Device and method to calibrate or verify the displacement-measurement system of an instrumented indenter
The system uses a stage, indenter, and optical detector to verify displacement measurements by comparing measured depths with calculated depths, addressing the complexity and cost issues of existing verification methods, ensuring accurate and compliant displacement detection.
WO2026035784A1 Publication Date: 2026-02-12KLA CORP
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Patent Information
- Application Number
- PCT/US2025/040807
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-09-04
- Filing Date
- 2025-08-06
- Publication Date
- 2026-02-12
AI Technical Summary
Technical Problem
Existing methods for verifying the displacement measurements of instrumented indenters are expensive, complex, and lack standardization, making it difficult to ensure accuracy and compliance with industrial standards.
Method used
A system and method using a stage, indenter, actuator, force and displacement detectors, and an optical detector to verify displacement measurements by comparing measured depths with calculated depths based on the geometry of an inclined surface, allowing for independent verification without additional hardware.
Benefits of technology
Provides a simple, reliable, and repeatable method to verify the accuracy of displacement measurements, ensuring compliance with industrial standards and minimizing errors in displacement detection.
✦ Generated by Eureka AI based on patent content.
Abstract
An optical detector determines a relative depth between a first position and a second position on an inclined surface. A controller determines a slope of the inclined surface based on the relative depth between the first position and the second position and the distance moved between positions. An actuator displaces a punch at a plurality of intermediate positions on the inclined surface located between the first position and the second position. A displacement detector determines a depth at which the sample is touched by the punch at each of the plurality of intermediate positions. The controller further determines a calculated depth of the inclined surface at each of the plurality of intermediate positions based on the slope of the inclined surface and the distance moved between positions. The controller further compares the depth measured by the displacement detector to each corresponding calculated depth to verify accuracy of the displacement detector.
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