Large-area single-element two-dimension material preparing equipment and preparing method

A two-dimensional material, single-element technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of uneven thickness change with holding time, uneven distribution, small material size, etc. Achieve the effect of shortening preparation and reaction time, reducing production cost and improving production efficiency

CN110004414APending Publication Date: 2019-07-12HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2019-07-12

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Abstract

The invention provides large-area single-element two-dimension material preparing equipment and a preparing method. The equipment comprises an atmosphere adjusting device, a low-temperature cooling device, an air pipe, a vacuum adjusting device, a circulation water device and an evaporation deposition device. Through the design of the equipment, the material preparing preparation and reaction timecan be obviously shortened, the production cost is reduced, and the production efficiency is improved. Limited from the equipment size, limitation of the provided method is avoided, large-area single-element two-dimension tellurium film materials can be prepared on a four-inch silicon wafer, a two-dimension single-element film can be prepared on a substrate not covered with photoresist, and the size, the thickness and the position can be controlled.
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Description

technical field

[0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a large-area single-element two-dimensional material preparation equipment and a preparation method. Background technique

[0002] Two-dimensional material is a kind of layered nanomaterial, the atoms in the layer are connected by covalent bonds, which has strong force, but there is no dangling bond between layers, and the force is weak van der Waals force. Materials with nanoscale dimensions in the thickness direction generally have a thickness of a fraction of a nanometer to tens of nanometers, and a horizontal dimension of nanometers, microns, centimeters or even meters. Due to the nanoscale scale in the thickness direction, two-dimensional materials have been greatly developed and researched in the past ten years, and many excellent physical and chemical properties have been discovered, such as the quantum size effect and quantum confinement effec...

Examples

Embodiment Construction

[0030] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] combine figure 1 , the present invention proposes a large-area single-element two-dimensional material preparation equipment, including an atmosphere adjusting device 1, a low-temperature cooling device 2, a gas pipe, a vacuum regulating device, a circulating water device, and an evaporation deposition device; the gas pipe includes a spiral copper tube 3 -1. The first joint 3-2 and the stainless steel pipe 3-3; one end of the spiral copper pipe 3-1 is con...