Process for mfg. unidimensional X ray refracted diffraction micro structural component of aluminium material

Abstract

The invention relates to aluminum material one dimension X ray diffraction refraction microstructure device manufacturing method. It includes the following steps: making ultraviolet light photolithography mask and its edition; preparing X ray photolithography base body; and forming aluminum material one dimension X ray diffraction refraction microstructure device. The invention optimizes one dimension X ray diffraction refraction microstructure device face form shape. Its aberration is almost zero. And the quality of the focal spot is good. It offers manufacturing technique pointed to aluminum material one dimension X ray diffraction refraction microstructure device and increase device depth size for scores times. Thus this can greatly improve depth direction light gathering caliber, and improve X ray radiation transmissibility.

Description

(1) Technical field

[0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of a microstructure X-ray optical device based on dual effects of refraction and diffraction, which is suitable for the production of one-dimensional X-ray refraction and diffraction microstructure devices made of aluminum materials. (2) Background technology

[0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic tech...

Examples

Embodiment 1

[0032] Referring to accompanying drawing 1, a kind of manufacturing method of one-dimensional X-ray diffraction microstructure device of aluminum material, described one-dimensional X-ray diffraction microstructure device is made up of a plurality of lens units of coaxial order successively, and described lens unit It consists of a lens body with an air gap, the upper side wall of the lens body has upward stepped steps, and the step width of each step is equal; the lower side wall of the lens body has a shaft as the center line Downward stepped steps arranged symmetrically with the steps on the upper side wall of the lens, the lens body is provided with the open air gap, the cross-sectional shape of the air gap is elliptical, and the air gap corresponds to the minor axis of the ellipse The largest aperture dimension in the direction is smaller than the minor axis dimension of the ellipse, and the major axis of the elliptical air gap of the lens unit is located on the same strai...

Embodiment 2

[0051] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a titanium material, and the thickness of the PMMA coating on the surface of the titanium sheet is 500 microns in the step (1), and all the other steps are the same as in Example 1.

Embodiment 3

[0053] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a nickel material, and the thickness of the PMMA coating on the surface of the titanium sheet is 2000 microns in the step (1), and all the other steps are the same as in Example 1.

[0054] Process tests have been carried out on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray combined lens, and the process test effect of embodiment 2 is the best.

(1) Technical field

[0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of a microstructure X-ray optical device based on dual effects of refraction and diffraction, which is suitable for the production of one-dimensional X-ray refraction and diffraction microstructure devices made of aluminum materials. (2) Background technology

[0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic tech...

Examples

Embodiment 1

[0032] Referring to accompanying drawing 1, a kind of manufacturing method of one-dimensional X-ray diffraction microstructure device of aluminum material, described one-dimensional X-ray diffraction microstructure device is made up of a plurality of lens units of coaxial order successively, and described lens unit It consists of a lens body with an air gap, the upper side wall of the lens body has upward stepped steps, and the step width of each step is equal; the lower side wall of the lens body has a shaft as the center line Downward stepped steps arranged symmetrically with the steps on the upper side wall of the lens, the lens body is provided with the open air gap, the cross-sectional shape of the air gap is elliptical, and the air gap corresponds to the minor axis of the ellipse The largest aperture dimension in the direction is smaller than the minor axis dimension of the ellipse, and the major axis of the elliptical air gap of the lens unit is located on the same strai...

Embodiment 2

[0051] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a titanium material, and the thickness of the PMMA coating on the surface of the titanium sheet is 500 microns in the step (1), and all the other steps are the same as in Example 1.

Embodiment 3

[0053] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a nickel material, and the thickness of the PMMA coating on the surface of the titanium sheet is 2000 microns in the step (1), and all the other steps are the same as in Example 1.

[0054] Process tests have been carried out on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray combined lens, and the process test effect of embodiment 2 is the best.

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