Ion source with temperature control function and working method thereof

Abstract

The present invention provides an ion source with a temperature control function and a working method thereof, wherein the ion source comprises a high-voltage electrode; a gas pipeline, wherein the gas pipeline has a larger inner diameter section, a transition section and a smaller inner diameter section arranged in sequence, and one end of the larger inner diameter section is fixed on the first carrier; the high-voltage electrode is arranged on a side of the smaller inner diameter section away from the larger inner diameter section; a heating element, wherein the heating element is arranged in the smaller inner diameter section; a temperature measuring component, wherein the temperature measuring component detects the temperature of the gas in the smaller inner diameter section; and a conveying unit, wherein the conveying unit conveys the gas to the outside of the connection between the transition section and the smaller inner diameter section. The present invention has the advantages of simple structure, fast heating and cooling.

Description

Technical Field

[0001] The invention relates to an ion source, in particular to an ion source with a temperature control function and a working method thereof. Background Art

[0002] During the operation of an open ion source, when a high-temperature sample is ionized, the discharge gas must be heated in a sealed environment without electronic interference to increase the ion velocity intensity and ion beam energy of the gas, which is helpful for the ionization of the sample. When analyzing samples with lower ionization temperatures, the ion source needs to be cooled quickly in a sealed environment to reach the expected temperature range. Therefore, rapid temperature control of the ion source is conducive to the orderly and rational conduct of the experiment.

[0003] The current open ion source technology has the following main shortcomings: the ion source heat transfer heating technology can quickly achieve heating of equal-diameter space, but due to the use of hollow air permeation and external sealing, it leads to large heat loss and low utilization rate. When rapid cooling is required, the cooling time is too long, which makes the experimental waiting time too long; the ion source fan cooling technology, due to the discharge characteristics of the ion source, places a fan outside a good insulation device, which is effective for high temperatures in a short period of time, but the effect is not obvious in the medium temperature range, and the cooling time is slow, resulting in the inability to meet the technical requirements of rapid heating and cooling. Summary of the invention

[0004] In order to solve the deficiencies in the above-mentioned prior art solutions, the present invention provides an ion source with a simple structure, fast heating and cooling, and a temperature control function.

[0005] The objective of the present invention is achieved through the following technical solutions:

[0006] An ion source with a temperature control function, the ion source comprising a high voltage electrode; the ion source with a temperature control function further comprises:

[0007] A gas pipeline, wherein the gas pipeline has a section with a larger inner diameter, a transition section and a section with a smaller inner diameter arranged in sequence, one end of the section with a larger inner diameter is fixed on the first bearing member; the high-voltage electrode is arranged on a side of the section with a smaller inner diameter away from the section with a larger inner diameter;

[0008] A heating element, wherein the heating element is arranged in the section with a smaller inner diameter;

[0009] A temperature measuring component, the temperature measuring component detects the temperature of the gas in the section with a smaller inner diameter;

[0010] A conveying unit is used to convey the gas to the outside of the connection between the transition section and the section with a smaller inner diameter.

[0011] The object of the present invention is also to provide a working method of the above-mentioned ion source with temperature control function, specifically a temperature raising method, and the object of the invention is achieved by the following technical solutions:

[0012] According to the working method of the ion source with temperature control function, the working method comprises the following steps:

[0013] (A1) Close the delivery unit and the gas enters the section with a larger inner diameter;

[0014] (A2) When the gas enters the transition section, the gas velocity and density are increased;

[0015] (A3) The gas enters the section with a smaller inner diameter and is heated;

[0016] Adjust the heating power according to the temperature output by the temperature measuring component and the temperature setting value;

[0017] (A4) The gas flowing out of the section with a smaller inner diameter is ionized to form an ion beam.

[0018] The object of the present invention is also to provide a working method of the above-mentioned ion source with temperature control function, specifically a cooling method, and the object of the invention is achieved by the following technical solutions:

[0019] According to the working method of the ion source with temperature control function, the working method comprises the following steps:

[0020] (B1) Turn off the heating element and open the conveying unit, so that the outside air blows through the connection and takes away the heat; the heat of the section with a smaller inner diameter is transferred to the transition section;

[0021] The cooling gas enters the section with larger inner diameter;

[0022] (B2) The cooling gas enters the transition section, and the flow rate and density of the gas are increased;

[0023] (B3) The cooling gas flows out of the section with a smaller inner diameter and takes away the heat.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] 1. The ion source heats up faster and the temperature control is more accurate.

[0026] 2. The ion source cools down faster and more directly.

[0027] 3. Simple and compact structure.

[0028] 4. The formed ion beam is more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The disclosure of the present invention will become easier to understand with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only used to illustrate the technical solution of the present invention and are not intended to limit the scope of protection of the present invention. In the drawings:

[0030] Figure 1 1 is a simplified structural diagram of an ion source with a temperature control function according to Example 1 of the present invention. DETAILED DESCRIPTION

[0031] Figure 1 The following description describes the optional embodiments of the present invention to teach those skilled in the art how to implement and reproduce the present invention. In order to teach the technical solution of the present invention, some conventional aspects have been simplified or omitted. It should be understood by those skilled in the art that variations or substitutions derived from these embodiments will be within the scope of the present invention. It should be understood by those skilled in the art that the following features can be combined in various ways to form multiple variations of the present invention. Thus, the present invention is not limited to the following optional embodiments, but is only limited by the claims and their equivalents.

[0032] Embodiment 1:

[0033] Figure 1 The structure diagram of the ion source with temperature control function according to the embodiment of the present invention is schematically shown as follows: Figure 1 As shown, the ion source with temperature control function includes:

[0034] A gas pipeline, wherein the gas pipeline comprises a section 21 with a larger inner diameter, a transition section 22 and a section 23 with a smaller inner diameter which are arranged in sequence, and one end of the section with a larger inner diameter is fixed on the first bearing member;

[0035] A first portion, the first portion comprising the section with a larger inner diameter and a transition section;

[0036] a second part, wherein the second part includes the section with a smaller inner diameter; the thermal conductivity of the first part is greater than that of the second part, such as the first part is made of metal and the second part is made of ceramic;

[0037] A connecting portion 24, the connecting portion connecting the first portion and the second portion;

[0038] A heating element, the heating element is arranged in the section with a smaller inner diameter, and the heating element comprises:

[0039] A base 31, which is located in the gas pipeline, with one end fixed on the first bearing member and the other end extending into the section with a smaller inner diameter;

[0040] A heating wire 32, the heating wire being wound around a base in the section with a smaller inner diameter;

[0041] A temperature measuring component 41, such as a thermocouple, which detects the temperature of the gas in the section with a smaller inner diameter;

[0042] The delivery unit 71, such as a vacuum pump, delivers gas to the outside of the connection between the transition section and the section with a smaller inner diameter.

[0043] A first carrier 11, wherein a portion of the first carrier having a larger inner diameter has a first through hole in a projection area on the first carrier, so that gas can pass through the first carrier and enter the gas pipeline;

[0044] A second bearing member 12, one end of the section with a smaller inner diameter away from the section with a larger inner diameter is fixed on the second bearing member, and the section with a smaller inner diameter of the second bearing member has a second through hole 13 in a projection area on the second bearing member; in the gas flow direction (the gas enters the gas pipeline from the first through hole and is discharged from the second through hole), the aperture of the second through hole gradually decreases;

[0045] A base 81, on which the first bearing member and the second bearing member are fixed;

[0046] a medium tube 61, wherein the medium tube is fixed on the second carrier, and the gas discharged from the second through hole enters the medium tube;

[0047] A high voltage electrode 51 is arranged outside the medium pipe.

[0048] According to the working method of the ion source with temperature control function described above in an embodiment of the present invention, the working method comprises the following steps:

[0049] (A1) closing the delivery unit, and allowing the gas to pass through the first through hole and enter the section with a larger inner diameter of the gas pipeline;

[0050] (A2) When the gas enters the transition section, the gas velocity and density are increased;

[0051] (A3) The gas enters the section with a smaller inner diameter and is heated;

[0052] Adjust the heating power according to the temperature output by the temperature measuring component and the temperature setting value;

[0053] (A4) The high voltage electrode discharges, causing the gas flowing out of the section with a smaller inner diameter to be ionized, forming an ion beam.

[0054] According to the working method of the ion source with temperature control function described above in an embodiment of the present invention, the working method comprises the following steps:

[0055] (B1) Turn off the heating element and open the conveying unit, so that the outside air blows through the connection and takes away the heat; the heat of the section with a smaller inner diameter is transferred to the transition section;

[0056] The cooling gas enters the section with larger inner diameter;

[0057] (B2) The cooling gas enters the transition section, and the flow rate and density of the gas are increased;

[0058] (B3) The cooling gas flows out of the section with a smaller inner diameter and takes away the heat.

[0059] Embodiment 2:

[0060] An application example of the ion source with temperature control function described in Example 1 of the present invention.

[0061] In this application example, the first part is made of stainless steel or Kovar alloy; the cone angle formed by the transition section is 30-60°; the cone angle formed by the second through hole is 30-60°; the temperature measuring component uses a thermocouple, a thermistor or a platinum resistor (RTD); the cooling gas uses nitrogen or argon or air or helium; the conveying unit uses a vacuum pump to convey the gas to the outside of the connection between the transition section and the section with a smaller inner diameter, thereby taking away the heat; at the same time, the heat of the section with a smaller inner diameter is conducted to the transition section.

Claims

1. An ion source with temperature control function, the ion source comprising a high voltage electrode; characterized in that: The ion source with temperature control function further comprises: A gas pipeline, wherein the gas pipeline has a section with a larger inner diameter, a transition section and a section with a smaller inner diameter arranged in sequence, one end of the section with a larger inner diameter is fixed on the first bearing member; the high-voltage electrode is arranged on a side of the section with a smaller inner diameter away from the section with a larger inner diameter; A heating element, wherein the heating element is arranged in the section with a smaller inner diameter; A temperature measuring component, the temperature measuring component detects the temperature of the gas in the section with a smaller inner diameter; A conveying unit, wherein the conveying unit conveys the gas to the outside of the connection between the transition section and the section with a smaller inner diameter; A first carrier, wherein a section of the first carrier with a larger inner diameter has a first through hole in a projection area on the first carrier; A second supporting member is arranged between the gas pipeline and the high-voltage electrode, one end of the section with smaller inner diameter away from the section with larger inner diameter is fixed on the second supporting member, and the section with smaller inner diameter of the second supporting member has a second through hole in the projection area on the second supporting member.

2. The ion source with temperature control function according to claim 1, characterized in that: In the gas flow direction, the aperture of the second through hole gradually decreases.

3. The ion source with temperature control function according to claim 1, characterized in that: The ion source further comprises: A medium tube is fixed on the second supporting member, and the high-voltage electrode is arranged on the outside of the medium tube.

4. The ion source with temperature control function according to claim 1, characterized in that: The gas pipeline comprises: A first portion, the first portion comprising the section with a larger inner diameter and a transition section; a second part, the second part including the section with a smaller inner diameter; the thermal conductivity of the first part is greater than that of the second part; A connecting portion connects the first portion and the second portion.

5. The ion source with temperature control function according to claim 4, characterized in that: The first part is a metal tube and the second part is a ceramic tube.

6. The ion source with temperature control function according to claim 1, characterized in that: The heating element comprises: A base, the base is located in the gas pipeline, one end of the base is fixed on the first bearing member, and the other end of the base extends into the section with a smaller inner diameter; A heating wire is wound around a base in the section with a smaller inner diameter.

7. The ion source with temperature control function according to claim 1, characterized in that: The ion source further comprises: A base, wherein the first bearing member and the second bearing member are fixed on the base.

8. The working method of the ion source with temperature control function according to any one of claims 1 to 7, the working method comprising the following steps: (A1) Close the conveying unit and the gas enters the section with larger inner diameter; (A2) When the gas enters the transition section, the gas velocity and density are increased; (A3) The gas enters the section with a smaller inner diameter and is heated; Adjust the heating power according to the temperature output by the temperature measuring component and the temperature setting value; (A4) The gas flowing out of the section with a smaller inner diameter is ionized to form an ion beam.

9. The working method of the ion source with temperature control function according to any one of claims 1 to 7, the working method comprising the following steps: (B1) Turn off the heating element and open the conveying unit, so that the outside air blows through the connection and takes away the heat; the heat of the section with a smaller inner diameter is transferred to the transition section; The cooling gas enters the section with larger inner diameter; (B2) The cooling gas enters the transition section, and the gas flow rate and density are increased; (B3) The cooling gas flows out of the section with a smaller inner diameter and takes away the heat.

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