radiation-sensitive organic ligand (e.g., at least one of a compound from which L1 is derived, a compound from which L2 is derived, a compound from which L3 is derived, and a compound from which L4 is derived) and an optionally added solvent are mixed and heated to 80-120°C for 1-4 days and then cooled to room temperature to precipitate crystals as a product. In the method described above, the precursor of a radiation-sensitive organic ligand may be used as a solvent or as a solute.

[0140] In some specific embodiments, metal halides including indium halide, at least one of alcohol amines, alcohols, and phenols, and optionally added solvent are mixed in a reaction kettle and heated to 80-120° C. for 1-4 days and then cooled to room temperature to precipitate colorless crystals as the product.

[0141] In some specific embodiments, metal halides, including tin halides, are dissolved in at least one of pyrazole, alcohol amine, pyridine, pyrazole, piperazine, and pyrazine, heated to 80-120° C. for 1-4 days, and then cooled to room temperature to precipitate colorless crystals as the product.

[0142] <Second aspect> The present application further provides a radiation-sensitive patterning composition comprising the patterning material of the present application described above and a solvent.

[0143] Due to the inclusion of the patterning material of the present application as described above, the radiation-sensitive patterning composition of the present application is suitable for different application scenarios, and can be exposed to obtain patterns with high resolution, high pattern edge resolution, and strong etching resistance, and little gas contamination is generated in the cavity of the exposure device during exposure.

[0144] The patterning material of the present application has been described in the <First embodiment> and will not be described in detail again here.

[0145] Therefore, the components of the radiation-sensitive patterning composition of the present application, other than the patterning material of the present application, are described in detail below.

[0146] (solvent) In the present application, the specific type of the solvent is not particularly limited as long as the components of the radiation-sensitive patterning composition can be dissolved therein, and may be appropriately selected based on the thickness and viscosity of the coating film.

[0147] In some preferred embodiments of the present application, the solvent is at least one of a carboxylic acid ester, an alcohol having 1 to 8 carbon atoms, an aromatic hydrocarbon, a halogenated hydrocarbon, and an amide.

[0148] Examples of carboxylic acid esters include, but are not limited to, carboxylic acid ether esters such as ethylene glycol methyl ether formate, propylene glycol methyl ether formate, ethylene glycol ethyl ether formate, propylene glycol ethyl ether formate, ethylene glycol methyl ether acetate, propylene glycol methyl ether acetate, ethylene glycol ethyl ether acetate, propylene glycol ethyl ether acetate, and ethylene glycol methyl ether propionate, and carboxylic acid alkyl esters such as ethyl formate, methyl acetate, ethyl acetate, n-butyl acetate, n-pentyl acetate, ethyl propionate, ethyl butyrate, ethyl valerate, methyl lactate, ethyl lactate, n-propyl lactate, isopropyl lactate, and n-butyl lactate.

[0149] Examples of alcohols having 1 to 8 carbon atoms include, but are not limited to, methanol, ethanol, isopropanol, n-butanol, cyclohexanol, and the like.

[0150] Examples of aromatic hydrocarbons include, but are not limited to, benzene, toluene, xylene, and the like.

[0151] Examples of halogenated hydrocarbons include, but are not limited to, dichloromethane, trichloromethane, and the like.

[0152] Examples of amides include, but are not limited to, N,N-dimethylformamide, N,N-dimethylacetamide, and the like.

[0153] In some preferred embodiments of the present application, the solvent is at least one of ethyl lactate, propylene glycol methyl ether acetate, isopropanol, toluene, dichloromethane, N,N-dimethylformamide, and ethyl acetate.

[0154] In the present application, the concentration of the above-mentioned patterning material of the present application in the radiation-sensitive patterning composition is not particularly limited. The solution concentration may be adjusted based on the film thickness requirement. Usually, a higher solution concentration corresponds to a thicker film layer. In some preferred embodiments, in the radiation-sensitive patterning composition, the concentration of the patterning material of the present application in the solvent is preferably 3-30 mg / mL. When the concentration of the patterning material is within the above-mentioned range, the thickness of the radiation-sensitive coating obtained using the radiation-sensitive patterning composition is more uniform and can be more easily adjusted.

[0155] Typically, the preferred concentration range may be appropriately adjusted based on the specific type of patterning material. In some specific embodiments, the concentration of the indium-oxygen cluster material of the present application in the solvent is more preferably about 5-30 mg / mL. In some other specific embodiments, the concentration of the indium-oxygen cluster material of the present application in the solvent is more preferably about 8-30 mg / mL.

[0156] (Other ingredients) In addition to the patterning material and solvent of the present application described above, without affecting the technical effect of the present application, the radiation-sensitive patterning composition of the present application may further include other components as necessary, such as stabilizers, dispersants, sensitizers, pigments, dyes, adhesives, thickeners, thixotropic agents, suspending agents, antioxidants, pH adjusters, leveling agents, and plasticizers, etc. Such components may be used alone or in combination of two or more.

[0157] The dosages of these ingredients may be appropriately selected based on actual requirements.

[0158] (Use of Radiation-Sensitive Resin Composition) The radiation-sensitive patterning composition in this application can be any positive-tone patterning composition or negative-tone patterning composition, and is typically appropriately selected based on the specific structure of the patterning material.

[0159] In this application, the positive-tone patterning composition and the negative-tone patterning composition have their respective meanings known to those skilled in the art. In other words, the exposed patterning material may be washed with a developer after the radiation-sensitive coating obtained using the positive-tone patterning composition is developed to generate a positive-tone pattern, and the unexposed patterning material may be washed with a developer after the radiation-sensitive coating obtained using the negative-tone patterning composition is developed to generate a negative-tone pattern.

[0160] In the present application, preferably, the radiation-sensitive patterning composition of the present application is a negative-acting patterning composition.

[0161] In the present application, there is no particular limitation on the use of the radiation-sensitive patterning composition, for example, for the preparation of passivation films, interlayer insulating films, surface protective films, and redistribution insulating films for semiconductor elements, display devices, light-emitting devices, and the like.

[0162] In particular, due to its excellent performance, in some preferred embodiments, the patterning material of the present application is particularly suitable for obtaining precise patterns with a pattern resolution of 3 to 100 nm and an edge roughness of 2 to 30% of the pattern resolution.

[0163] <Third aspect> The present application further provides a patterning method comprising the steps of forming a substrate coated with a radiation sensitive coating, the radiation sensitive coating comprising the patterning material of the present application as described above, exposing the coated substrate to radiation according to a required pattern to form an exposed structure comprising areas having exposed coating and areas having unexposed coating, and selectively developing the exposed structure to form a patterned substrate comprising a patterned film.

[0164] By using the patterning method of the present application, patterns with high resolution, high pattern edge definition, and strong etching resistance can be efficiently formed, and little gas contamination occurs in the cavity of the exposure device during exposure.

[0165] In addition, the application scenario of the pattern formation method is not particularly limited, and may be a manufacturing process of a semiconductor device, a display device, or a light-emitting device, as necessary.

[0166] 4 is an exemplary manufacturing flow chart of the patterning method according to the present application (the intermediate material layer is not shown). The steps are described in detail below.

[0167] (Formation of coating substrate) In this step, a substrate coated with a radiation sensitive coating is formed, the radiation sensitive coating comprising the patterning material of the present application as previously described.

[0168] Details of the patterning material of the present application have been described in the <First embodiment>, and will not be described again here in detail.

[0169] In this step, the type of the substrate is not particularly limited, and may be a synthetic resin such as polyethylene terephthalate, polyethylene naphthalate, polyethylene, polycarbonate, cellulose triacetate, cellophane, polyimide, polyamide, polyphenylene sulfide, polyetherimide, polyethersulfone, aromatic polyamide, or polysulfone, a semiconductor substrate such as a silicon wafer, a wiring substrate, glass, a metal such as copper, titanium, or aluminum, or a ceramic. In addition, the form of the substrate is not particularly limited, and may be any object on which a patterned film needs to be formed, and may have any shape.

[0170] In this step, in some preferred embodiments, the substrate is a silicon wafer.

[0171] In this step, the surface of the substrate may or may not be pretreated as required. Examples of methods for pretreating the surface of the substrate include, but are not limited to, washing with a neutral liquid (e.g., water or an organic solvent such as ethanol or toluene), washing with an acidic liquid, washing with an alkaline liquid, corona treatment, electroplating, chemical plating, prime coating, and vapor deposition. Examples of such methods may be used alone or in combination of two or more.

[0172] In this step, in some preferred embodiments, the substrate is preferably pre-treated to be hydrophilic or hydrophobic before the radiation sensitive coating is formed.

[0173] In some specific embodiments, the substrate is preferably a silicon wafer, and the surface of the silicon wafer is preferably treated to be hydrophilic. For example, examples of hydrophilic treatment include, but are not limited to, washing the silicon wafer with Piranha solution (H2O:30% ammonia water:30% H2O2=5:1:1) for 15-20 minutes, washing the silicon wafer with deionized water, and then washing the silicon wafer with alcohol such as methanol, ethanol, and isopropanol, and then blowing off the liquid from the surface.

[0174] In some other specific embodiments, the substrate is preferably a silicon wafer, and the surface of the silicon wafer is preferably treated to be hydrophobic. For example, examples of hydrophobic treatment include, but are not limited to, uniformly coating a silazane compound, such as hexamethyldisilazane (HMDS), on the hydrophilically treated surface of the silicon wafer by vapor deposition or coating (preferably spin coating).

[0175] In this step, for the coating substrate, the radiation-sensitive coating of the present application may be formed directly on the substrate, or may be formed on the substrate on which the intermediate material layer is preformed. Here, examples of the intermediate material layer include, but are not limited to, an anti-reflective layer, an etch-resistant layer, and an absorbing layer. Such examples of the intermediate material layer are well known to those skilled in the art. For example, examples of the anti-reflective layer include, but are not limited to, a bottom anti-reflective coating (BARC), a spin-coated silicon compound layer (SOC), a spin-coated carbon compound layer (SOG), etc. In addition, such examples of the intermediate material layer may be used as a single layer or as two or more layers.

[0176] In some specific embodiments, the substrate is preferably a silicon wafer, and the radiation sensitive coating is formed directly on the silicon wafer. In some other specific embodiments, the substrate is preferably a silicon wafer. Before the radiation sensitive coating is formed, an intermediate layer of material, such as an anti-reflective layer, an etch resistant layer, or an absorbing layer, may be formed on the surface of the silicon wafer.

[0177] In this step, the method of forming the radiation sensitive coating is not particularly limited, and various methods well known to those skilled in the art may be used. In some preferred embodiments, the radiation sensitive coating is formed using a coating method. In some more preferred embodiments, the radiation sensitive coating is formed on a substrate coated with an intermediate material layer using a coating method, and more specifically, the radiation sensitive coating may be formed on a silicon wafer coated with an intermediate material layer using a coating method.

[0178] In some more preferred embodiments, the radiation-sensitive coating is formed by coating the radiation-sensitive patterning composition of the present application described above. The details of the radiation-sensitive patterning composition of the present application are described in the <Second Aspect> and will not be described in detail again here.

[0179] In this step, the coating method may be known to those skilled in the art. Examples of such coating methods include, but are not limited to, dip coating, spin coating, rod coating, blade coating, curtain coating, screen printing coating, spray coating, slit coating, etc. Examples of such methods may be used alone or in combination of two or more. In some preferred embodiments, the coating method is preferably spin coating, spray coating, dip coating, or blade coating, more preferably spin coating.

[0180] In this step, drying may be optionally performed after coating. The drying is not particularly limited and may be performed by any drying method known to those skilled in the art.

[0181] In this step, after drying, calcination may be optionally performed to remove residual solvent. Typically, the calcination conditions vary depending on the specific type of metal-oxygen cluster material and solvent used. In some preferred embodiments, the calcination temperature is preferably 60-200° C., and the calcination time is preferably 20-120 seconds.

[0182] In some specific embodiments, the thickness of the formed radiation sensitive coating is preferably 2-200 nm, more preferably 5-180 nm, In some other specific embodiments, the surface roughness of the formed radiation sensitive coating is less than 2 nm.

[0183] In some particularly specific embodiments, this step is performed by the following steps: A 4-inch silicon wafer is spin-coated with typically 1-5 mL of patterning material to obtain a radiation-sensitive coating of any uniform thickness between 2-200 nm. The surface roughness of the radiation-sensitive coating is less than 2 nm.

[0184] (Exposure of coated substrate) In this step, the coated substrate is exposed to radiation according to a required pattern to form an exposed structure that includes areas with exposed coating and areas with unexposed coating.

[0185] In this step, the exposure is not particularly limited and may be performed in various forms known to those skilled in the art. In some specific embodiments, for example, the coated substrate is directly exposed to radiation. In some other specific embodiments, the coated substrate is exposed to radiation through a mask.

[0186] As used herein, the term "through a mask" means that the exposing radiation is modified by the mask, but there is no limitation on the manner of modification, for example the radiation may pass through the mask or the radiation may be reflected by the mask.

[0187] The structure of the mask is not particularly limited here: the mask may or may not include a patterned cavity, and may or may not include a reflective portion.

[0188] In this step, there is no particular limit to the type of radiation for exposure, provided that the solubility of the patterning material of the present application can be altered. The patterning material of the present application may be sensitive to various types of radiation with specific wavelengths or wavelength ranges based on its specific structure, and show different solubility changes. In some specific embodiments, in the exposed structure, the exposed coating (including the exposed patterning material of the present application) may be removed in a subsequent development process to perform positive tone development. In some other specific embodiments, the unexposed coating (including the unexposed patterning material of the present application) may be removed in a subsequent development process to perform negative tone development.

[0189] In some preferred embodiments, the radiation for exposure is preferably ultraviolet light, X-rays, or electron beams. In some specific embodiments, the coated substrate is exposed to ultraviolet light or X-rays through a mask. In some other specific embodiments, the coated substrate is directly exposed to electron beams.

[0190] In some more preferred embodiments, the radiation for exposure is more specifically ultraviolet light with a wavelength of less than 15 nm, X-rays, or electron beams, and even more specifically ultraviolet light with a wavelength of less than 15 nm and in the ultraviolet range, soft X-rays in the X-ray range, or electron beams.

[0191] In some specific embodiments, the exposure apparatus may be any apparatus known to those skilled in the art, such as a contact aligner, a mirror projector, a stepper, a laser direct exposure apparatus, an X-ray exposure machine, or an electron accelerator.

[0192] In this step, the exposure energy is not particularly limited. The patterning material in this embodiment has excellent radiation sensitivity. As mentioned above, for ultraviolet light and X-rays, the exposure energy is 200 mJ / cm. 2 The exposure effect can be achieved with exposure energies of less than 100 μC / cm for electron beams. 2The exposure effect can be achieved with an exposure energy of less than 100 mJ / cm for ultraviolet light and X-rays in some specific embodiments. 2 More preferably, less than 30 mJ / cm 2 In some other specific embodiments, for electron beam, the exposure energy is 80 μC / cm 2 It is.

[0193] In this step, after exposure, baking may be optionally performed to promote chemical reaction of the coating. Usually, the baking conditions are changed according to the specific type of metal-oxygen cluster material used. In some preferred embodiments, the baking temperature is preferably 60-200° C., and the baking time is preferably 20-120 seconds.

[0194] (developing) In this step, the exposed structure is selectively developed to form a patterned substrate comprising a patterned film.

[0195] In this step, in some specific embodiments, when the patterning material of the present application is a positive-tone patterning material, development may be selectively performed to remove the exposed coating from the exposed structure. In some other specific embodiments, when the patterning material of the present application is a negative-tone patterning material, development may be selectively performed to remove the unexposed coating from the exposed structure.

[0196] In this step, the developer is not particularly limited and may be carried out using a developing method known to those skilled in the art. In some preferred embodiments, the development is carried out by contacting the exposed structure with a developer.

[0197] In this step, the contact with the developer is not particularly limited and may be performed using a method of applying the developer known to those skilled in the art. Examples of such methods include, but are not limited to, dip coating (optionally performed with ultrasonic irradiation), spin coating, spray coating, etc. Examples of such methods may be used alone or in combination of two or more.

[0198] When a developer is used, the number of times the developer is contacted with the exposed structure is not particularly limited and may be only once or may be two or more times, and each contact may be performed using the same developer or different developers.

[0199] When a developer is used, the specific type of the developer is not particularly limited and may be appropriately selected based on the specific type of the patterning material. In some preferred embodiments, the developer is preferably an aqueous developer or an organic solvent developer.

[0200] In some specific embodiments, the aqueous developer is preferably an alkaline aqueous solution. Examples of aqueous alkaline substances contained in the alkaline aqueous solution include, but are not limited to, inorganic alkalis such as sodium hydroxide, sodium carbonate, sodium silicate, and ammonia water, organic amines such as ethylamine, diethylamine, triethylamine, and triethanolamine, and quaternary ammonium salts such as tetramethylammonium hydroxide and tetrabutylammonium hydroxide. More preferably, the aqueous developer is a water-soluble tetramethylammonium hydroxide solution with a concentration of 0.5 to 5 wt%.

[0201] In some other specific embodiments, the organic solvent contained in the organic solvent developer is at least one of ketone-based solvent, alcohol-based solvent, ether-based solvent, ester-based solvent, and amide-based solvent.In addition, the organic solvent developer can be water-soluble or not.When multiple organic solvents (water-soluble) are contained, the ratio of organic solvents (water-soluble) is not particularly limited, and can be appropriately adjusted according to actual requirements.

[0202] Specific examples of ketone solvents include, but are not limited to, cyclopentanone, cyclohexanone, and methyl-2-n-pentanone.

[0203] Specific examples of alcohol-based solvents include, but are not limited to, monohydric alcohols such as methanol, ethanol, isopropanol, 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, 1-ethoxy-2-propanol, and diacetone alcohol, as well as polyhydric alcohols such as diethylene glycol, propylene glycol, glycerol, 1,4-butylene glycol, or 1,3-butylene glycol.

[0204] Specific examples of the ether solvent include, but are not limited to, propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether, and diethylene glycol dimethyl ether.

[0205] Specific examples of the ester-based solvent include, but are not limited to, chain esters such as propylene glycol methyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate, methyl lactate, ethyl lactate, n-propyl lactate, isopropyl lactate, n-butyl lactate, ethyl pyruvate, butyl acetate, 3-ethoxypropionic acid methyl ester, 3-ethoxypropionic acid ethyl ester, t-butyl acetate, t-butyl propionate, and propylene glycol mono t-butyl ether acetate, as well as lactones such as γ-butyrolactone.

[0206] Examples of amide solvents include, but are not limited to, N,N-dimethylformamide, N,N-dimethylacetamide, and the like.

[0207] In some preferred embodiments, when the indium-oxygen cluster material of the present application is used, the developer comprises an alcohol-based solvent, an ester-based solvent, an amide-based solvent, or a combination thereof, more specifically, isopropanol, N,N-dimethylformamide, propylene glycol methyl ether acetate, or a combination thereof. More preferably, the developer is a mixture of N,N-dimethylformamide and propylene glycol methyl ether acetate (PGMEA) (volume ratio 10:1 to 1:10), or a mixture of isopropanol and PGMEA (volume ratio 10:1 to 1:10).

[0208] In some other preferred embodiments, when the tin-oxygen cluster material of the present application is used, the developer comprises an alcohol-based solvent, an ester-based solvent, an amide-based solvent, water, or a combination thereof, more specifically, isopropanol, N,N-dimethylformamide, propylene glycol methyl ether acetate, ethyl lactate, water, or a combination thereof. More preferably, the developer is a mixture of isopropanol and water (volume ratio 10:1 to 1:10), or a mixture of isopropanol and PGMEA (volume ratio 10:1 to 1:10).

[0209] Additionally, in some specific embodiments, the developer may further include surfactants, viscosity reducing agents, and the like in any amount as desired.

[0210] When a developer is used, the contact time (development time) between the developer and the exposed structure is not particularly limited and may be appropriately selected based on the specific structure of the metal-oxygen cluster material. Usually, the contact time is preferably 10 seconds to 10 minutes, more preferably 10 to 300 seconds.

[0211] In some more specific embodiments, when the indium-oxygen cluster materials of the present application are used, the contact time is preferably from 10 to 120 seconds, more preferably from 15 to 60 seconds.

[0212] In some other more specific embodiments, when tin-oxygen cluster materials of the present application are used, the contact time is preferably from 10 seconds to 10 minutes, more preferably from 15 to 60 seconds.

[0213] In this step, in some specific embodiments, a water rinse may be optionally performed after development. Typically, the rinse conditions vary depending on the specific type of metal-oxygen cluster material used and the development method (such as the type of developer and the method of applying the developer). In some preferred embodiments, the rinse time is preferably 10-120 s. In some other preferred embodiments, the rinse temperature is preferably ambient temperature.

[0214] In this step, in some specific embodiments, baking may be optionally performed after development. Typically, the baking conditions vary depending on the specific type of metal-oxygen cluster material used and the development method (such as the type of developer and the method of applying the developer). In some preferred embodiments, the baking temperature is preferably 60-200° C., and the baking time is preferably 20-120 seconds.

[0215] In particular, since the above-mentioned patterning material of the present application has excellent performance, the pattern formation method of the present application is particularly suitable for obtaining precise patterns having a pattern resolution of less than 100 nm (preferably between 3 and 100 nm) and an edge roughness of less than 30% (preferably 2 to 30%) of the pattern resolution.

[0216] (Other steps) In the present application, the pattern formation method of the present application may further include other steps as necessary. Examples of the other steps include, but are not limited to, a washing step, a drying step, and the like.

[0217] In some specific embodiments, the substrate is cleaned and / or dried before the radiation sensitive coating is applied (or before any pretreatment).

[0218] In some specific embodiments, after the developing step, the formed patterned film is washed and / or dried.

[0219] <Fourth aspect> The present application further provides a patterned substrate comprising a patterned film and a substrate, the patterned film being present in selected areas on the substrate and absent in other areas on the substrate, thereby forming a pattern on the substrate, and formed using the patterning material of the present application as described above.

[0220] Here, the term "formed using the patterning material of the present application as described above" means that the patterned film is formed using at least the patterning material of the present application as described above as a material. In some specific embodiments, the patterned film includes at least the patterning material that has been exposed to light. In some other specific embodiments, the patterned film includes at least the patterning material that has not been exposed to light.

[0221] The patterned substrates of the present application can include patterned films that include patterns with high resolution, high pattern edge definition, and strong etch resistance.

[0222] In addition, the patterned substrate of the present application may optionally include an intermediate layer of material between the patterned film and the substrate. In some preferred embodiments, the patterned substrate of the present application includes an intermediate layer of material between the patterned film and the substrate.

[0223] In the present application, the method of forming the patterned substrate is not particularly limited, and various methods well known to those skilled in the art may be used. In some specific embodiments, the patterned substrate is formed using the patterning method of the present application described above.

[0224] Details of the patterning material, intermediate material layer, substrate, and patterning method of the present application are as described in the first and third embodiments, respectively, and will not be described in detail again here.

[0225] In this application, the pattern resolution and edge roughness of the patterned film on the patterned substrate are not particularly limited.In this application, as mentioned above, the patterned film can have a high resolution of less than 100 nm, and can have a high pattern edge resolution with edge roughness less than 30% of the pattern resolution.In this application, the pattern resolution and edge roughness of the patterned film can be measured by scanning electron microscope.

[0226] In some preferred embodiments, the resolution of the pattern formed on the patterned film of the patterned substrate is preferably 3 to 100 nm, more preferably 3 to 50 nm, further preferably 3 to 20 nm, and particularly preferably 3 to 10 nm.

[0227] In some preferred embodiments, the edge roughness of the pattern formed on the patterned film of the patterned substrate is preferably 2 to 30% of the pattern resolution, and more preferably 2 to 8% of the pattern resolution.

[0228] In the present application, the pattern formed on the patterned film is not particularly limited and may be randomly designed according to actual requirements.

[0229] <Fifth aspect> The present application further provides a method for patterning a substrate, comprising performing etching or ion implantation on the patterned substrate of the present application described above, thereby forming a patterned structure on the surface of the substrate. Figure 5 is an exemplary manufacturing flow chart of the method for patterning a substrate according to the present application (the intermediate material layer is not shown).

[0230] In the present application, the etching and ion implantation are not particularly limited and may be performed by various methods known to those skilled in the art.

[0231] In some specific embodiments, etching is preferably performed. In the present application, the etching conditions are not particularly limited and may be changed according to process requirements, etching selectivity, and etching rate. In some preferred embodiments, examples of etching gases include, but are not limited to, Cl2+O2, HBr+Cl2, SF6, CF4+O2, CHF3+O2, and BCl3. In addition, in some preferred embodiments, the etching selectivity between the opposing matching layer material, such as Barc, and the substrate material, such as SiO2, is 10:1 to 1:10.

[0232] In the present application, the patterned structure formed on the substrate is not particularly limited and may be randomly designed according to requirements, and usually depends on the specific pattern of the patterned film of the patterned substrate used.

[0233] <Sixth aspect> The present application further provides an integrated circuit device, which includes a surface structure formed on a silicon wafer as a substrate using the method for patterning a substrate of the present application described above.

[0234] In the present application, the specific type of the integrated circuit device is not particularly limited. In some preferred embodiments, the integrated circuit device of the present application may be used in various terminals such as tablet computers, notebook computers, digital cameras, mobile phones, wearable electronic devices, and virtual reality devices.

[0235] In the present application, the surface structure is not particularly limited and may be randomly designed according to requirements, and usually depends on the specific pattern of the patterned film of the patterned substrate used in the method of patterning a substrate of the present application described above.

[0236] (Specific examples) In some particularly specific embodiments of the present application, a method of manufacturing an integrated circuit device of the present application (or a preformed portion of an integrated circuit device of the present application) is carried out as follows.

[0237] First, the metal-oxygen cluster material is dissolved in a suitable solvent to form a solution. Depending on the size of the substrate, any amount of the solution is spin-coated onto a silicon wafer or a silicon wafer covered with an intermediate material layer, thus forming a patterned material film layer with a thickness of less than 100 nm, as shown in Figure 6 (reference numbers 1 and 2). Before exposure, residual solvent is usually removed from the film layer by baking, as shown in Figure 6 (reference number 3).

[0238] Next, the patterning material film layer is selectively irradiated with any single wavelength line or mixed wavelength line within the range of 1 to 15 nm Soft X-ray by reflection from a mask, and the pattern of the mask is transferred to the patterning material film layer as shown in Figure 6 (symbol 4).

[0239] The irradiated patterning material film layer is washed with a developer for 10 to 300 seconds to perform development.

[0240] In the patterning material film layer obtained by development, if the irradiated portions are not washed away, as shown in FIG. 6 (symbol 5a), a negative pattern is formed and the patterning material is called a negative patterning material, or if the irradiated portions are washed away, as shown in FIG. 6 (symbol 5b), a positive pattern is formed and the patterning material is called a positive patterning material.

[0241] The pattern formed by the patterning material provides a selective protection effect to the substrate (silicon wafer or silicon wafer covered with an intermediate material layer) during the etching step. After etching, the patterning material and the unprotected areas of the substrate are etched away, while the areas protected by the patterning material are etched slower than the unprotected areas, thus finally forming a pattern on the substrate. Figure 6 (reference 6a) shows a negative pattern, and Figure 6 (reference 6b) shows a positive pattern.

[0242] <Example> Examples of the present application will be described in detail below, but the present application is not limited to the following examples. Example 1: Based on radiation sensitive indium-oxygen cluster materials Example 1-1: Synthesis of radiation sensitive indium-oxygen cluster materials

[0243] The following radiation sensitive indium-oxygen cluster materials have been prepared:

[0244] Indium-oxygen cluster compound 1: [{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6] (L1=OR 1 ,R 1 =C6H5;L2=NH(CH2CH2O)2;X=Cl). Synthesis method: InX 3( 1 mmol, X = Cl) was dissolved in a mixture of 2-3 mL of phenol and 1 mL of diethanolamine, heated to 100 °C for 2 days, and then cooled to room temperature to precipitate colorless crystals.

[0245] Indium-oxygen cluster compounds 2 and 3: [{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6] (L1=OR 1 ,R 1 =CH3;L2=NH(CH2CH2O)2;X=Cl(compound 3),Br(compound 2)). Synthesis method: InX 3( 1 mmol, X = Cl or Br) was dissolved in a mixture of 3-4 mL of CH3OH and 1 mL of diethanolamine, heated to 100 °C for 2 days, and then cooled to room temperature to precipitate colorless crystals as the product.

[0246] Indium-oxygen cluster compounds 4-9: [{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6] (L1=OR 1 ,R 1 =C6H4Cl;L2=NH(CH2CH2O)2;X=Br),[{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6](L1=OR 1 ,R1 =C6H4Cl;L2=NH(CH2CH2O)2;X=Cl),[{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6](L1=OR 1 ,R 1 =C6H4F;L2=NH(CH2CH2O)2;X=Br),[{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6](L1=OR 1 ,R 1 =C6H4F;L2=NH(CH2CH2O)2;X=Cl),[{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6](L1=OR 1 ,R 1 =C6H4NO2;L2=NH(CH2CH2O)2;X=Br),[{In4(μ4-O)}2In4O2(OH)2(L1)4(L2)8X6](L1=OR 1 ,R 1 =C6H4NO2;L2=NH(CH2CH2O)2;X=Cl). Synthesis method: InX 3( 1 mmol, X=Cl, Br) and R 1 OH (5 mmol,R 1 =C6H4F, C6H4Cl, or C6H4NO2) was dissolved in a mixture of 3 mL of tetrahydrofuran and 1 mL of diethanolamine, heated to 100 °C for 2 days, and then cooled to room temperature to precipitate crystals.

[0247] Indium-oxygen cluster compounds 1-8 were subjected to solid-state infrared analysis, as shown in Figure 7, and the infrared spectra were obtained using a Bruker VERTEX 70. In addition, the EDX spectrum of indium-oxygen cluster compound 9 was obtained using a JEOL JSM6700F+Oxford INCA, as shown in Figure 8.

[0248] Example 1-2: Patterning method using radiation sensitive indium-oxygen cluster material (1) Silicon wafer pretreatment Hydrophilic treatment: Silicon wafers were washed with Piranha solution (H2O:30% ammonia water:30% H2O2 = 5:1:1) for 15-20 min, then rinsed with deionized water and then with isopropanol. Before use, the liquid was blown off from the surface of the silicon wafer using an air syringe.

[0249] Hydrophobic treatment: The surface of the silicon wafer obtained by hydrophilic treatment was uniformly coated with HMDS by vapor deposition or spin coating.

[0250] (2) Coating 5–20 mg of each of the indium-oxygen cluster compounds 1–8 were dissolved in 1 mL of N,N-dimethylformamide (DMF) before filtering. An appropriate amount of the filtered solution (negative patterning composition) was spin-coated onto the hydrophilic or hydrophobic surface of a silicon wafer to form an indium-oxygen cluster patterning material coating.

[0251] (3) Exposure Exposure to Radiation: The indium-oxygen cluster patterned material coating was exposed using an electron beam etching technique (EBL).

[0252] (4) Development The developing solution includes a mixture of DMF and propylene glycol methyl ether acetate (PGMEA) (volume ratio 10:1 to 1:10), and a mixture of isopropanol (IPA) and PGMEA (volume ratio 10:1 to 1:10). The developing time is 15 to 60 s.

[0253] (5) Pattern Expression Each patterned substrate obtained by development was visualized using a scanning electron microscope (SEM). The resolution obtained can reach 100 nm, or even 50 nm. The details are as follows:

[0254] As shown in FIG. 9, after the patterned substrate was formed using indium-oxygen cluster compound 3, the width of the exposed lines visualized using SEM was 100 nm.

[0255] As shown in FIG. 10, after forming a patterned substrate with indium-oxygen cluster compound 3, the width of the exposed lines visualized using SEM is 50 nm.

[0256] As shown in FIG. 11, after the patterned substrate was formed using indium-oxygen cluster compound 2, the width of the exposed lines revealed using SEM was 100 nm.

[0257] As shown in FIG. 12, after the patterned substrate was formed using indium-oxygen cluster compound 2, the width of the exposed lines visualized using SEM was 50 nm.

[0258] As shown in FIG. 13, after forming a patterned substrate with indium-oxygen cluster compound 9, the width of the exposed lines visualized using SEM is 100 nm.

[0259] As shown in FIG. 14, after the patterned substrate was formed using indium-oxygen cluster compound 9, the width of the exposed lines revealed using SEM was 50 nm.

[0260] Example 2: Radiation-sensitive tin-oxygen cluster material based Example 2-1: Synthesis of radiation-sensitive tin-oxygen cluster materials The following radiation sensitive tin-oxygen cluster materials have been prepared:

[0261] Tin-oxygen cluster compounds 1: [Sn 10 O 12 (L1) 12 X8] (L1 = 3-methylpyrazole; X = Cl). Synthesis method: SnX n(1 mmol, X = Cl, n = 4) was dissolved in 3 mL of 3-methylpyrazole in a single-necked vial and heated to 100 °C for 3 days and then cooled to room temperature to precipitate colorless crystals.

[0262] Tin-oxygen cluster compounds 2: [Sn 10 O 12 (L1) 12 X8] (L1 = 4-methylpyrazole; X = Cl). Synthesis method: SnX n( 1 mmol, X=Cl, n=4) was dissolved in 2 mL of 4-methylpyrazole and heated to 100° C. for 3 days and then cooled to room temperature to precipitate colorless crystals.

[0263] Tin-oxygen cluster compounds 1 and 2 were characterized by solid-state infrared analysis, as shown in Figures 15 and 16, where the infrared spectra were obtained using a Bruker VERTEX 70.

[0264] Example 2-2: Patterning method using radiation sensitive tin-oxygen cluster material (1) Silicon wafer pretreatment Hydrophilic treatment: Silicon wafers were washed with Piranha solution (H2O:30% ammonia water:30% H2O2 = 5:1:1) for 15-20 min, then rinsed with deionized water and then with isopropanol. Before use, the liquid was blown off from the surface of the silicon wafer using an air syringe.

[0265] Hydrophobic treatment: The surface of the silicon wafer obtained by hydrophilic treatment was uniformly coated with HMDS by vapor deposition or spin coating.

[0266] (2) Coating 8-20 mg of each of the tin-oxygen cluster compounds 1 and 2 were dissolved in ethyl acetate prior to filtering. An appropriate amount of the filtered solution (negative tone patterning composition) was spin-coated onto the hydrophilic or hydrophobic surface of a silicon wafer to form the tin-oxygen cluster radiation sensitive coating.

[0267] (3) Exposure Exposure to Radiation: The indium-oxygen cluster patterned material coating was exposed using an electron beam etching technique (EBL).

[0268] (4) Development The developing solution includes a mixture of isopropanol and water (volume ratio 10:1 to 1:10) and a mixture of isopropanol (IPA) and PGMEA (volume ratio 10:1 to 1:10). The developing time is 15 to 60 s.

[0269] (5) Pattern Expression Each patterned substrate obtained by development was visualized using a scanning electron microscope (SEM). The resolution obtained can reach 100 nm, or even 50 nm. The details are as follows:

[0270] As shown in FIG. 17, after the patterned substrate was formed using tin-oxygen cluster compound 2, the width of the exposed lines visualized using SEM was 100 nm.

[0271] As shown in FIG. 18, after the patterned substrate was formed using tin-oxygen cluster compound 2, the width of the exposed lines revealed using SEM was 50 nm.

[0272] The flowcharts and block diagrams in the accompanying drawings illustrate the system architecture, functionality, and operation of possible implementations of the apparatus, system, method, and computer program product according to several embodiments of the present application. In this regard, each block in the flowchart or block diagram may represent a module, program segment, or part of an instruction, which includes one or more executable instructions for implementing a specified logical function. In some alternative implementations, the functions marked in the blocks may also occur in a different order than that marked in the accompanying drawings. For example, two consecutive blocks may in fact be executed substantially in parallel or may be executed in a reverse order depending on the functions involved.

[0273] It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, may be implemented by hardware (e.g., a circuit or ASIC (Application Specific Integrated Circuit)) that performs the corresponding function or operation, or may be implemented by a combination of hardware and software, e.g., firmware.

[0274] Although the present invention has been described with reference to the embodiments, in the process of implementing the claimed invention, those skilled in the art can understand and implement other variations of the disclosed embodiments by referring to the attached drawings, the disclosed content, and the appended claims. In the claims, "comprising" does not exclude other components or steps, and "a" or "one" does not exclude a plural meaning. A single processor or other unit may perform several functions recited in the claims. Although several means are recited in mutually different dependent claims, this does not mean that these means cannot be combined to achieve advantageous effects.

[0275] The above describes the embodiments of the present application. The above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The choice of terms used in this specification is intended to best explain the principles, practical applications, or improvements of market technology of the embodiments, or to enable another person skilled in the art to understand the embodiments disclosed herein.

Claims

1. A patterning material comprising a metal-oxygen cluster framework formed by metal M-oxygen bridge bonds, a radiation sensitive organic ligand, and a second ligand, the radiation-sensitive organic ligand is coordinately bonded to the metal M via a coordinating atom, the coordinating atom being at least one of an oxygen atom, a sulfur atom, a selenium atom, a nitrogen atom, and a phosphorus atom; the radiation-sensitive organic ligand is a monodentate ligand or a polydentate ligand having two or more dentates; and the second ligand is an inorganic ion or a coordinating group; The patterning material is [In 4 (μ4-O)] 2 In 4 O 2 (OH) 2 (L 1 ) 4 (L 2 ) 8 X 6 An indium-oxygen cluster material represented by the formula: L 1 =OR 1 , R 1 =CH 3 , L 2 =NH(CH 2 CH 2 O) 2 , X=Cl, L 1 =OR 1 , R 1 =CH 3 , L 2 =NH(CH 2 CH 2 O) 2 , X=Br, or L1 = OR1, R1 = C6H4NO2, L2 = NH(CH2CH2O)2, X = Cl; L 1 and L 2 are used as the radiation-sensitive organic ligand in a manner that they coexist in the same ligand, and X is the second ligand; or The patterning material is a tin-oxygen cluster material represented by [Sn 10 O 12 (L 1 ) 12 X 8 ], where L 1 =4-methylpyrazole and X=Cl; L 1 is used as the radiation-sensitive organic ligand and X is the second ligand; Patterning materials.

2. The patterning material of claim 1 , wherein the coordinating atoms are oxygen atoms, and the oxygen atoms in the radiation-sensitive organic ligands do not form carboxyl groups or peroxide bonds.

3. 2. The patterning material of claim 1, wherein the radiation-sensitive organic ligand in the indium-oxygen cluster material coordinates with the In via a nitrogen atom or an oxygen atom as the coordinating atom.

4. A radiation-sensitive patterning composition comprising the patterning material of claim 1 and a solvent.

5. 5. The radiation-sensitive patterning composition of claim 4, wherein the solvent is at least one of a carboxylic acid ester, an alcohol having 1 to 8 carbon atoms, an aromatic hydrocarbon, a halogenated hydrocarbon, and an amide.

6. A pattern formation method comprising the steps of: forming a substrate coated with a radiation sensitive coating, the radiation sensitive coating comprising a patterning material according to any one of claims 1 to 3; exposing the coated substrate to radiation in a required pattern to form an exposed structure including areas having an exposed coating and areas having an unexposed coating; and selectively developing the exposed structure to form a patterned substrate having a patterned film.

7. 4. A patterned substrate comprising a patterned film and a substrate, the patterned film being present in selected areas on the substrate and absent in other areas on the substrate, and the patterned film being formed using the patterning material of claim 1.

8. 10. A method of patterning a substrate, comprising the step of performing etching or electron injection on a patterned substrate according to claim 7 to form a patterned structure on a surface of the substrate.

9. 10. An integrated circuit device comprising a surface structure formed on a silicon wafer as the substrate using the method for patterning a substrate according to claim 8.

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