Spring-button box opening device and spring-button box opening method

Abstract

The present invention relates to a snap-on box opening device and a snap-on box opening method, which are used to open a box body. The box body includes a first shell cover and a second shell cover which are relatively pivotally arranged with side edges and can be relatively covered. The first and second shell covers are selectively fastened by at least one snap-on portion different from the pivotally connected side edges. Each of the snap-on portions includes a snap-on piece and a relative buckle edge respectively formed on the first and second shell covers. The device includes a lower fixing mechanism, an upper cover-lifting device and a pull-on device. The lower fixing mechanism is used to fix the first shell cover of the box body, and the upper cover-lifting device is used to grab the second shell cover of the box body. The pull-on device is used to release the snap-on piece and the buckle edge of the snap-on portion of the box body, so that the upper cover-lifting device can lift up the second shell cover, so that the snap-on box body can also be automatically opened, thereby greatly improving practicality.

Description

Technical Field

[0001] The present invention relates to a box opening technology, and in particular to a snap-on box opening device and a snap-on box opening method, which can effectively open the box and lift the cover of the snap-on box, and enable the device to perform automated operations to improve production efficiency. Background Art

[0002] In recent years, the wire diameter of integrated circuits in semiconductor manufacturing processes has become increasingly thinner, and has now developed to less than 10 nanometers. Therefore, any contaminants in the manufacturing process may directly affect the yield of the relative manufacturing process or product. However, in the entire semiconductor manufacturing process, whether in the process of manufacturing, transfer, storage or transportation, there are many harmful substances such as particles, water vapor, gas, chemical solvent molecules, etc. These harmful substances will adhere to the surface of chips, masks or various manufacturing process equipment and devices, which will cause the chip yield to decrease, and increase the time for cleaning and improvement, resulting in a decrease in production volume, and relatively increase the cost of operation. Therefore, in order to solve this problem, in the semiconductor manufacturing process, the automated material handling system "Automated Material Handling System, AMHS" and the isolation in and out standard mechanical interface "Standard Mechanical Interface, SMIF" equipment are used to maintain and transport chips / masks when they are not in use. It can not only replace traditional manual handling and reduce the construction and maintenance costs of clean room equipment, but also improve the cleanliness of the mask and achieve ultra-high production yields. Therefore, in recent years, AMHS and SMIF have been listed as standard equipment specifications for international semiconductor factories.

[0003] In the semiconductor manufacturing process, the mask used to form integrated circuits on the surface of the chip (wafer) is an indispensable component in the lithography process. The mask includes a substrate, a frame and a protective film "Pellicle". When there are contaminants on the surface of the substrate or the protective film, the image of the contaminant may be imaged on the chip, and it may also cause distortion when the lithography exposure pattern is exposed, affecting the production efficiency of the manufacturing process and increasing costs.

[0004] According to the above technical concept, except when the mask is used for exposure, the chip or mask must be placed in a high-cleanliness carrier during the transportation process or storage, such as the mask transport box "Reticle SMIFPod, RSP" for automation, the mask transfer box for shipment or storage, or the mask placement box. Among them, the mask placement box mainly used for general storage and transportation is a snap-on box, such as Figure 1As shown, the box body (100) is mainly composed of a first shell cover (110) and a second shell cover (120), wherein the first and second shell covers (120) are relatively pivoted at any side, so that the first and second shell covers (120) can be selectively closed or opened along the pivot axis, and the first and second shell covers (120) are formed with at least one snap-fastening portion (150) on the side different from the pivot side, each of the snap-fastening portions (150) includes a snap-fastening piece (151) formed on the first shell cover (110) and a snap-fastening edge (152) formed at a relative position of the second shell cover (120), so that the first and second shell covers (110, 120) can be closed (such as by using the snap-fastening piece (151) of the snap-fastening portion (150) to reset the snap-fastening edge (152) to hook and snap-fasten. Figure 1 As shown in part A of the figure), or the first and second shell covers (110, 120) are opened relative to each other by using the snap-on piece (151) of the snap-on portion (150) to open the release snap edge (152);

[0005] Since the snap-on box body (100) of the mask placement box is relatively simple in structure, there are no effective fixing and clamping positions on the first and second shell covers (110, 120), and the snap-on piece (151) of the snap-on portion (150) needs to be released by a finger, it is usually operated manually and is difficult to be used in automated equipment, such as mask inspection equipment, mask cleaning equipment or mask storage equipment.

[0006] In other words, the existing snap-on box (100) is difficult to open automatically, which affects the degree of automation of the equipment using the snap-on box (100), thereby causing the pass rate and efficiency of the semiconductor manufacturing process to be unable to be effectively improved. Therefore, developing a device that can automatically open the snap-on box is an important issue in the industry.

[0007] Therefore, the present invention is based on an in-depth study of the above-mentioned automation needs, and based on the inventor's many years of experience in related development, actively seeks a solution. After continuous efforts in research and development, a spring-lock box opening device and a spring-lock box opening method are finally successfully created, which can effectively solve the inconvenience and trouble caused by the inability of existing spring-lock boxes to be opened automatically. Summary of the invention

[0008] In view of the defects in the prior art, the purpose of the present invention is to provide a spring-lock box opening device and a spring-lock box opening method using the device, which can open the box in an automated manner, so as to improve the degree of automation of the equipment, reduce errors in manual operations, and improve the efficiency of the manufacturing process.

[0009] To achieve the above object, the present invention adopts the following technical means:

[0010] A snap-on box opening device is used to open a box, wherein the box comprises a first shell cover and a second shell cover which are pivotally arranged with side edges and can be relatively closed, and the first and second shell covers are selectively buckled by at least one snap-on portion at the side edges different from the pivotal connection, and each of the snap-on portions comprises snap-on pieces and relative buckle edges respectively formed on the first and second shell covers. The snap-on box opening device comprises:

[0011] A lower fixing mechanism has a positioning mechanism for fixing the first shell cover located below the box body

[0012] An upper cover-lifting device is disposed above the lower fixing mechanism, and the upper cover-lifting device comprises a frame and a grabbing mechanism disposed on the frame, for grabbing and rotating to lift up the second shell cover located at the upper part of the box body;

[0013] A pull-button device is arranged in the lower fixing mechanism on a side different from the upper cover-lifting device for lifting the second shell body. The pull-button device has at least one pull mechanism that can move relative to the above-mentioned box body snap-button part, so that the pull mechanism can drive the snap-button piece of the snap-button part to selectively separate from the buckle edge relative to the hook.

[0014] The snap-on box opening device, wherein: the positioning mechanism of the lower fixing mechanism is composed of multiple suction cup elements, which are used to use vacuum suction to suck the lower surface of the first shell cover of the box body, and the grasping mechanism of the upper cover-lifting device is composed of multiple suction cup elements, which are used to use vacuum suction to suck the upper surface of the second shell cover of the box body.

[0015] The snap-on box opening device, wherein: the lower fixing mechanism further includes a side clamping mechanism, the side clamping mechanism includes at least one driving element and clamping parts relative to two opposite sides of the box body, and the driving elements can drive the clamping parts to synchronously clamp the first shell cover below the box body relative to the side of the box body.

[0016] The snap-on box opening device, wherein: the positioning mechanism of the lower fixing mechanism may include a plurality of first positioning members relative to the edge or corner of the first shell cover, and the positioning mechanism further includes a plurality of second positioning members relative to the edge or corner of the first shell cover of a box body of another specification, so that boxes of different specifications can be placed quickly and accurately into a fixed position.

[0017] The snap-on box opening device is characterized in that: the frame of the upper cover-lifting device is mounted on a machine base through a mounting frame, and a driving mechanism is used to drive the frame to perform the cover-lifting action, and the lower fixing mechanism and the pull-on device can be arranged on a base, and the base can be arranged on a feeding conveying device of a semiconductor device, so that the base can move between a first position and a second position of the machine base, and the above-mentioned upper cover-lifting mechanism can be fixed at any of the first and second positions of the machine base.

[0018] The snap-on box opening device described above, wherein: the pull device further has a first driving element and a second driving element, and each of the pull mechanisms is arranged on the second driving element, and the first and second driving elements can drive the pull mechanism to displace the snap plate of the corresponding snap part of the box body, and the pull mechanism can be an extension plate, and the extension plate has a downwardly bent pull part, and the pull part can press down to drive the snap plate to separate from the buckle edge.

[0019] A snap-on box opening method is used to open a box, wherein the box comprises a first shell cover and a second shell cover which are pivotally arranged with sides and can be closed relative to each other, and the first and second shell covers are selectively buckled by at least one snap-on portion which is different from the pivotal side, and each of the snap-on portions comprises snap-on pieces and relative buckle edges respectively formed on the first and second shell covers. The snap-on box opening method comprises:

[0020] Placing a closed box body on a snap-on box opening device;

[0021] A first shell body generating a positioning force to fix the box body;

[0022] Moving an upper cover device to a second shell of the box body and generating a grasping force to fix the second shell;

[0023] Moving a buckle device to open the buckle portion of the box body to drive the buckle piece to separate from the buckle edge; and

[0024] The upper cover lifting device is driven to lift the second shell of the box body so as to take out the stored items in the box body.

[0025] The snap-on box opening method comprises the following steps: the lower fixing device and the upper cover opening device utilize vacuum suction to respectively suck the first and second shells of the box.

[0026] The snap-on box opening method includes: after driving the upper cover opening device to open the second shell of the box body, there is also a step of moving the buckle device to separate from the snap-on portion of the box body to avoid interfering with the action of taking out the stored items.

[0027] The snap-on box opening method further comprises: placing a storage object back into the first shell of the box; driving the upper cover device to cover the second shell of the box on the first shell; moving the button device to press the second shell of the box to drive the snap-on part; and taking out the closed box.

[0028] The beneficial effect of the present invention is: through the specific implementation of the aforementioned technical means, the snap-on box opening device of the present invention utilizes the lower fixing mechanism to fix the first shell cover of the box body, and utilizes the upper cover-lifting device to grab the second shell cover of the box body, and utilizes the latch device to release the snap-on piece and the latch edge of the snap-on part of the box body, so that the upper cover-lifting device can lift up the second shell cover, so that the snap-on box body can also be opened automatically, and further can be closed automatically, so as to improve the automation degree of the equipment, reduce the errors of manual operation, and at the same time, reduce the pollution of manual operation due to the automated operation, ensure the cleanliness of the manufacturing process space, thereby greatly improving its practicality, increasing its added value, and improving its economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 The figure is a schematic diagram of the appearance of a snap-on box for placing a mask, wherein (A) is its hooked state.

[0030] Figure 2 The figure is a three-dimensional appearance schematic diagram of the snap-on box opening device of the present invention for illustrating the relative relationship of the components.

[0031] Figure 3 It is a partially enlarged schematic diagram of the lower fixing device and the buckle device in the snap-on box opening device of the present invention.

[0032] Figure 4 The present invention is a flowchart of the snap-on box opening method.

[0033] Figure 5 It is a schematic diagram of the lower fixing action of the snap-on box opening device of the present invention when opening the box.

[0034] Figure 6 It is a schematic diagram of the release action of the snap-type box opening device of the present invention when opening a box.

[0035] Figure 7 The figure is a side cross-sectional schematic diagram of the spring-loaded box opening device of the present invention during box opening, wherein (A) is a state in which the spring-loaded plate is driven to release the buckle edge.

[0036] Figure 8 It is a cross-sectional schematic diagram of the snap-on box opening device of the present invention in the process of opening a box.

[0037] Fig. 9 It is a schematic diagram of the upper cover lifting action of the snap-on box opening device of the present invention when opening the box.

[0038] Fig.10 The figure is a schematic diagram of the appearance of the snap-on box opening device of the present invention used for opening a box of another specification.

[0039] Explanation of the reference numerals: 100-box body; 110-first shell cover; 120-second shell cover; 150-spring buckle part; 151-spring buckle sheet; 152-buckle edge; 10-machine base; 20-base; 30-lower fixing device; 31-positioning mechanism; 32-suction cup element; 33-first positioning member; 34-first detection member; 35-second positioning member; 36-second detection member; 37-side clamping mechanism; 38-driving element; 39-clamping member; 40-upper cover device; 41-frame; 42-mounting frame; 43-driving mechanism; 45-grasping mechanism; 46-suction cup element; 50-pull buckle device; 51-first driving element; 52-second driving element; 55-pull mechanism; 551-extending piece; 552-pull part; 60-feed conveying device; 61-driving mechanism; 62-guide mechanism. DETAILED DESCRIPTION

[0040] like Figure 1 As shown, the present invention is a snap-on box opening device and a snap-on box opening method. In the drawings and the specific embodiments of the present invention and its components, all references to front and back, left and right, top and bottom, upper and lower parts, and horizontal and vertical are only used for convenience of description, and are not intended to limit the present invention, nor to limit its components to any position or spatial direction. The dimensions specified in the drawings and the description may be changed according to the design and requirements of the specific embodiments of the present invention without departing from the scope of the patent application of the present invention.

[0041] The present invention relates to a snap-on box opening device and a snap-on box opening method for selectively opening a box such as Figure 1 The box body (100) shown in the figure comprises a first shell cover (110) and a second shell cover (120) which are pivotally arranged with respect to each other and can be relatively covered. In addition, the first and second shell covers (120) are selectively fastened by at least one snap-fastening portion (150) different from the pivotally connected side. Each of the snap-fastening portions (150) comprises a snap-fastening piece (151) and a relative snapping edge (152) respectively formed on the first and second shell covers (110, 120). Figure 2 The snap-on box opening device is shown, which has a base (10), a base (20), a lower fixing device (30), an upper cover device (40) and a pull-on device (50). In some embodiments, the snap-on box opening device further includes a feed conveyor (60) for moving the base (20). The feed conveyor (60) can be arranged in a semiconductor device, such as an automatic optical inspection system (AOI) for detecting contaminants on the mask surface, a mask storage device or a lithography device, for directly taking out a substrate (1) from the box (100) to perform contaminant detection or storage conversion of the substrate (1) such as a mask;

[0042] The base (20) is arranged on the machine base (10) for the lower fixing device (30) and the pull-button device (50) to be arranged. In some embodiments, the upper cover device (40) can be arranged on the base (20) at a position corresponding to the pivotal opening of the lower fixing device (30). In some embodiments, the base (20) can be arranged on the feed conveyor (60), and the feed conveyor (60) is arranged on the machine base (10). In some embodiments, the feed conveyor (60) includes a driving mechanism (61) and a guide rail mechanism (62). The base (20) is arranged at one end of the guide rail mechanism (62) for being driven by the driving mechanism (61) so that the base (20) can be displaced along the moving direction X on the guide rail mechanism (62), so that the base (20) can be moved between a first position and a second position on the machine base (10). In some embodiments, the upper cover-lifting mechanism (40) can be fixed at any one of the first and second positions of the machine base (10), and the feed conveyor (60) can drive the base (20) to move back and forth between the first and second positions relative to the upper cover-lifting mechanism (40);

[0043] For further cooperation, see Figure 2 , Figure 3 As shown, the lower fixing mechanism (30) is disposed on the base (20). The lower fixing device (30) has a positioning mechanism (31) and a side clamping mechanism (37) for fixing the first shell cover (110) located below the box body (100). In some embodiments, the positioning mechanism (31) is composed of a plurality of suction cup elements (32) for sucking the lower surface of the first shell cover (110) of the box body (100) by vacuum suction. In some embodiments, the positioning mechanism (31) may include a plurality of first positioning members (33) (such as Figure 5 As shown in FIG. 1 , the box body (100) can be placed quickly and accurately into the suction position of the suction cup element (32). The positioning mechanism (31) further includes a first detection element (34) for detecting whether the box body (100) of the specification corresponding to the first positioning element (33) is accurately positioned. In some other embodiments, the positioning mechanism (31) can be used to place two or more specifications of box bodies (100A) (such as Fig.10 As shown in FIG. 1 , the positioning mechanism (31) further comprises a plurality of second positioning members (35) relative to the edges or corners of the first shell cover (110A) of another specification of the box body (100A), so that the box body (100A) can quickly and accurately enter the suction position of the suction cup element (32) when placed, and the positioning mechanism (31) further comprises a second detection element (36) for detecting whether the box body (100A) of the specification corresponding to the second positioning member (35) is accurately in place (as shown in FIG. 1 ). Fig.10The side clamping mechanism (37) of the lower fixing device (30) corresponds to the two opposite sides of the box body (100), and the side clamping mechanism (37) includes at least one driving element (38) and clamping members (39) on the two opposite sides of the box body (100). The driving elements (38) can drive the clamping members (39) to move relative to the side of the box body (100) along the moving direction Y, so that the opposite side of the first shell cover (110) below the box body (100) can be synchronously clamped and pressed by the opposite clamping members (39). Figure 5 shown);

[0044] In some other embodiments, the upper cover-lifting device (40) includes a frame (41) and a grabbing mechanism (45) for grabbing and opening the second shell cover (120) located at the top of the box body (100). The frame (41) can be mounted on the base (10) using mounting frames (42) on both sides, so that the upper cover-lifting device (40) can selectively pivot relative to the lower fixing mechanism (30) on the base (20). In some other embodiments, the mounting frames (42) can be mounted on the base (20) through the mounting frames (42); the upper cover-lifting device (40) is provided with a driving mechanism (43) on the mounting frame (42), so that the driving mechanism (43) drives the frame (41) to rotate along the moving direction θ, and the grabbing mechanism (45) is provided on the frame (41) for grabbing the second shell cover (120) of the box body (100), and in some other embodiments, the grabbing mechanism (45) The mechanism (45) is composed of a plurality of suction cup elements (46) for sucking the upper surface of the second shell cover (120) of the box body (100) by vacuum suction. When the suction cup element (46) of the grasping mechanism (45) sucks the upper surface of the second shell cover (120) of the base body (20), the frame body (41) can be driven by the driving mechanism (43) to generate an action of opening the upper second shell cover (120) relative to the lower first shell cover (110);

[0045] The above-mentioned triggering device (50) is arranged on a side of the base (20) different from the side of the upper cover device (40) that is flipped. The triggering device (50) comprises a first driving element (51), a second driving element (52) and at least one triggering mechanism (55), wherein each of the triggering mechanisms (55) is arranged on the second driving element (52), and the first and second driving elements (52) can be used to drive the triggering mechanism (55) to move along the moving directions X and Z, so that each of the triggering mechanisms (55) can correspond to the snapping piece (151) (such as the snapping piece 151) of the relative snapping portion (150) of the box body (100) Figure 7As shown in the figure), the above-mentioned snap-fastener (151) can be selectively separated from the buckle edge (152) of the relative hook buckle, so as to achieve the purpose of releasing the snap-fastener (150) of the above-mentioned box body (100). In some embodiments, the pull mechanism (55) can be a stretching piece (551), and the stretching piece (551) has a pull portion (552) bent downward. When the pull portion (552) of the stretching piece (551) of the pull mechanism (55) presses down the above-mentioned snap-fastener (150) snap-fastener (151), the snap-fastener (151) can be slightly pulled away from the buckle edge (152), so as to achieve the purpose of releasing the snap-fastener (150) between the first and second shell covers (110, 120) of the box body (100) (as shown in the figure). Figure 7 as shown in Part A of );

[0046] Based on this, a snap-on box opening device capable of automatically opening the box and lifting the cover is formed.

[0047] Figure 4 FIG. 1 is a flow chart of a snap-on box opening method according to some embodiments. Figure 5 , 6 , 7, 8, and 9 are schematic diagrams of the operation of the snap-in box opening device in the snap-in box opening method according to some embodiments. The snap-in box opening device of the present invention can be arranged in different semiconductor devices, such as mask inspection equipment, mask cleaning equipment, or mask storage equipment, when there is a need to open the first and second shell covers (110) of the box body (100) to take out the masks stored inside for inspection, cleaning, or storage. The process steps of the snap-in box opening method include:

[0048] In step S101, a closed box is placed on a snap-on box opening device: the box (100) is placed on a lower fixing mechanism (30) of the snap-on box opening device, as shown in the fifth and sixth figures. According to some embodiments, the first positioning member (33) in the positioning mechanism (31) can be used to guide the box (100) to be accurately aligned, and the first detection element (34) can be used to detect whether the box (100) is in place. As shown in the third and tenth figures, according to some embodiments, the second positioning member (35) in the positioning mechanism (31) can be used to guide boxes (100A) of different specifications to be accurately aligned, and the corresponding second detection element (36) can be used to detect whether the box (100A) of the specification is in place;

[0049] In step S102, a positioning force is generated to fix a first shell of the box body: the positioning mechanism (31) of the lower fixing mechanism (30) can generate a positioning force to fix the first shell cover (110) below the box body (100). Figure 7According to some embodiments, the positioning mechanism (31) of the lower fixing mechanism (30) uses a plurality of suction cup elements (32) to suck the lower surface of the first shell cover (110). Figure 8 In some embodiments shown, the lower fixing mechanism (30) has a side clamping mechanism (37) for utilizing a driving element (38) to synchronously drive the clamping members (39) on both sides to clamp the two opposite sides of the first shell cover (110) of the box body (100) to provide fixation thereof;

[0050] In step S103, an upper cover device is moved to a second shell of the box body, and a gripping force is generated to fix the second shell: According to some embodiments, an upper cover device (40) of the snap-on box opening device is moved along the θ direction to above a second shell cover (120) of the box body (100), and the gripping mechanism (45) of the upper cover device (40) can generate a force to fix the second shell cover (120). Figure 7 According to some embodiments, the gripping mechanism (45) of the upper cover-lifting device (40) uses a plurality of suction cup elements (46) to suck the upper surface of the second shell cover (110); according to some embodiments, the lower fixing mechanism (30) of the snap-on box opening device is disposed on a feeding conveyor (60) through a base (20), and the lower fixing mechanism (30) is first moved to the bottom of the upper cover-lifting device (40) along a moving direction X through the feeding conveyor (60), and then the upper cover-lifting device (40) is made to grip the second shell cover (120) of the box body (100);

[0051] In step S104, a buckle device is moved to open the buckle portion of the box body so as to separate the driving buckle piece from the buckle edge: the first and second shell covers (110, 120) of the box body (100) are respectively grasped and positioned by the lower fixing mechanism (30) and the upper cover lifting device (40), as shown in FIG. Figure 5 , Figure 6 As shown, a pull-and-lock device (50) is moved to the position of the snap-lock portion (150) of the box body (100), so that the extension piece (551) and the pull portion (552) of the pull mechanism (55) press the snap-lock piece (151) of the snap-lock portion (150), so that the snap-lock piece (151) of the first shell cover (110) releases the snap edge (152) of the second shell cover (120) (as shown in FIG. Figure 7 as shown in Part A of );

[0052] In step S105, the upper cover-lifting device is driven to lift the second shell of the box body to take out the stored items in the box body: when the snap-fastening piece (151) of the snap-fastening part (150) between the first and second shell covers (110, 120) of the box body (100) releases the snap-fastening edge (152), as shown in FIG. Fig. 9As shown, the upper cover-lifting device (40) is rotated in the opening direction relative to the second shell cover (120) of the box body (100). Since the lower fixing mechanism (30) firmly fixes the first shell cover (110) of the box body (100), and the upper cover-lifting device (40) firmly grasps the second shell cover (120), when the upper cover-lifting device (40) rotates, the second shell cover (120) can be synchronously opened relative to the first shell cover (110), so that the semiconductor device can take out storage objects, such as masks, from a storage space of the first shell cover (110) of the box body (100) on the snap-on box opening device.

[0053] In step S106, the above-mentioned trigger device is moved to separate from the snap-on portion of the above-mentioned box body: after the trigger mechanism (55) of the above-mentioned trigger device (50) opens the snap-on portion (150) of the first and second shell covers (110, 120) of the box body (100), the trigger mechanism (55) of the trigger device (50) can be moved away from the position of the above-mentioned snap-on portion (150) to avoid affecting the action of the semiconductor device taking out the storage items from the storage space of the box body (100).

[0054] After the first and second shell covers (110, 120) of the box body (100) are opened and the mask is removed, the following process steps may be added as needed; such as:

[0055] In step S107, a storage object is placed back into the first shell of the box body: after the storage object, such as a mask, is processed, a mechanical arm of the semiconductor device is used to place the storage object back into the storage space above the first shell cover (110) of the box body (100);

[0056] In step S108, the upper cover-lifting device is driven to cover the second shell of the box body on the first shell: the upper cover-lifting device (40) is rotated in the covering direction relative to the second shell cover (120) of the box body (100). Since the lower fixing mechanism (30) firmly fixes the first shell cover (110) of the box body (100), and the upper cover-lifting device (40) firmly grasps the second shell cover (120), when the upper cover-lifting device (40) rotates in the opposite direction, the second shell cover (120) can be closed relative to the first shell cover (110);

[0057] In step S109, the above-mentioned buckle device is moved to press the second shell of the above-mentioned box body so that the above-mentioned snap-in portion is buckled: after the second shell cover (120) of the above-mentioned box body (100) is closed on the first shell cover (110), the snap-in piece (151) of the snap-in portion (150) can correspond to the buckle edge (152), when the extension piece (551) of the pull mechanism (55) of the buckle device (50) moves to the top of the second shell cover (120) of the above-mentioned box body (100), and the extension piece (551) of the pull mechanism (55) presses the second shell cover (120) downward, the snap-in piece (151) of the first shell cover (110) is hooked with the buckle edge (152) of the second shell cover (120) to protect the storage items between the first and second shell covers (110, 120) of the box body (100);

[0058] In step S110, the closed box body is taken out: when the first and second shell covers (110, 120) of the box body (100) are locked by the snap-fastening portion (150), the gripping mechanism (45) of the upper cover-lifting device (40) can release the second shell cover (120) of the box body (100), and the upper cover-lifting device (40) rotates upward to separate from the second shell cover (120), and the positioning mechanism (31) of the lower fixing mechanism (30) sequentially releases the first shell cover (110) of the box body (100), so that the robot arm of the semiconductor equipment can take out the box body (100).

[0059] Through the above description, the snap-on box opening device of the present invention utilizes a lower fixing mechanism (30) to fix the first shell cover (110) of the box body (100), and utilizes an upper cover-lifting device (40) to grab the second shell cover (120) of the box body (100), and utilizes the pull-button device (50) to release the snap-on portion (150) of the box body (100), so that the upper cover-lifting device (40) can lift up the second shell cover (120), so that the snap-on box body can also be opened automatically, and further can be closed automatically, so as to improve the automation degree of the equipment and reduce the errors of manual operation. At the same time, the pollution caused by manual operation can be reduced due to the automated operation, and the cleanliness of the process space can be ensured, thereby greatly improving its practicality.

[0060] In summary, it can be understood that the present invention is an invention with excellent creativity. In addition to effectively solving the problems faced in the prior art, it also greatly improves the efficacy. In the same technical field, there is no same or similar product creation or public use, and at the same time, it has improved efficacy.

Claims

1. A snap-on box opening device for opening a box, wherein the box comprises a first shell cover and a second shell cover which are pivotally arranged with sides and can be closed relative to each other, and the first shell cover and the second shell cover are selectively buckled by at least one snap-on portion at sides different from the pivotal connection, and each of the snap-on portions comprises snap-on pieces and relative buckle edges respectively formed on the first shell cover and the second shell cover, characterized in that: The snap-on box opening device comprises: A lower fixing mechanism, which has a positioning mechanism for fixing the first shell cover located below the box body, the positioning mechanism of the lower fixing mechanism includes a plurality of first positioning members relative to the edge or corner of the first shell cover, and the positioning mechanism also includes a plurality of second positioning members relative to the edge or corner of the first shell cover of a box body of another specification, so that boxes of different specifications can be placed quickly and accurately into a fixed position; An upper cover-lifting device is disposed above the lower fixing mechanism, and the upper cover-lifting device comprises a frame and a grabbing mechanism disposed on the frame, for grabbing and rotating to lift up the second shell cover located at the upper part of the box body; A pull-button device is arranged on a side of the lower fixing mechanism that is different from the upper cover-lifting device for lifting the second shell cover, and the pull-button device has at least one pull mechanism that can move relative to the above-mentioned box body snap-button part, so that the pull mechanism drives the snap-button piece of the snap-button part to selectively separate from the buckle edge of the relative hook buckle; the pull-button device has a first driving element and a second driving element, and each of the pull mechanisms is arranged on the second driving element, and the first driving element and the second driving element can drive the pull mechanism to move the snap-button piece of the corresponding snap-button part of the box body, and the pull mechanism is a stretching piece, and the stretching piece has a pull part that is bent downward, and the pull part can press downward to drive the snap-button piece to separate from the buckle edge; The frame of the upper cover-lifting device is mounted on a machine base through a mounting bracket, and can utilize a driving mechanism to drive the frame to perform the cover-lifting action, while the lower fixing mechanism and the buckle device can be arranged on a base, and the base can be arranged on a feeding conveying device of a semiconductor device, so that the base can move between a first position and a second position of the machine base, and the above-mentioned upper cover-lifting device can be fixed at any one of the first position and the second position of the machine base.

2. The snap-on box opening device according to claim 1, characterized in that: The positioning mechanism of the lower fixing mechanism is composed of multiple suction cup elements for using vacuum suction to suck the lower surface of the first shell cover of the box body, and the grasping mechanism of the upper cover device is composed of multiple suction cup elements for using vacuum suction to suck the upper surface of the second shell cover of the box body.

3. The snap-on box opening device according to claim 1, characterized in that: The lower fixing mechanism further includes a side clamping mechanism, which includes at least one driving element and clamping members on two opposite sides of the box body. The at least one driving element can drive the clamping member to synchronously clamp the first shell cover below the box body relative to the side of the box body.

4. A snap-on box opening method for opening a box, wherein the box comprises a first shell cover and a second shell cover which are pivotally arranged with sides and can be closed relative to each other, and the first shell cover and the second shell cover are selectively buckled by at least one snap-on portion which is different from the pivotal side, and each of the snap-on portions comprises a snap-on piece and a relative buckle edge formed on the first shell cover and the second shell cover respectively, characterized in that: The snap-on box opening method uses the snap-on box opening device according to any one of claims 1 to 3, and comprises: Placing a closed box body on a snap-on box opening device; A first shell cover generating a positioning force to fix the box body; Moving an upper cover-lifting device to a second shell cover of the box body and generating a grabbing force to fix the second shell cover; Moving a buckle device to open the buckle portion of the box body to drive the buckle piece to separate from the buckle edge; and The upper cover-lifting device is driven to lift the second shell cover of the box body so as to take out the stored items in the box body.

5. The snap-on box opening method according to claim 4, characterized in that: The lower fixing device and the upper cover-lifting device utilize vacuum suction to respectively suck the first shell cover and the second shell cover of the box body.

6. The snap-on box opening method according to claim 4, characterized in that: After the upper cover-lifting device is driven to lift the second shell cover of the box body, there is also a step of moving the buckle device to separate from the snap-on portion of the box body to avoid interference with the action of taking out the stored items.

7. The snap-on box opening method according to claim 4 or 6, characterized in that: The method comprises: placing a storage object into the first shell cover of the box body again; driving the upper cover-lifting device to cover the second shell cover of the box body on the first shell cover; moving the buckle device to press the second shell cover of the box body to drive the buckle part to buckle; and taking out the closed box body.

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