Sheet longitudinal transport trolley and vapor deposition equipment

Abstract

The present invention discloses a sheet longitudinal transport trolley and a vapor deposition device, wherein the transport trolley includes a high, narrow and longitudinally easy-to-tumble vehicle body, the vehicle body is provided with at least one set of limit blocks and locks, a set of limit blocks and locks cooperate with the vehicle body to form a space in which the sheet can be placed longitudinally and the sheet is limited on the vehicle body; the vehicle body is longitudinally placed on a row of guide rollers and driven to move by the guide rollers, a row of guide rollers are rotatably arranged on a wheel seat and connected to a power mechanism that drives them to rotate, and the vehicle body is kept in an aligned state by magnetic adsorption. This solution maintains the alignment of the trolley through a high, narrow vehicle body structure and magnetic adsorption, which can not only reduce the horizontal space of the equipment cavity, but also fully shorten the opening and closing time and opening width of the valve, thereby effectively improving the processing efficiency and avoiding gas exchange between different cavities, and can also reduce impurities and dust falling on the workpiece, which is beneficial to improving the deposition quality.

Description

Technical Field

[0001] The invention relates to the field of vapor deposition equipment, in particular to a sheet longitudinal transport trolley and vapor deposition equipment. Background Art

[0002] Vapor deposition technology utilizes physical and chemical processes occurring in the gas phase to form functional or decorative metal, non-metal or compound coatings on the surface of workpieces.

[0003] When performing vapor deposition, it is sometimes necessary to place the workpiece on a jig and move it between different chambers. For some sheet-like workpieces, if they are placed flat on the jig, they occupy a large horizontal space, which means that the deposition chamber must be large enough to effectively place the material.

[0004] At the same time, when the workpiece moves from one cavity to another, a workpiece that is too wide will require the valves between the cavities to open enough space to pass through. On the one hand, the time loss of valve opening and closing is long, which is not conducive to improving processing efficiency. On the other hand, due to the large valve opening area, this causes a large amount of gas exchange between different cavities, affecting the gas environment in different cavities and affecting the deposition effect in different cavities.

[0005] In addition, when the workpiece is placed in a flat manner, dust, impurities, etc. will fall on the surface of the workpiece during the deposition process, affecting the deposition quality. Summary of the invention

[0006] The purpose of the present invention is to solve the above-mentioned problems existing in the prior art and to provide a sheet longitudinal transport trolley and vapor deposition equipment that transport workpieces in a longitudinal manner instead of a flat manner.

[0007] The purpose of the present invention is achieved through the following technical solutions:

[0008] A trolley for transporting longitudinal sheets comprises a high, narrow and easily tippable trolley body, at least one side of the trolley body being provided with at least one set of limit blocks and locks, a set of the limit blocks and locks cooperating with the trolley body forming a space for longitudinally placing sheets and limiting the sheets on the trolley body; the trolley body is longitudinally placed on a row of guide rollers and driven to move by the guide rollers, a row of the guide rollers being rotatably arranged on a wheel seat and connected to a power mechanism for driving them to rotate, and the trolley body is kept in an aligned state by magnetic force.

[0009] Preferably, in the sheet material longitudinal transport trolley, the limit block is arranged at a limit plane recessed on a side surface of the trolley body, and comprises a triangular platform and a connecting portion, the inclined surface of the triangular platform faces the limit plane and its upper apex angle and inner apex angle are rounded, and the inner apex angle maintains a gap with the limit plane.

[0010] Preferably, in the sheet material longitudinal transport trolley, a pick-up and release groove extending to the limit plane is recessed on the side of the trolley body, the depth of the pick-up and release groove is greater than the depth of the limit plane, and the pick-up and release groove is located above the limit block.

[0011] Preferably, in the longitudinal sheet transport trolley, the lock includes a connecting pin with a fixed position, a rotating seat that can rotate relative to the connecting pin is coaxially sleeved on its outer periphery, a torsion spring is provided between the rotating seat and the connecting pin to reset the rotating seat after being rotated by external force, the rotating seat is provided with a horizontal baffle extending to the outside, and a limiting column that can move up and down relative to the horizontal baffle is vertically provided at the front end of the horizontal baffle.

[0012] Preferably, in the sheet material longitudinal transport trolley, the lock comprises a sleeve, a floating pin is inserted and limited in the sleeve, a spring is arranged between the inner end surface of the floating pin and the inner limit platform of the sleeve, and the head end of the floating pin normally extends out of the sleeve and into the limit plane and maintains a gap with the limit plane.

[0013] Preferably, in the sheet material longitudinal transport trolley, the bottom of the trolley body is provided with a sliding shaft, and the sliding shaft is limited in a limiting groove of the cylindrical surface of the guide roller.

[0014] Preferably, in the sheet longitudinal transport trolley, the power mechanism includes a power source, the power source is connected to a rotating shaft where a guide roller is located, and the rotating shafts where adjacent guide rollers are located are connected through a transmission mechanism consisting of a belt and a pulley or a chain and a sprocket.

[0015] Preferably, in the sheet material longitudinal transport trolley, a row of first magnets is disposed on the top of the trolley body, and a row of second magnets having magnetic poles opposite to those of the first magnets is suspended above the trolley body.

[0016] Preferably, in the sheet material longitudinal transport trolley, the second magnet is arranged on a mounting bar, guide plates are respectively arranged on both sides of the mounting bar, the first magnet is located between the two guide plates, and a gap is maintained between the fixing seat where the first magnet is located and the two guide plates.

[0017] A vapor deposition device comprises any of the above-mentioned longitudinal sheet transport trolleys, wherein the longitudinal sheet transport trolley is powered.

[0018] The advantages of the technical solution of the present invention are mainly reflected in:

[0019] This solution is ingeniously designed. By setting up a high and narrow body structure and maintaining the trolley in an upright state through magnetic adsorption during the movement of the trolley, the sheets are transported in a longitudinal manner instead of lying flat, which changes the conventional transportation method. On the one hand, it can effectively reduce the horizontal space of the equipment cavity. At the same time, the high and narrow body structure can fully shorten the opening and closing time and opening width of the valves between the cavities, thereby effectively improving the processing efficiency and avoiding gas exchange between different cavities, ensuring the deposition quality; on the other hand, it can reduce impurities and dust falling on the workpiece, which is conducive to improving the deposition quality.

[0020] This solution uses a limit block and a lock to effectively place the sheet longitudinally on the vehicle body. Combined with the pick-and-place groove, the workpiece pick-and-place operation can be conveniently performed; and the structural design of the vehicle body can meet the requirements of single-sided or double-sided deposition of multiple workpieces at the same time.

[0021] The lock adopts a floating pin structure to speed up the pick-up and placement of sheets, and adopts a knob structure to reduce the contact between the lock and the workpiece during the pick-up and placement process to avoid damage to the workpiece.

[0022] The guide plate structure can effectively limit the tipping of the vehicle body, and prevent the vehicle body from tipping over without limit when the magnetic adsorption is not strong, so that the effective distance between the first magnet and the second magnet can be maintained so that the vehicle body can be restored to the straightened state through magnetic adsorption. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] FIG1 is a perspective view of a longitudinal sheet transport trolley of the present invention;

[0024] FIG2 is a side view of the longitudinal sheet transport trolley of the present invention;

[0025] 3 is a front view of the longitudinal sheet transport trolley of the present invention;

[0026] Figure 4 It is a three-dimensional diagram of the limit block of the sheet material longitudinal transport trolley of the present invention;

[0027] Figure 5 is a cross-sectional view of a first embodiment of a lock buckle of a sheet material longitudinal transport trolley of the present invention;

[0028] Figure 6 is a cross-sectional view of a second embodiment of the lock of the sheet material longitudinal transport trolley of the present invention;

[0029] Figure 7 It is a three-dimensional view of the sliding shaft of the sheet longitudinal transport trolley of the present invention;

[0030] Figure 8 yes Figure 2 A magnified image of area A;

[0031] Fig. 9 is a top view of the sheet material longitudinal transport trolley of the present invention;

[0032] Fig.10 yes Figure 2 Enlarged view of area B;

[0033] Fig.11 It is a diagram of the second magnet area of ​​the longitudinal sheet transport vehicle of the present invention. DETAILED DESCRIPTION

[0034] The purpose, advantages and features of the present invention will be illustrated and explained by the non-limiting description of the following preferred embodiments. These embodiments are only typical examples of the application of the technical solution of the present invention, and any technical solution formed by equivalent replacement or equivalent transformation falls within the scope of protection claimed by the present invention.

[0035] In the description of the scheme, it should be noted that the terms "center", "up", "down", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of description and simplified description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Moreover, in the description of the scheme, with the operator as a reference, the direction close to the operator is the proximal end, and the direction away from the operator is the distal end.

[0036] The sheet material longitudinal transport trolley disclosed by the present invention is described below in conjunction with the accompanying drawings. Figure 1 , Attachment Figure 2 As shown, it includes a vehicle body 1 which is high, narrow and easy to tip over when placed longitudinally. At least one side of the vehicle body 1 is provided with at least one set of limit blocks 2 and lock buckles 3. A set of limit blocks 2 and lock buckles 3 cooperate with the vehicle body 1 to form a space in which a sheet can be placed longitudinally and the sheet can be limited on the vehicle body 1; the vehicle body 1 is longitudinally placed on a row of guide rollers 4 and is driven to move by the guide rollers 4. A row of the guide rollers 4 is rotatably arranged on a wheel seat 5 and connected to a power mechanism 6 that drives them to rotate. The vehicle body 1 is kept in a straightened state by magnetic adsorption.

[0037] Specifically, as shown in the attached Figure 1 , Attachment Figure 3As shown, the vehicle body 1 includes a rectangular outer frame 12, the ratio of the height to the thickness of the rectangular outer frame 12 is not less than 10:1, a cross-shaped bracket 13 is arranged in the rectangular outer frame 12, and the hollow area of ​​the rectangular outer frame 12 is divided into four rectangular spaces 122, at least one side 131 of the cross-shaped bracket 13 is lower than the corresponding side 121 of the rectangular outer frame 12, preferably, both side surfaces 131 of the cross-shaped bracket 13 are lower than both side surfaces 121 of the rectangular outer frame 12, and at least one side surface 121 of the rectangular outer frame is formed with a circle of planes 122 lower than the rectangular outer wide side surface 121 in the area close to the hollow area, the plane 122 is flush with the side surface 131 of the cross-shaped bracket 13, and the plane 122 and the side surface 131 of the cross-shaped bracket constitute a limiting plane 11.

[0038] As attached Figure 1 As shown, the limit block 2 is used to support the lower part of the sheet material, and is arranged at a limit plane 11 recessed on one side of the vehicle body 1, specifically, at the lower part of each rectangular space 122, as shown in the attached Figure 4 As shown, it includes a triangular platform 21 and a connecting portion 22, wherein the inclined surface 211 of the triangular platform 21 faces the limiting plane 11 and its upper vertex angle 212 and inner vertex angle 213 are rounded, and the inner vertex angle 213 maintains a gap with the limiting plane 11, and the inclined surface 211 of the triangular platform 21 can effectively guide the sheet when placing the sheet, and the gap between the triangular platform 21 and the limiting plane 11 can effectively accommodate the sheet, and the triangular platform 21 can limit the lower part of the sheet, and at the same time, the arc structure of the upper vertex angle 212 and the inner vertex angle 213 can provide certain protection for the sheet.

[0039] A pick-up and placement groove 14 extending to the limiting plane 11 is recessed on the side of the vehicle body 1. The depth of the pick-up and placement groove 14 is greater than the depth of the limiting plane 11, and the pick-up and placement groove 14 is located above the limiting block 2. The pick-up and placement groove 14 is used to provide a working space for manual operation when placing sheets.

[0040] The lock buckle 3 blocks the sheet through a portion that can extend into the width of the sheet, thereby preventing the sheet from falling off the limiting block 2; the lock buckle 3 is arranged above the limiting block 2 corresponding to each rectangular space 122, and at least one lock buckle 3 is arranged on both sides and the upper side of each rectangular space.

[0041] The lock buckle 3 can be of various known structures. In one embodiment, as shown in the attached Figure 5As shown, the lock buckle 3 includes a sleeve 31, in which a floating pin 32 is inserted and limited, and a spring 33 is arranged between the inner end surface of the floating pin 32 and the inner limit platform of the sleeve 31. The head end of the floating pin 32 normally extends out of the sleeve 31 and extends into the limit plane 11 and maintains a gap with the limit plane. When a sheet is placed, the floating pin 32 is squeezed by the sheet and retracted into the sleeve 31, so that when the sheet passes through the floating pin 32, the floating pin 32 is reset to block the sheet.

[0042] In another embodiment, as shown in the attached Figure 6 As shown, the lock buckle 3 includes a connecting pin 310 fixed to the vehicle body 1 and perpendicular to its side surface, a rotating seat 320 that can rotate relative to the connecting pin 310 is coaxially sleeved on the outer periphery of the connecting pin 310, the lower area of ​​the inner hole wall of the rotating seat 320 is in contact with the outer side wall of the connecting pin 310, and a small gap is maintained between the lower area of ​​the inner hole wall of the rotating seat 320 and the outer side wall of the connecting pin 310, and a torsion spring 330 sleeved on the outer periphery of the connecting pin 310 is arranged in the gap between them, one end of the torsion spring 330 is fixed to the connecting pin 310, and the other end is fixed to the rotating seat 320, and the torsion spring 330 resets the rotating seat 320 after being rotated by an external force; A horizontal baffle 340 extending to the outside of the swivel seat 320 is provided, and under normal conditions, the torsion spring 330 extends the horizontal baffle 340 into the rectangular space 122, and a limiting column 350 which can move up and down relative to the horizontal baffle 340 is vertically provided at the front end of the horizontal baffle 340. For example, the limiting column 350 can be screwed to the horizontal baffle 340, or the limiting column can be slidably inserted into the limiting hole on the horizontal baffle 340, and the limiting column 350 can be a bolt-shaped column, and its head 3501 is located below the horizontal baffle 340. This structure can effectively prevent the limiting column 350 from withdrawing from the positioning hole of the horizontal baffle 340.

[0043] When the lock buckle 3 of this structure is adopted, as shown in the attached Figure 3 As shown, a limiting groove 19 corresponding to each lock buckle 3 is formed on the side of the vehicle body 1 for limiting the limiting column 350. When the limiting column 350 is located in the limiting groove 19, the horizontal baffle 340 is located outside the rectangular space 122. When the limiting column is moved upward so that the bottom of the limiting column 350 is higher than the top surface of the limiting groove 19 where it is located, the rotating seat 320 is no longer restricted by the limiting column 350 and rotates under the reaction force of the torsion spring 330, thereby causing the horizontal baffle 340 to rotate into the rectangular space 122.

[0044] During deposition, if only one side of the vehicle body is placed with a sheet, deposition can be performed on both sides of the sheet at the same time. If only one side of a sheet needs to be deposited, such as the attached Figure 4 As shown, a cover plate 18 covering the hollow area thereon is bolted to the other side of the vehicle body 1 relative to the mounting lock 3, so that when only one side of the sheet needs to be processed, the other side of the sheet is shielded; of course, the limit block 2 and the lock 3 can also be set on both sides of the vehicle body, so that the sheets can be placed on both sides of the vehicle body 1, thereby improving the processing efficiency.

[0045] As attached Figure 3 , Attachment Figure 7 As shown, a connecting plate 16 is provided at the bottom of the vehicle body 1, and a sliding shaft 15 is installed at the bottom of the connecting plate 16. The sliding shaft 15 is preferably a cylinder, and its two ends are frustum-shaped 153, so that when it slides onto each guide roller 4, it can avoid the end face of the sliding shaft 15 from contacting the guide roller 4 due to installation position deviation, etc., to ensure smooth sliding. A row of connecting planes 151 are formed on the sliding shaft 15, and each of the connecting planes 151 is provided with a screw hole 152. The sliding shaft 15 is connected to the connecting plate 16 through a group of U-shaped connecting members 17 connected to the connecting planes 151. The U-shaped connecting member 17 is connected to the screw hole 152 by bolts passing through its bottom plate and is connected to the connecting plate 16 through its two side plates.

[0046] As attached Figure 8 As shown, the sliding shaft 15 is limited in the conveying groove 41 of the cylindrical surface of the guide roller 4. Preferably, the conveying groove 41 is an arc shape with the same curvature as the rolling shaft 15. Of course, in other embodiments, the sliding shaft 15 can also be a rectangular column or a regular polyhedral column, and the conveying groove 41 is a corresponding structure. In addition, the number and extension length of the guide roller 4 can be designed according to the actual required movement stroke, which is not the design point of this solution and will not be elaborated here.

[0047] Further, as attached Figure 8 , Attachment Fig. 9As shown, the power mechanism 6 includes a power source (not shown in the figure), which can be a device such as a motor or a rotary cylinder, or a mechanism composed of a motor and a transmission structure such as a belt + pulley. The power source is connected to a rotating shaft 61 where a guide roller 4 is located, and the rotating shafts 61 where adjacent guide rollers 4 are located are connected through a transmission mechanism composed of a belt and a pulley or a chain and a sprocket. Specifically, the rotating shaft 61 where each guide roller 4 is located can be rotatably mounted on the wheel seat 5, and each rotating shaft 61 is connected to a transmission shaft 63 through a coupling or an expansion sleeve 62. The use of a coupling or an expansion sleeve can effectively prevent the power source from being damaged when the wall rotating shaft is overloaded; two pulleys 64 are mounted on the transmission shaft 63, and the pulley 64 is a winding disc type, and the circumferential surface of its main shaft is serrated. The pulleys 64 corresponding to adjacent guide rollers 4 are connected through a belt 65, and the inner surface of the belt 65 has teeth meshing with the serrated circumferential surface of the pulley.

[0048] Since the vehicle body 1 is very easy to fall down when sliding along the guide roller 4, it is difficult to ensure the straightened state, that is, the vehicle body 1 cannot be kept vertical to the horizontal plane. Therefore, in order to avoid the falling down, as shown in the attached Fig.10 As shown, a row of first magnets 7 is arranged on the top of the vehicle body 1, and a row of second magnets 8 with magnetic poles opposite to those of the first magnets 7 is suspended above the vehicle body 1. Therefore, the magnetic force of the first magnets 7 and the second magnets 8 can make them attract each other, so that the vehicle body 1 can be kept in an upright state during the movement without tipping over through magnetic attraction.

[0049] Specifically, as shown in the attached Fig.10 , Attachment Fig.11 As shown, the first magnet 7 is arranged on a fixing seat 20, and the fixing seat 20 is fixed to the top of the vehicle body 1 through a group of support columns 30. A mounting groove 201 is formed on the fixing seat 20. The first magnet 7 is multiple and is installed in the mounting groove 201. Specifically, it can be fixed by gluing or screwing.

[0050] The second magnet 8 is arranged on a mounting bar 9, and can be fixed by gluing or screwing. A receiving groove 91 for placing the second magnet 8 is formed on the mounting bar 9, and guide plates 10 are respectively arranged on both sides of the mounting bar 9. The guide plates 10 are connected to the mounting bar 9 through a connecting block 40 located in the receiving groove 91 and bolts, and both ends of each mounting bar 9 are blocked by a connecting block 40; a row of connectors 50 for connecting to an external structure are arranged on the top of the mounting bar 9.

[0051] As attached Fig.10 , Attachment Fig.11As shown, the fixing seat 20 is located between the two guide plates 10, so that the first magnet 7 is located between the two guide plates 10, and the fixing seat 20 maintains a gap of 60 with the two guide plates 10. Therefore, even if the vehicle body 1 tilts, due to the limitation of the guide plates 10, the vehicle body 1 cannot continue to tilt, thereby preventing the vehicle body 1 from completely tipping over to ensure the smooth movement of the vehicle body 1.

[0052] Of course, in other embodiments, in addition to using magnets with opposite magnetic poles to attract each other to prevent the vehicle body from tipping over, in other embodiments, magnets with the same magnetic poles can be used to repel each other to prevent the vehicle body from tipping over. Specifically, at least one row of magnets are provided on both sides of the vehicle body, and magnets with the same magnetic poles as the magnets are provided on both sides of the vehicle body 1, so that the vehicle body can be kept in a straightened state through the repulsive force of the magnets. However, this structure increases the number of magnets to be installed, and the installation of magnets on both sides is relatively difficult to achieve.

[0053] During operation, the sheet is first placed on the limit block 2 and locked by the lock, and then the power source is started to drive the guide rollers 4 to rotate synchronously in the same direction, so that the guide rollers 4 drive the sliding shaft 13 to move. During the movement process, the mutual magnetic attraction force between the first magnet 7 and the second magnet 8 keeps the vehicle body 1 in a straightened state, thereby effectively moving.

[0054] The present scheme further discloses a vapor deposition device, including the above-mentioned longitudinal sheet transport trolley. The longitudinal sheet transport trolley is powered on during deposition. Therefore, in order to avoid the current on it being transmitted to the shell of the vapor deposition device through the wheels and the power mechanism to cause leakage, an insulating material is used in the contact area between the sliding shaft 15 and the guide roller 4 to achieve current blocking. Specifically, for example, the sliding shaft 15 and / or the guide roller 4 can be made of insulating material, or an insulating coating can be applied in the area where they contact.

[0055] The specific grounding method is to arrange a conductive spring in each cavity of the vapor deposition equipment, and the conductive spring is connected to electricity. When the longitudinal sheet transport trolley contacts the conductive spring in the cavity, conductivity can be achieved. The use of this structure not only ensures the power supply requirements during deposition, but also effectively avoids the interference between the wire and the movement of the trolley compared to the power supply method using wires, which is more flexible and convenient.

[0056] There are many implementation methods of the present invention, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of the present invention.

Claims

1. A vapor deposition apparatus, characterized in that: The invention comprises a sheet material longitudinal transport trolley, the sheet material longitudinal transport trolley comprising a trolley body (1) which is high and narrow and is easy to tip over when placed longitudinally, at least one side of the trolley body (1) is provided with at least one set of limit blocks (2) and lock buckles (3), a set of limit blocks (2) and lock buckles (3) cooperate with the trolley body (1) to form a space in which sheets can be placed longitudinally and the sheets can be limited on the trolley body (1); the trolley body (1) is longitudinally placed on a row of guide rollers (4) and is driven to move by the guide rollers (4), a row of the guide rollers (4) is rotatably arranged on a wheel seat (5) and is connected to a power mechanism (6) for driving them to rotate, and the trolley body (1) is kept in an aligned state by magnetic force; The lock buckle (3) comprises a fixed connection pin (310), a rotating seat (320) which can rotate relative to the connecting pin (310) is coaxially sleeved on the outer periphery of the connecting pin (310), a torsion spring (330) is arranged between the rotating seat (320) and the connecting pin (310) to reset the rotating seat after being rotated by an external force, a horizontal baffle (340) extending to the outside of the rotating seat (320) is arranged on the rotating seat (320), and a limiting column (350) which can move up and down relative to the horizontal baffle (340) is vertically arranged at the front end of the horizontal baffle (340); A limiting groove (19) corresponding to each locking buckle (3) and used to limit the limiting column (350) is formed on the side surface of the vehicle body (1); when the limiting column (350) is located in the limiting groove (19), the horizontal baffle (340) is located outside the rectangular space (122) of the rectangular outer frame; when the bottom of the limiting column (350) is higher than the top surface of the limiting groove (19) in which it is located, the rotating seat (320) rotates under the reaction force of the torsion spring (330) to rotate the horizontal baffle (340) into the rectangular space (122); The bottom of the vehicle body (1) is provided with a sliding shaft (15), and the sliding shaft (15) is located in a conveying groove (41) on the cylindrical surface of the guide roller (4); The sheet longitudinal transport trolley is powered during deposition; Insulating material is used in the contact area between the sliding shaft (15) and the guide roller (4) to achieve current blocking; a conductive spring is arranged in each cavity of the vapor deposition equipment, the conductive spring is connected to electricity, and conduction is achieved when the sheet longitudinal transport trolley contacts the conductive spring in the cavity; A row of first magnets (7) is arranged on the top of the vehicle body (1), and a row of second magnets (8) having magnetic poles opposite to those of the first magnets (7) is suspended above the vehicle body (1); The second magnet (8) is arranged on a mounting bar (9), guide plates (10) are respectively arranged on both sides of the mounting bar (9), the first magnet (7) is located between the two guide plates (10), and a gap is maintained between the fixing seat (20) where the first magnet (7) is located and the two guide plates (10).

2. The vapor deposition apparatus according to claim 1, characterized in that: The limit block (2) is arranged at a limit plane (11) recessed on a side surface of the vehicle body (1), and comprises a triangular platform (21) and a connecting portion (22); the inclined surface (211) of the triangular platform (21) faces the limit plane (11), and the upper vertex (212) and the inner vertex (213) thereof are rounded, and a gap is maintained between the inner vertex (213) and the limit plane (11).

3. The vapor deposition apparatus according to claim 2, characterized in that: A pick-up and release groove (14) extending to the limiting plane (11) is recessed on the side of the vehicle body (1), the depth of the pick-up and release groove (14) is greater than the depth of the limiting plane (11), and the pick-up and release groove (14) is located above the limiting block (2).

4. The vapor deposition apparatus according to claim 1, characterized in that: The power mechanism (6) comprises a power source, the power source being connected to a rotating shaft (61) on which a guide roller (4) is located, and the rotating shafts (61) on which adjacent guide rollers (4) are located are connected via a transmission mechanism consisting of a belt and a pulley or a chain and a sprocket.

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