ULED screen substrate inspection / measurement equipment backlight inspection / measurement stage

Abstract

The present invention relates to the technical field of ULED screen backlight detection / measurement, and discloses a backlight detection / measurement stage of a ULED screen substrate detection / measurement device, including an upper structure plate and a lower structure plate, the upper structure plate and the lower structure plate are transparent hard materials, the upper structure plate is composed of at least one adsorption plate, each adsorption plate is divided into a plurality of adsorption areas, each adsorption area is provided with at least one adsorption hole, the adsorption hole runs through the upper structure plate, the adsorption holes are distributed with a predetermined size and interval, a sinking air groove is opened in the middle of the lower structure plate, the sinking air groove is connected to the adsorption hole of the upper structure plate, the side of the sinking air groove is a vertical vertical surface, the bottom surface is a horizontal surface, and the bottom surface is polished. The partition control of the adsorption hole of the present invention can solve the adsorption problem of substrates of different shapes and sizes, the special structural design of the air hole can solve the problem of backlight uniformity, and the combination of the two can be used for backlight detection / measurement of substrates of different shapes and sizes.

Description

Technical Field

[0001] The present invention relates to the technical field of ULED screen backlight detection / measurement, and in particular to a backlight detection / measurement stage of a ULED screen substrate detection / measurement device. Background Art

[0002] ULED adopts multi-zone independent backlight control technology, and its picture quality performance has been greatly improved. Therefore, ULED screens are widely used in two major fields: electronic medical display and LCD TV. However, due to the customized characteristics of ULED screens on the market, their shapes and sizes are not fixed. Common shapes are round and square. Common sizes of round are 4 inches, 6 inches and 8 inches. Common sizes of square are 200mm~300mm x 200mm~400mm. The backlight detection process is one of the important steps in the quality inspection of ULED screens. The stage is an indispensable tool in the backlight detection process. However, the existing stage for ULED screen backlight detection is not compatible with ULED screens of various shapes and sizes, and there will be problems with backlight uniformity during backlight detection. Summary of the invention

[0003] The purpose of the present invention is to address the above-mentioned problems and shortcomings and provide a backlight detection / measurement stage for a ULED screen substrate detection / measurement device, which can simultaneously process substrates of different shapes and sizes and use backlight without uniformity problems.

[0004] The objective of the present invention is achieved through the following technical solutions: A backlight detection / measurement stage of a ULED screen substrate detection / measurement device comprises an upper structure plate and a lower structure plate, wherein the upper structure plate and the lower structure plate are made of transparent hard materials, wherein the upper structure plate comprises at least one adsorption plate, wherein the adsorption plate is divided into at least one adsorption area, wherein each adsorption area is provided with at least one adsorption hole, wherein the adsorption hole penetrates the adsorption plate, and wherein the adsorption holes are distributed with a predetermined size and interval. A plurality of sinking air grooves are provided on the upper side of the lower structure plate, wherein the sinking air grooves correspond to and are connected with the adsorption holes, and an exhaust hole is provided on the side of the lower structure plate, wherein the exhaust hole is connected with the sinking air grooves.

[0005] Preferably, the bottom surface of the sinking gas groove is polished.

[0006] Preferably, the side surface of the sinking air trough is a vertical vertical surface, and the bottom surface is a horizontal surface.

[0007] Preferably, the upper structural plate and the lower structural plate are bonded using shadowless adhesive.

[0008] Preferably, the adsorption plate is divided into three adsorption areas.

[0009] Preferably, the adsorption holes are distributed in a rectangular array or a circular array.

[0010] Preferably, the adsorption holes are circular or square.

[0011] Preferably, four corners of the lower structure plate are respectively provided with mounting holes, and the mounting holes pass through the lower structure plate.

[0012] According to another solution of the invention, preferably, an annular sealing groove is opened on the outer side of the sinking air groove, and a sealing ring is arranged in the annular sealing groove.

[0013] According to another scheme of the invention, preferably, the lower structure plate has two groups of symmetrical sinking air grooves on the upper side, each group includes 7 sinking air grooves, and the sinking air grooves have three different lengths, namely, long sinking air grooves, medium sinking air grooves and short sinking air grooves.

[0014] The beneficial effects of the present invention are: a backlight detection / measurement stage for a ULED screen substrate detection / measurement device, comprising an upper structure plate and a lower structure plate, the upper structure plate and the lower structure plate use transparent hard materials to increase light transmittance, the upper structure plate adopts a combination of multiple thick plates, which can leave a loading operation space for a loading robot, the upper structure plate is provided with adsorption holes, and the partitioned setting of the adsorption holes can adsorb substrates of different sizes, solving the problem that general stages cannot be compatible with various shapes and sizes, the lower structure plate is provided with a sinking air groove connected to the adsorption hole, the adsorption hole is circular and the side of the sinking air groove is a vertical facade, the bottom surface is a horizontal surface, and the bottom surface is polished, these special structural designs minimize the shading problem and better solve the backlight uniformity problem. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic diagram of the stage;

[0016] Figure 2 It is an exploded view of the stage;

[0017] Figure 3 is a schematic diagram of the upper structure plate;

[0018] Figure 4 is a schematic diagram of the lower structural plate;

[0019] Figure 5 It is a cross-sectional view of the adsorption tank along the AA section;

[0020] Figure 6 is a structural schematic diagram of Embodiment 2;

[0021] Figure 7 is a structural schematic diagram of Embodiment 6;

[0022] Figure 8It is a schematic diagram of the overall structure of a ULED screen substrate detection / measurement device using the stage of the present invention;

[0023] Fig. 9 It is a schematic diagram of the structure of a detection device of a ULED screen substrate detection / measurement device using the stage of the present invention;

[0024] Fig.10 It is a schematic diagram of the loading and unloading port structure of the ULED screen substrate detection / measuring device using the stage of the present invention;

[0025] Fig.11 It is a schematic diagram of the structure of the upper and lower material ports of the ULED screen substrate detection / measurement equipment using the stage of the present invention;

[0026] Fig.12 It is a schematic diagram of the side view structure of the loading and unloading ports of the ULED screen substrate detection / measuring device using the stage of the present invention;

[0027] Fig.13 It is an overall schematic diagram of a pre-alignment device with a two-dimensional motion mechanism of a ULED screen substrate detection / measurement device using the stage of the present invention;

[0028] Fig.14 It is a left-side schematic diagram of a pre-alignment device with a two-dimensional motion mechanism of a ULED screen substrate detection / measurement device using the stage of the present invention;

[0029] Fig.15 It is an overall schematic diagram of a ULED screen substrate detection / measurement device with a four-dimensional motion mechanism using the stage of the present invention;

[0030] Fig.16 It is an enlarged schematic diagram of the second auxiliary clamping mechanism of the ULED screen substrate detection / measuring device using the stage of the present invention;

[0031] Fig.17 It is a schematic diagram of the main view of the ULED screen substrate detection / measurement device with a four-dimensional motion mechanism using the stage of the present invention;

[0032] Fig.18 It is a left-side schematic diagram of a ULED screen substrate detection / measurement device with a four-dimensional motion mechanism using the stage of the present invention;

[0033] Fig.19 It is a top view schematic diagram of a ULED screen substrate detection / measurement device with a four-dimensional motion mechanism using the stage of the present invention;

[0034] Fig. 20 It is a schematic structural diagram of a buffer mechanism with a limit sensor of a ULED screen substrate detection / measuring device using the stage of the present invention. DETAILED DESCRIPTION

[0035] The technical solution of the present invention is further described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following.

[0036] Embodiment 1: Figure 1-5 As shown, the backlight detection / measurement stage of the ULED screen substrate detection / measurement device includes an upper structure plate 161 and a lower structure plate 162. In this embodiment, the upper structure plate 161 is composed of two adsorption plates 1611 of the same size and shape. The two adsorption plates 1611 are symmetrically arranged, leaving a loading operation space in the middle for the loading robot. Each adsorption plate is divided into a plurality of adsorption areas 163, attached Figure 2 In the figure, each dotted box is an adsorption area 163, each adsorption area has at least one circular or square adsorption hole 164, the adsorption hole 164 is vertically arranged with the upper structure plate 161, and the plurality of adsorption holes 164 are arranged in a rectangular array. It should be noted that the number of adsorption areas 163 and the number of adsorption holes 164 are arranged according to the maximum size of the substrate of the product to be backlight tested, so as to adapt to the detection of ULED screens of different sizes. Figure 3 , the number of adsorption areas 163 is three, and the adsorption holes 164 are distributed from the inside to the outside according to substrates of different sizes, and are divided into the innermost adsorption holes, the second innermost adsorption holes and the outermost adsorption holes. In the first embodiment, preferably, there are 4 innermost adsorption holes and 4 second innermost adsorption holes. Each adsorption area is divided into a first adsorption area, a second adsorption area and a third adsorption area according to the position of the adsorption holes. The first adsorption area is composed of the 4 innermost adsorption holes, the second adsorption area includes the innermost adsorption holes and the second innermost adsorption holes, with a total of 8 adsorption holes, and the third adsorption area includes all the adsorption holes. The lower structure plate 162 is a whole azimuthal or circular thick plate. The lower structure plate 162 has a sinking air groove 1621 corresponding to the adsorption hole 164 on the upper side. The sinking air groove 1621 and the adsorption hole 164 can correspond one to one or one to many. One sinking air groove 1621 can correspond to multiple adsorption holes 164 in the same adsorption area, so that the adsorption hole 4 and the sinking air groove 1621 are interconnected. In this embodiment, the side of the sinking air groove 1621 is a vertical vertical surface, and the bottom surface is a horizontal surface. The bottom surface is also polished and ground, which reduces the shading problem to a greater extent. The four corners of the lower structure plate 162 are provided with mounting holes 165. The mounting holes 165 pass through the lower structure plate 162. The stage can be fixed to the machine base by screws passing through the mounting holes 165. The side of the lower structure plate 162 is provided with an exhaust hole 166, which is connected to the sinking air groove 1621. In this embodiment, the two adsorption plates 1611 and the lower structure plate 162 are made of transparent hard materials to better avoid the shading problem.

[0037] In Example 1, the upper structure plate and the lower structure plate are made of transparent hard material, and shadowless glue can be preferably used to bond the upper structure plate and the lower structure plate together. The shadowless glue is converted from liquid to solid within a few seconds under the irradiation of ultraviolet rays. The shadowless glue has excellent characteristics of resistance to low temperature, high temperature and high humidity, which ensures the sealing between the upper structure plate 161 and the lower structure plate 162, and further ensures that there is no air leakage between the upper structure plate 161 and the lower structure plate 162, and finally improves the adsorption capacity of the adsorption hole 164.

[0038] Method of use: In the first embodiment, the upper structure plate 161 is composed of two adsorption plates 1611, and the two adsorption plates 1611 are divided into three adsorption areas 163. Each adsorption area 163 has at least one cylindrical or square adsorption hole 164. The adsorption holes 164 are arranged at predetermined intervals and sizes. The adsorption holes 164 of the two adsorption plates 1611 are arranged symmetrically. The first adsorption area adsorbs the smallest substrate, the second adsorption area adsorbs the second smallest substrate, and the third adsorption area adsorbs the largest substrate. These three adsorption areas can be used to adsorb substrates of different sizes, which solves the problem that the general stage cannot be compatible with multiple sizes and shapes. The lower structure plate 162 is a whole square or round thick plate, and a downward sinking air groove 1621 corresponding to and connected to the adsorption hole 164 on the upper structure plate 161 is opened on the upper side of the lower structure plate 162. The side of the downward sinking air groove 1621 is a vertical facade, and the bottom surface is a horizontal surface. The bottom surface is also polished, which better solves the backlight uniformity problem. The partition control of the adsorption hole 164 can solve the adsorption problem of substrates of different shapes and sizes. The special structural design of the adsorption hole 164 can solve the backlight uniformity problem. The combination of the two can be used for backlight detection of substrates of different shapes and sizes, thereby achieving the purpose of the present invention.

[0039] Example 2: The main difference between Example 2 and Example 1 is that, please refer to Figure 6 The upper structure plate 161 and the lower structure plate 162 are not bonded with shadowless adhesive, but are processed so that the surface of the upper structure plate 161 and the lower structure plate 162 is very smooth. When the upper structure plate 161 and the lower structure plate 162 are close to vacuum adsorption, an annular sealing groove 167 is opened around each sinking air groove 1621, and a sealing ring is arranged in the annular sealing groove 167, so that a better sealing effect is achieved between the adsorption hole 164 and the sinking air groove 1621. In addition, in order to better prevent sliding between the upper structure plate 161 and the lower structure plate 162, limit blocks can be respectively provided on the diagonal sides of the upper structure plate to fix the upper structure plate 161 and the lower structure plate 162, so as to prevent relative sliding between the upper structure plate 161 and the lower structure plate 162 during operation, thereby reducing the adsorption capacity of the adsorption hole 164.

[0040] Embodiment 3: In this embodiment, the difference from Embodiment 1 is that a single adsorption plate 1611 may be selected for the upper structure plate, and then at least three circular or square adsorption holes 164 are opened on the adsorption plate 1611, which makes the structure simpler and saves costs.

[0041] Embodiment 4: In this embodiment, in order to save operation time, the upper structure plate 161 can be preliminarily stacked together by different numbers of adsorption plates 1611, and then the upper structure plate 161 and the lower structure plate 162 are bonded together to form several sets of common thickness test tables, which can be used directly according to the thickness of different products to be tested.

[0042] Embodiment 5: Based on Embodiment 1, refer to Figure 4 In this embodiment, in order to cooperate with the adsorption holes 164 of the three adsorption areas 163 in the upper structure plate 161, the lower structure plate 162 has two groups of symmetrical sinking air grooves 1621 on the upper side, each group includes 7 sinking air grooves 1621, and the sinking air grooves 1621 have three different lengths, namely long sinking air grooves, medium sinking air grooves and short sinking air grooves. In this embodiment, all sinking air grooves are divided into three areas. The first area includes a long sinking air groove and a medium sinking air groove. The long sinking air groove is located above the medium sinking air groove. The third area is symmetrically arranged with the first area. The third area also includes a long sinking air groove and a medium sinking air groove. The first area and the third area are located at the head and tail ends of the lower structure plate 162. The second area includes two long sinking air grooves and a short sinking air groove. The short sinking air groove is located in the middle of the two sinking air grooves. The second area is located in the middle of the lower structure plate 162. In this embodiment, the short sinking gas groove is connected to the adsorption hole of the third adsorption zone, the middle sinking gas groove is connected to the adsorption hole of the second adsorption zone, and the long sinking gas groove is connected to the adsorption hole of the first adsorption zone. In addition, each sinking gas groove is connected to an air extraction hole 166.

[0043] Embodiment 6: The difference between the embodiment 6 and the embodiment 1 is that, see Figure 7 Each adsorption area has only three adsorption holes 164, which are arranged in a circular array. In this embodiment, each adsorption hole 164 is arranged at equal intervals, so that the angle between each adsorption hole 164 is 120 degrees.

[0044] Embodiment 7: On the basis of embodiment 1, in order to better control the adsorption function of the adsorption hole 164, the pipeline branching method is used to control the opening and closing state of the adsorption hole 164. The air extraction hole 166 connected to the sinking gas groove corresponding to the adsorption hole 164 of each adsorption area 163 is connected to three pipelines. A control valve is installed on each pipeline, which is divided into a first control valve, a second control valve and a third control valve. The three pipelines are gathered into a main pipeline, and a main control valve is provided in the main pipeline. When the smallest size substrate is adsorbed, only the adsorption holes of the first adsorption area work, and the adsorption holes of the second adsorption area and the third adsorption area are all closed. Therefore, the first control valve is opened and the other two control valves are closed. When the second smallest size substrate is adsorbed, the first and second control valves are opened, and the third control valve hole is closed. When the largest size substrate is adsorbed, the adsorption holes 164 of the three adsorption areas 1611 are all started, and all control valves are opened. In this way, the opening and closing state of the adsorption holes 164 can be better controlled to adapt to different work requirements.

[0045] like Figure 8-20 As shown, the stage of the present invention is applied to a ULED screen substrate detection / measurement device, which includes a signal processing unit, a detection device 100 installed on a machine tool, a pre-alignment device 200, a manipulator 300 and two loading and unloading ports 400. The detection device 100, the pre-alignment device 200, the manipulator 300 and the two loading and unloading ports 400 are connected to the signal processing unit to realize signal interaction and automatically complete the whole process of screen substrate loading, pre-alignment, detection and unloading; the loading and unloading ports 400 include The invention comprises a bottom plate 410, a plurality of limiting blocks 420 of at least two layers arranged on the bottom plate, substrate cassettes 430 of different sizes / shapes and inductive sensors 440. The limiting blocks 420 are stacked according to the principle that the size / shape of the substrate cassettes 430 is smaller at the bottom and larger at the top, so as to form multiple layers of limiting spaces for accommodating substrate cassettes 430 of different sizes / shapes. Each size / shape of substrate cassettes 430 can only be placed in one layer of limiting space, and the inductive sensors 440 are arranged at a position where each layer of limiting space does not overlap with the next layer of limiting space.

[0046] like Fig. 9As shown, the detection device 100 includes an equipment platform 110, an electric control box 180, a gantry bracket 120, a detection head 130, a detection platform 140 and a backlight device 150; the detection platform 140 is arranged on the equipment platform 110, and the detection platform 140 is driven by a driving component to move along the X / Y axis direction on the equipment platform 110. The driving component of the detection platform 140 is a linear motor moving in the X-axis direction and a linear motor moving in the Y-axis direction. The stator 142 of the linear motor in the X direction is installed on the equipment platform The platform 110 is along the X-axis direction, and the mover is installed at the bottom of the detection platform 140, and the mover drives the detection platform 140 to reciprocate on the stator; the Y-axis linear motor stator 143 is installed on both sides of the detection platform 140 along the Y-axis direction, and the mover drives the detection platform 140 to reciprocate on the stator; the gantry bracket 120 is erected above the equipment platform 110, and the detection head 130 is installed on the crossbeam of the gantry bracket 120. The detection head 130 is provided with a camera I mounting port 131 and a camera II mounting port 132. The detection head 130 Facing the detection platform 140, the detection head 130 is driven to move along the X / Y axis direction by the driving device; the detection platform 140 includes a mounting base plate 141, a stage 160, a standard film stage 170 and an exhaust device. A countersunk hole is provided on the mounting base plate 141, and the standard film stage 170 is fixed in the countersunk hole. The stage 160 is installed on the mounting base plate 141. A through hole is provided on the mounting base plate 141 below the stage 160. The through hole size is smaller than the size of the stage 160. The through hole is convenient for light transmission and backlight detection. The stage 160 and the standard film stage 170 are used to place the screen substrate during detection. The exhaust device is connected to the stage 160 and the standard table stage 170. During detection, the screen substrate is fixed by exhaust adsorption; the backlight illumination device 150 is arranged on one side of the stage 160. The stage 160 can adapt to substrates of various sizes / shapes, and can also place substrates of standard sizes. The standard film stage 170 is used to place substrates of standard sizes.

[0047] In some embodiments, the limit blocks 420 are disposed at two diagonal corners, any three corners, or four corners, or any two, three, or four sides of the substrate cassette 430 , and the limit blocks 420 may be two, three, or four layers.

[0048] In some embodiments, the limiting block 420 is provided with a screw hole for fixing, and the limiting block 420 is fixed to the bottom plate 410 or the limiting block 420 of the next layer by bolts.

[0049] In some embodiments, Figure 10-12As shown, a notch 411 is provided in the middle of one side of the bottom plate 410 of the loading and unloading port 400 for facilitating loading and unloading of the robot, and the side with the notch 411 is the material taking end; the inner side of the limit block 420 is an L-shaped clamping shape, and the limit block 420 is arranged at the four corner points of the substrate cassette 430, and is symmetrically arranged on both sides along the center line of the notch 411, and an induction sensor 440 is arranged near the inner side of the limit block 420 at the diagonal of each layer of the limit space, and the induction sensor 440 is a downward pressure induction sensor, and the switch of the downward pressure induction sensor protrudes from the bottom surface of the limit block 420 of this layer, and the switch The lower end is connected to a spring, and the lower end of the downward pressure induction sensor is fixed to the bottom of the base plate 410. When in use, the substrate cassette 430 is placed in a layer of limiting space of matching size. The substrate cassette 430 presses down the switch of the downward pressure induction sensor protruding from the bottom surface of the limiting block 420 of this layer. The spring is compressed to trigger the induction signal to be transmitted to the signal processing unit. Different layers generate different induction signals representing different sizes / shapes of the substrate cassette 430. The size of the substrate cassette 430 stored in the signal processing unit is compared with the reference table to determine the size / shape of the substrate.

[0050] In some embodiments, a mounting bracket 412 is provided at the material picking end of the base plate 410, and a cassette substrate detector 413 is provided on the mounting bracket for detecting whether a substrate in the substrate cassette 430 protrudes. The cassette substrate detector 413 is located above the notch 411 of the base plate. The cassette substrate detector 413 emits detection light, and when encountering a situation where a substrate in the substrate cassette 430 protrudes and blocks the light path, a signal is sent to a signal processing unit to prompt an operator that the substrate in the substrate cassette 430 protrudes.

[0051] In some embodiments, the inner side of the upper edge of the limiting block 420 is chamfered to facilitate the substrate cassette 430 to slide into the limiting space along the chamfered slope.

[0052] In some embodiments, the detection device 100, the pre-alignment device 200 and the two loading and unloading ports 400 are located in four directions around the manipulator 300. The manipulator 300 is driven by a manipulator driving device. The manipulator driving device includes a Z motor and a rotating motor. The driving device is installed at the bottom of the manipulator 300. A 360-degree rotating manipulator completes the handling of the substrate, without the need for multiple manipulators, saving costs and reducing the overall volume of the equipment.

[0053] In some implementations, the signal processing unit is an industrial computer or a PLC controller, which completes the signal interaction between various parts of the entire device and controls the automatic operation of the device.

[0054] In some embodiments, Figure 13-20As shown, the pre-alignment device 200 includes a machine tool, a first mounting seat 201 and a second mounting seat 205 fixedly arranged on the machine tool by bolts, a loading portion 202, a positioning clamping mechanism, an auxiliary clamping mechanism and a gantry-type detection mechanism arranged on the first mounting seat 201, and a two-dimensional motion mechanism 206 arranged on the second mounting seat 205; the positioning clamping mechanism, the auxiliary clamping mechanism and the two-dimensional motion mechanism 206 are all electrically connected to a signal processing unit, and the signal processing unit controls the positioning clamping mechanism, the auxiliary clamping mechanism and the two-dimensional motion mechanism 206 to work or stop;

[0055] The gantry type detection mechanism includes a detector mounting frame 211 fixedly mounted on the first mounting seat 201 by bolts and a detector 213 fixedly mounted on the detector mounting frame 211. The detector 213 is located above the object loading part 202. The signal output end of the detector 213 is connected to the signal input end of the signal processing unit.

[0056] A first through hole is provided on the first mounting seat 201, and the loading part 202 includes a support seat 221, a support plate 222 with a second through hole, a sensor mounting seat 223, 4 substrate limit blocks 224 and 12 support columns 225; the support seat 221 is fixedly arranged on the first mounting seat 201 by bolts and is located at the periphery of the first through hole, the support plate 222 is fixedly arranged on the top of the support seat 221 by bolts, the sensor mounting seat 223 and the substrate limit block 224 are both fixedly arranged on the top of the support plate 222 by bolts, a first sensor 226 is fixedly installed on the sensor mounting seat 223 by bolts, a signal output end of the first sensor 226 is connected to a signal input end of the PLC controller, 12 support columns 225 are vertically arranged, the support columns and the first mounting seat 201 are integrally formed and are located at the periphery of the support plate 222;

[0057] Please refer to this paragraph Fig.15 , Fig.16 and Fig.19 , please refer to Fig.19The positioning and clamping mechanism and the auxiliary clamping mechanism are both located on the periphery of the support column 225. The positioning and clamping mechanism includes a first positioning and clamping mechanism 231 and a second positioning and clamping mechanism 232. The auxiliary clamping mechanism includes a first auxiliary clamping mechanism 241 and a second auxiliary clamping mechanism 242. The first positioning and clamping mechanism 231 includes a first cylinder 271. The base of the first cylinder 271 is fixedly mounted on the first mounting seat 201 by bolts and its front end is inclined to the lower left, and its rear end is close to the upper right corner of the first mounting seat 201. A slider 210 that slidably cooperates with the first cylinder 271 is provided on the top of the first cylinder 271. The top of the slider 210 is fixed to the Y-shaped clamping seat 237. The front end of the slider 210 is connected to the top of the piston rod of the first cylinder 271 through a connecting block. The piston rod of the first cylinder 271 drives the slider 210 to perform telescopic movement. The slider 210 The Y-shaped clamping seat 33 is driven to perform telescopic movement. The front part of the Y-shaped clamping seat 237 is V-shaped and the two V-shaped strips are respectively parallel to the upper side and the right side of the first mounting seat 201. The front ends of the two V-shaped strips are provided with protruding blocks, and the first positioning clamping block 234 and the second positioning clamping block 235 are respectively fixedly provided on the two protruding blocks. The first positioning clamping block 234 and the second positioning clamping block 235 are respectively used to clamp the adjacent two sides of the square substrate; the second positioning clamping mechanism 232 is driven by the second cylinder 272, and the base of the second cylinder 272 is horizontally arranged and fixedly installed on the first mounting seat 201 by bolts. The rear end of the base of the second cylinder 272 is close to the right side of the first mounting seat 201. The square clamping seat 238 of the second positioning clamping mechanism 232 is square and the square clamping seat 238 is provided with a third positioning clamping block 236. The second positioning clamping block 235 and the third positioning clamping block 236 Located on the same side of the square substrate, they clamp one side of the square substrate together or are used to clamp a circular substrate; the first auxiliary clamping mechanism 241 and the second auxiliary clamping mechanism 242 have the same structure, the first auxiliary clamping mechanism 241 includes a third cylinder 281, a slider 210, an auxiliary clamping seat 233, a buffer mechanism and a first auxiliary clamping block 243, the first auxiliary clamping block 243 is arranged opposite to the first positioning clamping block 234, and the motion trajectory of the first auxiliary clamping block 243 is parallel to the straight line where the second positioning clamping block 235 and the third positioning clamping block 236 are located;The second auxiliary clamping mechanism 242 includes a fourth cylinder 282, a slider 210, an auxiliary clamping seat 233, a buffer mechanism and a second auxiliary clamping block 244. The slider 210 is installed on the fourth cylinder 282 and slidably cooperates with it. The piston rod of the fourth cylinder 282 is connected to the slider 210 and drives the slider 210 to perform linear reciprocating motion in the fourth cylinder 282. The auxiliary clamping seat 233 is fixedly arranged on the slider 210. The buffer mechanism includes a guide rail 284, a rear spring seat 285, a limit stopper 286, a spring 287 and a front spring seat 288. The guide rail 284 is arranged on the top of the auxiliary clamping seat 233, and the rear spring seat 285 is fixedly arranged on the guide rail 284. At the rear end of the guide rail 284, the front end of the guide rail 284 is fixed by the limit stopper 286 and the front end of the auxiliary clamping seat 233, one end of the spring 287 is fixed to the rear spring seat 285, and the other end of the spring 287 is fixedly arranged in the front spring seat 288. The bottom of the front spring seat 288 is fixedly provided with a slider a and a slider b, and the slider a and the slider b are respectively arranged on the guide rail 284 and are slidably matched with the guide rail 284. The second auxiliary clamping block 244 is fixedly arranged on the top of the front spring seat 288;

[0058] The second mounting seat 205 is located directly below the first mounting seat 201. The two-dimensional motion mechanism 206 includes a working arm 261, a Z-axis motion mechanism that drives the working arm 261 to move in the Z-axis direction, and a horizontal rotation motion mechanism that drives the working arm 261 to rotate. The Z-axis motion mechanism is driven by a Z-direction cylinder 265, and the Z-direction cylinder 265 is fixed on the second mounting seat 205 by bolts. The piston rod of the Z-axis cylinder 265 is arranged vertically upward and the top of the piston rod is connected to the horizontal rotation motion mechanism, and the Z-axis cylinder 265 drives the horizontal rotation motion mechanism to move in the Z-axis direction; the horizontal rotation motion mechanism includes a θ motor 264 and a θ driving gear, and a θ driven gear is arranged at the power input end of the working arm 261, and the θ driving gear and the θ driven gear are meshed, and the θ driven gear drives the θ driven gear and the working arm 261 to perform horizontal rotation motion; the upper end of the working arm 261 passes through the first through hole and the second through hole in sequence and a suction cup 209 is arranged at the top, and the suction cup 209 is connected to the adsorption mechanism, and the suction cup 209 is controlled to work or stop by the PLC controller; the PLC controller stores a ULED screen substrate size reference comparison table for identifying the size / shape of the ULED screen substrate, and at least two pre-alignment programs are arranged in the PLC controller for performing pre-alignment of ULED screen substrates of different sizes / shapes, and the corresponding pre-alignment program is selected according to the size / shape of the ULED screen substrate.

[0059] Through the above arrangement, the structure is novel and the design is reasonable. The positioning clamping mechanism and the auxiliary clamping mechanism are arranged on the first mounting seat 201, and the two-dimensional motion mechanism 206 is arranged on the second mounting seat 205. The structure is compact and the equipment space is used reasonably. The auxiliary clamping mechanism is provided with a buffer mechanism. The spring 287 plays a buffering role when the substrate is pre-aligned, effectively protecting the substrate from being squeezed and damaged. The clamping blocks of the two positioning clamping mechanisms cooperate with the clamping blocks of the two auxiliary clamping mechanisms to clamp and align the square substrate to complete the pre-alignment of the square substrate. The two-dimensional motion mechanism 206 cooperates with the second positioning clamping block 235, the third positioning clamping block 236, the second auxiliary clamping block 244 and the detector to complete the pre-alignment of the circular substrate. Circular and square substrates of various sizes can be pre-aligned on the pre-alignment device, reducing the number of equipment used, reducing the investment and production cost of the equipment; at the same time, because the pre-alignment device can be compatible with circular and square substrates of various sizes at the same time, there is no need to replace the equipment when pre-aligning substrates of different sizes and shapes, which effectively improves the work efficiency of substrate pre-alignment.

[0060] In some embodiments, the positioning clamping block is round or square, and the auxiliary clamping block is round or square; a limit position sensor is provided on the buffer mechanism; Figure 8 As shown, at this time, the slider 210 and the auxiliary clamping seat 233 are fixed by the connecting plate 247, and the slider 210 drives the connecting plate 247 to move, thereby driving the buffer mechanism to move; the limit sensor includes a sensor 245 and an L-shaped sensing baffle 246, the sensor 245 is fixedly arranged at the bottom of the auxiliary clamping seat 233 by screws, one side of the sensing baffle 246 is fixed to the front spring seat 288 by screws, and the front spring seat 288 drives the sensing baffle to make horizontal reciprocating motion, and the other side of the sensing baffle 246 cooperates with the sensor 245, when the sensing baffle 246 moves to the sensing range of the sensor 245 driven by the front spring seat 288, the sensor 245 sends a signal to the signal processing unit, and the signal processing unit controls the cylinder corresponding to the sensor 245 to stop working; when the spring 287 is reset, the front spring seat 288 drives the sensing baffle 246 to leave the sensor 245 The sensor 245 sends a signal to the signal processing unit, and the signal processing unit controls the cylinder corresponding to the sensor 245 to reset; the surfaces of the clamping blocks are elastic to prevent them from damaging the substrate when they come into contact with the substrate. By adding a limit sensor, it is not necessary to set multiple cylinder / motor strokes according to the size of the substrate, which simplifies the alignment process and makes the alignment more accurate.

[0061] In some embodiments, an X-direction slide rail is provided on the second mounting seat 205, an X-direction slide rail is provided on the X-direction motion mechanism, the X-direction motion mechanism includes an X-direction pulley and an X-direction motor 262, and the X-direction motor 262 drives the X-direction pulley to move in the X-direction direction; a Y-direction slide rail is provided on the X-direction pulley, and a Y-direction motion mechanism is provided on the Y-direction slide rail; the Y-direction motion mechanism includes a Y-direction pulley and a Y-direction motor 263 installed on the Y-direction slide rail, and the Y-direction motor 263 drives the Y-direction pulley to move in the Y-direction direction; the Z-axis motion mechanism is fixedly installed on the Y-direction pulley by bolts, and the two-dimensional motion mechanism 206, the X-axis motion mechanism and the Y-direction The two-dimensional motion mechanism 206 is provided with an X-axis motion mechanism and a Y-axis motion mechanism to form an X, Y, Z, θ four-dimensional motion mechanism, that is, the working arm 261 can drive the suction cup 209 and the substrate to move in the X, Y, Z axis directions or to perform horizontal rotational motion; the circular substrate can be pre-aligned by the four-dimensional motion mechanism in cooperation with the detector 213, and the circular substrate pre-alignment work can be completed without the assistance of the clamping mechanism.

[0062] In some embodiments, two sensor mounting frames 212 are fixedly installed on the first mounting seat 201 by bolts, and second sensors 214 are fixedly installed on the two sensor mounting frames 212 by bolts respectively. The two second sensors 214 respectively detect and sense two adjacent edges of the ULED screen substrate, and the signal output ends of the two second sensors 214 are connected to the signal input end of the signal processing unit; the two second sensors 214 and the detector 213 cooperate with the four-dimensional motion mechanism to complete the pre-alignment of the square substrate.

[0063] In some embodiments, 12 support columns 225 are vertically arranged, the bottom of each support column 225 is fixed to the top of the first mounting seat 201, the top of each support column 225 is convex, every 3 support columns 225 form a group and are arranged in an L shape, and four groups of support columns 225 are respectively arranged on the periphery of the four corners of the support plate 222; the first positioning clamping block 234, the second positioning clamping block 235, the third positioning clamping block 236, the first auxiliary clamping block 243 and the second auxiliary clamping block 244 are of the same size and height, and the top of the support column 225 is higher than the bottom of the above-mentioned clamping block and lower than the top of the above-mentioned clamping block; the top of the support column 225 is set to a convex shape, which further reduces the contact area between the loading part 202 and the substrate, and further reduces the probability of the substrate being worn; the top of the support column 225 is higher than the bottom of the clamping block and lower than the top of the clamping block, effectively ensuring that the clamping block clamps the substrate normally.

[0064] In some embodiments, the first through hole and the second through hole are both larger than the outer diameter of the working arm 261, and the projections of the first through hole and the second through hole in the vertical direction overlap; the first through hole and the second through hole are set to the same size and shape, and are located in the same vertical direction, avoiding space waste. At the same time, the setting of the two through holes provides a reasonable and effective space for the movement of the working arm 261.

[0065] In some embodiments, two support seats 221 are provided and their cross-sections are both L-shaped, and the two L-shaped support seats 221 are symmetrical about the center of the first mounting seat 201; because the working arm 261 will generate airflow when it moves, the setting of the L-shaped support seat 221 allows the moving edge of the working arm 261 to have sufficient air flow space, ensuring that the working arm 261 is not affected by the airflow when working, thereby enhancing the stability of the equipment during operation and extending the service life of the equipment.

[0066] The method for using the ULED screen substrate detection / measuring device includes the following steps:

[0067] (a) placing the substrate cassette 430 in a limiting space formed by the limiting block 420 of the loading and unloading port 400 and matching the size / shape of the substrate cassette 430, triggering the inductive sensor switch of the layer to generate an inductive signal which is transmitted to the signal processing unit to identify the size / shape of the substrate cassette 430;

[0068] (b) The signal processing unit controls the robot 300 to carry the substrate to be tested in the substrate cassette 430 to the pre-alignment device 200;

[0069] (c) the signal processing unit controls the pre-alignment device 200 to pre-align the substrate to be tested;

[0070] (d) The signal processing unit controls the robot 300 to carry the pre-aligned substrate from the pre-alignment device 200 to the adsorption area 163 of the test platform 140 of the detection device 100 that matches the size / shape of the substrate to be tested or to the standard sheet stage 170, and the vacuum device adsorbs and fixes the substrate to be tested;

[0071] (e) The signal processing unit controls the movement of the detection platform 140 or the detection head 130 to detect the substrate to be detected;

[0072] (f) The signal processing unit controls the robot 300 to carry the measured substrate back to the substrate cassette 430 of the loading and unloading port 400 .

[0073] Working principle of the detection equipment: The limit blocks 420 of the loading and unloading ports 400 are stacked according to the principle that the size / shape of the substrate cassette 430 is small at the bottom and large at the top, forming multiple layers of limit spaces that can hold substrate cassettes 430 of different sizes / shapes. Each size / shape of the substrate cassette 430 can only be placed in one layer of limit spaces. The induction sensor 440 is set at a position where each layer of limit space does not overlap with the next layer of limit space. Substrate cassettes 430 of different sizes / shapes are placed in one layer of limit spaces, triggering the induction sensor 440 of the limit layer to generate an induction signal that is transmitted to the signal processing unit. The signal processing unit identifies the size of the substrate cassette 430 according to different induction signals, and the signal processing unit stores the substrate cassette 430 of the identified substrate size / shape. The size reference comparison table is used to identify the size of the substrate cassette 430 and then obtain the size / shape of the substrate; the detection equipment is provided with two loading and unloading ports 400, which are used for loading and unloading alternately to improve loading and unloading efficiency and save loading and unloading time. Each loading and unloading port 400 can be used for both loading and unloading, or one for loading and the other for unloading, or one for loading. The good and bad products after detection are unloaded by two ports, providing a sorting function, which can be set by the operator according to needs; the signal processing unit controls the driving device of the manipulator 300 to drive the manipulator 300 to take out the substrate to be tested from the substrate cassette 430 of the loading and unloading port 400, and transport it to the pre-alignment device 200 for pre-alignment. The signal processing unit selects the corresponding pre-alignment program according to the identified substrate size / shape. If the loaded substrate is a square substrate, step 1 or step 2 is executed; if the loaded substrate is a round substrate, step 3 or step 4 is executed;

[0074] 1. The robot places the substrate on the support column 225; it is set that the first sensor 226 needs 0.1 seconds from detecting the substrate to completely placing the substrate on the support column 225. Then, the first sensor 226 detects the substrate and transmits a signal of detecting the substrate to the signal processing unit after a delay of 0.1 seconds. After receiving the signal transmitted by the first sensor 226, the signal processing unit controls the first cylinder 271 and the second cylinder 272 through the electromagnetic valve according to the size of the substrate to drive the first positioning clamping mechanism 231 and the second positioning clamping mechanism 232 to move to the predetermined position and then stop moving; then the signal processing unit controls the fourth cylinder 282 through the electromagnetic valve to drive the second auxiliary clamping mechanism 242 to approach the substrate. When the second auxiliary clamping block 244 on the second auxiliary clamping mechanism 242 When the force applied exceeds a certain set value, the limit sensor in the second auxiliary clamping block 244 works, and the limit sensor transmits a signal to the signal processing unit. After receiving the signal from the limit sensor, the signal processing unit controls the fourth cylinder 282 to stop moving through the solenoid valve. At this time, the angle adjustment of the substrate is completed. The signal processing unit then controls the third cylinder 281 through the solenoid valve to drive the first auxiliary clamping mechanism 241 to approach the substrate. When the force applied to the first auxiliary clamping block 243 on the first auxiliary clamping mechanism 241 exceeds a certain set value, the limit sensor in the first auxiliary clamping block 243 works, and the limit sensor transmits a signal to the signal processing unit. After receiving the signal from the limit sensor, the signal processing unit controls the third cylinder 281 to stop moving through the solenoid valve. At this time, the pre-alignment work is completed.

[0075] 2. The manipulator places the substrate on the support column 225. The first sensor 226 detects the substrate and delays for 0.1 seconds before transmitting a signal to the signal processing unit indicating that the substrate has been detected. After receiving the signal, the signal processing unit controls the suction cup 209 to hold the substrate and controls the Z-direction cylinder 265 to work. The Z-direction cylinder 265 drives the working arm 261, the suction cup 209 and the substrate to move upward to a predetermined position and then stops moving. Then the signal processing unit controls the X-direction motor 262 and the Y-direction motor 263 to work in sequence. The X-direction motor 262 drives the working arm 261, the suction cup 209 and the substrate to move horizontally. When the substrate moves to the sensing range of a second sensor 214, the second sensor 214 transmits a signal to the signal processing unit. After receiving the signal, the signal processing unit controls the X-direction motor 262 to stop working. At the same time, the signal processing unit controls the detector 213 to move horizontally to a position where it can move. The movement stops when the basic edge is detected. At this time, the detector 213 measures a set of offset data of the substrate and saves it. Then the Y-axis motor 263 drives the working arm 261, the suction cup 209 and the substrate to move horizontally. When the substrate moves to the sensing range of another second sensor 214, the second sensor 214 transmits a signal to the signal processing unit. After receiving the signal, the signal processing unit controls the Y-axis motor 263 to stop working. At the same time, the signal processing unit controls the detector 213 to move horizontally until the edge of the substrate can be detected and stops moving. At this time, the detector 213 measures the second set of offset data of the substrate. The detector 213 combines the two sets of offsets to obtain the offset amount and offset angle of the substrate and transmits the signal to the signal processing unit. After receiving the signal, the signal processing unit controls the X-axis motor 262, the Y-axis motor 263, the Z-axis cylinder 265, and the θ motor 264 according to the offset amount and offset angle of the substrate. The X-axis motor 262 and the Y-axis motor 263 move to adjust the offset of the substrate, the Z-axis cylinder 265 moves to make the substrate return to the support column 225, and the θ motor 264 works to adjust the offset angle of the substrate. After the substrate adjustment is completed, it returns to the support column 225, and the pre-alignment process is completed.

[0076] 3. The robot places the substrate on the support column 225. The first sensor 226 detects the substrate and sends a signal to the signal processing unit after a delay of 0.1 second. After the signal processing unit receives the signal sent by the first sensor 226, the PLC controls the suction cup 209 to suck the substrate. At the same time, the signal processing unit controls the Z-axis cylinder 265 to work. The Z-axis cylinder 265 drives the working arm 261, the suction cup 209 and the substrate to move upward to a predetermined position and then stops. Then the signal processing unit controls the detector 213 to move horizontally until it can detect the edge of the substrate and stops. At this time, the signal processing unit controls the θ motor 264 to drive the working arm 261, the suction cup 209 and the substrate to rotate one circle. After one circle, the θ motor 65 stops working and the detector 213 The measured substrate offset and the offset signal is transmitted to the signal processing unit; after receiving the signal, the signal processing unit controls the suction cup 209 to stop working and controls the first positioning clamping mechanism 231 and the second positioning clamping mechanism 232 to stop moving after reaching the predetermined position through the electromagnetic valve according to the offset of the substrate. The signal processing unit then controls the second auxiliary clamping mechanism 242 to approach the substrate through the electromagnetic valve. When the force applied to the second auxiliary clamping block 244 on the fourth cylinder 282 exceeds a certain set value, the limit sensor in the second auxiliary clamping block 244 works, and the limit sensor transmits a signal to the signal processing unit. After receiving the signal from the limit sensor, the signal processing unit controls the second auxiliary clamping mechanism 242 to stop moving through the electromagnetic valve. At this time, the signal processing unit controls the suction cup 209 to suck the substrate, and then the signal processing unit controls the Z-direction cylinder 265 to drive the working arm 261, the suction cup 209 and the substrate to reset, so that the substrate is placed on the support column 225. At this time, the pre-alignment process is completed.

[0077] 4. The robot places the substrate on the support column 225. The first sensor 226 detects the substrate and sends a signal to the signal processing unit after a delay of 0.1 seconds. After receiving the signal sent by the first sensor 226, the signal processing unit controls the suction cup 209 to suck the substrate. At the same time, the signal processing unit controls the Z-direction cylinder 265 to work. The Z-direction cylinder 265 The working arm 261, the suction cup 209 and the substrate are driven to move upward to a predetermined position and then stop moving; then the signal processing unit controls the X-direction motor 262 to work, and the X-direction motor 262 drives the working arm 261, the suction cup 209 and the substrate to move horizontally. When the edge of the substrate moves into the sensing range of the detector 213, the detector 213 transmits a signal to the signal processing unit. After receiving the signal transmitted by the detector 213, the signal processing unit controls the X-direction motor 262 to stop working. At the same time, the signal processing unit controls the θ motor 264 to drive the working arm 261, the suction cup 209 and the substrate to rotate for one circle. After rotating for one circle, the θ motor 264 stops working. The detector 213 measures the substrate offset and transmits the offset signal to the signal processing unit; after receiving the signal, the signal processing unit controls the X-direction motor 262, the Y-direction motor 263 and the Z-direction cylinder 265 according to the offset of the substrate. The working arm 261, the suction cup 209 and the substrate are driven to move on the X, Y and Z axes until the substrate moves to the corrected position. Finally, the signal processing unit controls the suction cup 209, the X-axis motor 262, the Y-axis motor 263 and the Z-axis cylinder 265 to stop working. At this point, the pre-alignment process is completed.

[0078] The signal processing unit controls the manipulator 300 to carry the pre-aligned substrate to the stage 160 or the standard sheet stage 170 of the detection platform 140. If the substrate loaded is of standard size, it can be placed on the stage 160 or the standard sheet stage 170. If the substrate loaded is not of standard size, it is placed on the stage 160. The signal processing unit controls the vacuum device on the detection platform 140 to vacuum the adsorption area adapted to the size / shape of the substrate to be tested, and adsorbs and fixes the screen substrate to be tested placed on the adsorption area. After fixing the substrate to be tested, the signal processing unit controls the driving component of the detection platform 140 to drive the detection platform 140 to move in the X / Y direction, so that the entire substrate is detected by the detection head 130. It can also be that the detection head 130 and the detection platform 140 move at the same time, the detection platform 140 moves in the X direction, and the detection head moves in the Y direction. The simultaneous motion detection efficiency is higher, and the movement mode can be selected according to the size and shape of the substrate. After the detection is completed, the signal processing unit controls the manipulator 300. The substrate that has been inspected is transferred from the stage 160 to the substrate cassette 430 to complete the inspection of one substrate.

[0079] The above implementation modes are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary engineering and technical personnel in the field shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A backlight detection / measurement stage for a ULED screen substrate detection / measurement device, characterized in that: The invention comprises an upper structure plate (161) and a lower structure plate (162), wherein the upper structure plate (161) and the lower structure plate (162) are made of transparent hard materials, wherein the upper structure plate (161) comprises at least one adsorption plate (1611), wherein the adsorption plate (1611) is divided into three adsorption areas (163), wherein each adsorption area (163) is provided with an adsorption hole (164), wherein the adsorption hole (164) passes through the adsorption plate (1611), wherein the adsorption holes (164) are distributed with a predetermined size and interval, wherein a plurality of downwardly directed air grooves (1621) are provided on the upper side of the lower structure plate (162), wherein the downwardly directed air grooves (1621) correspond to and are connected to the adsorption holes (164), wherein an air extraction hole (166) is provided on the side of the lower structure plate (162), wherein the air extraction hole (166) is provided on the side of the lower structure plate (162). The air holes (166) are connected to the sinking air grooves (1621); the adsorption holes (164) are distributed in a rectangular array or a circular array; the lower structure plate (162) is provided with two groups of symmetrical sinking air grooves (1621) toward the upper side, each group includes 7 sinking air grooves (1621), the sinking air grooves (1621) have three different lengths, namely, long sinking air grooves, medium sinking air grooves and short sinking air grooves, the bottom surface of the sinking air grooves (1621) is polished, the side surface of the sinking air grooves (1621) is a vertical vertical surface, and the bottom surface is a horizontal surface, the adsorption holes (164) are circular or square, and the four corners of the lower structure plate (162) are respectively provided with mounting holes (165), and the mounting holes (165) pass through the lower structure plate (162); All the sinking air grooves are divided into three areas, the first area includes a long sinking air groove and a middle sinking air groove, the long sinking air groove is located above the middle sinking air groove, the third area is symmetrically arranged with the first area, the third area also includes a long sinking air groove and a middle sinking air groove, the first area and the third area are respectively located at the head and tail ends of the lower structure plate (162), the second area includes two long sinking air grooves and a short sinking air groove, the short sinking air groove is located in the middle of the two sinking air grooves, the second area is located in the middle position of the lower structure plate (162), the short sinking air groove is connected to the adsorption hole of the third adsorption zone, the middle sinking air groove is connected to the adsorption hole of the second adsorption zone, the long sinking air groove is connected to the adsorption hole of the first adsorption zone, and each sinking air groove is connected to an air extraction hole (166); The opening and closing states of the adsorption holes (164) are controlled by adopting a pipeline branching method: the air extraction holes (166) connected to the sinking gas grooves corresponding to the adsorption holes (164) of each adsorption area (163) are connected to three pipelines, each pipeline is equipped with a control valve, which is divided into a first control valve, a second control valve and a third control valve, and the three pipelines are combined into a main pipeline, and the main pipeline is provided with a main control valve; when the smallest size substrate is adsorbed, only the adsorption holes of the first adsorption area are effective, and the adsorption holes of the second adsorption area and the third adsorption area are all closed, so the first control valve is opened and the other two control valves are closed; when the second smallest size substrate is adsorbed, the first and second control valves are opened, and the third control valve hole is closed; when the largest size substrate is adsorbed, the adsorption holes (164) of the three adsorption areas (163) are all started, and all the control valves are opened, so that the opening and closing states of the adsorption holes (164) can be better controlled to meet different working requirements.

2. According to claim 1, a backlight detection / measurement stage of a ULED screen substrate detection / measurement device is characterized in that: The upper structure plate (161) and the lower structure plate (162) are bonded together using shadowless adhesive.

3. The backlight detection / measurement stage of the ULED screen substrate detection / measurement device according to claim 1, characterized in that: An annular sealing groove (167) is formed on the outer side of the downward gas groove (1621), and a sealing ring is arranged in the annular sealing groove (167).

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