Substrate work device

Abstract

A substrate work device according to the present invention performs work on a substrate disposed on an XY plane. The substrate work device comprises: a work unit that performs work on a substrate; a first movement mechanism that holds the work unit in a manner allowing movement along a first direction extending parallel to the XY plane; and a second movement mechanism that holds the first movement mechanism in a manner allowing movement along a second direction extending parallel to the XY plane and orthogonal to the first direction. The first movement mechanism comprises a flexible cable extending along the first direction and connected to the work unit, and a pair of covers covering the cable from both sides in the second direction. The substrate work device further comprises a detection device that detects that at least a portion of the cable is passing through a preset specific path.

Description

Substrate working device

[0001] The technology disclosed in this specification relates to a substrate working device that performs work on a substrate arranged in the XY plane.

[0002] Patent Document 1 discloses a component mounter that mounts components on a substrate arranged in the XY plane. The component mounter includes an imaging head, a head moving mechanism that moves the imaging head along the XY directions, and a signal transmission cable that is flexible and connects the imaging head and a control device. Since the signal transmission cable repeatedly flexes as the imaging head moves, it may be damaged. The component mounter further includes an inspection unit that detects damage or the like of the signal transmission cable.

[0003] Japanese Patent Application Laid-Open No. 2013-62403

[0004] In Patent Document 1, the inspection unit of the component mounter detects that an abnormality has occurred in the signal transmission cable based on whether the output level of the inspection signal transmitted from the signal transmission cable deviates from the reference range. For this reason, the signal transmission cable requires a complex configuration capable of transmitting the inspection signal. In this specification, a technology that can detect the state of the cable while simplifying the configuration of the cable is provided.

[0005] The technology disclosed in this specification is embodied by a substrate working device that performs work on a substrate arranged in the XY plane. The substrate working device includes a working unit that executes the work on the substrate, a first moving mechanism that movably holds the working unit along a first direction extending parallel to the XY plane, and a second moving mechanism that movably holds the first moving mechanism along a second direction extending parallel to the XY plane and orthogonal to the first direction. The first moving mechanism includes a cable that extends along the first direction and is connected to the working unit and has flexibility, and a pair of covers that cover the cable from both sides in the second direction. The substrate working device further includes a detection device that detects that at least a part of the cable passes through a preset specific path.

[0006] As the work area moves, the cable repeatedly bends and extends along a first direction. For example, if the cable's condition changes, such as a decrease in cable rigidity, the cable's path may change. In the aforementioned substrate work apparatus, the inspection device detects whether at least a portion of the cable is passing through a predetermined specific path. Because the cable's condition can be detected based on its path, the cable's configuration can be simplified compared to conventional techniques that use cables capable of transmitting inspection signals, while still allowing for detection of the cable's condition.

[0007] This specification also discloses a substrate work apparatus of another embodiment. The substrate work apparatus in this embodiment performs work on a substrate arranged in the XY plane. The substrate work apparatus comprises a work unit for performing the work on the substrate, a first moving mechanism for movably holding the work unit along a first direction extending parallel to the XY plane, and a second moving mechanism for movably holding the first moving mechanism along a second direction extending parallel to the XY plane and perpendicular to the first direction. The first moving mechanism comprises a flexible cable extending along the first direction and connected to the work unit, and a pair of covers covering the cable from both sides in the second direction. The substrate work apparatus further comprises a vibration sensor capable of measuring vibrations of the cable in the second direction.

[0008] For example, if the cable's condition changes, such as a decrease in cable rigidity, the vibrations generated in the cable when the first moving mechanism moves along the second direction (specifically, vibrations in the cable in the second direction) increase. The above-described substrate work device is equipped with a vibration sensor capable of measuring vibrations in the cable in the second direction. Because the cable's condition can be detected based on vibrations in the cable's second direction, the cable's condition can be detected while simplifying the cable configuration compared to conventional technology that uses cables capable of transmitting inspection signals.

[0009] Side view of the component mounting machine of the first embodiment. Enlarged view of the area enclosed by dashed line II in Figure 1. Flowchart of the cable path detection process.

[0010] The main features of the embodiments described below are listed below. Note that the technical elements described below are independent technical elements that exhibit technical usefulness individually or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

[0011] (Feature 1) In the above-described substrate handling apparatus, the cable may be composed of a flat cable in which a plurality of wires fixed to each other are arranged in a strip along the second direction.

[0012] Flat cables arranged in a strip along a second direction have higher rigidity than a single cable that is not arranged in a strip along the second direction. Therefore, flat cables are less susceptible to changes in their path that are not caused by a decrease in rigidity compared to a single cable. As a result, flat cables allow for more appropriate detection of the cable's condition (decrease in cable rigidity) based on its path.

[0013] (Feature 2) In the above-described substrate handling apparatus, the detection device may include a vibration sensor capable of measuring the vibration of the cable in the second direction. In that case, if the magnitude of the vibration of the cable measured by the vibration sensor exceeds a predetermined value, it may be determined that at least a part of the cable is passing through the specific path.

[0014] For example, in the initial stage when the cable's rigidity is relatively high, even if the first moving mechanism moves along the second direction by the second moving mechanism, the vibration of the cable in the second direction is relatively small. However, as the cable's rigidity decreases and the cable passes through a specific path, the vibration of the cable in the second direction increases when the first moving mechanism moves along the second direction. With such a configuration, the cable's path can be detected relatively easily based on the magnitude of the vibration of the cable in the second direction.

[0015] (Feature 3) In the substrate handling apparatus described above, the vibration sensor may include an acceleration sensor capable of measuring the acceleration of the cable in the second direction. In that case, the detection device may determine that at least a portion of the cable is passing through the specific path when the acceleration of the cable measured by the acceleration sensor exceeds a predetermined acceleration.

[0016] For example, in the initial stage when the cable's rigidity is relatively high, even if the first moving mechanism moves along the second direction, the acceleration of the cable in the second direction is relatively small. However, as the cable's rigidity decreases and the cable passes through a specific path, the acceleration of the cable in the second direction increases when the first moving mechanism moves along the second direction. With such a configuration, the cable's path can be detected relatively easily based on the acceleration of the cable in the second direction.

[0017] (Feature 4) In the substrate handling apparatus described above, the vibration sensor may include a camera capable of imaging the cable and the pair of covers along the first direction. In this case, the detection device may determine that at least a portion of the cable is passing through the specific path if, in the image captured by the camera, at least a portion of the cable is located beyond the pair of covers in the second direction.

[0018] For example, in the initial stage when the cable's rigidity is relatively high, the cable passes through a path between a pair of covers. However, as the cable's rigidity decreases, for example, slack may occur in the cable, causing a portion of the cable to protrude below the lower end of the covers. In this case, when the first moving mechanism moves in the second direction, the cable may be positioned beyond the pair of covers in the second direction (i.e., passing through a predetermined specific path). With such a configuration, the cable's path can be detected relatively easily based on the image of the cable captured by the camera.

[0019] (Feature 5) In the above-described substrate handling apparatus, the substrate handling apparatus may further include a notification unit that issues a warning when the detection device detects that at least a portion of the cable is passing through the specific path.

[0020] This configuration allows workers to be notified that at least a portion of the cable is passing through a specific route.

[0021] (First Embodiment) As shown in Figure 1, the component mounting machine 10 of this embodiment includes a touch screen 11, a feeder unit 12, a pair of substrate conveyors 14, a mounting head 16, an X robot 20, a Y robot 30, and a control device 40. The component mounting machine 10 is a device that picks up components 4 with a nozzle 6 held by the mounting head 16 and mounts them on a substrate 2. The component mounting machine 10 is also called an electronic component mounting device or a chip mounter.

[0022] The touchscreen 11 functions as a display unit that shows various information related to the component mounting machine 10. The touchscreen 11 also functions as an operation unit that receives input from the operator. In a modified example, the component mounting machine 10 may have a separate display for showing information and an operation unit for receiving input from the operator.

[0023] The feeder unit 12 is composed of multiple feeders. The multiple feeders are arranged along the X direction and each contains multiple components 4. Each feeder supplies the components 4 to the component mounting machine 10.

[0024] The pair of substrate conveyors 14 support the substrate 2 from below. The pair of substrate conveyors 14 also transport the substrate 2 along the X direction. As shown in Figure 1, the substrate 2 is supported by the pair of substrate conveyors 14 along the XY plane (i.e., along the horizontal direction).

[0025] The mounting head 16 detachably holds the nozzle 6. The mounting head 16 also moves vertically together with the nozzle 6. The nozzle 6 extends downward from the lower end of the mounting head 16. The inside of the nozzle 6 is held under negative pressure, and the part 4 is attracted to the lower end of the nozzle 6. In Figure 1, one nozzle 6 is held, but in modified examples, the mounting head 16 may detachably hold multiple nozzles 6. The mounting head 16 is held by the X robot 20. The X robot 20 is held by the Y robot 30.

[0026] The control device 40 is a computer that controls the operation of the component mounting machine 10. The control device 40 is communicatively connected to the touch screen 11, feeder unit 12, pair of substrate conveyors 14, mounting head 16, X robot 20, and Y robot 30 of the component mounting machine 10. The control device 40 includes a CPU 42 and a memory 44. The memory 44 is composed of non-volatile memory and volatile memory and stores, for example, a program 46. The CPU 42 mounts, for example, components 4 onto the substrate 2 according to the program 46. The CPU 42 also executes cable path detection processing, which will be described later, according to the program 46.

[0027] The structure of the X robot 20 will be described with reference to Figure 2. Figure 2(A) is an enlarged view of the area enclosed by the dashed line II in Figure 1, and shows a front view of the X robot 20. Figure 2(B) shows a side view of Figure 2(A) from the -Y direction (i.e., the left side of the paper in Figure 2(A)). As shown in Figure 2(A), the X robot 20 includes a cable 22 connected to the mounting head 16, a pair of covers 24, and an acceleration sensor S1.

[0028] For ease of understanding, the shapes of the cable 22 and end wall 26 are hatched in Figure 2(B). The same applies to Figure 2(D), which will be described later. As shown in Figure 2(B), the cable 22 extends in the first direction D1. The cable 22 connects the mounting head 16 to a bending mechanism (not shown) that bends and extends the cable 22. The X robot 20 moves the mounting head 16 along the first direction D1 by bending and extending the cable 22. In this embodiment, the first direction D1 is parallel to the X direction.

[0029] As shown in Figure 1, the Y robot 30 moves the X robot 20 along the second direction D2, which is perpendicular to the first direction D1. Although not shown in the figure, the Y robot 30, like the X robot 20, is equipped with a cable in which multiple wires are arranged in a strip along the second direction D2. The Y robot 30 moves the X robot 20 along the second direction D2 using this cable. In this embodiment, the second direction D2 is parallel to the Y direction. The component mounting machine 10 moves the mounting head 16 along the XY plane using the robots 20 and 30. As a result, the component mounting machine 10 uses the mounting head 16 to move the components 4 supplied by the feeder unit 12 to the top of the substrate 2, then lowers the mounting head 16 toward the substrate 2 and mounts the components 4 to the mounting position on the substrate 2. In this way, the component mounting machine 10 mounts the components 4 on the substrate 2.

[0030] As shown in Figure 2(A), the cable 22 is a flat cable in which multiple wires 21 are arranged in a strip along the second direction D2. In the case of multiple wires 21, adjacent wires 21 are fixed to each other. Although not particularly limited, adjacent wires 21 are fixed to each other by welding. In a modified example, adjacent wires 21 may be fixed to each other by adhesive or by bands. Because adjacent wires 21 are fixed to each other, each wire 21 of the cable 22 bends and extends as a whole. For this reason, the cable 22 has higher rigidity compared to a configuration with only one wire 21.

[0031] The pair of covers 24 cover the cable 22 from both sides in the second direction D2. As shown in Figure 2(B), the +X ends of the pair of covers 24 are connected to each other by end walls 26. As shown in Figure 2(A), the lower end 27 of the end walls 26 is located above the lower end of the pair of covers 24. In the component mounting machine 10, the mounting head 16 is moved at a relatively high speed. This allows for an increase in the number of components 4 mounted on the substrate 2 per unit time. For example, when the X robot 20 moves at high speed in the second direction D2, the flexible cable 22 swings considerably along the second direction D2. The pair of covers 24 prevent the cable 22 from swinging in the second direction D2 and interfering with, for example, surrounding components. In other words, the pair of covers 24 protect the cable 22.

[0032] Here, the cable 22 is flexible but has the rigidity to maintain its shape. In particular, as mentioned earlier, since the cable 22 is a flat cable, it has high rigidity due to the multiple wires 21. For this reason, as shown in Figure 2(B), in the initial stage of the mounting process, where the number of bending and stretching cycles is relatively small, the cable 22 passes through the initial path R1. In the initial path R1, the cable 22 has a section that extends along the first direction D1 and a section that bends downward from the straight section and extends downward along the end wall 26 to connect to the mounting head 16.

[0033] If the cable 22 is repeatedly bent and straightened multiple times, for example, the welding strength between multiple wires 21 may decrease, which can reduce the rigidity of the cable 22. As a result, the cable 22 may have difficulty maintaining its shape. In this case, for example, as shown in Figure 2(D), the cable 22 may pass through the aging path R2. In the aging path R2, the central part 22A of the cable 22 hangs down by a height H1 from the lower end of the pair of covers 24. Furthermore, the end 22B of the cable 22 passes below the lower end 27 of the end wall 26 and protrudes in the +X direction by a length L1 from the end wall 26. In this way, when the rigidity of the cable 22 decreases, the path of the cable 22 changes. In other words, if the cable 22 passes through the aging path R2, it can be determined that the rigidity of the cable 22 has decreased. However, as mentioned earlier, in the component mounting machine 10, the cable 22 is covered by a pair of covers 24, making it difficult for the operator to visually confirm the path of the cable 22.

[0034] For example, when the X robot 20 moves in the second direction D2 while the cable 22 is passing through the aging path R2, as shown in Figure 2(C), the cable 22 swings in the second direction D2 as the X robot 20 moves along the second direction D2, and may violently interfere with the inner surfaces of the pair of covers 24 at the interference point P1, for example. Furthermore, the tip of the cable 22 may be located outside the pair of covers 24 by a width W1. In other words, when passing through the aging path R2, the cable 22 vibrates more in the second direction D2 than when passing through the initial path R1. For this reason, the component mounting machine 10 of this embodiment can determine whether the cable 22 is passing through the initial path R1 or the aging path R2 based on the magnitude of the vibration of the cable 22 in the second direction D2. In other words, it can determine whether the rigidity of the cable 22 has decreased based on the magnitude of the vibration of the cable 22 in the second direction D2. Furthermore, as mentioned earlier, since cable 22 is a flat cable in which multiple wires 21 are welded together, it has higher rigidity compared to a cable with only one wire 21. For this reason, changes in the path that are not caused by a decrease in rigidity are less likely to occur in cable 22. In cable 22, the state of cable 22 (i.e., rigidity) can be detected more appropriately as the path changes to the aging path R2.

[0035] To measure the magnitude of vibration of the cable 22 in the second direction D2, acceleration sensors S1 are placed on the outer surfaces of the pair of covers 24. The acceleration sensors S1 detect the acceleration of the cable 22 in the second direction D2 and transmit it to the control device 40. The acceleration sensors S1 detect the acceleration of the cable 22 in the second direction D2 based, for example, on the load applied to the pair of covers 24 when the cable 22 interferes with the pair of covers 24. The type and structure of the acceleration sensors S1 are not particularly limited, and various types of sensors can be used. In this way, the component mounting machine 10 of this embodiment can detect the path of the cable 22 relatively easily based on the acceleration of the cable 22 in the second direction D2 detected by the acceleration sensors S1.

[0036] Referring to Figure 3, the cable path detection process performed by the CPU 42 of the component mounting machine 10 in this embodiment will be described. The cable path detection process is a process for detecting the path of the cable 22. The CPU 42 continues the process shown in Figure 3 while the components 4 are being mounted. In a modified example, the CPU 42 may, for example, execute the process shown in Figure 3 each time a predetermined number of components 4 have been mounted.

[0037] In S10, the CPU 42 determines whether the X robot 20 is moving in the second direction D2 due to the Y robot 30. For example, if the CPU 42 is sending an operation signal to the Y robot 30, it determines that the X robot 20 is moving in the second direction D2 (YES in S10) and proceeds to S12. The CPU 42 repeats the process in S10 until it determines that the X robot 20 is moving in the second direction D2.

[0038] In S12, the CPU 42 receives acceleration G1 from the acceleration sensor S1 of the X robot 20.

[0039] In S20, the CPU 42 compares the acceleration G1 received from the acceleration sensor S1 in S10 with the threshold acceleration Gth1. The threshold acceleration Gth1 is a value used to determine whether the rigidity of the cable 22 has decreased, and is stored in memory 44 beforehand. Note that the threshold acceleration Gth1 can be changed retrospectively by the operator. If the acceleration G1 is less than the threshold acceleration Gth1, the CPU 42 determines that the rigidity of the cable 22 has not decreased, that is, for example, that the cable 22 has passed through the initial path R1 (see Figure 2(B)) (NO in S20), and returns to S10. If the acceleration G1 is greater than or equal to the threshold acceleration Gth1, the CPU 42 determines that the rigidity of the cable 22 has decreased, that is, for example, that the cable 22 has passed through the aging path R2 (see Figure 2(D)) (YES in S20), and proceeds to S30.

[0040] In S30, the CPU 42 displays the cable inspection screen SC1 on the touchscreen 11. As shown in Figure 3, the cable inspection screen SC1 includes a message instructing the operator to inspect cable 22 because there is a possibility of an abnormality in cable 22. This informs the operator that cable 22 may be passing through the aging path R2. Furthermore, even if there is no abnormality in cable 22, the operator can be aware of the possibility of an abnormality occurring, thus preventing the occurrence of an abnormality in advance.

[0041] In step S32, the CPU 42 stops the operation of each robot 20, 30, etc., and stops the mounting of component 4 onto the circuit board 2. This prevents the mounting of component 4 from continuing while the rigidity of the cable 22 is reduced.

[0042] (Effects of this embodiment) As described above, the cable 22 repeatedly bends and extends along the first direction D1 as the mounting head 16 moves, which can reduce the rigidity of the cable 22. In that case, the path of the cable 22 may change, for example, from the initial path R1 to the aging path R2. The component mounting machine 10 detects that the cable 22 is passing through the aging path R2 using the control device 40 and the acceleration sensor S1. Compared to conventional technology that detects the state of the cable 22 based on an inspection signal from the cable 22, this method simplifies the configuration of the cable 22 while enabling detection of the state of the cable 22, which is difficult to visually confirm because it is covered by a pair of covers 24.

[0043] The correspondence in this embodiment is as follows: The component mounting machine 10 is an example of a "board-to-board work device". The mounting head 16 is an example of an "operating unit". The X robot 20 is an example of a "first movement mechanism", and the Y robot 30 is an example of a "second movement mechanism". The aging path R2 is an example of a "specific path". The touch screen 11 is an example of a "notification unit". The control device 40 is an example of a "detection device". The cable inspection screen SC1 is an example of a "warning".

[0044] (Second Embodiment) The component mounter 10 of the second embodiment will be described. As shown in FIGS. 2(B) and 2(D), the component mounter 10 of this embodiment has a camera C1 instead of the acceleration sensor S1. The camera C1 is arranged, for example, on the wall surface (not shown) in the -Y direction of the component mounter 10. The camera C1 faces the end wall 26. The camera C1 captures an image of the X robot 20 as viewed along the arrow A1. That is, FIGS. 2(A) and 2(C) coincide with the images captured by the camera C1.

[0045] Referring to FIG. 3, the cable path detection process executed by the CPU 42 of the component mounter 10 of this embodiment will be described. In the cable path detection process of this embodiment, the processes of S12 and S20 are different from those of the cable path detection process of the first embodiment, but the other processes are the same.

[0046] In S12, the CPU 42 receives a detection image from the camera C1 instead of the acceleration G1. The detection image is an image of the X robot 20 captured by the camera C1, and is, for example, the images shown in FIGS. 2(A) and 2(C).

[0047] In S20, the CPU 42 determines whether the cable 22 is located outside the pair of covers 24 in the detection image. For example, the CPU 42 stores the coordinates indicating the positions of the outer surfaces of the pair of covers 24 in the second direction D2 in the memory 44, and when a member located outside the coordinates is detected from the detection image (see W1 in FIG. 2(C)), it is determined that the cable 22 is located outside the pair of covers 24 (YES in S20), and the process proceeds to S30. When no member is detected outside the coordinates of the pair of covers 24, the CPU 42 determines that the cable 22 is not located outside the pair of covers 24 (NO in S20), and returns to S10. Thus, according to the component mounter 10 of this embodiment, the path of the cable 22 can be detected relatively easily based on the detection image of the camera C1. <000??96>Points to note regarding the component mounter 10 described in the embodiments will be described. The component mounter 10 of the first embodiment may include, for example, contact sensors disposed on the inner surfaces of a pair of covers 24 instead of the acceleration sensor S1. In that case, the contact sensors are disposed, for example, near the lower ends of the pair of covers 24, and the CPU 42 may detect that the rigidity of the cable 22 has decreased and that it is passing through the aging path R2 when the cable 22 droops and contacts the contact sensors.

[0049] The component mounter 10 may include a camera capable of acquiring an image of the X robot 20 when viewed along the second direction D2. In this modification, for example, the CPU 42 may detect that the cable 22 is passing through the aging path R2 when, in the image of the camera, the central portion 22A of the cable 22 droops from the lower ends of the pair of covers 24.

[0050] The cable 22 is not limited to a flat cable. In this modification, the cable 22 may be constituted by a single electric wire 21.

[0051] The component mounter 10 of the first embodiment may include a camera C1. In this modification, the path of the cable 22 may be detected based on the acceleration G1 and the detected image.

[0052] In each of the above embodiments, the present invention has been embodied in the component mounter 10 which is a type of substrate processing machine, but it is not limited thereto. For example, in other embodiments, the present invention may be embodied in a substrate processing machine other than the component mounter 10 (for example, a substrate inspection machine, a substrate printer, etc.).

[0053] The technical elements described in this specification or the drawings exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Also, the technology illustrated in this specification or the drawings achieves a plurality of purposes simultaneously, and achieving one of those purposes itself has technical utility.

[0054] For example, this specification also discloses a technical concept in which, in claim 3, "the substrate work apparatus described in claim 1" is changed to "the substrate work apparatus described in claim 1 or 2". Similarly, in claim 5, "the substrate work apparatus described in claim 3" is changed to "the substrate work apparatus described in claim 3 or 4", and in claim 6, "the substrate work apparatus described in claim 1" is changed to "the substrate work apparatus described in any one of claims 1 to 5".

[0055] 2: Circuit board 4: Components 6: Nozzle 10: Component mounting machine 11: Touchscreen 12: Feeder unit 14: Circuit board conveyor 16: Mounting head 20: X robot 21: Electric wire 22: Cable 22A: Center section 22B: End section 24: Cover 26: End wall 27: Bottom section 30: Y robot 40: Control device 42: CPU 44: Memory 46: Program C1: Camera D1: First direction D2: Second direction R1: Initial path R2: Path over time S1: Acceleration sensor

Claims

1. A substrate work apparatus for performing work on a substrate arranged in an XY plane, comprising: a work unit for performing the work on the substrate; a first moving mechanism for movably holding the work unit along a first direction extending parallel to the XY plane; and a second moving mechanism for movably holding the first moving mechanism along a second direction extending parallel to the XY plane and perpendicular to the first direction, wherein the first moving mechanism comprises: a flexible cable extending along the first direction and connected to the work unit; and a pair of covers covering the cable from both sides in the second direction, and the substrate work apparatus further comprises a detection device for detecting that at least a portion of the cable is passing through a predetermined specific path.

2. The substrate work apparatus according to claim 1, wherein the cable is composed of a flat cable in which a plurality of fixed electric wires are arranged in a strip along the second direction.

3. The substrate handling apparatus according to claim 1, wherein the detection device is configured to communicate with a vibration sensor capable of measuring vibration of the cable in the second direction, and determines that at least a portion of the cable is passing through the specific path when the magnitude of the vibration of the cable measured by the vibration sensor exceeds a predetermined value.

4. The substrate handling apparatus according to claim 3, wherein the vibration sensor includes an acceleration sensor capable of measuring the acceleration of the cable in the second direction, and the detection device determines that at least a portion of the cable is passing through the specific path when the acceleration of the cable measured by the acceleration sensor exceeds a predetermined acceleration.

5. The substrate handling apparatus according to claim 3, wherein the vibration sensor includes a camera capable of imaging the cable and the pair of covers along the first direction, and the detection device determines that at least a portion of the cable is passing through the specific path when at least a portion of the cable is located beyond the pair of covers in the second direction in the image captured by the camera.

6. The substrate work apparatus according to claim 1, further comprising a notification unit that issues a warning when the detection device detects that at least a portion of the cable is passing through the specific path.

7. A substrate work apparatus for performing work on a substrate arranged in an XY plane, comprising: a work unit for performing the work on the substrate; a first moving mechanism for movably holding the work unit along a first direction extending parallel to the XY plane; and a second moving mechanism for movably holding the first moving mechanism along a second direction extending parallel to the XY plane and perpendicular to the first direction, wherein the first moving mechanism comprises: a flexible cable extending along the first direction and connected to the work unit; and a pair of covers covering the cable from both sides in the second direction, and the substrate work apparatus further comprises a vibration sensor capable of measuring vibrations of the cable in the second direction.

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