Robotic drive with passive rotor

Abstract

A substrate conveying device includes a driving part and a first movable arm assembly. The driving part includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate conveying device is configured so that the first movable arm assembly can be positioned in a vacuum chamber, and the passive rotor is in communication with the environment inside the vacuum chamber.

Description

[0001] This application is a divisional application of the Chinese patent application with application number 201610105805.1, application date September 14, 2012, divisional filing date February 25, 2016, and titled “Robot drive with passive rotor”. Technical Field

[0002] The exemplary and non-limiting embodiments relate generally to robotic drives and, more particularly, to drives having passive rotors. Background Art

[0003] Conventional manufacturing techniques for semiconductor integrated circuits and flat panel displays typically include processing silicon wafers and glass panels, commonly referred to as substrates, by fully automated combination tooling. A typical combination tool may include a vacuum chamber with a load lock and a processing unit. This tool is typically served by a robotic manipulator (robot or substrate transfer device) that cycles the substrate from the load lock through the processing unit and back to the load lock. Another robot may be positioned in an atmospheric transfer unit that serves as an interface between the load lock of the vacuum chamber and a standard load port served by an external transfer system. Summary of the invention

[0004] The following summary is intended to be illustrative only. The summary is not intended to limit the scope of the claims.

[0005] According to one aspect, an example substrate transfer device is provided, comprising: a driving portion including a first motor, wherein the first motor includes a stator and a passive rotor; and a first movable arm assembly connected to the first motor. The substrate transfer device is configured so that the first movable arm assembly can be positioned in a vacuum chamber, and the passive rotor is in communication with an environment inside the vacuum chamber.

[0006] According to another aspect, an example method includes providing a substrate transfer apparatus including a drive portion and a first movable arm assembly connected to the drive portion, wherein the drive portion includes a motor including a stator and a passive rotor; and connecting the substrate transfer apparatus to a vacuum chamber, wherein the first movable arm assembly is positioned in the vacuum chamber and the passive rotor is in communication with an environment inside the vacuum chamber.

[0007] According to another aspect, an example substrate transfer apparatus includes: a drive portion including a first motor, wherein the first motor includes a stator and a passive rotor; a first movable arm assembly connected to the first motor; and a gas barrier positioned in a gap between the stator and the passive rotor to separate an environment at the passive rotor from an environment at the stator. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The above aspects and other features are described in the following description in conjunction with the accompanying drawings, in which:

[0009] Figure 1 is a schematic cross-sectional view of an example device;

[0010] Figure 2 is a schematic diagram of a feed-through;

[0011] Figure 3A is a schematic diagram of another feed-through;

[0012] Figure 3B is a schematic diagram of another feed-through;

[0013] Figure 3C is a schematic diagram of another feed-through;

[0014] Figure 3D is a schematic diagram of another feed-through;

[0015] Figure 4 is a schematic diagram of the read head connected to the housing;

[0016] Figure 5 is a schematic diagram of another example of a read head connected to a housing;

[0017] Figure 6 is a schematic diagram of another example of a read head connected to a housing;

[0018] Figure 7 is a schematic diagram of another example of a read head connected to a housing;

[0019] Figure 8 and Fig. 9 is a schematic diagram of another example of a read head connected to a housing;

[0020] Fig.10 and Fig.11 is a schematic diagram of another example of a read head connected to a housing;

[0021] Figure 12-Figure 19 is a schematic diagram of a multiple partition wall configuration;

[0022] Figure 20-23 is a schematic diagram of a plurality of stator and rotor combinations with a stator package;

[0023] Fig.24 An electric machine with a radial field arrangement is shown;

[0024] Fig.25 A hybrid motor design with a toothed passive rotor is shown, with stator phase A separated from stator phase B by ring permanent magnets;

[0025] Fig.26 A motor having an axial field design is shown;

[0026] Fig. 27 A motor having a brushless design with a passive rotor is shown;

[0027] Figure 28-Figure 29 An electric machine having a passive rotor with teeth is shown;

[0028] Figure 30-Figure 31 An electric machine having a passive rotor with teeth is shown;

[0029] Figure 32-Figure 33 An electric machine having a passive rotor with teeth is shown;

[0030] Figure 34-Figure 35 An electric machine having a toothed passive rotor is shown; and

[0031] Figure 36-Figure 37 An electric machine having a toothed passive rotor is shown. DETAILED DESCRIPTION

[0032] Reference Figure 1 , a schematic diagram of a robotic drive 10 for a substrate transfer device 2 is shown. Although the robotic drive 10 is described with reference to a vacuum robot, any suitable robotic drive (atmospheric or otherwise) having the features disclosed may be provided. The drive 10 may include features as previously disclosed or disclosed herein. In addition to the preferred embodiments or disclosed embodiments, the present invention is capable of other embodiments and of being implemented or performed in a variety of ways. Therefore, it should be understood that the invention is not limited to its application to the details of the construction and the arrangement of components set forth in the following description or described in the accompanying drawings. If only one embodiment is described herein, the claims thereof are not limited to this embodiment. In addition, the claims thereof should not be read restrictively unless there is clear and convincing evidence of certain exclusions, limitations, or waivers.

[0033] Figure 1An example robotic manipulator or device 2 including a vacuum compatible direct drive system according to one or more embodiments of the present invention is shown in FIG. The robotic manipulator can be built around a frame 101, such as an aluminum protrusion suspended from a lug or mounting device 102. Alternatively, the mounting device can be on a side of the frame 101, on the bottom of the frame 101, or the frame 101 can be mounted in any other suitable manner. The frame 101 can include one or more vertical rails 103 with linear bearings 104 to provide guidance for a housing 105 driven by a motor 106 via a ball screw mechanism 107. For simplicity, only one rail 103 is shown. Alternatively, the motor housing 105 can be driven by a linear motor directly attached to the frame 101 or coupled to the frame 101 in any other suitable movable or non-movable manner. As will be described in more detail below, the motor housing 105 can include one, two, three, four or more direct drive units. The housing 105 can accommodate motors 108, 109 equipped with position encoders 110 and 111. Housing 105 is shown as an exemplary structure, wherein, as will be described in greater detail below, housing 105 may have portions configured relative to motors 108, 109 and position encoders 110 and 111. Bellows 120 may be used to accommodate movement of motor 105 along vertical track 103 to separate an environment, such as a vacuum, in which the movable components of motors 108, 109 and encoders 110, 111 operate from an external environment, such as the atmosphere.

[0034] exist Figure 1 In the example of FIG. 1 , two direct drive units are shown, each having one motor and one encoder. However, any suitable number of direct drive units having any suitable number of motors and encoders may be used. Figure 1 As shown in FIG. 2 , an inverting service loop 222 may be used to supply energy to the direct drive unit and facilitate signaling between the direct drive unit and other components of the robotic system, such as a controller 224. Alternatively, a conventional, non-inverting service loop 226 may be used. Figure 1 As shown in , the upper motor 108 can drive a hollow outer shaft 112 connected to a first link 114 of the robot arm. The lower motor 109 can be connected to a coaxial inner shaft 113 that can be coupled to a second link 116 via a belt drive 115. Another belt device 117 can be used to maintain the radial orientation of the third link 118 regardless of the position of the first two links 114 and 116. This can be achieved due to a 1:2 ratio between the pulley included in the first link and the pulley connected to the third link. The third link 118 can form an end effector that can carry a payload 119, such as a semiconductor substrate. It should be noted that the diagram is shown for exemplary purposes only. Figure 1A robotic arm. Any other suitable arm mechanism or drive mechanism may be used alone or in combination. For example, multiple direct drive units according to one or more embodiments of the present invention may be used in a single mechanical manipulator or a mechanical manipulator having multiple manipulators, or in any suitable combination. Here, the units may be stacked in different planes along substantially the same axis of rotation, concentrically positioned in substantially the same plane, arranged in a configuration combining stacking and concentric arrangement, or included in a mechanical manipulator in any other suitable manner.

[0035] A vacuum compatible direct drive system of one or more embodiments of the present invention may include a housing and a radial field motor arrangement having a stator and a rotor, the rotor being arranged adjacent the stator so that it can rotate relative to the stator and interacting with the stator via a magnetic field that is substantially radial relative to the axis of rotation of the rotor. Alternatively, an axial field motor or a combination of radial / axial field motors, or a combination thereof, may be provided. The stator may include a set of windings energized by an appropriate controller based on the relative position of the rotor relative to the stator. The rotor may include a set of permanent magnets having alternating polarity.

[0036] In the illustrated embodiment, the housing can separate an atmospheric type environment on the exterior of the housing from a vacuum or other non-atmospheric environment inside the housing. As will be described, movable components such as an encoder read head or stator can be secured to and / or docked with the housing, for example, the read head or stator can be pressed into the housing or otherwise secured to the housing to eliminate traditional clamping components, and as will be described, can be encapsulated with an appropriate material such as a vacuum compatible epoxy-based potting to limit outgassing of the components to a vacuum or other non-atmospheric environment. Here, the encapsulated components can be in a vacuum, atmosphere, or any suitable environment in which the encapsulation protects the stator from the environment, such as to prevent corrosion, and to facilitate effective heat removal. The encapsulation can also couple the read head or stator to the housing or other components or subcomponents to further secure the device relative to the housing. As will be described with reference to Figure 2 As described, leads to the windings or other active parts of the readhead or the windings of the stator may be routed through openings in the encapsulated sealed housing, thereby eliminating the need for, for example, a separate vacuum feedthrough. Alternatively, the readhead or stator may be clamped, bolted, or attached to the housing in any other suitable manner, and leads from the atmosphere to the windings or other active parts of the readhead or the windings of the stator may be routed through the vacuum feedthrough or through the wall of the housing in any other suitable manner, for example with reference to Figure 3A-3D Described.

[0037] exist Figure 2, a feedthrough 202 is shown docked with a housing 105, wherein the housing 105 can separate a first environment 204 from a second environment 206. The feedthrough 202 can dock with a movable component 208, wherein the movable component 208 can have a movable core 210 and leads 214. As will be described, the movable core 208 can be encapsulated in an enclosure 212, wherein the enclosure 212 can be a coating, an encapsulation, an envelope, or a combination thereof in whole or in part. Alternatively, the enclosure 212 may not be provided. The leads 214 pass through a hole 216 of the housing 105 and are isolated from the housing 105 by a potting or isolating material 218. Here, the material 218 can be the same material as the material 212 or can be separately potted or otherwise isolated, wherein the material 218 can be sealed across a pressure gradient between the environments 204 and 206 or others.

[0038] exist Figure 3A , a feedthrough 224 is shown docked with a housing 105, wherein the housing 105 can separate a first environment 204 from a second environment 206. The feedthrough 224 can dock with a movable component 208', wherein the movable component 208' can have a movable core 210' and a lead 214'. As will be described, the movable core 208' can be encapsulated in an enclosure 212', wherein the enclosure 212' can be a coating, an encapsulation, an envelope, or a combination thereof in whole or in part. Alternatively, the enclosure 212' may not be provided. The lead 214' receives a lead 226 docked with a feedthrough 228, which passes through a hole 216 of the housing 105 and is isolated from the housing 105 by an insulating core 230, wherein the core 230 is sealed 232 to the housing 105. Here the core 230 has a conductive insert 234 hermetically sealed therein, wherein the conductive insert receives the lead 226 on the first environment side 204 and also receives the lead 236 on the second environment side 206. Here, the core 230 in conjunction with the insert 234 can seal across the pressure gradient between the environments 204 and 206 or otherwise. In the disclosed embodiments, the movable components 208, 208' can be any suitable component such as a read head, a winding, or any suitable movable component. Alternatively, the pin (insert 234) can be sealed relative to the housing 105, and the insulating material (core 230) can provide guidance and electrical insulation. Alternatively, the lead 226 and the insert 234 can be a single component, eliminating one connector. As will be described, an expandable feedthrough that can be installed from the outside of the housing 105 can be provided, wherein this design can also accommodate misalignment due to tolerances between features in the housing and features to which the feedthrough is connected in a vacuum.

[0039] exist Figure 3B, a feedthrough 240 is shown docked with a housing 105, wherein the housing 105 can separate a first environment 204 from a second environment 206. Here the feedthrough 240 has an insulating housing 242 and a pin 244. A socket 246 is provided to couple to an electrical connector in a moving part in the environment 204. The pin 244 is shown sealed to the housing 105 by an O-ring seal, wherein the pin 244 has a threaded end to allow coupling to a lug for an electrical connector in the environment 206. The socket 246 has a tapered portion 248 so that inserting the pin 244 into the socket 246 expands the socket 246 so that electrical contact is formed between the pin 244 and the socket 246 when inserted and assembled.

[0040] exist Figure 3C , a feedthrough 240' is shown docked with a housing 105, wherein the housing 105 can separate a first environment 204 from a second environment 206. Here the feedthrough 240' has an insulating housing 242' and a pin 244'. A socket 246' is configured to couple to an electrical connector in a moving part in the environment 204. The pin 244' is shown sealed to the housing 105 by an O-ring seal, wherein the pin 244' has a threaded end to allow coupling to a lug for an electrical connector in the environment 206. The pin 244' has a tapered portion 248' so that after the pin 244' is inserted into the socket 246', rotation of a set of screws moves the inner pin of the pin 244' so that electrical contact is formed between the pin 244' and the socket 246' when assembled.

[0041] exist Figure 3D , a feed-through 240" is shown docked with a housing 105, wherein the housing 105 can separate a first environment 204 from a second environment 206. Here, the feed-through 240" has an insulating housing 242" and a socket 244". A pin 246' is provided to couple to an electrical connector in a movable component in the environment 204. The socket 244" is shown sealed to the housing 105 by an O-ring seal, wherein the socket 244" has a threaded end to allow coupling to a lug for an electrical connector in the environment 206. The socket 244" has a tapered portion 248" such that after the socket 244" is inserted onto the pin 246", rotation of the screw moves the outer sleeve of the socket 244" to compress the socket 244" so that electrical contact is formed between the socket 244" and the pin 246" when assembled.

[0042] In order to determine the angular position of the driven part of the direct drive unit, for example the angular position of the motor rotor relative to the housing, a position encoder may be included in the direct drive unit. Figure 4-7As can be seen in FIG. 1 , the position encoder track can be coupled to the driven portion of the direct drive unit, and the position encoder readhead can be attached to the housing 105 of the direct drive unit. Here, the readhead can be optical, conductive, or any suitable type of readhead for position determination or other purposes.

[0043] In such Figure 4 In one exemplary embodiment seen in FIG. 1 , the readhead may have a housing 252 sealed to the housing 105 using a seal 256 , with movable parts 254 inside the housing that may be entirely within a vacuum or other non-atmospheric environment.

[0044] In such Figure 5 In another exemplary embodiment seen in , the read head may have a housing 252' sealed to the housing 105 using a seal 256, wherein a moving part 254' which may be isolated from a vacuum or other non-atmospheric environment is located inside the housing through the housing 252'.

[0045] In such Figure 6 In another exemplary embodiment as seen in , the read head may have a housing 252" sealed to the housing 105 by a seal 256, wherein a movable component 254" may be partially exposed 258 to a vacuum or other non-atmospheric environment, while another portion 260 of the movable component of the read head may be present in the surrounding atmosphere. In this case, the read head may be positioned in an opening in the housing of the direct drive unit and sealed against the wall of the housing. The seal 256 may be compressible to allow adjustment of the read head relative to the track. Alternatively, an angular contact, axial or radial contact type of seal may be utilized to provide a greater adjustment range. As another alternative, a pleat, diaphragm or bellows may be utilized to allow adjustment of the read head relative to the track.

[0046] In such Figure 7 In one exemplary embodiment seen in FIG. 1 , the read head may have a housing 252'" sealed to the housing 105 by a seal 256, wherein the moving parts 254'" utilize vacuum compatible packaging, including the described packaging alternatives and reinforcements to minimize the risk of outgassing and protect the stator from the environment, such as to prevent corrosion, and to facilitate efficient heat removal, and may be used or may include, for example, two dividing walls 262, 264 to isolate different parts 266, 268 of the read head from one or more environments.

[0047] Figure 8 An exemplary read head mounting arrangement is shown. Fig. 9As can be seen in the , the encoder has a disk 304 rotatably mounted on a shaft 306 and a read head 302 movably mounted relative to the housing 105 and sealed to the housing 105 by a seal 256. The seal 256 here may be an O-ring, a bellows or other suitable seal that provides sufficient radial, axial and angular or other movement of the read head relative to the disk 304 and at the same time maintains a seal such as a vacuum seal. The disk 304 here may be a solid construction made of metal with a pattern of lines or spaces for sensing by the read head 302 or other conductive. The housing 105 has pins 308 corresponding to matching holes and slots of the head 302 so that the head 302 is positively positioned relative to the housing 105 and the disk 304 rotatably mounted therein. Screws 310 secure the head 302 to the housing 105, with three sets of screws 312 allowing the head 302 to be adjusted radially relative to the disk 304 and horizontally or otherwise relative to the disk 304. In this manner, the position of the read head 302 relative to the disk 304 may be adjusted without breaking the vacuum environment. In alternative aspects, any suitable positioning or leveling features may be provided.

[0048] Fig.11 An exemplary readhead mounting arrangement is shown. The encoder has a disk 304' rotatably mounted on a shaft 306 and the readhead 302' is movably mounted relative to the housing 105 and sealed to the housing 105 by a seal 256. The seal 256 may be an O-ring, a bellows, or other suitable seal that provides sufficient radial, axial, angular, or other movement of the readhead 302 relative to the disk 304 while maintaining a seal such as a vacuum seal. The disk 304 may be a glass or other fabricated opaque construction having a pattern of lines or spaces for optical sensing by the readhead 302' or other optical sensing. The housing 105 has Fig.10 304'. A pin 308 shown in the figure corresponding to a mating slot of the head 302 allows the head 302' to be positively positioned relative to the housing 105 and the disc 304' rotatably mounted therein. Screws 310 are secured to the housing 105 through the vertical slots of the head 302', wherein three sets of screws 312 allow the head 302 to be adjusted radially relative to the disc 304 and horizontally or otherwise relative to the disc 304. A centrifugal member 314 is further provided to be rotationally coupled to the housing 105 and engage with a mating horizontal slot of the read head 302' so that the position of the head 302' relative to the disc 304' can be axially adjusted. In this way, the position of the read head 302' relative to the disc 304' can be adjusted without breaking the vacuum environment. In alternative aspects, any suitable positioning or leveling feature can be provided.

[0049] Figure 12-Figure 19Various combinations of partition walls are shown relative to the motor 108. Here, as will be described, for example, the partition walls can form an enclosure, separation, vacuum or gas barrier to separate two or more areas or environments. The motor 108 is shown in partial cross-section and is exemplary, wherein in alternative embodiments, any suitable motor, combination of motors and / or combination of partition walls can be provided. Fig.12 , the motor 108 has a stator 352 and a rotor 354, each of which can have any suitable combination of cores, magnets, windings, or other. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206 and separates the rotor 354 from the stator 352. Alternatively, the partition wall 356 can be a coating, a plating, an injection molded part, a formed part and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 can be integrally formed as part of the housing 105 or can be separate from the housing 105.

[0050] exist Fig.13 In the embodiment of the present invention, the motor 108 has a stator 352 and a rotor 354, each of which can have a core, a magnet, a winding, or any other suitable combination. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206 and separates the rotor 354 from the stator 352. The partition wall 358 can also be a thin-walled tubular metal structure that separates the environment 204 from the environment 206. Alternatively, the partition walls 356, 358 can be any suitable shape, for example, the partition walls 356, 358 can form an envelope that surrounds part or all of the stator 352 so that the third environment 360 in the envelope is formed to be isolated from the environment 204 and / or the environment 206. Alternatively, the walls 356, 358 can be a coating, a plating, an injection molded part, a formed part, with any shape or any suitable partition wall or a combination of partition walls and wall types. In addition, one or more of the partition walls 356, 358 can be integrally formed as a part of the housing 105 or can be separated from the housing 105.

[0051] exist Fig.14 , the motor 108 has a stator 352 and a rotor 354, each of which can have any suitable combination of cores, magnets, windings, or other. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206. Alternatively, the partition wall 356 can be a coating, a plating, an injection molded part, a formed part and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 can be integrally formed as part of the housing 105 or can be separate from the housing 105.

[0052] exist Fig.15In the embodiment of the present invention, the motor 108 has a stator 352 and a rotor 354, each of which can have a core, magnets, windings, or any other suitable combination. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206, wherein the stator 352 is exposed to the environment 204 and 206 and forms a part of the wall 356. Alternatively, the partition wall 356 can be a coating, a plating, an injection molded part, a formed part and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 can be integrally formed as part of the housing 105 or can be separated from the housing 105.

[0053] exist Fig.16 In the embodiment, the motor 108 has a stator 352 and a rotor 354, each of which can have a core, magnets, windings, or any other suitable combination. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206, wherein the stator 352 is exposed to the environment 204 and 206, and a portion of the wall 356 separates a portion 362 of the stator 352 from another portion 364 of the stator 352. Alternatively, the partition wall 356 can be a coating, a plating, an injection molded portion, a formed portion and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 can be integrally formed as a part of the housing 105 or can be separated from the housing 105.

[0054] exist Fig.17 , the motor 108 has a stator 352 and a rotor 354, each of which can have a core, magnets, windings, or any other suitable combination. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206, wherein the stator 352 is exposed to the environment 204 and 206, and a portion of the wall 356 separates a portion 366 of the stator 352 from another portion 368 of the stator 352. Alternatively, the partition wall 356 can be a coating, a plating, an injection molded portion, a formed portion and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 can be integrally formed as part of the housing 105 or can be separate from the housing 105.

[0055] exist Fig.18, the motor 108 has a stator 352 and a rotor 354, each of which can have any suitable combination of cores, magnets, windings, or other. The partition wall 356 can be a thin-walled tubular metal structure that separates the environment 204 from the environment 206 and separates the rotor 354 from a portion of the stator 352. The partition wall 358 can also be a thin-walled tubular metal structure that separates the environment 204 from the environment 206. Alternatively, the partition walls 356, 358 can be any suitable shape, for example, the partition walls 356, 358 can form an envelope surrounding part or all of the stator 352 so that a third environment 360 within the envelope is formed to be isolated from the environment 204 and / or the environment 206. The stator 352 is shown as having a first portion 370 in the environment 204, a second portion 372 in the environment 360, and a third portion 374 in the environment 206. Alternatively, the walls 356, 358 can be a coating, a plating, an injection molded part, a formed part, having any shape or any suitable partition or combination of partitions and wall types. In addition, one or more of the partitions 356, 358 can be integrally formed as a part of the housing 105 or can be separated from the housing 105.

[0056] exist Fig.19 , the motor 108 has a stator 352 and a rotor 354, each of which may have a core, magnets, windings, or any other suitable combination. The partition wall 356 may be a thin walled tubular metal structure that separates the environment 204 from the environment 206, wherein the stator 352 is exposed to the environments 204 and 206 and forms a portion of the wall 356. The partition wall 358 may be a thin walled tubular metal structure that separates the environment 204 from a portion of the stator 352, wherein the stator 352 is exposed to the environments 204 and 206 and forms a portion of the wall 356. Alternatively, the partition wall 356 may be a coating, a plating, an injection molded portion, a formed portion and have any shape or any suitable partition wall or combination of partition walls and wall types. In addition, the partition wall 356 may be integrally formed as part of the housing 105 or may be separate from the housing 105. In alternative aspects, one or more features may be combined together, such as Figure 12-Figure 23 One or more of the features of the embodiments may be combined in any suitable arrangement or combination.

[0057] Fig. 20An example of a conventional stator 352 and rotor 354 is shown. The stator 352 can have an iron core with teeth (slots), which can provide constant and efficient desired high torque. Alternatively, the stator 352 of the vacuum compatible drive unit can be a toothless (no slots) design, which can provide desired low height blunt teeth. Alternatively, the stator 352 of the vacuum compatible drive unit can be an ironless (coreless) design. Alternatively, the rotor 354 and stator 352 can be any suitable rotor or stator. The stator 352 can be encapsulated by an encapsulation 402, which can be a vacuum compatible epoxy with a filler, or any suitable encapsulation. The encapsulation can completely or partially surround and encapsulate the stator 352. For example, the metal forming the ring 404 or any other suitable material, such as having good heat transfer or other desired characteristics, can be set to contact the housing 105 while a portion (or none) of the encapsulation 402 is in contact with or can also be in contact with the housing 105. Alternatively, the package 402 may not be in contact with the housing 105, for example, where the stator 352, the ring 404 and the package 402 may form a discrete assembly and subsequently be mounted in the housing 105. Here the stator 352 may have the ring 404 pressed into or otherwise fastened thereon and subsequently potted by the package 402. The outer envelope of the package 402 may be formed by emptying a mold with the stator 352 and / or the ring 404 therein and introducing a liquid resin therein. Here, a portion of the ring, the stator or other suitable component may or may not form part of the mold. Alternatively and as will be shown, an integral envelope may form all or part of a mold defining the volume of the package. When formed as an assembly independent of the housing 105, the assembly 352, 404, 402 may then be assembled to the housing 105 by a press fit or other suitable fastening. Here, heat may be transferred from the windings and the lamination or the core of the stator 352 and passed through the package and / or the ring 404 so as to be dissipated through the housing 105. Here, for example, the stator 352 may be compressed or otherwise secured by a fastener, adhesive, or other securing ring 404 in contact with the housing 105, wherein the ring is secured to the stator and / or housing so as to be in sufficient contact with the stator and / or housing to provide a sufficient heat transfer path from the stator to the ring and to the housing or other heat sink. The package 402 may be integrally molded with the housing 105 and the stator 352 or separately, for example, mounted as an assembly with the stator 352 and the ring 404 in the housing 105 or other. The ring 404 may also have an axial hole 424 and a trapezoidal cutout 420, which are formed to facilitate bonding of the package 402 and resolution of internal stresses such as due to thermal expansion of the potting material.Here, the function of the ring 404 can be to provide a path to remove heat from the stator 352 and transfer it to the housing 105, which can be cooled, for example, externally or otherwise, while maintaining a continuous protective barrier around the stator, for example, where the stator can be formed of a laminate, the ring 404 forms a continuous protective barrier as compared to a discontinuous lamination. Alternatively, the encapsulation 402 and the housing 105 can be made of the same material, for example, where the housing 105 and the encapsulation 402 are injection molded as a unitary structure, and the stator is encapsulated in whole or in part in the unitary material 105 and 402. Here, the encapsulation 402 can form a separation barrier and can provide protection from the environment, for example to prevent corrosion, and / or to facilitate heat removal as previously described. Although. Fig. 20 Ring 404 is shown for use in various combinations with stator 352, enclosure 402, and housing 105, alternatively, enclosure 402 may be adapted for use with or without ring, housing 105, or other embodiments as a unitary structure with or without another component or otherwise. All such variations are therefore included.

[0058] like Fig.21 As shown in , the exposed surface of the stator package 402 of the vacuum compatible direct drive unit can be completely or partially coated with a coating 406, for example using electroless nickel plating, to eliminate or minimize exposure of the potting material used for the stator package to a vacuum, atmosphere, sub-atmosphere, pressurization, or other non-atmospheric environment to further reduce the risk of outgassing. Here, the coating 406 can form a separation barrier as previously described. Alternatively, as in Fig. 22 As seen in FIG. 1 , one or more sheets of protective material 408, 410, 412, such as made of stainless steel or another suitable material, may be, for example, as shown in FIG. Fig. 22 402 may be coupled to the stator in a potting process. This may limit exposure of the potting material to the seams between the sheets of protective material. Here, the potting material 402 may form a seal between the sheets 408, 412, 410 or the sheets may be otherwise sealed by, for example, welding, brazing, soldering or by, for example, an O-ring or any other suitable static seal. Here, the sheets 408, 410, 412 and the ring 404 may form a separate barrier as previously described. Here, the stator may, for example, be enclosed in a thin cage or coupled to an envelope of potting material in a potting process. The thin cage or envelope may, for example, be welded from sheets of stainless steel.

[0059] exist Fig.23In, a housing is provided having a sleeve 414, a lower housing 416 and an upper housing 418, for example of aluminum or stainless steel or other suitable material, machined or otherwise formed. Each may be sealed by potting 402 or otherwise sealed, for example by welding, brazing, soldering or by any suitable static seal such as an O-ring or other. Here, potting 402 may not be provided and the interior space of the housing may form, for example, environment 360 or other intermediate environment. Alternatively, more or or less or partial housings may be provided, for example, where the windings of the stator are potted and the teeth are not or otherwise. Here, a small gap may be provided between the stator and the rotor, which preserves the torque output and efficiency of conventional motor designs. Here, with a radial field motor, a separation layer may be included in the stator, for example by coating, bonding or by any other suitable method. As another alternative, the stator may be injection molded or otherwise packaged in a material that is compatible and resistant to vacuum or any other environment to which the stator may be subjected. As another alternative, such as Fig.23 As can be seen in FIG. 1 , the stator may be enclosed in a vacuum sealed container. Similarly, the rotor may be coated, carry a bonded protective layer, injection molded or packaged in a protective material, enclosed in a vacuum sealed container or otherwise protected from the environment in which it may operate.

[0060] The exposed surface of the stator package may be, for example, Fig.21 , for example, by coating with electroless nickel coating to eliminate or minimize exposure of the potting material used for the stator package to a vacuum, or other non-atmospheric environment to further reduce the risk of outgassing. Alternatively, for example, as in Fig. 22 As seen in FIG. 1 , a sheet of protective material, such as stainless steel, may preferably be provided in a manner such as Fig. 22 The potting process shown in Figure 1 is bonded to the stator encapsulation. This limits the exposure of the potting material to the seams between the sheets of protective material. Fig.23 As another alternative, the stator may be enclosed in a thin envelope bonded to the potting material, preferably during potting. The envelope may be welded, for example, from a thin sheet of stainless steel. As another alternative, a thin partition wall, for example in the form of a disk 412, may be present between the stator and the rotor of the axial field motor. Fig. 20 As can be seen in FIG. 1 , the stator can be pressed, glued, clamped, bolted or attached to the housing of the direct drive unit in any other suitable manner.

[0061] The radial, axial or radial-axial field combination motors described above may be coreless (ironless) designs. In another example embodiment having a motor arrangement, a coreless stator having windings and two rotors having magnets may be used, each on one side of the stator. Alternatively, the stator may include an iron core because the passive magnetic forces applied to the core by the two rotors may be balanced. However, another example embodiment having a motor arrangement may include two stators having windings and a single rotor having magnets sandwiched therebetween. A vacuum compatible package including the above-described packaging alternatives and reinforcements may be used to minimize the risk of outgassing and / or enhance heat transfer, or two or more partition walls may be included in the described example embodiments.

[0062] In another embodiment of the vacuum compatible direct drive system of the present invention, the motor configuration used in the above example can be replaced by a different motor topology including but not limited to a mixed field (radial-axial) configuration. For example, the stator and rotor can have a conical, convex v-shaped, concave v-shaped, convex semicircular or concave semicircular profile, any combination of conical, v-shaped and semicircular profiles, or any other suitable profile to form a substantially uniform gap or multiple gaps between the stator and the rotor. A vacuum compatible package including the above-mentioned packaging alternatives and reinforcements for minimizing the risk of gas permeation can be used, or a partition wall of appropriate shape can be present in the gap. An external stator internal rotor and an internal stator external rotor configuration can be used. In an alternative embodiment, the entire housing 105 can be formed or otherwise injection molded, wherein the stator can be directly included in the injection molded housing. As an alternative to injection molding, casting or injection molding or any suitable manufacturing of any suitable alternative material can be provided. In an alternative embodiment, any suitable number of winding phases distributed or otherwise can be provided in the stator. In alternative embodiments, such as with respect to the passive non-magnetic rotor described or any suitable rotor, the rotor may not be solid, for example, where the rotor is laminated and vacuum compatible in some fashion to reduce losses.

[0063] like Fig.24As seen in , a vacuum compatible direct drive system may use a radial field motor device 108 including a wound brushless stator 352 and a rotor 354 having magnets 452 arranged in the vicinity of the stator so that it can rotate relative to the stator and interact with the stator via a magnetic field that is substantially radial relative to the rotor's rotational axis 306. The stator may have windings 454, a core 456, and a backing ring 404. Alternatively, the stator 352 may be coreless wherein the coreless stator may include a set of windings energized by an appropriate controller based on the relative position of the rotor relative to the stator. The rotor 354 may include a set of permanent magnets 452 having alternating polarity. As described, the stator may be encapsulated in a suitable material such as a vacuum compatible epoxy based potting to limit outgassing of the stator components into a vacuum or other non-atmospheric environment. As shown in Fig. 20 As seen in , the packaging can also allow the stator to be coupled to the housing of the direct drive unit to further secure the stator relative to the housing. Figure 2 As seen in FIG, the leads to the windings of the stator can be routed through openings through the encapsulated sealed housing, thereby eliminating the need for a separate vacuum feedthrough as seen in FIG3. Alternatively, the leads from the atmosphere to the windings of the stator of the radial field motor can be routed through a vacuum feedthrough or through the wall of the housing of the direct drive unit in any other suitable manner.

[0064] As in Fig.25 As seen in FIG. 1 , the motor 108 may be a hybrid design motor 108 ′ having a toothed passive rotor 458, stator phase A 460 and stator phase B 462 separated by an annular permanent magnet 464. Suitable examples may be found in U.S. Patent No. 5,834,865, entitled “Hybrid Stepper Motor,” which is incorporated herein by reference in its entirety. Alternatively, an annular magnet may be disposed within the rotor 458. For example, as shown, a solid non-magnetic passive rotor of 400 series stainless steel without magnets, such as 400 series stainless steel, may be provided that does not include permanent magnets and has high magnetic permeability / saturation and low coercivity to reduce outgassing, wherein the stator portion may be provided with one or more partition walls as previously described. This arrangement minimizes exposed material to the vacuum, for example, wherein the magnets are not exposed to the vacuum. Similarly, this non-magnetic passive rotor that does not include permanent magnets may be used in conjunction with any suitable stator such as the exemplary embodiment stator or any of the other disclosed embodiments.

[0065] As in Fig.26 As seen in FIG. 1 , the motor 108 may be a motor 108 that may be designed for an axial field having a rotor 470 with magnets 472 and a stator 474 with a core 476 and windings 478 . Alternatively, the magnets may be disposed within the stator.

[0066] As in Fig. 27As seen in , the motor 108 can be a motor 490 of a brushless design having a passive rotor 494 and a stator 492 as will be described in more detail. Here the stator 492 can have a core 496 (solid or laminated), windings 498 and magnets 500. For example, as shown, a solid non-magnetic passive rotor of, for example, 400 series stainless steel without magnets can be provided to reduce outgassing, wherein the stator portion can be provided with one or more partition walls as previously described. This arrangement minimizes exposed material to the vacuum, for example, wherein the magnets are not exposed to the vacuum. Similarly, this non-magnetic passive rotor, which does not include permanent magnets, can be used in combination with any suitable stator such as the exemplary embodiment stator or any of the other disclosed embodiments.

[0067] As in Fig.28 and Fig.29 As seen in FIG. 1 , the motor 502 is arranged in a manner having Fig. 27 . A liner variation can be found in U.S. Patent No. 7,800,256, entitled "Electric Machine," which is incorporated herein by reference in its entirety. The electric machine 502 has a stator 504 and a toothed passive rotor 506. The rotor 506 can be 400 series stainless steel or any suitable material capable of providing a path for magnetic flux from the stator 504 in the absence of permanent magnets. As previously described, the stator 504 can be separated from the rotor 506 by one or more partition walls 508, 510, wherein the walls 508, 510 can be 300 series stainless steel, aluminum, or other suitable materials that allow field interaction between the rotor 506 and the stator 504. The stator 504 has a protruding winding 512 on the teeth 514, with two alternating magnets 516, 518 on each tooth, and wherein the magnets on adjacent teeth have matching polarity relative to the teeth as shown. Alternatively, a distributed winding can be provided. Flux is selectively directed through a given winding to one of the two magnets on a tooth according to the polarity of the winding. From each tooth, flux is directed through a tooth on the rotor to and adjacent to a tooth of the stator to selectively commutate the motor. In alternative aspects, any suitable motor having a non-magnetic passive rotor may be provided.

[0068] As in Fig.30 and Fig.31 As seen in FIG. 1 , the motor 552 is configured to have Fig. 27 , Fig.28 and Fig.29. The motor 552 has a stator 554 and a toothed passive rotor 556. The rotor 556 can be 400 series stainless steel or any suitable material capable of providing a passage for magnetic flux from the stator 554 without permanent magnets. As previously described, the stator 554 can be separated from the rotor 556 by one or more partition walls 558, 560, wherein the walls 558, 560 can be 300 series stainless steel, aluminum or other suitable materials that allow field interaction between the rotor 556 and the stator 554. The stator 554 has a protruding tangentially wound winding 562 between teeth 564, with two alternating magnets 566, 568 on each tooth, and wherein the magnets on adjacent teeth have matching polarities relative to the teeth as shown. Alternatively, a distributed winding can be provided. Flux is selectively directed to one of the two magnets on a tooth through a given winding according to the polarity of the winding. From each tooth, flux is directed through teeth on the rotor to and adjacent teeth of the stator to selectively commutate the motor.In alternative aspects, any suitable motor having a non-magnetic passive rotor may be provided.

[0069] As in Fig.32 and Fig.33 As seen in FIG. 1 , the motor 602 is configured to have Fig. 27 604. Similar features are shown in FIG. 605. Similar devices can be found in U.S. Patent No. 7,898,135 entitled "Hybrid Permanent Magnet Motor" and U.S. Patent Publication No. 2011 / 0089751A1 entitled "Parallel Magnetic Circuit Motor", both of which are incorporated herein by reference in their entirety. Motor 602 has a stator 604 and a toothed passive rotor 606. Rotor 606 can be 400 series stainless steel or any suitable material capable of providing a path for magnetic flux from stator 604 in the absence of permanent magnets. As previously described, stator 564 can be separated from rotor 606 by one or more partition walls 608, 610, wherein walls 608, 610 can be 300 series stainless steel, aluminum, or other suitable materials that allow field interaction between rotor 606 and stator 604. The stator 604 has raised tangential windings 612 on cores 614, each core having two teeth and having two alternating magnets 616, 618 on each core and wherein the magnets on adjacent cores have opposite polarity relative to the core as shown. Alternatively, a distributed winding may be provided. Flux is selectively directed to one of the two teeth on the core through a given winding according to the polarity of the winding. The flux is directed from each tooth through a tooth on the rotor to and adjacent to a tooth on the stator to selectively commutate the motor. In alternative aspects, any suitable motor having a non-magnetic passive rotor may be provided.

[0070] As in Fig.34 and Fig.35As seen in FIG. 1 , the motor 652 is configured to have Fig. 27 654. A liner variation may be found in U.S. Patent No. 7,800,256, entitled "Electric Machine," which is incorporated herein by reference in its entirety. The motor 652 has a stator 654 and a toothed passive rotor 656. The rotor 656 may be 400 series stainless steel or any suitable material capable of providing a passage for magnetic flux from the stator 504 without permanent magnets. As previously described, the stator 654 may be separated from the rotor 656 by one or more partition walls 658, 660, wherein the walls 658, 660 may be 300 series stainless steel, aluminum, or other suitable material that allows field interaction between the rotor 656 and the stator 654. The stator 654 has a protruding winding 662 on the teeth 664, with two alternating magnets 666, 668 on opposite sides of the core of each tooth, and wherein the magnets on the cores of adjacent teeth have opposite polarity relative to the teeth as shown. Alternatively, a distributed winding may be provided. Flux is selectively directed to the teeth through a given winding according to the polarity of the winding. From each tooth, flux is directed through a tooth on the rotor to and adjacent to a tooth of the stator to selectively commutate the motor. In alternative aspects, any suitable motor having a non-magnetic passive rotor may be provided.

[0071] As in Fig.36 and Fig.37 As seen in FIG. 1 , the motor 702 is configured to have Fig. 27 7,800,256, entitled "Electric Motor," which is incorporated herein by reference in its entirety. The motor 702 has a stator 704 and a toothed passive rotor 706. The rotor 706 can be 400 series stainless steel or any suitable material capable of providing a path for magnetic flux from the stator 504 in the absence of permanent magnets. As previously described, the stator 704 can be separated from the rotor 706 by one or more partition walls 708, 710, wherein the walls 708, 710 can be 300 series stainless steel, aluminum, or other suitable materials that allow field interaction between the rotor 706 and the stator 704. The stator 704 has a protruding winding 712 on a split tooth 714, wherein a magnet 716 splits each tooth, and wherein the magnets on adjacent teeth have opposite polarity relative to the teeth as shown. Alternatively, a distributed winding can be provided. Flux is selectively directed through a given winding to one of the two split parts of a tooth according to the polarity of the winding. From each tooth, flux is directed through a tooth on the rotor to and adjacent to a tooth of the stator to selectively commutate the motor. In alternative aspects, any suitable motor having a non-magnetic passive rotor may be provided.

[0072] The example substrate transfer device may include: a driving portion including a first motor, wherein the first motor includes a stator and a passive rotor; and a first movable arm assembly connected to the first motor. The substrate transfer device may be configured such that the first movable arm assembly may be positioned in the vacuum chamber 4 (see Figure 1 ) in which the passive rotor is connected to the environment inside the vacuum chamber.

[0073] The first motor may be a radial field motor device. The stator may include coils and permanent magnets. The passive rotor may not include coils and permanent magnets. The passive rotor may include a stainless steel one-piece component. The first motor may be a linear motor device. The passive rotor may include a tooth surface facing the stator. The substrate conveying device may also include a gas barrier positioned between the stator and the passive rotor to separate the environment in which the passive rotor is located (the environment in the chamber 4 and extending into the motor area of ​​the drive 10) from the environment in which the stator is located (such as the atmosphere 6). The gas barrier may include at least one partition wall. The partition wall may include stainless steel, or aluminum, or other materials that allow magnetic field interaction between the passive rotor and the stator. The gas barrier may include a housing that surrounds the stator substantially completely. The housing may include a packaging material surrounding the stator. The packaging material may include a cover injection molded polymer material injection molded on the stator.

[0074] An example method may include providing a substrate transfer apparatus including a drive portion and a first movable arm assembly connected to the drive portion, wherein the drive portion includes a motor including a stator and a passive rotor; and connecting the substrate transfer apparatus to a vacuum chamber, wherein the first movable arm assembly is positioned in the vacuum chamber and the passive rotor is in communication with an environment inside the vacuum chamber.

[0075] A substrate conveying device is provided, which includes a stator that may include a coil and a permanent magnet, and a passive rotor that may not have a coil and does not have a permanent magnet. The method may also include positioning a gas barrier between the stator and the passive rotor to separate an environment at the passive rotor from an environment at the stator. The gas barrier may include at least one partition wall positioned between the stator and the passive rotor. The gas barrier may include encapsulating the stator by an encapsulation material. The gas barrier may include enclosing the stator inside an envelope, wherein a wall of the envelope is positioned in a gap between the stator and the passive rotor.

[0076] An example substrate transfer apparatus may include: a drive portion including a first motor, wherein the first motor includes a stator and a passive rotor; a first movable arm assembly connected to the first motor; and a gas barrier positioned in a gap between the stator and the passive rotor to separate an environment at the passive rotor from an environment at the stator.

[0077] It should be understood that the above is merely illustrative. A variety of alternatives and variations may be devised by those skilled in the art. For example, features cited in multiple dependent claims may be combined with one another in any appropriate combination. Furthermore, features from the different embodiments described above may be selectively combined in new embodiments. Therefore, this specification is intended to include all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. A device for a robot driver, comprising: a motor housing configured to form a first environmental region located within the motor housing, the first environmental region being separated from a second environmental region located outside the motor housing, wherein the motor housing includes an electrical connector aperture extending through the motor housing; a plurality of first electrical connectors, wherein each of the plurality of first electrical connectors comprises a protruding pin portion; a plurality of second electrical connectors, wherein each of the plurality of second electrical connectors comprises a socket portion configured to receive the protruding pin portion of a corresponding one of the plurality of first electrical connectors; as well as a housing configured to be mounted to the motor housing, wherein the housing is configured to press the second electrical connector onto a corresponding seal at a corresponding one of the electrical connector holes to seal the electrical connector hole, wherein the second electrical connector contacts and protrudes through the corresponding seal, wherein the protruding pin portion of the first electrical connector is positioned in the socket portion of the second electrical connector, forming an interference fit between the protruding pin portion and the socket portion, thereby connecting the first electrical connector and the second electrical connector, The socket part includes a tapered part, wherein after the protruding pin part is fully inserted into the socket part, the tapered part is configured to be moved to increase the interference fit between the protruding pin part and the socket part, and the outer sleeve of the socket part is configured to be able to be moved to press the socket part so that electrical contact is formed between the socket part and the protruding pin part. 2 . The apparatus of claim 1 , wherein an electrically insulating material is positioned in the electrical connector aperture to electrically insulate the first electrical connector from the motor housing.

3. The device of claim 1, wherein each of the first electrical connectors has a lug that is connected to a thread.

4. The apparatus of claim 1, wherein the seal is positioned in the electrical connector aperture at a seal receiving recess of the motor housing.

5. The apparatus of claim 1, wherein the second electrical connector is at least partially positioned within a portion of the electrical connector aperture. 6 . The device according to claim 1 , wherein the protruding pin portion is configured to expand the socket portion in a state where the protruding pin portion is set into the socket portion.

7. The apparatus of claim 1 further comprising means for enhancing the interference fit between the protruding pin portion and the socket portion.

8. The apparatus of claim 7, wherein the means for enhancing the interference fit between the protruding pin portion and the socket portion comprises the tapered portion of the socket portion.

9. A device for a robot actuator, comprising: a motor housing configured to form a first environmental region located within the motor housing, the first environmental region being separated from a second environmental region located outside the motor housing, wherein the motor housing includes an electrical connector aperture extending through the motor housing; a plurality of first electrical connectors, wherein each of the plurality of first electrical connectors comprises a protruding pin portion; a plurality of second electrical connectors, wherein each of the plurality of second electrical connectors comprises a socket portion configured to receive the protruding pin portion of a corresponding one of the plurality of first electrical connectors; as well as a housing configured to press the second electrical connector against a corresponding seal at the electrical connector hole to seal the electrical connector hole, wherein the second electrical connector protrudes through the corresponding seal, wherein the protruding pin portion of the first electrical connector is positioned in a corresponding socket portion of the second electrical connector, forming a press fit between the protruding pin portion and the socket portion to thereby connect the first electrical connector and the second electrical connector, The socket part includes a tapered part, wherein after the protruding pin part is fully inserted into the socket part, the tapered part is configured to be moved to increase the interference fit between the protruding pin part and the socket part, and the outer sleeve of the socket part is configured to be able to be moved to press the socket part so that electrical contact is formed between the socket part and the protruding pin part.

10. The apparatus of claim 9, wherein an electrically insulating material is positioned in the electrical connector aperture to electrically insulate the first electrical connector from the motor housing.

11. The device of claim 9, wherein each of the first electrical connectors has a lug that is connected to a thread.

12. The apparatus of claim 9, wherein the seal is positioned in a seal receiving recess of the electrical connector aperture.

13. The apparatus of claim 9, wherein the second electrical connector is at least partially positioned within a portion of the electrical connector aperture. 14 . The device according to claim 9 , wherein the protruding pin portion is configured to expand the socket portion in a state where the protruding pin portion is set into the socket portion.

15. The apparatus of claim 9, further comprising means for enhancing the interference fit between the projecting pin portion and the socket portion.

16. The apparatus of claim 15, wherein the means for enhancing the interference fit between the protruding pin portion and the socket portion comprises the tapered portion of the socket portion.

17. A method for a robotic actuator, comprising: inserting a first electrical connector into an electrical connector hole in the motor housing; Pressing the protruding pin portion of the first electrical connector into the socket portion of the corresponding second electrical connector located at the electrical connector hole, wherein the second electrical connector is at least partially positioned in the electrical connector hole, and wherein the protruding pin portion forms an interference fit connection with the corresponding socket portion of the second electrical connector, thereby electrically connecting the first electrical connector and the second electrical connector, and wherein the socket portion includes a tapered portion, wherein after the protruding pin portion is fully inserted into the socket portion, the tapered portion is configured to be moved to increase the interference fit between the protruding pin portion and the socket portion, and the outer sleeve of the socket portion is configured to be able to be moved to compress the socket portion so that electrical contact is formed between the socket portion and the protruding pin portion; At least one group of the second electrical connectors is pressed toward the motor housing through the shell to thereby press the at least one group of the second electrical connectors onto corresponding seals in the electrical connector holes, wherein the seals are positioned in seal receiving recesses of the electrical connector holes, wherein the seals are compressed between the at least one group of the second electrical connectors and the motor housing to seal the electrical connector holes.

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