A device and method for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets

Abstract

The application discloses a device for preparing micro-nano electrodes by manipulating micro liquid drops based on C-cut lithium niobate wafer light, which comprises a laser (1), a half-transmission half-reflection mirror (2), an objective lens (3), a lithium niobate wafer (4), a receiving plate (5), an objective lens (6), a half-transmission half-reflection mirror (7), a filter (8), a CCD camera (9), a shutter (10) and a background light source (11). The lithium niobate wafer (4) and the receiving plate (5) form an up-down parallel structure as a core device for manipulating micro liquid drops, wherein the lithium niobate wafer is a space charge field generator and a container for the liquid to be manipulated, and the receiving plate is a substrate for receiving micro liquid drops and forming a micro liquid drop pattern. The material of the receiving plate can be selected according to actual needs, and the receiving plate can be made of any material. There is no strict distance limit between the receiving plate and the lithium niobate wafer, and the micro liquid drop can be transferred in a large distance range. The application utilizes the photovoltaic manipulation technology of lithium niobate to realize real-time manipulation of micro liquid drops and preparation of micro-nano electrodes, and has a wide application prospect in detection of single molecules and single nano particles, clinical and environmental monitoring and directional control of different products.

Description

TECHNICAL FIELD

[0001] The application relates to a photovoltaic manipulation technology, in particular to a device and method for preparing micro-nano electrodes by manipulating micro liquid drops based on a C-cut lithium niobate wafer. BACKGROUND

[0002] With the continuous development of electrode preparation technology, users have higher and higher requirements for the precision and size of electrodes; ordinary electrode preparation technologies include electroplating, evaporation, chemical deposition and the like, which are suitable for preparing electrodes in a large area and have been well applied in the macro field; however, with the development of miniaturization and compactness of photoelectric devices, the preparation precision of electrodes is required to be higher and higher, and the size of electrodes is required to be smaller and smaller. Micro-nano electrodes are favored as necessary products of high technology in the new era. The application of micro-nano electrodes can break through the bottleneck of the electronic transmission rate of conventional electrodes, and has a wide application prospect in the detection of single molecules and single nanoparticles, clinical treatment, environmental monitoring and directional control of different products.

[0003] The patent adopts lithium niobate photovoltaic manipulation technology to manipulate sol liquid on a lithium niobate substrate, and micro-nano electrodes are prepared by sintering the obtained patterned micro liquid drops. The lithium niobate photovoltaic manipulation technology is used in micro liquid drop manipulation due to its convenience and high resolution, and through the lithium niobate photovoltaic manipulation technology, real-time manipulation of micro liquid drops can be realized, which has important significance in the preparation of nanomaterials.

[0004] The lithium niobate photovoltaic manipulation technology can manipulate various types of liquid. Most of the current spraying devices must work under the action of an external voltage, while the lithium niobate photovoltaic manipulation technology uses the characteristic that the lithium niobate crystal is a photorefractive crystal to manipulate liquid by the local space charge field generated under light excitation, realizes the distribution and movement of liquid. Meanwhile, the use of lithium niobate crystals to manipulate liquid can reduce the cost to a certain extent, improve the efficiency, and reduce the probability of substrate pollution. The liquid prepared by the sol-gel method becomes the precursor we choose because it can conduct electricity after sintering. The patent realizes the transfer of sol liquid between the lithium niobate substrate and the receiving plate and the three-dimensional space manipulation, that is, the patterned sol liquid drop after spraying can be printed, and the micro-nano electrodes can be prepared by sintering the patterned sol liquid drop. SUMMARY

[0005] The application provides a device and method for preparing micro-nano electrodes by manipulating micro liquid drops based on lithium niobate photovoltaic manipulation, which can realize the real-time observation of the whole device by programming the moving path and moving speed of the three-axis combined moving platform to spray the micro sol liquid drop to any specified position on the two-dimensional plane of the receiving plate.

[0006] The application relates to a device for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that the microdroplet manipulation light path is formed in the order of a laser 1, a shutter 10, a half-transmission half-reflection mirror 2, an objective lens 3, a lithium niobate wafer 4 and a receiving plate 5; the real-time observation light path is formed in the order of a background light source 11, the half-transmission half-reflection mirror 2, the objective lens 3, the lithium niobate wafer 4, the receiving plate 5, an objective lens 6, a half-transmission half-reflection mirror 7, a filter 8 and a CCD camera 9; and the above two partially overlapped light paths realize the simultaneous transfer and real-time observation of sol microdroplets.

[0007] The application relates to a method for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that antimony-doped tin oxide sol is placed on the lithium niobate, a small amount of sol droplets is separated from the droplets to be manipulated under the irradiation of laser and is transferred to the upper receiving plate, and the transfer of the sol liquid is realized.

[0008] The application relates to a method for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that the receiving plate can be selected according to actual needs and can be made of any material.

[0009] The application relates to a method for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that there is no strict distance limit between the receiving plate and the lithium niobate wafer, and the microdroplet transfer can be realized within a large distance range.

[0010] The application relates to a method for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that the obtained sol pattern is sintered, the antimony-doped tin oxide sol has good conductivity after sintering, and thus the excellent preparation of the micro-nano electrodes is realized.

[0011] Compared with the traditional micro-nano electrode manufacturing technology, the application has the advantages that the micro-nano electrodes can be well manufactured without complex circuits and complex chemicals, the pollution of other chemical reagents is avoided, the lithium niobate-based light manipulation technology is applied to manipulate the droplets to obtain the patterned microdroplets, the preparation process of the tin oxide sol is non-toxic and non-polluting, and the sintered tin oxide sol has good conductivity. Therefore, the method for preparing the micro-nano electrodes has the advantages of strong manipulability, low cost, high precision and high efficiency, and will have important influence on the preparation of the patterned micro-nano electrodes in the future. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a whole structure schematic diagram of the device for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets.

[0013] Figure 2 It is a spraying process diagram of the device for preparing micro-nano electrodes based on lithium niobate light manipulation microdroplets.

[0014] Figure 3The injection process diagram for the device embodiment (Example 2) of the present application for preparing micro-nano electrodes based on the optical manipulation of microdroplets by lithium niobate

[0015] Figure 4 The electrode diagram for the device embodiment (Example 3) of the present application for preparing micro-nano electrodes based on the optical manipulation of microdroplets by lithium niobate DETAILED DESCRIPTION

[0016] The present application will be further described below in conjunction with examples and drawings.

[0017] The present application discloses a device for preparing micro-nano electrodes based on the optical manipulation of microdroplets by C-cut lithium niobate wafer, which comprises a laser 1, a half-transmission half-reflection mirror 2, an objective lens 3, a lithium niobate wafer 4, a receiving plate 5, an objective lens 6, a half-transmission half-reflection mirror 7, a filter 8, a CCD camera 9, a shutter 10, and a background light source 11. The device forms a manipulation light path in the order of the laser 1, the shutter 10, the half-transmission half-reflection mirror 2, the objective lens 3, the lithium niobate wafer 4, and the receiving plate 5, and forms a real-time observation light path in the order of the background light source 11, the half-transmission half-reflection mirror 2, the objective lens 3, the lithium niobate wafer 4, the receiving plate 5, the objective lens 6, the half-transmission half-reflection mirror 7, the filter 8, and the CCD camera 9. The upper and lower parallel structure formed by the lithium niobate wafer and the receiving plate serves as the core device for manipulating microdroplets, wherein the lithium niobate wafer acts as a spatial charge field generator and a container for the liquid to be manipulated, and the receiving plate acts as a substrate for receiving microdroplets and forming a microdroplet pattern. The lithium niobate wafer and the receiving plate are respectively fixed on two three-axis combined moving platforms to realize the three-dimensional movement of both.

[0018] The present application discloses a method for preparing micro-nano electrodes based on the optical manipulation of microdroplets by C-cut lithium niobate wafer, which comprises the following steps:

[0019] First step: preparing antimony-doped tin oxide sol.

[0020] First, weigh 2.256g of SnCl2·2H2O on an electronic balance, dissolve it in 50ml of anhydrous ethanol, and reflux the mixture at 78℃ for 5 hours. Then, add 0.2282g of SbCl3 to the above mixture and reflux at 78℃ for 3 hours. After the reflux is completed, pour the liquid into a beaker and evaporate it in air to 20ml. Finally, place it in a 30℃ constant-temperature water bath and let it stand for 12 hours to form the antimony-doped tin oxide sol.

[0021] Second step: use a pipette to move the antimony-doped tin oxide sol onto the C-cut lithium niobate wafer, with the pipette volume being 0.4-1.5ul per experiment. Place the lithium niobate wafer containing the manipulation liquid on a three-axis combined moving platform, and adjust the three-axis combined moving platform so that the liquid is located at the central axis of the objective lens.

[0022] Third step, open the laser, focus the laser on the lithium niobate wafer, and wait for the sol to be sprayed on the laser focus position. The laser power used for focusing is preferably 4-5 mW. After focusing, turn off the laser. Adjust the distance between the objective lens above the receiving plate and the receiving plate until the surface of the wafer can be clearly seen in the CCD camera.

[0023] Fourth step, open the laser, adjust the laser power to 8-10 mW, and observe the surface of the receiving plate in the camera. After a few seconds, a small amount of sol droplets can be seen transferring from the lithium niobate to the receiving plate.

[0024] Fifth step, adjust the movement of the receiving plate in the direction parallel to the lithium niobate wafer by the three-axis combined moving platform connected to the receiving plate. The control of the three-axis combined moving platform is achieved by inputting specific programs. According to the required micro-droplet pattern, the movement path of the receiving plate is designed, and different programs are compiled to obtain any pattern of micro-droplets.

[0025] Sixth step, sinter the receiving plate substrate containing the micro-droplet pattern to obtain a solid-state micro-nano electrode.

[0026] The laser 1 requires that the laser emitted to the lithium niobate wafer can effectively form a photovoltaic field, and the field strength should be as large as possible, so the wavelength of the laser should be between 350-550 nm, and the power should be between 2-250 mW. The background light source can use a xenon lamp, a halogen lamp or a high-power white LED lamp. The magnification of the focusing objective lens is 8-50 times.

[0027] Considering the cost of the element and the spraying effect of the sol, the preferred range of each parameter is: the wavelength of the laser 1 is between 400-550 nm, the power is between 8-10 mW, the background light source is a halogen lamp, the magnification of the focusing objective lens is between 10-25 times, and the magnification of the imaging objective lens is between 10-25 times. All optical elements and electronic devices on the device are fixed to the rigid connecting frame 12, which ensures the correct propagation of light and measurement accuracy.

[0028] The working principle of the scheme is: the C-cut lithium niobate wafer has an abnormal photovoltaic effect (a kind of weak light nonlinear optical effect). When a milliwatt-level laser is focused and irradiated on the lithium niobate wafer, a space charge field will be excited on the surface of the lithium niobate wafer. This space charge field will polarize the sol droplets on the lithium niobate wafer, causing a small amount of sol droplets to separate from the droplets to be manipulated. Since a receiving plate is placed at a proper distance above the lithium niobate wafer, a small amount of sol droplets will be transferred from the lithium niobate wafer to the receiving plate above, thereby achieving the transfer of the sol droplets. In addition, the sol used in this project is an antimony-doped tin oxide sol, which is a hot material for preparing transparent conductive thin films. Therefore, it has high feasibility as a raw material for preparing micro-nano electrodes.

[0029] The following gives an example of the present application using a lithium niobate-based optical manipulation to prepare a microdroplet pattern and a micro-nano electrode, and the specific embodiments are only used to illustrate the present application in detail and do not limit the scope of the claims.

[0030] Example 1

[0031] A 405nm laser with a laser power of 8mW and a halogen lamp as a background light source were used, the program running speed of the three-axis moving platform was 30μm / min, the movement path of the receiving plate was set as L-shaped, and the receiving plate material was a quartz wafer. After the settings were completed, the laser was turned on, and the surface of the receiving plate was observed in the CCD camera. When the first droplet was sprayed onto the receiving plate, the program was immediately started, and after the program was completed, an L-shaped microdroplet pattern with droplets dispersed in tens of microns was obtained.

[0032] Example 2

[0033] A 405nm laser with a laser power of 8mW and a halogen lamp as a background light source were used, the program running speed of the three-axis moving platform was 20μm / min, the movement path of the receiving plate was set as linear, and the receiving plate material was organic glass. After the settings were completed, the laser was turned on, and the surface of the receiving plate was observed in the CCD camera. When the first droplet was sprayed onto the receiving plate, the program was immediately started, and after the program was completed, a linear microdroplet pattern with droplets dispersed in several microns was obtained.

[0034] Example 3

[0035] The microdroplet pattern with a size of several microns obtained was sintered at 500℃, and a micro-nano electrode with good electrical conductivity was obtained.

[0036] The above specific examples further illustrate the technical solutions and implementation methods of the present application, and it should be understood that the above examples are not only used for the present application, and any equivalent modifications, equivalent replacements, improvements, etc. within the spirit and principles of the present application should be within the protection scope of the present application.

Claims

1. A device for fabricating micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that: The micro-droplet control light path is formed in the order of a laser (1), a shutter (10), a half-transmission half-reflection mirror (2), an objective lens (3), a lithium niobate wafer (4), and a receiving plate (5), and the real-time observation light path is formed in the order of a background light source (11), the half-transmission half-reflection mirror (2), the objective lens (3), the lithium niobate wafer (4), the receiving plate (5), an objective lens (6), a half-transmission half-reflection mirror (7), a filter (8), and a CCD camera (9), the transfer of the antimony-doped tin oxide sol micro-droplet and the real-time observation are simultaneously performed through the two partially overlapped light paths, the movement of the receiving plate in the direction parallel to the lithium niobate wafer is adjusted through a three-axis combined movement platform connected with the receiving plate, the movement path of the receiving plate is designed according to the micro-droplet pattern, and any pattern of the micro-droplet is obtained.

2. A method for fabricating micro-nano electrodes based on lithium niobate light manipulation microdroplets, characterized in that: The antimony-doped tin oxide sol is placed on the lithium niobate, a small amount of sol droplet is separated from the droplet to be controlled in the form of spraying under the irradiation of the laser, the movement of the receiving plate in the direction parallel to the lithium niobate wafer is adjusted through a three-axis combined movement platform connected with the receiving plate, the movement path of the receiving plate is designed according to the micro-droplet pattern, and any pattern of the micro-droplet is obtained, and then the pattern micro-nano electrode is formed through subsequent sintering.

3. The method of claim 2, wherein the method is characterized by: The receiving plate can be selected according to actual needs, and the receiving plate can be any material.

4. The method of claim 2, wherein the method is characterized by: There is no strict distance limit between the receiving plate and the lithium niobate wafer, and the transfer of the micro-droplet can be realized in a larger distance range.

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