A fluid pump and an exciting element

Abstract

A fluid pump and an exciting element. The present invention belongs to the field of fluid transportation technology and relates to a fluid pump, comprising: a piezoelectric vibrator, the piezoelectric vibrator comprising a vibration substrate and a piezoelectric element arranged on one side of the vibration substrate; a vibration diaphragm, the vibration diaphragm is arranged on the other side of the vibration substrate, and a sinking cavity is provided on the side of the vibration substrate close to the vibration diaphragm; a plane portion, the plane portion is arranged in a close and opposite manner on the side of the vibration diaphragm away from the vibration substrate, and at least one vent is provided in the area opposite to the sinking cavity of the plane portion; by applying an alternating voltage of a certain frequency to the piezoelectric element, the vibration substrate is bent and deformed, so that the vibration diaphragm resonates and bends and deforms in the same direction as the vibration substrate, and then the fluid pump inhales fluid from the vent and discharges it from the circumferential direction of the vent. The present invention can obtain higher output pressure and output flow, has great market value, and is worthy of promotion.

Description

Technical Field

[0001] The invention belongs to the technical field of fluid conveying equipment, and in particular relates to a fluid pump. Background Art

[0002] Micro fluid pumps have a wide range of application needs in the fields of medicine and biology, fine chemicals, aerospace, micro-electromechanical systems, etc. Nowadays, as the electronic products of application targets generally have a trend of miniaturization, this also requires micro fluid pumps to be more miniaturized while ensuring their output capacity (output pressure and output flow) or to improve their output capacity without enlarging.

[0003] At present, the main types of gas micro pumps are electromagnetic diaphragm pumps driven by motor cam mechanisms, piezoelectric diaphragm pumps driven by piezoelectric vibrators, and micro pumps using squeeze film effect. Piezoelectric pumps are diaphragm pumps that apply alternating voltage to piezoelectric elements to bend and deform the diaphragm, and the bent and deformed diaphragm has the advantages of simple structure, light weight, and low power consumption.

[0004] Among them, electromagnetic diaphragm pumps have problems such as complex structure, high cost and high noise in actual application; piezoelectric diaphragm pumps are equipped with one-way valves at the inlet and outlet. The reliability of the one-way valve will be reduced after long-term use, and foreign matter such as dust will adhere to the valve during use, making the piezoelectric pump unable to fully transport the fluid; foreign matter such as dust attached to the one-way valve will cause the driving frequency of the piezoelectric drive element to increase, and the one-way valve will not be able to work at high frequency due to the hysteresis effect, causing the piezoelectric pump to fail; the structure of the existing piezoelectric micropump using the squeeze film effect also has the problem of insufficient limit working pressure and the limitation of further improving its output capacity. Summary of the invention

[0005] The purpose of the present invention is to solve the problems existing in the prior art such as complex structure, high cost, high noise or low reliability, inability to fully transport fluid or insufficient pressure, low output capacity, etc., and to provide a small and high-output micro fluid pump.

[0006] To achieve the above object, the technical solution adopted by the present invention is: a fluid pump, comprising:

[0007] A piezoelectric vibrator, the piezoelectric vibrator comprising a vibration substrate and a piezoelectric element disposed on one side of the vibration substrate;

[0008] A vibration diaphragm, the vibration diaphragm is arranged on the other side of the vibration substrate, and a sink cavity is provided on a side of the vibration substrate close to the vibration diaphragm;

[0009] A plane portion, the plane portion is arranged close to and opposite to a side of the vibration diaphragm away from the vibration substrate, and at least one vent hole is provided in a region of the plane portion opposite to the sink cavity;

[0010] By applying an alternating voltage of a certain frequency to the piezoelectric element, the vibration substrate bends and deforms, causing the vibration diaphragm to bend and deform in the same direction as the vibration substrate, thereby causing the fluid pump to suck fluid from the vent hole and discharge it from the vent hole in a circumferential direction.

[0011] The portion of the plane portion corresponding to the sink cavity of the present invention is an elastic plate, and the portion of the plane portion located in the circumferential direction of the sink cavity is a rigid plate or is used as a fixed constraint.

[0012] The vibration diaphragm of the present invention is fixed to the vibration substrate, the portion of the vibration diaphragm opposite to the sink cavity can bend and vibrate, and the vibration diaphragm is located in the circumferential portion of the sink cavity for fixed constraint.

[0013] The piezoelectric element and the vibration substrate of the present invention are centrally arranged and bonded together to form a piezoelectric vibrator, and the piezoelectric vibrator can generate bending vibration from its central part to the peripheral part.

[0014] The piezoelectric element, the vibration substrate and the vibration diaphragm described in the present invention are square or circular.

[0015] The sinking cavity of the present invention is placed at the center of the vibration substrate, and the sinking cavity is circular. The fluid pump also includes a support plate and an upper cover plate, the support plate is arranged on the plane portion, and the two are sealed and connected, the upper cover plate is arranged on the support plate, and the upper cover plate and the support plate are also sealed and connected, thereby constructing a cavity, wherein a through hole is arranged at the center or other position of the upper cover plate, and the through hole is connected to the external atmosphere.

[0016] The vibration substrate of the present invention includes a middle vibration area, surrounding support parts, an elastic connection part and a first wire welding part. The fluid pump also includes an upper cover plate, a first support plate, a second support plate, a third support plate and an electrode sheet, wherein the third support plate is bonded to the plane part, the vibration diaphragm and the piezoelectric vibrator are bonded to the third support plate in sequence, and the three are placed in the center. The second support plate is bonded to the surrounding support parts of the vibration substrate. The second support plate is an insulating material and participates in the construction of the cavity. At the same time, the electrode sheet is insulated and separated from the vibration substrate. The upper cover plate, the first support plate and the electrode sheet are stacked and bonded to the surrounding support parts of the vibration substrate in sequence, thereby completing the construction of the cavity.

[0017] The lower part of the plane part of the present invention is provided with a bottom plate lining, and the plane part is an elastic and flexible structure, wherein a circular opening is provided at the center of the bottom plate lining so that the central part of the plane part can be exposed in the circular opening.

[0018] The present invention provides a second bottom plate lining at the lower part of the bottom plate lining, wherein at least one ventilation groove is engraved on the upper surface of the second bottom plate lining, so that the fluid first passes through the ventilation groove and then is sucked into the cavity through the ventilation hole.

[0019] The present invention also provides an exciting element, including a piezoelectric vibrator and a vibration diaphragm, the piezoelectric vibrator includes a vibration substrate and a piezoelectric element arranged on one side of the vibration substrate, the vibration diaphragm is arranged on the other side of the vibration substrate, and a sinking cavity is provided on the side of the vibration substrate close to the vibration diaphragm. By applying an alternating voltage of a certain frequency to the piezoelectric element, the vibration substrate is bent and deformed, and the vibration diaphragm bends in the same direction as the vibration substrate.

[0020] After adopting the above technical solution, a fluid pump provided by the present invention has the following beneficial effects:

[0021] The present invention increases the amplitude of the fluid pump during operation and reduces the loss during the operation, thereby enabling the fluid pump to obtain higher output pressure and output flow without increasing in size or even decreasing in size. A sink cavity is provided on the vibration substrate and a vibration diaphragm is used in combination to construct an exciting element, thereby reducing the requirements on the shape of the piezoelectric element and the vibration substrate, which may be circular or square. At the same time, the sink cavity resonance amplifies the deformation of the functional part of the vibration diaphragm, thereby increasing the output flow and output pressure of the pump. Furthermore, the planar portion is provided as an elastic structure, thereby further improving the output performance of the fluid pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of the excitation element of the first embodiment;

[0023] Figure 2 is a schematic structural diagram of the fluid pump of the first embodiment;

[0024] Figure 3 This is a schematic diagram of the suction state of the fluid pump of the first embodiment;

[0025] Figure 4 is a schematic diagram of the discharge state of the fluid pump of the first embodiment;

[0026] Figure 5 This is a schematic diagram of the structure of the fluid pump of the second embodiment;

[0027] Figure 6 is an exploded view of the fluid pump of the third embodiment;

[0028] Figure 7 is a schematic structural diagram of a fluid pump according to the third embodiment of the present invention;

[0029] Figure 8 is an exploded view of the fluid pump of the fourth embodiment;

[0030] Fig. 9 is a schematic structural diagram of a fluid pump according to the fourth embodiment of the present invention;

[0031] Fig.10 is an exploded view of the fluid pump of the fifth embodiment;

[0032] Fig.11 This is a schematic diagram of the structure of the fluid pump of the fifth embodiment.

[0033] Among them: piezoelectric element 1, piezoelectric vibrator 10, vibration substrate 2, first wire welding part 22, elastic connection part 23, sinking cavity 21, vibration diaphragm 3, flat part 4, ventilation hole 41, support plate 5, cavity 51, first support plate 50, electrode sheet 52, second support plate 53, third support plate 54, upper cover plate 6, through hole 61, bottom plate lining plate 7, circular opening 71, second bottom plate lining plate 8, ventilation groove 81. DETAILED DESCRIPTION

[0034] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Embodiment 1

[0037] like Figure 1 As shown, the fluid pump of this embodiment includes a piezoelectric vibrator 10, a vibration diaphragm 3 and a flat portion 4, wherein the piezoelectric vibrator 10 includes a vibration substrate 2 and a piezoelectric element 1 arranged on one side of the vibration substrate 2, the piezoelectric element 1 and the vibration substrate 2 are centrally arranged and bonded as a whole to form the piezoelectric vibrator 10, the piezoelectric vibrator 10 can undergo bending vibration from its center to the peripheral portion, the vibration substrate 2 is made of metal such as stainless steel, phosphor bronze, etc., electrode films covering substantially the entire surface are formed on the upper and lower surfaces of the piezoelectric element 1, respectively, the electrode on the lower surface is electrically conductive with the vibration substrate and forms a capacitive coupling, a conductor wire is connected to the electrode on the upper surface, the conductor wire and the vibration substrate are electrically connected to a driving circuit, thereby applying a rectangular wave or a sinusoidal wave driving voltage, so that the piezoelectric vibrator 10 undergoes bending vibration from its center to the peripheral portion.

[0038] like Figure 2 As shown in FIG. 1 , a flat surface portion 4 is disposed below the vibration substrate 2, and the piezoelectric vibrator 10 is placed on (in contact with) the flat surface portion 4. Since the state when no driving is shown here, Figure 2In the figure, although the piezoelectric vibrator 10 appears to be fixed on the plane portion, the periphery of the piezoelectric vibrator 10 is not constrained by the plane portion 4. When not driven, the piezoelectric vibrator 10 is merely arranged relatively to the plane portion 4 in a contact manner. In addition, the plane portion 4 is provided with at least one vent hole 41. Furthermore, the vent hole 41 is provided at or near the center of the plane portion 4 that is opposite to the piezoelectric vibrator 10. Although the piezoelectric vibrator 10 and the plane portion 4 are placed in contact when not driven, the periphery of the piezoelectric vibrator 10 is not constrained by the plane portion 4.

[0039] In order to increase the amplitude to increase the output pressure and output flow, the present embodiment provides a new type of exciting element, that is, a sinking cavity 21 is added to the vibration substrate 2, and a vibration diaphragm 3 is attached, the piezoelectric element 1, the vibration substrate 2 and the vibration diaphragm 3 are bonded in sequence, and the centers of the three are aligned to form an exciting element. Specifically, the vibration diaphragm 3 is arranged on the other side of the vibration substrate 2, and a sinking cavity 21 with a certain diameter and depth is arranged on the side of the vibration substrate 2 close to the vibration diaphragm 3, and at least one vent hole 41 is arranged in the area opposite to the sinking cavity 21 of the plane portion 4. By applying an alternating voltage of a certain frequency to the piezoelectric element 1, the vibration substrate 2 is bent and deformed, so that the vibration diaphragm 3 resonates and bends and deforms in the same direction as the vibration substrate 2, sucking fluid from the vent hole 41 and discharging it from the circumferential direction of the vent hole 41. In this way, no unnecessary gap is generated between the vibration diaphragm 3 and the plane portion 4, thereby improving the efficiency of fluid transportation. In addition, due to the design of the sinking cavity 21, the resonance of the sinking cavity 21 amplifies the deformation of the functional part of the vibration diaphragm 3, thereby improving the output flow rate and output pressure of the pump.

[0040] Furthermore, the vibration diaphragm 3 is fixed to the vibration substrate 2, and the vibration diaphragm 3 can bend and vibrate at least in the portion opposite to the sink cavity 21. The vibration diaphragm 3 is fixedly constrained in the circumferential portion of the sink cavity 21, and can be fixedly constrained by bonding.

[0041] Furthermore, the portion of the planar portion 4 corresponding to the sinking cavity 21 can be designed as an elastic plate, and the circumferential portion of the planar portion 4 located in the sinking cavity 21 is a rigid plate or a fixed constraint. This structure can further increase the overall resonance of the pump, thereby increasing the output pressure and output flow. It should be noted that the planar portion 4 of this embodiment can also be rigid and will not resonate with the vibration of the exciting element.

[0042] The shapes of the piezoelectric element 1 , the vibration substrate 2 and the vibration diaphragm 3 include, but are not limited to, square and circle, and are not limited thereto.

[0043] The sinker cavity 21 is placed at the center of the vibration substrate 2. Preferably, the sinker cavity 21 is circular, so that the film part in the center of the vibration diaphragm 3 corresponding to the sinker cavity 21 is in rotational symmetry. Therefore, no unnecessary gap is generated between the vibration diaphragm 3 and the flat part 4, thereby improving its efficiency in pumping fluid.

[0044] Figure 3 , Figure 4 The working principle of the fluid pump of this embodiment is shown. At a suitable working frequency, the piezoelectric vibrator 10 and the vibration diaphragm 3 reach a certain resonance state. The figure is a schematic diagram of the working state of the excitation element in the first-order vibration state.

[0045] By applying an alternating voltage to the piezoelectric vibrator 10, the piezoelectric vibrator 10 can be bent and deformed into a convex and concave shape. At the same time, the vibration diaphragm 3 will also deform into a convex and concave shape along with the piezoelectric vibrator 10, and has the effect of amplifying the deformation. Figure 3 As shown, it is a fluid suction state, the piezoelectric vibrator 10 bends upward to form a convex shape, and the vibration diaphragm 3 also reaches a convex state, which will cause the gap between the periphery of the exciting element and the plane part 4 to be smaller than the gap between its center and the plane part 4. In this way, the pressure in the center of the exciting element will be reduced (in a negative pressure state), and the pressure in the periphery will increase, so that the fluid will flow into the above space from the vent 41 on the plane part 4, and the fluid will also flow in through the gap between the periphery of the exciting element and the plane part 4, but because the gap is very small and the flow resistance is large, the amount of fluid that can flow in is small, and the amount is very small compared to the fluid flowing in through the center vent 41, so it can be considered that the amount of fluid flowing in through the center vent 41 is the set amount.

[0046] Then, if Figure 4 As shown, the fluid is squeezed out, the piezoelectric vibrator 10 is bent downward to form a concave shape, and the vibration diaphragm 3 is also in a concave state, which will cause the gap between the central part of the exciting element and the plane part 4 to be smaller than the gap between its periphery and the plane part 4. This will increase the pressure in the central part of the exciting element, while reducing the pressure in the periphery, so that the fluid sucked into the cavity between the exciting element and the plane part 4 will flow toward the periphery, and the fluid will also flow out through the central vent 41 on the plane part 4. However, since the gap between the central part of the exciting element and the plane part 4 is very small, the flow resistance is large, and the amount of fluid that can flow out is small, and the amount of fluid that flows out is very small compared to the fluid that flows out through the periphery.

[0047] Through the control of alternating current, the above-mentioned suction and discharge process is repeated to achieve the purpose of continuously sucking in fluid from the vent 41 and discharging fluid from the peripheral direction, thereby continuously transporting the fluid. Moreover, since there are no constraints around the exciting element and the exciting element is constructed to amplify the vibration of the vibration diaphragm 3 area corresponding to the cavity 21, the exciting element can obtain a larger and sufficient amplitude during the vibration process.

[0048] The pressure in the center and the periphery of the excitation element changes with the bending vibration of the piezoelectric vibrator 10. Generally speaking, negative pressure is generated in the center of the excitation element, and positive pressure is generated in the periphery to balance the negative pressure. Therefore, during the entire movement of the excitation element, the excitation element and the flat portion 4 are maintained in a non-contact state, and the pressure in the center and the pressure in the periphery change with the change of the load pressure.

[0049] The higher the pump load, the lower the average height of the excitation element relative to the plane portion 4, and the corresponding flow rate will decrease. On the contrary, the lower the pump load, the higher the average height of the excitation element relative to the plane portion 4, and the corresponding flow rate is larger. Even if the pump is operated under a larger load pressure, the gap between the excitation element and the plane portion 4 is reduced, causing the vibration diaphragm 3 to contact the plane portion 4, which will not hinder the pump operation.

[0050] Embodiment 2

[0051] like Figure 5 As shown, the fluid pump of this embodiment is basically the same as that of the first embodiment, except that the fluid pump further includes a support plate 5 and an upper cover plate 6, the support plate 5 is arranged on the plane portion 4, and the two are sealed and connected, the upper cover plate 6 is arranged on the support plate 5, and similarly the upper cover plate 6 and the support plate 5 are also sealed and connected, thereby constructing a cavity 51, wherein a through hole 61 is arranged at the center or other position of the upper cover plate 6, which is connected to the external atmosphere through the through hole 61.

[0052] When not driven, the excitation element is relatively arranged on the plane portion 4 in a contact manner. When driven by a power source, according to the principle described in the first embodiment, the fluid is sucked through the central vent hole 41, and then the sucked fluid is discharged through the through hole 61. Therefore, the fluid pump can realize the suction and discharge functions.

[0053] Embodiment 3

[0054] like Figure 6 and Figure 7 The exploded view and cross-sectional view of the structure of the fluid pump of the third embodiment are shown respectively. This embodiment is basically the same as the first embodiment, except that the structure of the vibration substrate 2 is improved. Figure 6It can be seen that the vibration substrate 2 includes a middle vibration area, surrounding supporting parts, an elastic connection part 23 and a first wire welding part 22. Among them, the elastic connection part 23 is set as an elastic structure with a small elastic coefficient, so that the middle vibration area is softly supported on the surrounding supporting parts, so it can be considered that the elastic support will not hinder the bending vibration of the middle vibration area, that is, the vibration area is substantially in an unconstrained state.

[0055] In addition, the fluid pump of this embodiment further includes an upper cover plate 6, a first support plate 50, a second support plate 53, a third support plate 54 and an electrode sheet 52, wherein the third support plate 54 is bonded to the plane portion 4, and the excitation element is bonded to the third support plate 54, and the three are placed in the center. The thickness of the third support plate 54 is slightly larger than the thickness of the vibration diaphragm 3, and the gap between the vibration diaphragm 3 and the plane portion 4 can be increased to increase the flow rate. In addition, when the fluid pump is working under a high load environment, the gap between the excitation element and the plane portion 4 will decrease, and even a collision may occur. By adding the third support plate 54, the above situation can be improved, and the flow rate under high load conditions can be increased.

[0056] Then, the second support plate 53 is bonded to the surrounding support parts of the vibration substrate 2. The thickness of the second support plate 53 is slightly thicker than that of the piezoelectric element 1. The second support plate 53 is an insulating material and participates in constructing the cavity 51 while insulating and separating the electrode sheet 52 from the vibration substrate 2.

[0057] Then, the upper cover plate 6, the first support plate 50 and the electrode sheet 52 are stacked and bonded to the surrounding support parts of the second support plate 53 in sequence, thereby completing the construction of the cavity 51. Then, the fluid pump can achieve the suction of fluid through the vent hole 41 and discharge of fluid through the through hole 61 under the drive of the power supply.

[0058] In addition, the electrode sheet 52 is provided with a second wire welding portion 521 and a third wire welding portion 522 , wherein the third wire welding portion 522 is connected to the upper surface of the piezoelectric element 1 by soldering.

[0059] Embodiment 4

[0060] Figure 8 and Fig. 9They are respectively the structural explosion diagram and the cross-sectional diagram of the fluid pump of the fourth embodiment. This embodiment is basically the same as the third embodiment, except that a bottom plate lining plate 7 is provided at the lower part of the plane part 4, and the plane part 4 is changed from a rigid structure to an elastic flexible structure. Among them, a circular opening 71 is provided at the center of the bottom plate lining plate 7, so that the central part of the plane part 4 can be exposed in the circular opening 71. By applying a driving voltage of a suitable frequency to the piezoelectric vibrator 10, the vibration diaphragm 3 and the plane part 4 can reach a certain resonance state, and the vibration phase of the plane part 4 is 180 degrees different from the vibration diaphragm 3, which can further increase the amplitude, thereby further improving the output performance of the fluid pump.

[0061] In this way, by applying an external driving voltage to drive the piezoelectric vibrator 10 , the fluid pump can be caused to draw the fluid from the bottom vent holes 41 and discharge the fluid from the top through holes 61 .

[0062] Embodiment 5

[0063] Fig.10 and Fig.11 They are respectively an exploded view and a cross-sectional view of the structure of the fluid pump of the fifth embodiment. The difference between the fluid pump of the fifth embodiment and the fluid pump of the fourth embodiment is that a second bottom plate liner 8 is provided at the lower part of the bottom plate liner 7. Among them, at least one ventilation groove 81 is engraved on the upper surface of the second bottom plate liner 8, so that the fluid first passes through the ventilation groove 81 and then is sucked into the cavity 51 through the ventilation hole 41. In order to further improve the inflow characteristics, three or more ventilation grooves 81 can be symmetrically arranged on the second bottom plate liner 8.

[0064] In addition, two or more such fluid pumps may be connected in series or in parallel to improve the overall output performance.

[0065] A fluid pump provided by the present invention increases the amplitude of the fluid pump during operation and reduces the loss during the operation, thereby enabling the fluid pump to obtain higher output pressure and output flow without being enlarged or even being miniaturized; a sinking cavity is set on a vibration substrate and a vibration diaphragm is used to construct an exciting element, thereby reducing the requirements on the shape of the piezoelectric element and the vibration substrate, and at the same time, the sinking cavity resonance amplifies the deformation of the functional part of the vibration diaphragm, thereby increasing the output flow and output pressure of the pump; further, the planar portion is set as an elastic structure, which can further improve the output performance of the fluid pump, has great market value, and is worthy of promotion.

[0066] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A fluid pump, characterized in that: include: A piezoelectric vibrator (10), the piezoelectric vibrator (10) comprising a vibration substrate (2) and a piezoelectric element (1) arranged on one side of the vibration substrate (2); A vibration diaphragm (3), the vibration diaphragm (3) being fixed to the other side of the vibration substrate (2), a sinking cavity (21) being provided on a side of the vibration substrate (2) close to the vibration diaphragm (3), a portion of the vibration diaphragm (3) opposite to the sinking cavity (21) being capable of bending vibration, a circumferential portion of the vibration diaphragm (3) being located in the sinking cavity (21) being fixedly constrained, and resonance of the sinking cavity (21) amplifying the deformation amount of a functional portion of the vibration diaphragm (3); A plane portion (4), the plane portion (4) being arranged on a side of the vibration diaphragm (3) away from the vibration substrate (2) in a manner close to and opposite to each other, and at least one vent hole (41) being provided in a region of the plane portion (4) opposite to the sink cavity; By applying an alternating voltage of a certain frequency to the piezoelectric element (1), the vibration substrate (2) bends and deforms, causing the vibration diaphragm (3) to resonate and bend and deform in the same direction as the vibration substrate (2), sucking fluid from the vent hole (41) and discharging it from the circumferential direction of the vent hole (41).

2. A fluid pump according to claim 1, characterized in that: The portion of the plane portion (4) corresponding to the sink cavity (21) is an elastic plate, and the portion of the plane portion (4) located in the circumferential direction of the sink cavity (21) is a rigid plate or is used as a fixed constraint.

3. A fluid pump according to claim 1, characterized in that: The piezoelectric element (1) and the vibration substrate (2) are centrally arranged and bonded together to form a piezoelectric vibrator (10). The piezoelectric vibrator (10) can generate bending vibration from its central part to its peripheral part.

4. A fluid pump according to claim 1, characterized in that: The sink cavity (21) is placed at the center of the vibration substrate (2), and the sink cavity (21) is circular.

5. A fluid pump according to claim 1, characterized in that: The fluid pump further comprises a support plate (5) and an upper cover plate (6), wherein the support plate (5) is arranged on the plane portion (4), and the two are sealedly connected, and the upper cover plate (6) is arranged on the support plate (5), and similarly, the upper cover plate (6) and the support plate (5) are also sealedly connected, thereby constructing a cavity (51), wherein a through hole (61) is arranged at the center or other position of the upper cover plate (6), and the through hole (61) is connected to the external atmosphere.

6. A fluid pump according to claim 1, characterized in that: The vibration substrate (2) comprises a middle vibration area, surrounding support parts, an elastic connection part (23) and a first wire welding part (22); the fluid pump also comprises an upper cover plate (6), a first support plate (50), a second support plate (53), a third support plate (54) and an electrode sheet (52); wherein the third support plate (54) is bonded to the plane part (4); the vibration diaphragm and the piezoelectric vibrator are bonded to the third support plate (54) in sequence, and the three are placed in the center; the second support plate (53) is bonded to the surrounding support parts of the vibration substrate (2); the second support plate (53) is an insulating material, participates in constructing the cavity (51), and simultaneously insulates and separates the electrode sheet (52) from the vibration substrate (2); the upper cover plate (6), the first support plate (50) and the electrode sheet (52) are stacked and bonded to the surrounding support parts of the vibration substrate (2) in sequence, thereby completing the construction of the cavity (51).

7. A fluid pump according to claim 5 or 6, characterized in that: A bottom plate lining (7) is provided at the lower part of the plane part (4); the plane part (4) is an elastic and flexible structure, wherein a circular opening (71) is provided at the center of the bottom plate lining (7), so that the center part of the plane part (4) can be exposed in the circular opening (71).

8. A fluid pump according to claim 7, characterized in that: A second bottom plate lining (8) is provided at the bottom of the bottom plate lining (7), wherein at least one ventilation groove (81) is engraved on the upper surface of the second bottom plate lining (8), so that the fluid first passes through the ventilation groove (81) and then is sucked into the cavity (51) through the ventilation hole (41).

9. An exciting element, characterized in that: The invention comprises a piezoelectric vibrator (10) and a vibration diaphragm (3), wherein the piezoelectric vibrator (10) comprises a vibration substrate (2) and a piezoelectric element (1) arranged on one side of the vibration substrate (2), the vibration diaphragm (3) is arranged on the other side of the vibration substrate (2), a sinking cavity (21) is provided on the side of the vibration substrate (2) close to the vibration diaphragm (3), the portion of the vibration diaphragm (3) opposite to the sinking cavity (21) is capable of bending and vibrating, the vibration diaphragm (3) is fixedly constrained in the circumferential portion of the sinking cavity (21), the sinking cavity (21) resonates and amplifies the deformation amount of the functional part of the vibration diaphragm (3), and by applying an alternating voltage of a certain frequency to the piezoelectric element (1), the vibration substrate (2) is bent and deformed, and the vibration diaphragm (3) bends in the same direction as the vibration substrate (2).

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